An online canoe bidding device

Abstract

This utility model discloses an online graphite boat tapping device, belonging to the field of equipment and process technology related to silicon wafer production. It includes a graphite boat and a belt, which is fixedly connected to a worktable. A rack is fixedly connected to one side of the worktable, and a slot is opened below the side of the worktable near the rack. A clamping plate is slidably connected inside the slot. In use, the graphite boat is placed on a support plate secured by the belt with a buckle. The belt is activated to transmit the load to the support plate, causing the clamping plate gear to mesh and rotate with the worktable rack. This causes a disc above the gear, with different axes, to eccentrically revolve within a grooved ring, promoting lateral cyclic movement of the grooved ring. Simultaneously, a ZG205 vibration motor on the support plate is activated, transmitting vibration to the graphite boat. The movement of the grooved ring drives the suction and exhaust pistons via a push rod. The suction piston, in conjunction with a suction cup and suction pipe, sucks up dust from below the graphite boat and exhausts air. The exhaust piston, in conjunction with a duct and exhaust port, blows air to the top of the graphite boat to clean away dust.

Description

Technical Field

[0001] This invention relates to the field of equipment and process technology related to silicon wafer production, and particularly to an online boat-pulling device. Background Technology

[0002] In the production of crystalline silicon solar cells, the graphite boat is a key tool for transporting silicon wafers in tubular PECVD coating equipment. The fit between the silicon wafer and the process checkpoints on the graphite boat directly affects the production quality. If the silicon wafer is not placed properly and does not contact the checkpoints, it will change the electric field, leading to uneven coating or even microcracks in the silicon wafer. Therefore, the graphite boat needs to be tapped before coating to ensure that the silicon wafer is accurately positioned.

[0003] Traditional tapping boats, while capable of precise control of localized force and adaptable to various graphite boat sizes, suffer from rapid component wear, complex calibration, and are prone to missed taps or uneven force, increasing the risk of microcracks in silicon wafers and damage to the graphite boat, making them unsuitable for large-scale, high-efficiency production. Vibration-type tapping boats achieve full-area coverage through overall high-frequency micro-vibration, eliminating the need for complex calibration, making them suitable for continuous mass production. They reduce direct impact on the graphite boat to extend its lifespan and offer strong integration with the production line, resulting in high efficiency. However, improper parameter control can lead to silicon wafer detachment.

[0004] In existing publicly available technologies, such as the automatic boat-beating device in patent CN223110425U, the core only achieves passive dust prevention during boat-beating through an adsorption membrane. The dust removal method is singular and cannot actively remove the dust accumulated under the graphite boat and the suspended dust on top, resulting in incomplete dust removal coverage. If the traditional local beating structure is used, it is also prone to problems such as rapid component wear and uneven boat-beating force, increasing the risk of microcracks in silicon wafers. Furthermore, it is not deeply integrated with the graphite boat transport process and lacks synchronous linkage design with the production line, making it difficult to adapt to the needs of large-scale continuous production.

[0005] Therefore, there is an urgent need to develop an online boat-beating device that combines the advantages of high efficiency and stability, full-area coverage and strong linkage of vibration-type boat beating, while also preventing the graphite boat from falling off, in order to meet the production requirements of high efficiency, stability and high quality of crystalline silicon solar cells.

[0006] Therefore, an online boat-launching device is proposed. Utility Model Content

[0007] The purpose of this invention is to solve the problems of time-consuming and laborious manual tapping of graphite boats, frequent operational oversights, easy accumulation of graphite particles on the surface of the graphite boat during the tapping process, dust falling into the interior and affecting the quality of silicon wafers, and the lack of automated synchronous dust removal and stable transmission guarantee in the existing technology. Therefore, an online tapping device is proposed.

[0008] To achieve the above objectives, the present invention adopts the following technical solution:

[0009] An online boat-pulling device includes a graphite boat and a belt. The belt is connected to both sides of a worktable. A rack is fixedly connected to one side of the worktable. A slot is opened below the side of the worktable near the rack. A clamping plate is slidably connected inside the slot. A support plate is fixedly installed above the belt by a buckle. A suction cup and a vibration motor are fixedly installed above the support plate. An air suction box is fixedly connected below the suction cup by an air suction pipe. An exhaust port is fixedly connected to one side of the air suction box. A grooved ring is movably connected to the other side of the air suction box by a piston rod. An exhaust box is movably connected to the side of the grooved ring away from the air suction box by a piston rod. The exhaust box is fixedly installed on the clamping plate. A clamping plate is fixedly connected to the side of the support plate near the rack.

[0010] Preferably, the vibration motor is model ZG205.

