A modified optical spectrometer

Abstract

The utility model provides a kind of improved spectrometer, including isolation cylinder, is equipped with joint one on isolation cylinder, is equipped with connecting pipe one on joint one, connecting pipe one is connected with the compressor outside vacuum cavity, isolation cylinder is also equipped with joint two, is equipped with connecting pipe two on joint two, connecting pipe two is communicated with atmosphere outside vacuum cavity, isolation cavity is equipped in isolation cylinder and is isolated from vacuum cavity, isolation cavity is communicated with atmosphere outside vacuum cavity by connecting pipe one, connecting pipe two, and isolation component and device needing vacuum isolation are arranged in isolation cavity.The utility model isolates isolation component and device from vacuum cavity by isolation cylinder, the cost is lower, and the improved spectrometer can be adapted to vacuum environment and atmospheric environment use, and use range is greatly increased.

Description

Technical Field

[0001] This utility model relates to the field of spectrometer technology, and in particular to a modified spectrometer. Background Technology

[0002] A spectrometer is an instrument that can break down complex light into spectral lines arranged by wavelength, thereby accurately determining the elements contained in an object or analyzing the composition of a substance. It is a commonly used detection tool. Currently, spectrometers are often used in vacuum environments for various detection processes, such as wafer lithography, thin film deposition, etching, and ion implantation. However, dedicated vacuum spectrometers are expensive, and components such as lasers in conventional spectrometers cannot function properly in a vacuum environment and require vacuum isolation. Therefore, it is necessary to develop a modified spectrometer suitable for use in both vacuum and atmospheric environments. Utility Model Content

[0003] The present invention aims to provide a modified spectrometer to overcome the shortcomings of the prior art.

[0004] To solve the above-mentioned technical problems, the technical solution of this utility model is: a modified spectrometer, including an isolation cylinder, a connector 1 on the isolation cylinder, a connecting pipe 1 on the connector 1, the connecting pipe 1 being connected to a compressor outside the vacuum chamber for introducing dry compressed air, a connector 2 on the isolation cylinder, a connecting pipe 2 on the connector 2 being connected to the atmosphere outside the vacuum chamber, an isolation cavity being provided inside the isolation cylinder, the isolation cavity being connected to the atmosphere outside the vacuum chamber through the connecting pipe 1 and the connecting pipe 2, and isolation components requiring vacuum isolation being disposed inside the isolation cavity.

[0005] Furthermore, in the aforementioned modified spectrometer, a pressure regulating valve is provided on the connecting pipe, which is used to regulate the pressure of the compressed air entering the isolation cylinder.

[0006] Furthermore, in the modified spectrometer described above, a speed control valve is also provided on the connecting pipe. The speed control valve is located downstream of the pressure regulating valve and is used to adjust the intake air volume.

[0007] Furthermore, in the aforementioned modified spectrometer, the isolation cylinder includes a cylinder body and a cylinder cover. The upper end of the cylinder body has a flange connection. The cylinder cover is detachably connected to the flange connection via multiple fasteners, and a sealing ring is provided between the cylinder cover and the flange connection. Connector one and connector two are located on the cylinder cover. Preferably, the cylinder cover has a handle to facilitate the assembly and disassembly of the isolation cylinder.

[0008] Furthermore, the modified spectrometer described above also includes a mounting base and connecting rods. The isolation cylinder is provided with an external connecting plate that is fixedly connected to the cylinder body. The mounting base is suspended below the isolation cylinder and is connected to the external connecting plate through multiple connecting rods arranged around the cylinder body. The mounting base is connected to the mounting plate located inside the spectrometer.

[0009] Furthermore, the modified spectrometer described above also includes a mounting mechanism for installing isolation components. The mounting mechanism includes a mounting bracket one and a mounting bracket two. The mounting bracket one is fixed below the cylinder cover, and the mounting bracket two is fixed below the mounting bracket one. The mounting bracket two has support plates on both sides, and the support plates have spring pins that abut against the side wall of the isolation cavity. The isolation components are fixed on the mounting bracket two.

