Height adjustable support device and wafer inspection system

Abstract

This application relates to a height-adjustable support device and a wafer inspection system. The support device includes: a mounting component, a movable component, and an adjustment assembly. The movable component is disposed on one side of the mounting component, and the mounting component and the movable component are arranged along a first direction. The movable component is slidably connected to the mounting component along a second direction. The side of the movable component facing away from the mounting component is used to support the component to be supported. The first direction intersects with the second direction. The adjustment assembly includes a first adjustment component, a second adjustment component, and a limiting component. The first adjustment component extends along a third direction and is sequentially inserted through the movable component and the mounting component. The second adjustment component is rotatably connected to the mounting component and sleeved on the first adjustment component. The second adjustment component is movable relative to the first adjustment component along the third direction. The limiting component is inserted through the side of the movable component facing away from the mounting component and is used to abut against the first adjustment component. The third direction intersects with both the first and second directions. The height of the support device is adjustable, providing stable support for the component to be supported.

Description

Technical Field

[0001] This application relates to the field of wafer inspection technology, specifically to a height-adjustable support device and a wafer inspection system. Background Technology

[0002] In a wafer inspection system, the test machine needs to be flipped at a certain angle by a flipping mechanism to achieve stable contact with the probe card on the probe station. The test machine applies an electrical signal to the probe card and transmits the signal to the wafer under test for inspection. However, when the test machine is positioned to one side of the probe station, its weight may cause it to tilt, affecting the stability of the electrical connection between the test machine and the probe card. Therefore, a support device is required to support the test machine. Utility Model Content

[0003] In view of this, this application provides a height-adjustable support device and a wafer inspection system, wherein the height of the support device is adjustable and can provide stable support for the support component.

[0004] This application provides a height-adjustable support device, comprising: a mounting member, a movable member, and an adjustment assembly. The movable member is disposed on one side of the mounting member, and the mounting member and the movable member are arranged along a first direction. The movable member is slidably connected to the mounting member along a second direction. The side of the movable member facing away from the mounting member is used to support a member to be supported, wherein the first direction and the second direction intersect. The adjustment assembly includes a first adjustment member, a second adjustment member, and a limiting member. The first adjustment member extends along a third direction and is sequentially inserted through the movable member and the mounting member. The second adjustment member is rotatably connected to the mounting member and sleeved on the first adjustment member. The second adjustment member is movable relative to the first adjustment member along a third direction. The limiting member is inserted through the movable member facing away from the mounting member. One side of the mounting member is used to abut against the first adjusting member; the third direction intersects with the first direction and the second direction respectively; when the mounting member and the moving member are in a preset position so that the support device has a preset height, the limiting member abuts against the first adjusting member, and the first adjusting member, the second adjusting member and the limiting member cooperate to limit the relative position of the mounting member and the moving member; when the support device is height adjusted, the limiting member separates from the first adjusting member, and when the first adjusting member is rotated, the second adjusting member moves relative to the first adjusting member along the third direction, and the second adjusting member drives the moving member to move relative to the mounting member along the first direction, the second direction and the third direction respectively, so as to adjust the height of the support device along the first direction.

[0005] Further, the movable member includes a first end face, a second end face, and a third end face that are bent and connected in sequence. The movable member also has a first through hole and a second through hole that are connected. The first through hole passes through the first end face and the second end face, and the second through hole passes through the third end face. The mounting member has a first surface and a second surface that are bent and connected in sequence. The first surface abuts against the first end face and the first surface and the first end face are slidable along a second direction. The second surface is disposed opposite to the second end face. The mounting member also has a through hole that passes through the first surface and the second surface respectively. The first adjusting member is sequentially disposed through the first through hole and the through hole. The limiting member is disposed through the second through hole. The second adjusting member is at least partially located in the through hole.

[0006] Furthermore, the first end face and the second end face are set at an acute angle, and the mounting member also has a third surface, the third surface is bent and connected to the end of the second surface away from the first surface, the third surface is set opposite to the third end face, and the third surface is set at an acute angle to the first surface.

[0007] Furthermore, the adjustment assembly also includes a rotating component, which is sleeved on the end of the first adjustment component opposite to the second adjustment component and embedded in the moving component. The rotating component is rotatably connected to the moving component, and the first adjustment component is rotatably connected to the rotating component.

[0008] Furthermore, the adjustment assembly also includes a bearing and a retaining member. The bearing is sleeved on the first adjustment member and located between the first adjustment member and the rotating member. The bearing connects the first adjustment member and the rotating member respectively, so that the first adjustment member can be rotatably connected to the rotating member. The retaining member is disposed on the side of the rotating member facing the second adjustment member and abuts against the bearing to limit the position of the bearing in a third direction.

[0009] Furthermore, the movable component includes a movable body and a track portion. The movable body includes a first end face, a second end face, and a third end face. The track portion is disposed on the first end face. The mounting component has a track groove, which is recessed into the first surface. When the movable component is disposed on one side of the mounting component, the track portion is located in the track groove, and the track portion can slide relative to the track groove along the second direction.

