Wafer stage assembly and chip testing platform

Abstract

This utility model discloses a wafer stage assembly and a chip testing platform, relating to the field of chip testing technology. It includes a base, a wafer stage, a driving component, an active cam, a follower cam assembly, and a transmission assembly. The driving component is mounted on the base, and the active cam is sleeved on the output shaft of the driving component. The follower cam assembly includes a support base, a transmission shaft, and a follower cam sleeved on the transmission shaft. The support base is mounted on the base, and one end of the transmission shaft is rotatably mounted on the support base. The active cam and the follower cam are respectively disposed on both sides of the wafer stage, and are symmetrically arranged. Both the active cam and the follower cam are used to contact the bottom of the wafer stage to drive the wafer stage to rise or fall. The transmission assembly is mounted on the base, and the output shaft of the driving component and the other end of the transmission shaft are both connected to the transmission assembly. The output shaft of the driving component drives the transmission shaft to rotate through the transmission assembly.

Description

Technical Field

[0001] This utility model relates to the field of chip testing technology, and in particular to a wafer stage assembly and a chip testing platform. Background Technology

[0002] With the rapid growth in demand for LED products, the demand for existing LED chips is also constantly increasing, and multiple stages require quality inspection of the chips; in particular, the requirements for the function and performance of large-scale chip testing equipment will continue to improve.

[0003] In existing large-scale chip testing platforms, the platform itself does not move up and down. Instead, large pin headers move up and down to test photoelectric parameters. However, because the large pin headers occupy a lot of space, the motors that drive them also need to be larger and more numerous, which leads to high testing costs.

[0004] Therefore, it is necessary to provide a new wafer stage assembly and chip testing platform to solve the above-mentioned technical problems. Utility Model Content

[0005] The main purpose of this invention is to propose a wafer stage assembly and a chip testing platform, aiming to improve the technical problem of high testing costs in the prior art.

[0006] To achieve the above objectives, according to one aspect of the present invention, a plate support assembly is provided, comprising: Base; Film receiving platform; A driving component, the driving component being mounted on the base; An active cam, which is sleeved on the output shaft of the drive component; A follower cam assembly includes a support base, a drive shaft, and a follower cam sleeved on the drive shaft. The support base is mounted on the base, and one end of the drive shaft is rotatably mounted on the support base. The drive cam and the follower cam are respectively disposed on both sides of the plate-bearing stage, and the drive cam and the follower cam are symmetrically arranged. Both the drive cam and the follower cam are used to contact the bottom of the plate-bearing stage to drive the plate-bearing stage to rise or fall. A transmission assembly is mounted on the base. The output shaft of the drive component and the other end of the transmission shaft are both connected to the transmission assembly. The output shaft of the drive component drives the transmission shaft to rotate through the transmission assembly.

[0007] In one embodiment, the transmission assembly includes a first transmission wheel, a second transmission wheel, and a synchronous belt. The first transmission wheel is sleeved on the output shaft of the drive component, and the second transmission wheel is sleeved on the transmission shaft. The first transmission wheel and the second transmission wheel are connected by the synchronous belt.

[0008] In one embodiment, the transmission assembly further includes two support blocks, both of which are disposed on the base and spaced apart. The output shaft of the drive component is rotatably mounted on one of the support blocks, and the end of the transmission shaft away from the support base is rotatably mounted on the other support block.

[0009] In one embodiment, the transmission assembly further includes a tensioning wheel component, which includes a mounting base and a tensioning wheel. A fixed shaft is provided on the mounting base, and the tensioning wheel is rotatably sleeved on the fixed shaft. The mounting base is mounted on the base, and the tensioning wheel is in rolling contact with the timing belt.

[0010] In one embodiment, there are multiple tensioning wheels, which are spaced apart along the length of the fixed shaft.

[0011] In one embodiment, the number of tensioning wheel components is at least two, and the two tensioning wheel components are arranged at intervals.

[0012] In one embodiment, the driving component includes a first driving motor and a connecting shaft. The output shaft of the first driving motor is connected to the connecting shaft via a coupling. The active cam is sleeved on the connecting shaft, and the end of the connecting shaft away from the first driving motor is connected to the transmission assembly for transmission.

