Nozzle structure and chemical vapor deposition apparatus

Abstract

This invention discloses a nozzle structure and a chemical vapor deposition (CVD) apparatus. The nozzle structure includes a nozzle, a gas ring, and an anti-loosening component. The nozzle and gas ring are connected via a connecting part, and the anti-loosening component is located at the connecting part. The anti-loosening component includes an anti-loosening washer and a locking unit. The locking unit is connected to the anti-loosening washer and the gas ring to prevent the anti-loosening washer from rotating relative to the gas ring. This invention solves the loosening problem in the prior art by setting a dedicated anti-loosening component. The anti-loosening washer directly prevents relative movement between the nozzle and the gas ring by increasing friction, while the locking unit ensures the durability of the anti-loosening effect by fixing the position of the anti-loosening washer. Thus, even after multiple temperature cycles, the connection between the nozzle and the gas ring remains stable, thereby avoiding abnormal film thickness problems caused by loosening. Simultaneously, due to the improved anti-loosening effect, the need for re-opening and tightening is reduced, saving maintenance time and reducing the risk of internal contamination.

Description

Technical Field

[0001] This utility model relates to the field of chemical vapor deposition technology, and in particular to a nozzle structure and chemical vapor deposition equipment. Background Technology

[0002] During the routine maintenance of high-density plasma chemical vapor deposition equipment, frequent heating and cooling operations can cause the connection between the nozzle and the gas ring to loosen, resulting in abnormal film thickness and affecting process quality. In the existing technology, the connection between the nozzle and the gas ring lacks an effective anti-loosening mechanism and cannot maintain a stable connection under temperature changes. Therefore, it is necessary to reopen the cavity and tighten it, which increases maintenance time and the risk of cavity contamination. Utility Model Content

[0003] The embodiments of this utility model provide a nozzle structure and a chemical vapor deposition device that can effectively prevent the nozzle from loosening.

[0004] To address the aforementioned problems, according to one aspect of this application, an embodiment of the present invention provides a nozzle structure comprising a nozzle, a gas ring, and an anti-loosening component. The nozzle and the gas ring are connected via a connecting portion, and the anti-loosening component is disposed at the connecting portion to prevent the nozzle from becoming loose relative to the gas ring. The anti-loosening component includes an anti-loosening washer and a locking unit, the locking unit being connected to the anti-loosening washer and the gas ring to prevent the anti-loosening washer from rotating relative to the gas ring.

[0005] In some embodiments, the locking unit includes a mounting groove disposed on the gas ring and an anti-rotation protrusion disposed on the anti-loosening gasket, the anti-rotation protrusion matching the mounting groove.

[0006] In some embodiments, the anti-loosening gasket is made of a corrosion-resistant and high-temperature-resistant material, and the corrosion-resistant and high-temperature-resistant material is a 6-series aluminum alloy.

[0007] In some embodiments, the anti-loosening gasket is a double-sided toothed gasket, wherein one tooth contacts the connecting end of the nozzle and the other tooth contacts the mating end of the gas ring; and the tooth shape of the double-sided toothed gasket is a continuous sawtooth structure.

[0008] In some embodiments, the anti-loosening gasket is an elastic gasket.

[0009] In some embodiments, the anti-loosening component further includes a protective gasket disposed on the outer ring of the anti-loosening gasket for wrapping the anti-loosening gasket; the protective gasket is made of Teflon material.

[0010] In some embodiments, the mounting groove is an annular groove, and the anti-rotation protrusions are a plurality of evenly distributed protrusions.

[0011] In some embodiments, the nozzle connection end has a radially extending sealing flange that extends 4mm-6mm in the radial direction to cover the gap between the nozzle and the gas ring.

[0012] In some embodiments, the anti-loosening gasket includes a metal substrate and an elastic layer, the elastic layer being adhered to the surface of the metal substrate; the anti-rotation protrusion is integrated onto the metal substrate.

