Optical lens moving mechanism and optical detection apparatus

Abstract

The application discloses an optical lens moving mechanism and an optical detection device. The optical lens moving mechanism comprises a base, a moving frame and a reset member. The base is used for mounting a driving mechanism. The base comprises a blocking component arranged on a moving path of the driving mechanism. The moving frame is connected with the base and can reciprocate along the moving path relative to the base. The moving frame comprises a connecting portion and a mounting portion. The connecting portion is fixedly connected with the mounting portion. The mounting portion is used for mounting an optical lens. The connecting portion is used for connecting an output end of the driving mechanism to drive the mounting portion to move the optical lens. The connecting portion is arranged between the driving mechanism and the blocking component. One of the blocking component and the connecting portion is provided with a protrusion, and the other is provided with a limiting slot. At least part of the protrusion can extend into the limiting slot to achieve in-place interception of the connecting portion. The two ends of the reset member are respectively connected with the base and the moving frame. The reset member can be elastically deformed on the moving path.

Description

Technical Field

[0001] This application belongs to the field of optical inspection technology, and in particular relates to an optical lens moving mechanism and an optical inspection device. Background Technology

[0002] Optical inspection technology boasts advantages such as high inspection accuracy, non-contact measurement, and abundant detection information, and is widely used in semiconductor manufacturing and precision manufacturing. Taking semiconductor inspection technology as an example, some inspection equipment integrates at least two inspection modes within a single chamber, significantly improving the equipment's integration level and inspection efficiency.

[0003] In the aforementioned testing equipment, the switching of testing modes typically depends on the movement of the testing lens relative to the test beam path. The repeatability of the testing lens's position within the optical path each time directly affects the testing accuracy. Summary of the Invention

[0004] This application provides an optical lens moving mechanism and an optical inspection device, which can intercept the optical lens in place to improve the position repeatability of the optical lens in the detection optical path, thereby improving the detection accuracy of the optical inspection device.

[0005] In a first aspect, embodiments of this application provide an optical lens moving mechanism, including a base, a moving frame, and a resetting member. The base is used to mount a driving mechanism and includes a blocking member disposed on the moving path of the driving mechanism. The moving frame is connected to the base and can reciprocate relative to the base along the moving path. The moving frame includes a connecting part and a mounting part, which are fixedly connected. The mounting part is used to mount an optical lens, and the connecting part is used to connect to the output end of the driving mechanism to drive the mounting part to move the optical lens. The connecting part is disposed between the driving mechanism and the blocking member. One of the blocking member and the connecting part is provided with a protrusion, and the other is provided with a limiting groove. At least a portion of the protrusion can extend into the limiting groove to achieve the positioning and interception of the connecting part. The two ends of the resetting member are respectively connected to the base and the moving frame. The resetting member can undergo elastic deformation on the moving path. When the protrusion is located in the limiting groove, the resetting deformation generates a resetting elastic force to make the protrusion abut against the limiting groove.

[0006] In some alternative embodiments, at least one of the bump and the locating groove includes a curved surface structure.

[0007] In some alternative embodiments, the end of the protrusion facing the limiting groove has a spherical structure.

[0008] In some optional embodiments, the connecting portion has an avoidance opening, the blocking member extends into the avoidance opening, the limiting groove is provided on the side of the blocking member facing the drive mechanism, and the protrusion is provided on the side of the connecting portion facing the blocking member.

[0009] In some optional embodiments, the movable frame further includes an angle adjustment structure, which is rotatably connected to the mounting part. When the optical lens is connected to the mounting part, one end of the angle adjustment structure abuts against the optical lens.

[0010] In some optional embodiments, the angle adjustment structure includes a first adjustment screw and a second adjustment screw, wherein the first adjustment screw is spaced apart from the center of the optical lens at least along the movement path, and the second adjustment screw is spaced apart from the center of the optical lens at least along a second direction.

[0011] In some optional embodiments, the base is provided with a first guide structure and the movable frame is provided with a second guide structure. At least one of the first guide structure and the second guide structure moves in the same direction as the output end of the drive mechanism. The first guide structure and the second guide structure cooperate to limit the movement direction of the movable frame.

[0012] In some alternative embodiments, the reset element is a bellows.

