Pulling rotation mechanism and crystal growing apparatus

Abstract

The utility model provides a kind of lifting rotary mechanism and crystal growing equipment, it is related to silicon carbide growth technical field, the lifting rotary mechanism provided by the utility model includes lifting rod, lifting rod includes monitoring passage and first air inlet passage, monitoring passage extends along the axial direction of lifting rod and is through lifting rod, first air inlet passage has first air inlet and first air outlet, first air inlet is set up in the lateral wall of lifting rod, first air outlet is communicated with monitoring passage, the bottom end of monitoring passage is used to discharge the gas blown by first air inlet passage.The lifting rotary mechanism provided by the utility model can effectively prevent gaseous component sublimation from crystallizing into film on the inner wall of monitoring passage of lifting rod and lens surface, to ensure the accuracy of temperature measurement results.

Description

Technical Field

[0001] This utility model relates to the field of silicon carbide growth technology, and in particular to a lifting and rotating mechanism and crystal growth equipment. Background Technology

[0002] Physical vapor transport (PVT) is currently the mainstream technology for preparing silicon carbide crystals, and its core equipment is a silicon carbide crystal growth furnace. This process involves placing high-purity silicon carbide powder at the bottom of a graphite crucible and sublimating it at a high temperature above 2200℃ to form gaseous components such as Si, Si₂C, and SiC₂. These components are then transported to the top seed crystal face and crystallize under the drive of the axial temperature gradient.

[0003] During crystal growth, silicon carbide powder sublimates into gaseous molecules at temperatures exceeding 2200°C. Driven by the temperature gradient, these molecules, along with the protective gas, are transported to the seed crystal surface at the top of the crucible, where they recrystallize and grow into silicon carbide crystals. To precisely control the crucible's position, a lifting mechanism is typically used to adjust the height and position of the lifting rod connected to the crucible.

[0004] Currently, the lifting rod has a monitoring channel along its own axis. One end of the lifting rod is equipped with a lens and connected to a monitoring device positioned directly opposite the monitoring channel. The monitoring device can monitor the heating temperature of the crucible through the monitoring channel. However, under high temperature conditions, the sublimated gaseous components will crystallize into a film on the inner wall of the monitoring channel of the lifting rod and on the surface of the lens, affecting the accuracy of the temperature measurement results. Utility Model Content

[0005] The purpose of this invention is to provide a lifting and rotating mechanism that effectively prevents sublimated gaseous components from crystallizing on the inner wall of the monitoring channel of the lifting rod and the surface of the lens, thus ensuring the accuracy of temperature measurement results. Additionally, a crystal growth apparatus including the aforementioned lifting and rotating mechanism is provided.

[0006] To achieve the above objectives, this utility model provides the following technical solution: In a first aspect, the present invention provides a lifting and rotating mechanism, including a lifting rod, the lifting rod including a monitoring channel and a first air inlet channel, the monitoring channel extending along the axial direction of the lifting rod and penetrating the lifting rod, the first air inlet channel having a first air inlet and a first air outlet, the first air inlet being opened on the side wall of the lifting rod, the first air outlet communicating with the monitoring channel, and the bottom end of the monitoring channel being used to discharge the gas blown by the first air inlet channel.

[0007] In an optional embodiment, the first air intake passage extends radially along the lifting rod.

[0008] In an optional embodiment, the outer surface of the lifting rod is further recessed with an air intake ring, the air intake ring extending circumferentially along the lifting rod, and the first air intake is opened within the air intake ring.

[0009] In an optional embodiment, the closer the intake ring is to the axis of the lifting rod along its radial direction, the narrower the width of the intake ring.

[0010] In an optional embodiment, the lifting and rotating mechanism further includes a magnetic fluid fitted outside the lifting rod. The magnetic fluid includes a second air intake channel, which includes a second air inlet and a second air outlet. The second air inlet is located on the side wall of the magnetic fluid, and the second air outlet communicates with the air intake ring.