[0013] In one embodiment, the plate-bearing stage assembly further includes a base, a second drive motor, and a rotary motor. The base is mounted on the base and has a track. The second drive motor is mounted on the base. The rotary motor is connected to the output shaft of the second drive motor and is slidably connected to the track. The rotary motor is connected to the plate-bearing stage to drive the plate-bearing stage to rotate.

[0014] In one embodiment, the plate stage assembly further includes a controller and a sensing component. The rotary motor is equipped with a sensing plate, and the sensing component is used to sense whether the sensing plate passes through the sensing component. Both the sensing component and the second drive motor are signal-connected to the controller.

[0015] According to another aspect of the utility model, the present utility model also provides a chip testing platform, including a frame, a horizontal motion component, an integrating sphere component, a three-dimensional pin header component, and the aforementioned wafer stage component. The horizontal motion component is disposed on the frame, the wafer stage component is fixed to the horizontal motion component, and both the integrating sphere component and the three-dimensional pin header component are disposed on the frame. The integrating sphere component includes a front-facing integrating sphere capable of moving in a vertical direction for front-facing light collection. The wafer stage component is used to carry the chip and to drive the chip to contact the three-dimensional pin header component.

[0016] In the above scheme, the substrate receiving stage assembly includes a base, a substrate receiving stage, a drive component, a drive cam, a follower cam assembly, and a transmission assembly. The substrate receiving stage is telescopically mounted on the base, the drive component is mounted on the base, the drive cam is sleeved on the output shaft of the drive component, and the follower cam assembly includes a support base, a transmission shaft, and a follower cam sleeved on the transmission shaft. The support base is mounted on the base, and one end of the transmission shaft is rotatably mounted on the support base. The drive cam and the follower cam are respectively located on both sides of the substrate receiving stage, and are symmetrically arranged. Both the drive cam and the follower cam are used to contact the bottom of the substrate receiving stage to drive the substrate receiving stage to rise or fall. The transmission assembly is mounted on the base, and the output shaft of the drive component and the other end of the transmission shaft are both connected to the transmission assembly. The output shaft of the drive component drives the transmission shaft to rotate through the transmission assembly. Specifically, after the drive component is started, its output shaft begins to rotate. The output shaft of the drive component directly drives the drive cam sleeved on the output shaft to rotate synchronously, and transmits the rotational motion of the output shaft to the other end of the transmission shaft through the transmission assembly, driving the transmission shaft to rotate, and in turn driving the follower cam sleeved on the transmission shaft to rotate synchronously. The active cam and the follower cam rotate synchronously, driving the wafer stage to rise and fall. Because the active and follower cams are symmetrically positioned on both sides of the wafer stage and rotate synchronously via a transmission assembly, their contours change their contact position with the bottom of the wafer stage as they rotate. This drives the wafer stage to rise or fall along the extension / retraction direction of the base. When the active and follower cams rotate to a region with a larger contour radius and contact the bottom of the wafer stage, they exert an upward thrust on the bottom of the wafer stage, lifting it up and allowing the chip on the wafer stage to contact the multi-pin header for chip performance testing. After testing, when the active and follower cams rotate to a region with a smaller contour radius and contact the bottom of the wafer stage, their supporting force on the wafer stage decreases. The wafer stage descends along the base under its own gravity, returning to its initial position. Then, the chip on the wafer stage is replaced, and the driving component continuously outputs power. The active and follower cams continue to rotate synchronously, and through the periodic change of their contour radius, they drive the wafer stage to achieve a reciprocating cycle of rising, falling, and rising again, for testing to be performed again. This invention utilizes the characteristic that the contour radii of the active cam and the follower cam change with rotation to achieve smooth up-and-down movement of the plate stage. This allows for a fixed setting of the three-dimensional multi-core pin header, requiring only one drive component to achieve the testing function, significantly reducing testing costs and greatly increasing production capacity and work efficiency. Furthermore, the three-dimensional multi-core pin header does not require a motor drive, resulting in a larger space for testing smaller core sizes. The fixed position is also closer to the pin tip, leading to higher testing efficiency. Attached Figure Description

[0017] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the structures shown in these drawings without creative effort.

