Vacuum chamber single / double layer conveying conversion mechanism and its conveying coating system

Abstract

This utility model relates to the field of vacuum coating equipment, and discloses a single / double-layer conveying conversion mechanism and its conveying coating system within a vacuum chamber. The conversion mechanism includes two sets of double-layer conveying lifting mechanisms. The double-layer conveying lifting mechanism mainly controls the independent transport of the upper and lower layer carrier plates by the double-layer horizontal conveying wheel assembly, and moves them up and down relative to the vacuum chamber, thereby transferring the upper and lower layer carrier plates to the single-layer conveying wheel assembly of the next chamber. Within the vacuum chamber, the double-layer horizontal conveying wheel assembly is affected by atmospheric pressure and thermal expansion and contraction. Therefore, this utility model incorporates a vacuum deformation compensation guide rail assembly and a thermal deformation compensation cross guide rail assembly to counteract the resulting positional offset. The conveying coating system utilizes the aforementioned single / double-layer conveying conversion mechanism to achieve double-layer transport and single-layer coating, balancing production efficiency with stable coating quality.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment, and in particular to a single- or double-layer conveying and conversion mechanism for a vacuum chamber and its conveying and coating system. Background Technology

[0002] Currently, most mass-produced photovoltaic (PVD) coating systems on the market are continuous coating methods, with single-layer, single-piece carriers continuously entering and exiting the vacuum chamber for coating. The bottlenecks in the production cycle of current continuous PVD coating lines are the carrier transfer time when entering and exiting the vacuum chamber, the time required to reach the required vacuum level after the carrier enters the chamber, and the vacuum breaking time required to reach the vacuum level needed to open the chamber valves after the carrier exits the chamber. Increasing the number of silicon wafers that can enter and exit the vacuum chamber in a single cycle can significantly increase the production capacity of photovoltaic coating equipment, thereby reducing production costs.

[0003] In existing photovoltaic PVD coating line systems, one way to increase production capacity during equipment upgrades is to continuously increase the length and width of the cavity and the dimensions of the carrier plate for placing silicon wafers. Increasing the cavity dimensions increases the cleanroom area occupied by the equipment. Larger cavities are more prone to deformation after vacuuming, leading to higher equipment costs and consequently higher production costs per silicon wafer, resulting in less competitive cells. Larger carrier plate dimensions also make the carrier plate prone to deformation and lack of rigidity, causing silicon wafers to easily fall off or break during transport. Deformation and insufficient rigidity of the carrier plate cause sagging in the wafer placement area, leading to uneven film thickness during coating. This reduces the success rate of wafer loading and unloading at the automated loading / unloading machine, decreasing the effective operating time of the equipment and thus affecting actual production capacity, indirectly increasing the production cost of silicon wafers.

[0004] In existing literature, multi-layer carrier plates are stacked outside the vacuum chamber and simultaneously transported into the vacuum chamber for multi-layer simultaneous transport to improve production efficiency. For example, patent application number 202011612952.0, entitled "A Multi-Layer Carrier Plate Handling System and Method," uses a multi-carrier plate lifting and handling device outside the vacuum chamber to repeatedly grab carrier plates from the conveyor belt, store them in multiple layers, and place them on a buffer rack. The entire buffer rack is then lowered to a multi-carrier plate output device, which simultaneously transports the multi-layer carrier plates into the cavity of the coating equipment. Although the simultaneous transport of multi-layer carrier plates within the cavity improves transport efficiency, in the coating process cavity, the simultaneous deposition of multiple layers causes interference between silicon wafers, limiting the uniformity of target material dispersion, easily leading to uneven film layers, increasing product defect rates, and raising production costs. Furthermore, the simultaneous deposition of multiple carrier plates in the cavity requires modification and upgrading of the original coating chamber. The modified chamber structure is more complex, not only causing quality problems such as uneven coating but also increasing equipment operating costs and failure rates.

[0005] Therefore, the market needs a solution that can improve production efficiency, ensure coating quality, and not increase production costs. Utility Model Content

[0006] The purpose of this invention is to provide a single-to-double layer conveying and conversion mechanism and its conveying and coating system in a vacuum chamber. This not only overcomes the problems of uneven film layer and increased equipment operating costs caused by simultaneous coating of multiple carrier plates in the prior art, but also improves the reliability of single-to-double layer conversion of carrier plates by double-layer conveying and compensating for the deformation of the plates generated in the vacuum chamber environment, thereby improving production efficiency.

[0007] To achieve the above objectives, the present invention adopts the following technical solution:

[0008] This utility model discloses a single / double-layer conveying conversion mechanism for a vacuum chamber, applicable to the vacuum chambers of PVD and PECVD coating equipment. It comprises two sets of double-layer conveying and lifting mechanisms, respectively fixedly installed on both sides of the vacuum chamber, symmetrically distributed, and operating synchronously. The two sets of double-layer conveying and lifting mechanisms respectively cooperate with the tracks at both ends of a carrier plate for conveying and lifting the carrier plate. Each of the upper and lower conveying and lifting mechanisms is equipped with one carrier plate. The double-layer conveying and lifting mechanism includes: a fixed plate disposed inside the vacuum chamber, a vacuum deformation compensation guide rail assembly, a connecting plate, an intermediate lifting guide assembly, a heat deformation compensation cross guide rail assembly, and a double-layer horizontal conveying wheel assembly; and a lifting execution assembly, a lifting drive mechanism, and a horizontal conveying drive assembly disposed outside the vacuum chamber.

[0009] The fixed plate is fixed to the inner wall of the vacuum chamber; the connecting plate is connected to the fixed plate through several sets of vacuum deformation compensation guide rail assemblies to compensate for the deformation of the fixed plate; the double-layer horizontal conveyor wheel assembly is slidably connected to the connecting plate through a middle lifting guide assembly and several sets of thermal deformation compensation cross guide rail assemblies to realize the lifting function of the double-layer horizontal conveyor wheel assembly and compensate for the deformation of the connecting plate; the lifting execution assembly is connected to both ends of the double-layer horizontal conveyor wheel assembly to control the horizontal conveyor wheel assembly to move up and down relative to the connecting plate; the lifting drive mechanism is connected to the lifting execution assembly; the horizontal conveying drive assembly is provided in two sets, which are respectively connected to the upper and lower layer conveyor wheel assemblies of the double-layer horizontal conveyor wheel assembly to control the independent operation of the upper and lower layer conveyor wheel assemblies.