[0013] According to another aspect of this application, an embodiment of the present invention provides a chemical vapor deposition apparatus, the chemical vapor deposition apparatus including the nozzle structure described above.

[0014] Compared with the prior art, the nozzle structure of this utility model has at least the following beneficial effects: The nozzle structure provided by this utility model includes a nozzle, a gas ring, and an anti-loosening component. The nozzle and the gas ring are connected by a connecting part, and the anti-loosening component is disposed at the connecting part to prevent the nozzle from becoming loose relative to the gas ring. The anti-loosening component includes an anti-loosening washer and a locking unit. The locking unit is connected to the anti-loosening washer and the gas ring to prevent the anti-loosening washer from rotating relative to the gas ring.

[0015] This invention solves the loosening problem in the prior art by incorporating a specialized anti-loosening component. The anti-loosening gasket directly prevents relative movement between the nozzle and the gas ring by increasing friction, while the locking unit ensures the durability of the anti-loosening effect by fixing the position of the anti-loosening gasket. Thus, even after multiple temperature cycles, the connection between the nozzle and the gas ring remains stable, preventing abnormal film thickness caused by loosening. Simultaneously, the improved anti-loosening effect reduces the need for re-opening and tightening, saving maintenance time and reducing the risk of internal contamination.

[0016] The chemical vapor deposition equipment provided by this utility model is designed based on the above-described nozzle structure. Its beneficial effects are the same as those of the above-described nozzle structure, and will not be repeated here.

[0017] The above description is only an overview of the technical solution of this utility model. In order to better understand the technical means of this utility model and to implement it in accordance with the contents of the specification, the preferred embodiments of this utility model are described in detail below with reference to the accompanying drawings. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0019] Figure 1 This is a cross-sectional view of a nozzle structure provided in an embodiment of the present invention; Figure 2 This is a schematic diagram of the anti-loosening component and the gas ring cooperating in a nozzle structure according to an embodiment of the present invention; Figure 3 This is a front view of an anti-loosening gasket in a nozzle structure provided by an embodiment of this utility model; Figure 4 This is a side view of an anti-loosening gasket in a nozzle structure provided by an embodiment of the present invention; Figure label explanation: 1. Nozzle; 11. Sealing flange; 2. Gas ring; 3. Anti-loosening component; 31. Anti-loosening gasket; 32. Locking unit; 321. Mounting groove; 322. Anti-rotation protrusion. Detailed Implementation

[0020] To further illustrate the technical means and effects adopted by this utility model to achieve its intended purpose, the specific implementation methods, structures, features, and effects according to this utility model application are described in detail below with reference to the accompanying drawings and preferred embodiments. In the following description, different "an embodiment" or "an embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0021] In the description of this utility model, it should be clarified that the terms "first," "second," etc., in the specification, claims, and drawings of this utility model are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence; the terms "vertical," "lateral," "longitudinal," "front," "back," "left," "right," "up," "down," "horizontal," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing this utility model, and do not mean that the device or element referred to must have a specific orientation or position, and therefore should not be construed as a limitation of this utility model.

[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances.

[0023] To better understand the above technical solutions, the following will provide a detailed explanation of the technical solutions in conjunction with the accompanying drawings and specific implementation methods.

[0024] Example 1 This embodiment provides a nozzle structure, such as Figures 1-4 As shown, the nozzle structure includes a nozzle 1, a gas ring 2, and an anti-loosening component 3. The nozzle 1 and the gas ring 2 are connected by a connecting part. The anti-loosening component 3 is disposed at the connecting part to prevent the nozzle 1 from becoming loose relative to the gas ring 2. The anti-loosening component 3 includes an anti-loosening washer 31 and a locking unit 32. The locking unit 32 is connected to the anti-loosening washer 31 and the gas ring 2 to prevent the anti-loosening washer 31 from rotating relative to the gas ring 2.

