Fresh air device for semiconductor clean room

Abstract

The utility model relates to a new trend device technical field, and disclose a kind of new trend device for semiconductor clean laboratory, including new trend ventilation box, ventilation flow guide part, filter dismounting replacement part, it is characterized by: the outer wall of the new trend ventilation box is fixedly provided with installation rectangular plate. The utility model is through pre-filtering screen, HEPA filter screen and ULPA filter screen realize accurate positioning by filter screen installation slot and rectangular installation through -opening, cooperate rotating clamping plate and the linkage structure of the circular clamping slot of rectangular plate, rotating clamping plate through -opening, only need to rotate the plate to complete the fixation and unlocking of filter screen, without the aid of tool, completely get rid of the cumbersome operation of traditional bolt fixing mode. This design makes filter screen replacement time shorten from several hours to several minutes, greatly reduce the influence of device shutdown maintenance on laboratory continuous operation, especially applicable to the scene that semiconductor experiment requires extremely high environmental stability.

Description

Technical Field

[0001] This utility model relates to the field of fresh air device technology, specifically a fresh air device for use in semiconductor clean laboratories. Background Technology

[0002] In the operation of semiconductor cleanrooms, the performance of the fresh air system directly affects the cleanliness and stability of the experimental environment. A clean air environment is a crucial prerequisite for ensuring the smooth production and experimentation of precision products such as semiconductor chips. However, existing fresh air systems used in semiconductor cleanrooms have many problems: On the one hand, as a core filtration component, the replacement process for filters is often quite cumbersome. Traditional devices often use complex connection methods such as bolt fixing, requiring multiple tools to replace the filters. This is not only time-consuming but also carries the risk of unfiltered air entering the laboratory due to improper operation, affecting cleanliness. Furthermore, filters of different filtration levels have poor compatibility, making it difficult to flexibly replace them according to actual cleanliness requirements, thus limiting the applicability of the device.

[0003] On the other hand, airflow guidance stability is insufficient. The inlet and outlet air ducts of some devices are poorly designed, easily causing airflow turbulence during fan operation. This results in uneven cleanliness of the filtered fresh air during delivery, failing to meet the stringent requirements of semiconductor cleanrooms for overall air cleanliness. Furthermore, the installation and maintenance efficiency of the devices is low; the installation structure is complex and not easy to fix quickly; the inspection and replacement of internal components during maintenance also consumes a significant amount of manpower and time, affecting the normal operation of the laboratory.

[0004] Therefore, in response to the problems of cumbersome filter replacement, poor adaptability of filtration levels, unstable airflow guidance, and low installation and maintenance efficiency of the aforementioned traditional fresh air devices, there is an urgent need to develop a new type of fresh air device for semiconductor clean laboratories to meet the high standards of clean environment required by the semiconductor industry. Utility Model Content

[0005] The purpose of this invention is to provide a fresh air device for semiconductor clean laboratories, which solves the technical problems of traditional fresh air devices, such as cumbersome filter replacement, poor adaptability of filter levels, unstable airflow leading to insufficient cleanliness, and low installation and maintenance efficiency. It achieves quick filter removal and installation and multi-stage precise filtration, ensuring stable fresh air cleanliness in semiconductor clean laboratories, while improving the ease of installation and maintenance efficiency of the device.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a fresh air device for semiconductor clean laboratories, comprising a fresh air ventilation box, a ventilation guide section, and a filter removal and replacement section, characterized in that: a mounting rectangular plate is fixedly sleeved on the outer wall of the fresh air ventilation box, and mounting positioning holes are equidistantly opened on the mounting rectangular plate; the ventilation guide section is respectively connected to the two outer walls of the fresh air ventilation box; and the filter removal and replacement section is respectively located inside and outside the fresh air ventilation box.

[0007] Preferably, the ventilation guide section specifically includes: an air outlet duct connected to one side of the outer wall of the fresh air ventilation box; an air inlet duct connected to the other side of the outer wall of the fresh air ventilation box; and a filter installation slot, which is circumferentially and equidistantly formed on the outer walls of the air outlet duct and the air inlet duct.