[0010] Furthermore, the adjustment assembly also includes a locking member, which is sleeved on the first adjustment member and located at the end of the second adjustment member opposite to the rotating member, for positioning the relative position of the second adjustment member and the first adjustment member.

[0011] Furthermore, the first direction, the second direction, and the third direction are located on the same plane. The adjustment assembly also includes a first rotating shaft and a second rotating shaft. The first rotating shaft passes through the second adjusting member and the mounting member in sequence, so that the second adjusting member can be rotatably connected to the mounting member. The second rotating shaft passes through the rotating member and the moving member in sequence, so that the rotating member can be rotatably connected to the moving member. Both the first rotating shaft and the second rotating shaft extend along a fourth direction, which is perpendicular to the first direction, the second direction, and the third direction, respectively.

[0012] This application also provides a wafer inspection system, which includes: a substrate, a tester, a flipping mechanism, and a support device provided in this application; the substrate is used to set a probe card, and a sample to be inspected is placed inside the substrate; the tester is set on one side of the substrate through the flipping mechanism and is electrically connected to the probe card to inspect the sample to be inspected; the support device is set on the substrate and is used to support the tester.

[0013] Furthermore, the number of support devices is two, and the two support devices are arranged at intervals; the wafer inspection system also includes a connector, which is fixedly connected to the mounting parts of the two support devices, and the connector is also fixedly connected to the base.

[0014] This application provides a height-adjustable support device. When applied to a wafer inspection system, the height of the support device can be adjusted in a first direction to achieve a preset height, supporting the testing machine and preventing it from tilting. This allows the testing machine to establish a stable electrical connection with the probe card of the substrate, ensuring the accuracy of the wafer inspection system in detecting the sample. Specifically, when adjusting the height of the support device, the limiting member separates from the first adjusting member, making the relative position between the first adjusting member, the moving member, and the mounting member adjustable. By rotating the first adjusting member, the second adjusting member moves relative to the first adjusting member along a third direction, thereby changing the relative position of the first and second adjusting members. Simultaneously, the second adjusting member rotates relative to the mounting member, causing the moving member to move relative to the mounting member along the first, second, and third directions, respectively. This achieves adjustment of the relative position between the moving member and the mounting member in the first direction, thereby adjusting the height of the support device along the first direction. The height of the support device is adjustable, allowing it to be used with testing machines in different tilt positions for effective support. When the mounting component and the moving component are in a preset position, giving the support device a preset height, the limiting component abuts against the first adjusting component. The first adjusting component, the second adjusting component, and the limiting component cooperate to limit the relative position of the mounting component and the moving component, preventing the moving component from continuing to move relative to the mounting component in the second direction. This ensures that the support device can stably support the component to be supported, improving its performance. Attached Figure Description

[0015] To more clearly illustrate the technical solutions of the embodiments of this application, the drawings used in the implementation will be briefly introduced below. Obviously, the drawings described below are some implementations of this application. For those skilled in the art, other drawings can be obtained from these drawings without creative effort.

[0016] Figure 1 This is a schematic diagram of the structure of a support device according to an embodiment of this application;

[0017] Figure 2 This is an exploded structural diagram of a support device according to an embodiment of this application;

[0018] Figure 3 This is a top view of the support device according to the first embodiment of this application;

[0019] Figure 4 for Figure 3 Schematic diagram of the cross-sectional structure along the AA direction;

[0020] Figure 5 This is a schematic diagram of the structure of a wafer inspection system according to an embodiment of this application;

[0021] Figure 6 This is a top view of the support device according to the second embodiment of this application;

[0022] Figure 7 for Figure 6 Schematic diagram of cross-sectional structure in the middle BB direction;

[0023] Figure 8 This is a top view of the support device according to the third embodiment of this application;

[0024] Figure 9 for Figure 8 Schematic diagram of cross-sectional structure in the CC direction;

[0025] Figure 10 This is a schematic diagram of the structure of a movable component according to an embodiment of this application;

[0026] Figure 11 This is a schematic diagram of the structure of an installation component according to an embodiment of this application;

[0027] Figure 12 An exploded structural diagram of a support device according to another embodiment of this application;

[0028] Figure 13 for Figure 5 Enlarged view of the dashed box in the middle (D).

[0029] Explanation of reference numerals in the attached figures:

[0030] 100-Support device, 110-Mounting component, 111-First surface, 112-Second surface, 113-Through hole, 114-Third surface, 115-Railway groove, 120-Moving component, 121-First end face, 122-Second end face, 123-Third end face, 124-First through hole, 125-Second through hole, 126-Moving body, 127-Railway section, 130-Adjusting assembly, 131-First adjusting component, 132-Second adjusting component, 133-Limiting component, 134-Rotating component, 135-Bearing, 136-Holding component, 137-Locking component, 138-First rotating shaft, 139-Second rotating shaft, 200-Wafer inspection system, 210-Base, 220-Testing machine, 230-Tilting mechanism, 240-Connecting seat. Detailed Implementation

[0031] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of this application.

