A new air device for semiconductor workshop

Abstract

The utility model relates to a kind of new air device for semiconductor workshop, belong to production workshop technical field.The new air device for semiconductor workshop, comprising: fan, the upper end of the fan is connected with fresh air pipe;Control mechanism, the control mechanism is installed in the end of fresh air pipe away from fan;Wherein, the control mechanism includes the connecting frame installed in the end of fresh air pipe away from fan, one side of the connecting frame is equipped with side hole, the inside of the side hole is provided with control component;Horizontal movement is carried out through cross bar, drive collar to follow synchronous movement, and then offset is carried out through collar with vertical rod, wherein, due to the effect of crankshaft when vertical rod is offset, vertical rod carries out arc motion, and then angle offset is carried out to air deflector with vertical rod, form good guiding effect to fresh air, so that airflow blows to workshop interior, swing adjustment blows direction, reduce the situation that workshop interior dust accumulates occurs.

Description

Technical Field

[0001] This utility model relates to the field of production workshop technology, and in particular to a fresh air device for semiconductor workshops. Background Technology

[0002] Semiconductor workshops, also known as cleanrooms, are the core areas of chip manufacturing. Their design must meet the requirements of an ultra-clean environment and precise process control. This includes the installation of process piping such as special gas cabinets, vacuum tubes, air conditioning units, and exhaust gas treatment systems to provide raw materials and energy support for the manufacturing process. Fan filter units (FFUs) and high-efficiency filters are installed, and a circulating air supply system maintains cleanliness. Raised floors are used for return air. A search of existing Chinese patent technology, "A Fresh Air Device for Cleanrooms", with publication number "CN223258328U", revealed that adjusting the fan direction of this device may cause dust on the inside of the filter plate to be blown into the room, affecting the indoor environment. This device achieves the beneficial effect of preventing dust from being blown into the room and affecting the indoor environment. However, the airflow of this device blows into the workshop, and because the blowing direction is fixed for a long time, dust may easily accumulate in specific areas inside the workshop. Utility Model Content

[0003] Therefore, it is necessary to provide a fresh air device for semiconductor workshops to address the problem that dust may easily accumulate in specific areas due to the fixed blowing direction of airflow into the workshop.

[0004] A fresh air device for a semiconductor workshop is provided, comprising: a fan, the upper end of which is connected to a fresh air duct; and a control mechanism installed at the end of the fresh air duct away from the fan. The control mechanism includes a connecting frame installed at the end of the fresh air duct away from the fan, a side hole on one side of the connecting frame, a control component disposed inside the side hole, the surface of the control component extending to the outside of the connecting frame, and multiple air guide components mounted on the surface of the control component.

[0005] In one embodiment, the air guide assembly includes a vertical rod disposed inside the connecting frame, the end of the vertical rod being fixedly connected to a crankshaft, the crankshaft being rotatably connected to the inner wall of the connecting frame, the longitudinal section of the crankshaft being L-shaped, and an air guide plate being fixedly connected to the surface of the vertical rod.

[0006] In one embodiment, the control component includes two connecting frames disposed inside the connecting frame, a plurality of horizontal sleeves disposed between the two connecting frames, connecting blocks fixedly connected to the surfaces of adjacent horizontal sleeves, and a threaded rod rotatably connected to the inner wall of one side of the connecting frame.

[0007] In one embodiment, the surface of the air guide plate away from the vertical rod extends to the outside of the connecting frame, and the surface of the air guide plate near the vertical rod has two slots.

[0008] In one embodiment, a slide rod is internally connected to the other end of the connecting frame, with the end of the slide rod away from the threaded sleeve extending to the outside of the connecting frame.

[0009] In one embodiment, a collar is provided inside the slot, and the collar is fitted onto the surface of the vertical rod.

[0010] In one embodiment, a crossbar is fixedly connected to the surface of the collar, and the crossbar is located on the side of the collar closer to the fresh air duct.

[0011] In one embodiment, the surface of the threaded rod is threadedly connected to a threaded sleeve, which is fixedly connected to the inner wall of the side hole.