[0013] Secondly, embodiments of this application provide an optical inspection device, including the optical lens moving mechanism provided in any embodiment of the first aspect.

[0014] In some optional embodiments, the optical inspection device further includes a light source, a reflector assembly, and an inspection module. The light source is used to emit an inspection beam. The reflector assembly includes a moving mirror and a fixed mirror. The moving mirror is disposed on the exit path of the inspection beam, and the fixed mirror is disposed on the exit path of the moving mirror. The moving mirror includes an optical lens and an optical lens moving mechanism. The receiving module includes a first receiving unit and a second receiving unit. The first receiving unit is disposed on the exit path of the inspection beam, and the second receiving unit is disposed on the exit path of the fixed mirror.

[0015] The optical lens moving mechanism of this application includes a base and a moving frame that are movable relative to each other. The moving frame drives the optical lens to move relative to the base, enabling the optical lens to enter or exit the test beam path, thereby switching the test optical path. The base has a blocking component that intercepts the connecting part of the moving frame. The blocking component and the connecting part are engaged by a protrusion extending into a limiting groove to prevent further movement of the moving frame. Furthermore, the optical lens moving mechanism also includes a reset component. When the protrusion extends into the limiting groove, the reset component undergoes elastic deformation, and its reset force acts on the base and the moving frame to keep the protrusion abutting against the limiting groove, ensuring that the moving frame moves the optical lens into position and improving the positional repeatability of the optical lens moving mechanism. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this application, the accompanying drawings used in the embodiments of this application will be briefly introduced below. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the structure of the optical lens moving mechanism in some embodiments of this application;

[0018] Figure 2 for Figure 1 A schematic cross-sectional view of the optical lens moving mechanism shown.

[0019] Figure 3 for Figure 1 A schematic diagram of the base structure in the optical lens moving mechanism shown;

[0020] Figure 4 for Figure 1 A schematic diagram of the moving frame in the optical lens moving mechanism shown;

[0021] Figure 5 This is a schematic diagram of the structure of an optical inspection device according to some embodiments of this application;

[0022] Figure 6 This is a schematic diagram of the structure of an optical inspection device according to some embodiments of this application.

[0023] The accompanying drawings may not be drawn to scale.

[0024] The specific marking information in the attached diagram is as follows:

[0025] 100. Base; 101. First guide structure; 110. Blocking component; 111. Limiting groove;

[0026] 200. Movable frame; 201. Second guide structure; 202. Clearance opening; 210. Connecting part; 211. Protrusion; 2111. Curved surface structure; 220. Mounting part; 231. First adjusting screw; 232. Second adjusting screw;

[0027] 300. Reset component;

[0028] 410. Drive mechanism; 420. Optical lens;

[0029] 910. Light source; 921. Moving mirror; 922. Fixed mirror; 931. First receiving unit; 932. Second receiving unit;

[0030] First direction X; Second direction Y; Movement path Z. Detailed Implementation

[0031] The embodiments of the technical solution of this application will now be described in detail with reference to the accompanying drawings. These embodiments are only used to more clearly illustrate the technical solution of this application and are therefore merely examples, and should not be used to limit the scope of protection of this application.

[0032] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this application pertains; the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the application; the terms “comprising” and “having”, and any variations thereof, in the specification, claims, and foregoing description of the drawings are intended to cover non-exclusive inclusion.

[0033] In the description of the embodiments of this application, technical terms such as "first" and "second" are used only to distinguish different objects and should not be construed as indicating or implying relative importance or implicitly specifying the number, specific order, or primary and secondary relationship of the indicated technical features. In the description of the embodiments of this application, "multiple" means two or more, unless otherwise explicitly defined.

[0034] In this document, the term "embodiment" means that a particular feature, structure, or characteristic described in connection with an embodiment may be included in at least one embodiment of this application. The appearance of this phrase in various places throughout the specification does not necessarily refer to the same embodiment, nor is it a separate or alternative embodiment mutually exclusive with other embodiments. It will be explicitly and implicitly understood by those skilled in the art that the embodiments described herein can be combined with other embodiments.

[0035] In the description of the embodiments in this application, the term "and / or" is merely a description of the relationship between related objects, indicating that three relationships can exist. For example, A and / or B can represent: A existing alone, A and B existing simultaneously, and B existing alone. Additionally, the character " / " in this document generally indicates that the preceding and following related objects have an "or" relationship.

