Online detection device for process gas concentration in diffusion furnace and diffusion furnace

Abstract

This utility model relates to the field of diffusion furnace technology, and provides an online detection device for process gas concentration in a diffusion furnace and a diffusion furnace, aiming to solve the problem of a high risk of gas leakage due to the large number of mounting holes and required sealing rings on the furnace wall. To this end, the diffusion furnace wall is provided with mounting holes, and the online detection device for process gas concentration includes: a detection tube, comprising an installation tube that can pass through and seal with the mounting hole, and at least two collection tubes integrally formed with the installation tube; the first end of the installation tube is closed and exposed outside the mounting hole; the inlet ends of the at least two collection tubes pass through the first end of the installation tube to different positions inside the diffusion furnace; a concentration detection device for receiving the collected process gas and detecting its concentration; and a data processing unit for receiving and analyzing the detection results of the concentration detection device and outputting target diffusion process parameters when adjustments to the diffusion process parameters are needed.

Description

Technical Field

[0001] This utility model relates to the field of diffusion furnace technology, specifically providing an online detection device for the process gas concentration of a diffusion furnace and a diffusion furnace. Background Technology

[0002] In photovoltaic cell manufacturing, diffusion is a crucial step in forming a PN junction, which involves diffusing boron atoms onto the silicon wafer surface to form a P-type semiconductor layer. The concentration distribution of the diffused boron atoms directly affects the performance of the PN junction, thus determining the photoelectric conversion efficiency of the photovoltaic cell.

[0003] Online gas concentration detection is divided into furnace inlet detection, furnace in-furnace detection, and furnace tail detection. Conventional online detection devices typically have multiple detection pipes. The furnace wall of the diffusion furnace has mounting holes corresponding to the number of detection pipes. The detection pipes pass through the mounting holes one-to-one into the furnace inlet, furnace in-furnace, and furnace tail positions, and are sealed with sealing rings to achieve a seal between the detection pipes and the holes. Due to the large number of mounting holes on the furnace wall and the numerous sealing rings used for sealing, the diffusion furnace has a high risk of gas leakage.

[0004] Therefore, a new technical solution is needed in this field to solve the above problems. Utility Model Content

[0005] The present invention aims to solve the above-mentioned technical problems, namely, the problem that the large number of mounting holes and sealing rings required on the furnace wall of the diffusion furnace leads to a high risk of air leakage.

[0006] In a first aspect, this utility model provides an online detection device for the concentration of process gas in a diffusion furnace. The diffusion furnace wall is provided with an installation hole. The online detection device includes: a detection tube, which includes an installation tube that can pass through the installation hole and be sealed to the installation hole, and at least two collection tubes integrally formed with the installation tube, wherein the first end of the installation tube is closed and exposed outside the installation hole, and the gas inlet ends of the at least two collection tubes pass through the first end of the installation tube to different positions inside the diffusion furnace; a concentration detection device, which is used to receive the process gas collected by the collection tubes and detect the concentration of the process gas; and a data processing unit, which is used to receive and analyze the detection results of the concentration detection device, and output target diffusion process parameters when it is determined that the diffusion process parameters need to be adjusted.

[0007] In the preferred embodiment of the online detection device for process gas concentration in the above-mentioned diffusion furnace, a flange and a sealing ring are respectively fitted on the mounting pipe, wherein the flange is adapted to be fixedly connected to the outer edge of the mounting hole, and the sealing ring is squeezed between the outer edge, the flange and the mounting pipe to achieve a sealed connection between the mounting pipe and the mounting hole.

[0008] In the preferred embodiment of the online detection device for the process gas concentration of the above-mentioned diffusion furnace, the flange and the mounting pipe are integrally formed.

[0009] In a preferred embodiment of the online detection device for process gas concentration in the above-mentioned diffusion furnace, the mounting pipe includes a first sealing plate and a pipe body extending from a first side of the first sealing plate in a direction away from the first sealing plate. The inlet end of the collecting pipe passes through the first sealing plate and extends in the direction of extension of the pipe body.

