A single crystal furnace weight stabilizer and single crystal furnace

Abstract

The utility model provides a kind of single crystal furnace weight stabilizer and single crystal furnace, it is related to the technical field of semiconductor processing tools, comprising: outer ring, the side wall of the outer ring is evenly provided with multiple assembly sites along circumference;Center ring, coaxial with the outer ring and is set to the inside of the outer ring;Connecting structure, connected between the outer ring and the center ring;Rolling element, set to the assembly site, the rolling element is used to support the outer ring in single crystal furnace auxiliary chamber inner wall longitudinal movement or around single crystal furnace steel cable does horizontal plane rotation;Guide piece, coaxial with the center ring and is set to the center ring, the guide piece is used to cooperate with the single crystal furnace steel cable to limit the swing of the steel cable.The utility model has the beneficial effect of effectively reducing the swing problem of weight in crystal drawing stage, avoiding the problem of dislocation in crystal drawing caused by weight swing in the production of existing single crystal silicon rod.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing equipment technology, and in particular to a single crystal furnace weight stabilizer and a single crystal furnace. Background Technology

[0002] In the process of pulling monocrystalline silicon, the yield rate of complete crystal formation is affected by a variety of factors, among which bridging is a significant issue, primarily caused by crystal dislocations. The crystal pulling step, as a crucial step in eliminating crystal dislocations, is of paramount importance in terms of its stability. However, in current practical crystal pulling processes, abnormal situations such as hammer oscillation frequently occur. This abnormality interferes with dislocation elimination in the crystal pulling step, leading to subsequent problems such as dislocation propagation and bridging, severely impacting the quality and efficiency of monocrystalline silicon production. Because the hammer is far from the top crystal lifting mechanism, even minor vibrations and aging of the steel cable are amplified, causing the hammer to oscillate during the crystal pulling stage.

[0003] To address the problem of hammer swaying, various hammer stabilization schemes have been proposed in existing technologies.

[0004] For example, the Chinese utility model patent with application number CN202223251430.X, patent name: "Weighted Hammer Stabilizing Device," and publication number CN219174671U, uses multiple circumferentially spaced air channels inside the weight, with air outlets formed on the sidewall of the weight. When the weight shakes, gas is introduced into the air channels and exhausted from the outlets in the same direction as the weight's shaking, thus achieving rapid return and stabilization of the weight. However, this solution requires precise judgment of the weight's shaking direction and exhausting gas in the corresponding direction, making the operation process cumbersome and demanding high operational precision, thus making it difficult to apply efficiently in actual production.

[0005] The Chinese invention patent with application number CN202211068294.2, titled "Single Crystal Furnace Sub-chamber Structure and Seed Crystal Stabilization Method for Stabilizing Single Crystal Seeds," and publication number CN115287746A, describes a method that uses a positioning ring welded to the center of the lower edge of the sub-chamber. The center of the positioning ring is concentric with the center of the tungsten wire rope, and its inner diameter is 2-4 mm larger than the outer diameter of the upper edge of the counterweight. When the seed crystal rises to its upper limit, it stops rising and remains stationary for a period of time. The assembly of the counterweight and the positioning ring gradually brings the counterweight from wobbling to stillness, thus stabilizing the seed crystal. However, this method only achieves counterweight stabilization after the seed crystal rises to its upper limit, and cannot provide continuous stability control of the counterweight. During the critical crystal-taking stage before the seed crystal reaches its upper limit, the counterweight may still wobble, affecting the crystal-taking quality.

[0006] Therefore, there is an urgent need for a single-crystal furnace weight stabilizer and a single-crystal furnace to solve the above-mentioned technical problems. Utility Model Content

[0007] The purpose of this invention is to provide a single-crystal furnace weight stabilizer and a single-crystal furnace, to solve the technical problems of existing weight stabilization schemes being cumbersome to operate and unable to achieve full-process weight stability. The various technical effects of the preferred technical solutions provided by this invention are detailed below.

[0008] To achieve the above objectives, the present invention provides the following technical solution:

[0009] This utility model provides a single crystal furnace counterweight stabilizer, comprising:

[0010] The outer ring has multiple assembly positions evenly provided on its sidewalls in the circumferential direction.