[0008] A filter mounting slot is provided. When used with the filter, the filter can be precisely inserted into the slot. Combined with the matching bolt mounting slot and mounting through hole, the filter can be firmly fixed by bolts, preventing the filter from shaking or shifting due to airflow impact during fan operation, ensuring stable filtration effect, and preventing unfiltered air from seeping in through gaps. Working together with the mounting bracket, fan motor, and fan blades, the filter fixed in the mounting slot effectively filters the air entering the air duct. The filtered air is then transported more smoothly through the air duct by the airflow generated by the fan motor driving the fan blades, reducing the impact of filtration. This device addresses airflow turbulence caused by unstable mesh installation, improving ventilation efficiency. In conjunction with the rectangular mounting opening, rotating shaft, and rotating clamping plate, when replacing the pre-filter, HEPA filter, or ULPA filter, the filter can be pulled out from the rectangular mounting opening via the handle. After replacement, it is inserted into the top filter mounting slot. Rotating the rotating plate allows the rotating clamping plate to pass through the rotating clamping plate opening and engage with the circular clamping slot, achieving rapid filter fixation. This simplifies the filter disassembly and replacement process, saves maintenance time, ensures continuous and efficient operation of the device, and meets the stringent air quality requirements of semiconductor cleanrooms.

[0009] Preferably, the inner wall of the filter installation groove is provided with a bolt installation groove, and both the air outlet duct and the air inlet duct are provided with filter screens. The filter screen is provided with mounting through holes at equal intervals around its circumference, and the mounting through holes are adapted to the bolt installation groove.

[0010] Preferably, a mounting bracket is fixedly installed on the inner wall of both the air outlet duct and the air inlet duct, and a fan mounting bracket is fixedly installed on the outer wall of the mounting bracket. A fan motor is fixedly installed between the fan mounting bracket and the mounting bracket. The output end of the fan motor movably passes through one side of the outer wall of the mounting bracket and extends to the other side of the outer wall of the mounting bracket. A fan blade is fixedly connected to the output end of the fan motor.

[0011] Preferably, the filter disassembly and replacement part specifically includes: a filter screen mounting groove 2, which is equidistantly located on the top of the inner wall of the fresh air ventilation box; a rectangular mounting opening, which is equidistantly located on the bottom outer wall of the fresh air ventilation box; and a rotating shaft, which is symmetrically rotated and installed on the bottom outer wall of the fresh air ventilation box.

[0012] Preferably, a pre-filter, a HEPA filter, and a ULPA filter are respectively fitted inside the filter mounting slot 2, and the other ends of the pre-filter, HEPA filter, and ULPA filter extend to the bottom outer wall of the fresh air ventilation box through a rectangular mounting opening.

[0013] Equipped with a pre-filter, HEPA filter, and ULPA filter, these three elements precisely engage with the filter mounting slot, forming a stable multi-layered filtration structure. From pre-filtering large particles to the HEPA filter filtering fine particles, and finally the ULPA filter filtering ultrafine dust, the filtration effect is progressively enhanced, meeting the stringent air cleanliness requirements of semiconductor cleanrooms and effectively preventing contaminants of varying particle sizes from entering the laboratory. Combined with the rectangular mounting opening, rectangular plate, and handle, when filter replacement is needed, all three elements, along with the rectangular plate, can be easily pulled out of the rectangular mounting opening using the handle. This convenient and effortless operation eliminates the need for complex tools. For installation, simply align them with the filter mounting slot for quick insertion, minimizing downtime and ensuring a continuous supply of fresh air to the laboratory. In conjunction with the rotating shaft, rotating clamping plate, rotating plate, circular clamping groove, and rotating clamping plate opening, after the filter screen is installed in place, rotating the rotating plate drives the rotating clamping plate through the rotating clamping plate opening and into the circular clamping groove, which can firmly fix the filter screen and prevent the airflow generated during the operation of the fan from causing the filter screen to loosen or shift, ensuring a stable and reliable filtration process. At the same time, it prevents unfiltered air from leaking from the gaps and ensures the quality of the filtered air.