[0010] In the preferred embodiment of the online detection device for process gas concentration in the above-mentioned diffusion furnace, the second end of the mounting tube is closed, a partition is provided inside the mounting tube, the partition divides the inside of the mounting tube into cavities of the same number as the collecting tubes, the wall of the mounting tube is provided with air inlet holes corresponding to the cavities, and the air inlet ends of at least two collecting tubes are inserted into the cavities one by one.

[0011] In the preferred embodiment of the online detection device for process gas concentration in the above-mentioned diffusion furnace, the at least two collection pipes include a first collection pipe, a second collection pipe, and a third collection pipe. The first collection pipe, the second collection pipe, and the third collection pipe are respectively used to collect the process gas at the furnace mouth, the furnace middle, and the furnace tail of the diffusion furnace.

[0012] In a preferred embodiment of the online detection device for the process gas concentration of the above-mentioned diffusion furnace, the concentration detection device is a tunable semiconductor laser absorption spectrometer; and / or the data processing unit is communicatively connected to the process gas supply device of the diffusion furnace.

[0013] In a preferred embodiment of the online detection device for the process gas concentration of the above-mentioned diffusion furnace, the furnace wall of the diffusion furnace is provided with a plurality of mounting holes, characterized in that the online detection device includes a detection tube corresponding to each of the mounting holes.

[0014] When the above technical solution is adopted, the diffusion furnace wall is provided with mounting holes, and the online detection device for the process gas concentration of the diffusion furnace includes: a detection tube, which includes an installation tube that can pass through the mounting hole and be sealed to the mounting hole, and at least two collection tubes integrally formed with the installation tube, wherein the first end of the installation tube is closed and exposed outside the mounting hole, and the gas inlet ends of the at least two collection tubes pass through the first end of the installation tube to different positions inside the diffusion furnace; a concentration detection device, which is used to receive the process gas collected by the collection tubes and detect the concentration of the process gas; and a data processing unit, which is used to receive and analyze the detection results of the concentration detection device, and output the target diffusion process parameters when it is determined that the diffusion process parameters need to be adjusted.

[0015] With this setup, the collection pipe for collecting process gases from different locations within the diffusion furnace is integrally formed with the installation pipe and passes through the sealed first end of the installation pipe. The installation pipe passes through the installation hole on the furnace wall of the diffusion furnace and is sealed to the installation hole. Compared to the method where the collection pipes for collecting gases pass through the installation holes on the furnace wall of the diffusion furnace one by one, this reduces the number of installation holes on the furnace wall of the diffusion furnace and lowers the risk of gas leakage in the diffusion furnace.

[0016] Preferably, a flange and a sealing ring are respectively fitted onto the mounting pipe, wherein the flange is adapted to be fixedly connected to the outer edge of the mounting hole, and the sealing ring is squeezed between the outer edge of the mounting hole, the flange and the mounting pipe to achieve a sealed connection between the mounting pipe and the mounting hole.

[0017] With this setup, the sealing ring is pressed into the outer edge of the mounting hole, between the flange and the mounting pipe, which facilitates sealing between the mounting pipe and the mounting hole, improves the sealing effect, and further reduces the risk of leakage.

[0018] Preferably, the flange and the mounting pipe are integrally formed.

[0019] This design eliminates the gap between the flange and the mounting pipe, further reducing the risk of air leakage.

[0020] Preferably, the mounting pipe includes a first sealing plate and a pipe body extending from a first side of the first sealing plate in a direction away from the first sealing plate, and the air inlet end of the collecting pipe passes through the first sealing plate and extends in the direction of extension of the pipe body.

[0021] With this design, the structure of the mounting tube is relatively simple, making its manufacture easier.

[0022] Preferably, the concentration detection device is a tunable semiconductor laser absorption spectrometer.

[0023] With this setup, the detection speed is fast, with a single detection time of less than 1 second and an accuracy of up to ppm level, thus improving the detection speed.

[0024] Preferably, the data processing unit is communicatively connected to the process gas supply device of the diffusion furnace.