[0010] Furthermore, the modified spectrometer described above also includes a window and a window cover. The bottom of the isolation cylinder is provided with a mounting hole, and a transparent window is provided inside the mounting hole. A window cover is provided below the window and pressed against the bottom of the window.

[0011] Furthermore, in the aforementioned modified spectrometer, sealing gaskets are provided between the window and the isolation cylinder, as well as between the window and the window cover.

[0012] Furthermore, in the modified spectrometer described above, a lens mount is provided below the window, the lens mount is mounted on a mounting base, and the mounting base is also provided with an adjustment component for adjusting the position of the lens mount.

[0013] Furthermore, in the aforementioned modified spectrometer, the adjustment assembly includes an adjustment component, a slide block, and an adjustment rail. The mirror frame is tilted and mounted on the mirror base. The mirror base is provided with an adjustment component for adjusting the tilt angle of the mirror frame. A slide block is provided on one side of the mirror base, and the slide block is slidably connected to the adjustment rail. The adjustment rail is mounted on a mounting base.

[0014] Compared with the prior art, the beneficial effects of this utility model are: This utility model isolates the isolation components from the vacuum chamber through the isolation cylinder, and realizes air circulation between the isolation chamber and the external atmospheric environment through connecting pipe one and connecting pipe two, which can provide air cooling for the isolation components in the isolation chamber, providing a stable working environment for the isolation components, so that the modified spectrometer can work normally in a vacuum environment; moreover, the modification cost is low, and the modified spectrometer can be used in both vacuum and atmospheric environments, greatly increasing its application range. Attached Figure Description

[0015] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments recorded in this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of the spectrometer modified according to this utility model; Figure 2 This is a schematic diagram of a partial structure of the spectrometer modified according to this utility model. Figure 1 ; Figure 3 for Figure 2 Side view; Figure 4 This is a schematic diagram of a partial structure of the spectrometer modified according to this utility model. Figure 2 ; Figure 5 This is a schematic cross-sectional view of the isolation cylinder of the spectrometer modified according to this utility model; Figure 6 This is a schematic diagram of the installation of the spectrometer modified according to this utility model; In the diagram: 1. Isolation cylinder; 11. Isolation chamber; 12. Cylinder body; 13. Cylinder cover; 14. Sealing ring; 15. Handle; 16. External connecting plate; 2. Connector 1; 21. Connecting pipe 1; 3. Connector 2; 31. Connecting pipe 2; 41. Mounting base; 42. Connecting rod; 51. Mounting bracket one; 52. Mounting bracket two; 53. Support plate; 54. Spring pin; 61. Window; 62. Window cover; 63. Sealing gasket; 71. Frame; 72. Base; 73. Adjustment mechanism; 74. Slide; 75. Adjustment rail; 8. Isolation components; 9. Vacuum chamber. Detailed Implementation

[0017] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0018] Example 1 like Figure 1-6As shown, a modified spectrometer includes an isolation cylinder 1, a connector 2 on the isolation cylinder 1, a connecting pipe 21 on the connector 2, and the connecting pipe 21 connected to a compressor outside a vacuum chamber 9 for introducing dry compressed air. The isolation cylinder 1 also has a connector 3, and a connecting pipe 31 on the connector 3, which is connected to the atmosphere outside the vacuum chamber 9. The isolation cylinder 1 contains an isolation chamber 11 that is isolated from the vacuum chamber 9. The isolation chamber 11 is connected to the atmosphere outside the vacuum chamber 9 through the connecting pipe 21 and the connecting pipe 31. The isolation components 8 of the spectrometer that need to be vacuum isolated are located inside the isolation chamber 11. In this embodiment, the isolation components are a laser and its controller. The other ends of the connecting pipe 21 and the connecting pipe 31 are installed on a sealing connector located on the side wall of the vacuum chamber 9 to ensure the airtightness of the vacuum chamber.

[0019] This invention isolates the vacuum chamber with an isolation cylinder and achieves air circulation between the isolation chamber and the external atmospheric environment through connecting pipe one and connecting pipe two. This enables air cooling of the isolation components inside the isolation chamber, providing a stable working environment for the isolation components and allowing the modified spectrometer to work normally in a vacuum environment. Moreover, the modification cost is low, and the modified spectrometer is suitable for use in both vacuum and atmospheric environments, greatly increasing its application range.