[0018] Figure 1 A schematic diagram of the structure of an embodiment of the plate support assembly provided by this utility model; Figure 2 A schematic diagram of the structure of an embodiment of the chip testing platform provided by this utility model; Figure 3 This is a schematic diagram of an embodiment of the active cam provided by this utility model.

[0019] Explanation of icon numbers: 100. Plate receiving platform assembly; 1. Base; 2. Plate receiving platform; 3. Drive component; 4. Active cam; 5. Follower cam assembly; 6. Transmission component; 51. Support seat; 52. Drive shaft; 53. Follower cam; 61. First transmission wheel; 62. Second transmission wheel; 63. Synchronous belt; 64. Support block; 65. Tensioner assembly; 651. Mounting seat; 651a. Fixed shaft; 652. Tensioner; 31. First drive motor; 32. Connecting shaft; 7. Second drive motor; 8. Rotary motor; 11. Track; 9. Sensing component; 81. Sensing plate; 102. Base; 321a. Ascending section; 321b. Far rest section; 321c. Descending section; 321d. Near rest section; 101. Chip testing platform; 101a. Rack; 101b. Horizontal motion assembly; 101c. Integrating sphere assembly; 101d. Three-dimensional pin header assembly.

[0020] The realization of the purpose, functional features and advantages of this utility model will be further explained in conjunction with the embodiments and with reference to the accompanying drawings. Detailed Implementation

[0021] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the scope of protection of the present utility model.

[0022] It should be noted that if the embodiments of this utility model involve directional indicators (such as up, down, left, right, front, back, etc.), the directional indicators are only used to explain the relative positional relationship and movement of the components in a specific posture. If the specific posture changes, the directional indicators will also change accordingly.

[0023] Furthermore, if the embodiments of this utility model involve descriptions such as "first" or "second," these descriptions are for descriptive purposes only and should not be construed as indicating or implying their relative importance or implicitly specifying the number of technical features indicated. Therefore, a feature defined with "first" or "second" may explicitly or implicitly include at least one of those features. Additionally, the use of "and / or" or "and / or" throughout the text includes three parallel solutions. For example, "A and / or B" includes solution A, solution B, or a solution where both A and B are satisfied simultaneously. Furthermore, the technical solutions of the various embodiments can be combined with each other, but this must be based on the ability of those skilled in the art to implement them. When the combination of technical solutions is contradictory or impossible to implement, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection claimed by this utility model.

