Boat pushing mechanism and coating equipment

Abstract

The utility model provides a kind of push boat mechanism and coating equipment, wherein push boat mechanism includes boat bearing component, horizontal rotation adjusting component and vertical movement adjusting component;Boat bearing component is used to bear boat;Horizontal rotation adjusting component is connected to boat bearing component, and drives boat bearing component to carry out rotating motion, so that boat switches between first orientation and second orientation;Vertical movement adjusting component drives boat bearing component and horizontal rotation adjusting component to carry out lifting motion, so that boat enters heating space with first orientation;The push boat mechanism provided by the utility model can adapt to furnace bodies of different pipe diameter sizes, improving its applicability and effectively reducing the manufacturing cost of furnace body.

Description

Technical Field

[0001] This utility model belongs to the field of coating technology, and more specifically, it relates to a boat-pushing mechanism and coating equipment. Background Technology

[0002] With the continuous development of the photovoltaic industry, current photovoltaic processes such as diffusion, oxidation, annealing, doping, PECVD, and LPCVD all require reactions to take place within a furnace structure. Specifically, solar cells (silicon wafers or phantom wafers) are mounted in a specific boat (carrier) and then sent into the furnace for processing. Through heating within the furnace and the introduction of specific reactive gases, specific processes such as coating, diffusion, oxidation, and thin film deposition are achieved on the solar cells. As the photovoltaic industry continues to develop, the requirements for equipment are constantly increasing, and the process routes are also constantly being updated.

[0003] In existing technologies, after the solar cells are loaded into the boat, a boat-pushing mechanism is needed to move the boat into the furnace body for processing. However, the existing boat-pushing mechanism has limited applicability when applied to furnace bodies of different diameters, resulting in an increase in the furnace body's diameter and thus increasing the furnace body's manufacturing cost. Utility Model Content

[0004] The purpose of this invention is to provide a boat-pushing mechanism and a coating equipment to solve the problem that the existing boat-pushing mechanism cannot adapt to furnaces of different pipe diameters.

[0005] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0006] This utility model provides a boat-pushing mechanism for feeding a boat loaded with battery cells into the heating space inside a furnace. The length of the boat in a first position is less than the length of the boat in a second position, and when the boat is in the heating space in the second position, the surface of the battery cells to be coated faces the inner wall of the furnace. The boat-pushing mechanism includes:

[0007] Boat-supporting components, used to support the boat;

[0008] The horizontal rotation adjustment component is connected to the boat-bearing component and drives the boat-bearing component to rotate, so that the boat can switch between the first position and the second position.

[0009] The vertical movement adjustment component drives the boat-bearing component and the horizontal rotation adjustment component to move up and down, so that the boat enters the heating space in the first position.

[0010] Furthermore, the furnace body includes an inner furnace body and an outer furnace body that together enclose the heating space; the boat-pushing mechanism also includes:

[0011] A horizontal movement adjustment component is connected between a horizontal rotation adjustment component and a vertical movement adjustment component, and drives the horizontal rotation adjustment component and the boat-bearing component to move horizontally, so that the boat moves to a position close to the inner furnace body after switching to the second position.

[0012] Furthermore, the boat-supporting components include a support frame and a rotating drum base; the support frame includes a support plate for placing the boat, a mounting plate fixed on the rotating drum base, and a column connecting the support plate and the mounting plate.

[0013] Furthermore, the horizontal rotation adjustment component includes a first belt drive assembly and a rotation drive component; the first belt drive assembly connects the rotation drive component and the rotating drum seat, and drives the boat bearing component to rotate under the driving action of the rotation drive component.

[0014] Furthermore, the horizontal movement adjustment component includes a second belt drive assembly, a translation drive component, a horizontal guide rail, a translation base, and a support base; the translation base and the rotating drum base are connected through the support base; the second belt drive assembly connects the translation drive component and the translation base, and under the driving action of the translation drive component, it drives the translation base to slide along the horizontal guide rail, thereby driving the boat bearing component to move horizontally.

