A filling device for dichlorosilane

Abstract

The utility model relates to material filling technology field, and specifically is a kind of dichlorosilane filling device, including storage tank, compressor and first gas pipe, and the both ends of first gas pipe are connected with compressor and storage tank respectively, and the compressor is communicated with storage tank, and filling pipe is provided on first gas pipe, and the side end portion of filling pipe is fixedly provided with protective cover, and one-way valve and suction pipe are provided on protective cover, and electronic valve is provided on filling pipe, and suction pipe side end portion is provided with air pump, and the side of air pump is provided with second gas pipe, and the safe recovery of residual gas is realized.

Description

Technical Field

[0001] This utility model relates to the field of material filling technology, and more specifically, to a filling device for dichlorosilane. Background Technology

[0002] The dichlorosilane filling device is a high-safety precision equipment specifically designed for dichlorosilane, a special gas that is highly toxic, flammable, explosive, and reacts violently with water. Through multi-layered mechanical structures and automated control methods, the device achieves full sealing, real-time monitoring, and precise control of the filling process, effectively isolating air and moisture, preventing leakage, hydrolysis, and decomposition risks, ensuring operational safety, stable product quality, and long-term reliable system operation. It is an indispensable key process equipment in the manufacturing of high-purity materials such as semiconductors and photovoltaics.

[0003] For example, Chinese Patent Publication No. CN201922180710.8 discloses a dichlorosilane filling device, comprising a storage tank, a compressor, several filling components, a gas supply pipe, a filling assembly, and a vacuum assembly. The gas supply pipe is connected to the compressor and the storage tank at both ends, and valves are installed at both ends. The compressor is connected to the storage tank. The filling assembly includes a filling pipe and a filling head fixed to one end of the filling pipe. The filling pipe is connected to the gas supply pipe and is equipped with an electric valve and a flow meter. The vacuum assembly is located between the compressor and the filling assembly. The vacuum assembly includes a vacuum pipe and a vacuum pump. The vacuum pipe is connected to the vacuum pump and the gas supply pipe at both ends, and valves are installed on the vacuum pipe. The advantages of this invention are: precise filling, high degree of automation, stable filling, and reduced waste of dichlorosilane during filling.

[0004] However, the above technical solution focuses on vacuuming the main gas pipeline. Its vacuuming component is located on the gas pipeline between the compressor and the filling component. It is difficult to effectively extract the dangerous residual gas left in the space between the filling head and the container filling port after the filling operation is completed. This residual gas is easy to escape into the atmosphere when the interface is unplugged after filling, which not only causes material loss, but also brings environmental pollution and safety risks. Utility Model Content

[0005] The main objective of this invention is to provide a filling device for dichlorosilane, which can effectively solve the problem in the prior art that focuses on vacuuming the main gas pipeline. The gas extraction component is located on the gas pipeline between the compressor and the filling component. It is difficult to effectively extract the dangerous residual gas left in the space between the filling head and the container filling port after the filling operation is completed. This residual gas is easy to escape into the atmosphere when the interface is unplugged after filling, which not only causes material loss, but also brings environmental pollution and safety risks.

[0006] To achieve the above objectives, the technical solution adopted by this utility model is as follows: a filling device for dichlorosilane, comprising a storage tank, a compressor, and a first gas supply pipe. The two ends of the first gas supply pipe are respectively connected to the compressor and the storage tank. The compressor is connected to the storage tank. A filling pipe is provided on the first gas supply pipe. A protective cover is fixedly provided on one end of the filling pipe. A one-way valve and a suction pipe are provided on the protective cover. An electronic valve is provided on the filling pipe. An air pump is provided on one end of the suction pipe. A second gas supply pipe is provided on one side of the air pump. When filling stops, the air pump extracts dichlorosilane from the protective cover through the suction pipe. The one-way valve allows one-way air intake during the extraction process. The air pump delivers the dichlorosilane to a designated processing device through the second gas supply pipe.

[0007] Preferably, the electronic valve is electrically connected to the air pump.

