Mechanically coupled sample holder and tunneling scanning microscope

Abstract

The utility model provides a kind of mechanical coupling sample support and tunnel scanning microscope, mechanical coupling sample support is used to transmit auxiliary sample and / or sample to be measured to the detection position of the probe adapted in tunnel scanning microscope, mechanical coupling sample support includes: modification sample support and cleavage sample support, modification sample support includes first bottom plate, first boss formed on first bottom plate and places auxiliary sample;Cleavage sample support includes second bottom plate, second boss formed on second bottom plate and places sample to be measured;First bottom plate forms first flat hole spare, for first flat hole spare horizontal insertion to be movably connected with the second clamping groove of cleavage sample support, first boss is flush with second boss.The utility model realizes the continuous detection to different sample to be measured, and reduces the displacement along Z axis, shortens the probe stroke and improves the positioning accuracy and detection efficiency to probe.

Description

Technical Field

[0001] This utility model relates to the technical field of delivery components for tunneling scanning microscopes, and more specifically to a mechanically coupled sample holder located at the detection position adapted to the probe of the tunneling scanning microscope and the tunneling scanning microscope. Background Technology

[0002] Scanning Tunneling Microscopy (STM) achieves atomic-resolution imaging by detecting changes in the quantum tunneling current between a probe and the sample. The STM probe operates in an ultra-vacuum cryogenic environment. The quantum tunneling current between the probe tip and the sample holder, formed by the quantum tunneling effect, provides imagery of the sample's surface morphology and various physical properties. One of the key factors determining STM imaging resolution is the atomic-level sharpness of the probe tip. Ideally, the tip should be in a single-atom state, and the tip should be kept clean and sharp. Simultaneously, the probe must be kept clean to prevent contamination or structural instability, especially at the tip, to accurately reproduce the morphological information of the sample's surface layer.

[0003] During the movement and scanning of the sample surface, the probe of an STM (Surface Mount Technology) suffers from tip blunting (i.e., loss of the ideal state of single-atom loss) and adhesion contamination (e.g., adsorption of organic matter or oxides from the sample surface). Existing technologies typically use gold single crystals to modify the probe tip, preventing oxide layer formation and maintaining its sharpness. However, because the probe operates in an ultra-vacuum cryogenic detection chamber, and when the sample surface morphology is complex, leading to long detection times, it is necessary to frequently remove the sample holder from the sample holder, replace it with a gold single crystal, and reinsert it into the ultra-vacuum cryogenic detection chamber. After the probe is modified, the sample holder carrying the sample is then reinserted into the detection chamber. This process involves frequent waiting for temperature equilibration and ultra-vacuum environment reconstruction. Therefore, existing STM sample holders suffer from numerous drawbacks, including cumbersome operation due to frequent sample and gold single crystal replacements, low detection efficiency, and excessively long detection times for samples with complex surface morphologies and large sizes. Therefore, during repeated sample delivery, it is necessary to re-establish temperature equilibrium, which can lead to deformation and thermal stress damage of the sample due to rapid temperature changes. Furthermore, the positioning accuracy of the sample cannot be guaranteed at the nanometer or even atomic level between the two delivery processes.

[0004] CN211086346U discloses a double-layer sample stage for a scanning tunneling microscope probe, which comprises two sample stages arranged vertically and horizontally offset. This prior art requires driving the probe to displace along the Z-axis during the reciprocating process of probe detection and modification to repeatedly modify and detect the gold single crystal and the sample to be tested in the two sample holders. This prior art places stringent requirements on the driving, position, and stroke control of the probe. Because it requires displacement along the Z-axis, the probe's displacement stroke is too long, resulting in low detection efficiency and a long detection time for the same sample.

[0005] In view of this, it is necessary to improve the sample holder located below the probe in the existing STM technology to solve the above problems. The above introduction to the background technology is only for the purpose of clearly and completely explaining the technical solution of this utility model and facilitating the understanding of those skilled in the art. It should not be assumed that the above technical solutions are known to those skilled in the art simply because these solutions have been described in the background technology section of this utility model. Utility Model Content

[0006] The purpose of this invention is to disclose a mechanically coupled sample holder and its tunneling scanning microscope to solve the aforementioned technical problems. In particular, it aims to shorten the probe travel and improve the positioning accuracy of the probe, thereby improving the detection efficiency of STM. At the same time, it enables the sample holder carrying the auxiliary sample to be coupled and connected to another sample holder carrying different test samples, so as to achieve continuous detection of different test samples.