[0032] The terms "first," "second," etc., in the specification, claims, and accompanying drawings of this application are used to distinguish different objects, not to describe a specific order. Furthermore, the terms "comprising" and "having," and any variations thereof, are intended to cover non-exclusive inclusion. For example, a process, method, system, product, or apparatus that includes a series of steps or units is not limited to the listed steps or units, but may optionally include steps or units not listed, or may optionally include other steps or units inherent to these processes, methods, products, or apparatuses.

[0033] In this document, references to "embodiment" or "implementation" mean that a particular feature, structure, or characteristic described in connection with an embodiment or implementation may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0034] In a wafer inspection system, during the docking process between the probe station and the testing machine, the testing machine needs to be rotated at a certain angle by a flipping mechanism to achieve stable contact with the probe card on the probe station. The testing machine then applies an electrical signal to the probe card and transmits the signal to the wafer under test for inspection. However, when the testing machine is positioned to one side of the probe station, its weight may cause it to tilt, affecting the stability of the electrical connection between the testing machine and the probe card. Therefore, a support device is required to support the testing machine.

[0035] More specifically, after the flipping mechanism drives the test machine to flip to the required position, the motor of the flipping mechanism stops moving, and the motor brake clamps the motor shaft to achieve the determination of the angle position. However, after flipping repeatedly over a long period of time, the connection of each component will experience creeping misalignment and loosening. In addition, the influence of ground vibration and fluctuations in plant voltage will have a slight impact on the flipping angle of the flipping machine. In addition, the test machine is relatively heavy, which will cause the test machine to tilt to a certain extent, thereby causing instability in the electrical connection between the PIN (pin) on the test machine and the probe card on the probe station, affecting the test results of the wafer under test.

[0036] Please see Figures 1 to 5This application provides a height-adjustable support device 100, the support device 100 including: a mounting member 110, a movable member 120, and an adjustment assembly 130, the movable member 120 being disposed on one side of the mounting member 110, the mounting member 110 and the movable member 120 being aligned along a first direction (e.g., Figure 1 The movable member 120 is arranged in the second direction (as shown in the X direction), and can be arranged in the second direction (as shown in the X direction). Figure 1 The mounting member 110 is slidably connected to the mounting member 110 (as shown in the Y direction). The moving member 120 is used to support the member to be supported on the side opposite to the mounting member 110. The first direction intersects with the second direction. The adjustment assembly 130 includes a first adjustment member 131, a second adjustment member 132, and a limiting member 133. The first adjustment member 131 is along a third direction (e.g., as shown in the Y direction). Figure 2 Extending in the Z-direction, the first adjusting member 131 is sequentially inserted through the movable member 120 and the mounting member 110. The second adjusting member 132 is rotatably connected to the mounting member 110 and sleeved on the first adjusting member 131. The second adjusting member 132 can move relative to the first adjusting member 131 along a third direction. The limiting member 133 is inserted on the side of the movable member 120 opposite to the mounting member 110 and is used to abut against the first adjusting member 131. The third direction intersects with the first direction and the second direction respectively. When the mounting member 110 and the movable member 120 are in a preset position so that the support device 100 has a preset height... The limiting member 133 abuts against the first adjusting member 131. The first adjusting member 131, the second adjusting member 132, and the limiting member 133 cooperate to limit the relative position of the mounting member 110 and the moving member 120. When the support device 100 is height adjusted, the limiting member 133 separates from the first adjusting member 131. When the second adjusting member 132 moves relative to the first adjusting member 131 in a third direction, the second adjusting member 132 drives the mounting member 110 to move relative to the moving member 120 in the first direction, the second direction, and the third direction, respectively, so as to adjust the height of the support device 100 in the first direction.

[0037] Understandably, the first direction is the height direction of the support device 100.

[0038] Understandably, the first direction, the second direction, and the third direction intersect each other in pairs, and the first direction, the second direction, and the third direction are in the same plane.

[0039] Understandably, when the support device 100 is applied to the wafer inspection system 200, the support device 100 is located on the base 210, and the component to be supported is the test machine 220.

[0040] Understandably, when the support device 100 is height adjusted, the first direction and the second direction remain unchanged, and the position of the first adjusting member 131 relative to the mounting member 110 and the moving member 120 changes continuously, so that the third direction changes continuously.

[0041] Understandably, the first adjusting member 131 is rotatably connected to the moving member 120 and rotatably connected to the mounting member 110.

[0042] Understandably, the second adjustment member 132 is located within the mounting member 110.