[0015] Furthermore, the vertical movement adjustment component includes a lifting support, a lifting drive, and a lifting module; the lifting support is equipped with a horizontal movement adjustment component, a horizontal rotation adjustment component, and a boat-bearing component; the lifting module is equipped with a vertical lead screw and a lifting slide, and the lifting slide is connected to the lifting support; the lifting drive is fixed at one end of the lifting module and is used to drive the lifting support to slide along the vertical lead screw, thereby driving the boat-bearing component to perform lifting and lowering movements.

[0016] Furthermore, the support frame and the rotating drum seat are connected by a rotation limit block, and the support seat is provided with a limit block that cooperates with the rotation limit block; and / or, the lifting support is provided with translation limit members located at both ends of the horizontal guide rail.

[0017] Furthermore, the vertical movement adjustment component also includes a first drag chain, the two ends of which are respectively connected to the lifting support and the lifting module; and / or, the horizontal movement adjustment component also includes a second drag chain, the two ends of which are respectively connected to the support base and the lifting support.

[0018] Furthermore, a heat insulation plate is provided on the side of the lifting module facing the furnace body, and fixed seats are provided at intervals on the other side of the lifting module.

[0019] This utility model also provides a coating device, including a furnace body and at least one boat-pushing mechanism as described above.

[0020] Compared with existing technologies, the beneficial effects of the boat-pushing mechanism and coating equipment provided by this utility model are as follows: The boat-pushing mechanism of this utility model allows the boat to enter the furnace body from a first position and perform coating from a second position. This boat-pushing mechanism has lower requirements for the furnace body pipe diameter, making it suitable for furnace bodies with both small and large pipe diameters. Therefore, the boat-pushing mechanism of this utility model can adapt to furnace bodies of different pipe diameters, improving its applicability and effectively reducing the manufacturing cost of the furnace body. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this utility model, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram showing the orientation of the boat in this utility model;

[0023] Figure 2 This is a schematic diagram of the coating equipment in this utility model;

[0024] Figure 3 This is a schematic diagram of the rear structure of the boat-pushing mechanism in this utility model;

[0025] Figure 4 This is a front structural diagram of the boat-pushing mechanism in this utility model;

[0026] Figure 5 This is a three-dimensional structural diagram of the boat-pushing mechanism in this utility model;

[0027] The main markings in the attached figures are as follows:

[0028] Y, first orientation; X, second orientation;

[0029] 1. Boat pushing mechanism; 2. Boat; 3. Furnace body;

[0030] 11. Boat-supporting components; 12. Horizontal rotation adjustment components; 13. Horizontal movement adjustment components; 14. Vertical movement adjustment components;

[0031] 111. Support frame; 1110. Column; 112. Rotary cylinder base;

[0032] 121. First belt drive assembly; 1210. First synchronous belt; 122. Rotary drive component;

[0033] 131. Second belt drive assembly; 1310. Second synchronous belt; 132. Translation drive component; 133. Horizontal guide rail; 134. Translation base; 135. Support base; 136. Second cable chain;

[0034] 141. Lifting support component; 142. Lifting drive component; 143. Lifting module; 1431. Vertical lead screw; 1432. Lifting slide; 144. First cable chain; 145. Heat insulation plate; 146. Fixed base;

[0035] 151. Rotation limit block; 152. Limiting stop block; 153. Translation limit component. Detailed Implementation

[0036] To make the technical problem to be solved, the technical solution, and the beneficial effects of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present utility model and are not intended to limit the present utility model.

[0037] like Figure 1 and Figure 2 As shown, boat 2 has a square or near-square structure, with a first orientation Y and a second orientation X, and the length of boat 2 in the first orientation Y is less than its length in the second orientation X. If boat 2 enters the furnace body 3 in the first orientation Y, the requirement for the diameter of the furnace body 3 is relatively low due to the shorter length of boat 2 in the first orientation Y. However, if boat 2 is placed in the heating space in the second orientation X, the surface of the solar cell to be coated faces the inner wall of the furnace body 3, which helps to improve the coating quality and coating efficiency of the solar cell.