[0010] Furthermore, the vacuum deformation compensation guide rail assembly includes a first slide rail and a first slider that are connected to each other; the first slide rail is horizontally arranged and fixed to the fixing plate, and the first slider is fixedly installed on the connecting plate.

[0011] Furthermore, two first sliders are connected to one of the first slide rails.

[0012] Furthermore, the heat deformation compensation cross guide rail assembly adopts a two-dimensional integrated rolling guide rail, which includes a second slide rail, a bidirectional slider, and a third slide rail; the second slide rail is vertically arranged and fixed to the connecting plate; the third slide rail is horizontally arranged and fixed to the double-layer horizontal conveyor wheel assembly; the bidirectional slider and the second slide rail can be vertically moved up and down to provide lifting and sliding guidance; the bidirectional slider and the third slide rail can be horizontally moved left and right to provide position compensation.

[0013] Furthermore, one of the second slide rails is connected to two bidirectional sliders.

[0014] Furthermore, the double-layer horizontal conveyor wheel assembly includes a conveyor wheel assembly mounting plate, a transmission chain, and several carrier plate horizontal conveyor wheels, carrier plate guide wheels, horizontal transmission sprockets, and horizontal transmission gears disposed on the conveyor wheel assembly mounting plate; the horizontal transmission sprockets are poweredly connected to the horizontal conveying drive assembly through the horizontal transmission gears to obtain rotational torque; adjacent horizontal transmission sprockets are connected by a transmission chain, and the horizontal transmission sprockets are coaxially connected to the carrier plate horizontal conveyor wheels, thereby driving the carrier plate horizontal conveyor wheels to rotate; the carrier plate guide wheels are rotatably disposed on the conveyor wheel assembly mounting plate and roll in cooperation with the inner wall of the carrier plate slide rail.

[0015] Furthermore, the horizontal conveying drive assembly includes a horizontal conveying drive motor with a speed reducer, a synchronous belt, and a ball spline helical gear assembly capable of adaptively adjusting the off-axis center; the horizontal conveying drive motor is connected to the ball spline helical gear assembly via the synchronous belt, and the ball spline helical gear assembly is meshed with the horizontal transmission gear of the double-layer horizontal conveying wheel assembly.

[0016] Furthermore, the ball spline helical gear assembly includes an external magnetofluid located outside the vacuum chamber and a double-joint universal joint coupling, ball bearings, drive helical gears, and spline shaft disposed within the vacuum chamber;

[0017] The upper output shaft of the external magnetic fluid is connected to the spline shaft via a double-joint universal joint coupling, and the lower end is connected to the horizontal conveyor drive motor via a synchronous belt; the outer shell of the upper end of the external magnetic fluid is sealed to the outside of the vacuum chamber.

[0018] The inner ring of the ball bearing is fixedly connected to the drive helical gear, and the outer ring is connected to the conveyor wheel assembly mounting plate through the bearing housing. The spline shaft passes through the ball bearing and the drive helical gear in sequence. The spline shaft, the ball bearing, and the drive helical gear can be moved up and down in a sleeve connection. The spline of the spline shaft and the keyway of the drive helical gear are matched, so that the drive helical gear can not only transmit torque with the rotation of the spline shaft, but also move up and down along the spline shaft with the conveyor wheel assembly mounting plate.

[0019] Furthermore, the lifting actuator includes a jack with a geared motor, a lifting guide module, a lifting linkage, and a bellows; the lower end of the lifting guide module is connected to the jack, and the upper end is connected to the lower end of the lifting linkage; the upper end of the lifting linkage is connected to the conveyor wheel assembly mounting plate, thereby driving the lifting linkage to control the horizontal conveying drive assembly to move up and down; the bellows passes through the lifting linkage, with its upper end sealed to the upper end of the vacuum chamber and its lower end sealed to the lifting guide module; the jack is a high-lead ball screw type power jack.

[0020] Furthermore, the lifting guide module includes a lifting support plate, a lifting guide shaft, and a linear bearing; the upper end of the lifting support plate is connected to the lifting connecting rod and the bellows, and the lower end is connected to the jack; the linear bearing is located at the four corners of the lifting support plate; the lifting guide shaft can move up and down through the linear bearing, and its lower end is fixed to the fixing frame of the lifting actuator, so that the lifting support plate moves up and down with the operation of the jack.

[0021] Furthermore, the lifting drive mechanism includes a lifting drive motor, a dual-output reducer, and a power worm gear; the lifting drive motor is connected to the dual-output reducer, and each end of the dual-output reducer is connected to a power worm gear. The two power worm gears are respectively engaged with the jacks of the lifting execution components located at both ends of the double-layer horizontal conveyor wheel assembly, providing the driving force for the lifting execution components to move up and down.

[0022] Furthermore, the intermediate lifting guide assembly includes a lifting slide rail and a lifting slider that are connected in a cooperating manner. Two lifting sliders are provided and fixed to the conveyor wheel assembly mounting plate. The lifting slide rail is vertically arranged and fixed to the connecting plate, so as to realize the sliding connection between the conveyor wheel assembly mounting plate and the connecting plate.

[0023] This utility model also discloses a conveying and coating system for a double-layer carrier plate in a vacuum chamber, which includes a double-layer vacuum feeding chamber, a feeding lifting vacuum chamber, a single-layer process chamber, a discharging lifting vacuum chamber, and a double-layer vacuum discharging chamber connected in sequence; the feeding lifting vacuum chamber and the discharging lifting vacuum chamber are each provided with the above-mentioned single-double layer conveying conversion mechanism in the vacuum chamber.

[0024] Furthermore, the double-layer vacuum feeding chamber and the double-layer vacuum discharging chamber are provided with multi-stage vacuum extraction and cavitation chambers.

[0025] Furthermore, the upper and lower horizontal conveyor wheel sets in the double-layer vacuum feeding chamber and the double-layer vacuum discharging chamber are independently driven and their operation can be controlled separately.