[0011] A central ring is coaxial with the outer ring and is disposed inside the outer ring;

[0012] A connecting structure connects the outer ring and the central ring;

[0013] A rolling element is provided at the assembly position. The rolling element is used to support the outer ring to move longitudinally within the inner wall of the single crystal furnace auxiliary chamber or to rotate horizontally around the single crystal furnace steel cable.

[0014] A guide member, coaxial with the central ring and disposed within the central ring, is used to cooperate with the single crystal furnace steel cable to limit the swing of the steel cable.

[0015] Preferably, the rolling element includes a spherical roller, and the mounting position includes a mounting hole adapted to the spherical roller.

[0016] Preferably, both the central ring and the outer ring are configured as separate structures, and each includes a semi-circular first component and a semi-circular second component, wherein:

[0017] The first component has grooves at both ends, and the second component has protrusions at both ends that are adapted to the grooves.

[0018] Preferably, an annular stop block is provided on the upper surface of the central ring, the annular stop block being used to prevent the single crystal furnace counterweight stabilizer from directly contacting the top surface of the single crystal furnace auxiliary chamber.

[0019] Preferably, the lower surface of the central ring is provided with an isolation structure, which is used to prevent the central ring from rubbing against the top of the counterweight.

[0020] Preferably, the isolation structure is an annular gasket.

[0021] Preferably, the guide is a bearing, and the bore diameter of the bearing is 2-3 mm larger than the diameter of the single crystal furnace steel cable.

[0022] Preferably, the outer diameter of the outer ring is 5-10 mm smaller than the inner diameter of the single crystal furnace sub-chamber.

[0023] Preferably, the overall height of the single crystal furnace counterweight stabilizer is 20-30mm.

[0024] A single crystal furnace includes a single crystal furnace body and the aforementioned single crystal furnace counterweight stabilizer, wherein the guide component of the single crystal furnace counterweight stabilizer is sleeved on the single crystal furnace steel cable of the single crystal furnace body.

[0025] This utility model provides a single-crystal furnace counterweight stabilizer and a single-crystal furnace, including an outer ring, a central ring, a connecting structure, rolling elements, and guide elements. The central ring and the outer ring are coaxial, forming a double-ring structure. The connecting structure connects the outer ring and the central ring. Multiple assembly positions are provided circumferentially on the side wall of the outer ring. The rolling elements are disposed within these assembly positions and support the outer ring to move longitudinally within the inner wall of the single-crystal furnace's auxiliary chamber or to rotate horizontally around the single-crystal furnace's steel cable. The guide elements are coaxial with the central ring and disposed within the central ring, cooperating with the single-crystal furnace's steel cable to limit its swaying. By adopting a structural design that matches the counterweight and auxiliary chamber, the wobbling problem of the counterweight during seed crystal welding, crystal pulling, and shoulder setting is effectively reduced, avoiding the dislocation problem caused by counterweight wobbling during crystal pulling in existing single-crystal silicon rod production. The rolling elements are placed on the outer side of the outer ring, preventing direct contact between the outer ring and the auxiliary chamber, thus significantly reducing the risk of impurities falling into the crucible and further improving the stability and crystal quality of the single-crystal pulling process. Attached Figure Description

[0026] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the structure of an embodiment of the single crystal furnace counterweight stabilizer of this utility model;

[0028] Figure 2 yes Figure 1 Front view structural diagram;

[0029] Figure 3 This is a schematic diagram of the outer ring structure in the single crystal furnace counterweight stabilizer of this utility model;

[0030] Figure 4 This is a schematic diagram of the central ring structure in the single crystal furnace counterweight stabilizer of this utility model.

