Vacuum box sealing structure of magnetron sputtering coating machine

Abstract

The utility model relates to magnetron sputtering coating equipment technical field, concretely relates to a vacuum box body sealing structure of magnetron sputtering coating machine, including the box, the upper portion of box articulates the box cover, the side opposite of box and box cover all is established with mounting assembly, the inner wall of mounting assembly on box is provided with lower sealing element, the inner wall of mounting assembly on box cover is provided with upper sealing element. Through lower sealing element and upper sealing element splicing extrusion design, when closing, the plug -in groove of lower sealing element and the plug -in boss of upper sealing element accurate butt joint, the sealing groove inner wall of sealing main body a and upper sealing element tight extrusion, form the double protection of plug -in positioning and pasting seal, cooperate through the limiting protruding of mounting assembly and the clamping groove of sealing element simultaneously, realize sealing element and the quick snap -fit of box, box cover and fix, when replacing, need not to dismantle a plurality of bolts, only need to take down old sealing element along the mounting groove and carding new piece directly, and the operation time is greatly shortened.

Description

Technical Field

[0001] This utility model relates to the technical field of magnetron sputtering coating equipment, specifically to a vacuum chamber sealing structure for a magnetron sputtering coating machine. Background Technology

[0002] Magnetron sputtering coating technology, as a core technology for high-precision thin film preparation, has been widely used in semiconductor chips, optical lenses, display panels, and new energy battery electrodes. Its core principle is to confine electron movement with a magnetic field in a high-vacuum environment, causing high-energy particles to bombard the target material, prompting the target atoms or molecules to detach and deposit on the substrate surface, forming a uniform and dense functional thin film. In this process, the vacuum chamber, as the enclosed carrier unit for the coating operation, directly determines the reliability of the vacuum environment within the chamber due to its sealing performance, structural stability, and ease of maintenance. This, in turn, affects key quality indicators such as the purity, thickness uniformity, and adhesion of the thin film, making it a core component of the magnetron sputtering coating machine.

[0003] In the operation of magnetron sputtering coating machines, the sealing performance of the vacuum chamber door directly determines the coating quality. However, traditional vacuum chamber door sealing structures mostly use a single O-ring seal, which is prone to sealing failure due to compression deformation and aging after long-term use. This makes it difficult to meet the stringent requirements of high-precision coating for the vacuum environment. The replacement of the seal is cumbersome. Since the seal is rigidly connected to the chamber door or door frame, multiple bolts need to be removed during replacement, which affects the utilization rate of the equipment. Utility Model Content

[0004] The purpose of this invention is to provide a vacuum chamber sealing structure for a magnetron sputtering coating machine. Through an innovatively designed dual-seal assembly and a quick-locking installation structure, it solves the problems of easy failure of the single O-ring seal on the traditional vacuum chamber door and the cumbersome replacement of seals, which leads to low equipment utilization in the prior art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a vacuum chamber sealing structure for a magnetron sputtering coating machine, comprising... The box has a lid hinged to its upper part. The box has mounting components on the side opposite to the lid. The inner wall of the mounting components on the box has a lower seal, and the inner wall of the mounting components on the lid has an upper seal. The lower seal and the upper seal are spliced ​​and pressed together.

[0006] Preferably, the mounting assembly includes mounting grooves respectively opened on opposite sides of the housing and the cover, and the inner wall of the mounting groove is provided with circumferentially distributed limiting protrusions; the lower seal is disposed in the mounting groove of the housing.

[0007] Preferably, the lower seal includes a sealing body a, which has an insertion groove on one side and a snap-fit ​​groove a on the other side, and the sealing body a is engaged and fixed with a limiting protrusion in the housing mounting groove through the snap-fit ​​groove a.

[0008] Preferably, the upper sealing element includes a sealing body b, one side of which is provided with an insertion protrusion adapted to the insertion groove, and the other side is provided with a snap-fit ​​groove b, and the sealing body b is engaged and fixed with the limiting protrusion in the box cover mounting groove through the snap-fit ​​groove b.

[0009] Preferably, the sealing body b has a sealing groove on the side near the insertion protrusion. When the box body and the box cover are closed, the insertion groove of the lower sealing member is spliced ​​with the insertion protrusion of the upper sealing member, and the sealing body a is pressed and fitted against the inner wall of the sealing groove.