[0025] In the nozzle structure, nozzle 1 and gas ring 2 are directly connected via a connecting part, and anti-loosening component 3 is disposed at this connecting part. Specifically, anti-loosening component 3 includes an anti-loosening washer 31 and a locking unit 32, wherein the anti-loosening washer 31 is placed between the connection interface of nozzle 1 and gas ring 2, and the locking unit 32 is connected to both the anti-loosening washer 31 and gas ring 2. This arrangement ensures that anti-loosening component 3 maintains contact with nozzle 1 while being tightly connected to gas ring 2, forming a complete anti-loosening system. More specifically, the anti-loosening washer 31 directly faces the connection end face of nozzle 1, while the locking unit 32 is fixedly connected to gas ring 2 from the other side, ensuring that the entire anti-loosening component 3 is securely in the preset position.

[0026] Nozzle 1, a side nozzle made of ceramic, primarily serves to deliver process gas; gas ring 2, made of aluminum, is responsible for gas distribution and flow guidance; and anti-loosening component 3 is specifically designed to maintain connection stability. Anti-loosening gasket 31 prevents relative movement between nozzle 1 and gas ring 2 by increasing the friction of the contact surface, while locking unit 32 ensures that anti-loosening gasket 31 itself will not shift or rotate through its special connection method.

[0027] After the nozzle 1 and gas ring 2 are assembled via the connecting part, the anti-loosening component 3 is placed between them. The anti-loosening gasket 31 directly bears the clamping force from the nozzle 1 and gas ring 2, preventing loosening through friction; at the same time, the locking unit 32 provides positioning support for the anti-loosening gasket 31 through its fixed connection with the gas ring 2. Furthermore, this fit ensures that the anti-loosening component 3 can continue to perform its anti-loosening function when the temperature changes, and will not fail due to thermal expansion and contraction.

[0028] This embodiment addresses the loosening problem in the prior art by incorporating a dedicated anti-loosening component 3. The anti-loosening gasket 31 directly prevents relative movement between the nozzle 1 and the gas ring 2 by increasing friction, while the locking unit 32 ensures the durability of the anti-loosening effect by fixing the position of the anti-loosening gasket 31. Thus, even after multiple temperature cycles, the connection between the nozzle 1 and the gas ring 2 remains stable, preventing abnormal film thickness caused by loosening. Simultaneously, the improved anti-loosening effect reduces the need for re-opening and tightening, saving maintenance time and reducing the risk of internal contamination.

[0029] In a specific embodiment, the locking unit 32 includes a mounting groove 321 disposed on the gas ring 2 and an anti-rotation protrusion 322 disposed on the anti-loosening gasket 31, wherein the anti-rotation protrusion 322 matches the mounting groove 321.

[0030] The mounting groove 321 is a recessed structure machined into the gas ring 2, while the anti-rotation protrusion 322 is a portion protruding from the surface of the anti-loosening washer 31. More specifically, the anti-rotation protrusion 322 is designed to be fully embedded inside the mounting groove 321, so that when the anti-loosening washer 31 is installed onto the gas ring 2, these protrusions can accurately enter the corresponding grooves. Multiple anti-rotation protrusions 322 are evenly distributed along the circumference of the anti-loosening washer 31, while the mounting grooves 321 form a corresponding annular arrangement on the gas ring 2, ensuring that the anti-rotation protrusion 322 can find the corresponding mounting groove 321 for engagement regardless of the angle. This correspondence design guarantees a perfect fit between the two components.

[0031] The main function of the mounting groove 321 is to provide a reliable positioning and locking structure on the gas ring 2. It serves as a fixed reference, providing clear positional guidance for the installation of the anti-loosening gasket 31. Furthermore, the depth and shape of the mounting groove 321 determine the depth and tightness to which the anti-rotation protrusion 322 can be embedded, thereby controlling the relative position between the anti-loosening gasket 31 and the gas ring 2. The anti-rotation protrusion 322, through its cooperation with the mounting groove 321, securely locks the anti-loosening gasket 31 onto the gas ring 2, preventing circumferential rotation during operation. These protrusions transmit various rotational forces experienced by the anti-loosening gasket 31 to the gas ring 2, eliminating the possibility of relative movement through mechanical interlocking.