[0026] The advantages of this utility model are:

[0027] 1. After the vacuum chamber is evacuated, it is subjected to atmospheric pressure, causing a certain amount of horizontal inward deformation on the inner wall. Simultaneously, under heating conditions, the metal material expands, and different materials have different coefficients of thermal expansion. Therefore, this invention incorporates a vacuum deformation compensation guide rail assembly between the fixed plate and the connecting plate. This guide rail assembly allows for slight horizontal movement, thus offsetting the positional impact of deformation on the mechanism and preventing the fixed plate from interfering with the connecting plate due to vacuum chamber deformation. A thermal deformation compensation cross guide rail assembly is also incorporated between the connecting plate and the double-layer horizontal conveyor wheel assembly. This guide rail assembly allows for slight horizontal movement, further offsetting the positional impact of deformation and preventing positional deviations caused by the different thermal expansion increments of the connecting plate and the double-layer horizontal conveyor wheel assembly under heating conditions. The thermal deformation compensation cross guide rail assembly and the vacuum deformation compensation guide rail assembly work together to compensate for the positional adjustments caused by thermal deformation and vacuum pressure deformation, ensuring the stable and reliable operation of the mechanism.

[0028] 2. Because the double-layer horizontal conveyor wheel assembly is located inside the vacuum chamber, it will expand under heat, causing the spline shaft to shift. Since the output shaft of the external magnetic fluid of the horizontal conveyor drive assembly is located outside the chamber and remains in a fixed position, misalignment between the output shaft of the external magnetic fluid and the spline shaft is likely to occur, leading to gear disengagement or jamming. This invention connects the external magnetic fluid to the spline shaft using a double-joint universal joint coupling. The double-joint universal joint has a certain degree of self-adjusting off-axis function, which can effectively compensate for the misalignment caused by thermal deformation. Simultaneously, the external magnetic fluid is sealed to the vacuum chamber. The external magnetic fluid can maintain rotational transmission inside and outside the vacuum chamber through the sealing effect of the magnetic fluid, thus achieving both sealing and free rotation.

[0029] 3. The lifting actuator controls the lifting of the double-layer horizontal conveyor wheel assembly by vertically moving between the inside and outside of the cavity. When the lifting linkage passes through the cavity, a certain gap needs to be maintained due to the relative lifting movement. Since the cavity is a vacuum environment, a movable seal needs to be considered. Therefore, this invention provides a vacuum-sealed environment for the lifting linkage by sealing the upper end of the bellows with the upper end of the vacuum cavity and the lower end with the lifting guide module, thus achieving both smooth movement and maintaining a vacuum environment.

[0030] 4. This utility model's conveying and coating system achieves a double-layer conveying and single-layer coating working mode by setting up an infeed lifting vacuum chamber and an outlet lifting vacuum chamber. The double-layer conveying improves transportation efficiency while maintaining the original single-layer coating method to preserve the original coating quality and the usability of the original coating equipment. This achieves a balance between production efficiency and stable coating quality, increasing production capacity and reducing costs. Attached Figure Description

[0031] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0032] Vacuum chamber single / double layer conveying conversion mechanism and its conveying coating system

[0033] Figure 1 This is a schematic diagram of the structure after the single / double layer conveyor conversion mechanism is combined with the upper plate.

[0034] Figure 2 This is a schematic diagram of the single / double layer conveying and switching mechanism within the chamber.

[0035] Figure 3 This is a schematic diagram of the single / double layer conveyor conversion mechanism.

[0036] Figure 4 This is a schematic diagram of the single / double layer conveying and switching mechanism located inside the chamber.

[0037] Figure 5 This is a front view of the lifting actuator.

[0038] Figure 6 This is a three-dimensional structural diagram of the lifting actuator.

[0039] Figure 7 This is a diagram showing the connection between the lifting drive mechanism and the lifting actuator.

[0040] Figure 8 It is a 3D diagram showing the connection between the lifting drive mechanism and the lifting actuator.

[0041] Figure 9 This is a front view diagram after the mounting plate is hidden.

[0042] Figure 10 This is a structural schematic diagram of the vacuum deformation compensation guide rail assembly.

[0043] Figure 11 This is a diagram showing the connection between the connecting plate, the thermal deformation compensation cross rail assembly, and the intermediate lifting guide assembly.

[0044] Figure 12 This is a structural diagram of the intermediate lifting guide assembly.

[0045] Figure 13 This is a schematic diagram of the thermal deformation compensation cross guide rail assembly.

[0046] Figure 14 This is a three-dimensional structural diagram of the horizontal conveyor drive assembly.

[0047] Figure 15 This is a front view of the horizontal conveyor drive assembly with the horizontal conveyor drive motor hidden.

[0048] Figure 16 This is a state diagram of the conveying coating system at the first station.

[0049] Figure 17 This is a state diagram of the coating system at the second station.

[0050] Explanation of key component symbols:

[0051] 101. Vacuum cavity;

[0052] 102. Double-layer conveyor lifting mechanism;

[0053] 103. Lifting actuator assembly; 1031. Jack; 1032. Lifting guide module; 1033. Lifting linkage; 1034. Bellows; 1035. Lifting support plate; 1036. Lifting guide shaft; 1037. Linear bearing.

[0054] 104. Lifting drive mechanism; 1041. Lifting drive motor; 1042. Dual output reducer; 1043. Power worm gear.

[0055] 105. Vacuum deformation compensation guide rail assembly; 1051. First slide rail; 1052. First slider;

[0056] 106. Horizontal conveyor drive assembly; 1061. Horizontal conveyor drive motor; 1062. Synchronous belt; 1063. Ball spline helical gear assembly; 1064. External magnetic fluid; 1065. Double-joint universal joint coupling; 1066. Ball bearing; 1067. Drive helical gear; 1068. Spline shaft.

[0057] 107. Intermediate lifting guide assembly; 1071. Lifting slide rail; 1072. Lifting slider;

[0058] 108. Thermal deformation compensation cross guide rail assembly; 1081. Second slide rail; 1082. Bidirectional slider; 1083. Third slide rail;

[0059] 109. Double-layer horizontal conveyor wheel assembly; 1091. Conveyor wheel assembly mounting plate; 1092. Drive chain; 1093. Carrier plate horizontal conveyor wheel; 1094. Carrier plate guide wheel; 1095. Horizontal drive sprocket; 1096. Horizontal drive gear.