[0007] In a first aspect, this invention provides a mechanically coupled sample holder for delivering auxiliary samples and / or samples to be tested to a detection position adapted to a probe in a scanning tunneling microscope, comprising:

[0008] The modified sample holder includes a first base plate and a first protrusion formed on the first base plate for placing an auxiliary sample; the cleaved sample holder includes a second base plate and a second protrusion formed on the second base plate for placing a sample to be tested.

[0009] The first base plate forms a first flat hole and a second retaining groove for horizontal insertion of the first flat hole to movably connect the cleaved sample holder, and the first boss and the second boss are flush.

[0010] As a further improvement of this utility model, the auxiliary sample is placed on the first boss by welding or pressing, and the sample to be tested is placed on the second boss by vertical or parallel bonding.

[0011] As a further improvement of this utility model, the sample to be tested is perpendicular to the second boss, and the second boss includes:

[0012] A base, and a pressure block that can be movably separated from and joined to the base;

[0013] Wherein, the base and / or the pressure block form an insertion groove on one and / or both sides of the joint surface formed by the movable separation and joining for the sample to be tested to be inserted along its thickness direction, and the base and the pressure block clamp the sample to be tested.

[0014] As a further improvement of this utility model, the second boss includes: a base connected to the second base plate, two second pressing pieces facing each other and pressing the sample to be tested, and a second locking member passing through the second pressing pieces and screwed and fixed to the base;

[0015] The sample to be tested is attached to the base in parallel.

[0016] As a further improvement of this utility model, the second boss includes a base connected to the second base plate, the sample to be tested is welded and fixed to the base, and the sample to be tested is parallel to and attached to the base.

[0017] As a further improvement of this utility model, the modified sample holder also includes a first pressing piece that is arranged opposite to and presses the auxiliary sample, and a first locking member that passes through the first pressing piece and is screwed and fixed to the first boss.

[0018] As a further improvement of this utility model, the second base plate forms a second flat hole, and the first base plate forms a first holding groove for the second flat hole to be horizontally inserted to movably connect the modified sample holder.

[0019] As a further improvement of this utility model, the first base plate is flush with the second base plate, the first retaining groove and the first protrusion are formed on both sides of the first base plate, and the second retaining groove and the second protrusion are formed on both sides of the second base plate.

[0020] As a further improvement of this utility model, the auxiliary sample is a thin sheet component made of gold single crystal or a composite thin sheet component with a gold single crystal coating layer; the sample to be tested is a semiconductor device.

[0021] As a second aspect, this utility model also discloses a tunneling scanning microscope, comprising: a sample holder, a transfer rod, and a mechanically coupled sample holder as described in the first aspect;

[0022] The transmission rod is movably connected to the mechanically coupled sample holder to drive the mechanically coupled sample holder between the detection position adapted to the probe and the sample holder, thereby performing the transmission of auxiliary samples and / or samples to be tested.

[0023] Compared with the prior art, the beneficial effects of this utility model are:

[0024] First, by connecting the modified sample holder and the cleaved sample holder, auxiliary samples and / or test samples can be delivered to the detection position adapted to the probe. Since the modified sample holder can be connected to the cleaved sample holder that carries different test samples, continuous detection of different test samples is achieved.

[0025] Secondly, since the first and second protrusions are flush, the probe can move within the plane defined by the X and Y axes during the morphology detection and modification of the sample, thereby reducing the displacement along the Z axis. This is especially noticeable when the sample is placed on the second protrusion in a parallel fit. As a result, the displacement of the driving mechanism of the probe along the Z axis is reduced to a minimum, which shortens the probe stroke and improves the positioning accuracy of the probe, thus improving the detection efficiency of STM. Attached Figure Description

[0026] Figure 1 This is the front view of the sample holder;

[0027] Figure 2 A simplified schematic diagram of the sample holder, mechanically coupled sample tray, and probe as a whole;

[0028] Figure 3 This is a perspective view of one embodiment of the mechanically coupled sample holder of this utility model.

[0029] Figure 4 for Figure 1 A bottom view of the mechanically coupled sample holder in the image;

[0030] Figure 5 for Figure 1 A top view of the mechanically coupled sample holder in the image;

[0031] Figure 6 For along Figure 5 Sectional view along the middle AA direction;

[0032] Figure 7 A perspective view of the pressure block is omitted for the cleavage sample holder in a mechanically coupled sample holder.