[0011] In an optional embodiment, the lifting and rotating mechanism further includes a mounting structure, a thermometer, and an electric slip ring. The thermometer is connected to the top of the lifting rod through the mounting structure, the electric slip ring is fitted onto the outside of the lifting rod, and the cable of the thermometer is connected to the rotor end of the electric slip ring.

[0012] In an optional embodiment, the lifting and rotating mechanism further includes a driving mechanism, which is connected to the lifting rod and drives the lifting rod to rotate.

[0013] In an optional embodiment, the drive mechanism includes a driver, a driving gear, a driven gear, and a transmission gear set. The power output end of the driver is connected to the driving gear, the driven gear is connected to the lifting rod, and the transmission gear set is drivingly connected between the driving gear and the driven gear.

[0014] In an optional embodiment, the transmission gear set includes a first transmission gear that meshes between the driving gear and the driven gear.

[0015] Secondly, this utility model provides a crystal growth apparatus, including a lifting and rotating mechanism as described in any of the foregoing embodiments.

[0016] The lifting and rotating mechanism and crystal growth equipment provided by this utility model can produce the following beneficial effects: Compared with the prior art, the lifting and rotating mechanism provided by the first aspect of this utility model is provided with a first air inlet channel. In use, gas can enter the first air inlet channel from the first air inlet and be discharged to the monitoring channel from the first air outlet to purge the monitoring channel, effectively preventing sublimated gaseous components from crystallizing on the inner wall of the monitoring channel of the lifting rod and the surface of the lens to form a film, thus ensuring the accuracy of the temperature measurement results.

[0017] The crystal growth apparatus provided in the second aspect of this utility model has the lifting and rotating mechanism provided in the first aspect of this utility model, and thus has all the beneficial effects of the lifting and rotating mechanism provided in the first aspect of this utility model. Attached Figure Description

[0018] To more clearly illustrate the specific embodiments of this utility model or the technical solutions in the prior art, the drawings used in the description of the specific embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0019] Figure 1 A three-dimensional structural schematic diagram of the lifting rod provided in an embodiment of this utility model; Figure 2 This is a front view of the lifting rod provided in an embodiment of the present utility model; Figure 3 for Figure 2 AA section diagram; Figure 4 for Figure 3 A magnified view of part B; Figure 5 A rear view of a portion of the lifting and rotating mechanism provided in an embodiment of this utility model; Figure 6 A cross-sectional view of the magnetic fluid provided in an embodiment of this utility model; Figure 7 A three-dimensional structural diagram of a portion of the lifting and rotating mechanism provided in an embodiment of this utility model; Figure 8 This is a three-dimensional structural diagram of a portion of the crystal growth equipment provided in an embodiment of the present invention.

[0020] Icons: 1-Lifting rod; 11-Monitoring channel; 12-First air intake channel; 121-First air inlet; 122-First air outlet; 13-Intake ring; 2-Magnetic fluid; 21-Second air intake channel; 211-Second air inlet; 212-Second air outlet; 3-Drive mechanism; 31-Driver; 32-Driving gear; 33-Passive gear; 34-Transmission gear set; 341-First transmission gear; 4-Mounting structure; 41-Mounting plate; 42-Screw; 43-Support plate; 44-Bottom nut; 45-Top nut; 46-Elastic element; 5-Thermometer; 6-Electric slip ring. Detailed Implementation

[0021] The technical solution of this utility model will now be clearly and completely described with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0022] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0023] In the description of this utility model, it should be noted that, unless otherwise explicitly specified and limited, the terms "installation," "connection," and "joining" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; and they can refer to the internal connection of two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0024] The specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings. It should be understood that the specific embodiments described herein are for illustration and explanation only and are not intended to limit the scope of this utility model.