[0060] 110. Fixing plate;

[0061] 111. Connecting plate;

[0062] 112, Carrier plate; 1121, Upper carrier plate; 1122, Lower carrier plate;

[0063] 113. Double-layer vacuum feeding chamber; 114. Feed lifting vacuum chamber; 115. Single-layer process chamber; 116. Discharge lifting vacuum chamber; 117. Double-layer vacuum discharge chamber; 118. First station; 119. Second station. Detailed Implementation

[0064] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0065] In this utility model, unless otherwise stated, directional terms such as "up," "down," "left," and "right" are generally understood in conjunction with the accompanying drawings and the directions shown in actual applications.

[0066] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0067] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0068] The endpoints and any values ​​of the ranges disclosed herein are not limited to the precise ranges or values, and should be understood to include values ​​close to these ranges or values. For numerical ranges, the endpoint values ​​of the various ranges, the endpoint values ​​of the various ranges and individual point values, and individual point values ​​can be combined with each other to obtain one or more new numerical ranges, which should be considered as specifically disclosed herein. The terms "optional" and "discretionary" mean that they may or may not be included (or may or may not be present).

[0069] Example 1:

[0070] like Figure 1 , Figure 2 As shown, this utility model discloses a single / double-layer conveying and switching mechanism for a vacuum chamber, applicable to the vacuum chambers of PVD coating equipment and PECVD coating equipment. It includes two sets of double-layer conveying and lifting mechanisms 102, respectively fixedly installed on both sides of the vacuum chamber 101, symmetrically distributed, and operating synchronously. The two sets of double-layer conveying and lifting mechanisms 102 respectively cooperate with the tracks at both ends of a carrier plate 112 for conveying and lifting the carrier plate 112. Each of the upper and lower conveying and lifting mechanisms has one carrier plate 112.

[0071] like Figures 3 to 5As shown, the double-layer conveying and lifting mechanism 102 includes: a fixed plate 110, a vacuum deformation compensation guide rail assembly 105, a connecting plate 111, an intermediate lifting guide assembly 107, a heat deformation compensation cross guide rail assembly 108, and a double-layer horizontal conveying wheel assembly 109 disposed inside the vacuum chamber 101; and a lifting execution assembly 103, a lifting drive mechanism 104, and a horizontal conveying drive assembly 106 disposed outside the vacuum chamber 101.

[0072] The single / double-layer conveying conversion mechanism mainly controls the double-layer horizontal conveying wheel assembly 109 to independently transport the upper and lower layer carrier plates and to move them up and down relative to the vacuum chamber 101, thereby transferring the upper and lower layer carrier plates to the single-layer conveying wheel assembly of the next chamber. To achieve this, the double-layer horizontal conveying wheel assembly 109 can move up and down relative to the vacuum chamber 101 through the intermediate lifting guide assembly 107, the lifting actuator assembly 103 and the lifting drive mechanism 104 provide the driving force for the up and down movement, and the horizontal conveying drive assembly 106 provides the transport power. Inside the vacuum chamber 101, the double-layer horizontal conveying wheel assembly 109 is affected by atmospheric pressure and thermal expansion and contraction. Therefore, this embodiment sets up a vacuum deformation compensation guide rail assembly 105 and a thermal deformation compensation cross guide rail assembly 108 to counteract the positional offset caused by atmospheric pressure and thermal expansion and contraction. Their positional connection relationship is as follows:

[0073] A fixed plate 110 is fixed to the side wall of the vacuum chamber 101. A connecting plate 111 is connected to the fixed plate 110 via several sets of vacuum deformation compensation guide rail assemblies 105 to compensate for the deformation of the fixed plate 110. A double-layer horizontal conveyor wheel assembly 109 is slidably connected to the connecting plate 111 via an intermediate lifting guide assembly 107 and several sets of thermal deformation compensation cross guide rail assemblies 108 to realize the lifting function of the double-layer horizontal conveyor wheel assembly 109 and to compensate for the deformation of the connecting plate 111. A lifting actuation assembly 103 is fixed to the outside of the vacuum chamber 101 and connected to both ends of the double-layer horizontal conveyor wheel assembly 109 to control the horizontal conveyor wheel assembly to move up and down relative to the connecting plate 111. A lifting drive mechanism 104 is fixed to the outside of the vacuum chamber 101 and connected to the lifting actuation assembly 103. A horizontal conveying drive assembly 106 is fixed to the outside of the vacuum chamber 101, and two sets are provided, each connected to one of the upper and lower conveyor wheel assemblies of the double-layer horizontal conveyor wheel assembly 109 to control the independent operation of the upper and lower conveyor wheel assemblies.

[0074] Horizontal conveying function:

[0075] Specifically, such as Figure 6As shown, the double-layer horizontal conveyor wheel assembly 109 is disposed within a vacuum chamber. It includes a conveyor wheel assembly mounting plate 1091, a transmission chain 1092, and several horizontal conveyor wheels 1093, guide wheels 1094, horizontal transmission sprockets 1095, and horizontal transmission gears 1096 mounted on the conveyor wheel assembly mounting plate 1091. The horizontal transmission gears have helical gears at both ends; one end connects to the driven helical gear on the shaft of the horizontal transmission sprocket 1095, and the other end connects to the driving helical gear 1067 on the horizontal conveying drive assembly 106, thereby providing rotational torque to the horizontal transmission sprocket 1095. The horizontal transmission sprockets 1095 are connected to each other via the transmission chain 1092, and the horizontal transmission sprockets 1095 are coaxially connected to the horizontal conveyor wheels 1093, thereby driving the horizontal conveyor wheels 1093 to rotate. The carrier plate guide wheel 1094 is rotatably mounted on the conveyor wheel assembly mounting plate 1091 and rolls with the inner wall of the carrier plate slide rail to reduce the left and right movement gap of the carrier plate, reduce carrier plate sway, and increase running accuracy.

[0076] Specifically, such as Figure 7 As shown, the horizontal conveyor drive assembly 106 includes a horizontal conveyor drive motor 1061 with a speed reducer, a timing belt 1062, and a ball spline helical gear assembly 1063 capable of adaptively adjusting off-axis centering. The horizontal conveyor drive motor 1061 is connected to the ball spline helical gear assembly 1063 via the timing belt 1062, and the drive helical gears 1067 of the ball spline helical gear assembly 1063 are meshed with the horizontal transmission gears 1096 of the double-layer horizontal conveyor wheel assembly 109.

