Vacuum coating equipment high vacuum pumping system

Abstract

The utility model relates to vacuum coating equipment technical field discloses a kind of vacuum coating equipment high-vacuum air extraction system, it includes cavity, door panel module, molecular pump, mechanical pump group air extraction system, first valve, second valve, sealing ring and mutually interconnected molecular pump tail exhaust maintaining branch pipe, molecular pump tail exhaust maintaining main pipe.Wherein, door panel module is sealed and installed in cavity top. The connecting port of molecular pump tail exhaust maintaining main pipe is sealed and fixed on the upper edge end surface of cavity, and the second port of molecular pump tail exhaust maintaining branch pipe is sealed and fixed on the lower edge end surface of door panel module. Sealing ring is arranged between molecular pump tail exhaust maintaining branch pipe, molecular pump tail exhaust maintaining main pipe. When door panel module cooperates with cavity, the second port of molecular pump tail exhaust maintaining branch pipe and the connecting port of molecular pump tail exhaust maintaining main pipe cooperate butt joint intercommunication, cancel detachable butt joint flange, improve equipment assembly efficiency, reduce the risk of vacuum leakage.

Description

Technical Field

[0001] This utility model relates to the field of vacuum coating equipment technology, and in particular to a high vacuum pumping system for vacuum coating equipment. Background Technology

[0002] In vacuum coating equipment (such as photovoltaic coating and PVD coating equipment), the molecular pump is the core component for achieving a high vacuum environment in the cavity. It cannot be started directly in atmospheric conditions; specific conditions must be met—the gas pressure at the location of the molecular pump and the exhaust pressure must be reduced to below vacuum level P1 (the value of P1 varies depending on the molecular pump model). To maintain the exhaust pressure of the molecular pump, existing equipment requires a molecular pump exhaust maintenance piping system, but its structural design has significant flaws.

[0003] like Figure 3 As shown, the existing molecular pump tail exhaust maintenance pipe 100 is connected to the molecular pump tail exhaust maintenance main pipe 300 through the docking flange 200 to form a tail exhaust gas passage.

[0004] The existing structure has two major problems:

[0005] Low maintenance efficiency: When the entire line of equipment or a single cavity needs maintenance / troubleshooting, the door panel module must be lifted by a gantry crane first; before lifting, the docking flange must be loosened, and after maintenance, the flange must be relocked, which increases maintenance time and reduces equipment operation and maintenance efficiency.

[0006] High risk of vacuum leakage: The docking flange needs to be repeatedly disassembled and reassembled, and its sealing performance is prone to decline after long-term use, which can lead to vacuum leakage in the molecular pump tail discharge system. This not only affects the molecular pump's start-up conditions but may also damage the cavity vacuum environment and affect the normal operation of the equipment. Utility Model Content

[0007] The purpose of this utility model is to solve the defects in the existing technology, such as low efficiency due to the need to disassemble and reassemble the connecting flange for maintenance and easy vacuum leakage due to repeated flange disassembly and reassembly. It provides a high vacuum pumping system for vacuum coating equipment, which directly integrates the molecular pump tail exhaust and the main pipeline with the cavity, eliminating the detachable connecting flange, improving equipment assembly efficiency, and adapting to the use requirements of multi-cavity complete line equipment.

[0008] To achieve the above objectives, the present invention adopts the following technical solution:

[0009] This utility model discloses a high-vacuum pumping system for a vacuum coating equipment, which includes:

[0010] The cavity provides a sealed space for vacuum processes.

[0011] The door panel module can be hoisted and sealed above the cavity.

[0012] A molecular pump, installed on the cavity, is used to evacuate the cavity to a preset high vacuum state.