[0025] The first aspect of this utility model is to provide a lifting and rotating mechanism, such as... Figures 1 to 4 As shown, the device includes a lifting rod 1, which includes a monitoring channel 11 and a first air intake channel 12. The monitoring channel 11 extends along the axial direction of the lifting rod 1 and passes through the lifting rod 1. The first air intake channel 12 has a first air inlet 121 and a first air outlet 122. The first air inlet 121 is opened on the side wall of the lifting rod 1, and the first air outlet 122 is connected to the monitoring channel 11. The bottom end of the monitoring channel 11 is used to discharge the gas blown by the first air intake channel 12.

[0026] Compared to existing technologies, the lifting and rotating mechanism provided by the first aspect of this utility model has a first air inlet channel 12. In use, gas can enter the first air inlet channel 12 from the first air inlet 121 and exit through the first air outlet 122 towards the monitoring channel 11, purging the monitoring channel 11 and effectively preventing sublimated gaseous components from crystallizing on the inner wall of the monitoring channel 11 of the lifting rod 1 and the surface of the lens, thus ensuring the accuracy of the temperature measurement results.

[0027] The aforementioned first air intake channel 12 can be a straight channel, extending from the outer wall of the lifting rod 1 to the inner wall of the lifting rod 1, thereby realizing a gas delivery path from the outside to the inside of the monitoring channel 11.

[0028] The exhaust direction of the first air intake channel 12 can be designed to enter the monitoring channel 11 at an angle or tangentially. In optional embodiments, such as... Figure 4 As shown, the first air intake channel 12 extends radially along the lifting rod 1, that is, its extension direction is perpendicular to the axial direction of the lifting rod 1.

[0029] In use, gas can be supplied from the first inlet 121 into the first inlet channel 12 via an external gas supply device (such as an air pump or gas source), and then radially introduced into the monitoring channel 11 through the first outlet 122. The gas flows axially within the monitoring channel 11 and exits from the bottom end of the monitoring channel 11, thereby continuously purging the monitoring channel 11, its inner wall, and the surface of the temperature measuring lens. This effectively prevents the deposition and crystallization of sublimation products in this area, ensuring the stability and accuracy of the temperature measurement signal.

[0030] The gas used is an inert gas that can prevent silicon carbide materials from oxidizing or undergoing other adverse reactions at high temperatures.

[0031] To enhance the purging effect, the first outlet 122 is preferably located in the upper or middle part of the monitoring channel 11, so that the incoming gas can form a good flow path inside the monitoring channel 11 and finally be discharged from the bottom of the channel. This structural design is beneficial to improving the purging efficiency.

[0032] In an optional embodiment, multiple first air intake channels 12 are configured, and the multiple first air intake channels 12 are distributed at intervals around the axis of the lifting rod 1, so that gas enters the monitoring channel 11 from different directions, thereby forming a turbulent airflow inside the monitoring channel 11 and further improving the purging efficiency.

[0033] Preferably, the multiple first air intake channels 12 are evenly distributed around the lifting rod 1, for example, arranged in a circle with equal spacing, to ensure uniform gas distribution, improve the purging effect on the inner wall of the monitoring channel 11 and components such as optical lenses installed therein, effectively prevent the components in the sublimated gas from crystallizing into a film on the inner wall of the channel or the surface of the lens after cooling, thereby ensuring the accuracy of temperature measurement signal transmission and the stability of equipment operation.

[0034] The number of first air intake channels 12 can be reasonably selected based on factors such as the diameter of the lifting rod 1, the size of the monitoring channel 11, and the gas flow rate. For example, it can be set to 3 to 6 channels to balance processing feasibility and purging effect.

[0035] In alternative implementations, such as Figure 4 As shown, an air intake ring 13 is also recessed on the outer surface of the lifting rod 1. The air intake ring 13 extends circumferentially along the lifting rod 1. The air intake ring 13 is connected to an external air supply device (such as an air pump or air source pipeline), thereby allowing gas to enter the first air intake channel 12 inside the lifting rod 1 through the air intake ring 13.