[0077] Among them, such as Figure 8 As shown, the ball spline helical gear assembly 1063 includes an external magnetofluid 1064 located outside the vacuum chamber 101, and a double-joint universal joint coupling 1065, a ball bearing 1066, a drive helical gear 1067, and a spline shaft 1068 disposed inside the vacuum chamber 101. The upper output shaft of the external magnetofluid 1064 is connected to the spline shaft 1068 via the double-joint universal joint coupling 1065, and the lower end is connected to the horizontal conveyor drive motor 1061 via a synchronous belt 1062 to transmit torque to the spline shaft 1068. The outer shell of the external magnetofluid 1064 is sealed to the outside of the vacuum chamber 101. The inner ring of the ball bearing 1066 is fixedly connected to the drive helical gear 1067, and the outer ring is connected to the conveyor wheel assembly mounting plate 1091 via a bearing seat. The spline shaft 1068 passes through the ball bearing 1066 and the drive helical gear 1067 in sequence. The spline shaft 1068, the ball bearing 1066, and the drive helical gear 1067 can be sleeved up and down. The spline of the spline shaft 1068 and the keyway of the drive helical gear 1067 are matched so that the drive helical gear 1067 can not only transmit torque with the rotation of the spline shaft 1068, but also move up and down along the spline shaft 1068 with the conveyor wheel assembly mounting plate 1091.

[0078] The double-layer horizontal conveyor wheel assembly 109 achieves torque reversal transmission within the vacuum chamber via helical gear drive. Since the double-layer horizontal conveyor wheel assembly 109 is located inside the vacuum chamber, it is affected by the chamber temperature. Heating causes it to lengthen, which in turn moves the splined shaft 1068. This results in the output shaft of the external magnetic fluid 1064 being misaligned with the splined shaft 1068, leading to gear disengagement or jamming. In this embodiment, a double-joint universal joint coupling 1065 connects the external magnetic fluid 1064 to the splined shaft 1068. The double-joint universal joint has a certain degree of off-axis self-adjustment, effectively compensating for the misalignment caused by thermal deformation. Simultaneously, the external magnetic fluid 1064 is sealed to the vacuum chamber 101. The external magnetic fluid 1064 can maintain rotational transmission within and outside the vacuum chamber through the sealing effect of the magnetic fluid, thus achieving both sealing and free rotation.

[0079] Lifting / lowering function:

[0080] Specifically, such as Figure 9 As shown, the intermediate lifting guide assembly 107 includes a lifting slide rail 1071 and a lifting slider 1072 that are connected in a cooperating manner; two lifting sliders 1072 are provided and fixed on the conveyor wheel assembly mounting plate 1091; the lifting slide rail 1071 is vertically arranged and fixed on the connecting plate 111, thereby realizing the sliding connection between the conveyor wheel assembly mounting plate 1091 and the connecting plate 111.

[0081] Since both the conveyor wheel assembly mounting plate 1091 and the connecting plate 111 are located within the vacuum chamber 101 under heating conditions, the plates of the connecting plate 111 and the conveyor wheel assembly mounting plate 1091 have different heating temperatures and sizes at different locations. The different thermal expansions of the two plates cause misalignment of the slide rail sliders, resulting in jamming. Therefore, this invention provides thermal deformation compensation cross guide rail assemblies 108 at both ends between the connecting plate 111 and the conveyor wheel assembly mounting plate 1091. This allows for slight horizontal movement at the connection points of the two plates, thereby offsetting the positional influence of deformation on the mechanism and providing sliding guidance for the two plates.

[0082] Specifically, such as Figure 10As shown, the thermal deformation compensation cross guide rail assembly 108 adopts a two-dimensional integrated rolling guide rail, which includes a second slide rail 1081, a bidirectional slider 1082, and a third slide rail 1083. The second slide rail 1081 is vertically arranged and fixed to the connecting plate 111. The third slide rail 1083 is horizontally arranged and fixed to the double-layer horizontal conveyor wheel assembly 109. The bidirectional slider 1082 and the second slide rail 1081 can be vertically moved up and down to provide lifting and sliding guidance; the bidirectional slider 1082 and the third slide rail 1083 can be horizontally moved left and right to offset the positional influence caused by thermal deformation. When the connecting plate 111 and the conveyor wheel assembly mounting plate 1091 have different thermal expansion lengths, the bidirectional slider 1082 is in a movable state and can be moved to a position corresponding to the second slide rail 1081 via the horizontally arranged third slide rail 1083, thereby achieving both lifting and guiding functions and position compensation.

[0083] To increase the stability of the thermal deformation compensation cross guide rail assembly 108, a second slide rail 1081 is connected to two bidirectional sliders 1082.

[0084] After the vacuum chamber 101 is evacuated, it is subjected to atmospheric pressure, which will cause a certain amount of horizontal inward deformation. In this embodiment, the fixing plate 110 is fixedly connected to the inner wall of the vacuum chamber 101, which will cause the fixing plate 110 to deform. In order to avoid deformation of the connecting plate 111 connected to the fixing plate 110, this embodiment provides a vacuum deformation compensation guide rail assembly 105 between the fixing plate 110 and the connecting plate 111, so that the connection between the two plates can move slightly in the horizontal direction, thereby offsetting the positional influence of the deformation on the mechanism.

[0085] Specifically, such as Figure 11 As shown, the vacuum deformation compensation guide rail assembly 105 includes a first slide rail 1051 and a first slider 1052 that are connected to each other. The first slide rail 1051 is horizontally arranged and fixed on the fixed plate 110, while the first slider 1052 is fixedly installed on the connecting plate 111. When the fixed plate 110 is deformed by the influence of the vacuum cavity, the connection between the fixed plate 110 and the connecting plate 111 changes, and the first slider 1052 and the first slide rail 1051 are in a movable state, allowing for position readjustment and achieving position compensation, thus preventing the connecting plate 111 from being squeezed by the fixed plate 110.

[0086] In this embodiment, the thermal deformation compensation cross rail assembly 108 and the vacuum deformation compensation rail assembly 105 work together to achieve position adjustment compensation caused by thermal deformation and vacuum pressure deformation, ensuring that the double-layer horizontal conveyor wheel assembly 109 can move up and down stably and reliably.

