Probe resistance testing apparatus

Abstract

The utility model discloses a kind of probe resistance test equipment, including support table, support table top is fixedly installed upper support beam through stand column, elbow clamp is provided on upper support beam, equalizing plate is installed in elbow clamp bottom, upper pressing plate is installed on support table through guide column;Equalizing plate is sequentially installed with upper conducting plate, probe upper needle plate, probe holding plate from top to bottom below, holding plate is fixed in probe upper needle plate lower end surface by screw lock;Support table upper end surface is sequentially provided with support plate, lower conducting PCB plate, probe lower needle plate from bottom to top, the signal on upper conducting plate, the signal of lower conducting PCB plate are all connected to multifunctional tester by two wires;Probe upper needle plate, probe holding plate, probe lower needle plate are all provided with multiple probe holes consistent in quantity and corresponding up and down, multiple spring probes are all respectively installed in multiple probe holes, and the upper end and lower end of multiple spring probes can be contacted with upper conducting plate and lower conducting PCB plate respectively.The application can improve the test efficiency of spring probe resistance value.

Description

Technical Field

[0001] This utility model relates to the field of probe testing, and in particular to a probe resistance testing device. Background Technology

[0002] Probes have a wide range of applications, primarily including semiconductor testing, biomedicine, and environmental monitoring. In semiconductor testing, probes are essential components, and their demand is closely related to the development of industries such as electronic components, microelectronics, and integrated circuits. With the continuous advancement of semiconductor technology, the performance requirements for probes are becoming increasingly stringent, such as high-density connectivity and micron-level high-precision positioning. In the biomedical field, probes can be used for drug screening and disease diagnosis, for example, the widespread application of fluorescent probes in the medical field. Furthermore, probes can be used for environmental monitoring, detecting air quality and water pollution. As the probe industry has seen continuous market expansion in recent years, especially with the increasing precision requirements in semiconductor testing, the resistance value of probes is a crucial indicator of their stability, requiring 100% detection of resistance values. Current equipment tests probes one by one, which is inefficient and requires significant investment in equipment to meet testing requirements. This cannot meet the rapidly increasing demand for probes, necessitating the development of a high-efficiency simultaneous testing device. Utility Model Content

[0003] To overcome the above-mentioned shortcomings, the purpose of this utility model is to provide a probe resistance testing device that improves testing efficiency.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is: a probe resistance testing device, including a support platform, an upper support beam fixedly installed on the support platform by a column, an elbow clamp provided on the upper support beam, a pressure equalizing plate installed at the bottom of the elbow clamp, and an upper pressure plate installed on the support platform by a guide column. When an external force is applied to the elbow clamp, the pressure equalizing plate can drive the upper pressure plate to move downward along the guide column.

[0005] Below the equalizing plate, from top to bottom, are installed an upper conductive plate, a probe upper plate, and a probe holding plate, which are fixed together by magnetic attraction. On the upper surface of the support platform, from bottom to top, are a support plate, a lower conductive PCB board, and a probe lower plate, all secured by screws. The probe holding plate is mounted on the probe lower plate by screws. The signals on the upper conductive plate and the lower conductive PCB board are connected to the multi-functional tester via two wires. The probe upper plate, probe holding plate, and probe lower plate each have a consistent number of vertically aligned probe holes arranged in a matrix. Multiple spring probes are installed within these probe holes, and their upper and lower ends can contact the upper conductive plate and the lower conductive PCB board, respectively.

[0006] The beneficial effects of this utility model probe resistance testing device are as follows: This application increases the number of spring probes that can be tested simultaneously, up to 63 probes. The use of multi-contact connection improves testing efficiency. The use of a one-sided integral conductive component connects all the spring probes on one side together, while the other side is connected to the multi-functional tester. Each spring probe is sampled individually to measure its resistance. The use of magnetic adsorption instead of screw locking improves efficiency.

[0007] Preferably, two guide posts are installed, and the upper pressure plate is mounted on the two guide posts respectively via two bearings. The bearings are used to reduce friction.

[0008] Preferably, the upper needle plate of the probe is provided with four upper needle plate mounting holes, which are distributed at the four corners of the upper needle plate, and the magnets are respectively installed in the upper needle plate mounting holes; the probe retaining plate is provided with four retaining plate mounting holes, which are distributed at the four corners of the probe retaining plate, and the four retaining plate mounting holes correspond vertically to the four upper needle plate mounting holes, and the magnets are respectively installed in the retaining plate mounting holes.

[0009] Preferably, a first guide pin is provided between the probe plate and the probe holding plate to ensure positioning accuracy.

[0010] Preferably, a second guide pin is provided on the lower conductive PCB board, and a guide hole matching the second guide pin is provided on the lower probe plate to ensure positioning accuracy.

[0011] Preferably, the upper support beam is provided with a longitudinal adjustment hole, and the elbow clamp is bolted to the adjustment hole. This allows the elbow clamp to be adjusted in position on the adjustment hole, thereby controlling the compression stroke.