[0020] Connecting pipe 21 is equipped with a pressure regulating valve and a speed control valve (not shown in the figure) arranged sequentially. The pressure regulating valve is used to regulate the pressure of the compressed air entering the isolation cylinder, i.e., to regulate the intake pressure. In this embodiment, the pressure regulating valve adjusts the compressed air pressure (generally 0.6-0.8 MPa) to a positive pressure of 0.13-0.14 MPa to achieve the optimal working environment. The speed control valve is located downstream of the pressure regulating valve and is used to regulate the intake volume, thereby controlling the circulation speed of the atmosphere in the isolation cylinder, ensuring optimal heat dissipation while controlling the intake volume.

[0021] like Figure 2-5 As shown, the isolation cylinder 1 includes a cylinder body 12 and a cylinder cover 13. The upper end of the cylinder body 12 is provided with a flange connection. The cylinder cover 13 is detachably connected to the flange connection through multiple fasteners, and a sealing ring 14 is provided between the cylinder cover 13 and the flange connection. The sealing ring 14 is located on the inner side of the flange connection to ensure the sealing of the isolation cavity 11. Connector 1 2 and connector 2 3 are provided on the cylinder cover 13 and are exposed outside the spectrometer for easy installation. In addition, the cylinder cover 13 is provided with a handle 15 for easy disassembly and assembly of the isolation cylinder. The cylinder cover 13 is also provided with a cable through hole, and the cable is connected to the outside of the isolation cylinder 1 through a cable connector (not shown in the figure) installed on the cable through hole.

[0022] like Figure 2-3As shown, the modified spectrometer also includes a mounting base 41 and a connecting rod 42. An external connecting plate 16 is fixedly connected to the cylinder 12 on the isolation cylinder 1. The mounting base 42 is suspended below the isolation cylinder 1 and is connected to the external connecting plate 16 through multiple connecting rods 42 arranged around the cylinder 12. The mounting base 42 is connected to a mounting plate (not shown in the figure) located inside the spectrometer. This mounting plate is the original mounting position for the laser before the modification.

[0023] like Figure 4 As shown, the modified spectrometer also includes a mounting mechanism for installing the isolation component 8. The mounting mechanism includes a first mounting bracket 51 and a second mounting bracket 52. The first mounting bracket 51 is fixed below the cylinder cover 13, and the second mounting bracket 52 is fixed below the first mounting bracket 51. Support plates 53 are provided on both sides of the second mounting bracket 52. Spring pins 54 abut against the side walls of the isolation cavity 11 on the support plates 53. The spring pins abut against the side walls, providing support and making the installation of the isolation component 8 more stable. The isolation component 8 is fixed on the second mounting bracket 52. During installation, the isolation component 8 is first installed entirely on the cylinder cover 13 of the isolation cylinder 1. Then, the handle 15 is held and the component is inserted into the cylinder 12, and the cylinder cover 13 is locked to install the isolation component 9. Conversely, loosening the cylinder cover 13 allows for quick disassembly of the isolation component 9.

[0024] Example 2 Based on the structure of Example 1, such as Figure 2-5 As shown, the modified spectrometer also includes a window 61 and a window cover 62. The bottom of the isolation cylinder 1 has a mounting hole with a transparent window 61 inside. Below the window 61 is a window cover 62 pressed against the bottom of the window 61. Sealing gaskets 63 are provided between the window 61 and the isolation cylinder 1, and between the window 61 and the window cover 62. Specifically, the mounting hole contains, from top to bottom, sealing gaskets 63, window 61, and sealing gaskets 63. The window cover 62 presses against the outer sealing gasket 63, ensuring complete isolation between the isolation cavity 11 and the vacuum cavity 9. In this embodiment, the window 61 is located directly below the isolation component (laser) and is used to transmit the laser light.