[0087] Specifically, such as Figure 12As shown, the lifting actuator 103 includes a jack 1031 with a geared motor, a lifting guide module 1032, a lifting connecting rod 1033, and a bellows 1034. The lower end of the lifting guide module 1032 is connected to the jack 1031, and the upper end is connected to the lower end of the lifting connecting rod 1033. The upper end of the lifting connecting rod 1033 is connected to the conveyor wheel assembly mounting plate 1091, thereby driving the lifting connecting rod 1033 to control the vertical movement of the horizontal conveying drive assembly 106. The bellows 1034 passes through the lifting connecting rod 1033, with its upper end sealed to the upper end of the vacuum chamber 101 and its lower end sealed to the lifting guide module 1032. The jack 1031 is a high-lead ball screw type power jack. The lifting actuator 103 controls the lifting of the double-layer horizontal conveyor wheel assembly 109 by vertically lifting between the inside and outside of the chamber. When the lifting linkage 1033 passes through the cavity, a certain gap needs to be maintained due to the relative lifting and lowering movement required. Since the cavity is a vacuum environment, a dynamic seal needs to be considered. Therefore, this utility model provides a vacuum-sealed environment for the lifting linkage 1033 by setting the upper end of the bellows 1034 to be sealed to the upper end of the vacuum cavity 101 and the lower end to be sealed to the lifting guide module 1032, thereby achieving the function of both smooth movement and maintaining a vacuum environment.

[0088] Among them, such as Figure 13 As shown, the lifting guide module 1032 includes a lifting support plate 1035, a lifting guide shaft 1036, and a linear bearing 1037. The upper end of the lifting support plate 1035 is connected to the lifting connecting rod 1033 and the bellows 1034, and the lower end is connected to the jack 1031. The linear bearing 1037 is located at the four corners of the lifting support plate 1035. The lifting guide shaft 1036 can move up and down through the linear bearing 1037, and its lower end is fixed to the fixing frame of the lifting execution component 103, so that the lifting support plate 1035 moves up and down with the operation of the jack 1031.

[0089] Specifically, such as Figure 14 , Figure 15 As shown, the lifting drive mechanism 104 includes a lifting drive motor 1041, a dual-output reducer 1042, and a power worm gear 1043. The lifting drive motor 1041 is connected to the dual-output reducer 1042, and each end of the dual-output reducer 1042 is connected to a power worm gear 1043. The two power worm gears 1043 are respectively engaged with jacks 1031 located at both ends of the double-layer horizontal conveyor wheel assembly 109, providing driving force for the lifting actuator 103 to move up and down. The dual-output reducer 1042 simultaneously drives the lifting actuator 103 at both ends, enabling them to operate synchronously.

[0090] Example 2:

[0091] like Figure 16 , Figure 17 As shown, this embodiment discloses a conveying and coating system for a double-layer carrier plate within a vacuum chamber, comprising a double-layer vacuum feeding chamber 113, a feeding lifting vacuum chamber 114, a single-layer process chamber 115, a discharging lifting vacuum chamber 116, and a double-layer vacuum discharging chamber 117 connected in sequence. Both the feeding lifting vacuum chamber 114 and the discharging lifting vacuum chamber 116 are equipped with the single / double-layer conveying conversion mechanism described in Embodiment 1 within the vacuum chamber.

[0092] Specifically:

[0093] To reduce the time required to break the vacuum and to match the rapid conveying cycle, the double-layer vacuum feed chamber 113 and the double-layer vacuum discharge chamber 117 are equipped with multi-stage vacuum extraction and breaking chambers.

[0094] In order to better control the conveying, the upper and lower horizontal conveying wheel sets in the double-layer vacuum feeding chamber 113 and the double-layer vacuum discharging chamber 117 are independently driven and their operation can be controlled separately.

[0095] like Figure 16 , 17 As shown, this embodiment also discloses the process of the above-mentioned double-layer carrier plate conveying and coating system in the vacuum chamber, which includes the following steps:

[0096] The silicon wafers are fed onto the carrier plate 112 by the feeding machine, and the carrier plate 112 is conveyed to the upper and lower horizontal conveyor wheel sets of the double-layer vacuum feeding chamber 113;

[0097] The double-layer carrier plate 112 is simultaneously conveyed from the double-layer vacuum feeding chamber 113 to the feeding lifting vacuum chamber 114, and the two carrier plates 112 are respectively placed on the upper and lower layers of the double-layer horizontal conveyor wheel assembly of the feeding lifting vacuum chamber 114.

[0098] At the first station 118, the upper horizontal conveyor wheel set is first driven by the horizontal conveyor drive assembly 106 to convey the upper carrier plate 1121 to the horizontal conveyor wheel set of the single-layer process cavity 115; then, the lifting drive mechanism 104 drives the lifting execution assembly 103 to move the double-layer horizontal conveyor wheel set upward to the second station 119, so that the lower horizontal conveyor wheel set docks with the horizontal conveyor wheel set of the process cavity, and then the lower horizontal conveyor wheel set is driven by the horizontal conveyor drive assembly 106 to convey the lower carrier plate 1122 to the horizontal conveyor wheel set of the process cavity; thus completing the conversion from double-layer carrier plate conveying to single-layer carrier plate conveying;

[0099] The lifting drive mechanism 104 drives the lifting execution component 103 to lower the double-layer horizontal conveyor wheel set to the first station 118. The double-layer vacuum feeding chamber 113 simultaneously sends the double-layer carrier plate into the feeding lifting vacuum chamber 114, and the cycle repeats.

[0100] The above describes the process flow for the front-end feeding end, where double-layer and single-layer carrier plates are switched and conveyed; the process flow for the rear-end discharging end, where single-layer and multi-layer carrier plates are switched and conveyed, is the reverse of the front-end process flow.

[0101] The reverse process is as follows:

[0102] The double-layer horizontal conveyor wheel assembly inside the discharge lifting vacuum chamber 116 is located on the first station 118, ready to receive the upper carrier plate 1121. The horizontal conveyor drive assembly 106 drives the horizontal conveyor wheel assembly of the single-layer process chamber 115 to transport the coated carrier plate to the upper horizontal conveyor wheel of the discharge lifting vacuum chamber 116.