[0025] This setup allows for automatic and dynamic optimization of process parameters based on test results, reducing manual intervention and improving product consistency and yield.

[0026] Preferably, the diffusion furnace wall is provided with multiple mounting holes, and the online detection device includes a detection tube corresponding to each mounting hole.

[0027] This setup allows for the collection of process gases from more locations, improving the accuracy of process gas concentration detection and thus enabling more precise control of process gas concentration within the diffusion furnace.

[0028] In a second aspect, the present invention also provides a diffusion furnace, which includes an online detection device for the process gas concentration of the diffusion furnace as described in any one of the above technical solutions.

[0029] It should be noted that this diffusion furnace has all the technical effects of the online detection device for process gas concentration of the diffusion furnace described in any of the above technical solutions, and will not be repeated here.

[0030] In the preferred embodiment of the diffusion furnace described above, a support is provided on the inner side of the furnace wall, and the support is used to support the detection tube of the online detection device.

[0031] This design facilitates the installation of the detection tube and enhances its stability. Attached Figure Description

[0032] The preferred embodiments of this utility model will now be described with reference to the accompanying drawings, in which:

[0033] Figure 1 This is a schematic diagram of the structure of a diffusion furnace according to an embodiment of the present invention;

[0034] Figure 2 This is a front view schematic diagram of a diffusion furnace according to an embodiment of the present invention;

[0035] Figure 3 It is along Figure 2 A cross-sectional view of the AA plane;

[0036] Figure 4 It is along Figure 2 A cross-sectional view of the BB plane;

[0037] Figure 5 yes Figure 3 A magnified view of part C in the middle;

[0038] Figure 6 This is a half-sectional view of the detection tube of the online detection device in a diffusion furnace according to an embodiment of this utility model.

[0039] List of reference numerals in the attached diagram:

[0040] 1. Quartz furnace tube; 11. Mounting hole; 12. Bracket; 2. Detection tube; 21. Mounting tube; 211. Tube body; 2121. First sealing plate; 2122. Second sealing plate; 2131. First partition; 2132. Second partition; 2141. First cavity; 2142. Second cavity; 2143. Third cavity; 2151. First air inlet; 2152. Second air inlet; 2153. Third air inlet; 221. First collection tube; 222. Second collection tube; 223. Third collection tube; 3. Concentration detection device; 4. Data processing unit; 5. Flange; 6. Sealing ring; 7. Connecting pipe. Detailed Implementation

[0041] First, those skilled in the art should understand that the embodiments described below are merely for explaining the technical principles of this utility model and are not intended to limit the scope of protection of this utility model.

[0042] It should be noted that in the description of this utility model, terms such as "left" and "right," which indicate directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. These are used merely for ease of description and do not indicate or imply that the device or element must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0043] Furthermore, it should be noted that in the description of this utility model, unless otherwise explicitly specified and limited, the term "connection" should be interpreted broadly. For example, it can refer to a fixed connection, a detachable connection, or an integral connection; it can be a direct connection or an indirect connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0044] Based on the issue mentioned in the background art, the large number of mounting holes and sealing rings required on the furnace wall of the diffusion furnace, leading to a high risk of gas leakage, this utility model provides an online detection device for the process gas concentration of the diffusion furnace. The diffusion furnace wall is provided with mounting holes. The online detection device for the process gas concentration of the diffusion furnace includes: a detection tube, comprising an installation tube that can pass through and seal with the mounting hole, and at least two collection tubes integrally formed with the installation tube. The first end of the installation tube is closed and exposed outside the mounting hole, and the inlet ends of the at least two collection tubes pass through from the first end of the installation tube to different positions inside the diffusion furnace; a concentration detection device, used to receive the process gas collected by the collection tubes and detect the concentration of the process gas; and a data processing unit, used to receive and analyze the detection results of the concentration detection device, and output target diffusion process parameters when it is determined that the diffusion process parameters need to be adjusted.