[0033] Figure 8 This is a three-dimensional view of the sample to be tested;

[0034] Figure 9 This is a perspective view of the mechanically coupled sample holder of this utility model in another embodiment;

[0035] Figure 10 for Figure 9 A bottom view of the mechanically coupled sample holder in the image;

[0036] Figure 11 it is a sectional view along Figure 10 line B-B in the drawings. Detailed Embodiments

[0037] The present utility model will be described in detail below with reference to the various embodiments shown in the accompanying drawings. However, it should be noted that these embodiments do not impose any limitation on the present utility model. Any equivalent changes or substitutions in functions, methods or structures made by those skilled in the art based on these embodiments shall fall within the protection scope of the present utility model. The viewing angles presented in the accompanying drawings of the present utility model do not constitute a limitation on the technical solution, and are merely presented for more convenient illustration of the structure.

[0038] referring to Figure 1 and Figure 2 shown in the figures, the present utility model discloses a specific embodiment of a scanning tunneling microscope. The scanning tunneling microscope comprises: a sample holder 300, a transfer rod 401, and the mechanically coupled sample holder 100 (or 100a) described in any of the following embodiments. The transfer rod 401 is movably connected to the mechanically coupled sample holder 100 (or 100a), so as to drive the mechanically coupled sample holder 100 (or 100a) to transfer the auxiliary sample 1 and / or the sample to be tested 2 / 2a between the detection position 201 adapted to the probe 200 and the sample holder 300. It can be understood that components or systems such as the ultra-high vacuum pump set, liquid helium cooling system, probe driving system, sample introduction chamber and signal processing circuit included in the scanning tunneling microscope are all in the prior art, and will not be repeated herein.

[0039] Specifically, the sample holder 300, the transfer rod 401 and the mechanically coupled sample holder 100 (or 100a) all operate in the observation chamber 1000 of a scanning tunneling microscope (hereinafter referred to as "STM"). The observation chamber 1000 forms an ultra-high vacuum low-temperature environment. The sample holder 300 is of a multi-layer structure, for independently and horizontally storing a plurality of cleavage sample holders 20 which are arranged vertically and each has a sample to be tested 2 (or 2a) placed thereon. Referring to Figure 10 shown in the figure, the sample holder 300 includes a vertical column 301 and a plurality of brackets 302. The plurality of brackets 302 are horizontally arranged and connected to the vertical column 301. Each bracket 302 is formed with a receiving notch 303 for stably placing the cleavage sample holder 20. The transfer rod 401 follows the transfer path indicated by the two-way arrow 400 to perform the operation of transferring the auxiliary sample 1 and / or the sample to be tested 2 (or 2a) to the detection position 201, including transferring the auxiliary sample 1 and / or the sample to be tested 2 (or 2a) in and out. The aforementioned receiving notch 303 is configured to independently receive one modified sample holder 10 or one cleavage sample holder 20.

[0040] The sample holder 300 moves up and down along the Z-axis in the direction indicated by the bidirectional arrow 500, switching the sample holder 300 and forming different cleavage sample holders 20 with the transfer rod 401. Driven by the drive mechanism, the probe 200 performs morphological inspection on the sample 2 (or 2a) to be tested, placed on the mechanically coupled sample holder 100 (or 100a) on the scanning stage. After completing several morphological inspections, it translates along the horizontal plane defined by the X and Y axes to move above the modified sample holder 10, to modify the probe tip of the probe 200 if it is blunted, contaminated, or structurally unstable. During the detection of the sample 2 (or 2a), the probe 200 is electrically connected to an external power supply 600 and performs quantum tunneling current imaging based on the quantum tunneling effect. Since the principle of quantum tunneling current imaging is not the inventive point of this invention, and the imaging principle of STM in the prior art can be used, it will not be elaborated here.

[0041] The mechanically coupled sample holder 100 (or mechanically coupled sample holder 100a) is used to deliver an auxiliary sample 1 to the detection position 201 adapted to the probe 200 in the tunneling scanning microscope, or to deliver a sample 2 to be tested (or 2a).

[0042] In this invention, the detection position includes the position corresponding to the detection of the quantum tunneling current imaging of the sample under test based on the quantum tunneling effect to form morphological information by the probe 200; at the same time, the detection position includes the position corresponding to the lateral movement of the probe 200 to the modified sample holder 10 to perform modification of the tip of the probe 200.