[0038] To address this issue, the boat-pushing mechanism 1 of this invention enables the boat 2 to move vertically, horizontally, and in a rotational direction. This mechanism not only allows the boat 2 to smoothly enter the furnace body 3 in the first orientation Y, but also switches to the second orientation X after the boat 2 enters the heating space, thus adapting to furnace bodies 3 with different pipe diameters and significantly improving the applicability and flexibility of the boat-pushing mechanism 1.

[0039] like Figure 3 , Figure 4 and Figure 5 As shown, the boat-pushing mechanism 1 includes a boat-bearing component 11, a horizontal rotation adjustment component 12, and a vertical movement adjustment component 14; wherein, the boat-bearing component 11 is used to carry the boat 2; the horizontal rotation adjustment component 12 is connected to the boat-bearing component 11 and drives the boat-bearing component 11 to rotate, so that the boat 2 switches between the first position Y and the second position X; the vertical movement adjustment component 14 drives the boat-bearing component 11 and the vertical movement adjustment component 14 to move up and down, so that the boat 2 enters the heating space in the first position Y.

[0040] With this design, the boat-pushing mechanism 1 of this invention not only allows the boat 2 to perform coating in the second orientation X, but also enables the boat 2 to enter or exit the furnace body 3 in the first orientation Y. Compared to the boat 2 entering or exiting the furnace body 3 in the second orientation X, the boat 2 can enter or exit the furnace body 3 more smoothly. In this case, the boat-pushing mechanism 1 has lower requirements for the diameter of the furnace body 3, making it suitable for furnace bodies 3 with smaller diameters, and of course, also suitable for furnace bodies 3 with larger diameters. Therefore, the boat-pushing mechanism 1 of this invention can adapt to furnace bodies 3 of different diameters, improving its applicability and effectively reducing the manufacturing cost of the furnace body 3.

[0041] Furthermore, the furnace body 3 includes an inner furnace body and an outer furnace body that together form a heating space. The boat pushing mechanism 1 also includes a horizontal movement adjustment component 13, which is connected between the horizontal rotation adjustment component 12 and the vertical movement adjustment component 14, and drives the horizontal rotation adjustment component 12 and the boat carrying component 11 to move horizontally, so that the boat 2 moves to a position close to the inner furnace body after switching to the second orientation Y, thereby placing the boat 2 in the optimal process temperature zone.

[0042] At this time, the boat pushing mechanism 1 of this utility model realizes the movement of the boat 2 on the boat bearing component 11 in the rotation direction, horizontal direction and vertical direction through the horizontal rotation adjustment component 12, the horizontal movement adjustment component 13 and the vertical movement adjustment component 14.

[0043] Specifically, during the process of using the boat-pushing mechanism 1 to send the boat 2 into the furnace body 3, the boat 2 on the boat-bearing component 11 is first moved up and down in the first orientation Y by the vertical movement adjustment component 14 until the boat 2 is placed in the heating space; then, the boat 2 on the boat-bearing component 11 is rotated by the horizontal rotation adjustment component 12 until the boat 2 switches to the second orientation X; next, the boat 2 on the boat-bearing component 11 is moved horizontally in the second orientation X by the horizontal movement adjustment component 13 until the boat 2 is close to the inner furnace body; then, the processing is carried out. After the processing is completed, the boat 2 is sent out of the furnace body 3 by the boat-pushing mechanism 1. It should be noted that when the boat-pushing mechanism 1 carries the boat 2, the boat-bearing component 11 and the boat 2 must first move up and down before they can move horizontally. When the boat-pushing mechanism 1 is not carrying the boat 2, the order of the up and down movement and the horizontal movement of the boat-bearing component 11 can be interchanged. In addition, after the boat-pushing mechanism 1 sends the boat 2 into the furnace body, the boat-bearing component 11 and the boat 2 should first rotate before they can move horizontally. If horizontal movement is performed before rotation, it will damage the inner furnace body.

