Lifting device and crystal growing apparatus

Abstract

The utility model provides a kind of lifting device and crystal growing equipment, it is related to silicon carbide growth technical field, the lifting device provided by the utility model includes driving device, adjusting assembly and frame body, driving device includes fixed end and the mobile end being connected with fixed end, adjusting assembly is connected with fixed end, adjusting assembly is used to be connected with rack and adjust the position of driving device relative to rack, mobile end is connected with frame body and is used to drive frame body to lift, frame body is used to install pull-rotating mechanism and is provided with the hole for pull-rotating mechanism to pass through, frame body is used to be connected with top cover.The lifting device provided by the utility model can pull top cover and drive upper cover to lift together, it is easy to operate, and good economy.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide growth technology, and in particular to a lifting device and crystal growth equipment. Background Technology

[0002] Silicon carbide crystals, as an important wide-bandgap semiconductor material, have broad application prospects in high-temperature, high-frequency, and high-power electronic devices. Their fabrication process typically employs the physical vapor transport method, which is mainly carried out in a silicon carbide crystal growth furnace. Specifically, this process involves sublimating silicon carbide powder at a high temperature to generate gaseous molecules. Under the influence of a temperature gradient, these gaseous molecules are transported from the high-temperature region to the low-temperature region and ultimately deposited on the surface of a seed crystal, thereby achieving crystal growth.

[0003] The structure of a silicon carbide crystal growth furnace includes a furnace body, a top cover mounted on the furnace body, an upper cover fastened to the top cover, and a mechanism for lifting and rotating the crucible that holds the raw materials and seed crystals. Typically, two lifting and opening mechanisms are designed for the upper cover and the top cover, resulting in a complex upper structure, a non-compact mechanism design, and a large footprint. Utility Model Content

[0004] The purpose of this invention is to provide a lifting device that can lift the top cover and move the upper cover up and down together, which is convenient to operate and economical. Additionally, a crystal growth apparatus including the above-mentioned lifting device is also provided.

[0005] To achieve the above objectives, this utility model provides the following technical solution: In a first aspect, the present invention provides a lifting device, including a driving device, an adjusting component, and a frame. The driving device includes a fixed end and a movable end connected to the fixed end. The adjusting component is connected to the fixed end and is used to connect to a frame and adjust the position of the driving device relative to the frame. The movable end is connected to the frame and is used to drive the frame to lift and lower. The frame is used to install a lifting and rotating mechanism and has a clearance hole for the lifting and rotating mechanism to pass through. The frame is used to connect to a top cover.

[0006] In an optional embodiment, the frame has a limiting mechanism, which has a limiting position and an unlocking position; when the limiting mechanism is in the limiting position, the frame is linked with the top cover through the limiting mechanism; when the limiting mechanism is in the unlocking position, the frame moves up and down independently of the top cover.

[0007] In an optional embodiment, the frame is provided with a through hole, and the limiting mechanism includes a connecting rod and an operating component; The connecting rod extends vertically, the bottom end of the connecting rod is used to be fixed to the top cover, the top end of the connecting rod is used to pass through the through hole, and the operating component is installed on the top surface of the frame and has a movable end that moves relative to the frame. When the limiting mechanism is in the limiting position, the movable end engages with the connecting rod and prevents the connecting rod from disengaging from the through hole; when the limiting mechanism is in the unlocking position, the movable end cancels its engagement with the connecting rod and stops preventing the connecting rod from disengaging from the through hole.

[0008] In an optional embodiment, the operating component includes a first driving member and a limiting block connected to the first driving member. The limiting block is the movable end and has an opening for engaging with the connecting rod. The first driving member is mounted on the top surface of the frame and is used to drive the limiting block to move horizontally back and forth and to move the connecting rod in and out of the opening.

[0009] In an optional embodiment, the drive device is configured as two, with the moving ends of the two drive devices respectively connected to both sides of the frame, and the fixed ends of the two drive devices each connected to the adjustment component.

[0010] In an optional embodiment, the fixed end is connected to a plurality of the adjustment components, which are spaced apart along the vertical direction.