[0043] Combination Figure 2 or Figure 9 As shown, during the morphology detection of the sample 2 (or 2a) and the modification of the probe 200, both the probe 200 and the mechanically coupled sample holder 100 (or 100a) operate within the observation chamber 1000 of the STM. The observation chamber 1000 forms an ultra-vacuum low-temperature environment. Optionally, the probe 200 is vertically positioned above the mechanically coupled sample holder 100 (or 100a). In the embodiments of this utility model, "transfer" refers to the input or output of the auxiliary sample 1 and / or the sample 2 (or 2a) to be tested.

[0044] Figures 3 to 8 This illustration shows a specific embodiment of a mechanically coupled sample holder 100 according to the present invention. In this embodiment, the mechanically coupled sample holder 100 is used to deliver an auxiliary sample 1 and / or a sample 2 to be tested to the detection position 201 adapted to the probe 200 in a scanning tunneling microscope.

[0045] The mechanically coupled sample holder 100 includes a modified sample holder 10 and a cleaved sample holder 20, which are coupled and movable. The components of both the modified sample holder 10 and the cleaved sample holder 20 are made entirely of tantalum or molybdenum. In actual use, both the modified sample holder 10 and the cleaved sample holder 20 maintain a horizontal orientation.

[0046] Specifically, the mechanically coupled sample holder 100 includes a modified sample holder 10 located at the end of the conveying direction and at least one cleaved sample holder 20 located at the proximal end of the conveying direction, which are mechanically coupled and movably separable. A conveyor rod 401 is movably connected to the cleaved sample holder 20 to convey the auxiliary sample 1 and the sample 2 to be tested to the detection position 201. The scanning stage can simultaneously carry one or more cleaved sample holders 20 (or 20a), or simultaneously carry one modified sample holder 10 and one or more cleaved sample holders 20 (or 20a). The aforementioned modified sample holder 10 and cleaved sample holder 20 (or 20a) are conveyed one by one to the scanning stage via the conveyor rod 401 and then released, and connected end-to-end to achieve a mechanically coupled movable connection. After the auxiliary sample 1 and / or one or more test samples 2 are sent into the observation chamber 1000 of the STM, the mechanically coupled sample holder 100 is placed on the scanning stage (not shown), and the probe 200 is moved above the test sample 2 to perform morphology detection. The electrical signal obtained from the morphology detection is then passed through the peripheral circuit (not shown) to form a morphology image characterizing the surface of the test sample 2.

[0047] The aforementioned "proximal end" of the transmission direction refers to the direction indicated by the transmission rod 401 as it moves horizontally towards the scanning stage. Figure 11 Taking the perspective of the image as an example, the right end of the conveyor rod 401 is the near end of the conveying direction. After the morphology detection of the cross-section 203 of the sample 2 to be tested (or the surface 202 of the sample 2 to be tested in subsequent embodiments) is completed, the second flat hole 26 can be inserted through the conveyor rod 401 to lock the cleavage sample holder 20, and the modification sample holder 10 can be locked by the holding mechanism (not shown) configured on the inspection table. The conveyor rod 401 is pulled laterally towards the cleavage sample holder 20 to achieve lateral separation between the cleavage sample holder 20 and the modification sample holder 10. Then, the conveyor rod 401 moves horizontally away from the scanning stage and conveys one cleavage sample holder 20 that has completed the morphology detection to the... Figure 1 and Figure 2 The sample holder 300 is moved horizontally, and another cleavage sample holder 20 to be tested is reinserted via the transfer rod 401. This continues until the first flat hole 16 of the modified sample holder 10, remaining on the scanning stage, is inserted into the second holding groove 210 of the new cleavage sample holder 20. This achieves a mechanical coupling connection between the new modified sample holder 10 and the cleavage sample holder 20, and subsequent morphology detection and probe modification are performed via the probe 200.

[0048] The holding mechanism configured on the aforementioned inspection table can employ existing technologies such as mechanical grippers or electrically actuated grippers, as long as the holding mechanism can maintain the relative positional relationship between the modified sample holder 10 and / or the cleaved sample holder 20 and the inspection table. Since the holding mechanism is not the inventive point of this utility model, it is not described in detail in the embodiments of this utility model.