[0025] like Figure 2-4 As shown, a frame 71 is also provided below window 6. The frame 71 is mounted on the mounting base 41, and the mounting base 41 is also provided with an adjustment component for adjusting the position of the frame 71. Specifically, the adjustment component includes an adjustment element 73, a slide 74, and an adjustment rail 75. The frame 71 is tilted and is mounted on a lens base 72. The lens base 72 is provided with an adjustment element 73 for adjusting the tilt angle of the frame 71. A slide 74 is provided on one side of the lens base 72. The slide 74 is slidably connected to the adjustment rail 75, and the adjustment rail 75 is mounted on the mounting base 41.

[0026] Since the isolation component 8 is installed inside the isolation cylinder 1, and there are installation and processing errors, it is difficult to ensure the accuracy of the laser's optical path. By adjusting the position of the mirror frame 71, the XYZ directions of the mirror frame can be adjusted so that the light emitted by the laser accurately illuminates the reflector inside the spectrometer, ensuring the accuracy of the detection optical path.

[0027] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

[0028] Furthermore, it should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can also be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A modified spectrometer, characterized in that: The device includes an isolation cylinder, on which a connector is provided, and a connecting pipe is provided on the connector. The connecting pipe is connected to a compressor outside the vacuum chamber for introducing dry compressed air. The isolation cylinder also has a second connector, on which a second connecting pipe is provided, and the connecting pipe is connected to the atmosphere outside the vacuum chamber. The isolation cylinder contains an isolation chamber that is isolated from the vacuum chamber. The isolation chamber is connected to the atmosphere outside the vacuum chamber through the first and second connecting pipes. Isolation components that require vacuum isolation are located in the isolation chamber.

2. The modified optical spectrometer of claim 1, wherein: A pressure regulating valve is provided on the connecting pipe, which is used to regulate the pressure of the compressed air entering the isolation cylinder.

3. The modified optical spectrometer of claim 2, wherein: The connecting pipe is also equipped with a speed control valve, which is located downstream of the pressure regulating valve and is used to regulate the intake air volume.

4. The modified optical spectrometer of claim 1, wherein: The isolation cylinder includes a cylinder body and a cylinder cover. The upper end of the cylinder body is provided with a flange connection part. The cylinder cover is detachably connected to the flange connection part by multiple fasteners, and a sealing ring is provided between the cylinder cover and the flange connection part. The first connector and the second connector are provided on the cylinder cover.

5. The modified optical spectrometer of claim 1, wherein: It also includes a mounting base and connecting rods. The isolation cylinder is provided with an outer connecting plate that is fixedly connected to the cylinder body. The mounting base is suspended below the isolation cylinder and is connected to the outer connecting plate through multiple connecting rods arranged around the cylinder body. The mounting base is connected to the mounting plate located inside the spectrometer.

6. The modified spectrometer according to claim 4, characterized in that: It also includes an installation mechanism for installing isolation components. The installation mechanism includes a first installation bracket and a second installation bracket. The first installation bracket is fixed below the cylinder cover, and the second installation bracket is fixed below the first installation bracket. The second installation bracket has support plates on both sides, and the support plates have spring pins that abut against the side wall of the isolation cavity. The isolation components are fixed on the second installation bracket.

7. The modified optical spectrometer according to claim 1 or 6, characterized in that: It also includes a window and a window cover. The bottom of the isolation cylinder is provided with an installation hole, and the installation hole is provided with a transparent window. Below the window is a window cover that is pressed against the bottom of the window.

8. The modified optical spectrometer of claim 7, wherein: Sealing gaskets are provided between the window and the isolation cylinder, as well as between the window and the window cover.

9. The modified optical spectrometer of claim 7, wherein: Below the window, there is also a frame, which is mounted on a mounting base. The mounting base is also equipped with an adjustment component for adjusting the position of the frame.

10. The modified optical spectrometer of claim 9, wherein: The adjustment assembly includes an adjustment component, a slide block, and an adjustment rail. The eyeglass frame is tilted and mounted on a lens base. The lens base is provided with an adjustment component for adjusting the tilt angle of the eyeglass frame. A slide block is provided on one side of the lens base. The slide block is slidably connected to the adjustment rail, and the adjustment rail is mounted on a mounting base.

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