[0011] In an optional embodiment, the adjustment assembly includes a first connecting plate and a second connecting plate; The first connecting plate is connected to the fixed end, and the second connecting plate is connected to both ends of the first connecting plate along the X direction. The two ends of the first connecting plate are adjustable relative to the frame along the Y direction. The second connecting plate is used to connect to the frame, and the second connecting plate is adjustable relative to the frame along the X direction.

[0012] In an optional embodiment, the adjustment assembly further includes a third connecting plate, which is disposed opposite to the second connecting plate along the X direction. The third connecting plate is used to connect to the frame. A first clamping member is provided between the third connecting plate and the second connecting plate. The first clamping member is configured to provide the second connecting plate with a clamping force along the X direction.

[0013] In an optional embodiment, the adjustment assembly further includes a fourth connecting plate, which is disposed opposite to the first connecting plate along the Y direction. The fourth connecting plate is used to connect to the frame. A second clamping member is provided between the fourth connecting plate and the first connecting plate. The second clamping member is configured to provide the first connecting plate with a clamping force along the Y direction.

[0014] Secondly, this utility model provides a crystal growth apparatus, including a top cover, a frame, and a lifting device as described in any of the foregoing embodiments, wherein the top cover is connected to the frame, and the adjusting component in the lifting device is installed on the frame.

[0015] The lifting device and crystal growth equipment provided by this utility model can produce the following beneficial effects: The lifting device provided in the first aspect of this utility model allows the drive device to be adjusted to a suitable position via an adjustment component, thereby ensuring the accuracy of the frame's position. Since the frame is connected to the top cover, and the lifting and rotating mechanism is mounted on the frame, the opening and lifting mechanisms for the top cover and the upper cover are combined into one. When taking or placing the growth crucible, only the upper cover needs to be opened and raised using the lifting device; when maintenance is required inside the growth chamber, the lifting device can lift the top cover and raise and lower the top cover together. Therefore, the above-mentioned lifting device has a simple structure, is easy to install and adjust, has a large load-bearing capacity, and one set of devices can achieve two purposes, making it economical.

[0016] The crystal growth apparatus provided in the second aspect of this utility model includes the lifting device provided in the first aspect of this utility model, thereby possessing all the beneficial effects of the lifting device provided in the first aspect of this utility model. Attached Figure Description

[0017] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0018] Figure 1 A three-dimensional structural schematic diagram of a crystal growth apparatus provided in an embodiment of this utility model; Figure 2 A three-dimensional structural diagram of a partial structure of a crystal growth device provided in an embodiment of this utility model; Figure 3 A three-dimensional structural schematic diagram of the limiting mechanism provided in the embodiment of this utility model; Figure 4 This is a three-dimensional structural diagram of the adjustment component and the frame provided in the embodiment of the present utility model. Figure 5 This is a three-dimensional structural schematic diagram of the adjustment component provided in an embodiment of the present invention.

[0019] Icons: 1-Drive device; 11-Fixed end; 12-Moving end; 2-Adjusting component; 21-First connecting plate; 22-Second connecting plate; 221-First plate body; 222-Second plate body; 23-Third connecting plate; 24-First clamping component; 25-Fourth connecting plate; 26-Second clamping component; 3-Frame; 31-Allowing hole; 32-Limiting mechanism; 321-Connecting rod; 322-Operating component; 3221-First driving component; 3222-Limiting block; 3223-Opening; 33-Through hole; 34-Base plate; 35-Side plate; 4-Frame; 5-Top cover. Detailed Implementation

[0020] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0021] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0022] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0023] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.

[0024] The first aspect of this utility model provides a lifting device, such as... Figure 1 and Figure 2As shown, it includes a drive device 1, an adjustment component 2, and a frame 3. The drive device 1 includes a fixed end 11 and a movable end 12 connected to the fixed end 11. The adjustment component 2 is connected to the fixed end 11 and is used to connect to the frame 4 and adjust the position of the drive device 1 relative to the frame 4. The movable end 12 is connected to the frame 3 and is used to drive the frame 3 to rise and fall. The frame 3 is used to install a lifting and rotating mechanism and has a clearance hole 31 for the lifting and rotating mechanism to pass through. The frame 3 is used to connect to the top cover 5.