[0043] This application provides a height-adjustable support device 100. When the support device 100 is applied to a wafer inspection system 200, its height in a first direction can be adjusted to a preset height to support the testing machine 220 and prevent it from tilting. This allows the testing machine 220 to establish a stable electrical connection with the probe card of the base 210, ensuring the accuracy of the wafer inspection system 200 in detecting the sample. Specifically, when the height of the support device 100 is adjusted, the limiting member 133 separates from the first adjusting member 131, making the relative position between the first adjusting member 131, the moving member 120, and the mounting member 110 adjustable. By rotating the first adjusting member 131, the second adjusting member 132 moves relative to the first adjusting member 131 along a third direction, thereby changing the relative position of the first adjusting member 131 and the second adjusting member 132. Simultaneously, the second adjusting member 132 rotates relative to the mounting member 110, causing the moving member 120 to move relative to the mounting member 110 along the first direction, the second direction, and the third direction, respectively. This adjusts the relative position of the moving member 120 and the mounting member 110 in the first direction, thereby adjusting the height of the support device 100 along the first direction. The height of the support device 100 is adjustable, allowing it to be used with the testing machine 220 in different tilt states, effectively supporting the testing machine 220. When the mounting member 110 and the moving member 120 are in a preset position so that the support device 100 has a preset height, the limiting member 133 abuts against the first adjusting member 131. The first adjusting member 131, the second adjusting member 132 and the limiting member 133 cooperate to limit the relative position of the mounting member 110 and the moving member 120, preventing the moving member 120 from continuing to move relative to the mounting member 110 in the second direction, thereby enabling the support device 100 to stably support the member to be supported and improving the performance of the support device 100.

[0044] More specifically, the support device 100 is supported on the surface to be supported. When the support device 100 is applied to the wafer inspection system 200, the surface to be supported is the platform of the base 210. When the support device 100 is height adjusted, the first adjusting member 131 is rotated so that the second adjusting member 132 moves relative to the first adjusting member 131 in a third direction and upward in the third direction. When the distance between the part of the first adjusting member 131 rotatably connected to the moving member 120 and the second adjusting member 132 gradually shortens, the moving member 120 moves relative to the mounting member 110 in the first direction away from the surface to be supported and in the second direction away from the surface to be supported, thereby increasing the distance between the moving member 120 and the surface to be supported, thereby increasing the height of the support device 100 in the first direction. Conversely, by rotating the first adjusting member 131, the second adjusting member 132 moves relative to the first adjusting member 131 in a third direction and upward in the third direction. As the distance between the portion of the first adjusting member 131 rotatably connected to the moving member 120 and the second adjusting member 132 gradually increases, the moving member 120 moves relative to the mounting member 110 in the first direction toward the surface to be supported and in the second direction toward the surface to be supported, thereby reducing the distance between the moving member 120 and the surface to be supported, and thus reducing the height of the support device 100 in the first direction.

[0045] Please see also Figures 6 to 9 Understandably, by changing the direction of rotation of the first adjusting member 131, the height of the support device 100 along the first direction can be increased or decreased. In some specific embodiments, rotating the first adjusting member 131 clockwise increases the height of the support device 100 along the first direction, and rotating the first adjusting member 131 counterclockwise decreases the height of the support device 100 along the first direction. In other specific embodiments, rotating the first adjusting member 131 counterclockwise increases the height of the support device 100 along the first direction, and rotating the first adjusting member 131 clockwise decreases the height of the support device 100 along the first direction.

[0046] Understandably, the preset height is the height required to support the support member when the support device 100 is placed on the surface to be supported, and the value of the preset height is not limited here.

[0047] Optionally, in some embodiments, the second adjusting member 132 is sleeved on the outer periphery of the first adjusting member 131. The second adjusting member 132 has a first internal thread, and the first adjusting member 131 has a first external thread. The first internal thread and the first external thread are threadedly connected so that when the first adjusting member 131 is rotated, the first internal thread and the second external thread mesh with each other, thereby enabling the second adjusting member 132 to move relative to the first adjusting member 131 along the third direction. This can improve the stability of the second adjusting member 132 moving relative to the first adjusting member 131 along the third direction, and further improve the stability of adjusting the height of the support device 100 along the first direction.

[0048] Understandably, in Figure 4 Implementation examples Figure 7 Implementation Examples and Figure 9 In the embodiments, the support device 100 is at different preset heights.

[0049] Please see also Figure 10 and Figure 11 In some embodiments, the movable member 120 includes a first end face 121, a second end face 122, and a third end face 123 that are bent and connected in sequence. The movable member 120 also has a first through hole 124 and a second through hole 125 that are connected to each other. The first through hole 124 passes through the first end face 121 and the second end face 122, and the second through hole 125 passes through the third end face 123. The mounting member 110 has a first surface 111 and a second surface 112 that are bent and connected in sequence. The first surface 111 abuts against the first end face. 121 and the first surface 111 and the first end face 121 are slidable along the second direction, the second surface 112 and the second end face 122 are disposed opposite to each other, the mounting member 110 also has a through hole 113, the through hole 113 passes through the first surface 111 and the second surface 112 respectively; the first adjusting member 131 is sequentially disposed through the first through hole 124 and the through hole 113, the limiting member 133 is disposed through the second through hole 125; the second adjusting member 132 is at least partially located in the through hole 113.