[0032] When the anti-loosening gasket 31 is installed onto the gas ring 2, the anti-rotation protrusion 322 will fully embed into the corresponding mounting groove 321, forming a tight fit. This fit ensures that when the anti-loosening gasket 31 is subjected to rotational force in any direction, the side of the anti-rotation protrusion 322 will contact the side wall of the mounting groove 321, effectively transferring the rotational force to the gas ring 2, the fixed component. This prevents the anti-loosening gasket 31 from rotating relative to the gas ring 2, ensuring that the anti-loosening gasket 31 always remains in the correct installation position. Furthermore, this reliable anti-rotation effect allows the anti-loosening gasket 31 to continuously and stably perform its anti-loosening function, and even during frequent temperature rises and falls, it will not change position due to vibration or thermal stress, thus ensuring the long-term stability of the entire nozzle structure.

[0033] In a specific embodiment, the anti-loosening gasket 31 is made of a corrosion-resistant and high-temperature-resistant material, and the corrosion-resistant and high-temperature-resistant material is a 6-series aluminum alloy.

[0034] The anti-loosening gasket 31 is made of corrosion-resistant and high-temperature-resistant material, specifically 6-series aluminum alloy. This means that the anti-loosening gasket 31 is not made of ordinary metal materials, but rather a special alloy that can maintain stable performance under harsh working conditions. More specifically, 6-series aluminum alloy, as a typical corrosion-resistant and high-temperature-resistant material, has its internal composition and structure specially optimized, giving it two core characteristics: excellent resistance to environmental corrosion and the ability to maintain its mechanical strength and shape stability at high temperatures. This ensures that the anti-loosening gasket 31 will not become a weak link in the entire connection structure when facing the dual challenges of corrosive chemical gases and drastic temperature fluctuations.

[0035] First, the plasma environment within the process chamber of the high-density plasma chemical vapor deposition (PDCVD) equipment is highly corrosive. The inherent corrosion resistance of 6-series aluminum alloy ensures that the anti-loosening gasket 31 will not be damaged by corrosion, preventing particulate contamination within the chamber caused by corrosion products. This also guarantees the service life of the anti-loosening gasket 31 itself. Second, during the temperature rise and fall processes of routine equipment maintenance, components experience significant temperature changes. The high-temperature resistance of 6-series aluminum alloy prevents the anti-loosening gasket 31 from softening, creeping, or losing elasticity due to high temperatures, thus providing a consistently stable and reliable anti-loosening pressure. Furthermore, the stability of the material properties directly guarantees the durability of the anti-loosening function. The anti-loosening gasket 31 will not fail prematurely due to material deterioration. This ensures that the connection between the nozzle 1 and the gas ring 2 remains tight even after multiple thermal cycles, fundamentally avoiding abnormal film thickness problems caused by loosening. It also reduces the number of times the chamber needs to be opened for maintenance, achieving the technical effects of saving maintenance time and reducing the risk of contamination.

[0036] In a specific embodiment, the anti-loosening gasket 31 is a double-sided toothed gasket, one side of which contacts the connecting end of the nozzle 1, and the other side of which contacts the mating end of the gas ring 2; and the tooth shape of the double-sided toothed gasket is a continuous sawtooth structure.

[0037] The anti-loosening gasket 31 is specifically defined as a double-sided toothed gasket, characterized by toothed structures on both contact surfaces. One toothed surface makes close contact with the connecting end of the nozzle 1, while the other toothed surface makes close contact with the mating end of the gas ring 2. These teeth are designed as a continuous serrated structure. More specifically, this means that the anti-loosening gasket 31 is no longer an ordinary flat gasket, but rather its upper and lower working surfaces are made with a textured surface featuring tiny serrations. These serrations are continuous and uniform in shape. When the gasket is installed between the nozzle 1 and the gas ring 2, these sharp serrations will slightly embed into the surfaces of the two contacting components.