[0025] In the lifting device provided by the first aspect of this utility model, the driving device 1 can be adjusted to a suitable position by adjusting the component 2, thereby ensuring the accuracy of the position of the frame 3. Figure 2 As shown, when it is necessary to lift the top cover 5, the frame 3 can be lifted by the drive device 1. Since the frame 3 is connected to the top cover 5, the top cover 5 can be lifted. Since the frame 3 can be equipped with a lifting and rotating mechanism, the top cover can also be opened synchronously when it is lifted.

[0026] Compared with the prior art, the lifting device provided by the first aspect of this utility model has a simple structure, is easy to install and adjust, has a large load-bearing capacity, and can achieve two purposes with one set of devices, making it economical.

[0027] There are several ways to connect the frame 3 and the top cover 5. For example, the frame 3 can be fixedly connected to the top cover 5 by bolts or other connectors, or the frame 3 and the top cover 5 can be snapped together.

[0028] In addition, the frame 3 can adopt a gantry structure, thereby forming a gantry lifting device in conjunction with the drive device 1, the adjustment component 2, etc.

[0029] In an optional embodiment, the frame 3 has a limiting mechanism 32, which has a limiting position and an unlocking position; when the limiting mechanism 32 is in the limiting position, the frame 3 is linked with the top cover 5 through the limiting mechanism 32; when the limiting mechanism 32 is in the unlocking position, the frame 3 rises and falls independently of the top cover 5.

[0030] In the above embodiments, the limiting mechanism 32 can flexibly switch between different work positions, so that the lifting device can realize the linkage between the top cover 5 and the frame 3 when needed, driving the top cover 5 to rise and fall, and can cancel the linkage between the frame 3 and the top cover 5 in other situations, realizing the independent movement of the frame 3. For example, during the crystal growth process, the top cover 5 needs to be fastened to the furnace body at all times. At this time, the linkage between the frame 3 and the top cover 5 can be canceled, allowing the frame 3 to be raised away from the top cover 5, improving the flexibility and practicality of equipment operation.

[0031] In an optional embodiment, the frame 3 is provided with a through hole 33, and the limiting mechanism 32 includes a connecting rod 321 and an operating component 322. The connecting rod 321 extends vertically, with its bottom end used for fixed connection with the top cover 5, and its top end passing through the through hole 33 and extending to the top of the frame 3.

[0032] Specifically, the operating component 322 is installed on the top surface of the frame 3 and has a movable end that is movable relative to the frame 3. The movable end can move in a reciprocating or rotating manner. The operating component 322 can take the form of a manual knob, lever, electromagnetic drive device, etc., and its movable end can engage or disengage with the connecting rod 321 in different working positions.

[0033] In use, when the limiting mechanism 32 is in the restricted position, the movable end of the operating component 322 moves forward, thereby abutting or engaging with the connecting rod 321, preventing the connecting rod 321 from disengaging from the through hole 33, thus achieving the connection between the frame 3 and the top cover 5. At this time, the lifting and lowering movement of the frame 3 will directly drive the top cover 5 to lift and lower synchronously, and the two maintain a linkage relationship.

[0034] When the limiting mechanism 32 switches to the unlocking position, the movable end of the operating component 322 reverses its movement, releasing its engagement with the connecting rod 321, thereby allowing the connecting rod 321 to slide freely or disengage within the through hole 33. At this time, the frame 3 can move independently without affecting the top cover 5.

[0035] In summary, by setting the aforementioned limiting mechanism 32, users can flexibly switch between the linked or independent states of the frame 3 and the top cover 5 according to actual needs, thereby improving the operational flexibility and ease of use of the equipment and meeting the application needs under different working conditions.

[0036] In alternative implementations, such as Figure 3 As shown, the operation component 322 includes a first driving member 3221 and a limiting block 3222 connected to the first driving member 3221. The limiting block 3222 serves as the movable end of the operation component 322, is disposed on the top surface of the frame 3, and corresponds to the connecting rod 321.

[0037] The limiting block 3222 is provided with an opening 3223 arranged in the radial direction (i.e., horizontal direction) of the connecting rod 321. The opening 3223 is used to engage with the connecting rod 321 when the limiting mechanism 32 is in the limiting position, thereby limiting the connecting rod 321 to the state where the self-through hole 33 protrudes from the top surface of the frame 3, so as to realize the linkage between the frame 3 and the top cover 5.