[0011] Preferably, a gear is rotatably connected above the card plate, a disc is fixedly installed above the gear, the disc is rotatably connected inside the grooved ring, an exhaust port is fixedly connected above the clamping plate, the exhaust port is fixedly connected to the exhaust box through an air duct, and the graphite boat is placed above the pallet.

[0012] Preferably, the gear size is adapted to the rack, the clamp size is adapted to the slot, and the disk size is adapted to the grooved ring.

[0013] Preferably, the central shaft of the gear is connected to a position off-center from the center of the disk.

[0014] Preferably, the power transmission path of the disc is a belt rotation, which drives the pallet and the graphite boat above to move, so that the pallet and the fixed worktable and rack are relatively displaced. The clamping plate moves with the pallet, and the gear on it meshes with the rack and rotates, thereby driving the disc connected to different shafts to rotate synchronously.

[0015] Compared with the prior art, the beneficial effects of this utility model are as follows:

[0016] 1. In the graphite boat processing step of silicon wafer production, the graphite boat loaded with silicon wafers is placed on a pre-adjusted tray and limited in position. The tray and belt are fixed with buckles. The belt transmission is started, and the vibration motor on the tray is turned on at the same time. The vibration is transmitted through the tray to achieve efficient and uniform tapping of the boat, replacing the time-consuming, labor-intensive and easily overlooked manual tapping. The buckles can also prevent the tray from shifting and the graphite boat from falling off the belt, ensuring continuous and safe production and standardized and automated silicon wafer production.

[0017] 2. The belt movement causes displacement between the pallet and the worktable, which in turn moves the clamping plate and the chuck. The gear on the chuck meshes with the rack of the worktable and rotates, which in turn drives the discs on different axes to revolve eccentrically within the grooved ring, causing the grooved ring to move laterally in a circular motion. When the grooved ring moves, it pushes or pulls the piston rod to exhaust air from the suction box or suck away dust from under the graphite boat, store air in the exhaust box, or blow air from the exhaust vent to clean the dust on top of the graphite boat, thus preventing contamination of the silicon wafers. Attached Figure Description

[0018] Figure 1 A three-dimensional structural diagram of an online boat-launching device proposed in this utility model. Figure 1 ;

[0019] Figure 2 A three-dimensional structural diagram of an online boat-launching device proposed in this utility model. Figure 2 ;

[0020] Figure 3 This is a cross-sectional view of the structure of an online boat-launching device proposed in this utility model;

[0021] Figure 4 This is a schematic diagram of the structure below the graphite boat of the online boat-tapping device proposed in this utility model;

[0022] Figure 5 This is a schematic diagram of the structure below the suction cup of the online boat-tapping device proposed in this utility model;

[0023] Figure 6 This utility model Figure 5 An enlarged schematic diagram of the structure at point A in the middle.

[0024] In the diagram: 1. Graphite boat; 2. Exhaust vent; 3. Air duct; 4. Rack; 5. Clamping plate; 6. Discharge port; 7. Groove; 8. Belt; 9. Buckle; 10. Gear; 11. Support plate; 12. Workbench; 13. Exhaust box; 14. Clamping plate; 15. Suction cup; 16. Piston rod; 17. Suction pipe; 18. Suction box; 19. Grooved ring; 20. Disc; 21. Vibration motor. Detailed Implementation

[0025] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. All other embodiments obtained by those skilled in the art based on the embodiments of the present utility model without creative effort are within the protection scope of the present utility model.

[0026] Reference Figures 1-6An online boat-beating device includes a graphite boat 1 and a belt 8. The belt 8 is driven and connected to both sides of a workbench 12. A rack 4 is fixedly connected to one side of the workbench 12. A slot 7 is opened below the side of the workbench 12 near the rack 4. A clamping plate 14 is slidably connected inside the slot 7. A support plate 11 is fixedly installed above the belt 8 by a buckle 9. A suction cup 15 and a vibration motor 21 are fixedly installed above the support plate 11. An air suction box 18 is fixedly connected below the suction cup 15 by an air suction pipe 17. An exhaust port 6 is fixedly connected to one side of the air suction box 18. A grooved ring 19 is movably connected to the other side by a piston rod 16. An exhaust box 13 is movably connected to the side of the grooved ring 19 away from the air suction box 18 by the piston rod 16. The exhaust box 13 is fixedly installed on the clamping plate 14. A clamping plate 5 is fixedly connected to the side of the support plate 11 near the rack 4.

[0027] Through the above technical solution, in the graphite boat 1 processing step of silicon wafer production, the silicon wafer must first be accurately placed inside the graphite boat 1. After the silicon wafer loading is completed, the graphite boat 1 is stably placed above the pre-adjusted and positioned pallet 11, and the graphite boat 1 is reliably limited by the fixing structure of the pallet 11. At the same time, a special buckle 9 is used to fasten the pallet 11 to the surface of the belt 8, ensuring that there is no relative displacement gap between the pallet 11 and the belt 8.