[0103] The lifting drive mechanism 104 of the discharge lifting vacuum chamber 116 drives the lifting execution component 103 to move the double-layer horizontal conveyor wheel set upward to the second station 119, so that the lower horizontal conveyor wheel set docks with the horizontal conveyor wheel set of the process chamber. Then, the horizontal conveyor drive component 106 drives the horizontal conveyor wheel set to transport the carrier plate on the horizontal conveyor wheel set of the process chamber to the lower horizontal conveyor wheel set of the discharge lifting vacuum chamber 116; thus completing the conversion from single-layer carrier plate conveying to double-layer carrier plate conveying.

[0104] The lifting drive mechanism 104 drives the lifting execution component 103 to lower the double-layer horizontal conveyor wheel set to the first station 118. The discharge lifting vacuum chamber 116 simultaneously sends the double-layer carrier plate into the double-layer vacuum discharge chamber 117, and the cycle repeats.

[0105] The conveying and coating system in Example 2 achieves a double-layer conveying and single-layer coating working mode by setting up an infeed lifting vacuum chamber 114 and an outfeed lifting vacuum chamber 116. Double-layer conveying improves transportation efficiency, while single-layer coating maintains the original single-layer coating method to preserve coating quality and the usability of existing coating equipment, thus reducing production costs. In the coating process, single-layer substrate deposition on one or both sides has the following advantages compared to simultaneous deposition on multiple substrates in the chamber: 1. With single-layer substrate deposition, the process parameters within the chamber are easier to control, resulting in higher target sputtering uniformity and a more uniform film layer. With simultaneous deposition on multiple substrates, the substrates influence each other, limiting the uniform dispersion of the target material, easily causing uneven film layers, increasing product defect rates, and raising production costs. 2. Single-layer substrate deposition allows the use of existing coating chamber equipment, improving the utilization rate of the original equipment, reducing equipment upgrade costs, and ensuring coating quality due to the mature technology and stable process of the existing equipment. Simultaneous deposition of multiple carrier plates in the deposition chamber requires modifications and upgrades to the existing coating chamber. The modified chamber structure is more complex, leading to quality issues such as uneven coating and increased equipment operating costs and failure rates. Therefore, this application combines two-layer conveying with single-layer deposition, balancing production efficiency with stable coating quality, thereby increasing capacity and reducing costs.

[0106] In summary, this utility model overcomes various deformation problems encountered in a vacuum chamber environment by providing a single / double-layer conveying conversion mechanism and its conveying coating system, thereby achieving stable and reliable operation of the conversion mechanism. Furthermore, its conveying coating system can achieve a double-layer conveying and single-layer coating working mode, ensuring stable coating quality while maintaining production efficiency.

[0107] The preferred embodiments of this utility model have been described in detail above; however, this utility model is not limited thereto. Within the scope of the technical concept of this utility model, various simple modifications can be made to the technical solution of this utility model, including combining the various technical features in any other suitable manner. These simple modifications and combinations should also be considered as the content disclosed by this utility model and are all within the protection scope of this utility model.

Claims

1. A single / double layer conveying and switching mechanism for a vacuum chamber, applied in the vacuum chamber of PVD coating equipment and PECVD coating equipment, characterized in that: It includes two sets of double-layer conveying and lifting mechanisms (102) that are fixedly installed on both sides of the vacuum cavity (101) and are symmetrically distributed and operate synchronously; the double-layer conveying and lifting mechanism (102) includes: a fixed plate (110), a vacuum deformation compensation guide rail assembly (105), a connecting plate (111), an intermediate lifting guide assembly (107), a heat deformation compensation cross guide rail assembly (108), and a double-layer horizontal conveying wheel assembly (109) disposed inside the vacuum cavity (101); and a lifting execution assembly (103), a lifting drive mechanism (104), and a horizontal conveying drive assembly (106) disposed outside the vacuum cavity (101). The fixed plate (110) is fixed to the inner wall of the vacuum cavity (101); the connecting plate (111) is connected to the fixed plate (110) through several sets of vacuum deformation compensation guide rail assemblies (105) to compensate for the deformation of the fixed plate (110); the double-layer horizontal conveyor wheel assembly (109) is slidably connected to the connecting plate (111) through the intermediate lifting guide assembly (107) and several sets of thermal deformation compensation cross guide rail assemblies (108) to realize the lifting function of the double-layer horizontal conveyor wheel assembly (109). The lifting actuator (103) is connected to both ends of the double-layer horizontal conveyor wheel assembly (109) to control the horizontal conveyor wheel assembly to move up and down relative to the connecting plate (111); the lifting drive mechanism (104) is connected to the lifting actuator (103); the horizontal conveyor drive assembly (106) is provided in two sets, which are respectively connected to the upper and lower layer conveyor wheel assemblies of the double-layer horizontal conveyor wheel assembly (109) to control the upper and lower layer conveyor wheel assemblies to operate independently.

2. The single / double layer conveying and switching mechanism in the vacuum chamber according to claim 1, characterized in that: The vacuum deformation compensation guide rail assembly (105) includes a first slide rail (1051) and a first slider (1052) that are connected to each other; the first slide rail (1051) is horizontally arranged and fixed on the fixing plate (110), and the first slider (1052) is fixedly installed on the connecting plate (111).

3. The single / double layer conveying and switching mechanism in the vacuum chamber according to claim 2, characterized in that: Two first sliders (1052) are connected to one of the first slide rails (1051).

4. The single / double layer conveying and switching mechanism in the vacuum chamber according to claim 1, characterized in that: The thermal deformation compensation cross guide rail assembly (108) adopts a two-dimensional integrated rolling guide rail, which includes a second slide rail (1081), a bidirectional slider (1082), and a third slide rail (1083). The second slide rail (1081) is vertically arranged and fixed on the connecting plate (111). The third slide rail (1083) is horizontally arranged and fixed on the double-layer horizontal conveyor wheel assembly (109). The bidirectional slider (1082) and the second slide rail (1081) can be vertically moved up and down to play a lifting and sliding guiding role. The bidirectional slider (1082) and the third slide rail (1083) can be horizontally moved left and right to play a position compensation role.

5. The single / double layer conveying and switching mechanism in the vacuum chamber according to claim 4, characterized in that: Two bidirectional sliders (1082) are connected to a second slide rail (1081).