[0024] To achieve the above objectives, please refer to Figure 1According to one aspect of the present invention, a substrate support assembly 100 is provided, including a base 1, a substrate support 2, a driving component 3, a driving cam 4, a follower cam assembly 5, and a transmission assembly 6. The driving component 3 is mounted on the base 1, and the driving cam 4 is sleeved on the output shaft of the driving component 3. The follower cam assembly 5 includes a support seat 51, a transmission shaft 52, and a follower cam 53 sleeved on the transmission shaft 52. The support seat 51 is mounted on the base 1, and one end of the transmission shaft 52 is rotatably mounted on the support seat 51. The driving cam 4 and the follower cam 53 are respectively disposed on both sides of the substrate support 2, and the driving cam 4 and the follower cam 53 are symmetrically disposed. Both the driving cam 4 and the follower cam 53 are used to contact the bottom of the substrate support 2 to drive the substrate support 2 to rise or fall. The transmission assembly 6 is mounted on the base 1, and the output shaft of the driving component 3 and the other end of the transmission shaft 52 are both connected to the transmission assembly 6. The output shaft of the driving component 3 drives the transmission shaft 52 to rotate through the transmission assembly 6. Specifically, after the drive component 3 is started, its output shaft begins to rotate. The output shaft of the drive component 3 directly drives the active cam 4, which is sleeved on the output shaft, to rotate synchronously. The rotational motion of the output shaft is transmitted to the other end of the transmission shaft 52 through the transmission assembly 6, driving the transmission shaft 52 to rotate, which in turn drives the follower cam 53, which is sleeved on the transmission shaft 52, to rotate synchronously. The active cam 4 and the follower cam 53 rotate synchronously, pushing the support platform 2 to rise and fall. Since the active cam 4 and the follower cam 53 are symmetrically arranged on both sides of the support platform 2 and rotate synchronously through the transmission assembly 6, their contours will change their contact position with the bottom of the support platform 2 as they rotate, thereby driving the support platform 2 to rise or fall along the extension and retraction direction of the base 1. When the active cam 4 and the follower cam 53 rotate to a region with a larger contour radius and contact the bottom of the support platform 2, the active cam 4 and the follower cam 53 generate an upward thrust on the bottom of the support platform 2, lifting the support platform 2 and achieving the upward movement, so that the core on the support platform 2... The chip contacts the multi-core pin header to perform chip performance testing. After the test, when the active cam 4 and the follower cam 53 rotate to a region with a smaller contour radius and contact the bottom of the support platform 2, the supporting force of the active cam 4 and the follower cam 53 on the support platform 2 decreases. The support platform 2 descends along the base 1 under its own gravity and returns to the initial position. Then, the chip on the support platform 2 is replaced, and the drive component 3 continuously outputs power. The active cam 4 and the follower cam 53 rotate synchronously and continuously. Through the periodic change of the contour radius, the support platform 2 is driven to achieve a reciprocating cycle of rising, falling, and rising again to perform the test again.This embodiment utilizes the characteristic that the contour radii of the active cam 4 and the follower cam 53 change with rotation to achieve smooth up and down movement of the support stage 2. In this way, the three-dimensional multi-core pin header can be fixedly set up, and only one drive component 3 is needed to realize the testing function, which greatly reduces the testing cost and greatly increases the production capacity and work efficiency. Furthermore, the three-dimensional multi-core pin header does not require a motor drive component, which makes the space of the three-dimensional multi-core pin header larger than before, enabling the testing of smaller core sizes. The distance between the fixed position and the pin tip is smaller, resulting in higher testing efficiency.

[0025] Please see Figure 3 The outer periphery of both the driving cam 4 and the follower cam 53 includes an ascending section 321a, a far-resting section 321b, a descending section 321c, and a near-resting section 321d. The initial radius of the ascending section 321a is... The radius of the ascending segment 321a increases linearly, and the central angle corresponding to the ascending segment 321a is... ; The initial radius of the descent segment 321c is The radius of the descending segment 321c decreases linearly, and the central angle corresponding to the descending segment 321c is... ; The radius of the far rest segment 321b remains unchanged. The radius of the near rest segment 321d remains unchanged. The central angle corresponding to the far rest segment 321b is The central angle corresponding to the near rest segment 321d is ; in, + + + =360°.

[0026] The outer perimeter contour, through a segmented design of rising section 321a, far-end section 321b, falling section 321c, and near-end section 321d, combined with a combination of linear radius variation and fixed radius, achieves multiple optimizations in motion control, testing stability, and operational efficiency. The linearly increasing radius of rising section 321a means that the supporting force of cam 32 on the substrate 2 changes uniformly with the rotation angle, and the rising speed and acceleration of substrate 2 are controllable. The linearly decreasing radius of falling section 321c, symmetrical to rising section 321a, ensures that substrate 2 descends at a uniform speed or with uniform deceleration under gravity assistance, avoiding vibration caused by rapid fall and protecting the stability of chip placement.

[0027] When the cam rotates to the far rest section 321b, the contour radius remains at its maximum, the wafer support stage 2 is stably supported at its highest position, and the chip is in complete contact with the multi-pin header. At this time, the central angle... The angle directly corresponds to the test duration. This avoids the problem of slight wobbling of the stage 2 caused by the continuous rotation of the cam in traditional continuous design, ensuring that the contact pressure and position between the chip and the pin header are completely stable during the test, reducing test data errors caused by poor contact, and improving the consistency and reliability of test results.

[0028] When the cam rotates to the near-rest point 321d, the contour radius remains at its minimum, and the support platform 2 stably stops at its initial low position. At this time, the central angle... The angle corresponds to the chip replacement time.

