A limiting device and high vacuum valve

Abstract

The utility model relates to high vacuum valve device technical field, concretely relates to a limiting device and high vacuum valve, the limiting device is used for controlling the bellows compression stroke of high vacuum valve, and the limiting device is limit ring, and high vacuum valve includes piston rod, air cylinder and the elastic piece and bellows that set gradually from inside to outside around piston rod, and piston rod sets up the limiting part for corresponding limit ring, and limit ring is set up in piston rod, and with the limiting part abuts, and the end of piston rod far from the limiting part is arranged in the air cylinder. When the ventilation, piston rod drives bellows to make compression movement, and rises to certain height, avoids the collision of limiting part and air cylinder through the setting of limit ring, controls bellows compression stroke in reasonable range, and then prevents the vibration between bellows and air cylinder, protects bellows and will not appear breakage because of overpressure, namely reduces the vibration and noise of traditional high vacuum valve through the buffer of collision.

Description

Technical Field

[0001] This utility model relates to the field of high vacuum valve device technology, specifically to a limiting device and a high vacuum valve. Background Technology

[0002] High-vacuum valves are used to connect or interrupt the gas flow in vacuum pipelines, and are suitable for pure air and non-corrosive gases. In existing high-vacuum valves, the piston moves at a relatively high speed, and only stops moving after colliding with the cylinder head. The bellows, which moves along with it, will inevitably collide with the cylinder as well. The collision of metal with metal will generate significant vibration and noise. In high-precision equipment and instruments, vibration not only causes overpressure in the bellows, shortening its service life, but also affects the accuracy of the equipment and instruments, causing negative impacts. Utility Model Content

[0003] To address the technical problem of vibration and noise caused by overpressure in the bellows of existing high-vacuum valves, which affects the service life and accuracy of the equipment, the purpose of this utility model is to provide a limiting device for controlling the compression stroke of the bellows in a high-vacuum valve. The specific technical solution adopted is as follows:

[0004] The limiting device is a limiting ring. The high vacuum valve includes a piston rod, a cylinder, and an elastic element and a bellows arranged sequentially from the inside to the outside around the piston rod. The piston rod is provided with a limiting part corresponding to the limiting ring. The limiting ring is sleeved on the piston rod and abuts against the limiting part. The end of the piston rod away from the limiting part passes through the cylinder.

[0005] Preferably, the limiting ring has a through hole, the diameter of which is equal to the outer diameter of the end of the piston rod near the cylinder, and the diameter of the limiting ring is greater than the outer diameter of the limiting part.

[0006] Preferably, the limiting ring is a polyurethane ring sleeve.

[0007] Preferably, the elastic element is a spring, and the inner diameter of the spring is larger than the outer diameter of the limiting ring.

[0008] To solve the above problems, this utility model also provides: a high vacuum valve, including a valve body and a limiting device as described in any of the preceding claims disposed in the valve body, and a sealing ring, a lower baffle, a cylinder and a cylinder head arranged sequentially from bottom to top near the limiting part, wherein the bellows is disposed between the lower baffle and the cylinder, and the lower baffle has the clearance groove corresponding to the piston rod.

[0009] Preferably, the cylinder head seals the cylinder, and a drive member and a retaining ring are provided inside the cylinder. The end of the piston rod away from the limiting part passes through the cylinder, the drive member and the retaining ring in sequence, and the drive member is disposed between the cylinder and the retaining ring.

[0010] Preferably, a fixing plate is also provided near the lower baffle in the high vacuum valve, and the piston rod passes through the fixing plate and abuts against the groove wall and bottom of the relief groove, and is engaged with the fixing plate.

[0011] This utility model has the following beneficial effects:

[0012] 1. The bellows controls the flow of the medium by being stretched or compressed. When air is supplied, the piston rod drives the bellows to compress and rise to a certain height. The setting of the limit ring avoids the collision between the limit part and the cylinder, and controls the compression stroke of the bellows within a reasonable range, thereby preventing the vibration generated between the bellows and the cylinder and protecting the bellows from damage due to overpressure. That is, the vibration and noise caused by the collision of traditional high vacuum valves are reduced by buffering.