[0038] The effects of this special double-sided toothed structure are significant and direct. First, the continuous serrated surface of each side greatly increases the friction between the anti-loosening washer 31 and the corresponding contact surface. When the nozzle 1 is subjected to vibration or thermal stress and tends to loosen, the inclined surface of the serrations generates a huge resistance, making loosening difficult. Furthermore, this design achieves a bidirectional anti-loosening function, that is, it simultaneously prevents the nozzle 1 from sliding relative to the anti-loosening washer 31 and the anti-loosening washer 31 from sliding relative to the gas ring 2, thus establishing a reliable anti-loosening mechanism throughout the entire connection link. Its effect is also reflected in the fact that even during long-term temperature cycling, due to changes in contact pressure caused by different coefficients of thermal expansion of materials, the serrated structure can maintain its anti-loosening performance through its mechanical interlocking action, unlike ordinary flat washers that fail instantly due to pressure reduction. Finally, this stable and reliable anti-loosening effect ensures that the connection position between the nozzle 1 and the gas ring 2 will not change due to loosening, thereby avoiding abnormal film thickness problems caused by it.

[0039] In a specific embodiment, the anti-loosening gasket 31 is an elastic gasket.

[0040] The anti-loosening gasket 31 is designed as an elastic gasket, meaning it has the ability to deform under pressure and return to its original shape after the external force is removed. This elastic characteristic makes the anti-loosening gasket 31 not a rigid spacer, but a dynamic element that can actively adapt to environmental changes. When the anti-loosening gasket 31 is installed between the nozzle 1 and the gas ring 2 and tightened, it will undergo a certain amount of compressive deformation, thereby accumulating elastic potential energy at the connection interface. This built-in elastic restoring force allows the anti-loosening gasket 31 to continuously apply an outward clamping force to the contact surface, and this clamping force remains effective even if the connecting parts become slightly loose due to temperature changes or vibration.

[0041] Because the elastic gasket provides continuous clamping force, it creates an adaptive anti-loosening mechanism at the connection between nozzle 1 and gas ring 2. When the equipment undergoes heating and cooling cycles, nozzle 1 and gas ring 2, made of different materials, will experience slight dimensional changes due to differences in their coefficients of thermal expansion. The elastic gasket can compensate for these changes through its own elastic deformation, maintaining tight contact between the connection surfaces and preventing loosening due to thermal cycling. Furthermore, this elastic clamping force ensures that the contact friction between the anti-loosening gasket 31 and nozzle 1 and gas ring 2 does not significantly weaken due to changes in external conditions, providing double protection for the anti-loosening effect.

[0042] In a specific embodiment, the anti-loosening component 3 further includes a protective gasket, which is disposed on the outer ring of the anti-loosening gasket 31 and is used to wrap the anti-loosening gasket 31.

[0043] The anti-loosening component 3 incorporates a protective gasket, which is positioned around the outer periphery of the anti-loosening gasket 31, forming a wraparound structure. More specifically, the inner edge of the protective gasket contacts or maintains a minimal gap with the outer peripheral surface of the anti-loosening gasket 31, while its outer edge extends beyond the boundary of the anti-loosening gasket 31, thus achieving complete spatial coverage of the anti-loosening gasket 31. This arrangement creates an isolation layer between the anti-loosening gasket 31 and the external environment. When the anti-loosening component 3 is installed at the connection between the nozzle 1 and the gas ring 2, the protective gasket acts like a protective shield, enveloping the anti-loosening gasket 31. The technical benefits of this wraparound design are primarily in isolation and protection. Because the protective gasket completely encloses the outer ring of the anti-loosening gasket 31, it effectively prevents various deposits and contaminants generated during the process from directly adhering to the surface of the anti-loosening gasket 31 or penetrating its structural gaps. Furthermore, this isolation effect prevents the formation of difficult-to-remove residual films around the anti-loosening gasket 31, which, if peeled off in subsequent processes, would become a source of particulate contamination in the cavity. By isolating the anti-loosening gasket 31 from the process environment, the protective gasket ensures the cleanliness of the surface of the anti-loosening gasket 31, while also maintaining the cleanliness of the entire connection area, ultimately achieving the technical effect of avoiding cavity contamination caused by residual films in the gaps.