[0012] Preferably, the tip of the spring probe has a beveled structure. This ensures that the tip and the needle tube generate a lateral force, guaranteeing stable contact between the tip and the needle tube, and effectively addresses the issues of increasing lateral force and improving contact reliability. Attached Figure Description

[0013] Figure 1 This is a perspective view of this embodiment;

[0014] Figure 2 This is the front view of this embodiment;

[0015] Figure 3 This is an exploded view of this embodiment;

[0016] Figure 4 This is an exploded view of part of this embodiment from a first angle;

[0017] Figure 5 This is a second-angle exploded view of part of this embodiment;

[0018] Figure 6 This is a perspective view of the back of the embodiment.

[0019] In the attached diagram: 1. Support platform; 2. Column; 3. Upper support beam; 4. Elbow clamp; 5. Equalizing plate; 6. Upper pressure plate; 7. Guide column; 8. Upper conductive plate; 9. Probe upper needle plate; 10. Probe holding plate; 11. Magnet; 12. Support plate; 13. Lower conductive PCB board; 14. Probe lower needle plate; 15. Multifunctional tester; 16. Probe hole; 17. Spring probe; 18. Bearing; 19. Upper needle plate mounting hole; 20. Holding plate mounting hole; 21. First guide pin; 22. Second guide pin; 23. Guide hole; 24. Adjustment waist hole. Detailed Implementation

[0020] The preferred embodiments of the present invention will now be described in detail with reference to the accompanying drawings, so that the advantages and features of the present invention can be more easily understood by those skilled in the art, thereby making a clearer and more definite definition of the scope of protection of the present invention.

[0021] See Figures 1 to 6 As shown, this embodiment discloses a probe resistance testing device, which mainly consists of three parts: a probe testing fixture, a testing bracket, and a multi-functional tester 15. The testing bracket serves to improve the support and lower the pressure, the probe testing fixture is used to install the spring probe, and the multi-functional tester is used to measure the resistance of the spring probe. The testing bracket includes a support platform 1, and an upper support beam 3 is fixedly installed on the support platform 1 via a column 2. The support platform 1, column 2, and upper support beam 3 are fixed by screws to ensure the stability of the entire structure. An elbow clamp 4 is provided on the upper support beam 3, and a pressure equalizing plate 5 is installed at the bottom of the elbow clamp 4 to transmit the thrust acting on the elbow clamp 4 downward to the pressure equalizing plate 5 connected below it. An upper pressure plate 6 is installed on the support platform 1 via a guide column 7. When an external force is applied to the elbow clamp 4, the pressure equalizing plate 5 can drive the upper pressure plate 6 to move downward along the guide column 7. The guide column 7 ensures the vertical movement of the upper pressure plate 6.

[0022] Below the equalizing plate 5, from top to bottom, are installed an upper conductive plate 8, a probe upper needle plate 9, and a probe holding plate 10 that constitute the probe testing fixture. The probe upper needle plate 9 and the probe holding plate 10 are fixed together by magnet 11.

[0023] The upper surface of the support platform 1 is provided with a support plate 12, a lower conductive PCB board 13, and a probe lower pin plate 14, which constitute the probe testing fixture, arranged sequentially from bottom to top. The three are fixed by screws, and the probe holding plate 10 is installed on the probe lower pin plate 14 by screws 18. The signals on the upper conductive plate 8 and the lower conductive PCB board 13 are connected to the multi-functional tester 15 through two wires. The multi-functional tester 15 samples and measures the probe resistance and compares it with the set standard value to determine whether the probe under test meets the requirements.

[0024] The probe upper plate 9, the probe holding plate 10, and the probe lower plate 14 are all provided with a number of probe holes 16 that are identical and correspond to each other. The multiple probe holes 16 are arranged in a matrix, and multiple spring probes 17 are respectively installed in the multiple probe holes 16. The upper and lower ends of the multiple spring probes 17 can contact the upper conductive plate 8 and the lower conductive PCB board 13, respectively.

[0025] In this embodiment, two guide posts 7 are installed, and the upper pressure plate 6 is installed on the two guide posts 7 respectively through two bearings 18. The bearings 18 are used to reduce friction.

[0026] The probe upper needle plate 9 is provided with four upper needle plate mounting holes 19, which are distributed at the four corners of the probe upper needle plate 9. A magnet 11 is installed in each of the four upper needle plate mounting holes 19. The probe holding plate 10 is provided with four holding plate mounting holes 20, which are distributed at the four corners of the probe holding plate 10. The four holding plate mounting holes 20 correspond vertically to the four upper needle plate mounting holes 19. A magnet 11 is installed in each of the four holding plate mounting holes 20.

[0027] To improve positioning accuracy, a first guide pin 21 is provided between the probe upper pin plate 9 and the probe holding plate 10 in this embodiment; a second guide pin 22 is provided on the lower conductive PCB board 13, and a guide hole 23 matching the second guide pin 22 is provided on the probe lower pin plate 14.