[0036] The first air inlet 121 of the first air intake channel 12 is located inside the air intake ring 13, specifically at the bottom or side wall of the air intake ring 13. After the gas enters the first air intake channel 12 through the first air inlet 121, it is transported along its channel path and finally discharged into the monitoring channel 11 through the first air outlet 122 to continuously purge the internal space of the monitoring channel 11.

[0037] The above-described embodiment provides an air intake ring 13 on the outer surface of the lifting rod 1, allowing external gas to enter the first air intake channel 12 through a concentrated and uniformly distributed annular structure, thereby improving the uniformity and stability of gas entry, and ensuring that real-time air intake is not affected during the rotation of the lifting rod 1.

[0038] In an optional embodiment, the intake ring 13 becomes narrower as it approaches the axis of the lifting rod 1 radially.

[0039] It is understandable that the width of the intake ring 13 is parallel to the axial direction of the lifting rod 1.

[0040] The above-described embodiments enable the gas to be effectively guided and concentrated to the first air inlet 121 of each first air inlet channel 12 after entering the air intake ring 13, thereby improving the uniformity and concentration of gas flow.

[0041] Specifically, the intake ring 13 is integrally formed with the lifting rod 1, and its inner edge, which is arranged opposite to the lifting rod 1 along the axial direction, is inclined or arc-shaped. The first air inlets 121 of the plurality of first air intake channels 12 are evenly distributed inside the intake ring 13 along the extension direction of the intake ring 13.

[0042] In alternative implementations, such as Figure 5 As shown, the lifting and rotating mechanism also includes a magnetofluid 2 fitted outside the lifting rod 1. The magnetofluid 2 is used to realize the rotational sealing function of the lifting rod 1, and also serves to construct the gas delivery path.

[0043] Specifically, such as Figure 5 and Figure 6 As shown, the magnetic fluid 2 has a second air intake channel 21 inside, which includes a second air inlet 211 and a second air outlet 212. The second air inlet 211 is located on the side wall of the magnetic fluid 2 and is used to connect with an external air supply system, allowing gas to enter the second air intake channel 21. The second air outlet 212 is connected to an air intake ring 13 provided on the outer surface of the lifting rod 1, thereby delivering gas to the first air intake channel 12 on the lifting rod 1.

[0044] The above-described embodiment achieves an integrated design of the gas delivery path by setting a second air inlet channel 21 in the magnetic fluid 2 and connecting it to the air inlet ring 13 on the lifting rod 1. This avoids the need for additional gas conduit arrangements, simplifies the overall structure, and improves the system's sealing and reliability. Simultaneously, the gas introduction path passes through the interior of the magnetic fluid 2, without affecting the rotational movement of the lifting rod 1, ensuring the stability and temperature measurement accuracy of the lifting and rotating mechanism during continuous operation.

[0045] In an optional embodiment, the lifting and rotating mechanism further includes a mounting structure 4, a thermometer 5, and an electric slip ring 6.

[0046] Among them, thermometer 5 is used to monitor the temperature change in the crystal growth cavity in real time. It is usually an infrared pyrometer or other non-contact temperature measuring device, which has the characteristics of fast response speed and high measurement accuracy.

[0047] The thermometer 5 is fixedly connected to the top of the lifting rod 1 via the mounting structure 4. The mounting structure 4 is a mechanical connection assembly. Figure 5 and Figure 7 As shown, the mounting structure 4 may include a mounting plate 41, screws 42, a support plate 43, a bottom nut 44, a top nut 45, and an elastic element 46. The mounting plate 41 can be installed on the top of the lifting rod 1 by means of screws or other connecting parts. Multiple screws 42 are configured, with the bottom end of each screw 42 threadedly connected to the mounting plate 41 and fixed by the bottom nut 44, and the top end of each screw 42 slidably connected to the support plate 43 and fixed by the top nut 45. The elastic element 46 is sleeved on the outside of each screw 42, and both ends of the elastic element 46 abut against the mounting plate 41 and the support plate 43 respectively and are in a charged state. The thermometer 5 is fixedly installed on the support plate 43.