[0029] Operators or automated equipment are provided with an interference-free material changing window to prevent the wafer carrier 2 from accidentally rising or falling during chip replacement, thereby reducing the risk of chip falling and improving material changing efficiency.

[0030] Please see Figure 1In one embodiment, the transmission assembly 6 includes a first transmission wheel 61, a second transmission wheel 62, and a synchronous belt 63. The first transmission wheel 61 is mounted on the output shaft of the drive component 3, and the second transmission wheel 62 is mounted on the drive shaft 52. The first transmission wheel 61 and the second transmission wheel 62 are connected by the synchronous belt 63. After the drive component 3 is started, its output shaft rotates, directly driving the first transmission wheel 61 mounted on the output shaft to rotate synchronously. At this time, the first transmission wheel 61 serves as the power input end, transmitting the rotational motion of the drive component 3 to the synchronous belt 63. When the first transmission wheel 61 rotates, it transmits the rotational motion to the second transmission wheel 62 through the tensioned synchronous belt 63. Since the synchronous belt 63 and the transmission wheel mesh with teeth, the rotational speed and direction of the first transmission wheel 61 can be accurately transmitted to the second transmission wheel 62, achieving synchronous motion without slippage. The second transmission wheel 62 is mounted on the other end of the drive shaft 52, and its rotation directly drives the drive shaft 52 to rotate. The drive shaft 52 then drives the follower cam 53 mounted on it to rotate synchronously. At this time, the output shaft of the drive component 3 simultaneously drives the active cam 4 to rotate, while the follower cam 53, through the synchronous belt 63, achieves synchronized motion with the active cam 4 in terms of speed and direction. Because the active cam 4 and the follower cam 53 rotate synchronously, their contours and contact positions with the bottom of the support platform 2 change synchronously. When they rotate to a large radius area and contact the support platform 2, they jointly push the support platform 2 upwards, achieving a smooth rise; when they rotate to a small radius area and contact, the support platform 2 descends synchronously under the action of gravity or the reset mechanism. Throughout the process, the movements of the cams on both sides are completely coordinated, avoiding tilting of the support platform 2 caused by unilateral force or motion lag. The synchronous transmission design with toothed meshing not only achieves stable power transmission but also plays a crucial role in improving the performance of the entire support platform assembly 100. The synchronous belt 63 and the transmission wheel achieve zero-slip transmission through toothed meshing, ensuring that the speed and direction of the first transmission wheel 61 and the second transmission wheel 62 are completely consistent. This ensures that the rotation angle and phase of the active cam 4 and the follower cam 53 are strictly synchronized, avoiding tilting or jamming of the support platform 2 due to delays in the movement or speed differences of the two cams, and significantly improving the stability of the lifting process. The transmission ratio error of the synchronous belt 63 is extremely small, and there is no cumulative error during transmission. The rotation angle of the output shaft of the drive component 3 can be accurately transmitted to the follower cam 53 through the synchronous belt 63. Combined with the direct drive of the active cam 4, the dual cams provide higher precision control over the lifting stroke of the support platform 2, meeting the position repeatability requirements of high-precision equipment.

[0031] Please see Figure 1In one embodiment, the transmission assembly 6 further includes two support blocks 64, both of which are disposed on the base 1 and spaced apart. The output shaft of the drive component 3 is rotatably mounted on one of the support blocks 64, and the end of the transmission shaft 52 away from the support seat 51 is rotatably mounted on the other support block 64. During rotation, if the output shaft of the drive component 3 and the transmission shaft 52 rely only on one-sided support, radial deflection or axial movement is easily generated due to shaft length or load, which leads to a decrease in the meshing accuracy of the first transmission wheel 61 and the second transmission wheel 62 with the synchronous belt 63, and may even cause vibration and noise. The output shaft of the drive component 3 is supported at two points through the housing of the drive component 3 and one support block 64, and the transmission shaft 52 is supported at two points through the support seat 51 and the other support block 64, which is equivalent to providing double-point fixation for the two shafts, significantly improving the rigidity of the shaft system. After the shaft deflection is reduced, the rotation axes of the first transmission wheel 61 and the second transmission wheel 62 can remain strictly parallel, and the meshing of the synchronous belt 63 with the teeth of the transmission wheel is more precise, avoiding the problem of one-sided meshing or skipping teeth caused by shaft tilt, and ensuring a smooth and shock-free transmission process.