[0031] In the figure: 1. Outer ring; 10. Assembly position; 11. First component of outer ring; 110. First groove; 12. Second component of outer ring; 120. First protrusion; 13. Bolt; 2. Central ring; 21. First component of central ring; 210. Second groove; 22. Second component of central ring; 220. Second protrusion; 3. Connecting structure; 4. Rolling element; 5. Guide element. Detailed Implementation

[0032] To make the objectives, technical solutions, and advantages of this utility model clearer, the technical solutions of this utility model will be described in detail below. Obviously, the described embodiments are only a part of the embodiments of this utility model, and not all of them. Based on the embodiments of this utility model, all other implementation methods obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0033] Figure 1 This is a structural schematic diagram of this embodiment. Figure 2 yes Figure 1 A schematic diagram of the main structure, such as... Figure 1 and Figure 2 As shown, this embodiment provides a single-crystal furnace counterweight stabilizer. The single-crystal furnace counterweight stabilizer has an overall annular structure with a height of 20-30mm. The compact height reduces the space occupied inside the single-crystal furnace and avoids interference with other components. The single-crystal furnace counterweight stabilizer in this embodiment includes an outer ring 1, a central ring 2, a connecting structure 3, a rolling element 4, and a guide element 5.

[0034] The outer diameter of the outer ring 1 is designed according to the specifications of the single crystal furnace sub-chamber. It is necessary to ensure that the outer diameter of the outer ring 1 and the inner wall of the single crystal furnace sub-chamber are reserved with a reasonable gap, so as to ensure that the outer ring can move freely while limiting the maximum shaking amplitude of the weight and improving the stability effect.

[0035] To avoid the risk of jamming due to excessively small gaps, or the weakening of stabilization due to excessively large gaps, in this embodiment, the outer diameter of the outer ring is set to be 5-10 mm smaller than the inner diameter of the single crystal furnace sub-chamber.

[0036] The central ring 2 is a ring structure with a smaller diameter than the outer ring 1. It is coaxial with the outer ring 1 and located inside the outer ring 1. The central ring 2 and the outer ring 1 are coaxial, forming a double-ring structure.

[0037] The connecting structure 3 connects the outer ring 1 and the central ring 2. In this embodiment, the connecting structure 3 includes 3-6 connecting rods evenly distributed circumferentially, which are used for connection and form a radial support structure. By setting the outer ring 1, the central ring 2 and the connecting structure 3, this single crystal furnace hammer stabilizer has a stable frame structure, realizing rigid support for the overall structure of the stabilizer and avoiding its own deformation from affecting the stabilization effect.

[0038] In this embodiment, a plurality of assembly positions 10 are uniformly provided circumferentially on the side wall of the outer ring 1. Rolling elements 4 are disposed within the assembly positions 10, and the rolling elements 4 are used to support the outer ring 1 to move longitudinally within the inner wall of the single crystal furnace sub-chamber or to rotate horizontally around the single crystal furnace steel cable. Optionally, the rolling elements 4 in this embodiment can be in the form of rollers, balls, etc., and the outer side of the rolling elements 4 protrudes from the surface of the outer ring to ensure contact with the inner wall of the single crystal furnace sub-chamber.

[0039] Preferably, in this embodiment, the rolling element is a spherical roller, and the mounting position 10 is a mounting hole adapted to the spherical roller. By setting a spherical roller, it has a more flexible steering capability compared to ordinary rollers, and can simultaneously adapt to the needs of longitudinal movement and horizontal rotation. This reduces the frictional resistance with the inner wall of the single crystal furnace sub-chamber, avoiding the problem of impurities falling into the crucible due to contact friction with the single crystal furnace sub-chamber, thus affecting crystal formation. In use, the cooperation between the rolling element 4 and the inner wall of the single crystal furnace sub-chamber ensures the smooth longitudinal movement of the stabilizer with the weight, while the outer ring 1 restricts the horizontal swaying of the weight, resulting in stronger stability.

[0040] The guide member 5 is coaxial with the central ring 2 and is disposed within the central ring 2. The guide member 5 is used to cooperate with the single crystal furnace steel cable to limit the swing of the steel cable, thereby reducing the cause of the hammer swaying at the source. In this embodiment, the guide member 5 is a bearing, and the diameter of the bearing is 2-3mm larger than the diameter of the single crystal furnace steel cable, ensuring that the steel cable can rise and fall freely while limiting large swings.

