Floating detection device for single crystal silicon short rod end face

Abstract

This utility model relates to a floating detection device for the end face of a short monocrystalline silicon rod. It includes a detection head mounting and positioning assembly and a floating guide assembly. The detection head mounting and positioning assembly includes a floating plate, a clamping mounting block mounted on the floating plate, a detection head held and fixed to the clamping mounting block by an open clamp, and positioning blocks located at the four corners of the floating plate. The floating guide assembly includes a base plate, guide supports mounted at the four corners of the base plate, guide posts mounted on the guide supports, a spring and a spring seat sleeved on the guide post, and a positioning cone block located at the end of the guide post. The bottom surface of the floating plate abuts against the side of the spring away from the spring seat. The positioning block has a through hole that mates with the guide post. The positioning cone block is sleeved onto the guide post through the through hole, and the outer surface of the positioning cone block abuts against the inner wall of the through hole on the positioning block, causing the floating plate to float axially along the guide post when subjected to force. This device enables efficient measurement of end face electrical parameters.

Description

Technical Field

[0001] This utility model relates to the field of monocrystalline silicon production technology, and in particular to a floating detection device for the end face of a short monocrystalline silicon rod. Background Technology

[0002] With the development of solar monocrystalline silicon wafer manufacturing technology, non-contact testing technologies have emerged for electrical performance parameters (such as resistance and minority carrier lifetime) of silicon rod end faces.

[0003] In related technologies, it is necessary to ensure that the detection head and the end face of the silicon rod remain relatively horizontal and close in a non-contact state to improve the accuracy and consistency of the measurement. Usually, the detection head is manually held by the operator, who manually aligns the detection head with the corresponding detection point on the end face of the silicon rod for measurement.

[0004] However, the aforementioned manual inspection methods suffer from high labor costs, large measurement errors due to inconsistent operating techniques, and low data centrality in the inspection results. Utility Model Content

[0005] To address the shortcomings of existing production technologies, the applicant provides a floating inspection device for the end faces of short monocrystalline silicon rods, thereby replacing manual inspection with automated inspection, improving accuracy, efficiency, and productivity, and adapting to the effective inspection needs of silicon rod end faces with different slopes.

[0006] The technical solution adopted in this utility model is as follows:

[0007] A floating inspection device for the end face of a short monocrystalline silicon rod includes an inspection head mounting and positioning assembly and a floating guide assembly;

[0008] The detection head mounting and positioning assembly includes a floating plate, a clamping mounting block mounted on the floating plate, a detection head held and fixed on the clamping mounting block by an open clamp, and positioning blocks located at the four corners of the floating plate.

[0009] The floating guide assembly includes a base plate, guide supports installed at the four corners of the base plate, guide columns set on the guide supports, springs and spring seats sleeved on the guide columns, and positioning cones set at the ends of the guide columns.

[0010] The bottom surface of the floating plate abuts against the side of the spring away from the spring seat. The positioning block has a through hole that mates with the guide post and is fitted onto the guide post through the through hole. The outer surface of the positioning cone abuts against the inner wall of the through hole on the positioning block, so that the floating plate floats along the axial direction of the guide post when subjected to force.

[0011] As a further improvement to the above technical solution:

[0012] In one embodiment, photoelectric sensors are provided on both sides of the clamping mounting block to sense the end face of the monocrystalline silicon rod and control the robotic arm to decelerate.

[0013] In one embodiment, the floating guide assembly further includes multiple adapter blocks, one end of which is connected to the robotic arm and the other end is fixedly connected to the base plate, and there is wiring space between the multiple adapter blocks.

[0014] In one embodiment, each side of the base plate is provided with a micro switch mounting plate, and a micro switch is mounted on each of the switch mounting plates.

[0015] In one embodiment, the plurality of microswitches are arranged in a circumferential configuration. When the positioning component of the detection head is attached to the end face of the monocrystalline silicon rod, the bottom of the floating plate compresses the spring and abuts against the top surface of the microswitch, thereby emitting a detection signal through the microswitch.

