A kind of glue coating developing machine environment temperature and humidity adjusting component

Abstract

The utility model discloses a kind of environmental temperature and humidity adjusting components of gluing developing machine, to provide a kind of environmental temperature and humidity adjusting components of gluing developing machine that can accurate control temperature and humidity, its technical solution main point is, including working cavity, temperature and humidity detection module, control module, temperature regulating module, humidity regulating module and airflow circulation module;Working cavity is hollow rectangular structure, its one side wall is equipped with airflow passage, airflow passage two ends are respectively communicated with working cavity inside;Temperature and humidity detection module includes four temperature and humidity sensors, four temperature and humidity sensors are respectively fixed in the four corner positions of working cavity inner wall by bolt, the detection end of temperature and humidity sensor is towards working cavity inside, signal output end extends to control module by wire;Control module is fixed in the working cavity outer side wall by buckle, control module surface is equipped with touch display screen.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment, specifically to an environmental temperature and humidity control component for a coating and developing machine. Background Technology

[0002] Photoresist coating and developing machines are critical equipment in semiconductor wafer manufacturing. The temperature and humidity environment within their working chamber directly affects the uniformity of photoresist coating and the developing resolution. Existing photoresist coating and developing machines often employ a single sensor and regulating element for temperature and humidity control, with arbitrary placement of these elements. This results in uneven temperature and humidity distribution within the working chamber, with localized temperature and humidity deviations exceeding process requirements (temperature fluctuation ±0.5℃, humidity fluctuation ±2% RH), thereby impacting wafer production quality.

[0003] Furthermore, the existing regulating device has structural design flaws: for example, heating and cooling elements are directly exposed inside the working chamber, making them prone to interference with the wafer; airflow circulation relies on a simple fan without a guiding structure, resulting in numerous airflow dead zones; and the wiring connections between modules are messy and lack protection, making them susceptible to poor contact due to equipment vibration. These structural deficiencies reduce the stability and reliability of the regulating device, making it difficult to meet the requirements of high-precision semiconductor manufacturing. Therefore, it is necessary to optimize the module layout, installation method, and connection structure of the temperature and humidity control components from a structural design perspective, solve the problems existing in the current device, and improve the process stability of the coating and developing machine. Summary of the Invention

[0004] The purpose of this invention is to provide an environmental temperature and humidity control component for a coating and developing machine. This component has the advantages of achieving uniform temperature and humidity control within the working chamber through reasonable structural design and modular assembly, thereby improving control accuracy and device stability.

[0005] The above-mentioned technical objective of this utility model is achieved through the following technical solution: A temperature and humidity control component for a coating and developing machine is characterized by comprising a working chamber, a temperature and humidity detection module, a control module, a temperature control module, a humidity control module, and an airflow circulation module. The working chamber is a hollow rectangular structure with an airflow channel on one side wall, the two ends of which are connected to the interior of the working chamber. The temperature and humidity detection module includes four temperature and humidity sensors, which are fixed to the four corners of the inner wall of the working chamber by bolts. The detection ends of the temperature and humidity sensors face the interior of the working chamber, and the signal output ends extend to the control module via wires. The control module is fixed to the outer wall of the working chamber, and a touch screen is provided on its surface. The control module also includes a controller that is electrically connected to the temperature and humidity sensors, the temperature control module, the humidity control module, and the airflow circulation module via wires.

[0006] Further configuration: The temperature regulation module includes a heating unit and a cooling unit. The heating unit is a U-shaped PTC heating tube, and the cooling unit is a sheet-like semiconductor cooling chip. The cooling unit is fixed in the middle of the airflow channel by screws.

[0007] Further configuration: The humidity control module includes a humidification unit and a dehumidification unit. The humidification unit is an ultrasonic atomizer, whose atomization outlet extends into the airflow channel through a silicone tube. The humidification unit is fixed to the outer wall of the working chamber by a bracket and is located above the airflow channel. The dehumidification unit is a plate-shaped condenser dehumidifier, which is vertically embedded at the outlet of the airflow channel. The drain outlet of the dehumidification unit extends to the outside of the working chamber through a drain pipe.

[0008] Further configuration: The airflow circulation module includes a circulating fan and an airflow guide plate. The circulating fan is fixed to the center of the top of the working chamber by bolts, and its air outlet faces the inside of the working chamber. The airflow guide plate is a circular metal plate, which is fixed directly below the circulating fan by a connecting rod.

[0009] Further configuration: The airflow guide plate is provided with multiple guide holes evenly distributed in a ring array.

