An in-line gripper and vacuum processing apparatus

Abstract

The utility model relates to vacuum treatment technical field discloses a kind of built-in clamp and vacuum processing equipment, the built-in clamp includes mounting shaft, first clamping component and second clamping component;First clamping component includes support sleeve, dog, drive seat and drive rod, support sleeve is movably set on the outside of mounting shaft along axial direction, and the one end of dog is hinged in support sleeve;Drive seat is movably arranged on support sleeve along axial direction, and the one end of drive rod is hinged in drive seat, and the other end of drive rod is hinged in dog;Second clamping component is arranged in mounting shaft, and second clamping component can be clamped in one of two flange portions in channel, and the dog of first clamping component can be clamped in the other of two flange portions in channel after stretching.The utility model makes the surface of the both sides of the piece to be treated completely exposed by clamping two flange portions from the inside of the channel of the piece to be treated, avoids the non-uniformity of the piece to be treated in vacuum treatment caused by shielding interference.

Description

Technical Field

[0001] This utility model relates to the field of vacuum processing technology, and in particular to a built-in clamp and vacuum processing equipment. Background Technology

[0002] Vacuum processing equipment is a type of equipment used for various processing techniques in a vacuum environment. Its applications are wide-ranging, including but not limited to vacuum coating equipment and vacuum etching equipment. Throughout the vacuum processing process, the performance of the fixtures used to hold and hold the workpieces is crucial; the performance and design of the fixtures directly affect the processing effect, production efficiency, and production costs.

[0003] In the prior art, the fixture used for vacuum treatment is fixed by clamping the two ends of the workpiece with end caps. However, this fixture structure will directly contact the outer surfaces of the two sides of the workpiece, causing the two ends of the workpiece to be blocked, which in turn causes the problem of uneven vacuum treatment caused by interference. Utility Model Content

[0004] The purpose of this invention is to provide a built-in fixture and vacuum processing equipment to solve the problem that the fixture structure in the prior art directly contacts the outer surfaces of both sides of the workpiece, causing the ends of both sides of the workpiece to be blocked, which in turn causes uneven vacuum processing due to interference.

[0005] To achieve this objective, the present invention adopts the following technical solution:

[0006] On one hand, this utility model provides a built-in clamp for holding a receiving component, wherein the component to be processed has a through-hole channel, and the inner walls at both ends of the channel are provided with flanges. The built-in clamp includes:

[0007] Mounting shaft, which can pass through the channel;

[0008] A first snap-fit ​​assembly includes a support sleeve, a claw, a drive seat, and a drive rod. The support sleeve is axially movably sleeved on the mounting shaft, and one end of the claw is hinged to the support sleeve. The drive seat is axially movably mounted on the support sleeve, and one end of the drive rod is hinged to the drive seat, while the other end of the drive rod is hinged to the claw. The drive seat can drive the claw to extend or retract radially along the support sleeve via the drive rod.

[0009] The second snap-fit ​​assembly is disposed on the mounting shaft and is capable of snapping into one of the two flange portions within the channel. The claw of the first snap-fit ​​assembly, after being extended, is capable of snapping into the other of the two flange portions within the channel.

[0010] The built-in clamp further includes a first locking member for fixing the support sleeve to the mounting shaft, and / or the built-in clamp further includes an elastic member, which is sleeved outside the mounting shaft and its two ends elastically abut against the support sleeve and the second snap-fit ​​assembly, respectively.

[0011] As an alternative to the aforementioned built-in clamp, the free end of the chuck has an extended engaging portion, and the end of the drive rod near the chuck has a clearance groove. The engaging portion of the chuck can extend out of the clearance groove in the radial direction or retract into the clearance groove in the radial direction.

[0012] As an alternative to the aforementioned built-in clamp, the free end of the locking portion has an arc-shaped chamfer.

[0013] As an alternative to the aforementioned built-in clamp, the maximum distance between the axis of the support sleeve and the claw after it extends radially is greater than the inner diameter of the channel.