[0041] As an optional implementation, both the central ring 2 and the outer ring 1 are configured as separate structures, and each includes a semi-circular first component and a semi-circular second component. The first component has grooves at both ends, and the second component has protrusions at both ends that are adapted to the grooves.

[0042] Specifically, such as Figure 3 As shown, in this embodiment, the inner surfaces of the first component 11 of the outer ring are provided with first grooves 110 at both ends, and the inner surfaces of the second component 12 of the outer ring are provided with first protrusions 120 that are adapted to the first grooves 110 at both ends. Furthermore, a first connecting structure is provided on the sidewall of the first groove 110, and a second connecting structure is provided on the first protrusion 120. The first connecting structure and the second connecting structure can be connected by bolts 13.

[0043] like Figure 4 As shown, in this embodiment, the center of each end face of the first component 21 of the central ring is provided with a second groove 210, and the center of each end face of the second component 22 of the central ring is provided with a second protrusion 220 that is adapted to the second groove 210. The second protrusion 220 can be inserted into the second groove 210.

[0044] In use, the central ring can be connected by inserting the first component 21 and the second component 22 of the central ring, and the first component 11 and the second component 12 of the outer ring can be connected by bolts 13. The outer ring 1 and the central ring 2 are connected by a connecting structure 3. In actual production and use, the connecting structure 3 can be detachably connected to the outer ring 1 and the central ring 2 by means of threads, insertion, snap-fit, etc.

[0045] In some embodiments, the first component 11 of the outer ring and the second component 22 of the central ring can be pre-welded and fixed together via the connecting structure 3, and the second component 12 of the outer ring and the first component 21 of the central ring can be pre-welded and fixed together via the connecting structure 3. Thus, in use, assembly can be quickly completed by inserting the first component 21 and the second component 22 of the central ring and connecting the first component 11 and the second component 12 of the outer ring with bolts 13.

[0046] Both the central ring 2 and the outer ring 1 are composed of two symmetrical semi-circular ring components, which are then spliced ​​together to form a complete ring. The split structure solves the installation problem of the stabilizer on the steel cable, allowing assembly without disassembling the counterweight, shortening equipment maintenance time. The positioning fit between the grooves and protrusions ensures the coaxiality of the assembled ring structure, preventing assembly deviations from affecting the stabilizing effect. Bolted connections ensure structural strength while facilitating component disassembly and replacement, reducing maintenance costs. The symmetrical design ensures balanced stress distribution, avoiding structural deformation caused by localized stress concentration.

[0047] As an optional implementation, an annular stop block is provided on the upper surface of the central ring 2 to prevent direct contact between the single crystal furnace counterweight stabilizer and the top surface of the single crystal furnace auxiliary chamber. An isolation structure is provided on the lower surface of the central ring 2 to prevent friction between the central ring 2 and the top of the counterweight. In this embodiment, the isolation structure is an annular gasket, which can buffer the impact force between the counterweight and the stabilizer, reduce vibration transmission, and improve the stabilization effect.

[0048] When the crystal or re-throwing cylinder is removed, the secondary chamber rotates back to the top of the isolation chamber and connects. Because multiple stop blocks are evenly arranged circumferentially at the upper end of the isolation chamber, when the weight stabilizer moves downward with the weight, it will stop at the connection between the secondary chamber and the isolation chamber when it encounters a stop block and will not fall down. When the weight rises to the position of the isolation chamber during the crystal growth process, it will push up the weight stabilizer and rise with the weight. Therefore, the weight stabilizer always moves in the secondary chamber, realizing effective stabilization of the weight throughout the crystal growth process.

[0049] This embodiment also provides a single crystal furnace, including a single crystal furnace body and the aforementioned single crystal furnace counterweight stabilizer. The guide component 5 of the single crystal furnace counterweight stabilizer is sleeved on the single crystal furnace steel cable of the single crystal furnace body. The single crystal furnace counterweight stabilizer stabilizes the counterweight throughout the entire crystal growth process, mainly during seed crystal welding, crystal pulling, and shoulder setting steps, eliminating shaking and swaying, thereby improving the crystal pulling success rate, effectively reducing crystal pulling power consumption, reducing abnormal situations such as breakage, and improving the yield of complete crystal rods and production continuity.