[0036] In the description of the embodiments of this application, the term "multiple" refers to two or more (including two), similarly, "multiple sets" refers to two or more (including two sets), and "multiple pieces" refers to two or more (including two pieces).

[0037] In the description of the embodiments of this application, the technical terms "center," "longitudinal," "lateral," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "clockwise," "counterclockwise," "axial," "radial," and "circumferential" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of this application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on the embodiments of this application.

[0038] In the description of the embodiments of this application, unless otherwise expressly specified and limited, technical terms such as "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. For those skilled in the art, the specific meaning of the above terms in the embodiments of this application can be understood according to the specific circumstances.

[0039] Optical inspection technology, with its high precision, non-contact nature, and rich information content, plays an indispensable role in many advanced industrial fields such as semiconductor manufacturing, precision machining, microelectronics, and biomedicine. Especially in semiconductor inspection, as chip manufacturing processes approach physical limits, extremely stringent requirements are placed on the sensitivity and stability of technologies such as defect detection, film thickness measurement, and critical dimension measurement. To improve inspection efficiency and save cleanroom space, modern semiconductor inspection equipment is developing towards high integration, with platform architectures integrating multiple optical inspection modes within a single vacuum chamber emerging.

[0040] The core mechanism for switching between different detection modes relies on optical lenses (such as mirrors, lenses, beam splitters, etc.) moving into or out of the test optical path, thereby changing the direction and optical configuration of the test optical path. Among them, the repeatability accuracy of the optical lens entering the optical path each time will directly affect the collimation of the beam, the focal position, and the final consistency of imaging and measurement, which will lead to detection signal drift, inaccurate measurement results, or incompatibility between data of different modes.

[0041] Traditional optical lens driving solutions, such as those using ordinary cylinders, linear motors, or screw slides, can move optical lenses relative to the test optical path, but their positional repeatability is not ideal due to limitations in the movement accuracy of the driving products. Furthermore, after long-term, high-frequency use, the driving products suffer from wear and tear on transmission components and overshoot caused by motion inertia, which also restricts further improvements in the performance of optical inspection equipment.

[0042] Please see below Figures 1 to 4 , Figure 1 This is a schematic diagram of the structure of the optical lens moving mechanism in some embodiments of this application; Figure 2 for Figure 1 A schematic cross-sectional view of the optical lens moving mechanism shown. Figure 3 for Figure 1 A schematic diagram of the base structure in the optical lens moving mechanism shown; Figure 4 for Figure 1 The diagram shows the structure of the moving frame in the optical lens moving mechanism.

[0043] To address the problems of the prior art, this application provides an optical lens moving mechanism and an optical detection device, which can intercept the optical lens in place to improve the position repeatability of the optical lens in the detection optical path, thereby improving the detection accuracy of the optical detection device. The optical lens moving mechanism provided in this application is described below.

[0044] In a first aspect, embodiments of this application provide an optical lens moving mechanism, including a base 100, a moving frame 200, and a reset member 300. The base 100 is used to mount a drive mechanism 410, and the base 100 includes a blocking member 110 disposed on the moving path Z of the drive mechanism 410. The moving frame 200 is connected to the base 100 and can reciprocate relative to the base 100 along the moving path Z. The moving frame 200 includes a connecting part 210 and a mounting part 220, which are fixedly connected. The mounting part 220 is used to mount an optical lens 420, and the connecting part 210 is used to connect to the output end of the drive mechanism 410 to drive the optical lens 420. The mounting part 220 drives the optical lens 420 to move. The connecting part 210 is disposed between the driving mechanism 410 and the blocking member 110. One of the blocking member 110 and the connecting part 210 is provided with a protrusion 211 and the other is provided with a limiting groove 111. At least part of the protrusion 211 can extend into the limiting groove 111 to achieve the positioning and interception of the connecting part 210. The two ends of the reset member 300 are respectively connected to the base 100 and the moving frame 200. The reset member 300 can undergo elastic deformation on the moving path Z. When the protrusion 211 is located in the limiting groove 111, the reset member 300 deforms to generate a reset elastic force so that the protrusion 211 abuts against the limiting groove 111.