[0050] Understandably, the movable component 120 has a wedge-shaped structure, and the mounting component 110 has a wedge-shaped structure.

[0051] Understandably, the first end face 121 is parallel to the second direction, and the first surface 111 is parallel to the second direction.

[0052] Understandably, the third end face 123 is disposed on the side of the movable member 120 away from the bearing surface and the mounting member 110, and the arrangement direction of the third end face 123 and the first end face 121 is parallel to the first direction.

[0053] In this embodiment, the first end face 121 of the movable member 120 and the first surface 111 of the mounting member 110 can slide relative to each other in a second direction, so as to realize that the movable member 120 moves relative to the mounting member 110 in the second direction. The movable member 120 has a first through hole 124, and the mounting member 110 has a through hole 113. The first adjusting member 131 is sequentially inserted through the first through hole 124 and the through hole 113, so that the first adjusting member 131 has a certain amount of room for movement within the movable member 120 and the mounting member 110. In addition, the first through hole 124 penetrates the first end face 121 and the second end face 122, which facilitates the user to adjust the first adjusting member 131 from the second end face 122 to rotate the first adjusting member 131. Furthermore, the through hole 113 penetrates the first surface 111 and the second surface 112 respectively, which makes it convenient for the user to observe the relative position of the first adjusting member 131 and the second adjusting member 132 from the second surface 112, and also makes it convenient to define the relative position of the first adjusting member 131 and the second adjusting member 132. Furthermore, the movable member 120 also has a second through hole 125, which penetrates the third end face 123. The limiting member 133 passes through the third end face 123 and protrudes from the second through hole 125 to abut against the first adjusting member 131 located in the first through hole 124. This limits the relative position of the first adjusting member 131 with the movable member 120 and the mounting member 110, improving the structural stability of the support device 100 at a preset height. This allows the support device 100 to stably support the member to be supported. When the support device 100 is applied to the wafer inspection system 200, it can stably support the tester 220, ensuring the electrical connection stability between the tester 220 and the probe card, and improving the inspection accuracy of the wafer inspection system 200 on the sample to be inspected.

[0054] Optionally, in some embodiments, the second end face 122 is parallel to the first direction, and the second surface 112 is parallel to the first direction.

[0055] In some embodiments, the first end face 121 and the second end face 122 are set at an acute angle, and the mounting member 110 also has a third surface 114, which is bent to connect the end of the second surface 112 away from the first surface 111. The third surface 114 is set opposite to the third end face 123, and the third surface 114 is set at an acute angle to the first surface 111.

[0056] Understandably, when the support device 100 is supported on the surface to be supported, the third surface 114 is set to fit against the surface to be supported.

[0057] Understandably, the height of the support device 100 along the first direction is the distance between the third surface 114 and the third end face 123 in the first direction.

[0058] In this embodiment, the first end face 121 and the second end face 122 are set at an acute angle. In other words, when the support device 100 is disposed on the surface to be supported, the first end face 121 is inclined relative to the surface to be supported. Similarly, the first surface 111 is inclined relative to the surface to be supported. When the first end face 121 slides relative to the first surface 111 in the second direction, the moving member 120 can move in the first direction toward or away from the surface to be supported. The moving member 120 of this application has the first end face 121, and the mounting member 110 has the first surface 111. The relative sliding in the second direction is converted into a change in the relative position of the moving member 120 and the mounting member 110 in the first direction, so as to adjust the height of the support device 100 in the first direction. The support device 100 does not need to be provided with a track assembly in the first direction for guidance to realize the change of the height of the support device 100 in the first direction.

[0059] Optionally, in some embodiments, the first end face 121 is arranged parallel to the first surface 111 so that the first end face 121 and the first surface 111 can slide relative to each other along the second direction, thereby realizing the adjustment of the relative position of the moving member 120 and the mounting member 110 in the first direction.

[0060] Optionally, in some embodiments, the third surface 114 is arranged parallel to the third end face 123, reducing the manufacturing difficulty of the moving part 120 and the mounting part 110.

[0061] Please see also Figure 12In some embodiments, the adjustment assembly 130 further includes a rotating member 134, which is sleeved on the end of the first adjustment member 131 opposite to the second adjustment member 132 and embedded in the moving member 120. The rotating member 134 is rotatably connected to the moving member 120, and the first adjustment member 131 is rotatably connected to the rotating member 134.

[0062] Understandably, the rotating member 134 and the second adjusting member 132 are sleeved on opposite ends of the first adjusting member 131, and are spaced apart along the third direction.

[0063] Understandably, the rotating member 134 is located within the moving member 120.

[0064] In this embodiment, the first adjusting member 131 is sequentially passed through the rotating member 134 and the second adjusting member 132. The rotating member 134 is rotatably connected to the moving member 120, and the second adjusting member 132 is rotatably connected to the mounting member 110. When the first adjusting member 131 rotates relative to the rotating member 134, the second adjusting member 132 moves relative to the first adjusting member 131 along a third direction, thereby causing the rotating member 134 to rotate relative to the moving member 120 and the second adjusting member 132 to rotate relative to the mounting member 110. This causes the moving member 120 to move relative to the mounting member 110 along the first direction, the second direction, and the third direction, respectively, thereby adjusting the relative position of the moving member 120 and the mounting member 110 in the first direction, so as to adjust the height of the support device 100 in the first direction.