[0014] Preferably, a rectangular plate is fixedly installed at the other end of the pre-filter, HEPA filter, and ULPA filter. A rotating plate is fixedly installed on the rotating shaft. A rotating plate is fixedly installed on the top outer wall of the rotating plate. Circular slots are symmetrically opened on the rectangular plate. A rotating plate opening is opened on the inner wall of the circular slot. The rotating plate opening is adapted to the rotating plate. A handle is fixedly installed on the outer wall of the rectangular plate.

[0015] A rotating clamp is incorporated, engaging with the circular slot and rotating clamp opening on the rectangular plate. Rotating the rotating plate allows for quick and easy fixing and unlocking of the pre-filter, HEPA filter, and ULPA filter. Compared to traditional bolt fixing, no tools are required, significantly simplifying filter disassembly and replacement and saving maintenance time. When working in conjunction with the rectangular mounting opening, the rotating clamp securely holds the filter within the opening, preventing it from shaking or shifting under the airflow generated by the fan motor, ensuring stable filtration and guaranteeing that the incoming air to the semiconductor cleanroom always meets cleanliness requirements. Furthermore, the rotating clamp's design improves the seal after filter installation, reducing the possibility of unfiltered air seeping in through the gap between the filter and the mounting opening, further enhancing the reliability of the filtration system and meeting the stringent requirements of high-cleanliness environments in laboratories. This design also facilitates visual inspection of the filter's installation status; simply observing the position of the rotating clamp indicates whether the filter is properly installed, reducing the probability of operational errors.

[0016] This invention provides a fresh air system for use in semiconductor clean laboratories. It offers the following advantages: (1) This utility model uses a fan motor to drive the fan blades to rotate and generate power, so that the airflow flows in an orderly manner in the air inlet and air outlet ducts. The fixed frame provides stable support for the fan motor and avoids the vibration during operation from affecting the stability of the airflow. The structural design of the duct reduces the airflow resistance, so that fresh air can smoothly enter the device for treatment and then be evenly delivered to all parts of the laboratory through the air outlet duct. This avoids the fluctuation of cleanliness caused by local airflow turbulence or uneven wind speed and ensures the consistency of the laboratory environment.

[0017] (2) This utility model achieves precise positioning of the pre-filter, HEPA filter, and ULPA filter through the filter mounting groove and rectangular mounting port. Combined with the linkage structure of the rotating plate and the circular groove on the rectangular plate, as well as the rotating plate port, the filter can be fixed and unlocked simply by rotating the rotating plate, without the need for tools, completely eliminating the cumbersome operation of traditional bolt fixing. This design reduces filter replacement time from several hours to a few minutes, greatly reducing the impact of equipment downtime maintenance on continuous laboratory operation, and is especially suitable for semiconductor experiments where environmental stability requirements are extremely high. Attached Figure Description

[0018] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a partial view of the ventilation guide section of this utility model; Figure 3 This is a partial view of the filter disassembly and replacement part of this utility model; Figure 4 This is a partial view of the circular slot of this utility model.

[0019] In the diagram: 1 Fresh air ventilation box, 2 Rectangular mounting plate, 3 Ventilation guide section, 311 Air outlet duct, 312 Air inlet duct, 313 Filter mounting slot one, 314 Filter, 315 Mounting through hole, 316 Fixing bracket, 317 Fan blade, 318 Fan motor, 4 Filter disassembly and replacement section, 411 Filter mounting slot two, 412 Rectangular mounting opening, 413 ULPA filter, 414 HEPA filter, 415 Pre-filter, 416 Rotating shaft, 417 Rotating clamp, 418 Rotating plate, 419 Rectangular plate, 4111 Circular slot, 4112 Rotating clamp opening. Detailed Implementation

[0020] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0021] Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, and should not be construed as limiting the present invention.