[0028] To enable adjustable thrust of the elbow clamp 4, a longitudinal adjustment hole 24 is provided on the upper support beam 3, and the elbow clamp 4 is bolted to the adjustment hole 24. When adjustment is needed, simply loosen the bolt on the elbow clamp 4.

[0029] In this embodiment, the tip of the spring probe 17 has a beveled structure.

[0030] The working principle of this embodiment is as follows:

[0031] By using a controllable compression stroke structure, the working pressure of the spring probe in actual chip testing is simulated to obtain the true resistance under "normal working conditions". The spring probe 17 to be tested is inserted into the probe holding plate 10 and the lower probe plate 14, and the upper probe plate 9 is covered. Axial pressure is applied by the elbow clamp 4 to compress the spring probe 17 to its designed stroke range. After compression, the upper end of the spring probe 17 contacts the upper conductive plate 8 and the lower end contacts the lower conductive PCB board 13 to form a complete closed loop. The system samples the resistance of the spring probe 17 through the upper and lower electrode paths. The total resistance of the spring probe 17 is read by the multi-functional tester 15 under compression to accurately reflect its working electrical performance. After releasing the pressure, it is manually reset, which facilitates efficient cyclic testing. The probe can measure 63 spring probes 17 at the same time, which greatly shortens the test time and improves efficiency. To ensure the accuracy of the probe resistance measurement, the device employs a four-wire Kelvin measurement method. The signal from the upper conductive plate 8 is connected to the multifunction tester 15 via two wires, and the signal from the lower conductive PCB board 13 is also connected to the multifunction tester 15 via two wires. The multifunction tester 15 connects the relevant circuits through its electrical signal output. This allows for the measurement of the resistance of the link, which is then compared to the previously set standard resistance value. This determines whether the spring probe 17 meets the standard value.

[0032] The above embodiments are only for illustrating the technical concept and features of this utility model. Their purpose is to enable those skilled in the art to understand the content of this utility model and implement it. They cannot be used to limit the protection scope of this utility model. All equivalent changes or modifications made in accordance with the spirit and essence of this utility model should be covered within the protection scope of this utility model.

Claims

1. A probe resistance testing device, comprising a support platform (1), wherein a support beam (3) is fixedly installed on the support platform (1) via a column (2), characterized in that: An elbow clamp (4) is provided on the upper support beam (3), and a pressure equalizing plate (5) is installed at the bottom of the elbow clamp (4). An upper pressure plate (6) is installed on the support platform (1) through a guide column (7). When an external force is applied to the elbow clamp (4), the pressure equalizing plate (5) can drive the upper pressure plate (6) to move downward along the guide column (7). Below the equalizing plate (5), from top to bottom, there are an upper conductive plate (8), a probe upper needle plate (9), and a probe holding plate (10). The probe upper needle plate (9) and the probe holding plate (10) are attracted and fixed by a magnet (11). The upper surface of the support platform (1) is provided with a support plate (12), a lower conductive PCB board (13), and a probe lower needle plate (14) from bottom to top. The three are fixed by screws, and the probe holding plate (10) is installed on the probe lower needle plate (14) by screws (18). The signals on the upper conductive plate (8) and the lower conductive PCB board (13) are connected to the multi-functional tester (15) through two wires. The probe upper plate (9), probe holding plate (10), and probe lower plate (14) are each provided with a number of probe holes (16) that are consistent and correspond to each other. The probe holes (16) are arranged in a matrix, and the spring probes (17) are respectively installed in the probe holes (16). The upper and lower ends of the spring probes (17) can contact the upper conductive plate (8) and the lower conductive PCB board (13) respectively.

2. The probe resistance testing apparatus of claim 1, wherein: Two guide posts (7) are installed, and the upper pressure plate (6) is installed on the two guide posts (7) respectively through two bearings (18).

3. The probe resistance testing device according to claim 1, characterized in that: The probe upper needle plate (9) is provided with four upper needle plate mounting holes (19), which are distributed at the four corners of the probe upper needle plate (9). The magnet (11) is installed in each of the four upper needle plate mounting holes (19). The probe holding plate (10) is provided with four holding plate mounting holes (20), which are distributed at the four corners of the probe holding plate (10). The four holding plate mounting holes (20) correspond vertically to the four upper needle plate mounting holes (19). The magnets (11) are installed in the four holding plate mounting holes (20).

4. The probe resistance testing apparatus of claim 1, wherein: A first guide pin (21) is provided between the probe upper needle plate (9) and the probe holding plate (10).

5. The probe resistance testing apparatus of claim 1, wherein: The lower conductive PCB board (13) is provided with a second guide pin (22), and the probe lower pin plate (14) is provided with a guide hole (23) matching the second guide pin (22).

6. The probe resistance testing apparatus of claim 1, wherein: The upper support beam (3) is provided with a longitudinal adjustment waist hole (24), and the elbow clamp (4) is installed on the adjustment waist hole (24) by bolts.

7. The probe resistance testing apparatus of claim 1, wherein: The tip of the spring probe (17) has a beveled structure.

Images