[0032] Please see Figure 1 In one embodiment, the transmission assembly 6 further includes a tensioning wheel component 65, which includes a mounting base 651 and a tensioning wheel 652. A fixed shaft 651a is provided on the mounting base 651, and the tensioning wheel 652 is rotatably sleeved on the fixed shaft 651a. The mounting base 651 is mounted on the base 1, and the tensioning wheel 652 makes rolling contact with the synchronous belt 63. By making rolling contact with the synchronous belt 63 and applying appropriate pressure, the tensioning wheel 652 can dynamically compensate for the slack of the synchronous belt 63, ensuring that the synchronous belt 63 always maintains tight engagement with the first transmission wheel 61 and the second transmission wheel 62, avoiding tooth skipping, slippage, or transmission lag caused by belt slack. This ensures the strict synchronous rotation of the active cam 4 and the follower cam 53, thereby ensuring coordinated lifting and lowering actions on both sides of the bearing platform 2, preventing tilting or jamming, and improving the overall system positioning accuracy.

[0033] Please see Figure 1 In one embodiment, there are multiple tensioning pulleys 652, which are spaced apart along the length of the fixed shaft 651a. A single tensioning pulley 652 may only contact a localized area of ​​the synchronous belt 63, potentially resulting in ineffective tension at the edges of the synchronous belt 63. This could lead to one-sided contact when the belt engages with the drive pulley, causing uneven load distribution. This embodiment uses multiple tensioning pulleys 652 spaced apart along the length of the fixed shaft 651a, allowing them to simultaneously contact different width positions of the synchronous belt 63. This ensures that the tension is evenly distributed along the width of the synchronous belt 63, guaranteeing tight engagement between the belt and the drive pulley teeth across the entire width, preventing tooth skipping due to localized slack or belt stretching deformation due to excessive tightness.

[0034] Please see Figure 1In one embodiment, at least two tensioning pulley components 65 are provided, spaced apart. A single tensioning pulley component 65 can only apply tension force at a fixed position on the synchronous belt 63. If the synchronous belt 63 is long, it is easy for local slack to remain on both sides of the tension point, causing segmental skipping or uneven force when the belt meshes with the drive pulley. By arranging two tensioning pulley components 65 spaced apart along the length of the synchronous belt 63, tension force can be applied independently to different length sections of the synchronous belt 63, making the tension force evenly distributed along the entire length of the belt. For example, the tensioning pulley 652 near the first drive pulley 61 ensures the meshing accuracy at the input end of the belt, while the tensioning pulley 652 near the second drive pulley 62 ensures the meshing stability at the output end, avoiding the phenomenon of tightness in the middle and looseness at both ends caused by single-point tensioning, and significantly reducing fatigue damage to the synchronous belt 63 caused by local stress concentration.

[0035] Please see Figure 1 In one embodiment, the drive component 3 includes a first drive motor 31 and a connecting shaft 32. The output shaft of the first drive motor 31 is connected to the connecting shaft 32 via a coupling. The drive cam 4 is sleeved on the connecting shaft 32, and the end of the connecting shaft 32 away from the first drive motor 31 is connected to the transmission assembly 6. The drive component 3 needs to drive both the drive cam 4 and the transmission assembly 6 simultaneously, and the torque transmitted by the connecting shaft 32 is relatively large and may fluctuate. As a torque transmission intermediary, the coupling needs to compensate for deviations and buffer impacts while ensuring torque transmission without loss. Furthermore, the connecting shaft 32 can be rotated to different lengths according to the size of the equipment to achieve the transmission of motion and force.