[0065] In some embodiments, the adjusting assembly 130 further includes a bearing 135 and a retaining member 136. The bearing 135 is sleeved on the first adjusting member 131 and located between the first adjusting member 131 and the rotating member 134. The bearing 135 connects the first adjusting member 131 and the rotating member 134 respectively, so that the first adjusting member 131 is rotatably connected to the rotating member 134. The retaining member 136 is disposed on the side of the rotating member 134 facing the second adjusting member 132 and abuts against the bearing 135 to limit the position of the bearing 135 in a third direction.

[0066] Understandably, the bearing 135 includes an inner ring and an outer ring. The outer ring is fitted around the outer circumference of the inner ring and is rollably connected to the inner ring. The side of the inner ring opposite to the outer ring is connected to and abuts against the outer circumference of the first adjusting member 131. The side of the outer ring opposite to the inner ring is connected to and abuts against the rotating member 134. When the first adjusting member 131 is rotated, the first adjusting member 131 drives the inner ring to rotate relative to the outer ring. That is, the first adjusting member 131, the inner ring of the bearing 135, rotate relative to the outer ring of the bearing 135, the rotating member 134, and the moving member 120.

[0067] In this embodiment, the bearing 135 is sleeved on the outer periphery of the first adjusting member 131 and located between the first adjusting member 131 and the rotating member 134, so that the first adjusting member 131 can rotate relative to the rotating member 134. More specifically, when the first adjusting member 131 is rotated, the first adjusting member 131 drives the inner ring member to rotate relative to the outer ring member, that is, the first adjusting member 131, the inner ring member of the bearing 135, and the rotating member 134 and the moving member 120 rotate relative to the outer ring member of the bearing 135, the rotating member 134, and the moving member 120. The abutment member 136 abuts against the side of the rotating member 134 facing the second adjusting member 132, so as to further limit the position of the bearing 135 and the first adjusting member 131 in the third direction, prevent the bearing 135 from moving along the third direction, and realize the structural stability of the first adjusting member 131 rotatably connecting the rotating member 134.

[0068] Optionally, the first adjusting member 131 includes a gripping portion (not shown) and a through portion (not shown) connected together. The radial dimension of the gripping portion is larger than the radial dimension of the through portion. The through portion passes through the bearing 135, the abutment member 136 and the second adjusting member 132 in sequence. The gripping portion and the abutment member 136 abut against the bearing 135 on opposite sides along the third direction to limit the position of the bearing 135 and the first adjusting member 131 in the third direction.

[0069] In some embodiments, the movable member 120 includes a movable body 126 and a track portion 127. The movable body 126 includes a first end face 121, a second end face 122, and a third end face 123. The track portion 127 is disposed on the first end face 121. The mounting member 110 has a track groove 115, which is recessed in the first surface 111. When the movable member 120 is disposed on one side of the mounting member 110, the track portion 127 is located in the track groove 115, and the track portion 127 can slide relative to the track groove 115 in the second direction.

[0070] Understandably, the track portion 127 extends along the second direction, and the track groove 115 extends along the second direction.

[0071] In this embodiment, the movable body 126 includes a first end face 121, a second end face 122, and a third end face 123. The track portion 127 is disposed on the first end face 121. In other words, the track portion 127 protrudes from the side of the movable body 126 facing the mounting member 110. When the movable member 120 is disposed on the side of the mounting member 110, the track portion 127 is inserted into the track groove 115. The track groove 115 guides the movement direction of the track portion 127. The track portion 127 can slide relative to the track groove 115 along the second direction to improve the stability of the movable member 120 moving relative to the mounting member 110 along the second direction, and to prevent the movement direction of the movable member 120 from deviating from that of the mounting member 110, thus affecting the height adjustment of the support device 100.

[0072] In some embodiments, the adjustment assembly 130 further includes a locking member 137, which is sleeved on the first adjustment member 131 and located at the end of the second adjustment member 132 opposite to the rotating member 134, for positioning the relative position of the second adjustment member 132 and the first adjustment member 131.

[0073] In this embodiment, when the mounting member 110 and the moving member 120 are in a preset position, that is, when the support device 100 has completed height adjustment, the locking member 137 is sleeved on the end of the second adjusting member 132 that is away from the rotating member 134 and abuts against the second adjusting member 132 to prevent the second adjusting member 132 from continuing to move relative to the first adjusting member 131 in the third direction. This achieves the positioning of the relative position of the second adjusting member 132 and the first adjusting member 131, thereby improving the structural stability of the support device 100 at the preset height and providing stable support for the member to be supported, thus improving the performance of the support device 100.