[0044] The protective pad is made of Teflon material.

[0045] Teflon, a high-performance engineering plastic, possesses an extremely smooth surface and excellent chemical stability. Its surface virtually does not adsorb any deposits and exhibits inertness to most chemicals. When this material is applied to protective gaskets, it can maintain its integrity and functionality in the harsh environment of high-density plasma chemical vapor deposition equipment.

[0046] The extremely low surface energy of Teflon material makes it difficult for reaction byproducts and thin film materials generated during the process to adhere to its surface, fundamentally reducing the possibility of residual film formation. Furthermore, even after long-term use and cleaning, deposits on the Teflon surface are easier to remove, unlike metal surfaces where deposits can bond firmly. Secondly, Teflon's excellent corrosion resistance ensures that the protective gasket will not corrode itself in a plasma environment, preventing the generation of contaminating particles and maintaining long-term protective reliability. These material properties complement the structure and function of the protective gasket, not only enhancing its protective effect on the anti-loosening gasket 31 but also maintaining the cleanliness of the entire process chamber, ultimately achieving the technical objective of reducing the risk of contamination within the chamber.

[0047] In a specific embodiment, the mounting groove 321 is an annular groove, and the anti-rotation protrusions 322 are multiple evenly distributed protrusions.

[0048] The mounting groove 321 is a continuous and regularly shaped groove structure. Meanwhile, anti-rotation protrusions 322 are designed to be multiple and evenly distributed at corresponding positions on the anti-loosening gasket 31. More specifically, these anti-rotation protrusions 322 are arranged at equal intervals along the circumference of the anti-loosening gasket 31, and the position and shape of each protrusion precisely correspond to the trajectory of the annular groove. This arrangement forms a multi-point, full-circumferential fit, ensuring that regardless of the rotation angle of the anti-loosening gasket 31, the multiple anti-rotation protrusions 322 on it can simultaneously engage with different sections of the annular mounting groove 321.

[0049] This combination of annular groove and multiple evenly distributed protrusions produces significant technical benefits. First, the annular groove provides continuous, seamless guidance and accommodating space for the multiple anti-rotation protrusions 322, eliminating the need for specific angle alignment during the installation of the anti-loosening gasket 31 and greatly improving assembly convenience. Furthermore, the multiple evenly distributed anti-rotation protrusions 322 disperse the rotational force on the anti-loosening gasket 31 across multiple contact points of the annular mounting groove 321, preventing stress concentration and enhancing the overall torsional resistance of the locking unit 32. This multi-point contact design also creates a redundant protection mechanism; even if one anti-rotation protrusion 322 experiences slight wear due to long-term use, the remaining protrusions can still maintain effective anti-rotation function, thereby significantly improving the reliability and service life of the anti-loosening assembly 3.

[0050] In a specific embodiment, the connecting end of the nozzle 1 has a radially extending sealing flange 11, the sealing flange 11 extending radially by 4mm-6mm, to cover the gap between the nozzle 1 and the gas ring 2.

[0051] The nozzle 1 features a sealing flange 11 at its connecting end, extending radially outwards by a distance controlled between 4 and 6 millimeters. This structural improvement allows the sealing flange 11 to effectively cover the original joint gap between the nozzle 1 and the gas ring 2, forming a shielding layer. More specifically, after the nozzle 1 and gas ring 2 are assembled, this radially extending sealing flange 11 protrudes, its edge precisely concealing the underlying connection gap, thus achieving complete visual and structural coverage of the gap.