[0045] With this setup, the collection pipe for collecting process gases from different locations within the diffusion furnace is integrally formed with the installation pipe and passes through the sealed first end of the installation pipe. The installation pipe passes through the installation hole on the furnace wall of the diffusion furnace and is sealed to the installation hole. Compared to the method where the collection pipes for collecting gases pass through the installation holes on the furnace wall of the diffusion furnace one by one, this reduces the number of installation holes on the furnace wall of the diffusion furnace and lowers the risk of gas leakage in the diffusion furnace.

[0046] The following is combined with Figures 1 to 6 This utility model will be described in detail. Figure 1 This is a schematic diagram of the structure of a diffusion furnace according to an embodiment of the present invention; Figure 2 This is a front view schematic diagram of a diffusion furnace according to an embodiment of the present invention; Figure 3 It is along Figure 2 A cross-sectional view of the AA plane; Figure 4 It is along Figure 2 A cross-sectional view of the BB plane; Figure 5 yes Figure 3 A magnified view of part C in the middle; Figure 6 This is a half-sectional view of the detection tube of the online detection device in a diffusion furnace according to an embodiment of this utility model.

[0047] like Figures 1 to 6 As shown, the diffusion furnace of this utility model includes a quartz furnace tube 1 and an online detection device for process gas concentration. The tube wall of the quartz furnace tube 1 forms the furnace wall of the diffusion furnace, and two mounting holes 11 are provided at the right end of the quartz furnace tube 1.

[0048] See also Figures 1 to 6 The online detection device of this utility model includes two detection tubes 2, a concentration detection device 3, and a data processing unit 4. Each detection tube 2 includes an installation tube 21 and three collection tubes, namely a first collection tube 221, a second collection tube 222, and a third collection tube 223. The installation tube 21 can be inserted through the installation hole 11 and sealed to the installation hole. The first end of the installation tube 21 (i.e., Figure 6 The right end of the mounting tube 21 is closed and exposed outside the mounting hole 11. The first collecting tube 221, the second collecting tube 222, and the third collecting tube 223 are all integrally formed with the mounting tube 21, and the air inlet ends of the first collecting tube 221, the second collecting tube 222, and the third collecting tube 223 (i.e., Figure 6The left ends of the first collecting tube 221, the second collecting tube 222, and the third collecting tube 223 are respectively inserted from the first end of the mounting tube 21 to different positions inside the diffusion furnace. The concentration detection device 3 is used to receive the process gas collected by the first collecting tube 221, the second collecting tube 222, and the third collecting tube 223 and to detect the concentration of the process gas. The data processing unit 4 is used to receive and analyze the detection results of the concentration detection device, and outputs the target diffusion process parameters when it is determined that the diffusion process parameters need to be adjusted. The concentration detection device 3 is a tunable semiconductor laser absorption spectrometer.

[0049] like Figure 6 As shown, specifically, the installation tube 21 includes a first sealing plate 2121, a tube body 211 extending from the left side of the first sealing plate 2121 to the right, and a second sealing plate 2122 formed at the right end of the tube body 211. The tube body 211 also contains a first partition 2131 and a second partition 2132 parallel to the first sealing plate 2121 and the second sealing plate 2122. The first partition 2131 and the second partition 2132 are arranged sequentially from left to right within the tube body 211. The first partition 2131 and the second partition 2132 will install... The interior of the tube 21 is divided into a first cavity 2141, a second cavity 2142, and a third cavity 2143, distributed from left to right. The first cavity 2141, the second cavity 2142, and the third cavity 2143 are located at the furnace mouth, the furnace middle, and the furnace tail of the diffusion furnace, respectively. A first air inlet 2151, a second air inlet 2152, and a third air inlet 2153 are respectively provided on the tube wall of the tube 211 at positions corresponding to the first cavity 2141, the second cavity 2142, and the third cavity 2143. The left ends of the first collecting tube 221, the second collecting tube 222, and the third collecting tube 223 pass through the first sealing plate 2121 and extend to the right. The left end of the first collecting tube 221 enters the first cavity 2141, the left end of the second collecting tube 222 enters the second cavity 2142, and the left end of the third collecting tube 223 enters the third cavity 2143.