[0044] In the boat pushing mechanism 1 of this utility model, the boat carrying component 11 includes a support frame 111 and a rotating cylinder seat 112; the support frame 111 includes a carrying plate for placing the boat 2, a mounting plate fixed on the rotating cylinder seat 112, and a column 1110 connecting the carrying plate and the mounting plate.

[0045] The present invention does not limit the number of columns 1110, but preferably sets them to three. Considering that the heating space inside the furnace body 3 is divided into high and low temperature zones in the vertical direction, the columns 1110 are made of relatively long square tubes so that the boat 2 can be set on the rotating drum seat 112 at a specified height through the support frame 111, thereby bringing the boat 2 closer to the high temperature zone inside the furnace body 3, thereby improving the coating efficiency.

[0046] In the boat pushing mechanism 1 of this utility model, the horizontal rotation adjustment component 12 includes a first belt drive assembly 121 and a rotation drive component 122; the first belt drive assembly 121 connects the rotation drive component 122 and the rotating drum seat 112, and drives the boat carrying component 11 to rotate under the driving action of the rotation drive component 122.

[0047] The first belt drive assembly 121 consists of a first drive wheel, a first driven wheel, and a first synchronous belt 1210. The first drive wheel is mounted on the drive end of the rotary drive component 122, while the first driven wheel is mounted on the bottom end of the rotary drum seat 112. The first synchronous belt 1210 is sleeved between the first drive wheel and the first driven wheel.

[0048] The rotary drive component 122 can be powered by a drive motor. A protective cover can be provided on the outside of the rotary drive component 122 to prevent excessive heat from being transferred to the rotary drive component 122 and causing damage to it.

[0049] This invention utilizes the driving action of the rotary drive component 122 to drive the boat-bearing component 11 and the boat 2 on it to rotate, thereby realizing the switching of the boat 2 between the first orientation Y and the second orientation X.

[0050] Furthermore, the boat-bearing component 11 and the horizontal rotation adjustment component 12 are mounted on the support base 135 of the horizontal movement adjustment component 13. To prevent the horizontal rotation adjustment component 12 from causing excessive rotation of the boat 2, the support frame 111 of the boat-bearing component 11 and the rotating drum seat 112 are connected by a rotation limit block 151, and a limit stop block 152 that cooperates with the rotation limit block 151 is provided on the support base 135. This design effectively avoids excessive movement of the boat 2, ensuring that the boat 2 can smoothly enter or exit the furnace body 3, while preventing damage to the battery cells inside the boat 2 due to excessive movement.

[0051] In the boat pushing mechanism 1 of this utility model, the horizontal movement adjustment component 13 includes a second belt drive assembly 131, a translation drive component 132, a horizontal guide rail 133, a translation base 134, and a support base 135; the translation base 134 is connected to the rotating drum seat 112 through the support base 135; the second belt drive assembly 131 connects the translation drive component 132 and the translation base 134, and under the driving action of the translation drive component 132, drives the translation base 134 to slide along the horizontal guide rail 133, thereby driving the boat carrying component 11 to move horizontally.

[0052] The second belt drive assembly 131 comprises a second drive wheel, a second driven wheel, a slider, and a second synchronous belt 1310. The second drive wheel is mounted on the drive end of the translation drive component 132, while the second driven wheel is mounted on the lifting support 141 of the vertical movement adjustment component 14. The second synchronous belt 1310 is sleeved between the second drive wheel and the second driven wheel. The slider is fixed to the second synchronous belt 1310 and fixedly connected to the translation base 134. The translation drive component 132 may use a drive motor as its power source.

[0053] This utility model uses the driving action of the translation drive component 132 to drive the translation base 134 to slide on the horizontal guide rail 133 through the second belt transmission component 131, thereby driving the boat bearing component 11 and the boat 2 on it to move horizontally, so as to realize the movement of the boat 2 in the horizontal direction.

[0054] The horizontal movement adjustment component 13 is mounted on the lifting support component 141 of the vertical movement adjustment component 14.