[0013] The molecular pump tailpipe maintenance piping system includes interconnected molecular pump tailpipe maintenance sub-pipes and a molecular pump tailpipe maintenance main pipe. The connection port of the molecular pump tailpipe maintenance main pipe is sealed and fixed to the upper edge of the cavity, flush with the upper edge of the cavity. The first port of each molecular pump tailpipe maintenance sub-pipe is connected to the tailpipe ends of several molecular pumps, and the second port is sealed and fixed to the lower edge of the door panel module, flush with the lower edge of the door panel module. When the door panel module mates with the cavity, the second port of the molecular pump tailpipe maintenance sub-pipe engages and connects with the connection port of the molecular pump tailpipe maintenance main pipe, and a sealing ring is also provided between the second port of the molecular pump tailpipe maintenance sub-pipe and the connection port of the molecular pump tailpipe maintenance main pipe.

[0014] The mechanical pump pumping system includes a first pumping pipe, a second pumping pipe, and a mechanical pump. The mechanical pump maintains communication with the main pipeline and the cavity of the molecular pump tail section through the first and second pumping pipes, respectively. It is used to pump the tail section and cavity of the molecular pump to the starting vacuum level of the molecular pump.

[0015] The first valve is located on the molecular pump tail-end maintenance sub-pipe and is used to control the opening and closing of the vacuum passage of the molecular pump tail-end maintenance pipeline system.

[0016] The second valve, located on the second extraction pipe, is used to control the opening and closing of the vacuum passage in the cavity.

[0017] Furthermore, the molecular pump tailpipe maintains the main pipeline inside the cavity, and the internal space of the main pipeline and the internal space of the cavity are independent pressure spaces. The two are isolated and sealed by a sealing element to avoid mutual pressure interference.

[0018] Furthermore, the molecular pump tail drain maintaining main pipe is independently set on the outside side of the cavity, and a preset gap is reserved between the molecular pump tail drain maintaining main pipe and the outer wall of the cavity to prevent temperature changes or vibrations of the cavity from being transmitted to the molecular pump tail drain maintaining main pipe.

[0019] Furthermore, the door panel module and the upper edge of the cavity are provided with positioning components that cooperate with each other.

[0020] Furthermore, when the equipment is a multi-cavity integrated line layout, the molecular pump tails of each cavity maintain the main pipeline in series to form the integrated line molecular pump tails maintain the main pipeline, and one or more mechanical vacuum pumps are configured to be connected to the integrated line molecular pump tails maintain the main pipeline.

[0021] Furthermore, the molecular pump is a turbomolecular pump or a traction molecular pump; the mechanical pump is a rotary vane mechanical pump or a Roots vacuum pump assembly.

[0022] Furthermore, the bottom of the cavity and the mechanical pump system is provided with foot supports, and the foot supports are equipped with shock absorption devices.

[0023] Compared with the prior art, the present invention has the following advantages:

[0024] 1. Significantly improved maintenance efficiency: The disassembly and assembly steps of the docking flange have been eliminated. After maintenance / troubleshooting, the door panel module can be directly hoisted and the machine restarted, which greatly shortens the operation and maintenance time and reduces labor costs.

[0025] 2. Elimination of vacuum leakage risk: The piping system and cavity are integrated as one unit, with no flange structure that requires repeated disassembly and assembly, thus completely avoiding vacuum leakage problems caused by flange seal failure.

[0026] 3. Strong adaptability: It supports independent use of a single cavity and series connection of multiple cavities. It can adapt to main pipelines of different lengths by increasing or decreasing the number of mechanical pump sets, and its application range covers various vacuum coating equipment.

[0027] 4. Simplified assembly: The pipeline integration is completed simultaneously during the cavity production stage, eliminating the need for separate connection of the tailpipe during equipment assembly, thus improving assembly efficiency. Attached Figure Description

[0028] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation on the scope. For those skilled in the art, other related drawings can be obtained based on these drawings without creative effort.

[0029] Figure 1 This is a schematic diagram of the structure of Embodiment 1.

[0030] Figure 2 This is a schematic diagram of the structure of Embodiment 2.

[0031] Figure 3 This is a schematic diagram of the existing technology.