[0050] like Figure 2 , Figure 3 and Figure 5As shown, the mounting tube 21 mostly passes through the mounting hole 11 into the quartz furnace tube 1, with the right end of the mounting tube 21 exposed outside the mounting hole 11. The mounting tube 21 is sealed to the mounting hole 11 by means of the flange 5 and the sealing ring 6. Both the flange 5 and the sealing ring 6 are fitted onto the mounting tube 21 and located outside the mounting hole 11. The flange 5 is fixedly connected to the outer edge of the mounting hole 11, and the sealing ring 6 is squeezed between the outer edge of the mounting hole 11, the flange 5, and the mounting tube 21. The flange 5 and the mounting tube 21 are integrally formed. For example, the flange 5 and the mounting tube 21 are made of quartz material by compression molding, injection molding, or other suitable processes. Multiple blind holes (not shown in the figure) are formed around the outer edge of the mounting hole 11. Internal threads are formed on the inner wall of the blind holes. The bolt shank passes through the bolt hole on the flange 5 and is screwed into the blind hole, thereby achieving a fixed connection between the flange 5 and the outer edge of the mounting hole 11. It is understandable that multiple studs distributed around the mounting hole 11 can also be formed on the outer side of the outer edge of the mounting hole 11. The studs pass through the bolt holes on the flange 5 and are tightened with nuts, thereby achieving a fixed connection between the flange 5 and the outer edge of the mounting hole 11.

[0051] like Figure 3 and Figure 4 As shown and referenced Figure 3 As shown, two supports 12 are installed on the inner wall near the left end of the quartz furnace tube 1. The supports 12 are used to support the left end of the detection tube 2. Specifically, the supports 12 are hooks installed on the inner wall of the quartz furnace tube 1.

[0052] like Figure 2 and Figure 3 As shown, the right ends of the first collection pipe 221, the second collection pipe 222, and the third collection pipe 223 are connected to the concentration detection device 3 via connecting pipe 7. The concentration detection device 3 is connected to the data processing unit 4 via a data transmission cable. The data processing unit 4 is communicatively connected to the process gas supply device (not shown in the figure) of the diffusion furnace via a data transmission cable.

[0053] The first end of the mounting tube 21 is closed and exposed outside the mounting hole 11. The first collecting tube 221, the second collecting tube 222, and the third collecting tube 223 are all integrally formed with the mounting tube 21, and the air inlet ends of the first collecting tube 221, the second collecting tube 222, and the third collecting tube 223 are respectively inserted from the first end of the mounting tube 21 to different positions inside the diffusion furnace. In this way, it is not necessary to set three mounting holes on the quartz furnace tube 1 of the diffusion furnace for separately inserting the first collecting tube 221, the second collecting tube 222, and the third collecting tube 223, which reduces the number of mounting holes on the furnace wall of the diffusion furnace and reduces the risk of gas leakage in the diffusion furnace.

[0054] The mounting pipe 21 achieves a seal between the mounting pipe 21 and the mounting hole 11 through the flange 5 and the sealing ring 6. Both the flange 5 and the sealing ring 6 are fitted onto the mounting pipe 21 and located on the outside of the mounting hole 11. The flange 5 is fixedly connected to the outer edge of the mounting hole 11. The sealing ring 6 is squeezed between the outer edge of the mounting hole 11, the flange 5, and the mounting pipe 21, which facilitates the sealing between the mounting pipe 21 and the mounting hole 11, improves the sealing effect, and further reduces the risk of air leakage.

[0055] Flange 5 and mounting pipe 21 are integrally formed, eliminating the gap between flange 5 and mounting pipe 21, which can further reduce the risk of air leakage.

[0056] Two supports 12 are provided on the inner wall near the left end of the quartz furnace tube 1. The supports 12 are used to support the left end of the detection tube 2, which facilitates the installation of the detection tube 2 and improves the stability of the detection tube 2.