[0050] In use, since the central ring 2 of the counterweight stabilizer is fitted onto the steel cable, under the action of gravity, the central ring 2 rests on top of the counterweight. When the counterweight moves longitudinally within the auxiliary chamber, it can lift the counterweight stabilizer upwards, and when the counterweight moves downwards, the counterweight stabilizer slides downwards with it. During this process, because the steel cable, guide 5, central ring 2, and outer ring 1 are coaxially arranged, the swinging and shaking of the steel cable can be effectively limited, thus achieving stable control of the counterweight.

[0051] The hammer stabilizer, through its structural design matched to the hammer and sub-chamber, effectively reduces hammer wobbling during the crystal pulling stage, avoiding dislocation problems caused by hammer wobbling during crystal pulling, a problem present in existing single-crystal silicon rod production. Furthermore, the rolling element 4 on the outer side of the outer ring 1 prevents direct contact between the outer ring 1 and the sub-chamber, significantly reducing the risk of impurities falling into the crucible and further improving the stability and crystal quality of the single-crystal pulling process. Compared to existing technologies, it is simpler to operate and enables stable control of the hammer throughout the entire crystal pulling process.

[0052] The above description is merely a specific embodiment of this utility model, but the protection scope of this utility model is not limited thereto. Any variations or substitutions that can be easily conceived by those skilled in the art within the technical scope disclosed in this utility model should be included within the protection scope of this utility model. Therefore, the protection scope of this utility model should be determined by the protection scope of the claims.

Claims

1. A single crystal furnace weight stabilizer, characterized by, include: The outer ring has multiple assembly positions evenly provided on its sidewalls in the circumferential direction. A central ring is coaxial with the outer ring and is disposed inside the outer ring; A connecting structure connects the outer ring and the central ring; A rolling element is provided at the assembly position. The rolling element is used to support the outer ring to move longitudinally within the inner wall of the single crystal furnace auxiliary chamber or to rotate horizontally around the single crystal furnace steel cable. A guide member, coaxial with the central ring and disposed within the central ring, is used to cooperate with the single crystal furnace steel cable to limit the swing of the steel cable.

2. The single crystal furnace weight stabilizer of claim 1, wherein: The rolling element includes a spherical roller, and the mounting position includes a mounting hole adapted to the spherical roller.

3. The single crystal furnace weight stabilizer of claim 1 or 2, wherein: Both the central ring and the outer ring are configured as separate structures, and each includes a semi-circular first component and a semi-circular second component, wherein: The first component has grooves at both ends, and the second component has protrusions at both ends that are adapted to the grooves.

4. The single crystal furnace weight stabilizer of claim 1 or 2, wherein: An annular stop block is provided on the upper surface of the central ring. The annular stop block is used to prevent the single crystal furnace counterweight stabilizer from directly contacting the top surface of the single crystal furnace auxiliary chamber.

5. The single crystal furnace counterweight stabilizer according to claim 4, characterized in that: An isolation structure is provided on the lower surface of the central ring to prevent the central ring from rubbing against the top of the counterweight.

6. The single crystal furnace weight stabilizer of claim 5, wherein: The isolation structure is an annular gasket.

7. The single crystal furnace weight stabilizer of claim 1 or 2, wherein: The guide component is a bearing, and the bore diameter of the bearing is 2-3 mm larger than the diameter of the single crystal furnace steel cable.

8. The single crystal furnace weight stabilizer of claim 1 or 2, wherein: The outer diameter of the outer ring is 5-10 mm smaller than the inner diameter of the single crystal furnace sub-chamber.

9. The single crystal furnace weight stabilizer of claim 1 or 2, wherein: The overall height of the single crystal furnace counterweight stabilizer is 20-30mm.

10. A single crystal furnace characterized by: It includes a single crystal furnace body and a single crystal furnace counterweight stabilizer as described in any one of claims 1-9, wherein the guide component of the single crystal furnace counterweight stabilizer is sleeved on the single crystal furnace steel cable of the single crystal furnace body.

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