Flow control structure of an optical coating machine

Abstract

The utility model discloses a flow control structure of optical coating machine relates to optical coating machine is with flow control technical field, including sealed box body, fixedly connected with chlorine pipe in sealed box body, chlorine pipe both ends are through sealed box body and are located sealed box body outside, fixedly connected with vacuum regulating valve and mass flow controller on chlorine pipe, vacuum regulating valve and mass flow controller all are located sealed box body inside, the utility model discloses through setting up the gas guide pipe and the indicating tube of transparent glass material, cooperate the specificity precipitation reaction of precipitation indicating liquid and chlorine gas, and the staff can obtain the leakage condition in real time through observing solution turbidity or flocculate, and the gas guide pipe of big inner diameter is convenient for the fast entry of leakage gas, and the indicating tube of small inner diameter improves the contact efficiency of gas and indicating liquid, and accelerates silver chloride precipitation formation, is favorable for the fast capture of trace gas leakage and is reflected through solution change, overcomes the defect that manual inspection is not sensitive to trace leakage.

Description

Technical Field

[0001] This utility model relates to the field of flow control technology for optical coating machines, specifically to a flow control structure for an optical coating machine. Background Technology

[0002] Optical coating machines are used to prepare thin films on the surface of optical components (such as lenses, prisms, etc.). Through physical or chemical methods, materials such as metals and metal oxides are evaporated or sputtered to form a uniform thin film with specific optical properties on the substrate surface. Since coating is a dynamic process, the process requirements also change as the number of coating layers increases and the film thickness changes. At this time, a flow control structure is needed to control the gas flow in real time.

[0003] During the coating process, if the flow control structure is not properly sealed, it can lead to gas leakage or the intrusion of external air, altering the gas composition and pressure within the reaction chamber. This can cause problems such as uneven film thickness and refractive index deviation, reducing the coating yield and increasing energy consumption and production costs over the long term. Existing flow control structures generally rely on manual inspections, making real-time monitoring difficult. They struggle to detect leaks immediately and are unable to detect even minute leaks, which, if accumulated, can negatively impact coating quality and production safety.

[0004] To address these issues, we designed a flow control structure for an optical coating machine. Utility Model Content

[0005] The purpose of this invention is to provide a flow control structure for an optical coating machine to solve the problems mentioned in the background art.

[0006] To solve the above-mentioned technical problems, this utility model provides a flow control structure for an optical coating machine, including a sealed box body. A chlorine gas pipe is fixedly connected inside the sealed box body. Both ends of the chlorine gas pipe pass through the sealed box body and are located outside the sealed box body. A vacuum regulating valve and a mass flow controller are fixedly connected to the chlorine gas pipe. Both the vacuum regulating valve and the mass flow controller are located inside the sealed box body. A visual leak detection mechanism is provided on the outside of the sealed box body.

[0007] Furthermore, the visual leak detection mechanism includes a detection cover fixedly fitted on the outside of the sealed box body. The sealed box body consists of a top cover and a bottom shell. A detection chamber is opened inside the detection cover. Air guide tubes are evenly distributed around the bottom of the detection cover. The air guide tubes are connected to the detection chamber. An indicator tube is fixedly connected to the bottom end of the air guide tube. The indicator tube contains a sedimentation indicator liquid. The initial liquid level of the sedimentation indicator liquid is lower than the top of the air guide tube. The indicator tube is U-shaped. The end of the indicator tube away from the air guide tube extends vertically upward and is higher than the top of the air guide tube.

[0008] Furthermore, a one-way valve is fixedly connected to the outlet end of the chlorine pipe, and the one-way valve is located inside the sealed box.

[0009] Furthermore, the top cover of the sealed box is fitted with an observation window, a pressure sensor is fixedly connected to the inner wall of the sealed box, and an alarm is fixedly connected to the outer side of the sealed box. The alarm is electrically connected to the pressure sensor.