[0013] 2. The high vacuum valve provided by this utility model has the same beneficial effects as the limiting device provided by this utility model, and will not be described in detail here. Attached Figure Description

[0014] To more clearly illustrate the technical solutions and advantages in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0015] Figure 1 A cross-sectional view of a limiting device comprising a limiting ring and a high vacuum valve, provided in one embodiment of the present invention;

[0016] Figure 2 A schematic diagram of the structure of a limiting device in which a limiting ring and a piston rod cooperate, provided in an embodiment of the present invention;

[0017] Figure 3 A schematic diagram of the structure of a limiting ring of a limiting device provided in one embodiment of this utility model;

[0018] In the picture:

[0019] 1. Limiting ring; 2. Piston rod; 3. Cylinder; 4. Elastic element; 5. Bellows;

[0020] 10. Through hole; 20. Limiting part; 21. Valve body; 22. Sealing ring; 23. Lower baffle; 24. Cylinder head; 40. Limiter;

[0021] 230, Fixed plate; 231, Leaving groove; 240, Driving component; 241, Retaining ring. Detailed Implementation

[0022] To further illustrate the technical means and effects adopted by this utility model to achieve its intended purpose, the following, in conjunction with the accompanying drawings and preferred embodiments, details the specific implementation, structure, features, and effects of a limiting device and a high vacuum valve proposed according to this utility model. In the following description, different "one embodiment" or "another embodiment" do not necessarily refer to the same embodiment. Furthermore, specific features, structures, or characteristics in one or more embodiments can be combined in any suitable form.

[0023] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains.

[0024] The following description, in conjunction with the accompanying drawings, details the specific solutions for the limiting device and high vacuum valve provided by this utility model.

[0025] Please combine Figure 1 and Figure 2 The first embodiment of this utility model provides a limiting device for controlling the compression stroke of the bellows 5 of a high vacuum valve. The limiting device is a limiting ring 1. The high vacuum valve includes a piston rod 2, a cylinder 3, and elastic elements 4 and bellows 5 arranged sequentially from the inside to the outside around the piston rod 2. The piston rod 2 is provided with a limiting part 20 corresponding to the limiting ring 1. The limiting ring 1 is sleeved on the piston rod 2 and abuts against the limiting part 20. The end of the piston rod 2 away from the limiting part 20 passes through the cylinder 3.

[0026] As an optional implementation, the bellows 5 is made of metal and is a corrugated tubular elastic sensitive element that can be stretched or compressed, i.e., it has excellent extensibility; wherein, the metal material includes, but is not limited to, stainless steel, carbon steel, copper and their alloys, to be suitable for chemical environments.

[0027] It can be explained that the bellows 5 plays a role in sealing and preventing media corrosion in the high vacuum valve. It controls the flow of the medium by being stretched or compressed. When air is supplied, the piston rod 2 drives the bellows 5 to compress and rise to a certain height. The setting of the limit ring 1 avoids the collision between the limit part 20 and the cylinder 3, and controls the compression stroke of the bellows 5 within a reasonable range, thereby preventing the vibration generated between the bellows 5 and the cylinder 3, and protecting the bellows 5 from damage due to overpressure. That is, it reduces the vibration and noise caused by the collision of traditional high vacuum valves by buffering.

[0028] Furthermore, the limiting ring 1 is a polyurethane ring sleeve.

[0029] It is explained that polyurethane has the characteristics of oil resistance, low temperature resistance, aging resistance, high hardness, and elasticity. Its buffering effect reduces the amplitude of the vibration of the bellows 5 when the piston rod 2 moves, which protects the bellows 5 and avoids wear and damage caused by excessive vibration, thus extending the service life of the bellows 5 and improving the reliability and stability of the entire high vacuum valve.

[0030] Please combine Figure 1 and Figure 3 Furthermore, the limiting ring 1 has a through hole 10, the diameter of which is equal to the outer diameter of the end of the piston rod 2 near the cylinder 3, and the diameter of the limiting ring 1 is greater than the outer diameter of the limiting part 20. This arrangement allows the limiting ring 1 to be smoothly fitted onto the piston rod 2 during installation, so as to effectively control the range of the piston rod 2.

[0031] Furthermore, the elastic element 4 is a spring, and the inner diameter of the spring is larger than the outer diameter of the limiting ring 1. That is, the spring cooperates with the piston rod 2 and the bellows 5 to ensure that the spring can effectively exert its elastic effect during operation and provide the necessary elastic support to ensure the smooth operation of the entire high vacuum valve.

[0032] Please see Figure 1 The second embodiment of this utility model provides a high vacuum valve, including a valve body 21 and a limiting device provided in the first embodiment of this invention, and a sealing ring 22, a lower baffle 23, a cylinder 3 and a cylinder head 24 arranged sequentially from bottom to top near the limiting part 20. A bellows 5 is arranged between the lower baffle 23 and the cylinder 3, and the lower baffle 23 has a relief groove corresponding to the piston rod 2.

[0033] It is explained that the sealing ring 22 is set as an O-ring 22 to match the cylindrical structure of the entire high vacuum valve and improve the sealing performance.