[0012] Beneficial effects 1. The above-mentioned fresh air device for semiconductor workshops moves horizontally through a horizontal bar, which drives the collar to move synchronously. The collar then drives the vertical bar to shift. When the vertical bar shifts, the crankshaft causes the vertical bar to move in an arc shape, which in turn drives the air guide plate to shift its angle, thus creating a good guiding effect for the fresh air. This allows the airflow to blow into the workshop and adjusts the blowing direction by swinging, reducing the accumulation of dust inside the workshop. 2. The device, through the air guide component, can rotate the threaded rod and engage the threaded sleeve to move horizontally against the connecting frame, causing multiple horizontal sleeves and connecting blocks to move synchronously. The sliding rod can assist the horizontal sleeves in moving synchronously, and the movement of the horizontal sleeves drives the crossbar to move synchronously, thus achieving the control effect. Attached Figure Description

[0013] To more clearly illustrate the technical solutions in this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are some embodiments of this utility model. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0014] Figure 1 This is a schematic diagram of the structure of this utility model; Figure 2 This is a schematic diagram of the control mechanism structure of this utility model; Figure 3 A schematic diagram showing the side hole of this utility model; Figure 4This is an exploded structural diagram of the air guide component of this utility model; Figure 5 This is a schematic diagram of the exploded structure of the control component of this utility model.

[0015] Figure label: 1. Fan; 2. Fresh air duct; 3. Control mechanism; 31. Connecting frame; 311. Side hole; 32. Air guide assembly; 321. Vertical rod; 322. Air guide plate; 323. Crankshaft; 324. Groove; 325. Collar; 326. Horizontal rod; 33. Control assembly; 331. Threaded sleeve; 332. Threaded rod; 333. Connecting bracket; 334. Horizontal sleeve; 335. Connecting block; 336. Slide rod. Detailed Implementation

[0016] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some, not all, of the embodiments of this utility model. All other embodiments obtained by those skilled in the art based on the embodiments of this utility model without creative effort are within the scope of protection of this utility model.

[0017] The following is combined with Figures 1-5 This invention describes a fresh air system for a semiconductor workshop.

[0018] In one embodiment, a fresh air device for a semiconductor workshop includes: a fan 1, with a fresh air duct 2 connected to the upper end of the fan 1; and a control mechanism 3, which is installed at the end of the fresh air duct 2 away from the fan 1. The control mechanism 3 includes a connecting frame 31 installed at the end of the fresh air duct 2 away from the fan 1. A side hole 311 is provided on one side of the connecting frame 31. A control component 33 is disposed inside the side hole 311. The surface of the control component 33 extends to the outside of the connecting frame 31. A plurality of air guide components 32 are installed on the surface of the control component 33. like Figure 1-4 As shown, the air guide assembly 32 includes a vertical rod 321 disposed inside the connecting frame 31. A crankshaft 323 is fixedly connected to the end of the vertical rod 321. The crankshaft 323 is rotatably connected to the inner wall of the connecting frame 31. The longitudinal section of the crankshaft 323 is L-shaped. An air guide plate 322 is fixedly connected to the surface of the vertical rod 321. The surface of the air guide plate 322 away from the vertical rod 321 extends to the outside of the connecting frame 31. Two slots 324 are opened on the surface of the air guide plate 322 near the vertical rod 321. A collar 325 is provided inside the slot 324. The collar 325 is fitted onto the surface of the vertical rod 321. A horizontal rod 326 is fixedly connected to the surface of the collar 325. The horizontal rod 326 is located on the side of the collar 325 near the fresh air duct 2. In this embodiment, the device moves horizontally via the crossbar 326, causing the collar 325 to move synchronously. The collar 325 then causes the vertical bar 321 to shift. When the vertical bar 321 shifts, the crankshaft 323 causes the vertical bar 321 to move in an arc shape. This causes the air guide plate 322 to shift at an angle, thus providing a good guiding effect for the fresh air. like Figure 2 , Figure 3 and Figure 5 As shown, the control component 33 includes two connecting frames 333 disposed inside the connecting frame 31. Multiple horizontal sleeves 334 are disposed between the two connecting frames 333. Connecting blocks 335 are fixedly connected to the surfaces of adjacent horizontal sleeves 334. A threaded rod 332 is rotatably connected to the inner wall of one connecting frame 333. A sliding rod 336 is connected to the interior of the other connecting frame 333. The end of the sliding rod 336 away from the threaded sleeve 331 extends through to the outside of the connecting frame 31. The threaded sleeve 331 is threadedly connected to the surface of the threaded rod 332. The threaded sleeve 331 is fixedly connected to the inner wall of the side hole 311. In this embodiment, the device uses a rotating threaded rod 332, which, in conjunction with the threaded sleeve 331, abuts against the connecting frame 333 to move horizontally, causing multiple horizontal sleeves 334 and connecting blocks 335 to move synchronously. The sliding rod 336 can assist the horizontal sleeves 334 to move synchronously, and the movement of the horizontal sleeves 334 drives the crossbar 326 to move synchronously to achieve the control effect.