[0014] As an alternative to the aforementioned built-in clamp, the first snap-fit ​​assembly further includes a fixing member for fixing the drive seat to the support sleeve.

[0015] As an alternative to the aforementioned built-in clamp, the second locking assembly includes a top plug and a second locking member. The top plug is sleeved outside the mounting shaft, and the second locking member is used to fix the top plug to the mounting shaft. The top plug can pass through one of the two flanges under the drive of the mounting shaft and lock onto the other.

[0016] As an alternative to the aforementioned built-in clamp, the top plug has a frustum portion, a portion of which is inserted into the flange portion.

[0017] As an alternative to the aforementioned built-in clamp, the second snap-fit ​​component has the same structural configuration as the first snap-fit ​​component.

[0018] As an alternative to the aforementioned built-in clamp, the drive seat is a ring structure, and there are several claws and several drive rods. Several claws are arranged around the support sleeve, and several drive rods are arranged around the drive seat, with each claw and drive rod corresponding to the others.

[0019] On the other hand, this utility model provides a vacuum processing device, including the built-in clamp as described above.

[0020] The beneficial effects of this utility model are:

[0021] The built-in clamp includes a mounting shaft, a first locking assembly, and a second locking assembly. The first locking assembly includes a support sleeve, a jaw, a drive seat, and a drive rod. The support sleeve is axially movable and sleeved around the mounting shaft. One end of the jaw is hinged to the support sleeve. The drive seat is axially movable and mounted on the support sleeve. One end of the drive rod is hinged to the drive seat. Thus, when the support sleeve moves axially on the mounting shaft, it can drive the jaw, drive seat, and drive rod to move synchronously, and the other end of the drive rod is hinged to the jaw. The drive seat can drive the jaw to extend or retract radially along the support sleeve through the drive rod. That is, when the drive seat moves on the support sleeve, the drive rod can rotate, and the jaw can also rotate relative to the support sleeve under the drive of the drive rod. Meanwhile, the second snap-fit ​​assembly is located on the mounting shaft, which can pass through the channel. The second snap-fit ​​assembly can snap onto one of the two flanges within the channel. When the claw of the first snap-fit ​​assembly is extended, it can snap onto the other of the two flanges within the channel. That is, the mounting shaft drives the second snap-fit ​​assembly to snap onto one of the two flanges directly from inside the channel. When the claw is in the retracted state, the support sleeve can drive the claw to enter the channel of the workpiece from the outside, and snap onto the other of the two flanges when the claw is in the extended state. The built-in clamp includes a first locking element for fixing the support sleeve to the mounting shaft, and / or an elastic element that is sleeved outside the mounting shaft and elastically abuts against the support sleeve and the second locking assembly at both ends. When the first locking element is used alone, it fixes the support sleeve to the mounting shaft, enabling the adjusted support sleeve to be secured on the shaft. When the elastic element is used alone, its elastic drive ensures that the support sleeve and the second locking assembly always move away from each other, allowing the first and second locking assemblies to automatically engage with the two flanges and restricting the movement of the support sleeve. Using both the first locking element and the elastic element further improves the reliability of the built-in clamp. This built-in clamp, through the first and second locking assemblies, can engage the two flanges from inside the channel of the workpiece, fully exposing the outer surfaces on both sides of the workpiece and preventing unevenness during vacuum processing caused by obstruction and interference. Attached Figure Description

[0022] Figure 1 This is a schematic diagram of the structure of the built-in clamp card receiving and processing component provided in this embodiment of the utility model;

[0023] Figure 2 This is a cross-sectional view of the built-in clamp card receiving and processing component provided in this embodiment of the utility model;

[0024] Figure 3 This is a schematic diagram of the first state structure of the built-in clamp card receiving and processing component provided in this embodiment of the utility model;

[0025] Figure 4 This is a schematic diagram of the second state structure of the built-in clamp card receiving and processing component provided in this embodiment of the utility model;

[0026] Figure 5 This is a schematic diagram of the third state structure of the built-in clamp card receiving and processing component provided in this embodiment of the utility model;

[0027] Figure 6 This is a schematic diagram of the fourth state structure of the built-in clamp card receiving and processing component provided in this embodiment of the utility model.