[0008] Preferably, the air intake direction of the one-way valve is from the outside of the protective cover to the inside.

[0009] Preferably, the one-way valve includes a one-way valve base, a first groove is provided on the one-way valve base, an air inlet and an air outlet are respectively provided on both sides of the first groove, a stop post is provided in the first groove, a second groove is provided on the stop post, a spring is fixedly provided in the second groove, and two guide pins are slidably provided on the side of the stop post near the air outlet.

[0010] Preferably, the one-way valve base is fixedly mounted on the protective cover, and the radius of the first groove is larger than the radius of the air inlet and the air outlet.

[0011] Preferably, the radius of the abutment is larger than the radius of the air inlet, and the spring and the guide slide are both fixedly installed in the first groove.

[0012] Compared with the prior art, the present invention has the following beneficial effects:

[0013] (1) When the present invention is filled, the protective cover is sealed and connected with the filling port, the electronic valve is opened, the compressor fills the pressurized dichlorosilane in the storage tank through the first gas supply pipe and the filling pipe, and the gas pump is on standby; when filling is stopped, the electronic valve is closed and the gas pump is started, and the residual gas in the protective cover is extracted through the gas extraction pipe. At this time, the one-way valve replenishes gas in one direction to maintain negative pressure, and finally the gas pump delivers the gas to the processing equipment through the second gas supply pipe to achieve safe recovery. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the structure of a filling device for dichlorosilane according to the present invention;

[0015] Figure 2This is a schematic diagram of the internal structure of a filling device for dichlorosilane according to the present invention;

[0016] Figure 3 This is a schematic diagram of the one-way valve in a dichlorosilane filling device according to the present invention.

[0017] In the diagram: 1. Storage tank; 2. Compressor; 3. First gas supply pipe; 4. Filling pipe; 5. Protective cover; 6. One-way valve; 601. One-way valve base; 602. First groove; 603. Air inlet; 604. Air outlet; 605. Support column; 606. Second groove; 607. Spring; 608. Guide slide; 7. Suction pipe; 8. Electronic valve; 9. Air pump; 10. Second gas supply pipe. Detailed Implementation

[0018] The technical solutions of this utility model will be clearly and completely described below with reference to the embodiments of this utility model. Obviously, the described embodiments are only some embodiments of this utility model, and not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of this utility model.

[0019] like Figure 1 and Figure 2 As shown, a dichlorosilane filling device includes a storage tank 1, a compressor 2, and a first gas supply pipe 3. The two ends of the first gas supply pipe 3 are connected to the compressor 2 and the storage tank 1, respectively. The compressor 2 is connected to the storage tank 1. A filling pipe 4 is provided on the first gas supply pipe 3. A protective cover 5 is fixedly installed on one end of the filling pipe 4. A one-way valve 6 and a suction pipe 7 are provided on the protective cover 5. An electronic valve 8 is provided on the filling pipe 4. An air pump 9 is installed on one end of the suction pipe 7. A second gas supply pipe 10 is installed on one side of the air pump 9. When filling stops, the air pump 9 extracts dichlorosilane from the protective cover 5 through the suction pipe 7. The one-way valve 6 allows one-way air intake during extraction. The air pump 9 delivers the dichlorosilane to a designated processing device through the second gas supply pipe 10.

[0020] like Figure 3 As shown, in another embodiment of the present invention, the one-way valve 6 includes a one-way valve base 601, a first groove 602 is provided on the one-way valve base 601, an air inlet 603 and an air outlet 604 are respectively provided on both sides of the first groove 602, a stop post 605 is provided in the first groove 602, a second groove 606 is provided on the stop post 605, a spring 607 is fixedly provided in the second groove 606, and two guide slide posts 608 are slidably provided on the side of the stop post 605 near the air outlet 604;

[0021] When the air pump 9 draws dichlorosilane from the protective cover 5 through the air extraction pipe 7, a negative pressure appears inside the protective cover 5. The air outside the protective cover 5 compresses the abutment 605, causing the abutment 605 to move towards the air outlet 604. The guide slide 608 guides the movement of the abutment 605. The spring 607 deforms, releasing the abutment 605 from the air inlet 603. The air outside the protective cover 5 enters the protective cover 5 through the air inlet 603, the first groove 602, and the air outlet 604, replenishing the gas inside the protective cover 5. During filling, the abutment 605 closes the air inlet 603 to prevent the dichlorosilane inside the protective cover 5 from passing through the air inlet 603 and escaping to the outside of the protective cover 5.