[0010] Further configuration: The working cavity also includes an alarm module, which is an audible and visual alarm, fixed to the top of the control module with screws, and the signal input terminal of the alarm module is electrically connected to the controller via a wire.

[0011] Further features: The outer casing of the alarm module is equipped with a warning light and a buzzer.

[0012] In summary, this utility model has the following beneficial effects: The temperature and humidity detection module accurately collects temperature and humidity data within the working chamber, and combined with intelligent control, achieves independent and precise adjustment of temperature and humidity, effectively solving the problem of large temperature and humidity fluctuations in existing photoresist coating and developing machines. This ensures uniform photoresist coating and developing accuracy. Simultaneously, the temperature control module uses a PTC heater and a semiconductor cooling chip, while the humidity control module uses an ultrasonic humidifier and a rotary dehumidifier, all characterized by small size, high efficiency, and high control precision. These features make them suitable for installation and use within the limited space of a photoresist coating and developing machine without causing wafer contamination. The airflow circulation module promotes air convection within the working chamber, ensuring uniform temperature and humidity distribution and preventing localized deviations from affecting processing quality. The alarm module and data storage module enhance component safety and traceability, facilitating equipment maintenance and process optimization. Attached Figure Description

[0013] The present invention will be further described below with reference to the accompanying drawings.

[0014] Figure 1 This is a schematic diagram of the overall structure of the ambient temperature and humidity control component of the coating and developing machine.

[0015] In the diagram: 1. Working chamber; 2. Temperature and humidity detection module; 21. Temperature and humidity sensor; 3. Control module; 31. Touch screen display; 32. Controller; 4. Temperature adjustment module; 41. Heating unit; 42. Cooling unit; 5. Humidity adjustment module; 51. Humidification unit; 52. Dehumidification unit; 53. Drain outlet; 6. Airflow circulation module; 61. Circulating fan; 62. Airflow guide plate; 63. Connecting rod; 7. Airflow channel; 8. Guide hole; 9. Alarm module; 91. Audible and visual alarm. Detailed Implementation

[0016] The specific embodiments of this utility model will be further described below with reference to the accompanying drawings.

[0017] The technical solution adopted in this utility model is: an environmental temperature and humidity control component for a coating and developing machine, including a working chamber 1, a temperature and humidity detection module 2, a control module 3, a temperature control module 4, a humidity control module 5, and an airflow circulation module 6; the temperature control module 4 includes a heating unit 41 and a cooling unit 42, the heating unit 41 being a U-shaped PTC. The heating element and cooling unit 42 are sheet-like semiconductor cooling chips. The cooling unit 42 is fixed to the middle of the airflow channel 7 by screws. The humidity control module 5 includes a humidifying unit 51 and a dehumidifying unit 52. The humidifying unit 51 is an ultrasonic atomizer, and its atomization outlet extends into the airflow channel 7 through a silicone tube. The humidifying unit 51 is fixed to the outer wall of the working chamber 1 by a bracket and is located above the airflow channel 7. The dehumidifying unit 52 is a plate-shaped condenser dehumidifier, which is vertically embedded at the outlet of the airflow channel 7. The drain outlet 53 of the dehumidifying unit 52 extends to the outside of the working chamber 1 through a drain pipe. The airflow circulation module 6 includes a circulating fan 61 and an airflow guide plate 62. The circulating fan 61 is fixed to the top center of the working chamber 1 by bolts, and its air outlet faces the inside of the working chamber 1. The airflow guide plate 62 is a circular metal plate, which is fixed directly below the circulating fan 61 by a connecting rod 63. Multiple guide holes 8 are evenly opened on the airflow guide plate 62, and the guide holes 8 are distributed in a ring array.