[0019] Working principle: The threaded rod 332 is rotated manually, which in turn moves horizontally against the connecting frame 333 in conjunction with the threaded sleeve 331. Multiple horizontal sleeves 334 and connecting blocks 335 move synchronously. The slide rod 336 assists the horizontal sleeves 334 in moving synchronously. The movement of the horizontal sleeves 334 drives the horizontal rod 326 to move synchronously. The horizontal movement of the horizontal rod 326 drives the collar 325 to move synchronously. The collar 325 drives the vertical rod 321 to deflect. When the vertical rod 321 deflects, the crankshaft 323 causes the vertical rod 321 to move in an arc. The vertical rod 321 drives the air guide plate 322 to deflect at an angle.

[0020] It should be noted that the fan 1 and other components mentioned above are all devices with relatively mature existing technologies. The specific model can be selected according to actual needs. At the same time, the fan 1 can be powered by the built-in power supply or by the mains power. The specific power supply method can be selected according to the situation, which will not be elaborated here.

[0021] The above embodiments are only used to illustrate the technical solutions of this utility model, and are not intended to limit it. Although this utility model has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some of the technical features. Such modifications or substitutions will not cause the essence of the corresponding technical solutions to deviate from the spirit and scope of the technical solutions of the embodiments of this utility model.

Claims

1. A fresh air system for a semiconductor workshop, characterized in that, include: Fan (1), the upper end of which is connected to fresh air duct (2); Control mechanism (3), said control mechanism (3) is installed at the end of the fresh air duct (2) away from the fan (1); The control mechanism (3) includes a connecting frame (31) installed at the end of the fresh air duct (2) away from the fan (1). A side hole (311) is provided on one side of the connecting frame (31). A control component (33) is provided inside the side hole (311). The surface of the control component (33) extends to the outside of the connecting frame (31). Multiple air guide components (32) are installed on the surface of the control component (33).

2. The fresh air system for semiconductor workshops according to claim 1, characterized in that, The air guide assembly (32) includes a vertical rod (321) disposed inside the connecting frame (31). A crankshaft (323) is fixedly connected to the end of the vertical rod (321). The crankshaft (323) is rotatably connected to the inner wall of the connecting frame (31). The longitudinal section of the crankshaft (323) is L-shaped. An air guide plate (322) is fixedly connected to the surface of the vertical rod (321).

3. The fresh air system for semiconductor workshops according to claim 1, characterized in that, The control component (33) includes two connecting frames (333) disposed inside the connecting frame (31), and multiple horizontal sleeves (334) are disposed between the two connecting frames (333). Connecting blocks (335) are fixedly connected to the surfaces of adjacent horizontal sleeves (334), and threaded rods (332) are rotatably connected to the inner wall of one side of the connecting frame (333).

4. The fresh air system for a semiconductor workshop according to claim 2, characterized in that, The air guide plate (322) extends from the surface away from the vertical rod (321) to the outside of the connecting frame (31), and the air guide plate (322) has two slots (324) on the surface near the vertical rod (321).

5. The fresh air system for a semiconductor workshop according to claim 3, characterized in that, The connecting frame (333) at the other end is internally connected to a slide rod (336), the end of the slide rod (336) away from the threaded sleeve (331) extending to the outside of the connecting frame (31).

6. The fresh air system for a semiconductor workshop according to claim 4, characterized in that, The groove (324) is provided with a collar (325) inside, and the collar (325) is fitted onto the surface of the vertical rod (321).

7. The fresh air system for a semiconductor workshop according to claim 6, characterized in that, A crossbar (326) is fixedly connected to the surface of the collar (325), and the crossbar (326) is located on the side of the collar (325) near the fresh air duct (2).

8. The fresh air system for a semiconductor workshop according to claim 5, characterized in that, The threaded rod (332) has a threaded sleeve (331) threadedly connected to its surface, and the threaded sleeve (331) is fixedly connected to the inner wall of the side hole (311).

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