[0010] Furthermore, the end of the indicator tube away from the air guide tube has an opening, and a superhydrophobic porous membrane is fixedly connected to the opening. The superhydrophobic porous membrane is made of polypropylene nanofiber material.

[0011] Furthermore, the inner wall of the detection cover is tightly fitted to the outer wall of the sealed box.

[0012] Furthermore, sealing rings are embedded on opposite sides of the top cover and bottom shell of the sealed box, and the detection cavity is aligned with the sealing rings.

[0013] Furthermore, the inner diameter of the air guide tube is larger than the inner diameter of the indicator tube, and both the air guide tube and the indicator tube are made of transparent glass.

[0014] Compared with the prior art, the beneficial effects of this utility model are:

[0015] 1. By setting up transparent glass gas guide tubes and indicator tubes, and in conjunction with the specific precipitation reaction between the precipitating indicator liquid and chlorine gas, staff can observe the turbidity or flocculent matter in the solution to obtain real-time information about leaks, avoiding the hidden danger of leaked gas going undetected for a long time. The large inner diameter of the gas guide tube facilitates the rapid entry of leaked gas, while the small inner diameter of the indicator tube improves the contact efficiency between the gas and the indicator liquid, accelerating the formation of silver chloride precipitate. This is conducive to quickly capturing trace gas leaks and reflecting them through changes in the solution, overcoming the shortcomings of manual inspections being insensitive to trace leaks. By setting up a vacuum regulating valve and a mass flow controller, the pressure and flow rate in the chlorine gas tube are precisely controlled, improving the coating yield.

[0016] 2. By setting up pressure sensors and alarms, the system can quickly respond to large leaks of gas by triggering alarms based on pressure changes. In addition, it can cooperate with visual leak detection mechanisms to achieve dual detection, which reduces the risk of misjudgment or missed detection that may occur with a single detection method, making leak detection more accurate and response more timely. Attached Figure Description

[0017] Figure 1 This is a schematic diagram of the structure of this utility model;

[0018] Figure 2 This is a schematic diagram of the internal structure of the sealing box of this utility model;

[0019] Figure 3 This is a side view of the sealed box of this utility model in the open state;

[0020] Figure 4 This is a cross-sectional view of the air guide tube and indicator tube of this utility model:

[0021] Figure 5 This is a partial structural diagram of the detection cover of this utility model.

[0022] In the diagram: 1. Detection cover; 2. Sealed box; 3. Chlorine gas pipe; 4. Detection chamber; 5. Pressure sensor; 6. One-way valve; 7. Mass flow controller; 8. Vacuum regulating valve; 9. Sealing ring; 10. Alarm; 11. Gas guide pipe; 12. Indicator tube; 13. Superhydrophobic porous membrane; 14. Precipitation indicator liquid; 15. Observation window. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] Please see Figures 1-5 This utility model provides a technical solution: a flow control structure for an optical coating machine, including a sealed box 2, a chlorine pipe 3 fixedly connected inside the sealed box 2, both ends of the chlorine pipe 3 penetrating the sealed box 2 and located outside the sealed box 2, one end of the chlorine pipe 3 located outside the sealed box 2 is the inlet end, which is connected to an external chlorine supply source, and the other end is the outlet end, which is connected to the reaction chamber of the optical coating machine.