[0028] After the above preparations are completed, the conveyor belt 8 is started. The conveyor belt 8 will drive the pallet 11 and the graphite boat 1 fixed on top of it to move smoothly along the preset transmission path. At the same time, the vibration motor 21 pre-installed on top of the pallet 11 is started. The mechanical vibration generated by the vibration motor 21 is directly transmitted to the graphite boat 1 through the rigidity of the pallet 11. In this process, the mechanical vibration can achieve a comprehensive and uniform effect on the graphite boat 1, and can transmit the vibration energy to every area of ​​the graphite boat 1, effectively ensuring the efficiency and stability of the boat-picking process, greatly shortening the processing time of a single batch of graphite boats 1, and eliminating the need for continuous manual intervention, thus significantly reducing labor costs.

[0029] This design fundamentally replaces the traditional manual method of using tools to tap the graphite boat 1. The traditional manual method not only consumes a lot of time and manpower, but is also prone to omissions in the processing of graphite boat 1 due to uneven manual operation and incomplete tapping coverage, which affects the quality of subsequent production processes. The fastening function of the special buckle 9 can effectively prevent the pallet 11 from shifting or loosening due to vibration during vibration operation and conveyor belt 8 transmission, thereby preventing the graphite boat 1 from leaving the conveyor belt 8 transmission path, ensuring the continuity and safety of the entire production process, and providing strong support for the standardized and automated operation of silicon wafer production.

[0030] Specifically, the vibration motor 21 is model ZG205, a gear 10 is rotatably connected above the clamping plate 14, a disc 20 is fixedly installed above the gear 10, the disc 20 is rotatably connected inside the grooved ring 19, an exhaust port 2 is fixedly connected above the clamping plate 5, the exhaust port 2 is fixedly connected to the exhaust box 13 through the air pipe 3, and the graphite boat 1 is placed above the support plate 11.

[0031] Through the above technical solution, during the operation of the online boat-pulling device, when the belt 8 is transported along the preset track, it will drive the pallet 11, which is fixedly connected to the belt 8 by the buckle 9, to move synchronously, thereby causing a relative displacement between the pallet 11 and the fixedly installed worktable 12. During this process, the clamp 5 and the locking plate 14, which are fixedly connected to the pallet 11, will change position relative to the worktable 12 synchronously as the pallet 11 moves. Since the gear 10 rotatably connected above the locking plate 14 is size-matched to the rack 4 fixed on one side of the worktable 12 and always remains in a meshed state, when the pallet 11 drives the locking plate 14 to move, the rack 4 will generate a meshing driving force on the gear 10, causing the gear 10 to rotate around its own axis.

[0032] As gear 10 rotates, it drives the disk 20 fixedly connected above it to move synchronously. Because disk 20 and gear 10 are designed with different axes (the central axis of gear 10 is connected to a position off-center of disk 20), the rotation of gear 10 is converted into eccentric revolution of disk 20 around the axis of gear 10. Disk 20 is rotatably connected inside grooved ring 19, and the dimensions of disk 20 and grooved ring 19 are compatible. In addition, grooved ring 19 adopts a specific grooved structure design, which restricts its longitudinal displacement and allows only lateral movement. Therefore, the continuous eccentric revolution of disk 20 will drive grooved ring 19 to perform cyclic reciprocating motion in the lateral direction.

[0033] Specifically, the gear 10 is sized to fit the rack 4, the clamping plate 14 is sized to fit the slot 7, and the disc 20 is sized to fit the grooved ring 19. The central shaft of the gear 10 is connected to the disc 20 at a position off-center. The power transmission path of the disc 20 is as follows: the belt 8 rotates, driving the support plate 11 and the graphite boat 1 above to move, causing the support plate 11 to have relative displacement with the fixed worktable 12 and the rack 4. The clamping plate 14 moves with the support plate 11, and the gear 10 on it meshes with the rack 4 and rotates, thereby driving the disc 20 connected to different shafts to rotate synchronously.

[0034] With the above technical solution, when the grooved ring 19 moves to one side, it pushes the piston rod 16 connected to it to move inside the intake box 18 via the push rod, while simultaneously pulling the other piston rod 16 out of the exhaust box 13. When the piston rod 16 moves inside the intake box 18, it compresses the internal space of the intake box 18, expelling the air inside from the exhaust port 6 (if there is a gas treatment requirement in the production scenario, the exhaust port 6 can be connected to a dedicated chamber for centralized treatment of the exhaust gas); while when the other piston rod 16 is pulled out of the exhaust box 13, it creates a negative pressure space inside the exhaust box 13, thereby storing external gas.