[0010] Preferably, the mounting groove is provided around the top edge of the box body and the bottom edge of the box cover, and the cross-section of the mounting groove is "U" shaped and the surface is set as an arc surface.

[0011] Preferably, both the sealing body a and the sealing body b are made of fluororubber.

[0012] Preferably, the cross-section of the sealing groove is trapezoidal, and the width of the bottom of the sealing groove is adapted to the width of the sealing body a.

[0013] The technical effects and advantages provided by this utility model in the above technical solution are as follows: This utility model adopts a splicing and extrusion design of lower and upper sealing components. When closed, the insertion groove of the lower sealing component precisely aligns with the insertion protrusion of the upper sealing component. At the same time, the sealing body a is tightly pressed against the inner wall of the sealing groove of the upper sealing component, forming a dual protection of insertion positioning and close sealing. In addition, the limiting protrusion of the installation component cooperates with the snap-fit ​​groove of the sealing component to achieve quick snap-fit ​​fixing of the sealing component to the box body and box cover. When replacing, there is no need to remove multiple bolts. You only need to directly remove the old sealing component along the installation groove and snap on the new component, which greatly shortens the operation time. Attached Figure Description

[0014] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this invention. For those skilled in the art, other drawings can be obtained based on these drawings.

[0015] Figure 1 This is a three-dimensional structural diagram of the overall device in this utility model; Figure 2 This is a three-dimensional structural breakdown diagram of the overall device in this utility model; Figure 3 This is a three-dimensional structural breakdown diagram of the lower and upper sealing components of this utility model. Figure 4 This is a three-dimensional cross-sectional view of the box body, box cover, lower seal and upper seal of this utility model; Figure 5 This utility model Figure 4 Enlarged schematic diagram of the three-dimensional structure at point A; Figure 6 This utility model Figure 4 Enlarged schematic diagram of the three-dimensional structure at point B; Figure 7 This utility model Figure 4 Enlarged schematic diagram of the three-dimensional structure at point C.

[0016] Legend: 1. Box body; 2. Box cover; 3. Lower seal; 31. Sealing body a; 32. Insertion groove; 33. Snap-fit ​​groove a; 4. Upper seal; 41. Sealing body b; 42. Snap-fit ​​groove b; 43. Sealing groove; 44. Insertion protrusion; 5. Mounting assembly; 51. Mounting groove; 52. Limiting protrusion. Detailed Implementation

[0017] To enable those skilled in the art to better understand the technical solution of this utility model, the present utility model will be further described in detail below with reference to the accompanying drawings.

[0018] This utility model provides, for example Figure 1 - Figure 3 The vacuum chamber sealing structure of a magnetron sputtering coating machine shown includes a chamber 1, specifically: The upper part of the housing 1 is hinged to a cover 2. Housing 1, as the core load-bearing component, provides a fixed space for the coating operation and serves as the mounting carrier for the core coating components of the magnetron sputtering coating machine, such as the target and substrate. When the cover 2 is closed with housing 1, it forms a completely sealed chamber, preventing external air from entering and providing a "sealing" effect for creating a high-vacuum environment inside housing 1. Simultaneously, the cover 2 and housing 1 must share the vacuum pressure difference to ensure the overall structural sealing and strength. A locking assembly is provided on the front side of housing 1, including... The latches on the side wall of the box body 1 and the corresponding hooks on the lid 2 are locked together by threaded engagement. The box body 1 and the lid 2 are both provided with mounting components 5 on opposite sides. The inner wall of the mounting components 5 on the box body 1 is provided with a lower seal 3. The lower seal 3 is the "fixed end" of the sealing structure, which includes three substructures: sealing body a31, insertion groove 32, and snap groove a33. The inner wall of the mounting components 5 on the lid 2 is provided with an upper seal 4. The lower seal 3 and the upper seal 4 can be spliced ​​and squeezed together to form a double seal.