[0045] Optionally, the base 100 is an independent structure set in the detection chamber, or the optical lens moving mechanism directly uses the detection chamber as the base 100 to achieve the fixed installation of the drive mechanism 410.

[0046] Optionally, the blocking component 110 may be an integral structure with the base 100, or the blocking component 110 may be a structure that is fixedly disposed relative to the drive mechanism 410.

[0047] Optionally, the connecting part 210 and the mounting part 220 are an integral structure, or the connecting part 210 and the mounting part 220 are fastened together to achieve synchronous operation along the moving path Z.

[0048] Optionally, along the moving path Z, the connecting part 210 and the mounting part 220 are respectively disposed on both sides of the blocking member 110.

[0049] Optionally, the reset member 300 may be a spring or other component with elastic deformation capability. For example, the reset member 300 may be a compression spring, which is sleeved on the output end of the drive mechanism 410 and sandwiched between the connecting part 210 and the blocking member 110; or, the reset member 300 may be a tension spring, with its two ends respectively connected to the ends of the connecting part 210 and the blocking member 110 facing away from each other.

[0050] According to the optical lens moving mechanism provided in the first aspect embodiment of this application, the optical lens 420 can be inserted into or withdrawn from the test beam by moving the moving frame 200 relative to the base 100, thereby switching the test optical path and performing different modes of detection in the optical detection equipment. The base 100 is provided with a blocking member 110, and the moving frame 200 is provided with a connecting part 210 for connecting the drive mechanism 410 and a mounting part 220 for mounting the optical lens 420. The blocking member 110, located on the moving path Z of the drive mechanism 410, can stop the mounting part 220 and the optical lens 420 at the target position by intercepting the connecting part 210. Furthermore, the relative position between the connecting part 210 and the blocking member 110 is limited by the cooperation of the protrusion 211 and the limiting groove 111, improving the repeatability of the position of each movement of the optical lens moving mechanism and contributing to improved detection accuracy.

[0051] Furthermore, the optical lens moving mechanism provided in the first aspect embodiment of this application also has a reset member 300 between the base 100 and the moving frame 200. When the protrusion 211 extends into the limiting groove 111, the reset member 300 can undergo elastic deformation along the moving path Z and generate a corresponding reset force. This reset force can act on the base 100 and the moving frame 200 so that the protrusion 211 abuts against the limiting groove 111, eliminating any gap that may exist between the connecting part 210 and the moving frame 200, so as to ensure that the moving frame 200 drives the optical lens 420 to move into place, further improving the position repeatability of the optical lens moving mechanism.

[0052] According to some embodiments of the first aspect of this application, at least one of the protrusion 211 and the limiting groove 111 includes a curved surface structure 2111.

[0053] Optionally, the curved surface structure 2111 is coaxially arranged with the reset member 300.

[0054] Optionally, the end of the protrusion 211 facing the limiting groove 111 is configured as a first curved surface.

[0055] Alternatively, the inner wall of the limiting groove 111 facing the protrusion 211 is configured as a conical structure. Exemplarily, the conical structure is a conical surface or a pyramidal surface, such as a square pyramid. It is understood that the limiting groove 111 with a conical structure can adapt to protrusions 211 with different curvature surface structures 2111, reducing the processing difficulty of both.

[0056] Optionally, the inner wall of the limiting groove 111 facing the protrusion 211 is configured as a second curved surface.

[0057] Alternatively, the first surface and the second surface may have the same curvature.

[0058] Optionally, the curved surface structure 2111 includes an ellipsoid, parabola, cylinder, or other smoothly transitioned surface.

[0059] Thus, on the one hand, during the process of the protrusion 211 extending into the limiting groove 111, the curved surface structure 2111 can form a guiding effect to assist the protrusion 211 in extending into the limiting groove 111 and the insertion and engagement of the connecting part 210 and the blocking part 110; on the other hand, after the protrusion 211 extends into the limiting groove 111, under the action of the reset spring force of the reset member 300, the protrusion 211 and the limiting groove 111 can move along the surface of the curved surface structure 2111 to achieve a small-amplitude return, suppress the possible axial deviation phenomenon of the drive mechanism 410, and further improve the position repeatability of the optical lens moving mechanism.

[0060] According to some embodiments of the first aspect of this application, the end of the protrusion 211 facing the limiting groove 111 has a spherical structure.