[0025] A vacuum regulating valve 8 and a mass flow controller 7 are fixedly connected to the chlorine gas pipe 3. Both the vacuum regulating valve 8 and the mass flow controller 7 are located inside the sealed box 2. A visual leak detection mechanism is provided on the outside of the sealed box 2. The visual leak detection mechanism includes a detection cover 1 fixedly sleeved on the outside of the sealed box 2. The sealed box 2 consists of a top cover and a bottom shell. A detection chamber 4 is opened on the inside of the detection cover 1. Gas guide pipes 11 are evenly distributed around the bottom of the detection cover 1. The gas guide pipes 11 are connected to the detection chamber 4. An indicator pipe 12 is fixedly connected to the bottom end of the gas guide pipe 11. The indicator pipe 12 contains a precipitation indicator liquid 14. The precipitation indicator liquid 14 is specifically a silver nitrate solution. When it comes into contact with chlorine-containing gas, it will react to generate a white silver chloride precipitate. The solution will become turbid or have white flocculent matter, which is used to indicate a leak. The initial liquid level of the precipitation indicator liquid 14 is lower than the top of the gas guide tube 11. The indicator tube 12 is U-shaped, with the end of the indicator tube 12 away from the gas guide tube 11 extending vertically upward and higher than the top of the gas guide tube 11. The inner diameter of the gas guide tube 11 is larger than the inner diameter of the indicator tube 12, which facilitates the entry of leaked gas in the detection chamber 4 into the indicator tube 12. Since the solution turbulence is more obvious in a smaller inner diameter under the same gas volume, the reaction efficiency is higher. Therefore, the inner diameter of the indicator tube 12 is smaller, which allows the leaked gas to have more sufficient contact with the precipitation indicator liquid 14 and accelerates the precipitation reaction. Both the gas guide tube 11 and the indicator tube 12 are made of transparent glass, which makes it easy for operators to visually judge the leakage situation.

[0026] In practice, the inlet end of the chlorine pipe 3 is connected to an external chlorine supply source, and the outlet end is connected to the reaction chamber of the optical coating machine. The chlorine flow rate is adjusted by the mass flow controller 7, and the pressure inside the pipe is controlled by the vacuum regulating valve 8. If a chlorine leak occurs during operation, the leaked gas enters the detection chamber 4 through the gap between the sealed box 2 and the detection cover 1, and then diffuses into the U-shaped indicator tube 12 through the gas guide tube 11. It reacts with the precipitation indicator liquid 14 in the indicator tube 12 to generate a white silver chloride precipitate. The leak can be determined by observing whether the precipitation indicator liquid 14 becomes turbid or flocculent.

[0027] See Figure 2 As shown, a one-way valve 6 is fixedly connected to the outlet end of the chlorine pipe 3. The one-way valve 6 is located inside the sealed box 2. The one-way valve 6 prevents the gas in the reaction chamber of the optical coating machine from flowing back to the chlorine pipe 3, thus avoiding interference with the chlorine flow control accuracy or contamination of the vacuum regulating valve 8 and the mass flow controller 7.

[0028] See Figures 1-3The top cover of the sealed box 2 is fitted with an observation window 15. A pressure sensor 5 is fixedly connected to the inner wall of the sealed box 2, and an alarm 10 is fixedly connected to the outer side of the sealed box 2. The alarm 10 is electrically connected to the pressure sensor 5, and the alarm 10 and the pressure sensor 5 are electrically connected through a signal conditioning circuit containing an analog-to-digital converter. The pressure sensor 5 monitors pressure changes in real time, and the alarm 10 is used to issue an alarm. The operator can view the internal situation through the observation window 15 to realize leakage detection and flow control.

[0029] See Figure 4 The end of the indicator tube 12 away from the gas guide tube 11 has an opening, and a superhydrophobic porous membrane 13 is fixedly connected to the opening. The superhydrophobic porous membrane 13 is made of polypropylene nanofiber material. The superhydrophobic porous membrane 13 has air permeability, allowing the gas pressure in the detection chamber 4 to be balanced with the outside through the opening, avoiding the entry of leaked gas into the indicator tube 12 due to pressure difference. The superhydrophobic properties can prevent the precipitated indicator liquid 14 from overflowing due to capillary action or gas pressure.

[0030] See Figures 1-5 The inner wall of the detection cover 1 is tightly fitted to the outer wall of the sealing box 2. The top cover and bottom shell of the sealing box 2 are fitted with sealing rings 9 on opposite sides. The detection chamber 4 is aligned with the sealing rings 9, so that the detection chamber 4 is sealed. Leaked chlorine gas can only enter the indicator tube 12 through the preset gas guide tube 11, which improves the accuracy and sensitivity of leak detection and avoids gas leakage to non-detection areas, thus preventing misjudgment.