[0038] Furthermore, the first driving component 3221 is installed on the top of the frame 3 and fixedly connected to the limiting block 3222, and is used to drive the limiting block 3222 to reciprocate in the horizontal direction. For example, the first driving component 3221 can be a cylinder, hydraulic cylinder, or electric push rod, etc., which can achieve linear drive, and its extension and retraction direction is perpendicular to the axis of the connecting rod 321. When the first driving component 3221 drives the limiting block 3222 to move away from the connecting rod 321, the opening 3223 of the limiting block 3222 disengages from the connecting rod 321. At this time, the connecting rod 321 can freely pass through the through hole 33 in the vertical direction, thereby releasing the linkage between the frame 3 and the top cover 5, so that the frame 3 can move independently of the top cover 5.

[0039] In practical applications, the operating component 322 can be automatically controlled by the control system. For example, when the lifting device needs to lift the top cover 5, the control system controls the first driving component 3221 to move the limiting block 3222 to the locking position, so that the connecting rod 321 and the limiting block 3222 form a reliable connection. When it is necessary to release the top cover 5 or perform other independent operations, the control system controls the first driving component 3221 to move the limiting block 3222 to the unlocking position, so that the connecting rod 321 is released from the constraint of the limiting block 3222.

[0040] Through the above structural design, the operating component 322 realizes the flexible switching of the linkage state between the frame 3 and the top cover 5, which improves the ease of use and safety of the lifting device.

[0041] To ensure a stable connection between the frame 3 and the top cover 5, the limiting mechanism 32 can be configured in multiple ways, such as two, three, four or five.

[0042] In a preferred embodiment, such as Figure 2 and 3 As shown, the frame 3 includes a base plate 34 and two side plates 35. The base plate 34 has a clearance hole 31 and a through hole 33. The two side plates 35 are respectively connected to the two sides of the base plate 34 along the Y direction. The limiting mechanism 32 is configured as four, and the four limiting mechanisms 32 are distributed at the four corners of the base plate 34 in the frame 3.

[0043] It should be noted that the drive device 1 can be a cylinder, hydraulic cylinder, or electric push rod, or other device capable of linear drive.

[0044] In an optional embodiment, the drive device 1 is configured as two, and the moving ends 12 of the two drive devices 1 are respectively connected to both sides of the frame 3 along the Y direction, so that the frame 3 can be subjected to uniform force during the lifting process, avoiding unstable phenomena such as uneven load, tilting or swaying, and further ensuring the stability and reliability of the top cover 5 during the lifting process.

[0045] In addition, the fixed ends 11 of the two drive devices 1 are respectively mounted on the external frame 4 via independent adjustment components 2. The adjustment components 2 are used to adjust the position of the drive devices 1 relative to the frame 4. For example, the X and Y positions of the drive devices 1 can be finely adjusted to ensure that the moving ends 12 of the two drive devices 1 maintain synchronicity and consistency during movement, thereby improving the operating accuracy and stability of the entire lifting device.

[0046] It is understandable that the X direction is perpendicular to the Y direction, and both the X and Y directions are parallel to the horizontal plane.

[0047] The above-described embodiments not only enhance the load-bearing capacity and anti-eccentric load capacity of the lifting device, but also allow the positions of the two drive devices 1 to be independently adjusted by adjusting component 2 during installation and commissioning, thereby adapting to different installation environments and equipment structures and improving the adaptability and ease of installation of the device.

[0048] In alternative implementations, such as Figure 2 As shown, the fixed end 11 is connected to multiple adjustment components 2, which are distributed at intervals along the vertical direction.

[0049] The above-mentioned configuration not only improves the flexibility and adjustment accuracy of the installation position of the drive device 1, but also enhances the stability and structural strength of the entire lifting device, thereby improving its reliability and applicability in practical applications.

[0050] In alternative implementations, such as Figure 4 and Figure 5 As shown, the adjustment component 2 includes a first connecting plate 21 and a second connecting plate 22.