[0052] Because the sealing flange 11 completely covers the gap between the nozzle 1 and the gas ring 2, reactant gases and deposited materials can no longer directly enter and accumulate inside the gap during the chemical vapor deposition process. Furthermore, this physical shielding fundamentally eliminates the possibility of residual film formation at the gap, and the peeling off of residual film is the main cause of particulate contamination within the chamber. By preventing film growth at the gap, the sealing flange 11 effectively maintains the cleanliness of the process chamber, ensuring the quality stability of the deposition process. At the same time, this structural improvement simplifies daily equipment maintenance, as frequent cleaning of deposits at the gap is no longer required, saving maintenance time and reducing the risk of contamination introduced during maintenance operations.

[0053] In a specific embodiment, the anti-loosening gasket 31 includes a metal substrate and an elastic layer, the elastic layer being adhered to the surface of the metal substrate; the anti-rotation protrusion 322 is integrated onto the metal substrate. The anti-rotation protrusion 322 penetrates or protrudes from the elastic layer.

[0054] The main body of the anti-loosening gasket 31 is composed of a robust metal substrate, on which a layer of elastic material is tightly adhered to the working surface. More specifically, the metal substrate provides the main structural support and mechanical strength for the entire gasket, while the elastic layer covering its surface imparts good flexibility and adaptability to the contact surface. Of particular note is that the anti-rotation protrusion 322, used for anti-rotation function, is directly integrally formed with or firmly attached to the metal substrate, meaning that the key structure undertaking the mechanical locking function is built on the most robust substrate portion, rather than set on the elastic material.

[0055] The metal substrate ensures that the anti-loosening gasket 31 has sufficient overall rigidity to withstand long-term mechanical loads, while the anti-rotation protrusion 322 on it reliably forms a stable mechanical interlock with the mounting groove 321 on the gas ring 2. This direct metal-to-metal connection provides the most reliable anti-rotation guarantee. Simultaneously, the elastic layer on the surface generates a uniformly distributed rebound force when compressed. This continuous elastic pressure ensures that the anti-loosening gasket 31 maintains tight contact with the nozzle 1 and the gas ring 2 at all times. Even when high and low temperature cycles cause minor dimensional changes in the metal components, the elastic layer can compensate for these changes through its own deformation, maintaining a stable contact state. This design combines the structural strength of the metal material with the adaptability of the elastic material, allowing the anti-loosening gasket 31 to provide continuous anti-loosening pressure through the elastic layer and to ensure that it does not rotate through the anti-rotation protrusion 322 on the metal substrate, thus achieving a double-layered anti-loosening effect. Ultimately, this ensures that the connection between nozzle 1 and gas ring 2 remains highly stable throughout the entire working cycle of the high-density plasma chemical vapor deposition equipment, effectively preventing abnormal film thickness caused by loosening and significantly improving the process stability and reliability of the equipment.

[0056] The operation of the nozzle structure provided in this embodiment begins with the installation stage. First, the anti-loosening gasket 31 is placed in the preset position of the gas ring 2. At this time, the anti-rotation protrusion 322 on the anti-loosening gasket 31 will accurately embed into the mounting groove 321 of the gas ring 2, forming a preliminary circumferential fixation. Then, the connecting end of the nozzle 1 is aligned and pressed with the mating end of the gas ring 2. During this process, the sealing flange 11 at the end of the nozzle 1 will cover the joint, and the anti-loosening gasket 31 will undergo elastic deformation due to axial compression. When the equipment enters the process operation state, the introduced gas will be distributed through the gas ring 2 and ejected from the nozzle 1. At this time, the anti-loosening gasket 31 maintains sufficient frictional resistance at the connection interface between the nozzle 1 and the gas ring 2 through the continuous pressing force provided by its double-sided tooth structure or elastic layer. During the heating and cooling cycle, the thermal expansion difference of different materials will cause slight displacement of the connecting parts. At this time, the elastic characteristics of the anti-loosening gasket 31 can automatically compensate for this dimensional change and always maintain a stable pressing state. Furthermore, the anti-rotation protrusion 322 integrated on the metal substrate and the annular mounting groove 321 effectively prevent the anti-loosening gasket 31 from rotating on its own, while the protective gasket on the outer ring of the anti-loosening gasket 31 continuously blocks process deposits from approaching the working area of ​​the anti-loosening gasket 31. Throughout the entire operation, the sealing flange 11 always plays a role in shielding gaps, preventing residual film from forming at the connection, thereby ensuring long-term stable operation of the equipment without the need for frequent maintenance.