[0031] Working principle:

[0032] The inlet of chlorine pipe 3 is connected to an external chlorine supply source, and the outlet is connected to the reaction chamber of the optical coating machine. The chlorine flow rate is adjusted by mass flow controller 7, and the pipeline pressure is controlled by vacuum regulating valve 8. If a leak occurs during operation, chlorine enters the detection chamber 4 through the gap between the sealed box 2 and the detection hood 1, and enters the U-shaped indicator tube 12 through the gas guide tube 11 to react with the precipitation indicator liquid 14 to generate a white precipitate. The operator judges the leak by observing whether the precipitation indicator liquid 14 is turbid. After the leaked chlorine enters the sealed box 2, it will cause the internal gas pressure to increase. When the pressure sensor 5 detects the pressure abnormality, it triggers the alarm 10 through the signal conditioning circuit and analog-to-digital converter.

[0033] The above description is merely an embodiment of this utility model and does not limit the patent scope of this utility model. Any equivalent structural or procedural transformations made based on the content of this utility model specification and drawings, or direct or indirect applications in other related technical fields, are similarly included within the patent protection scope of this utility model.

Claims

1. A flow control structure of an optical coating machine, comprising a sealed box body (2), characterized in that, A chlorine gas pipe (3) is fixedly connected inside the sealed box (2). Both ends of the chlorine gas pipe (3) pass through the sealed box (2) and are located outside the sealed box (2). A vacuum regulating valve (8) and a mass flow controller (7) are fixedly connected to the chlorine gas pipe (3). Both the vacuum regulating valve (8) and the mass flow controller (7) are located inside the sealed box (2). A visual leak detection mechanism is provided on the outside of the sealed box (2). The visual leak detection mechanism includes a detection cover (1) fixedly sleeved on the outside of the sealed box (2). The sealed box (2) is composed of a top cover and a bottom shell. The detection cover (1) has a detection chamber (4) inside. The bottom of the detection cover (1) is evenly distributed with air guide tubes (11). The air guide tubes (11) are connected to the detection chamber (4). The bottom end of the air guide tubes (11) is fixedly connected to an indicator tube (12). The indicator tube (12) is filled with a precipitation indicator liquid (14). The initial liquid level of the precipitation indicator liquid (14) is lower than the top of the air guide tube (11). The indicator tube (12) is U-shaped. The end of the indicator tube (12) away from the air guide tube (11) extends vertically upward and is higher than the top of the air guide tube (11).

2. The flow control structure of an optical coating machine as described in claim 1, characterized in that: A one-way valve (6) is fixedly connected to the outlet end of the chlorine pipe (3), and the one-way valve (6) is located inside the sealed box (2).

3. The flow control structure of an optical coating machine as described in claim 1, characterized in that: The top cover of the sealed box (2) is fitted with an observation window (15), a pressure sensor (5) is fixedly connected to the inner wall of the sealed box (2), and an alarm (10) is fixedly connected to the outer side of the sealed box (2). The alarm (10) is electrically connected to the pressure sensor (5).

4. The flow control structure of an optical coating machine as described in claim 1, characterized in that: The end of the indicator tube (12) away from the air guide tube (11) has an opening, and a superhydrophobic porous membrane (13) is fixedly connected to the opening. The superhydrophobic porous membrane (13) is made of polypropylene nanofiber material.

5. The flow control structure of an optical coating machine as described in claim 1, characterized in that: The inner wall of the detection cover (1) is tightly fitted to the outer wall of the sealed box (2).

6. The flow control structure of an optical coating machine as described in claim 1, characterized in that: The top cover and bottom shell of the sealed box (2) are fitted with sealing rings (9) on opposite sides, and the detection cavity (4) is aligned with the sealing rings (9).

7. The flow control structure of an optical coating machine as described in claim 4, characterized in that: The inner diameter of the air guide tube (11) is larger than the inner diameter of the indicator tube (12), and both the air guide tube (11) and the indicator tube (12) are made of transparent glass.

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