[0036] Please see Figure 1 In one embodiment, the sheet support assembly 100 further includes a base 102, a second drive motor 7, and a rotary motor 8. The base 1 is mounted on the base 102, and the base 102 is provided with a track 11. The second drive motor 7 is mounted on the base 102, and the rotary motor 8 is connected to the output shaft of the second drive motor 7. The rotary motor 8 is slidably connected to the track 11 and connected to the sheet support 2 to drive the sheet support 2 to rotate. By driving the rotary motor 8 to slide along the track 11 through the second drive motor 7, the sheet support 2 is driven to move linearly, meeting the material transfer needs between different workstations.

[0037] Please see Figure 1In one embodiment, the support platform assembly 100 further includes a controller and a sensing component 9. The rotary motor 8 is equipped with a sensing plate 81, and the sensing component 9 is used to sense whether the sensing plate 81 passes through the sensing component 9. The sensing component 9 and the second drive motor 7 are both signal-connected to the controller. In fact, the sensing component 9 has two oppositely arranged protrusions, and an infrared sensor is set at the relative position of the two protrusions. When the sensing plate 81 moves between the two protrusions, the sensing plate 81 blocks the infrared sensor, thus interrupting the infrared sensor. When the sensing component 9 detects that the rotary motor 8 has moved into position along the track 11, the controller immediately sends a signal to the second drive motor 7, and the second drive motor 7 stops running, thus stopping the rotary motor 8 from moving. This achieves automatic limiting and prevents the rotary motor 8 from moving outside the track 11.

[0038] According to another aspect of the utility model, please refer to Figure 2This utility model also provides a chip testing platform 101, including a frame 101a, a horizontal motion component 101b, an integrating sphere component 101c, a three-dimensional pin holder component 101d, and the aforementioned wafer stage component 100. The horizontal motion component 101b is disposed on the frame 101a, and the wafer stage component 100 is fixed to the horizontal motion component 101b. The integrating sphere component 101c and the three-dimensional pin holder component 101d are both disposed on the frame 101a. The integrating sphere component 101c includes a front-facing integrating sphere capable of moving vertically to achieve front-facing light collection. The wafer stage component 100 is used to carry the chip and to drive the chip to contact the three-dimensional pin holder component 101d. An external robotic arm or manual placement of the chip to be tested onto the bearing surface of the wafer stage component 100 activates the vacuum adsorption device of the wafer stage 100 to ensure that the chip does not shift. The three-dimensional pin header assembly 101d is located directly above the chip. Then, the first drive motor 31 is activated. The output shaft of the first drive motor 31 drives the active cam 4 to rotate synchronously, and the rotational motion of the output shaft is transmitted to the other end of the drive shaft 52 through the transmission assembly 6, driving the drive shaft 52 to rotate. This, in turn, drives the follower cam 53, which is sleeved on the drive shaft 52, to rotate synchronously. The synchronous rotation of the active cam 4 and the follower cam 53 pushes the substrate 2 up and down. Since the active cam 4 and the follower cam 53 are symmetrically arranged on both sides of the substrate 2 and rotate synchronously through the transmission assembly 6, their contours change their contact position with the bottom of the substrate 2 as they rotate, thus driving the substrate 2 to rise or fall along the extension / retraction direction of the base 1. When the active cam 4 and the follower cam 53 rotate to a region with a larger contour radius and contact the bottom of the substrate 2, the active cam 4 and the follower cam 53 generate an upward thrust on the bottom of the substrate 2, lifting the substrate 2 and achieving upward movement. The front integrating sphere descends vertically. Adjust the test area to be flush with the chip surface, ensuring the light-collecting lens is directly facing the chip's light-emitting area. The chip receives the test signal through a three-dimensional pin header. After the chip emits light, the front integrating sphere collects the front light signal, converts it into an electrical signal, and transmits it to the test system to measure optical parameters such as luminous flux, color coordinates, and color temperature. After the test is completed, when the active cam 4 and follower cam 53 rotate to a region with a smaller contour radius and contact the bottom of the substrate 2, the supporting force of the active cam 4 and follower cam 53 on the substrate 2 decreases. The substrate 2 descends along the base 1 under its own gravity, returning to its initial position, and then the chip on the substrate 2 is replaced. Since the chip test platform 101 includes all the embodiments of the above-described substrate assembly 100, it has at least all the beneficial effects brought by all the above-described embodiments, which will not be described in detail here.