[0019] like Figure 3 - Figure 5 As shown, the mounting assembly 5 includes mounting grooves 51 respectively opened on opposite sides of the housing 1 and the cover 2, and the inner wall of the mounting groove 51 is provided with surrounding limiting protrusions 52. This structure replaces the "rigid bolt connection" of traditional seals. By engaging the limiting protrusions 52 with the locking grooves a33 and b42 of the seal, the lower seal 3 and the upper seal 4 can be fixed and removed without removing the bolts, greatly simplifying the maintenance process. When replacing the seal, it is only necessary to push the seal along the mounting groove 51 to disengage the locking groove from the limiting protrusions 52 to remove it. At the same time, the surrounding limiting protrusions 52 can form a uniform circumferential limit on the seal, avoiding the seal from twisting or shifting due to uneven local force, ensuring that the seal is always in the optimal sealing position, and the lower seal 3 is set in the mounting groove 51 of the housing 1.

[0020] like Figure 2 , Figure 3 and Figure 7 As shown, the lower seal 3 includes a sealing body a31, which is the "main skeleton" of the lower seal 3. It is made of fluororubber and has the characteristics of aging resistance and compression deformation resistance. On the one hand, through the elastic deformation of its own material, it fits tightly with the inner wall of the sealing groove 43 of the upper seal 4 to form a "surface seal" and block the air leakage path; on the other hand, it provides a supporting carrier for the insertion groove 32 and the snap-fit ​​groove a33, ensuring the positional stability of these two substructures. The sealing body a31 has an insertion groove 32 on one side. The insertion groove 32 and the insertion protrusion 44 of the upper sealing element 4 have a "concave-convex fit" structure. The core function is positioning and initial sealing: when the cover 2 is closed, the insertion protrusion 44 of the upper sealing element 4 is inserted into the insertion groove 32, which can first achieve precise alignment between the lower sealing element 3 and the upper sealing element 4, avoiding sealing failure caused by misalignment of the sealing elements. At the same time, the fit between the insertion protrusion 44 and the inner wall of the insertion groove 32 can form the first "line seal", initially blocking the leakage channel and providing a foundation for the subsequent "surface seal". The sealing body a31 has a snap-fit ​​groove a33 on the other side, and the sealing body a31 is engaged and fixed with the limiting protrusion 52 in the mounting groove 51 of the housing 1 through the snap-fit ​​groove a33. The function of this engagement structure is to prevent the lower sealing element 3 from shifting: In a vacuum environment, the sealing element will undergo slight deformation or displacement due to the internal and external pressure difference. The engagement structure of the snap-fit ​​groove a33 and the limiting protrusion 52 can limit the movement of the sealing body a31, ensuring that the lower sealing element 3 is always in the preset position in the mounting groove 51, and avoiding sealing gaps caused by the displacement of the sealing element.

[0021] like Figure 3 and Figure 6As shown, the upper sealing element 4 includes a sealing body b41, which is made of the same material as the sealing body a31, namely fluororubber, and serves as the "main support" for the upper sealing element 4. On the one hand, it is fixed to the cover 2 by the snap-fit ​​groove b42, ensuring its own positional stability; on the other hand, it integrates the sealing groove 43 and the insertion protrusion 44, providing a structural basis for splicing and pressing with the lower sealing element 3, and achieving double sealing through its own elastic deformation. One side of the sealing body b41 is provided with an insertion protrusion 44 that matches the insertion groove 32. The insertion protrusion 44 and the insertion groove 32 of the lower sealing element 3 are concave and convex, and the core function is to assist in positioning and initial sealing: when the cover 2 is closed, the insertion protrusion 44 is first inserted into the insertion groove 32 to ensure that the circumferential position of the upper sealing element 4 and the lower sealing element 3 is aligned to avoid gaps due to circumferential misalignment of the sealing elements. At the same time, the tight contact between the insertion protrusion 44 and the inner wall of the insertion groove 32 forms the first sealing barrier, reducing the pressure of subsequent "surface sealing" and further reducing the vacuum leakage rate. The sealing body b41 has a snap-fit ​​groove b42 on the other side, and the sealing body b41 is fixed by snap-fit ​​groove b42 and limit protrusion 52 in the mounting groove 51 of the cover 2. The snap-fit ​​groove b42 has the same function as the snap-fit ​​groove a33 of the lower seal 3. After snap-fitting with the limit protrusion 52 in the mounting groove 51 of the cover 2, the position of the upper seal 4 can be fixed. During the opening and closing of the cover 2, the upper seal 4 will be moved. The snap-fit ​​groove b42 and the limit protrusion 52 can prevent the upper seal 4 from falling off or shifting, ensuring that the upper seal 4 can accurately align with the lower seal 3 every time the cover 2 is closed.

