A center flatness detection device for a ceramic chuck

Abstract

The utility model provides a kind of center flatness detection device for ceramic suction cup, including detection component and counterweight component.Detection component includes lifting sliding seat and transverse detection frame, the number of lifting sliding seat is two, two lifting sliding seats are arranged at intervals, the both ends of transverse detection frame are connected with corresponding lifting sliding seat respectively, adjustable detection piece is movably connected on transverse detection frame, transverse detection frame is placed above multi-hole ceramic plate, so that adjustable detection piece is located above the middle region of multi-hole ceramic plate, adjustable detection piece is used to carry out flatness detection to the middle region of multi-hole ceramic plate;Counterweight component includes counterweight frame body and multiple counterweight pressing blocks, counterweight frame body is provided with straight-through avoidance position and center detection avoidance position, multiple counterweight pressing blocks are stacked in counterweight frame body and are arranged around the periphery of center detection avoidance position, during detection, counterweight frame body is arranged on multi-hole ceramic plate, so that transverse detection frame is placed in straight-through avoidance position, adjustable detection piece is placed in center detection avoidance position.

Description

Technical Field

[0001] This utility model relates to the technical field of flatness detection devices, specifically a center flatness detection device for ceramic suction cups. Background Technology

[0002] Porous ceramics refer to ceramic materials produced through a special process, resulting in uniformly shaped solid or vacuum spheres. High-temperature sintering creates a large number of micropores within the spheres. Commonly used materials include silicon carbide, silicon nitride, and alumina. These ceramics can be used in high-temperature filtration, catalyst supports, water treatment, porous electrodes for fuel cells, and the fabrication of vacuum chucks. They are particularly suitable for various electronics industries and applications requiring vacuum adsorption platforms and vacuum chucks. Specifically, porous ceramic chucks are commonly used as precision measurement platforms to adsorb and fix semiconductor wafers, ensuring accuracy during subsequent measurement or processing.

[0003] Currently, during the production process of porous ceramic chucks, it is usually necessary to embed a porous ceramic plate into a ceramic base and bond it together. However, through actual operation, it has been found that there is a bonding gap in the middle area between the porous ceramic plate and the ceramic base. This causes the middle area of ​​the porous ceramic plate to bulge, that is, there is a certain deformation in the middle area of ​​the porous ceramic plate. As a result, when the porous ceramic plate is used to adsorb semiconductor wafers under negative pressure, the large negative pressure adsorption force will cause the middle area of ​​the porous ceramic plate to sink in the opposite direction. In other words, excessive deformation will cause the flatness of the adsorption surface of the porous ceramic plate to be unqualified. Therefore, flatness qualification test needs to be carried out before the porous ceramic chuck is delivered for use.

[0004] Therefore, when the porous ceramic suction cup is under a large negative pressure adsorption force, there is an urgent need for a testing device or equipment that can easily adjust and detect whether the flatness of the central area of ​​the porous ceramic plate is up to standard. Utility Model Content

[0005] To overcome the shortcomings of the existing technology, this utility model provides a center flatness detection device for ceramic suction cups.

[0006] The present invention adopts the following technical solution: A center flatness detection device for ceramic suction cups, used to detect the flatness of the central region of a porous ceramic plate, comprising: The testing assembly includes a lifting sliding seat and a transverse testing frame. There are two lifting sliding seats, which are spaced apart. The two ends of the transverse testing frame are respectively connected to the corresponding lifting sliding seats. An adjustable testing element is movably connected to the transverse testing frame. The transverse testing frame is placed horizontally above the porous ceramic plate, so that the adjustable testing element is located above the middle area of ​​the porous ceramic plate. The adjustable testing element is used to test the flatness of the middle area of ​​the porous ceramic plate. The counterweight assembly includes a counterweight frame and multiple counterweight blocks. The counterweight frame has a through-hole and a central detection hole. The multiple counterweight blocks are arranged around the central detection hole and stacked on the counterweight frame. During testing, the counterweight frame is placed on the porous ceramic plate, so that the transverse detection frame is placed in the through-hole and the adjustable detection element is placed in the central detection hole.

[0007] In one embodiment, each of the lifting sliding seats includes a support base, a vertical slide rail, and a vertical precision slide table. The vertical slide rail is fixedly connected to the support base, one side of the vertical precision slide table is slidably connected to the vertical slide rail, and the other side of the vertical precision slide table is detachably connected to the end of the transverse detection frame.