[0039] The above are merely exemplary embodiments of this utility model and do not limit the scope of protection of this utility model. Any equivalent structural transformations made based on the technical concept of this utility model and the contents of this utility model specification and drawings, or direct / indirect applications in other related technical fields, are included within the scope of protection of this utility model.

Claims

1. A plate-supporting stage assembly, characterized in that, include: Base; Film receiving platform; A driving component, the driving component being mounted on the base; An active cam, which is sleeved on the output shaft of the drive component; A follower cam assembly includes a support base, a drive shaft, and a follower cam sleeved on the drive shaft. The support base is mounted on the base, and one end of the drive shaft is rotatably mounted on the support base. The drive cam and the follower cam are respectively disposed on both sides of the plate-bearing stage, and the drive cam and the follower cam are symmetrically arranged. Both the drive cam and the follower cam are used to contact the bottom of the plate-bearing stage to drive the plate-bearing stage to rise or fall. A transmission assembly is mounted on the base. The output shaft of the drive component and the other end of the transmission shaft are both connected to the transmission assembly. The output shaft of the drive component drives the transmission shaft to rotate through the transmission assembly.

2. The substrate support assembly as described in claim 1, characterized in that, The transmission assembly includes a first transmission wheel, a second transmission wheel, and a synchronous belt. The first transmission wheel is sleeved on the output shaft of the drive component, and the second transmission wheel is sleeved on the transmission shaft. The first transmission wheel and the second transmission wheel are connected by the synchronous belt.

3. The sheet receiving station assembly of claim 2, wherein, The transmission assembly further includes two support blocks, both of which are disposed on the base and spaced apart. The output shaft of the drive component is rotatably mounted on one of the support blocks, and the end of the transmission shaft away from the support base is rotatably mounted on the other support block.

4. The substrate support assembly as described in claim 2, characterized in that, The transmission assembly further includes a tensioning wheel component, which includes a mounting base and a tensioning wheel. A fixed shaft is provided on the mounting base, and the tensioning wheel is rotatably sleeved on the fixed shaft. The mounting base is installed on the base, and the tensioning wheel is in rolling contact with the timing belt.

5. The substrate support assembly as described in claim 4, characterized in that, The number of tensioning wheels is multiple, and the multiple tensioning wheels are spaced apart along the length direction of the fixed shaft.

6. The substrate assembly as described in claim 4, characterized in that, The number of tensioning wheel components is at least two, and the two tensioning wheel components are arranged at intervals.

7. The sheet receiving station assembly of claim 1, wherein The driving component includes a first driving motor and a connecting shaft. The output shaft of the first driving motor is connected to the connecting shaft via a coupling. The active cam is sleeved on the connecting shaft. The end of the connecting shaft away from the first driving motor is connected to the transmission assembly.

8. The substrate stage assembly as described in claim 1, characterized in that, The plate-bearing stage assembly further includes a base, a second drive motor, and a rotary motor. The base is mounted on the base, and the base is provided with a track. The second drive motor is mounted on the base, and the rotary motor is connected to the output shaft of the second drive motor. The rotary motor is slidably connected to the track and is connected to the plate-bearing stage to drive the plate-bearing stage to rotate.

9. The substrate assembly as described in claim 8, characterized in that, The plate-bearing stage assembly also includes a controller and a sensing component. The rotary motor is equipped with a sensing plate, and the sensing component is used to sense whether the sensing plate passes through the sensing component. Both the sensing component and the second drive motor are signal-connected to the controller.

10. A chip testing platform, characterized in that, The device includes a frame, a horizontal motion assembly, an integrating sphere assembly, a three-dimensional pin header assembly, and a wafer stage assembly as described in any one of claims 1 to 9. The horizontal motion assembly is disposed on the frame, the wafer stage assembly is fixed to the horizontal motion assembly, and both the integrating sphere assembly and the three-dimensional pin header assembly are disposed on the frame. The integrating sphere assembly includes a front-facing integrating sphere capable of moving in a vertical direction for front-facing light collection. The wafer stage assembly is used to carry the chip and to drive the chip to contact the three-dimensional pin header assembly.

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