[0055] In addition, the horizontal movement adjustment component 13 also includes a second drag chain 136, the two ends of which are connected to the support base 135 and the lifting support component 141, respectively. The second drag chain 136 can improve the traction effect of the translation drive component 132 on the translation base 134 to drive the boat 2, making the horizontal movement of the boat 2 smoother, while avoiding damage to the second synchronous belt 1310.

[0056] To prevent the horizontal movement adjustment component 13 from causing excessive horizontal movement of the boat 2, the lifting support component 141 is equipped with translation limiters 153 located at both ends of the horizontal guide rail 133. The translation limiters 153 restrict the horizontal movement of the boat 2 caused by the translation base 134. This design effectively prevents excessive movement of the boat 2, ensuring that the boat 2 can smoothly enter or exit the furnace body 3, while preventing damage to the battery cells inside the boat 2 due to excessive movement.

[0057] In the boat-pushing mechanism 1 of this utility model, the vertical movement adjustment component 14 includes a lifting support component 141, a lifting drive component 142, and a lifting module 143. The lifting support component 141 is equipped with a horizontal rotation adjustment component 12, a horizontal movement adjustment component 13, and a boat-bearing component 11. The lifting module 143 contains a vertical lead screw 1431 and a lifting slide 1432, with the lifting slide 1432 connected to the lifting support component 141. The lifting drive component 142 is fixed to one end of the lifting module 143 and is used to drive the lifting support component 141 to slide along the vertical lead screw 1431, thereby driving the boat-bearing component 11 to perform lifting and lowering movements. The lifting drive component 142 can be powered by a drive motor.

[0058] This utility model utilizes the driving action of the lifting drive component 142 to drive the lifting support component 141 to slide on the vertical lead screw 1431 via the lifting module 143, thereby driving the boat bearing component 11 and the boat 2 on it to move vertically, so as to realize the movement of the boat 2 in the vertical direction.

[0059] In addition, the vertical movement adjustment component 14 also includes a first drag chain 144, the two ends of which are connected to the lifting support component 141 and the lifting module 143, respectively. The first drag chain 144 can improve the traction effect of the lifting drive component 142 on the lifting support component 141 to drive the boat 2, making the movement of the boat 2 in the vertical direction smoother, while also protecting the vertical lead screw 1431.

[0060] In addition, a heat insulation plate 145 is provided on the side of the lifting module 143 facing the furnace body 3. This heat insulation plate 145 can prevent the heat emitted from the boat 2 and the furnace body 3 from being transferred to the lifting module 143, thereby preventing excessive heat from being transferred to the components inside the lifting module 143 and causing damage to the components. A fixing seat 146 is provided at intervals on the other side of the lifting module 143. The fixing seat 146 is fixedly connected to the frame of the coating equipment, so that the boat pushing mechanism 1 can be fixedly connected in the coating equipment.

[0061] like Figure 2 As shown, the coating equipment of this utility model includes a furnace body 3 and at least one boat-pushing mechanism 1. The furnace body 3 may include an inner furnace body and an outer furnace body that together form a heating space. Multiple boat-pushing mechanisms 1 can be arranged outside the furnace body 3 to move synchronously or to control the movement individually. The number of boat-pushing mechanisms 1 arranged outside the furnace body 3 can be one, two, three, etc., and is not limited here. In addition, the specific structure of the boat-pushing mechanism 1 has been described in detail above, so it will not be repeated here. The boat-pushing mechanism 1 of this utility model has wide applicability and can be adapted to different furnace body 3 pipe diameters, thereby effectively reducing the manufacturing cost of the furnace body 3 and significantly reducing the economic investment in the coating process.