6. The single / double layer conveying and switching mechanism in the vacuum chamber according to claim 1, characterized in that: The double-layer horizontal conveyor wheel assembly (109) includes a conveyor wheel assembly mounting plate (1091), a transmission chain (1092), and several plate horizontal conveyor wheels (1093), plate guide wheels (1094), horizontal transmission sprockets (1095), and horizontal transmission gears (1096) disposed on the conveyor wheel assembly mounting plate (1091). The horizontal transmission sprockets (1095) are poweredly connected to the horizontal conveyor drive assembly (106) through the horizontal transmission gears (1096) to obtain rotational torque. Adjacent horizontal transmission sprockets (1095) are connected by a transmission chain (1092), and the horizontal transmission sprockets (1095) are coaxially connected to the plate horizontal conveyor wheels (1093), thereby driving the plate horizontal conveyor wheels (1093) to rotate. The plate guide wheels (1094) are rotatably disposed on the conveyor wheel assembly mounting plate (1091) and roll in cooperation with the inner wall of the plate slide rail.

7. The single / double layer conveying and switching mechanism in the vacuum chamber according to claim 6, characterized in that: The horizontal conveying drive assembly (106) includes a horizontal conveying drive motor (1061) with a speed reducer, a timing belt (1062), and a ball spline helical gear assembly (1063) capable of adaptively adjusting the off-axis center. The horizontal conveying drive motor (1061) is connected to the ball spline helical gear assembly (1063) via the timing belt (1062), and the ball spline helical gear assembly (1063) is meshed with the horizontal transmission gear (1096) of the double-layer horizontal conveying wheel assembly (109).

8. The single / double layer conveying conversion mechanism in the vacuum chamber according to claim 7, characterized in that: The ball spline helical gear assembly (1063) includes an external magnetic fluid (1064) located outside the vacuum cavity (101) and a double-joint universal joint coupling (1065), ball bearing (1066), drive helical gear (1067), and spline shaft (1068) disposed inside the vacuum cavity (101). The upper output shaft of the external magnetic fluid (1064) is connected to the spline shaft (1068) through a double-joint universal joint coupling (1065), and the lower end is connected to the horizontal conveyor drive motor (1061) through a synchronous belt (1062); the outer shell of the upper end of the external magnetic fluid (1064) is sealed to the outside of the vacuum chamber (101); The inner ring of the ball bearing (1066) is fixedly connected to the drive helical gear (1067), and the outer ring is connected to the conveyor wheel assembly mounting plate (1091) through the bearing housing. The spline shaft (1068) passes through the ball bearing (1066) and the drive helical gear (1067) in sequence. The spline shaft (1068) can be sleeved with the ball bearing (1066) and the drive helical gear (1067) in a vertically movable manner. The spline of the spline shaft (1068) is matched with the keyway of the drive helical gear (1067), so that the drive helical gear (1067) can both transmit torque with the rotation of the spline shaft (1068) and move up and down with the conveyor wheel assembly mounting plate (1091) along the spline shaft (1068).

9. The single / double layer conveying conversion mechanism in the vacuum chamber according to claim 6, characterized in that: The lifting actuator (103) includes a jack (1031) with a geared motor, a lifting guide module (1032), a lifting link (1033), and a bellows (1034). The lower end of the lifting guide module (1032) is connected to the jack (1031), and the upper end is connected to the lower end of the lifting link (1033). The upper end of the lifting link (1033) is connected to the conveyor wheel assembly mounting plate (1091), thereby driving the lifting link (1033) to control the horizontal conveying drive assembly (106) to move up and down. The bellows (1034) passes through the lifting link (1033), and its upper end is sealed to the upper end of the vacuum chamber (101), and its lower end is sealed to the lifting guide module (1032). The jack (1031) is a high-lead ball screw type power jack (1031).

10. The single / double layer conveying and switching mechanism in the vacuum chamber according to claim 9, characterized in that: The lifting guide module (1032) includes a lifting support plate (1035), a lifting guide shaft (1036), and a linear bearing (1037). The upper end of the lifting support plate (1035) is connected to the lifting connecting rod (1033) and the bellows (1034), and the lower end is connected to the jack (1031). The linear bearing (1037) is located at the four corners of the lifting support plate (1035). The lifting guide shaft (1036) can move up and down through the linear bearing (1037), and its lower end is fixed on the fixed frame of the lifting execution component (103), so that the lifting support plate (1035) can move up and down with the operation of the jack (1031).

11. The single / double layer conveying conversion mechanism in the vacuum chamber according to claim 9, characterized in that: The lifting drive mechanism (104) includes a lifting drive motor (1041), a dual-output reducer (1042), and a power worm gear (1043). The lifting drive motor (1041) is connected to the dual-output reducer (1042), and each end of the dual-output reducer (1042) is connected to a power worm gear (1043). The two power worm gears (1043) are respectively engaged with the jacks (1031) of the lifting execution assembly (103) located at both ends of the double-layer horizontal conveyor wheel assembly (109), providing the driving force for the lifting execution assembly (103) to move up and down.

12. The single / double layer conveying and switching mechanism in the vacuum chamber according to claim 6, characterized in that: The intermediate lifting guide assembly (107) includes a lifting slide rail (1071) and a lifting slider (1072) that are connected in a cooperating manner. There are two lifting sliders (1072) and they are fixed on the conveyor wheel assembly mounting plate (1091). The lifting slide rail (1071) is vertically arranged and fixed on the connecting plate (111) to realize the sliding connection between the conveyor wheel assembly mounting plate (1091) and the connecting plate (111).

13. A coating system for conveying a double-layer carrier plate within a vacuum chamber, characterized in that: It includes a double-layer vacuum feeding chamber (113), a feeding lifting vacuum chamber (114), a single-layer process chamber (115), a discharging lifting vacuum chamber (116), and a double-layer vacuum discharging chamber (117) connected in sequence; the feeding lifting vacuum chamber (114) and the discharging lifting vacuum chamber (116) are each provided with a single- or double-layer conveying conversion mechanism in the vacuum chamber as described in claims 1 to 12.

14. The conveying and coating system for a double-layer carrier plate in a vacuum chamber according to claim 13, characterized in that: The double-layer vacuum feeding chamber (113) and the double-layer vacuum discharging chamber (117) are equipped with multi-stage vacuum extraction and cavitation chambers.

15. The conveying and coating system for a double-layer carrier plate in a vacuum chamber according to claim 13, characterized in that: The upper and lower horizontal conveyor wheel sets in the double-layer vacuum feeding chamber (113) and the double-layer vacuum discharging chamber (117) are independently driven and their operation can be controlled separately.

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