[0035] When the grooved ring 19 moves to the other side, the direction of movement reverses. At this time, the piston rod 16 in the intake box 18 will be pulled out by the push rod, and at the same time, the piston rod 16 in the exhaust box 13 will be pushed into the box. When the piston rod 16 is withdrawn from the suction box 18, a negative pressure is formed inside the suction box 18. The air and suspended graphite particles in the area below the graphite boat 1 can be drawn into the suction box 18 through the suction cup 15 above the support plate 11 and the connected suction pipe 17. This effectively prevents the graphite particles that fall off the surface of the graphite boat 1 during vibration from accumulating below, thus preventing pollution to the equipment transmission path or the surrounding environment. At the same time, when the piston rod 16 is inserted into the exhaust box 13, it will compress the gas stored in the box, so that the gas is transported through the air duct 3 to the exhaust port 2 above the clamping plate 5, and blown directionally from the exhaust port 2 towards the top of the graphite boat 1, blowing away the dust or small particles attached to the top of the graphite boat 1. This prevents dust from falling into the interior of the graphite boat 1 and coming into contact with the silicon wafer, ensuring that the silicon wafer production quality is not affected by impurities.

[0036] Working principle:

[0037] When using this invention, the graphite boat 1 is first placed on the tray 11 fixed by the belt 8 and the buckle 9. The belt 8 is started to transport the tray 11, which causes the tray 11 to move relative to the worktable 12. This causes the gear 10 on the connecting plate 14 of the tray 11 to mesh and rotate with the rack 4 of the worktable 12. This, in turn, causes the disc 20 above the gear 10 to rotate eccentrically within the grooved ring 19, causing the grooved ring 19 to move laterally in a circular motion. At the same time, the ZG205 vibration motor 21 on the tray 11 is started, and the vibration is transmitted through the tray 11 to beat the boat. When the grooved ring 19 moves, the push rod drives the suction piston and the exhaust piston to move. The suction piston, in conjunction with the suction cup 15 and the suction pipe 17, sucks away the dust below the graphite boat 1 and exhausts the air from the discharge port 6. The exhaust piston, in conjunction with the air pipe 3 and the exhaust port 2, blows air to the top of the graphite boat 1 to clean the dust.

[0038] The above are merely preferred embodiments of this utility model, but the scope of protection of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in this utility model, based on the technical solution and inventive concept of this utility model, should be included within the scope of protection of this utility model.

Claims

1. An online boat tapping device comprising a graphite boat (1), a belt (8) and a worktable (12), characterized in that, The belt (8) is connected to both sides of the workbench (12). A rack (4) is fixedly connected to one side of the workbench (12). A slot (7) is opened below the side of the workbench (12) near the rack (4). A clamping plate (14) is slidably connected inside the slot (7). A support plate (11) is fixedly installed above the belt (8) by a buckle (9). A suction cup (15) and a vibration motor (21) are fixedly installed above the support plate (11). The suction cup (15) is lower than the vibration motor (21). A suction box (18) is fixedly connected to the suction pipe (17). A discharge port (6) is fixedly connected to one side of the suction box (18), and a grooved ring (19) is movably connected to the other side via a piston rod (16). An exhaust box (13) is movably connected to the side of the grooved ring (19) away from the suction box (18) via a piston rod (16). The exhaust box (13) is fixedly installed on the clamping plate (14). A clamping plate (5) is fixedly connected to the side of the support plate (11) near the rack (4).

2. An online canoe-paddling apparatus according to claim 1, wherein The vibration motor (21) is model ZG205.

3. An online canoe-paddling apparatus according to claim 1, wherein A gear (10) is rotatably connected above the card plate (14), and a disc (20) is fixedly installed above the gear (10). The disc (20) is rotatably connected inside the grooved ring (19). An exhaust port (2) is fixedly connected above the clamping plate (5). The exhaust port (2) is fixedly connected to the exhaust box (13) through the air pipe (3). The graphite boat (1) is placed above the tray (11).

4. An on-line boat hitting device as claimed in claim 3, wherein The gear (10) is sized to fit the rack (4), the clamping plate (14) is sized to fit the slot (7), and the disc (20) is sized to fit the grooved ring (19).

5. An on-line boat hitting device as in claim 3, wherein, The central axis of the gear (10) is connected to the disk (20) at a position off-center.

6. An on-line boat tapping device according to claim 5, wherein The power transmission path of the disc (20) is as follows: the belt (8) rotates, driving the pallet (11) and the graphite boat (1) above to move, so that the pallet (11) and the fixed worktable (12) and rack (4) are relatively displaced, the clamping plate (14) moves with the pallet (11), and the gear (10) on it meshes with the rack (4) and rotates, thereby driving the disc (20) connected to different shafts to rotate synchronously.

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