[0022] Example 1: Addressing the problems of cumbersome filter replacement, poor filtration layer compatibility, unstable airflow leading to insufficient cleanliness, and low installation and maintenance efficiency in traditional fresh air systems, this invention provides a preferred embodiment of a fresh air system for semiconductor clean laboratories, for example... Figure 1-4 As shown: A fresh air device for semiconductor cleanroom laboratories includes a fresh air ventilation box 1, a ventilation guide section 3, and a filter removal and replacement section 4. A mounting rectangular plate 2 is fixedly fitted on the outer wall of the fresh air ventilation box 1, and mounting positioning holes are equally spaced on the mounting rectangular plate 2. The ventilation guide section 3 is respectively connected to the outer walls of both sides of the fresh air ventilation box 1. The filter removal and replacement section 4 is respectively located inside and outside the fresh air ventilation box 1.

[0023] The ventilation guide section 3 specifically includes: an air outlet duct 311, which is connected to one side of the outer wall of the fresh air ventilation box 1; an air inlet duct 312, which is connected to the other side of the outer wall of the fresh air ventilation box 1; and a filter installation groove 313, which is circumferentially and equidistantly opened on the outer walls of the air outlet duct 311 and the air inlet duct 312.

[0024] The inner wall of the filter installation groove 313 is provided with a bolt installation groove. The air outlet duct 311 and the air inlet duct 312 are both provided with filter screens 314. The filter screens 314 are provided with mounting through holes 315 at equal intervals around their circumference, and the mounting through holes 315 are adapted to the bolt installation grooves.

[0025] Both the air outlet duct 311 and the air inlet duct 312 are fixedly installed with a mounting bracket 316. A fan mounting bracket is fixedly installed on the outer wall of the mounting bracket 316. A fan motor 318 is fixedly installed between the fan mounting bracket and the mounting bracket 316. The output end of the fan motor 318 movably passes through one side of the outer wall of the mounting bracket 316 and extends to the other side of the outer wall of the mounting bracket 316. A fan blade 317 is fixedly connected to the output end of the fan motor 318.

[0026] In this embodiment, filter screen 314 is placed into the outlet air duct 311 and the inlet air duct 312, respectively, so that the edge of filter screen 314 is aligned with the filter screen mounting groove 313. The mounting through hole 315 on filter screen 314 is aligned with the bolt mounting groove on the inner wall of the filter screen mounting groove 313, and the filter screen 314 is fixed in the air duct with bolts, completing the primary filtration preparation at the inlet and outlet ends, so that the airflow flows in an orderly manner in the inlet and outlet air ducts. The fixing frame provides stable support for the fan motor, avoiding the impact of vibration during operation on the stability of airflow. The structural design of the air duct reduces airflow resistance, allowing fresh air to smoothly enter the device for treatment, and then be evenly delivered to all parts of the laboratory through the outlet air duct, avoiding fluctuations in cleanliness caused by local airflow turbulence or uneven wind speed, and ensuring the consistency of the laboratory environment.

[0027] Example 2: Based on Embodiment 1, a preferred embodiment of the fresh air device for a semiconductor cleanroom provided by this utility model is, for example... Figure 1-4 As shown: The filter disassembly and replacement part 4 specifically includes: filter screen installation groove 411, which is equidistantly opened on the top of the inner wall of the fresh air ventilation box 1; rectangular installation opening 412, which is equidistantly opened on the bottom outer wall of the fresh air ventilation box 1; and rotating shaft 416, which is symmetrically rotated and installed on the bottom outer wall of the fresh air ventilation box 1.

[0028] Inside the filter installation slot 411, a pre-filter 415, a HEPA filter 414, and a ULPA filter 413 are respectively fitted and installed. The other ends of the pre-filter 415, HEPA filter 414, and ULPA filter 413 extend to the bottom outer wall of the fresh air ventilation box 1 through a rectangular installation opening 412.