[0028] In the picture:

[0029] 1. Mounting shaft; 2. First snap-fit ​​assembly; 21. Support sleeve; 22. Claw; 221. Snap-fit ​​part; 23. Drive seat; 24. Drive rod; 241. Clearance groove; 3. Second snap-fit ​​assembly; 31. Top plug; 311. Frustum; 4. Elastic element; 5. Part to be processed; 51. Channel; 52. Flange. Detailed Implementation

[0030] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0031] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance. The terms "first position" and "second position" refer to two different positions. Moreover, "above," "on top of," and "over" the first feature in relation to the second feature includes the first feature directly above and diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "under," and "below" the first feature in relation to the second feature includes the first feature directly below and diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0032] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0033] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this utility model, and should not be construed as limiting this utility model.

[0034] The technical solution of this utility model will be further described below with reference to the accompanying drawings and specific embodiments.

[0035] like Figures 1-6 As shown, this utility model provides a built-in clamp for holding the receiving and processing component 5. The component 5 is provided with a channel 51, and the inner walls at both ends of the channel 51 are provided with flanges 52.

[0036] The built-in clamp includes a mounting shaft 1, a first locking assembly 2, and a second locking assembly 3. The first locking assembly 2 includes a support sleeve 21, a jaw 22, a drive seat 23, and a drive rod 24. The support sleeve 21 is axially movable and sleeved on the outside of the mounting shaft 1. One end of the jaw 22 is hinged to the support sleeve 21. The drive seat 23 is axially movable and mounted on the support sleeve 21. One end of the drive rod 24 is hinged to the drive seat 23. Thus, when the support sleeve 21 moves axially on the mounting shaft 1, it can drive the jaw 22, the drive seat 23, and the drive rod 24 to move synchronously. The other end of the drive rod 24 is hinged to the jaw 22. The drive seat 23 can drive the jaw 22 to extend or retract radially along the support sleeve 21 through the drive rod 24. That is, when the drive seat 23 moves on the support sleeve 21, the drive rod 24 can rotate, and the jaw 22 can also rotate relative to the support sleeve 21 under the drive of the drive rod 24.

[0037] Meanwhile, the second snap-fit ​​component 3 is located on the mounting shaft 1, which can pass through the channel 51. The second snap-fit ​​component 3 can snap onto one of the two flange portions 52 within the channel 51. After the first snap-fit ​​component 2 extends, the claw 22 can snap onto the other of the two flange portions 52 within the channel 51. That is, the mounting shaft 1 drives the second snap-fit ​​component 3 to directly snap onto one of the two flange portions 52 from inside the channel 51. When the claw 22 is in the retracted state, the support sleeve 21 can drive the claw 22 to enter the channel 51 of the workpiece 5 from the outside, and snap onto the other of the two flange portions 52 when the claw 22 is in the extended state.

[0038] The built-in clamp also includes a first locking member for fixing the support sleeve 21 to the mounting shaft 1, and / or the built-in clamp also includes an elastic member 4, which is sleeved on the outside of the mounting shaft 1 and elastically abuts against the support sleeve 21 and the second snap-fit ​​assembly 3 at both ends. That is, when the first locking member is provided alone, the support sleeve 21 is fixed to the mounting shaft 1, enabling the fixed position of the adjusted support sleeve 21 on the mounting shaft 1; when the elastic member 4 is provided alone, the elastic drive of the elastic member 4 ensures that the support sleeve 21 and the second snap-fit ​​assembly 3 always have a mutual moving drive, thereby enabling the first snap-fit ​​assembly 2 and the second snap-fit ​​assembly 3 to automatically snap into place with the two flange portions 52 respectively, and restricting the movement of the support sleeve 21; when both the first locking member and the elastic member 4 are provided, the reliability of the built-in clamp is further improved. Optionally, the first locking member is a fastener such as a screw.