[0074] Optionally, the adjustment assembly 130 further includes a shim, which is sleeved on the outer periphery of the first adjustment member 131 and sandwiched between the second adjustment member 132 and the locking member 137, so as to enhance the stabilizing effect of the locking member 137 in positioning the second adjustment member 132.

[0075] In some embodiments, the first direction, the second direction, and the third direction are located in the same plane. The adjustment assembly 130 further includes a first rotating shaft 138 and a second rotating shaft 139. The first rotating shaft 138 passes through the second adjusting member 132 and the mounting member 110 in sequence, so that the second adjusting member 132 is rotatably connected to the mounting member 110. The second rotating shaft 139 passes through the rotating member 134 and the moving member 120 in sequence, so that the rotating member 134 is rotatably connected to the moving member 120. The first rotating shaft 138 and the second rotating shaft 139 both extend along a fourth direction, which is perpendicular to the first direction, the second direction, and the third direction, respectively.

[0076] Understandably, the third direction is perpendicular to the first direction, the second direction, and the plane containing the third direction.

[0077] In this embodiment, the first rotating shaft 138 passes sequentially through the second adjusting member 132 and the mounting member 110, and extends along the fourth direction, so that the second adjusting member 132 rotates relative to the mounting member 110 about the fourth direction as an axis. Similarly, the second rotating shaft 139 passes sequentially through the rotating member 134 and the moving member 120, and extends along the fourth direction, so that the rotating member 134 rotates relative to the moving member 120 about the fourth direction as an axis. The fourth direction is perpendicular to the first direction, the second direction, and the third direction. When the first adjusting member 131 is rotated, the first adjusting member 131 rotates relative to the rotating member 134, and the second adjusting member 132 moves relative to the first adjusting member 131 along the third direction, causing the rotating member 134 to rotate relative to the mounting member 110 about the fourth direction as an axis, and the second adjusting member 132 to rotate relative to the mounting member 110 about the fourth direction as an axis, driving the moving member 120 to move relative to the mounting member 110 along the first direction, the second direction and the third direction respectively, so as to realize the height adjustment of the support device 100 in the first direction, so that the support device 100 can be adapted to the height of the member to be supported, so as to provide better support for the support device 100.

[0078] Please see also Figures 1 to 13This application also provides a wafer inspection system 200, which includes: a base 210, a tester 220, a flipping mechanism 230, and a support device 100 provided in this application; the base 210 is used to set a probe card, and a sample to be tested is placed inside the base 210; the tester 220 is set on one side of the base 210 through the flipping mechanism 230 and is electrically connected to the probe card to test the sample to be tested; the support device 100 is set on the base 210 and is used to support the tester 220.

[0079] This application provides a wafer inspection system 200. When the tester 220 is disposed on one side of the base 210 via the flipping mechanism 230, the tester 220 is electrically connected to the probe card on the base 210 and contacts the sample to be tested located in the base 210 through the probe card to inspect the sample. The mounting member 110 of the support device 100 is mounted on the base 210, and the movable member 120 can move relative to the mounting member 110 along the first direction, the second direction, and the third direction, respectively, to adjust the height of the support device 100 in the first direction, so that the support device 100 is at a preset height, so that the side of the movable member 120 away from the mounting member 110 can abut against the test machine 220 and support the test machine 220, preventing the test machine 220 from tilting towards the side closer to the base 210, which helps to improve the stability of the electrical connection between the test machine 220 and the probe card, thereby improving the accuracy of the wafer inspection system 200 in inspecting the sample to be inspected. The support device 100 and the wafer system have good performance.

[0080] In some embodiments, the number of support devices 100 is two, and the two support devices 100 are arranged at intervals; the wafer inspection system 200 further includes a connector 240, the connector 240 is fixedly connected to the mounting parts 110 of the two support devices 100, and the connector 240 is also fixedly connected to the base 210.

[0081] In this embodiment, there are two support devices 100, which cooperate with each other to provide more stable support for the testing machine 220. The connecting seat 240 is mounted on the base 210 and connects the mounting parts 110 of the two support devices 100 and the base 210, thereby further improving the structural stability of the testing machine 220 located on one side of the base 210, facilitating the electrical connection between the testing machine 220 and the probe card, and improving the accuracy of the wafer inspection system 200 in detecting the sample to be tested.

[0082] In this application, the terms "embodiment" and "implementation" mean that a specific feature, structure, or characteristic described in connection with an embodiment can be included in at least one embodiment of this application. The appearance of these phrases in various locations throughout the specification does not necessarily refer to the same embodiment, nor are they independent or alternative embodiments mutually exclusive with other embodiments. Those skilled in the art will understand, explicitly and implicitly, that the embodiments described in this application can be combined with other embodiments. Furthermore, it should be understood that the features, structures, or characteristics described in the various embodiments of this application can be arbitrarily combined to form another embodiment that does not depart from the spirit and scope of the technical solution of this application, provided there is no contradiction between them.