[0029] A rectangular plate 419 is fixedly installed at the other end of the pre-filter 415, HEPA filter 414 and ULPA filter 413. A rotating plate 417 is fixedly installed on the rotating shaft 416. A rotating plate 418 is fixedly installed on the top outer wall of the rotating plate 417. Circular slots 4111 are symmetrically opened on the rectangular plate 419. A rotating plate opening 4112 is opened on the inner wall of the circular slot 4111. The rotating plate opening 4112 is adapted to the rotating plate 417. A handle is fixedly installed on the outer wall of the rectangular plate 419.

[0030] In this embodiment, by holding the handle on the rectangular plate 419, the pre-filter 415, HEPA filter 414, and ULPA filter 413 are inserted into the fresh air ventilation box 1 through the rectangular mounting opening 412, respectively, so that the top of the filter is engaged in the corresponding filter mounting slot 411. Rotating the rotating plate 418 drives the rotating locking plate 417 on the rotating shaft 416 to rotate, so that the rotating locking plate 417 passes through the rotating locking plate opening 4112 on the rectangular plate 419 and enters the circular locking slot 4111. After rotating to a position perpendicular to the opening, it is locked, ensuring that the filter is securely installed. With the linkage structure of the rotating locking plate, the circular locking slot on the rectangular plate, and the rotating locking plate opening, the filter can be fixed and unlocked simply by rotating the rotating plate, without the need for tools, completely eliminating the cumbersome operation of the traditional bolt fixing method. This design reduces the filter replacement time from several hours to a few minutes, greatly reducing the impact of equipment downtime maintenance on the continuous operation of the laboratory, and is especially suitable for semiconductor experiments with extremely high environmental stability requirements.

[0031] Working principle: Step 1: Fix the entire device to the preset position, such as the laboratory ceiling or wall bracket, through the mounting rectangular plate 2 on the outer wall of the fresh air ventilation box 1. Use the mounting positioning holes on the mounting rectangular plate 2 and bolts to tighten the device, ensuring that the device is installed stably and without shaking.

[0032] Step 2: Place the filter screen 314 into the outlet air duct 311 and the inlet air duct 312 respectively, aligning the edge of the filter screen 314 with the filter screen mounting groove 313; align the mounting through hole 315 on the filter screen 314 with the bolt mounting groove on the inner wall of the filter screen mounting groove 313, and fix the filter screen 314 in the air duct with bolts to complete the primary filtration preparation at the inlet and outlet ends.

[0033] Step 3: Hold the handle on the rectangular plate 419 and insert the pre-filter 415, HEPA filter 414, and ULPA filter 413 into the fresh air ventilation box 1 through the rectangular mounting opening 412, so that the top of the filter is engaged in the corresponding filter mounting slot 411; rotate the rotating plate 418 to drive the rotating plate 417 on the rotating shaft 416 to rotate, so that the rotating plate 417 passes through the rotating plate opening 4112 on the rectangular plate 419 and enters the circular slot 4111. After rotating to a position perpendicular to the opening, lock it in place to ensure that the filter is securely installed.

[0034] Step 4: After checking that all components are installed in place, start the fan motor 318 of the ventilation guide section. The fan motor 318 drives the fan blades 317 to rotate, allowing outside air to enter through the air inlet duct 312. The air is first initially filtered by the filter 314 in the air inlet duct 312, and then enters the fresh air ventilation box 1, where it undergoes multi-stage deep filtration through the pre-filter 415, HEPA filter 414, and ULPA filter 413. The filtered clean air is then filtered again by the filter 314 in the air outlet duct 311 and delivered to the semiconductor cleanroom to complete the fresh air supply.

[0035] Step 5: When the filter 314 of the ventilation guide needs to be replaced, remove the fixing bolts on the air outlet duct 311 and the air inlet duct 312, take out the old filter 314, and install the new filter as in Step 2; when the filter of the filter removal and replacement section needs to be replaced, rotate the rotating plate 418 in the opposite direction to make the rotating plate 417 exit from the circular slot 4111, hold the handle and pull out the pre-filter 415, HEPA filter 414 or ULPA filter 413 through the rectangular installation port 412, install the new filter as in Step 3, and restart the device after the replacement is completed.