[0032] Explanation of key component symbols:

[0033] 1. Cavity; 2. Door panel module; 3. Molecular pump; 4. Molecular pump tail drain maintenance branch pipe; 5. Molecular pump tail drain maintenance main pipe; 6. First suction pipe; 7. Second suction pipe; 8. Mechanical suction pump; 9. Mechanical pump group tail drain pipe; 10. First valve; 11. Second valve; 12. Foot support. Detailed Implementation

[0034] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0035] In this utility model, unless otherwise stated, directional terms such as "up," "down," "left," and "right" are generally understood in conjunction with the accompanying drawings and the directions shown in actual applications.

[0036] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0037] In this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0038] The endpoints and any values ​​of the ranges disclosed herein are not limited to the precise ranges or values, and should be understood to include values ​​close to these ranges or values. For numerical ranges, the endpoint values ​​of the various ranges, the endpoint values ​​of the various ranges and individual point values, and individual point values ​​can be combined with each other to obtain one or more new numerical ranges, which should be considered as specifically disclosed herein. The terms "optional" and "discretionary" mean that they may or may not be included (or may or may not be present).

[0039] As shown in Figure 1, this utility model discloses a high vacuum pumping system for a vacuum coating equipment, which includes: a cavity 1, a door panel module 2, a molecular pump 3, a molecular pump tail exhaust maintenance pipeline system, a mechanical pump pumping system, a first valve 10, and a second valve 11.

[0040] in:

[0041] Cavity 1 is used to provide a closed space for vacuum processes.

[0042] Door panel module 2 is installed in a sealed manner above cavity 1, allowing it to be lifted and opened. Door panel module 2 and cavity 1 are provided with mutually cooperating positioning components, such as positioning holes and positioning post combinations.

[0043] Molecular pump 3, mounted on chamber 1, is used to evacuate chamber 1 to a preset high vacuum state. Molecular pump 3 can be either turbomolecular pump 3 or traction molecular pump 3.

[0044] The molecular pump tail-out maintenance piping system includes interconnected molecular pump tail-out maintenance sub-pipes 4 and molecular pump tail-out maintenance main pipe 5. The connection port of the molecular pump tail-out maintenance main pipe 5 is sealed and fixed to the upper edge face of the cavity 1, and is flush with the upper edge face of the cavity 1, forming an integrated structure with the cavity 1. The first port of the molecular pump tail-out maintenance sub-pipe 4 is connected to the tail-out ends of several molecular pumps 3, and the second port is sealed and fixed to the lower edge face of the door panel module 2, and is flush with the lower edge face of the door panel module 2. When the door panel module 2 is fitted with the cavity 1, the second port of the molecular pump tail-out maintenance sub-pipe 4 and the connection port of the molecular pump tail-out maintenance main pipe 5 are mated and connected, eliminating the need for a mating flange in the prior art, and sealing is achieved by the weight of the door panel module 2 itself. A sealing ring is also provided between the second port of the molecular pump tail-out maintenance sub-pipe 4 and the connection port of the molecular pump tail-out maintenance main pipe 5. The molecular pump tail-out maintenance main pipe 5 is independently set on the outside of the cavity 1, and a preset gap is reserved between the molecular pump tail-out maintenance main pipe 5 and the outer wall of the cavity 1 to prevent temperature changes or vibrations of the cavity 1 from being transmitted to the molecular pump tail-out maintenance main pipe 5.

[0045] The mechanical pump assembly exhaust system includes a first exhaust pipe 6, a second exhaust pipe 7, a mechanical exhaust pump 8, and a mechanical pump assembly tailpipe 9. The mechanical exhaust pump 8 is connected to the molecular pump tailpipe main pipe 5 and the cavity 1 via the first exhaust pipe 6 and the second exhaust pipe 7, respectively. It is used to evacuate the tailpipe end of the molecular pump 3 and the cavity 1 to below the starting vacuum level P1 of the molecular pump 3 (the value of P1 varies depending on the model of the molecular pump 3). One end of the mechanical pump assembly tailpipe 9 is connected to the exhaust port of the mechanical exhaust pump 8, and the other end is connected to an external plant waste gas collection system or the external environment.