[0061] Optionally, the spherical structure is a hemispherical structure; or, when the protrusion 211 only partially extends into the limiting groove 111, the spherical structure is smaller than the hemispherical structure.

[0062] Optionally, the spherical structure and the protrusion 211 are integrated into one structure.

[0063] Optionally, the spherical structure is rotatably connected to the protrusion 211. Exemplarily, the spherical structure is a ball bearing mounted on the end of the protrusion 211 facing away from the drive mechanism 410.

[0064] It is understandable that spherical structures also include other near-spherical structures formed after adjustments due to limitations in processing precision or actual product requirements.

[0065] Therefore, the distance from each point on the surface of the spherical structure to the center is equal, thus achieving the same elimination effect on gaps that may form in all directions, improving the alignment accuracy between the protrusion 211 and the limiting groove 111, and thereby improving the position repeatability of the optical lens moving mechanism.

[0066] According to some other embodiments of the first aspect of this application, when the gap formed by each movement of the movable frame 200 is clear, the curved surface structure 2111 can be further adjusted. For example, if the movable frame 200 forms a gap in the first direction X with each movement, the curved surface structure 2111 can be configured as a cylindrical structure with its axis perpendicular to the first direction X and the movement path Z, and the limiting groove 111 can be correspondingly configured as a V-shaped groove capable of accommodating the movement of the cylindrical structure, with the bottom of the groove extending parallel to the axis of the cylindrical structure.

[0067] According to some embodiments of the first aspect of this application, the connecting portion 210 is provided with an avoidance opening 202, the blocking member 110 extends into the avoidance opening 202, the limiting groove 111 is provided on the side of the blocking member 110 facing the driving mechanism 410, and the protrusion 211 is provided on the side of the connecting portion 210 facing the blocking member 110.

[0068] Optionally, one end of the opening 202 is opened along the second direction Y to avoid it.

[0069] Optionally, along the second direction Y, the two ends of the opening 202 are closed to avoid obstruction.

[0070] Alternatively, along the second direction Y, the size of the clearance opening 202 is equal to the size of the blocking member 110, and the clearance opening 202 can cooperate with the blocking member 110 to restrict the movement direction between the movable frame 200 and the base 100.

[0071] Thus, by opening the clearance opening 202, the connecting part 210 and the blocking member 110 can act as roadblocks to each other, and the peripheral wall of the clearance opening 202 can intercept the blocking member 110 to limit the movement between the mobile frame 200 and the base 100.

[0072] According to some embodiments of the first aspect of this application, the movable frame 200 also includes an angle adjustment structure.

[0073] Optionally, the angle adjustment structure connects the mounting part 220 and the base 100 respectively. For example, the angle adjustment structure includes a hinge.

[0074] Optionally, the angle adjustment structure is rotatably connected to the mounting part 220. When the optical lens 420 is connected to the mounting part 220, one end of the angle adjustment structure abuts against the optical lens 420.

[0075] Optionally, the angle adjustment structure may include a drive source such as a cylinder or a motor.

[0076] Therefore, by setting an angle adjustment structure, the optical lens 420 can adjust the pitch angle or yaw angle, thus compensating for assembly errors that may occur during the assembly of the optical lens moving mechanism.

[0077] According to some embodiments of the first aspect of this application, the angle adjustment structure includes a first adjustment screw 231, which is at least spaced from the center of the optical lens 420 along the movement path Z.

[0078] Optionally, the first adjusting screw 231 includes a coarse adjusting screw and a fine adjusting screw. The pitch of the fine adjusting screw is smaller than that of the coarse adjusting screw, and / or, along the Z-direction of the movement path, the distance between the coarse adjusting screw and the center of the optical lens 420 is smaller than the distance between the fine adjusting screw and the center of the optical lens 420.

[0079] Optionally, the optical lens 420 is provided with a first adjusting screw 231 on both sides of the center along the moving path Z.

[0080] Thus, by rotating the first adjusting screw 231, the optical lens 420 adjusts its pitch angle under the pushing action of the first adjusting screw 231.

[0081] Optionally, the angle adjustment structure further includes a second adjustment screw 232, which is spaced apart from the center of the optical lens 420 at least along the second direction Y.