[0049] The surface of the aforementioned sample 2 to be tested can be either the surface 202 of the sample 2 to be tested or the cross-section 203 of the sample 2 to be tested. When testing the surface 202 of the sample 2 to be tested, the sample 2 to be tested is fitted onto the cleaved sample holder 20 (see reference). Figure 9 When testing the cross-section 203 of the sample 2 to be tested, the sample 2 to be tested is placed perpendicularly on the cleavage sample holder 20 (see reference). Figure 3 This enables the present invention to perform morphological detection on the surface 202 and cross-section 203 of the sample 2 under test, thereby improving the applicability of the surface morphological detection of the sample 2 under test.

[0050] In this embodiment, the modified sample holder 10 includes a first base plate 11 and a first protrusion 12. The first protrusion 12 is formed on the first base plate 11 and is used to place the auxiliary sample 1. The cleavage sample holder 20 includes a second base plate 21 and a second protrusion. The second protrusion is formed on the second base plate 21 and is used to place the sample 2 to be tested. Specifically, the second protrusion is flush with the first protrusion 12, the first base plate 11 is flush with the second base plate 12, and the first base plate 11 and the second base plate 21 have the same shape, size, and thickness.

[0051] The first base plate 11 forms a first flat hole 16 and a first retaining groove 110. The first retaining groove 110 allows the second flat hole 26 to be horizontally inserted to movably connect the cleaved sample holder 20. The second base plate 21 forms a second flat hole 26 and a second retaining groove 210 for the first flat hole 16 to be horizontally inserted to movably connect the modified sample holder 10. The first retaining groove 110 and the first boss 12 are formed on both sides of the first base plate 11, and the second retaining groove 210 and the second boss are formed on both sides of the second base plate 12. The first retaining groove 110 and the second retaining groove 210 have the same shape, size, and thickness and are arranged in the same direction. The first flat hole 16 and the second flat hole 26 have the same shape, size, and thickness and are arranged in the same direction. The first flat hole 16 and the first base plate 11 form an integral structure and have a first through hole 161; similarly, the second flat hole 26 and the second base plate 21 form an integral structure and have a second through hole 261. The width and thickness of the first flat hole 16 (along the perpendicular to) Figure 4 The width and thickness of the second holding slot 210 (adapted to the paper orientation) are perpendicular to the paper surface direction. Figure 4 (in the direction of the paper), the width and thickness of the second flat hole 26 (along the direction perpendicular to the paper surface), Figure 4The paper orientation) is adapted to the width of the first card slot 110 (along the perpendicular to the paper orientation). Figure 4 (The direction of the paper). The extension directions of the first flat hole member 16 and the second flat hole member 26 are opposite to the transmission rod 401 that forms a blind hole for the insertion of the first flat hole member 16 or the second flat hole member 26.

[0052] In this embodiment, since the first protrusion 12 and the base 22 and pressure block 23 constituting the second protrusion are flush, and the first protrusion 12 holds the modified sample 1 and the second protrusion holds the sample to be tested 2, the probe 200 moves to the detection position 201 on the surface of the sample to be tested 2 to detect the sample to be tested 2, and moves to the surface of the modified sample 1; during the modification process of the probe 200, it can move along the plane defined by the X-axis and Y-axis, thereby reducing the displacement along the Z-axis. This is achieved when the sample to be tested 2 is placed on the second protrusion in a parallel and fitted manner (see reference). Figure 9 In the scenario shown, the technical advantage of reducing displacement along the Z-axis is particularly evident. It should be noted that, combined with... Figure 2 As shown, during the process of morphology detection and tip modification at the detection positions corresponding to the modified sample holder 10 and the cleaved sample holder 20, the probe 200 needs to be driven to move slightly along the Z-axis to avoid the tip of the probe 200 scratching the surface of the sample 2 (or 2a) to be tested. The amount of movement of the aforementioned slight Z-axis movement is extremely small, so the interruption time of morphology detection caused by the sample 2 (or 2a) to be tested can be ignored.