[0046] The mechanical vacuum pump 8 can be a rotary vane mechanical pump or a Roots vacuum pump assembly. When the equipment is a multi-chamber 1 integrated line layout, the molecular pump tail section of each chamber 1 maintains the main pipeline 5 in series to form the integrated line molecular pump tail section maintains the main pipeline 5. Depending on the length of the integrated line main pipeline (determined by the number of chambers 1), one or more mechanical vacuum pumps 8 are configured to be connected to the integrated line molecular pump tail section maintains the main pipeline 5 to ensure that the vacuum level of the integrated line main pipeline is continuously maintained at P1 or lower.

[0047] The first valve 10 is installed on the molecular pump tail discharge maintenance sub-pipe 4 and is used to control the opening and closing of the vacuum passage of the molecular pump tail discharge maintenance pipeline system.

[0048] The second valve 11 is installed on the second suction pipe 7 and is used to control the opening and closing of the vacuum passage of the cavity 1.

[0049] The foot support 12 is located at the bottom of the cavity 1 and the mechanical pump group air extraction system, and the foot support 12 is equipped with a shock absorption device.

[0050] Equipment maintenance / start-up / reboot process:

[0051] When the entire line equipment or a single cavity 1 needs maintenance or troubleshooting, it is only necessary to use a gantry crane to lift the door panel module 2, the molecular pump 3 connected to the door panel module 2, and the molecular pump tail drain maintenance pipe 4. No pipe flanges need to be disassembled or installed to perform internal maintenance or troubleshooting.

[0052] After maintenance or troubleshooting, the door panel module 2 can be directly hoisted onto the cavity 1 according to the position of the positioning post and closed, without the need to disassemble any pipe flanges. The entire maintenance process is reduced from 2 hours under existing technology to 30 minutes.

[0053] Start the mechanical vacuum pump 8, open the second valve 11 and close the first valve 10, and maintain the vacuum of the main pipeline 5 by using the second vacuum pipe 7 to evacuate the cavity 1 and the molecular pump tail section.

[0054] When the vacuum level of the main pipeline 5 maintained by the chamber 1 and the molecular pump tail section drops below P1, which is required to start the molecular pump 3, close the second valve 11, open the first valve 10, and start the molecular pump 3.

[0055] The exhaust gas from molecular pump 3 enters the main exhaust pipe 5 of molecular pump through the molecular pump exhaust maintenance sub-pipe 4, is removed by mechanical pump 8, and is finally discharged to the plant end through the mechanical pump set exhaust pipe 9.

[0056] Example 2:

[0057] like Figure 2 As shown, this embodiment discloses a high vacuum pumping system for a vacuum coating equipment, wherein the molecular pump tail exhaust maintaining main pipe 5 is located inside the cavity 1, and the internal space of the molecular pump tail exhaust maintaining main pipe 5 and the internal space of the cavity 1 are independent pressure spaces. The two are isolated and sealed by a sealing element to avoid mutual pressure interference.

[0058] Other technical features are consistent with those in Embodiment 1.

[0059] In summary, this utility model improves the structure and connection structure of the molecular pump tail-end maintenance branch pipe and the molecular pump tail-end maintenance main pipe, resulting in significantly improved maintenance efficiency, elimination of vacuum leakage risk, strong adaptability, and simplified assembly.

[0060] The preferred embodiments of this utility model have been described in detail above; however, this utility model is not limited thereto. Within the scope of the technical concept of this utility model, various simple modifications can be made to the technical solution of this utility model, including combining the various technical features in any other suitable manner. These simple modifications and combinations should also be considered as the content disclosed by this utility model and are all within the protection scope of this utility model.