[0082] Optionally, the second adjusting screw 232 includes a coarse adjusting screw and a fine adjusting screw. The pitch of the fine adjusting screw is smaller than that of the coarse adjusting screw, and / or, along the Z-direction of the movement path, the distance between the coarse adjusting screw and the center of the optical lens 420 is smaller than the distance between the fine adjusting screw and the center of the optical lens 420.

[0083] Optionally, a second adjusting screw 232 is provided on both sides of the center of the optical lens 420 along the second direction Y.

[0084] Therefore, by rotating the second adjusting screw 232, the optical lens 420 adjusts its sway angle under the pushing action of the second adjusting screw 232.

[0085] According to some embodiments of the first aspect of this application, the movable frame 200 further includes a lens mount, and the optical lens 420 is detachably connected to the lens mount to enable the optical lens 420 to be detached from or assembled onto the movable frame 200.

[0086] Optionally, the movable frame 200 also includes a tension spring disposed between the lens mount and the mounting portion 220. The tension spring provides a restoring force to position the first adjusting screw 231 and the second adjusting screw 232 against the lens mount, thereby improving the installation stability and accuracy of the optical lens 420. It is understood that, by adjusting the mounting position, the tension spring can also be replaced with a compression spring or other components with elastic deformation capabilities.

[0087] According to some embodiments of the first aspect of this application, the base 100 is provided with a first guide structure 101, and the movable frame 200 is provided with a second guide structure 201. At least one of the first guide structure 101 and the second guide structure 201 moves in the same direction as the output end of the drive mechanism 410. The first guide structure 101 and the second guide structure 201 cooperate to limit the movement direction of the movable frame 200.

[0088] Optionally, the first guide structure 101 is a slide groove, and the second guide structure 201 is a slider. The slider slides in the slide groove to guide the moving frame 200 to move along the Z-direction of the moving path.

[0089] Optionally, the first guide structure 101 and the second guide structure 201 are magnetically coupled together.

[0090] Therefore, the movement direction of the moving frame 200 relative to the base 100 is further restricted by the cooperation of the first guide structure 101 and the second guide structure 201, thereby improving the position repeatability of the optical lens moving mechanism.

[0091] According to some embodiments of the first aspect of this application, the reset member 300 is a bellows.

[0092] Optionally, the output end of the drive mechanism 410 is connected to the connecting part 210 via a bellows. It can be understood that when the output end of the drive mechanism 410 moves, the bellows first deforms before transmitting this movement to the connecting part 210, driving the connecting part 210 to move along the moving path Z. Thus, the bellows can buffer the connection between the output end of the drive mechanism 410 and the connecting part 210, reducing overshoot in the moving frame 200 and improving the reliability of the optical lens moving mechanism.

[0093] Therefore, taking the semiconductor testing field as an example, optical testing is mostly carried out in a vacuum chamber, while bellows have better sealing performance than components such as springs and can be freely compressed and stretched in a vacuum environment.

[0094] Secondly, embodiments of this application provide an optical inspection device, including the optical lens moving mechanism provided in any embodiment of the first aspect.

[0095] It is understood that, since the optical inspection device has the optical lens moving mechanism provided in any of the embodiments of the first aspect, the optical inspection device accordingly has all the beneficial effects of the aforementioned optical lens 420 moving structure.

[0096] Therefore, by employing an optical lens moving mechanism, at least one optical lens 420 can enter or exit the propagation path of the test beam, forming at least two detection optical paths to correspond to different detection modes, significantly improving the integration of the optical detection equipment. Furthermore, the test object does not need to switch between atmospheric and vacuum environments when switching between the two detection modes, which helps to shorten detection time and improve detection efficiency.

[0097] According to some embodiments of the second aspect of this application, please refer to Figure 5 and Figure 6 The optical inspection equipment also includes a light source 910, a reflector assembly, and an inspection module. The light source 910 is used to emit an inspection beam. The reflector assembly includes a moving mirror 921 and a fixed mirror 922. The moving mirror 921 is positioned on the exit path of the inspection beam, and the fixed mirror 922 is positioned on the exit path of the moving mirror 921. The moving mirror 921 includes an optical lens 420 and an optical lens moving mechanism. The receiving module includes a first receiving unit 931 and a second receiving unit 932. The first receiving unit 931 is positioned on the exit path of the inspection beam, and the second receiving unit 932 is positioned on the exit path of the fixed mirror 922.