[0048] During installation, the level of the support plate 43 can be adjusted by adjusting the top nut 45, so that the thermometer 5 is level.

[0049] The electric slip ring 6 is coaxially mounted on the outside of the lifting rod 1 and located in the upper region of the lifting rod 1. The electric slip ring 6 includes a stationary stator end and a follower rotor end, which rotates synchronously with the lifting rod 1.

[0050] Furthermore, the cable of the thermometer 5 is led out and connected to the rotor end of the slip ring 6. When the lifting rod 1 drives the thermometer 5 to rotate as a whole, the cable rotates along with the rotor end of the slip ring 6, while the stator end is connected to the external control system, so as to realize the continuous and stable output of the temperature measurement signal and avoid signal interruption or equipment damage caused by cable entanglement.

[0051] In the above embodiment, the thermometer 5 is integrated into the top of the lifting rod 1 and rotates synchronously with it, so that the thermometer 5, the monitoring channel 11, and the optical window at the top of the lifting rod 1 always remain relatively stationary. Compared with the traditional structure in which the thermometer 5 is fixed and the optical window rotates with the lifting rod 1, this method can ensure the accuracy and long-term stability of the temperature measurement results.

[0052] In an optional embodiment, the lifting and rotating mechanism further includes a drive mechanism 3, which is connected to the lifting rod 1 and drives the lifting rod 1 to rotate.

[0053] The drive mechanism 3 includes, but is not limited to, a motor, a reducer, and a transmission assembly, which can be connected by a synchronous belt pulley or gear meshing. The drive mechanism 3 can be controlled by a control system to start, stop, and rotate at a speed that can be controlled by a servo motor or a stepper motor, thereby achieving precise control of the rotation angle or rotation speed of the lifting rod 1.

[0054] In the prior art, the drive mechanism 3 uses a combination of a motor and a belt drive assembly to rotate the lifting rod 1. To ensure transmission accuracy, the belt needs to have a certain tension, which causes the lifting rod 1 to be constantly subjected to radial tension from the belt during use. This results in instability in the radial position of the crucible connected to the bottom of the lifting rod 1, affecting the growth quality of the silicon carbide crystal.

[0055] In alternative implementations, such as Figure 7 As shown, the drive mechanism 3 includes a driver 31, a drive gear 32, a driven gear 33, and a transmission gear set 34. The power output end of the driver 31 is connected to the drive gear 32, the driven gear 33 is connected to the lifting rod 1, and the transmission gear set 34 is connected between the drive gear 32 and the driven gear 33.

[0056] Compared to the radial tension problem caused by the belt drive structure in the prior art, the above embodiment adopts a gear drive structure, which makes the force direction during the transmission process mainly concentrated in the tangential direction of gear meshing. It basically does not apply additional radial force to the lifting rod 1, thereby effectively avoiding the problem of the bottom of the lifting rod 1 being offset from the crucible due to radial force, and improving the stability and consistency of silicon carbide crystal growth process.

[0057] Furthermore, since gear transmission has high transmission accuracy and rigidity, it can further improve the accuracy of rotation control of lifting rod 1, which helps to achieve fine control of the crystal growth environment.

[0058] Among them, the driver 31 serves as a power source, preferably a servo motor or a stepper motor, which can achieve precise control of the rotation angle and speed according to the instructions of the control system.

[0059] In the above embodiment, the transmission gear set 34 includes at least one intermediate transmission gear for achieving stable power transmission between the driving gear 32 and the driven gear 33. By rationally designing the gear ratio of each gear, the required reduction ratio or speed-up ratio can be achieved to match the rotational speed and torque requirements of the lifting rod 1 during crystal growth.