[0051] Specifically, the first connecting plate 21 can be fixedly connected to the fixed end 11 of the drive device 1 via bolts or other connecting parts, serving as the main connecting component between the adjustment assembly 2 and the drive device 1. The first connecting plate 21 is a U-shaped plate extending along the X direction, with second connecting plates 22 connected to its two ends respectively. The second connecting plate 22 is an L-shaped plate, such as... Figure 5 As shown, it specifically includes a first plate 221 and a second plate 222 that are vertically connected. The first plate 221 and the first connecting plate 21 are adjusted relative to each other in the Y direction through an adjustable connection structure. For example, a waist-shaped hole extending in the Y direction can be provided on the first connecting plate 21. Fasteners such as bolts pass through the waist-shaped hole and the threaded hole on the first plate 221 to connect with the first plate 221, so that the position of the first connecting plate 21 relative to the frame 4 can be adjusted in the Y direction during assembly, thereby realizing fine adjustment of the position of the drive device 1 in the Y direction.

[0052] Furthermore, the second plate 222 of the second connecting plate 22 is fixedly connected to the frame 4 by bolts or other connecting parts, and an adjustable connection structure is provided between it and the frame 4 to achieve relative adjustment along the X direction. For example, the second plate 222 is provided with a slotted hole extending along the X direction, and bolts or other fasteners pass through the slotted hole and the threaded hole on the frame 4 to connect with the frame 4. This design allows the position of the drive device 1 along the X direction to be adjusted according to actual needs during installation, thereby adapting to different equipment layout requirements and ensuring the installation accuracy of the lifting device.

[0053] Through the above structural design, the adjustment component 2 not only realizes the bidirectional adjustment function of the drive device 1 in the X and Y directions, but also enhances the adaptability and installation flexibility of the entire lifting device, which is conducive to improving the stability and reliability of equipment operation. In addition, this structure is easy to maintain and replace, and has good engineering practicality.

[0054] In alternative implementations, such as Figure 4 and Figure 5 As shown, the adjustment assembly 2 also includes a third connecting plate 23, which is disposed opposite to the first plate 221 along the X direction. The third connecting plate 23 is connected to the frame 4 by bolts, screws or other fasteners.

[0055] Specifically, a first clamping member 24 is provided between the third connecting plate 23 and the second plate 222. The first clamping member 24 can be a set screw or an eccentric wheel, etc. The first clamping member 24 is configured to give the second plate 222 a clamping force along the X direction.

[0056] In a preferred embodiment, the first clamping member 24 is a set screw.

[0057] In practical use, the connecting piece between the second plate 222 and the frame 4 can be loosened first. Then, by adjusting the length of the third connecting plate 23 pushed out by the first clamping members 24 on both sides, the position of the second connecting plate 22 relative to the frame 4 can be adjusted along the X direction, thereby achieving the adjustment of the position of the first connecting plate 21. The aforementioned setting of the first clamping members 24 allows for fine adjustment of the position of the first connecting plate 21 along the X direction, making it easier for the user to operate.

[0058] In alternative implementations, such as Figure 4 and Figure 5 As shown, the adjustment assembly 2 also includes a fourth connecting plate 25, which is disposed opposite to the first connecting plate 21 along the Y direction. The fourth connecting plate 25 is used to connect to the frame 4. A second clamping member 26 is provided between the fourth connecting plate 25 and the first connecting plate 21. The second clamping member 26 is configured to provide the first connecting plate 21 with a clamping force along the Y direction.

[0059] The second clamping member 26 can be a set screw or an eccentric wheel, etc. In a preferred embodiment, the second clamping member 26 is a set screw.

[0060] In practical use, the connecting piece between the first connecting plate 21 and the first plate body 221 can be loosened first. Then, the position of the first connecting plate 21 relative to the frame 4 can be finely adjusted along the Y direction by adjusting the length of the second clamping pieces 26 pushing out the fourth connecting plate 25. The aforementioned setting of the second clamping pieces 26 can achieve fine adjustment of the position of the first connecting plate 21 along the Y direction, making it easier for the user to operate.

[0061] It is understandable that the Z-axis mentioned above is perpendicular to the horizontal plane.

[0062] The second aspect of this utility model provides a crystal growth device, which includes a top cover 5, a frame 3, and the aforementioned lifting device. The top cover 5 is connected to the frame 3, and the adjusting component 2 in the lifting device is installed on the frame 4.

[0063] The crystal growth apparatus provided in the second aspect of this utility model has the lifting device provided in the first aspect of this utility model, and thus has all the beneficial effects of the lifting device provided in the first aspect of this utility model.