[0098] It is understood that the optical inspection equipment also includes an inspection chamber for accommodating the aforementioned structure. Depending on the actual structure of the inspection chamber or different inspection requirements, the arrangement order of the moving mirror 921 and the fixed mirror 922 along the exit path of the inspection beam can be adjusted. For example, the fixed mirror 922 is positioned along the exit path of the inspection beam, the moving mirror 921 is positioned along the exit path of the fixed mirror 922, the first receiving unit 931 is positioned along the exit path of the fixed mirror 922, and the second receiving unit 932 is positioned along the exit path of the moving mirror 921.

[0099] Optionally, the number of moving mirrors 921 and fixed mirrors 922 can be adjusted accordingly to accommodate more detection modes, depending on the actual structure of the detection chamber or different detection requirements.

[0100] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and not to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. These modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application, and they should all be covered within the scope of the claims and specification of this application. In particular, as long as there is no structural conflict, the various technical features mentioned in the embodiments can be combined in any way. This application is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. An optical lens moving mechanism, characterized in that, include: A base for mounting a drive mechanism, the base including a blocking component disposed on the moving path of the drive mechanism; A movable frame is connected to the base and can reciprocate relative to the base along the moving path. The movable frame includes a connecting part and a mounting part. The connecting part is fixedly connected to the mounting part. The mounting part is used to mount an optical lens. The connecting part is used to connect to the output end of a drive mechanism to drive the mounting part to move the optical lens. The connecting part is disposed between the drive mechanism and the blocking member. One of the blocking member and the connecting part is provided with a protrusion, and the other is provided with a limiting groove. At least a portion of the protrusion can extend into the limiting groove to achieve the positioning and interception of the connecting part. A reset component is provided, with its two ends connected to the base and the movable frame, respectively. The reset component is capable of elastic deformation on the moving path. When the protrusion is located in the limiting groove, the reset component deforms to generate a reset elastic force so that the protrusion abuts against the limiting groove.

2. The optical lens moving mechanism according to claim 1, characterized in that, At least one of the protrusion and the limiting groove includes a curved surface structure.

3. The optical lens moving mechanism according to claim 2, characterized in that, The end of the protrusion facing the limiting groove has a spherical structure.

4. The optical lens moving mechanism according to claim 2, characterized in that, The connecting part has an avoidance opening, the blocking member extends into the avoidance opening, the limiting groove is provided on the side of the blocking member facing the driving mechanism, and the protrusion is provided on the side of the connecting part facing the blocking member.

5. The optical lens moving mechanism according to claim 1, characterized in that, The movable frame also includes an angle adjustment structure, which is rotatably connected to the mounting part. When the optical lens is connected to the mounting part, one end of the angle adjustment structure abuts against the optical lens.

6. The optical lens moving mechanism according to claim 5, characterized in that, The angle adjustment structure includes a first adjustment screw and a second adjustment screw. The first adjustment screw is spaced apart from the center of the optical lens at least along the movement path, and the second adjustment screw is spaced apart from the center of the optical lens at least along a second direction.

7. The optical lens moving mechanism according to claim 1, characterized in that, The base is provided with a first guide structure, and the movable frame is provided with a second guide structure. At least one of the first guide structure and the second guide structure moves in the same direction as the output end of the drive mechanism. The first guide structure and the second guide structure cooperate to limit the movement direction of the movable frame.

8. The optical lens moving mechanism according to claim 1, characterized in that, The reset component is a bellows.

9. An optical inspection device, characterized in that, Includes the optical lens moving mechanism as described in any one of claims 1 to 8.

10. The optical inspection device according to claim 9, characterized in that, The optical inspection equipment also includes: A light source used to emit a detection beam; A reflector assembly includes a moving mirror and a fixed mirror. The moving mirror is positioned on the exit path of the detection beam, and the fixed mirror is positioned on the exit path of the moving mirror. The moving mirror includes an optical lens and an optical lens moving mechanism. The receiving module includes a first receiving unit and a second receiving unit, wherein the first receiving unit is disposed on the exit path of the detection beam and the second receiving unit is disposed on the exit path of the fixed mirror.

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