[0022] like Figure 3 and Figure 6 As shown, a sealing groove 43 is also provided on the side of the sealing body b41 near the insertion protrusion 44. The cross-section of the sealing groove 43 is trapezoidal, and the width of the bottom of the sealing groove 43 is adapted to the width of the sealing body a31. Its function is to achieve "surface sealing" enhancement: when the box cover 2 is closed, the sealing body a31 of the lower sealing element 3 will be embedded in the sealing groove 43. The trapezoidal structure can guide the sealing body a31 to automatically align. Even if there is a slight assembly error between the box body 1 and the box cover 2, the trapezoidal slope can push the sealing body a31 to adjust its position. At the same time, the groove wall of the sealing groove 43 and the sealing body a31 are pressed and adhered to form a large area of ​​"surface sealing". Compared with the "line sealing" of the traditional O-ring, the sealing area is larger and the leakage risk is lower. When the box body 1 and the box cover 2 are closed, the insertion groove 32 of the lower sealing element 3 is spliced ​​with the insertion protrusion 44 of the upper sealing element 4, and the sealing body a31 is pressed and adhered to the inner wall of the sealing groove 43 to form a complete sealing structure.

[0023] like Figure 5 - Figure 7As shown, the mounting groove 51 is set around the top edge of the housing 1 and the bottom edge of the cover 2. The cross-section of the mounting groove 51 is U-shaped and the surface is set as an arc surface. The U-shaped structure can completely wrap the edges of the lower seal 3 and the upper seal 4, restricting the displacement of the seal in the direction perpendicular to the sealing surface, and preventing the seal from being "pressed out" of the installation position due to vacuum pressure difference. The arc surface design can reduce the friction between the seal and the groove wall of the mounting groove 51: on the one hand, it reduces the disassembly and assembly resistance when the seal is replaced, making it easier to quickly pick up and put down; on the other hand, it avoids the sharp groove wall from scratching the fluororubber material of the seal, extending the service life of the seal. The sealing body a31 and the sealing body b41 are both made of fluororubber material. The cross-section of the sealing groove 43 is trapezoidal, and the width of the bottom of the sealing groove 43 is adapted to the width of the sealing body a31.

[0024] The working principle of this utility model is as follows: The lower sealing member 3 engages with the limiting protrusion 52 in the mounting groove 51 of the box body 1 through its own snap-fit ​​groove a33, and the upper sealing member 4 engages with the limiting protrusion 52 in the mounting groove 51 of the box cover 2 through its snap-fit ​​groove b42. The matching structure of the limiting protrusion 52 with the snap-fit ​​grooves a33 and b42 can fix the lower sealing member 3 and the upper sealing member 4 in the preset positions at the top of the box body 1 and the bottom of the box cover 2, respectively, to prevent the sealing members from being misaligned due to movement. At the same time, the mounting groove 51 with the "U"-shaped arc surface can wrap around the edge of the sealing member, further restricting the vertical displacement of the sealing member and ensuring the initial position of the sealing member is stable.

[0025] Rotate the lid 2 around the hinge point between the housing 1 and the lid 2 to bring them closer together. During the closing process, the insertion protrusion 44 of the upper seal 4 first precisely aligns with the insertion groove 32 of the lower seal 3. The concave-convex fitting structure not only achieves circumferential positioning of the lower seal 3 and the upper seal 4, avoiding gaps caused by circumferential offset of the seals, but also forms the first "line seal" through the tight fit between the insertion protrusion 44 and the inner wall of the insertion groove 32, initially blocking the passage for external air to enter the interior of the housing 1.

[0026] As the lid 2 is fully closed, the sealing body a31 of the lower seal 3 is pressed into the sealing groove 43 of the upper seal 4. Since the sealing groove 43 has a trapezoidal cross-section and its bottom width matches that of the sealing body a31, the trapezoidal slope guides the sealing body a31 to automatically adjust its position. Even with minor assembly errors between the housing 1 and the lid 2, precise fit can be achieved through the slope compression, ultimately resulting in complete compression between the sealing body a31 and the inner wall of the sealing groove 43. At this point, the fluororubber sealing bodies a31 and b41 fill all the tiny gaps due to elastic deformation, forming a dual sealing structure of "line seal + surface seal," providing a leak-free sealed foundation for the subsequent construction of the vacuum environment inside the housing 1.