[0053] This minimizes the displacement of the drive mechanism of the probe 200 along the Z-axis, thus shortening the probe 200's travel. Since a large displacement of the probe 200 along the Z-axis is unnecessary, and even when the test sample 2 and the modified sample 1 are aligned, vertical movement along the Z-axis is not required, improving the positioning accuracy of the probe 200 and increasing the STM's detection efficiency. For testing scenarios involving large or complex-shaped semiconductor devices, the probe 200 can be driven to reciprocate above the modified sample holder 10 and the cleaved sample holder 20 with almost no vertical displacement along the Z-axis, enabling continuous and long-term testing of the test sample 2. Furthermore, because the modified sample holder 10 and the cleaved sample holder 20 are mechanically coupled, after the transmission rod 401 has finished testing one of the test samples 2 placed on the cleaved sample holder 20, it can retain the modified sample holder 10 on the scanning stage and only separate the tested cleaved sample holder 20 from the modified sample holder 10, returning it to the original stage. Figure 2 The sample holder 300 is then used. A new cleavage sample holder 20 is then inserted from the sample holder 300, fed into the scanning stage, and movably coupled with the modified sample holder 10 to perform subsequent morphology detection and probe modification.

[0054] The sample holder 300 can pre-load multiple cleaved sample holders 20 containing samples 2 to be tested, and perform morphology inspection on each sample 2 placed on all the cleaved sample holders 20 one by one. Probe modification refers to applying a 3-5V pulsed voltage to the tip of a passivated or contaminated probe, utilizing the field evaporation effect to cause metal atoms at the tip to migrate to the surface of the gold single crystal. The probe geometry is then reshaped by controlled electrochemical etching. Typically, the probe 200 needs to undergo probe modification once every 4-6 hours of morphology detection to ensure that the resolution of the final morphology image is maintained at the atomic level (0.1nm) and to avoid generating spurious topological signals.

[0055] It should be noted that when the sample 2 to be tested is inserted vertically into the insertion slot 24, the width of the sample 2 to be tested can be appropriately reduced so that the cross-section 203 of the sample 2 to be tested is on the same horizontal plane as the surface of the modified sample 1. Therefore, during the reciprocating motion of the probe 200 between the sample 2 to be tested and the modified sample 1, almost no vertical movement occurs along the Z-axis. This not only reduces the difficulty of driving and controlling the probe 200 and simplifies the program, but also shortens the detection interruption time consumed by the probe 200 after several morphology inspections of the sample 2 to be tested, when tip blunting, contamination, or structural instability occurs, requiring it to move above the modified sample 1 for tip modification. This improves the detection efficiency of STM. Furthermore, this mechanically coupled sample holder 100 also solves the technical problems of excessively long detection time, low detection accuracy, and thermal stress damage caused by repeated disruption of the ultra-vacuum low-temperature environment during the tip modification process of the probe 100. In order to further shorten the translation amount of probe 200 in the horizontal direction, the modified sample 1 and the sample to be tested 2 (or 2a) are rectangular, and their long sides are perpendicular to the lateral movement direction of probe 200. This allows the translation amount of probe 200 to be further reduced when probe 200 moves back and forth between modified sample holder 10 and cleaved sample holder 20.

[0056] exist Figure 4 When the modified sample holder 10 and the cleaved sample holder 20 are mechanically coupled and connected, the first base plate 11 and the second base plate 21 can fit together so that the first flat hole 16 can be completely embedded in the second holding groove 210. Figure 2 The end of the conveyor rod 401 forms a blind hole (not shown) for insertion of the first flat hole 16 or the second flat hole 26. A movable ball (not shown) is disposed within the blind hole and can be movably held in the first through hole 161 or the second through hole 261. The end of the conveyor rod 401 forming the blind hole moves relative to the first flat hole 16 or the second flat hole 26, causing the first flat hole 16 or the second flat hole 26 to be inserted into the blind hole and locked by the ball, thereby allowing the conveyor rod 401 to move along... Figure 11Along the transmission path indicated by the two-way arrow 400, an operation of transporting the auxiliary sample 1 and / or the sample 2 to be measured to the detection position 201 is performed, and includes transferring the auxiliary sample 1 and / or the sample 2 to be measured in and out.

[0057] Reference Figure 3 as shown in Figure 5 , the auxiliary sample 1 is a sheet member made of single crystal gold or a composite sheet member formed with a single crystal gold coating layer. The sample 2 to be measured is a semiconductor device, such as a cleaved gallium nitride wafer or a silicon-based wafer. For example, the auxiliary sample 1 can use a mica sheet as a support structure, and a hundred-nanometer thick single crystal gold is evaporated on the support structure (not shown), and the Miller index of the single crystal gold is (111), so as to facilitate cutting and matching the shape and size of the sample holder. Single crystal gold is relatively soft, and can usually be fixed by welding with a metal strip (such as tantalum or molybdenum) or pressed and fixed by two first pressing pieces 14. The repairing treatment of single crystal gold includes argon etching and annealing of single crystal gold. The purpose of argon etching is to remove materials of several atomic layers on the surface of single crystal gold (including single crystal gold and pollutants), and then high-temperature annealing allows the atoms on the surface of single crystal gold to reconstruct, achieving atomic-level flatness. The loss of single crystal gold comes from the loss of several atomic layers to several nanometers of atoms in each argon etching process. Only after a sufficient number of argon etching times, when the single crystal gold is thinned to a thickness of tens of nanometers, it is necessary to replace the single crystal gold or the auxiliary sample 1.