[0039] The built-in clamp, through the first snap-fit ​​assembly 2 and the second snap-fit ​​assembly 3, can snap the two flange portions 52 from inside the channel 51 of the workpiece 5, so that the outer surfaces on both sides of the workpiece 5 are fully exposed, thereby avoiding the problem of unevenness of the workpiece 5 during vacuum processing caused by obstruction and interference. Optionally, the drive seat 23 is located on the side of the jaw 22 opposite to the second snap-fit ​​assembly 3, so that the operator can move the drive seat 23 to adjust the extension and retraction states of the jaw 22.

[0040] like Figures 2-6As shown, the free end of the claw 22 has an extended engaging portion 221. The end of the drive rod 24 near the claw 22 has a clearance groove 241. The engaging portion 221 of the claw 22 can extend radially out of the clearance groove 241, allowing the engaging portion 221 to radially approach the inner wall of the channel 51 of the workpiece 5, facilitating engagement between the engaging portion 221 and the flange portion 52. Alternatively, it can radially retract into the clearance groove 241, allowing the engaging portion 221 to radially move away from the inner wall of the channel 51 of the workpiece 5, facilitating the entry and exit of the claw 22 into or out of the channel 51 of the workpiece 5. Optionally, the free end of the engaging portion 221 has a chamfered arc, so that the engaging portion 221 will not scratch or damage the flange portion 52 when engaging it. Among them, the maximum distance between the axis of the support sleeve 21 and the claw 22 after radial extension is greater than the inner diameter of the channel 51, so the rotation of the claw 22 in the channel 51 of the workpiece 5 is limited. That is, after the claw 22 rotates relative to the support sleeve 21 and moves closer to the inner wall of the channel 51, it will eventually abut against the inner wall of the channel 51 of the workpiece 5, thereby facilitating the use of the built-in clamp.

[0041] Furthermore, the first snap-fit ​​assembly 2 also includes a fixing member for fixing the drive seat 23 to the support sleeve 21, thereby fixing the position and rotation angle of the claw 22 relative to the support sleeve 21 and preventing the workpiece 5 from vibrating relative to the built-in clamp, which would affect the vacuum processing effect of the workpiece 5. Optionally, the fixing member is a fastener such as a screw.

[0042] Furthermore, the drive seat 23 has a ring structure, and both the claws 22 and the drive rods 24 include several. Several claws 22 are arranged around the support sleeve 21, and several drive rods 24 are arranged around the drive seat 23. The several claws 22 and several drive rods 24 correspond one-to-one. Thus, when the drive seat 23 drives several drive rods 24 to rotate, it can drive several claws 22 to extend or retract synchronously, thereby improving the reliability of the built-in clamps in holding the receiving and processing parts 5.

[0043] In one embodiment, the second snap-fit ​​assembly 3 includes a top plug 31 and a second locking member. The top plug 31 is sleeved on the outside of the mounting shaft 1, and the second locking member is used to fix the top plug 31 to the mounting shaft 1. The top plug 31 can pass through one of the two flanges 52 under the drive of the mounting shaft 1 and snap onto the other. That is, when the inner diameters of the two flanges 52 are different, the top plug 31 of the required size is fixed on the mounting shaft 1 by the second locking member, so that the top plug 31 can enter the channel 51 of the workpiece 5 from the flange with the larger inner diameter, and then snap onto the other flange with the smaller inner diameter under the drive of the mounting shaft 1. The claw 22 of the first snap-fit ​​assembly 2 can then snap onto the flange with the larger inner diameter, thereby realizing the snap-fit ​​of the workpiece 5 by the built-in clamp. The second snap-fit ​​assembly 3 has a simple structure and low cost. Optionally, the top plug 31 has a frustum 311, a portion of which is inserted into the flange 52. This frustum 311 ensures the coaxiality of the mounting shaft 1 and the workpiece 5. Further optionally, the second locking element is a fastener such as a screw. In another embodiment, the second locking assembly 3 has the same structure as the first locking assembly 2, so that when the inner diameters of the two flanges 52 are different or the same, the first locking assembly 2, in conjunction with the second locking assembly 3, can achieve the locking of the workpiece 5 by the built-in clamp.