[0008] In one embodiment, the adjustable testing component includes a horizontal precision slide, a clamping body, and a dial indicator. One side of the horizontal precision slide is slidably connected to the transverse testing frame, and the other side of the horizontal precision slide is screwed to the clamping body. The clamping end of the clamping body is used to clamp the dial indicator.

[0009] In one embodiment, the transverse detection frame is provided with a rack, and the horizontal precision slide is provided with an adjusting rod. The horizontal precision slide is connected to the rack through a gear portion at the end of the adjusting rod.

[0010] In one embodiment, the counterweight frame is provided with a counterweight position around the central detection clearance position, and a plurality of counterweight blocks are stacked on the counterweight position.

[0011] In one embodiment, the counterweight position is arc-shaped, and the counterweight block is adapted to the shape of the counterweight position.

[0012] In one embodiment, the central detection clearance extends through the upper and lower end faces of the counterweight frame.

[0013] In one embodiment, the counterweight frame is further provided with a viewing window that communicates with the central detection clearance position.

[0014] In one embodiment, the counterweight frame is provided with a handle at the top.

[0015] In one embodiment, the bottom surface of the counterweight frame is provided with multiple flexible anti-slip patches.

[0016] The beneficial effects of this utility model are as follows: This invention uses multiple counterweight blocks arranged around the central detection clearance and stacked on the counterweight frame to apply downward positive pressure to the porous ceramic plate, simulating the working state of the porous ceramic suction cup under a large negative pressure adsorption force. Then, by adjusting the lifting sliding seat and the adjustable detection component, the flatness of the porous ceramic suction cup can be tested before delivery, which is convenient and reliable. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, for those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0018] Figure 1 This is a schematic diagram of the structure of a center flatness detection device for a ceramic suction cup according to one embodiment; Figure 2 for Figure 1 Another structural diagram; Figure 3 for Figure 2 A magnified view of a section at point A in the middle; Figure 4 for Figure 1 Exploded view of part of the adjustable detection component; Figure 5 for Figure 2 Schematic diagram of the structure of the central counterweight frame; Figure 6 for Figure 2 Another structural diagram of the central counterweight frame; Explanation of reference numerals in the attached drawings: Porous ceramic plate 100; Central region 101; Detection component 200; Lifting sliding seat 210; Support base 2110; Vertical slide rail 2120; Vertical precision slide 2130; Horizontal detection frame 220; Rack 2210; Adjustable detection component 230; Horizontal precision slide 2310; Adjusting rod 2311; Gear section 2312; Clamping body 2320; Dial indicator 2330; Counterweight component 300; Counterweight frame 310; Straight-through clearance 3101; Central detection clearance 3102; Counterweight position 3103; Viewing window 3104; Handle 3110; Flexible anti-slip patch 3120; Counterweight pressure block 320. Detailed Implementation

[0019] The accompanying drawings are for illustrative purposes only and should not be construed as limiting the scope of this patent. To better illustrate this embodiment, some parts in the drawings may be omitted, enlarged, or reduced, and do not represent the actual dimensions of the product.

[0020] It will be understood by those skilled in the art that certain well-known structures and their descriptions may be omitted in the accompanying drawings. The technical solution of this utility model will be further described below with reference to the accompanying drawings and embodiments.

[0021] Please refer to the instruction manual appendix as well. Figure 1-6 As shown, this utility model discloses a center flatness detection device for ceramic suction cups, used to detect the flatness of the central region 101 of a porous ceramic plate 100. The aforementioned center flatness detection device for ceramic suction cups includes a detection component 200 and a counterweight component 300. The detection component 200 includes two lifting sliding seats 210 and a transverse detection frame 220. Two lifting sliding seats 210 are spaced apart. The two ends of the transverse detection frame 220 are respectively connected to the corresponding lifting sliding seats 210. An adjustable detection element 230 is movably connected to the transverse detection frame 220. The transverse detection frame 220 is horizontally positioned above the porous ceramic plate 100, so that the adjustable detection element 230 is located above the central region 101 of the porous ceramic plate 100. The adjustable detection element 230 is used to detect the flatness of the central region 101 of the porous ceramic plate 100. Flatness testing is performed in area 101; the counterweight assembly 300 includes a counterweight frame 310 and multiple counterweight blocks 320. The counterweight frame 310 has a through-hole 3101 and a central detection 3102. Multiple counterweight blocks 320 are arranged around the central detection 3102 and stacked on the counterweight frame 310. During testing, the counterweight frame 310 is placed on the porous ceramic plate 100, so that the transverse detection frame 220 is placed in the through-hole 3101 and the adjustable detection component 230 is placed in the central detection 3102.