[0016] In one embodiment, the contact surface of the positioning cone block and the positioning block form a cone-shaped fit.

[0017] In one embodiment, one end of the spring abuts against a spring seat, and the other end abuts against a floating plate.

[0018] In one embodiment, the open-end sleeve clamps and protects the detection head, preventing the detection head from directly contacting the end face of the monocrystalline silicon rod.

[0019] In one embodiment, the detection head is a non-contact electrical performance parameter detection head.

[0020] The beneficial effects of this utility model are as follows:

[0021] This utility model has a compact structure. It uses a robotic arm to drive a floating guide structure, replacing the traditional manual hand operation. This completely eliminates measurement errors caused by differences in human operation techniques and ensures high repeatability and consistency of test data. At the same time, the floating plate overcomes the spring force and yields under the action of external force. It can also adjust its posture through springs distributed at the four corners to perfectly fit the silicon rod end face with different tilt angles, greatly expanding the applicability and testing reliability of the equipment.

[0022] This utility model also has the following advantages:

[0023] This invention integrates a photoelectric sensor for non-contact sensing, enabling automatic deceleration and positioning judgment during the detection process; in addition, a micro switch provides a contact confirmation signal, significantly improving detection efficiency and reducing labor costs and intensity.

[0024] This utility model features an open clamp, which can reliably fix the detection head and effectively prevent the detection head from colliding and being damaged by the silicon rod, ensuring a stable non-contact measurement state and protecting key components. Attached Figure Description

[0025] Fig. 1 This is a schematic diagram of the overall structure of the present invention during testing.

[0026] Fig. 2 This is a schematic diagram of the structure of the detection head mounting positioning component of this utility model.

[0027] Fig. 3 This is a schematic diagram of the floating guide positioning component of this utility model.

[0028] The components include: 1. Floating plate; 2. Positioning block; 3. Clamping mounting block; 4. Photoelectric sensor; 5. Opening sleeve; 6. Detection head; 7. Robotic arm; 8. Adapter block; 9. Guide support; 10. Switch mounting plate; 11. Spring seat; 12. Spring; 13. Seat plate; 14. Guide post; 15. Positioning cone block; 16. Micro switch;

[0029] 100. Single-crystal silicon short rods. Detailed Implementation

[0030] The specific embodiments of this utility model are described below with reference to the accompanying drawings.

[0031] To facilitate understanding of this utility model, a more complete description will be given below with reference to the accompanying drawings. Preferred embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention pertains. The terminology used herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0033] When using the terms “including,” “having,” and “comprising” as described herein, another component may be added unless explicitly qualifying terms such as “only,” “consisting of,” etc. are used. Unless otherwise stated, singular terms may include plural forms and should not be construed as having a quantity of one.

[0034] It should be understood that although the terms "first," "second," etc., may be used herein to describe various elements, these elements should not be limited by these terms. These terms are used only to distinguish one element from another. For example, without departing from the scope of this invention, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element.

[0035] Furthermore, the accompanying drawings are not drawn to a 1:1 scale, and the relative dimensions of the components are shown in the drawings only as examples and not necessarily to actual scale.

[0036] like Figs. 1-3 The accompanying drawing shows a schematic diagram of the structure of a floating detection device for the end face of a single-crystal silicon short rod according to an embodiment of the present invention; for ease of description, the drawing only shows the structure related to the embodiment of the present invention.

[0037] The application provides a floating detection device for the end face of a monocrystalline silicon short rod, including a detection head mounting and positioning assembly and a floating guide assembly, for non-contact detection of electrical performance parameters of the end face of the monocrystalline silicon short rod 100.

[0038] In some embodiments, the floating guide assembly serves as the motion mechanism of the entire device, including a seat plate 13. The seat plate 13 is fixedly connected to the end flange of the robotic arm 7 via multiple adapter blocks 8. The adapter blocks 8 not only provide a stable connection, but the gaps between them also form a regular wiring space, which facilitates the centralized arrangement and protection of the cables of the detection head 6 and its sensors, and avoids pulling or interference during mechanical movement.