[0036] Finally, it should be noted that the above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Although the utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art can still modify the technical solutions described in the foregoing embodiments or make equivalent substitutions for some of the technical features. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A fresh air system for use in a semiconductor cleanroom, comprising a fresh air ventilation box (1), a ventilation guide section (3), and a filter removal and replacement section (4), characterized in that: The outer wall of the fresh air ventilation box (1) is fixedly fitted with a rectangular mounting plate (2), and the rectangular mounting plate (2) is provided with mounting positioning holes at equal intervals; the ventilation guide (3) is respectively connected to the outer walls of both sides of the fresh air ventilation box (1); the filter disassembly and replacement part (4) is respectively located inside and outside the fresh air ventilation box (1).

2. A fresh air system for a semiconductor cleanroom laboratory according to claim 1, characterized in that: The ventilation guide section (3) specifically includes: An air outlet duct (311) is connected to the outer wall of one side of the fresh air ventilation box (1); An air inlet duct (312) is connected to the outer wall of the other side of the fresh air ventilation box (1); The filter installation slots (313) are equidistantly spaced on the outer walls of the air outlet duct (311) and the air inlet duct (312).

3. A fresh air system for a semiconductor cleanroom laboratory according to claim 2, characterized in that: The inner wall of the filter installation groove (313) is provided with a bolt installation groove. The air outlet duct (311) and the air inlet duct (312) are both provided with filter screens (314). The filter screen (314) is provided with mounting through holes (315) at equal intervals around its circumference. The mounting through holes (315) are adapted to the bolt installation groove.

4. A fresh air system for a semiconductor cleanroom laboratory according to claim 3, characterized in that: The inner walls of the air outlet duct (311) and the air inlet duct (312) are both fixedly installed with a mounting bracket (316). The outer wall of the mounting bracket (316) is fixedly installed with a fan mounting bracket. A fan motor (318) is fixedly installed between the fan mounting bracket and the mounting bracket (316). The output end of the fan motor (318) movably passes through one side of the outer wall of the mounting bracket (316) and extends to the other side of the outer wall of the mounting bracket (316). The output end of the fan motor (318) is fixedly connected with a fan blade (317).

5. A fresh air system for a semiconductor cleanroom laboratory according to claim 1, characterized in that: The filter disassembly and replacement unit (4) specifically includes: The filter installation slot 2 (411) is equidistantly located on the top of the inner wall of the fresh air ventilation box (1); A rectangular mounting opening (412) is equidistantly located on the bottom outer wall of the fresh air ventilation box (1); The rotating shaft (416) is symmetrically rotated and installed on the bottom outer wall of the fresh air ventilation box (1).

6. A fresh air system for a semiconductor cleanroom laboratory according to claim 5, characterized in that: The filter installation slot 2 (411) is respectively fitted with a pre-filter (415), a HEPA filter (414) and a ULPA filter (413). The other ends of the pre-filter (415), HEPA filter (414) and ULPA filter (413) extend to the bottom outer wall of the fresh air ventilation box (1) through a rectangular installation opening (412).

7. A fresh air system for a semiconductor cleanroom laboratory according to claim 6, characterized in that: A rectangular plate (419) is fixedly installed at the other end of the pre-filter (415), HEPA filter (414) and ULPA filter (413). A rotating plate (417) is fixedly installed on the rotating shaft (416). A rotating plate (418) is fixedly installed on the top outer wall of the rotating plate (417). A circular slot (4111) is symmetrically opened on the rectangular plate (419). A rotating plate opening (4112) is opened on the inner wall of the circular slot (4111). The rotating plate opening (4112) is adapted to the rotating plate (417). A handle is fixedly installed on the outer wall of the rectangular plate (419).

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