[0044] This embodiment also provides a vacuum processing device, including the built-in clamp as described above. By using the built-in clamp as described above, the vacuum processing device can engage two flange portions 52 from inside the channel 51 of the workpiece 5 to be processed, so that the outer surfaces on both sides of the workpiece 5 to be processed are fully exposed, thereby avoiding the problem of unevenness of the workpiece 5 to be processed during vacuum processing caused by obstruction and interference.

[0045] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present utility model, and are not intended to limit the implementation of the present utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively list all possible implementations here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A built-in clamp for holding a receiving component (5), wherein the component (5) is provided with a through channel (51), and the inner walls at both ends of the channel (51) are provided with flanges (52), characterized in that, The built-in clamp includes: Mounting shaft (1), which can pass through the channel (51); The first snap-fit ​​assembly (2) includes a support sleeve (21), a claw (22), a drive seat (23), and a drive rod (24). The support sleeve (21) is axially movable and sleeved on the mounting shaft (1). One end of the claw (22) is hinged to the support sleeve (21). The drive seat (23) is axially movable and mounted on the support sleeve (21). One end of the drive rod (24) is hinged to the drive seat (23), and the other end of the drive rod (24) is hinged to the claw (22). The drive seat (23) can drive the claw (22) to extend or retract radially along the support sleeve (21) through the drive rod (24). The second snap-fit ​​assembly (3) is disposed on the mounting shaft (1). The second snap-fit ​​assembly (3) can snap into one of the two flange portions (52) in the channel (51). The claw (22) of the first snap-fit ​​assembly (2) can snap into the other of the two flange portions (52) in the channel (51) after being extended. The built-in clamp also includes a first locking member for fixing the support sleeve (21) to the mounting shaft (1), and / or the built-in clamp also includes an elastic member (4) which is sleeved on the mounting shaft (1) and elastically abuts the support sleeve (21) and the second snap-fit ​​assembly (3) at both ends respectively.

2. The built-in clamp according to claim 1, characterized in that, The free end of the claw (22) has an extended locking portion (221), and the drive rod (24) has a relief groove (241) at one end near the claw (22). The locking portion (221) of the claw (22) can extend out of the relief groove (241) in the radial direction, or retract into the relief groove (241) in the radial direction.

3. The built-in clamp according to claim 2, characterized in that, The free end of the snap-fit ​​part (221) has an arc-shaped chamfer.

4. The built-in clamp according to claim 1, characterized in that, The maximum distance between the axis of the support sleeve (21) and the claw (22) after extending radially is greater than the inner diameter of the channel (51).

5. The built-in clamp according to claim 1, characterized in that, The first snap-fit ​​assembly (2) further includes a fixing member for fixing the drive seat (23) to the support sleeve (21).

6. The built-in clamp according to claim 1, characterized in that, The second snap-fit ​​assembly (3) includes a top plug (31) and a second locking member. The top plug (31) is sleeved on the outside of the mounting shaft (1), and the second locking member is used to fix the top plug (31) to the mounting shaft (1). The top plug (31) can pass through one of the two flanges (52) under the drive of the mounting shaft (1) and snap onto the other.

7. The built-in clamp according to claim 6, characterized in that, The top plug (31) has a frustum (311), a portion of which is inserted into the flange (52).

8. The built-in clamp according to claim 1, characterized in that, The second snap-fit ​​component (3) has the same structure as the first snap-fit ​​component (2).

9. The built-in clamp according to any one of claims 1 to 8, characterized in that, The drive seat (23) is a ring structure. The claws (22) and the drive rods (24) are all included in a plurality of them. The plurality of claws (22) are arranged around the support sleeve (21), and the plurality of drive rods (24) are arranged around the drive seat (23). The plurality of claws (22) and the plurality of drive rods (24) correspond one-to-one.

10. A vacuum processing device, characterized in that, Includes the built-in clamp as described in any one of claims 1 to 9.

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