[0027] When the current seal 3 and upper seal 4 need to be replaced due to aging and deformation after long-term use, unlike traditional rigid connections, there is no need to remove the bolts. Simply open the cover 2 and push the old seal along the arc surface of the mounting groove 51. The arc surface design reduces the frictional resistance between the seal and the groove wall of the mounting groove 51, so that the snap-fit ​​groove a33 of the lower seal 3 and the snap-fit ​​groove b42 of the upper seal 4 can easily disengage from the limiting protrusion 52 and the old seal can be directly removed from the mounting groove 51, greatly shortening the operation time.

[0028] Align the new lower seal 3 and upper seal 4 with the mounting slots 51 of the housing 1 and cover 2 respectively, and secure them by engaging with the locking slots a33 and b42 and the limiting protrusion 52. Then close the cover 2 to restore the sealing structure. The standardized locking and plugging structure requires no professional tools for calibration, and ordinary operators can complete the replacement, avoiding long-term equipment downtime due to cumbersome maintenance and improving equipment utilization.

[0029] The foregoing description only illustrates certain exemplary embodiments of the present invention. Undoubtedly, those skilled in the art can modify the described embodiments in various ways without departing from the spirit and scope of the present invention. Therefore, the above drawings and descriptions are illustrative in nature and should not be construed as limiting the scope of protection of the claims of the present invention.

Claims

1. A vacuum chamber sealing structure for a magnetron sputtering coating machine, characterized in that: include Box body (1), the upper part of the box body (1) is hinged with a box cover (2), the box body (1) and the box cover (2) are respectively provided with mounting components (5), the inner wall of the mounting components (5) on the box body (1) is provided with a lower seal (3), the inner wall of the mounting components (5) on the box cover (2) is provided with an upper seal (4), the lower seal (3) and the upper seal (4) are spliced ​​and pressed together.

2. The vacuum chamber sealing structure of a magnetron sputtering coating machine according to claim 1, characterized in that: The mounting assembly (5) includes mounting grooves (51) respectively opened on opposite sides of the housing (1) and the cover (2), and the inner wall of the mounting groove (51) is provided with surrounding limiting protrusions (52); the lower seal (3) is disposed in the mounting groove (51) of the housing (1).

3. The vacuum chamber sealing structure of a magnetron sputtering coating machine according to claim 1, characterized in that: The lower seal (3) includes a sealing body a (31). The sealing body a (31) has an insertion groove (32) on one side and a snap-fit ​​groove a (33) on the other side. The sealing body a (31) is engaged and fixed with the limiting protrusion (52) in the mounting groove (51) of the box body (1) through the snap-fit ​​groove a (33).

4. The vacuum chamber sealing structure of a magnetron sputtering coating machine according to claim 1, characterized in that: The upper sealing element (4) includes a sealing body b (41). One side of the sealing body b (41) is provided with a plugging protrusion (44) that is adapted to the plugging groove (32), and the other side is provided with a snap-fit ​​groove b (42). The sealing body b (41) is engaged and fixed with the limiting protrusion (52) in the mounting groove (51) of the cover (2) through the snap-fit ​​groove b (42).

5. The vacuum chamber sealing structure of a magnetron sputtering coating machine according to claim 4, characterized in that: The sealing body b (41) is also provided with a sealing groove (43) on the side near the insertion protrusion (44). When the box body (1) and the box cover (2) are closed, the insertion groove (32) of the lower sealing member (3) is spliced ​​with the insertion protrusion (44) of the upper sealing member (4), and the sealing body a (31) is pressed and adhered to the inner wall of the sealing groove (43).

6. The vacuum chamber sealing structure of a magnetron sputtering coating machine according to claim 2, characterized in that: The mounting groove (51) is provided around the top edge of the box body (1) and the bottom edge of the box cover (2). The cross-section of the mounting groove (51) is "U" shaped and the surface is set as an arc surface.

7. The vacuum chamber sealing structure of a magnetron sputtering coating machine according to claim 3, characterized in that: Both the sealing body a (31) and the sealing body b (41) are made of fluororubber.

8. The vacuum chamber sealing structure of a magnetron sputtering coating machine according to claim 5, characterized in that: The cross-section of the sealing groove (43) is trapezoidal, and the width of the bottom of the sealing groove (43) is adapted to the width of the sealing body a (31).

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