[0083] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application and are not intended to limit it. Although this application has been described in detail with reference to the above preferred embodiments, those skilled in the art should understand that modifications or equivalent substitutions to the technical solutions of this application should not depart from the spirit and scope of the technical solutions of this application.

Claims

1. A height adjustable support device, characterized in that, The support device includes: Installation components; A movable component is disposed on one side of the mounting component, the mounting component and the movable component are arranged along a first direction, the movable component is slidably connected to the mounting component along a second direction, and the side of the movable component facing away from the mounting component is used to support the component to be supported, wherein the first direction intersects the second direction; An adjustment assembly includes a first adjustment member, a second adjustment member, and a limiting member; the first adjustment member extends along a third direction and is sequentially inserted through the movable member and the mounting member; the second adjustment member is rotatably connected to the mounting member and sleeved on the first adjustment member; the second adjustment member is movable relative to the first adjustment member along a third direction; the limiting member is inserted on the side of the movable member opposite to the mounting member and is used to abut against the first adjustment member; the third direction intersects the first direction and the second direction respectively. When the mounting component and the moving component are in a preset position so that the support device has a preset height, the limiting component abuts against the first adjusting component. The first adjusting component, the second adjusting component, and the limiting component cooperate to limit the relative position of the mounting component and the moving component. When the height of the support device is adjusted, the limiting member separates from the first adjusting member. When the first adjusting member is rotated and the second adjusting member moves relative to the first adjusting member in a third direction, the second adjusting member drives the moving member to move relative to the mounting member in the first direction, the second direction and the third direction respectively, so as to adjust the height of the support device in the first direction.

2. The support device of claim 1, wherein The movable component includes a first end face, a second end face, and a third end face that are bent and connected in sequence. The movable component also has a first through hole and a second through hole that are connected to each other. The first through hole passes through the first end face and the second end face, and the second through hole passes through the third end face. The mounting component has a first surface and a second surface that are bent and connected. The first surface abuts against the first end face and the first surface and the first end face can slide along a second direction. The second surface is disposed opposite to the second end face. The mounting component also has a through hole that passes through the first surface and the second surface respectively. The first adjusting member is sequentially inserted through the first through hole and the through hole, and the limiting member is inserted through the second through hole; the second adjusting member is at least partially located inside the through hole.

3. The support device of claim 2, wherein, The first end face and the second end face are set at an acute angle. The mounting member also has a third surface. The third surface is bent and connected to the end of the second surface that is away from the first surface. The third surface is set opposite to the third end face and is set at an acute angle to the first surface.

4. The support device of claim 1, wherein, The adjustment assembly further includes a rotating component, which is sleeved on the end of the first adjustment component opposite to the second adjustment component and embedded in the moving component. The rotating component is rotatably connected to the moving component, and the first adjustment component is rotatably connected to the rotating component.

5. The support device of claim 4, wherein, The adjustment assembly further includes a bearing and a retaining member. The bearing is sleeved on the first adjustment member and located between the first adjustment member and the rotating member. The bearing connects the first adjustment member and the rotating member respectively, so that the first adjustment member can be rotatably connected to the rotating member. The retaining member is disposed on the side of the rotating member facing the second adjustment member and abuts against the bearing to limit the position of the bearing in a third direction.

6. The support apparatus of claim 3, wherein The movable component includes a movable body and a track portion. The movable body includes a first end face, a second end face, and a third end face. The track portion is disposed on the first end face. The mounting component has a track groove that is recessed into the first surface. When the movable component is disposed on one side of the mounting component, the track portion is located in the track groove, and the track portion can slide relative to the track groove along the second direction.

7. The support apparatus of claim 4, wherein The adjustment assembly further includes a locking member, which is sleeved on the first adjustment member and located at the end of the second adjustment member opposite to the rotating member, for positioning the relative position of the second adjustment member and the first adjustment member.

8. The support apparatus of claim 4, wherein The first direction, the second direction, and the third direction are located on the same plane. The adjustment assembly further includes a first rotating shaft and a second rotating shaft. The first rotating shaft passes through the second adjusting member and the mounting member in sequence, so that the second adjusting member can be rotatably connected to the mounting member. The second rotating shaft passes through the rotating member and the moving member in sequence, so that the rotating member can be rotatably connected to the moving member. The first rotating shaft and the second rotating shaft both extend along a fourth direction, which is perpendicular to the first direction, the second direction, and the third direction, respectively.

9. A wafer inspection system, characterized by, The wafer inspection system includes: a substrate, a tester, a flipping mechanism, and a support device as described in any one of claims 1 to 8; the substrate is used to set a probe card, and a sample to be tested is placed inside the substrate; the tester is set on one side of the substrate through the flipping mechanism and is electrically connected to the probe card to test the sample to be tested; the support device is set on the substrate and is used to support the tester.

10. The wafer inspection system of claim 9, wherein, The number of support devices is two, and the two support devices are arranged at an interval; the wafer inspection system also includes a connector, which is fixedly connected to the mounting parts of the two support devices, and the connector is also fixedly connected to the base.

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