Claims

1. A high vacuum pumping system for a vacuum coating apparatus, characterized by: include: The cavity (1) provides a closed space for vacuum processes; The door panel module (2) can be hoisted and sealed above the cavity (1); A molecular pump (3) is installed on the cavity (1) to pump the cavity (1) to a preset high vacuum state; The molecular pump tail discharge maintenance pipeline system includes interconnected molecular pump tail discharge maintenance sub-pipes (4) and molecular pump tail discharge maintenance main pipes (5); wherein, the connection port of the molecular pump tail discharge maintenance main pipe (5) is sealed and fixed on the upper edge end face of the cavity (1) and is flush with the upper edge end face of the cavity (1); the first port of the molecular pump tail discharge maintenance sub-pipe (4) is connected to the tail discharge end of several molecular pumps (3), and the second port is sealed and fixed on the lower edge end face of the door panel module (2) and is flush with the lower edge end face of the door panel module (2); when the door panel module (2) is engaged with the cavity (1), the second port of the molecular pump tail discharge maintenance sub-pipe (4) is engaged and connected with the connection port of the molecular pump tail discharge maintenance main pipe (5), and a sealing ring is also provided between the second port of the molecular pump tail discharge maintenance sub-pipe (4) and the connection port of the molecular pump tail discharge maintenance main pipe (5); The mechanical pump pump system includes a first pump pipe (6), a second pump pipe (7), and a mechanical pump (8); the mechanical pump (8) is connected to the main pipe (5) of the molecular pump tail discharge and the cavity (1) through the first pump pipe (6) and the second pump pipe (7) respectively; it is used to pump the tail discharge end of the molecular pump (3) and the cavity (1) to the starting vacuum level of the molecular pump (3); The first valve (10) is installed on the molecular pump tail drain maintenance sub-pipe (4) and is used to control the opening and closing of the vacuum passage of the molecular pump tail drain maintenance pipeline system. The second valve (11) is installed on the second suction pipe (7) and is used to control the opening and closing of the vacuum passage of the cavity (1).

2. The high vacuum pumping system of the vacuum coating equipment according to claim 1, characterized in that: The molecular pump tail-out maintaining main pipe (5) is located inside the cavity (1), and the internal space of the molecular pump tail-out maintaining main pipe (5) and the internal space of the cavity (1) are independent pressure spaces. They are isolated and sealed by a sealing element to avoid mutual pressure interference.

3. The high vacuum pumping system of the vacuum coating equipment according to claim 1, characterized in that: The molecular pump tail drain main pipe (5) is independently set on the outside side of the cavity (1), and a preset gap is reserved between the molecular pump tail drain main pipe (5) and the outer wall of the cavity (1) to prevent temperature changes or vibrations of the cavity (1) from being transmitted to the molecular pump tail drain main pipe (5).

4. The high vacuum pumping system of a vacuum coating apparatus according to any one of claims 1 to 3, characterized in that: The cavity (1) and the bottom of the mechanical pump group air extraction system are provided with foot supports (12), and the foot supports (12) are provided with shock absorption devices.

5. The high vacuum pumping system of the vacuum coating equipment according to any one of claims 1 to 3, characterized in that: The door panel module (2) and the cavity (1) are provided with positioning components that cooperate with each other.

6. The high vacuum pumping system of the vacuum coating equipment according to any one of claims 1 to 3, characterized in that: When the equipment is a multi-cavity (1) line layout, the molecular pump tail maintenance main pipe (5) of each cavity (1) is connected in series to form the whole line molecular pump tail maintenance main pipe (5), and one or more mechanical vacuum pumps (8) are configured to be connected to the whole line molecular pump tail maintenance main pipe (5).

7. The high vacuum pumping system of the vacuum coating equipment according to claim 1, characterized in that: The molecular pump (3) is a turbomolecular pump (3) or a traction molecular pump (3); the mechanical pump (8) is a rotary vane mechanical pump or a Roots vacuum pump assembly.

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