[0062] The boat-pushing mechanism and coating equipment provided by this utility model adopt an integrated boat-pushing mechanism, which can drive the boat to move in multiple positions in the horizontal, vertical, and rotational directions. First, the boat enters the heating space inside the furnace in a first position, and then the coating is performed in a second position. Using the method of the boat entering the furnace in the first position reduces the requirement for the furnace tube diameter and effectively avoids the problem of excessively large furnace tube diameter caused by the boat directly entering in the second position. Therefore, the boat-pushing mechanism of this utility model has higher applicability and a wider range of application scenarios, and can be used in furnaces with various tube diameters. Especially when applied to furnaces with smaller tube diameters, it can effectively reduce cost increases. Furthermore, this utility model also avoids excessive movement of the boat in the horizontal and rotational directions, thereby preventing the boat from being unable to enter or exit the furnace due to excessive movement, and avoiding damage to the battery cells inside the boat caused by excessive movement.

[0063] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions and improvements made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A boat pushing mechanism, characterized by, The boat is used to feed a boat loaded with solar cells into the heating space inside the furnace. The length of the boat in a first position is less than the length of the boat in a second position, and when the boat is in the heating space in the second position, the surface of the solar cells to be coated faces the inner wall of the furnace. The boat pushing mechanism includes: Boat-supporting components, used to support the boat; A horizontal rotation adjustment component is connected to the boat-bearing component and drives the boat-bearing component to rotate, so that the boat can switch between a first position and a second position. The vertically moving adjustment component drives the boat-bearing component and the horizontally rotating adjustment component to move up and down, so that the boat enters the heating space in the first position.

2. The boat-pushing mechanism as described in claim 1, characterized in that, The furnace body includes an inner furnace body and an outer furnace body that together form a heating space; The boat-pushing mechanism also includes: A horizontal movement adjustment component is connected between the horizontal rotation adjustment component and the vertical movement adjustment component, and drives the horizontal rotation adjustment component and the boat-bearing component to move horizontally, so that the boat moves to a position close to the inner furnace body after switching to the second position.

3. The boat pushing mechanism according to claim 2, wherein The boat-bearing component includes a support frame and a rotating cylinder base; the support frame includes a support plate for placing the boat, a mounting plate fixed on the rotating cylinder base, and a column connecting the support plate and the mounting plate.

4. The boat pushing mechanism according to claim 3, wherein The horizontal rotation adjustment component includes a first belt drive assembly and a rotation drive component; the first belt drive assembly connects the rotation drive component to the rotating drum seat, and drives the boat bearing component to rotate under the driving action of the rotation drive component.

5. The boat pushing mechanism as claimed in claim 4, wherein, The horizontal movement adjustment component includes a second belt drive assembly, a translation drive component, a horizontal guide rail, a translation base, and a support base; the translation base is connected to the rotating drum seat through the support base; the second belt drive assembly connects the translation drive component and the translation base, and under the driving action of the translation drive component, drives the translation base to slide along the horizontal guide rail, thereby driving the boat bearing component to move horizontally.

6. The boat pushing mechanism according to claim 5, wherein The vertical movement adjustment component includes a lifting support, a lifting drive, and a lifting module; the lifting support is equipped with the horizontal movement adjustment component, the horizontal rotation adjustment component, and the boat-bearing component; the lifting module contains a vertical lead screw and a lifting slide, and the lifting slide is connected to the lifting support; the lifting drive is fixed to one end of the lifting module and is used to drive the lifting support to slide along the vertical lead screw, thereby driving the boat-bearing component to perform lifting and lowering movements.

7. The boat pushing mechanism according to claim 6, wherein The support frame and the rotating drum seat are connected by a rotation limit block, and the support seat is provided with a limit block that cooperates with the rotation limit block; and / or, the lifting support is provided with translation limit members located at both ends of the horizontal guide rail.

8. The boat-pushing mechanism as described in claim 6, characterized in that, The vertical movement adjustment component also includes a first drag chain, the two ends of which are respectively connected to the lifting support and the lifting module; And / or, the horizontal movement adjustment component further includes a second drag chain, the two ends of which are respectively connected to the support base and the lifting support.

9. The boat pushing mechanism of claim 6, wherein, A heat insulation plate is provided on the side of the lifting module facing the furnace body, and fixed seats are provided at intervals on the other side of the lifting module.

10. A coating apparatus, characterized by, It includes a furnace body and at least one boat-pushing mechanism as described in any one of claims 1 to 9.

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