[0060] In alternative implementations, such as Figure 7 As shown, the transmission gear set includes a first transmission gear 341, which meshes between the driving gear 32 and the driven gear 33.

[0061] The aforementioned transmission gear set has a simple structure, can quickly transmit the power of the driving gear 32 to the driven gear 33, and occupies a small space.

[0062] Specifically, the first transmission gear 341 is rotatably mounted on the bracket via bearings to ensure its stability and accuracy during transmission, and the driver 31 can be mounted on the bottom of the bracket.

[0063] In addition, the first transmission gear 341, the driving gear 32, and the driven gear 33 can all be helical gears.

[0064] A second aspect of this utility model provides a crystal growth apparatus, such as... Figure 8 As shown, the crystal growth apparatus provided in the second aspect of this utility model includes the above-described pulling and rotating mechanism.

[0065] The crystal growth apparatus provided in the second aspect of this utility model has the lifting and rotating mechanism provided in the first aspect of this utility model, and thus has all the beneficial effects of the lifting and rotating mechanism provided in the first aspect of this utility model.

[0066] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this utility model.

Claims

1. A pull-up rotation mechanism characterized by comprising: The device includes a lifting rod (1), which includes a monitoring channel (11) and a first air intake channel (12). The monitoring channel (11) extends along the axial direction of the lifting rod (1) and passes through the lifting rod (1). The first air intake channel (12) has a first air inlet (121) and a first air outlet (122). The first air inlet (121) is located on the side wall of the lifting rod (1), and the first air outlet (122) is connected to the monitoring channel (11). The bottom end of the monitoring channel (11) is used to discharge the gas blown by the first air intake channel (12).

2. The pull-up rotation mechanism according to claim 1, characterized by The first air intake channel (12) extends radially along the lifting rod (1).

3. The pull-up rotation mechanism according to claim 1, wherein The outer surface of the lifting rod (1) is also recessed with an air intake ring (13), which extends circumferentially along the lifting rod (1), and the first air intake (121) is opened in the air intake ring (13).

4. The pull-up rotation mechanism according to claim 3, wherein The closer the air intake ring (13) is to the axis of the lifting rod (1) along the radial direction, the narrower the width of the air intake ring (13).

5. The pull-up rotation mechanism according to claim 3, wherein The lifting and rotating mechanism also includes a magnetic fluid (2) fitted outside the lifting rod (1). The magnetic fluid (2) includes a second air intake channel (21). The second air intake channel (21) includes a second air inlet (211) and a second air outlet (212). The second air inlet (211) is opened on the side wall of the magnetic fluid (2), and the second air outlet (212) is connected to the air intake ring (13).

6. The pull-up rotation mechanism according to claim 1, wherein The lifting and rotating mechanism also includes an installation structure (4), a thermometer (5), and an electric slip ring (6). The thermometer (5) is connected to the top of the lifting rod (1) through the installation structure (4). The electric slip ring (6) is fitted onto the outside of the lifting rod (1). The cable of the thermometer (5) is connected to the rotor end of the electric slip ring (6).

7. The pull-up rotation mechanism according to claim 1, wherein The lifting and rotating mechanism also includes a driving mechanism (3), which is connected to the lifting rod (1) and drives the lifting rod (1) to rotate.

8. The lifting and rotating mechanism according to claim 7, characterized in that, The drive mechanism (3) includes a driver (31), a drive gear (32), a driven gear (33), and a transmission gear set (34). The power output end of the driver (31) is connected to the drive gear (32), the driven gear (33) is connected to the lifting rod (1), and the transmission gear set (34) is connected between the drive gear (32) and the driven gear (33).

9. The pull-up rotation mechanism according to claim 8, wherein The transmission gear set includes a first transmission gear (341), which meshes between the driving gear (32) and the driven gear (33).

10. A crystal growing apparatus, characterized by comprising: Includes the lifting and rotating mechanism as described in any one of claims 1-9.

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