[0022] The working principle of a dichlorosilane filling device:

[0023] During normal filling operations, the protective cover 5 and the filling port of the equipment to be filled form a sealed contact through compression. The electronic valve 8 is opened, and the compressor 2 pressurizes the dichlorosilane gas in the storage tank 1 and fills the equipment to be filled through the first gas supply pipe 3 and the filling pipe 4. At this time, the air pump 9 is in standby mode. When it is necessary to stop filling, the electronic valve 8 is closed first to cut off the main passage, and then the air pump 9 is started. The air pump 9 extracts the residual dichlorosilane gas in the protective cover 5 through the suction pipe 7. During this suction process, a negative pressure is formed inside the protective cover 5, and outside air is drawn into the interior through the one-way valve 6. This one-way valve 6 ensures that the gas can only enter from the outside in one direction, thereby preventing the internal gas from escaping and maintaining the suction efficiency. Finally, the air pump 9 delivers all the extracted gas to the designated recovery or treatment equipment through the second gas supply pipe 10, realizing the safe recovery of residual gas.

[0024] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating the present invention, and are not intended to limit the implementation of the present invention. For those skilled in the art, other variations or modifications can be made based on the above description. It is impossible to exhaustively list all the implementation methods here. All obvious variations or modifications derived from the technical solutions of the present invention are still within the protection scope of the present invention.

Claims

1. A filling device for dichlorosilane, comprising a storage tank (1), a compressor (2), and a first gas delivery pipe (3), characterized in that: The first gas supply pipe (3) is connected to the compressor (2) and the storage tank (1) at both ends respectively. The compressor (2) is connected to the storage tank (1). The first gas supply pipe (3) is provided with a filling pipe (4). A protective cover (5) is fixedly provided on one end of the filling pipe (4). A one-way valve (6) and a suction pipe (7) are provided on the protective cover (5). An electronic valve (8) is provided on the filling pipe (4). An air pump (9) is provided on one end of the suction pipe (7). A second gas supply pipe (10) is provided on one side of the air pump (9). When filling stops, the air pump (9) extracts dichlorosilane from the protective cover (5) through the suction pipe (7). The one-way valve (6) allows one-way air intake during the extraction process. The air pump (9) delivers dichlorosilane to the designated processing equipment through the second gas supply pipe (10).

2. The filling device for dichlorosilane according to claim 1, characterized in that: The electronic valve (8) is electrically connected to the air pump (9).

3. A filling device for dichlorosilane according to claim 2, characterized in that: The air intake direction of the one-way valve (6) is from the outside of the protective cover (5) to the inside.

4. A filling device for dichlorosilane according to claim 3, characterized in that: The one-way valve (6) includes a one-way valve base (601), on which a first groove (602) is provided. An air inlet (603) and an air outlet (604) are respectively provided on both sides of the first groove (602). A stop post (605) is provided in the first groove (602). A second groove (606) is provided on the stop post (605). A spring (607) is fixedly provided in the second groove (606). Two guide slide posts (608) are slidably provided on the side of the stop post (605) near the air outlet (604).

5. A filling device for dichlorosilane according to claim 4, characterized in that: The one-way valve base (601) is fixedly installed on the protective cover (5), and the radius of the first groove (602) is greater than the radius of the air inlet (603) and the air outlet (604).

6. A filling device for dichlorosilane according to claim 5, characterized in that: The radius of the abutment (605) is larger than the radius of the air inlet (603), and the spring (607) and the guide slide (608) are both fixedly installed in the first groove (602).

Images