[0022] In this embodiment, the present invention uses multiple counterweight blocks 320 to surround the central detection clearance position 3102 and stack them on the counterweight frame 310. This allows the counterweight blocks 320 to apply downward positive pressure to the porous ceramic plate 100, simulating the working state of the porous ceramic suction cup under a large negative pressure adsorption force. Then, by adjusting the lifting sliding seat 210 and the adjustable detection element 230, the flatness of the porous ceramic suction cup can be tested before delivery, which is convenient and reliable.

[0023] like Figures 1 to 3As shown, preferably, each lifting sliding seat 210 includes a supporting base 2110, a vertical slide rail 2120, and a vertical precision slide table 2130. The vertical slide rail 2120 is fixedly connected to the supporting base 2110. One side of the vertical precision slide table 2130 is slidably connected to the vertical slide rail 2120, and the other side of the vertical precision slide table 2130 is detachably connected to the end of the transverse detection frame 220. Specifically, the two ends of the transverse detection frame 220 are respectively screwed to the other side of the corresponding vertical precision slide table 2130. By adjusting the vertical precision slide table 2130 relative to the vertical slide rail 2120, the height of the transverse detection frame 220 and the adjustable detection component 230 can be adjusted. In this embodiment, the maximum height adjustment value of the vertical precision slide table 2130 is 150mm.

[0024] like Figures 1 to 4 As shown, preferably, the adjustable detection component 230 includes a horizontal precision slide 2310, a clamping body 2320, and a dial indicator 2330. One side of the horizontal precision slide 2310 is slidably connected to the transverse detection frame 220, and the other side of the horizontal precision slide 2310 is screwed to the clamping body 2320. The clamping end of the clamping body 2320 is used to clamp the dial indicator 2330, specifically so that the measuring end of the dial indicator 2330 is located in the middle region 101 of the porous ceramic plate 100, so that the dial indicator 2330 can measure the middle region 101 of the porous ceramic plate 100.

[0025] like Figures 1 to 4 As shown, preferably, the transverse detection frame 220 is provided with a rack 2210, and the horizontal precision slide 2310 is provided with an adjusting rod 2311. The horizontal precision slide 2310 is connected to the rack 2210 through a gear portion 2312 at the end of the adjusting rod 2311. Specifically, the adjusting rod 2311 extends through the top of the horizontal precision slide 2310 to its interior. Thus, when the horizontal precision slide 2310 is slidably mounted on the transverse detection frame 220, the gear structure at the end of the adjusting rod 2311 can be connected to the rack 2210, achieving high-precision horizontal adjustment of the horizontal precision slide 2310. In this embodiment, the maximum horizontal adjustment value of the horizontal precision slide 2310 is 600mm.

[0026] It should be noted that, in this embodiment, the method for flatness detection of the central region 101 of the porous ceramic plate 100 is existing technology, and this application only protects the structure, position and connection relationship of each component.

[0027] like Figures 2 to 5As shown, preferably, the counterweight frame 310 has a counterweight position 3103 surrounding the central detection clearance position 3102, and multiple counterweight blocks 320 are stacked on the counterweight position 3103; the counterweight position 3103 is arc-shaped, and the shape of the counterweight blocks 320 is adapted to the shape of the counterweight position 3103. It can be understood that in this embodiment, both the counterweight frame 310 and the porous ceramic plate 100 are circular, and due to the setting of the through clearance position 3101, the shape of the counterweight position 3103 around the central detection clearance position 3102 is divided into arc shapes, and the shape of the counterweight blocks 320 is adapted to the shape of the counterweight position 3103, so as to better simulate the working state of the porous ceramic suction cup under a large negative pressure adsorption force, so that the outer area of ​​the porous ceramic plate 100 can be subjected to a more uniform downward positive pressure.

[0028] like Figure 2 , Figure 5 and Figure 6 As shown, preferably, the central detection clearance 3102 extends through the upper and lower end faces of the counterweight frame 310. This ensures that the counterweight frame 310, when placed on the porous ceramic plate 100, will not cause structural interference to the transverse detection frame 220, while also facilitating data observation and adjustment of the adjustable detection component 230 by the user.

[0029] Furthermore, in other embodiments, the counterweight frame 310 can be made of metal or plastic.

[0030] like Figure 2 and Figure 5 As shown, preferably, the counterweight frame 310 also has a viewing window 3104 connected to the central detection clearance position 3102. This further facilitates the user's observation of the digital display screen of the dial indicator 2330.