[0058] Optionally, the auxiliary sample 1 is placed on the first boss 12 by welding or pressing, and the sample 2 to be measured is placed on the second boss in a vertical or parallel bonding manner. The modified sample holder 10 further comprises oppositely arranged first pressing pieces 14 for pressing the auxiliary sample 1 and first locking members 13, the first locking members 13 penetrate through the first pressing pieces 14 and are screwed and fixed with the first boss 12. The first locking member 13 can be a bolt, which is screwed into the first base plate 11, so as to reliably fix the two first pressing pieces 14 on the surface of the first boss 12, and press the auxiliary sample 1 through the two first pressing pieces 14. When the thickness of the single crystal gold on the surface of the auxiliary sample 1 is too thin, the first locking member 13 can be unscrewed to replace with a new auxiliary sample 1.

[0059] The sample 2 to be measured is perpendicular to the second boss, so that the probe 200 can be used to Figure 8 perform morphology detection on the cross-section 203 of the sample 2 to be measured herein. The second boss comprises: a base 22 and a pressing block 23, the pressing block 23 is movably separated from and combined with the base 22, and the surfaces of the base 22 and the pressing block 23 away from the second base plate 21 (i.e., the surface on the side close to the probe 200) are flush; wherein, an insertion slot 24 for inserting the sample 2 to be measured along its thickness direction is formed on one side and / or both sides of the joint surface 3 formed by movable separation and combination of the base 22 and / or the pressing block 23, and the base 22 and the pressing block 23 clamp the sample 2 to be measured, so that the sample 2 to be measured is vertically inserted and arranged on the cleaved sample holder 2. For example, refer to Figure 7As shown, the insertion slot 24 can be formed by recessing into one side of the base 22; the bolt 25 passes through the pressure block 23 and is screwed into the blind hole with internal thread (not marked in the figure) corresponding to the base 22; the bolt 25 is loosened to separate the base 22 from the pressure block 23 so that the test sample 2 held in the insertion slot 24 can be replaced.

[0060] The modified sample holder 10 and the cleaved sample holder 20 can be fed into the scanning stage respectively by means of the conveyor rod 401. Since the first flat hole 16 formed by the modified sample holder 10 and the cleaved sample holder 20 is arranged in the same direction as the second side workpiece 26, and is adapted to... Figure 2 The end of the transmission rod 401 forms a blind hole for the insertion of the first flat hole 16 or the second flat hole 26, so the modified sample holder 10 and the cleaved sample holder 20 can be taken out respectively.

[0061] Figures 9 to 11 This illustration shows another specific embodiment of a mechanically coupled sample holder 100a according to the present invention. In this embodiment, the mechanically coupled sample holder 100a is used to deliver an auxiliary sample 1 and / or a sample 2a to be tested to a detection position 201 adapted to a probe 200 in a scanning tunneling microscope. The mechanically coupled sample holder 100a includes a modified sample holder 10 and a cleaved sample holder 20. The modified sample holder 10 includes a first base plate 11 and a first boss 12. The first boss 12 is formed on the first base plate 11 and is used to place the auxiliary sample 1. The cleaved sample holder 20 includes a second base plate 21 and a second boss. The second boss is formed on the second base plate 21 and is used to place the sample 2a to be tested. The first base plate 11 forms a first flat hole 16 and a first retaining groove 110. The first retaining groove 110 allows the first flat hole 16 to be horizontally inserted to movably connect the cleaved sample holder 20. The first boss 12 and the second boss are flush.

[0062] The second protrusion includes: a base 27, a second locking member 28, and two second pressing pieces 29. The base 27 is connected to the second base plate 21. The two second pressing pieces 29 are arranged opposite each other and press the sample to be tested 2a. The second locking member 28 passes through the second pressing pieces 29 and is screwed and fixed to the base 27. The sample to be tested 2a is parallel to and attached to the base 27.