[0057] The concentration detection device 3 is a tunable semiconductor laser absorption spectrometer, which has a fast detection speed, with a single detection time of less than 1 second and an accuracy of up to ppm level, thus improving the detection speed.

[0058] The data processing unit 4 is connected to the process gas supply device of the diffusion furnace via a data transmission cable. It can automatically and dynamically optimize process parameters based on the detection results, reduce manual intervention, and improve product consistency and yield.

[0059] It should be noted that the flange 5 and the mounting pipe 21 are integrally formed. This is only a preferred arrangement and can be adjusted in practical applications. For example, the flange 5 and the mounting pipe 21 can be set separately. In the installed state, the sealing ring 6 is pressed between the outer edge of the mounting hole 11, the flange 5, and the mounting pipe 21, sealing the gaps between the mounting pipe 21 and the mounting hole 11, as well as between the flange 5 and the mounting pipe 21. Additionally, each detection pipe 2 includes three collection pipes. This is only a preferred arrangement and can be adjusted in practical applications. For example, each detection pipe 2 can include two, four, or more collection pipes. Furthermore, the quartz furnace tube 1 has two mounting holes 11 on its right end, and the online detection device includes two detection pipes 2. This is also a preferred arrangement and can be adjusted in practical applications. For example, the quartz furnace tube 1 has one mounting hole 11 on its right end, and the online detection device includes one detection pipe 2. The tunable semiconductor laser absorption spectrometer as the concentration detection device 3 is only a preferred setting. In practical applications, it can be adjusted. For example, the concentration detection device 3 can also be a Fourier transform infrared spectrometer, a chemiluminescence detector, or a mass spectrometer.

[0060] In another feasible embodiment, unlike the above embodiment, the mounting tube 21 does not include the second sealing plate 2122 and the first air inlet 2151, and the left end opening of the tube body 211 directly serves as the air inlet for air to enter the first cavity 2141.

[0061] In another feasible embodiment, unlike the above embodiment, the right end of the tube body 211 extends into the right side of the mounting hole 11. The first collecting tube 221, the second collecting tube 222, and the third collecting tube 223 are inserted into the tube wall near the right end of the tube body 211 and extend to the right. The left end of the first collecting tube 221 is inserted into the first cavity 2141, the left end of the second collecting tube 222 is inserted into the second cavity 2142, and the left end of the third collecting tube 223 is inserted into the third cavity 2143.

[0062] In another feasible embodiment, unlike the above embodiment, the mounting tube 21 does not include the second sealing plate 2122, the first partition plate 2131, the second partition plate 2132, the first cavity 2141, the second cavity 2142, the third cavity 2143, the first air inlet 2151, the second air inlet 2152, and the third air inlet 2153. The left end of the tube 211 is located to the right of the left end of the third collecting tube 223. That is, the air inlet ends of the first collecting tube 221, the second collecting tube 222, and the third collecting tube 223 all extend out of the tube 211 and are located at the furnace mouth, the furnace middle, and the furnace tail positions of the quartz furnace tube 1, respectively.

[0063] In another feasible embodiment, unlike the above embodiment, the flange 5 is not provided. The sealing ring 6 is sleeved on the mounting pipe 21 and squeezed between the inner wall of the mounting hole 11 and the outer wall of the mounting pipe 21, thereby achieving a seal between the mounting pipe 21 and the mounting hole 11.

[0064] In another feasible embodiment, unlike the above embodiment, the support 12 is not provided on the inner wall of the quartz furnace tube 1.

[0065] In another feasible embodiment, unlike the embodiments described above, the data processing unit 4 is not communicatively connected to the process gas supply device of the diffusion furnace via a data transmission cable. Instead, the data processing unit 4 is equipped with a display screen that shows whether the diffusion process parameters need adjustment and, if adjustment is required, displays the target diffusion process parameters. Thus, the operator needs to adjust the diffusion process parameters according to the target diffusion process parameters displayed on the screen.