[0039] Furthermore, a guide support 9 is fixedly installed at each of the four corners of the upper surface of the seat plate 13. A guide post 14 is vertically installed on each guide support 9; a spring 12 and a spring seat 11 are sequentially fitted on each guide post 14 from top to bottom, the spring seat 11 is used to position the lower end of the spring 12; a positioning cone block 15 is fixedly installed at the lower end of the guide post 14.

[0040] In some embodiments, the detection head mounting and positioning assembly is mounted above the floating guide assembly via four guide posts 14 and can float up and down along the axial direction of the guide posts 14.

[0041] Furthermore, the detection head mounting and positioning assembly includes a floating plate 1, with a positioning block 2 fixedly installed at each of the four corners of the bottom surface of the floating plate 1; each positioning block 2 has a through hole, and four guide posts 14 pass through these four through holes respectively, thereby providing precise guidance for the up and down movement of the entire detection head mounting and positioning assembly;

[0042] In its natural state (i.e. when no testing is being performed), the floating plate 1 and its components are pushed downwards by the elastic force of the four springs 12 at the four corners, so that the inner wall conical surface of the through hole of each positioning block 2 is tightly fitted with the outer conical surface of the positioning cone block 15 at the lower end of the corresponding guide post 14. This conical surface mating structure ensures that the detection head mounting positioning assembly has extremely high positioning accuracy in the initial position.

[0043] In some embodiments, a clamping mounting block 3 is fixedly installed in the central area of ​​the upper surface of the floating plate 1, and the detection head 6 is clamped and fixed on the clamping mounting block 3 through the open clamp 5. The open clamp 5 plays the role of firmly clamping the detection head 6, effectively preventing the detection head 6 from being damaged by rigid collision with the end face of the single crystal silicon short rod 100 in case of accident.

[0044] Furthermore, a pair of photoelectric sensors 4 are symmetrically installed on both sides of the clamping mounting block 3, which are used to sense and feed back signals in advance when the driving device of the robotic arm 7 approaches the end face of the single crystal silicon short rod 100, and control the robotic arm 7 to decelerate.

[0045] To further refine the control of the testing process, a micro switch mounting plate 10 is installed in the center of each of the four sides of the base plate 13, and a micro switch 16 is installed on each micro switch mounting plate 10.

[0046] The trigger probes of the four microswitches 16 face upwards and are evenly distributed in the circumferential direction.

[0047] In practical applications, the working process of this utility model is as follows:

[0048] The robotic arm 7, following instructions, moves the entire detection device to the target detection point above the end face of the monocrystalline silicon short rod 100.

[0049] Subsequently, the robotic arm 7 drive unit moved downwards to approach the end face of the silicon rod;

[0050] When the photoelectric sensor 4 senses the end face of the silicon rod, it sends a signal to switch the robotic arm 7 to a low-speed downward movement state.

[0051] The positioning cone 15 at the bottom of the detection head mounting and positioning assembly first contacts the end face of the single crystal silicon short rod 100;

[0052] The robotic arm 7 continues to feed slightly, overcoming the elastic force of the four springs 12, and pushes the entire detection head mounting and positioning assembly to generate a floating displacement upward along the guide post 14;

[0053] Due to the independent action of the four corner springs 12, the floating plate 1 can adaptively adjust its posture, ultimately keeping the detection surface of the detection head 6 parallel to the silicon rod end face that may be tilted and reaching the predetermined non-contact detection distance.

[0054] When the bottom surface of the floating plate 1 triggers any one of the micro switches 16, the micro switch 16 sends a signal indicating that the detection head 6 has reached its position;

[0055] Then the detection head 6 is controlled to start working and collect electrical performance parameter data;

[0056] After the inspection is completed, the inspection head 6 sends a completion signal, and the robotic arm 7 lifts the entire device and moves it to the next inspection point, starting a new round of inspection cycle.