[0063] Specifically, in this embodiment, the second boss includes a base 27 connected to the second base plate 21. The sample to be tested 2a is welded and fixed to the base 27, and the sample to be tested 2a is parallel and attached to the base 27. The second locking member 28 is a bolt that passes through the base 27 and is screwed into the second base plate 21 to reliably fix the two second pressing pieces 29 to the surface of the base 27 and to press the sample to be tested 2a by the two second pressing pieces 29. The second locking member 28 can be unscrewed to replace the new sample to be tested 2a.

[0064] Combination Figure 2 and Figure 9 The probe 200 performs a translational movement to move it to the surface 202 of the sample 2a to be tested for morphology detection. After several tests on the sample 2a, if tip passivation, contamination, or structural instability occurs, it needs to be moved above the modified sample 1 for tip modification. This process of morphology detection and probe modification is repeated. The mechanically coupled sample holder 100a provided in this embodiment has the same technical solution as the mechanically coupled sample holder 100 in the aforementioned embodiment, as described in the first specific embodiment above, and will not be repeated here.

[0065] The detailed descriptions listed above are merely specific illustrations of feasible embodiments of this utility model and are not intended to limit the scope of protection of this utility model. It should be understood that although this specification describes embodiments, not every embodiment contains only one independent technical solution. This narrative style is merely for clarity. Those skilled in the art should consider the specification as a whole, and the technical solutions in each embodiment can be appropriately combined to form other embodiments that can be understood by those skilled in the art.

Claims

1. A mechanically coupled sample holder for delivering auxiliary samples and / or samples to be tested to a detection position adapted to a probe in a scanning tunneling microscope, characterized in that, include: The modified sample holder includes a first base plate and a first protrusion formed on the first base plate for placing an auxiliary sample; the cleaved sample holder includes a second base plate and a second protrusion formed on the second base plate for placing a sample to be tested. The first base plate forms a first flat hole and a second retaining groove for horizontal insertion of the first flat hole to movably connect the cleaved sample holder, and the first boss and the second boss are flush.

2. The mechanically coupled sample holder of claim 1, wherein, The auxiliary sample is placed on the first boss by welding or pressing, and the sample to be tested is placed on the second boss by vertical or parallel bonding.

3. The mechanically coupled sample holder of claim 2, wherein, The sample to be tested is perpendicular to the second protrusion, and the second protrusion includes: A base, and a pressure block that can be movably separated from and joined to the base; Wherein, the base and / or the pressure block form an insertion groove on one and / or both sides of the joint surface formed by the movable separation and joining for the sample to be tested to be inserted along its thickness direction, and the base and the pressure block clamp the sample to be tested.

4. The mechanically coupled sample holder of claim 2, wherein, The second protrusion includes: a base connected to the second base plate, two second holding plates facing each other and pressing the sample to be tested, and a second locking member passing through the second holding plates and screwed and fixed to the base; The sample to be tested is attached to the base in parallel.

5. The mechanically coupled sample holder of claim 2, wherein, The second boss includes a base connected to the second base plate, the sample to be tested is welded and fixed to the base, and the sample to be tested is parallel to and attached to the base.

6. The mechanically coupled sample holder of claim 4 or 5, wherein, The modified sample holder also includes a first holding piece that is disposed opposite to and holds the auxiliary sample, and a first locking member that passes through the first holding piece and is screwed and fixed to the first boss.

7. The mechanically coupled sample holder of claim 1, wherein, The second base plate forms a second flat hole, and the first base plate forms a first retaining groove for the second flat hole to be horizontally inserted to movably connect the modified sample holder.

8. The mechanically coupled sample holder of claim 7, wherein, The first base plate is flush with the second base plate, the first retaining groove and the first protrusion are formed on both sides of the first base plate, and the second retaining groove and the second protrusion are formed on both sides of the second base plate.

9. The mechanically coupled sample holder of claim 1, wherein, The auxiliary sample is a thin sheet component made of gold single crystal or a composite thin sheet component with a gold single crystal coating layer; the sample to be tested is a semiconductor device.

10. A tunnel scanning microscope, characterized in that include: Sample holder, transfer rod, and mechanically coupled sample holder as described in any one of claims 1 to 9; The transmission rod is movably connected to the mechanically coupled sample holder to drive the mechanically coupled sample holder between the detection position adapted to the probe and the sample holder, thereby performing the transmission of auxiliary samples and / or samples to be tested.

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