[0057] Example 2 This embodiment provides a chemical vapor deposition apparatus, which includes the nozzle structure described in Embodiment 1.

[0058] The chemical vapor deposition equipment provided in this embodiment significantly improves the overall operational stability and maintenance convenience of the equipment by employing a nozzle structure including an anti-loosening component 3. During repeated heating and cooling process cycles, the internal anti-loosening component 3 reliably maintains a tight connection between the nozzle 1 and the gas ring 2, effectively preventing uneven distribution of process gas due to loose connections. This ensures uniform deposition film thickness and avoids product quality abnormalities caused by such connections. Simultaneously, due to the fundamentally improved reliability of the connection structure, the equipment no longer requires frequent opening of the chamber for nozzle tightening during routine maintenance. This not only saves production time but also reduces the risk of contamination introduced by chamber opening operations, thereby ensuring the cleanliness of the process environment and improving the overall efficiency of the equipment.

[0059] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any person skilled in the art can easily conceive of various equivalent modifications or substitutions within the technical scope disclosed in this utility model, and these modifications or substitutions should all be covered within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the scope of the claims.

Claims

1. A nozzle structure, characterized by, The nozzle structure includes a nozzle, a gas ring, and an anti-loosening component. The nozzle and the gas ring are connected by a connecting part. The anti-loosening component is disposed at the connecting part to prevent the nozzle from becoming loose relative to the gas ring. The anti-loosening component includes an anti-loosening washer and a locking unit. The locking unit is connected to the anti-loosening washer and the gas ring to prevent the anti-loosening washer from rotating relative to the gas ring.

2. The nozzle structure of claim 1, wherein The locking unit includes a mounting groove on the gas ring and an anti-rotation protrusion on the anti-loosening gasket, wherein the anti-rotation protrusion matches the mounting groove.

3. The nozzle structure of claim 2, wherein The anti-loosening gasket is made of corrosion-resistant and high-temperature-resistant material, and the corrosion-resistant and high-temperature-resistant material is 6-series aluminum alloy.

4. The nozzle structure of claim 3, wherein The anti-loosening gasket is a double-sided toothed gasket, with one side of the teeth contacting the connecting end of the nozzle and the other side of the teeth contacting the mating end of the gas ring; and the teeth of the double-sided toothed gasket are all continuous sawtooth structures.

5. The nozzle structure of claim 3, wherein The anti-loosening gasket is an elastic gasket.

6. A nozzle structure according to any one of claims 1-4, characterized in that The anti-loosening component also includes a protective gasket, which is disposed on the outer ring of the anti-loosening gasket and is used to wrap the anti-loosening gasket; the protective gasket is made of Teflon material.

7. The nozzle structure of claim 2, wherein The mounting groove is an annular groove, and the anti-rotation protrusions are multiple evenly distributed protrusions.

8. The nozzle structure of claim 1, wherein The nozzle connection end has a radially extending sealing flange, which extends radially by 4mm-6mm to cover the gap between the nozzle and the gas ring.

9. The nozzle structure of claim 2, wherein The anti-loosening gasket includes a metal substrate and an elastic layer, the elastic layer being attached to the surface of the metal substrate; the anti-rotation protrusion is integrated onto the metal substrate.

10. A chemical vapor deposition apparatus characterized by comprising: The chemical vapor deposition apparatus includes the nozzle structure as described in any one of claims 1-9.

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