[0057] In summary, this utility model has a reasonable structure. The floating guide component is driven by the robotic arm 7, which replaces the traditional manual hand operation and completely eliminates the measurement error caused by the difference in human operation techniques, ensuring high repeatability and consistency of the test data. At the same time, the floating plate 1 overcomes the spring 12 under the action of external force and can adjust its posture through the springs 12 distributed at the four corners, perfectly fitting the silicon rod end face with different tilt angles, which greatly expands the applicability and testing reliability of the equipment.

[0058] The technical features of the above embodiments can be combined in any way. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0059] The embodiments described above merely illustrate the implementation of this utility model, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the utility model patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this utility model, and these all fall within the protection scope of this utility model. Therefore, the protection scope of this utility model patent should be determined by the appended claims.

Claims

1. A floating type detection device for the end face of a single crystal silicon short rod, characterized by, This includes the detection head mounting and positioning assembly and the floating guide assembly; The detection head mounting and positioning assembly includes a floating plate (1), a clamping mounting block (3) mounted on the floating plate (1), a detection head (6) clamped and fixed on the clamping mounting block (3) by an open sleeve (5), and positioning blocks (2) set at the four corners of the floating plate (1); The floating guide assembly includes a base plate (13), guide supports (9) installed at the four corners of the base plate (13), guide posts (14) set on the guide supports (9), springs (12) and spring seats (11) sleeved on the guide posts (14), and positioning cones (15) set at the ends of the guide posts (14). The bottom surface of the floating plate (1) abuts against the side of the spring (12) away from the spring seat (11). The positioning block (2) has a through hole that cooperates with the guide post (14) and is sleeved on the guide post (14) through the through hole. The outer surface of the positioning cone (15) abuts against the inner wall of the through hole on the positioning block (2), so that the floating plate (1) floats along the axial direction of the guide post (14) when subjected to force.

2. The floating detection device for the end face of a short rod of single crystal silicon according to claim 1, characterized by The clamping mounting block (3) is equipped with photoelectric sensors (4) on both sides, which are used to sense the end face of the single crystal silicon short rod (100) and control the robotic arm (7) to decelerate.

3. The floating detection device for the end face of a short rod of single crystal silicon according to claim 1, characterized by The floating guide assembly also includes multiple adapter blocks (8), one end of which is connected to the robotic arm (7) and the other end is fixedly connected to the base plate (13), and there is a wiring space between the multiple adapter blocks (8).

4. The floating detection device for the end face of a short rod of single crystal silicon according to claim 1, characterized by Each side of the base plate (13) is provided with a micro switch mounting plate (10), and a micro switch (16) is mounted on each of the switch mounting plates (10).

5. The floating detection device for the end face of a short rod of single crystal silicon according to claim 4, characterized by The multiple microswitches (16) are arranged in a circumferential configuration; When the positioning component of the detection head is attached to the end face of the single crystal silicon short rod (100), the bottom of the floating plate (1) compresses the spring (12) and abuts against the top surface of the micro switch (16), and a detection signal is sent through the micro switch (16).

6. The floating detection device for the end face of a short rod of single crystal silicon according to claim 1, characterized by The contact surfaces of the positioning cone block (15) and the positioning block (2) form a cone-shaped fit.

7. The floating detection device for the end face of a short rod of single crystal silicon according to claim 1, characterized by One end of the spring (12) abuts against the spring seat (11), and the other end abuts against the floating plate (1).

8. The floating detection device for the end face of a short rod of single crystal silicon according to claim 1, characterized by The open-end sleeve (5) clamps and protects the detection head (6) to prevent the detection head (6) from directly contacting the end face of the single crystal silicon rod (100).

9. The floating detection device for the end face of a short rod of single crystal silicon according to claim 8, characterized by The detection head (6) is a non-contact electrical performance parameter detection head.

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