[0066] The technical solution of this utility model has been described in conjunction with the preferred embodiments shown in the accompanying drawings. However, it will be readily understood by those skilled in the art that the protection scope of this utility model is obviously not limited to these specific embodiments. Without departing from the principle of this utility model, those skilled in the art can make equivalent changes or substitutions to the relevant technical features, and the technical solutions after these changes or substitutions will all fall within the protection scope of this utility model.

Claims

1. An on-line detecting device for process gas concentration of a diffusion furnace, characterized by, The diffusion furnace wall is provided with mounting holes (11), and the online detection device includes: The detection tube (2) includes an installation tube (21) that can be inserted through the mounting hole (11) and sealed to the mounting hole (11) and at least two collection tubes integrally formed with the installation tube (21), wherein the first end of the installation tube (21) is closed and exposed outside the mounting hole (11), and the air inlet ends of the at least two collection tubes are respectively inserted from the first end of the installation tube (21) to different positions inside the diffusion furnace; Concentration detection device (3), which is used to receive the process gas collected by the collection tube and detect the concentration of the process gas; The data processing unit (4) is used to receive and analyze the detection results of the concentration detection device (3) and output the target diffusion process parameters when it is determined that the diffusion process parameters need to be adjusted.

2. The online detection device for process gas concentration in a diffusion furnace according to claim 1, characterized in that, A flange (5) and a sealing ring (6) are respectively fitted on the mounting tube (21), wherein the flange (5) is adapted to be fixedly connected to the outer edge of the mounting hole (11), and the sealing ring (6) is squeezed between the outer edge, the flange (5) and the mounting tube (21) to achieve a sealed connection between the mounting tube (21) and the mounting hole (11).

3. The apparatus for on-line detection of process gas concentration of a diffusion furnace according to claim 2, wherein The flange (5) and the mounting pipe (21) are integrally formed.

4. The apparatus for on-line detection of process gas concentration of a diffusion furnace according to any one of claims 1 to 3, characterized in that, The mounting tube (21) includes a first sealing plate (2121) and a tube body (211) extending from a first side of the first sealing plate (2121) in a direction away from the first sealing plate (2121). The air inlet end of the collecting tube passes through the first sealing plate (2121) and extends in the direction of extension of the tube body (211).

5. The apparatus for on-line detection of process gas concentration of a diffusion furnace according to any one of claims 1 to 3, characterized in that, The second end of the mounting tube (21) is closed. A partition (2131, 2132) is provided inside the mounting tube (21). The partition (2131, 2132) divides the inside of the mounting tube (21) into cavities (2141, 2142, 2143) with the same number of collecting tubes. An air inlet (2151, 2152, 2153) is provided on the tube wall of the mounting tube (21) corresponding to the cavities (2141, 2142, 2143). The air inlet ends of at least two collecting tubes are inserted into the cavities (2141, 2142, 2143) one by one.

6. The apparatus for on-line detection of process gas concentration of a diffusion furnace according to any one of claims 1 to 3, characterized by, The at least two collection pipes include a first collection pipe (221), a second collection pipe (222), and a third collection pipe (223), which are used to collect process gases at the furnace mouth, furnace middle, and furnace tail positions of the diffusion furnace, respectively.

7. The apparatus for on-line detection of process gas concentration of a diffusion furnace according to any one of claims 1 to 3, characterized by, The concentration detection device (3) is a tunable semiconductor laser absorption spectrometer; and / or The data processing unit (4) is capable of communicating with the process gas supply device of the diffusion furnace.

8. The apparatus for on-line detection of process gas concentration of a diffusion furnace according to any one of claims 1 to 3, wherein a plurality of said mounting holes (11) are provided on the furnace wall of the diffusion furnace, and The online detection device includes a detection tube (2) corresponding to each of the mounting holes (11).

9. A diffusion furnace characterized by comprising: The diffusion furnace includes an online detection device for the process gas concentration of the diffusion furnace according to any one of claims 1 to 8.

10. The diffusion furnace according to claim 9, characterized by A support (12) is provided on the inner side of the furnace wall of the diffusion furnace, and the support (12) is used to support the detection tube (2) of the online detection device.

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