[0034] Furthermore, the cylinder head 24 seals the cylinder 3, and the cylinder 3 is provided with a drive member 240 and a retaining ring 241. The end of the piston rod 2 away from the limiting part 20 passes through the cylinder 3, the drive member 240 and the retaining ring 241 in sequence. The drive member 240 is disposed between the cylinder 3 and the retaining ring 241.

[0035] It can be noted that in this embodiment, the cylinder head 24 seals the cylinder 3 with bolts to enhance the reliability of the seal; the drive component 240 is a piston, which cooperates with the cylinder 3 to achieve precise control of the movement of the piston rod 2; wherein, the retaining ring 241 is an E-type retaining ring 241, which is a ring-shaped metal part with an E-shaped cross section, has good elasticity and strength, and is used to prevent the piston from moving axially during the movement, ensuring its precise alignment and positioning in the cylinder 3, that is, effectively preventing the piston rod 2 from shifting or vibrating during high-speed movement, and improving the operating efficiency of the entire high vacuum valve.

[0036] Furthermore, a fixing plate 230 is provided near the lower baffle 23 in the high vacuum valve. The piston rod 2 passes through the fixing plate 230 and abuts against the groove wall and bottom of the relief groove 231, and is engaged with the fixing plate 230. This arrangement is used to ensure the stability and reliability of the piston rod 2, and to ensure the sealing performance and service life of the high vacuum valve in a high vacuum environment. Preferably, a limiter 40 is provided near the fixing plate 230 to position the elastic element 4, i.e., the positioning spring, to limit the spring's offset.

[0037] Working principle: In the high vacuum valve, the piston rod 2 moves up and down controlled by the cylinder 3, the drive component 240, and the spring, causing the bellows 5 to be stretched or compressed. When the air supply is cut off, the spring presses the lower baffle 23 against the end face of the valve body 21, blocking the air inlet of the valve body 21 and forming a sealed environment in the chamber of the valve body 21, blocking the flow of the medium. When the air supply is opened, the piston rod 2 drives the bellows 5 to perform a compression motion, the lower baffle 23 is lifted, and the medium can flow from the air inlet of the valve body 21 to the air outlet of the valve body 21, forming a series. The piston rod 2 stops moving after colliding with the cylinder head 24, and the bellows 5, which moves along with it, also stops moving. The limiting ring 1 prevents the limiting part 20 from colliding with the cylinder 3, ensuring that the compression stroke of the bellows 5 is within a reasonable range and protecting the bellows 5 from damage due to overpressure.

[0038] It should be noted that the order of the above embodiments of the present invention is merely for descriptive purposes and does not represent the superiority or inferiority of the embodiments. The processes depicted in the accompanying drawings do not necessarily require a specific or sequential order to achieve the desired result. In some embodiments, multitasking and parallel processing are also possible or may be advantageous.

[0039] The various embodiments in this specification are described in a progressive manner. The same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on describing the differences from other embodiments.

Claims

1. A stop device for controlling the bellows compression stroke of a high vacuum valve, characterized in that, The limiting device is a limiting ring. The high vacuum valve includes a piston rod, a cylinder, and an elastic element and a bellows arranged sequentially from the inside to the outside around the piston rod. The piston rod is provided with a limiting part corresponding to the limiting ring. The limiting ring is sleeved on the piston rod and abuts against the limiting part. The end of the piston rod away from the limiting part passes through the cylinder.

2. A stop device according to claim 1, wherein The limiting ring has a through hole, the diameter of which is equal to the outer diameter of the end of the piston rod near the cylinder, and the diameter of the limiting ring is greater than the outer diameter of the limiting part.

3. A stop device according to claim 2, wherein The limiting ring is a polyurethane ring sleeve.

4. A stop device according to claim 2, wherein The elastic element is a spring, and the inner diameter of the spring is larger than the outer diameter of the limiting ring.

5. A high vacuum valve, characterized in that The device includes a valve body and a limiting device as described in any one of claims 1-4 disposed within the valve body, and a sealing ring, a lower baffle, a cylinder and a cylinder head arranged sequentially from bottom to top near the limiting portion, wherein the bellows is disposed between the lower baffle and the cylinder, and the lower baffle has a clearance groove corresponding to the piston rod.

6. A high vacuum valve according to claim 5, characterized in that The cylinder head seals the cylinder, and a drive member and a retaining ring are provided inside the cylinder. The end of the piston rod away from the limiting part passes through the cylinder, the drive member and the retaining ring in sequence. The drive member is located between the cylinder and the retaining ring.

7. A high vacuum valve according to claim 5, characterized in that The high vacuum valve is also provided with a fixing plate near the lower baffle. The piston rod passes through the fixing plate and abuts against the groove wall and bottom of the relief groove, and is engaged with the fixing plate.

Images