[0031] like Figure 2 and Figure 5 As shown, preferably, the top of the counterweight frame 310 is provided with a handle 3110. In this way, the user can easily pick up or put down the counterweight frame 310 by using the handle 3110.

[0032] like Figure 6 As shown, preferably, the bottom surface of the counterweight frame 310 is provided with multiple flexible anti-slip patches 3120. This reduces the risk of the bottom surface of the counterweight frame 310 being bumped or scratched by the porous ceramic suction cup.

[0033] Obviously, the above embodiments of this utility model are merely examples for clearly illustrating this utility model, and are not intended to limit the implementation of this utility model. Those skilled in the art can make other variations or modifications based on the above description. It is neither necessary nor possible to exhaustively describe all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of this utility model should be included within the protection scope of the claims of this utility model.

Claims

1. A center flatness detection device for a ceramic suction cup, used for flatness detection of the central region (101) of a porous ceramic plate (100), characterized in that, include: The detection assembly (200) includes a lifting sliding seat (210) and a transverse detection frame (220). There are two lifting sliding seats (210), which are spaced apart. The two ends of the transverse detection frame (220) are respectively connected to the corresponding lifting sliding seats (210). An adjustable detection element (230) is movably connected to the transverse detection frame (220). The transverse detection frame (220) is placed horizontally above the porous ceramic plate (100), so that the adjustable detection element (230) is located above the middle area (101) of the porous ceramic plate (100). The adjustable detection element (230) is used to detect the flatness of the middle area (101) of the porous ceramic plate (100). The counterweight assembly (300) includes a counterweight frame (310) and multiple counterweight blocks (320). The counterweight frame (310) has a through-hole clearance (3101) and a central detection clearance (3102) connected to each other. The multiple counterweight blocks (320) surround the central detection clearance (3102) and are stacked on the counterweight frame (310). During testing, the counterweight frame (310) is placed on the porous ceramic plate (100), so that the transverse detection frame (220) is placed in the through-hole clearance (3101) and the adjustable detection component (230) is placed in the central detection clearance (3102).

2. The center flatness detection device for a ceramic suction cup according to claim 1, characterized in that, Each of the lifting sliding seats (210) includes a support base (2110), a vertical slide rail (2120), and a vertical precision slide table (2130). The vertical slide rail (2120) is fixedly connected to the support base (2110). One side of the vertical precision slide table (2130) is slidably connected to the vertical slide rail (2120), and the other side of the vertical precision slide table (2130) is detachably connected to the end of the transverse detection frame (220).

3. The center flatness detection device for a ceramic suction cup according to claim 1, characterized in that, The adjustable testing component (230) includes a horizontal precision slide (2310), a clamping body (2320), and a dial indicator (2330). One side of the horizontal precision slide (2310) is slidably connected to the transverse testing frame (220), and the other side of the horizontal precision slide (2310) is screwed to the clamping body (2320). The clamping end of the clamping body (2320) is used to clamp the dial indicator (2330).

4. The center flatness detection device for a ceramic suction cup according to claim 3, characterized in that, The transverse detection frame (220) is provided with a rack (2210), and the horizontal precision slide (2310) is provided with an adjusting rod (2311). The horizontal precision slide (2310) is connected to the rack (2210) through the gear part (2312) at the end of the adjusting rod (2311).

5. The center flatness detection device for a ceramic suction cup according to claim 1, characterized in that, The counterweight frame (310) has a counterweight position (3103) around the periphery of the central detection clearance position (3102), and multiple counterweight blocks (320) are stacked on the counterweight position (3103).

6. The center flatness detection device for a ceramic suction cup according to claim 5, characterized in that, The counterweight position (3103) is arc-shaped, and the counterweight block (320) is adapted to the shape of the counterweight position (3103).

7. The center flatness detection device for a ceramic suction cup according to claim 1, characterized in that, The central detection clearance position (3102) extends through the upper and lower end faces of the counterweight frame (310).

8. The center flatness detection device for a ceramic suction cup according to claim 1, characterized in that, The counterweight frame (310) is also provided with a viewing window (3104) that is connected to the central detection clearance position (3102).

9. The center flatness detection device for a ceramic suction cup according to claim 1, characterized in that, The top of the counterweight frame (310) is provided with a handle (3110).

10. The center flatness detection device for a ceramic suction cup according to claim 1, characterized in that, The bottom surface of the counterweight frame (310) is provided with multiple flexible anti-slip patches (3120).

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