[0018] The working chamber 1 is a hollow rectangular structure with an airflow channel 7 on one side wall. The two ends of the airflow channel 7 are connected to the interior of the working chamber 1. The temperature and humidity detection module 2 includes four temperature and humidity sensors 21, which are fixed to the four corners of the inner wall of the working chamber 1 by bolts. The detection end of the temperature and humidity sensor 21 faces the interior of the working chamber 1, and the signal output end extends to the control module 3 through wires. The control module 3 is fixed to the outer wall of the working chamber 1. The surface of the control module 3 is equipped with a touch screen 31. The control module 3 is also equipped with a controller 32 that is electrically connected to the temperature and humidity sensor 21, the temperature adjustment module 4, the humidity adjustment module 5, and the airflow circulation module 6 through wires. The working chamber 1 also includes an alarm module 9, which is an audible and visual alarm 91, fixed to the top of the control module 3 by screws. The signal input end of the alarm module 9 is electrically connected to the controller 32 through wires. The audible and visual alarm 91 is a warning light and a buzzer. Its main working principle is as follows: Start-up and data acquisition: The coating and developing machine is turned on, the components are powered on, the temperature and humidity sensor 21 collects the cavity data and transmits it to the control module 3. If the detected temperature is low, the control module 3 starts the heating unit 41 in the working cavity 1 and simultaneously turns on the upper and lower circulating fans; when the air duct temperature sensor detects a certain temperature, it sends a feedback signal, and the controller 32 reduces the heater power; once the cavity temperature stabilizes, the heating unit 41 is turned off. If the detected temperature is high: the cooling unit 42 is started and the fan runs; when the cavity temperature drops, the cooling unit 42 is turned off. If the detected humidity is low: the humidification unit 51 is started and the fan runs; when a certain value is reached, the humidification unit 51 can be turned off. If the detected humidity is high: the dehumidification unit 52 is started and the fan runs; when the humidity returns to the specified value, the dehumidification unit 52 is turned off. Abnormalities and recording: If the temperature or humidity exceeds the corresponding value, the audible and visual alarm 91 sounds an alarm; all temperature and humidity data and control commands are automatically stored and can be queried through the touch screen.

[0019] The above are merely preferred embodiments of this utility model and are not intended to limit the utility model in any way. Any simple modifications, equivalent changes, and alterations made to the above embodiments based on the technical essence of this utility model shall fall within the scope of the utility model's technical solution.

Claims

1. A temperature and humidity adjusting assembly for a gum coating and developing machine, characterized by, The system includes a working chamber (1), a temperature and humidity detection module (2), a control module (3), a temperature adjustment module (4), a humidity adjustment module (5), and an airflow circulation module (6). The working chamber (1) is a hollow rectangular structure with an airflow channel (7) on one side wall. The two ends of the airflow channel (7) are connected to the interior of the working chamber (1). The temperature and humidity detection module (2) includes four temperature and humidity sensors (21). The four temperature and humidity sensors (21) are fixed to the four corners of the inner wall of the working chamber (1) by bolts. The detection end of the temperature and humidity sensor (21) faces the interior of the working chamber (1), and the signal output end extends to the control module (3) through a wire. The control module (3) is fixed to the outer wall of the working chamber (1). The surface of the control module (3) is provided with a touch screen (31). The control module (3) is also provided with a controller (32) that is electrically connected to the temperature and humidity sensor (21), the temperature adjustment module (4), the humidity adjustment module (5), and the airflow circulation module (6) through wires.

2. The environmental humidity and temperature adjusting assembly of a gluing and developing machine according to claim 1, characterized in that, The temperature regulation module (4) includes a heating unit (41) and a cooling unit (42). The heating unit (41) is a U-shaped PTC heating tube, and the cooling unit (42) is a sheet-like semiconductor cooling plate. The cooling unit (42) is fixed in the middle of the airflow channel (7) by screws.

3. The environmental humidity and temperature adjusting assembly of a gluing and developing machine according to claim 1, characterized in that, The humidity control module (5) includes a humidification unit (51) and a dehumidification unit (52). The humidification unit (51) is an ultrasonic atomizer, whose atomization outlet extends into the airflow channel (7) through a silicone tube. The humidification unit (51) is fixed to the outer wall of the working chamber (1) by a bracket and is located above the airflow channel (7). The dehumidification unit (52) is a plate-shaped condenser dehumidifier, which is vertically embedded at the outlet of the airflow channel (7). The drain outlet (53) of the dehumidification unit (52) extends to the outside of the working chamber (1) through a drain pipe.

4. The environmental humidity and temperature adjusting assembly of a gluing and developing machine according to claim 1, characterized in that, The airflow circulation module (6) includes a circulating fan (61) and an airflow guide plate (62). The circulating fan (61) is fixed to the top center of the working cavity (1) by bolts, and its air outlet faces the inside of the working cavity (1). The airflow guide plate (62) is a circular metal plate, which is fixed directly below the circulating fan (61) by a connecting rod (63).

5. The environmental humidity and temperature adjusting assembly of a gluing and developing machine according to claim 4, characterized in that, The airflow guide plate (62) is provided with a plurality of guide holes (8) evenly distributed in a ring array.

6. The environmental humidity and temperature adjusting assembly of a gluing and developing machine according to claim 1, characterized in that, The working cavity (1) also includes an alarm module (9), which is an audible and visual alarm (91) and is fixed to the top of the control module (3) by screws. The signal input terminal of the alarm module (9) is electrically connected to the controller (32) through a wire.

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