[0064] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A lifting device, characterized in that, The device includes a drive unit (1), an adjustment component (2), and a frame (3). The drive unit (1) includes a fixed end (11) and a movable end (12) connected to the fixed end (11). The adjustment component (2) is connected to the fixed end (11) and is used to connect to the frame (4) and adjust the position of the drive unit (1) relative to the frame (4). The movable end (12) is connected to the frame (3) and is used to drive the frame (3) to rise and fall. The frame (3) is used to install a lifting and rotating mechanism and has a clearance hole (31) for the lifting and rotating mechanism to pass through. The frame (3) is used to connect to the top cover (5).

2. The lift device of claim 1, wherein, The frame (3) has a limiting mechanism (32), which has a limiting position and an unlocking position. When the limiting mechanism (32) is in the limiting position, the frame (3) is linked with the top cover (5) through the limiting mechanism (32). When the limiting mechanism (32) is in the unlocking position, the frame (3) moves up and down independently of the top cover (5).

3. The lifting device according to claim 2, characterized in that, The frame (3) is provided with a through hole (33), and the limiting mechanism (32) includes a connecting rod (321) and an operating component (322). The connecting rod (321) extends vertically, the bottom end of the connecting rod (321) is used to be fixed to the top cover (5), the top end of the connecting rod (321) is used to pass through the through hole (33), and the operating component (322) is installed on the top surface of the frame (3) and has a movable end that moves relative to the frame (3). When the limiting mechanism (32) is in the limiting position, the movable end cooperates with the connecting rod (321) and prevents the connecting rod (321) from disengaging from the through hole (33); when the limiting mechanism (32) is in the unlocking position, the movable end cancels its cooperation with the connecting rod (321) and stops preventing the connecting rod (321) from disengaging from the through hole (33).

4. The lifting device according to claim 3, characterized in that, The operating component (322) includes a first driving member (3221) and a limiting block (3222) connected to the first driving member (3221). The limiting block (3222) is the movable end. The limiting block (3222) has an opening (3223) for engaging with the connecting rod (321). The first driving member (3221) is installed on the top surface of the frame (3). The first driving member (3221) is used to drive the limiting block (3222) to move horizontally back and forth and to make the connecting rod (321) enter and exit the opening (3223).

5. The lifting device according to claim 1, characterized in that, The drive device (1) is configured as two, and the moving ends (12) of the two drive devices (1) are respectively connected to the two sides of the frame (3), and the fixed ends (11) of the two drive devices (1) are connected to the adjustment components (2).

6. The lifting device according to claim 1, characterized in that, The fixed end (11) is connected to a plurality of adjustment components (2), which are distributed at intervals along the vertical direction.

7. The lifting device according to any one of claims 1-6, characterized in that, The adjustment assembly (2) includes a first connecting plate (21) and a second connecting plate (22); The first connecting plate (21) is connected to the fixed end (11), and the first connecting plate (21) is connected to the second connecting plate (22) at both ends along the X direction. The two ends of the first connecting plate (21) are adjustable relative to the frame (4) along the Y direction. The second connecting plate (22) is used to connect to the frame (4), and the second connecting plate (22) is adjustable relative to the frame (4) along the X direction.

8. The lifting device according to claim 7, characterized in that, The adjustment assembly (2) further includes a third connecting plate (23), which is disposed opposite to the second connecting plate (22) along the X direction. The third connecting plate (23) is used to connect to the frame (4). A first clamping member (24) is provided between the third connecting plate (23) and the second connecting plate (22). The first clamping member (24) is configured to give the second connecting plate (22) a clamping force along the X direction.

9. The lifting device according to claim 7, characterized in that, The adjustment assembly (2) further includes a fourth connecting plate (25), which is disposed opposite to the first connecting plate (21) along the Y direction. The fourth connecting plate (25) is used to connect to the frame (4). A second clamping member (26) is provided between the fourth connecting plate (25) and the first connecting plate (21). The second clamping member (26) is configured to give the first connecting plate (21) a clamping force along the Y direction.

10. A crystal growth apparatus, characterized in that, It includes a top cover (5), a frame (3), and a lifting device as described in any one of claims 1-9, wherein the top cover (5) is connected to the frame (3), and the adjusting component (2) in the lifting device is mounted on the frame (4).

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