Photolithography objective constant temperature device

Abstract

The utility model provides a photolithography objective lens constant temperature device relates to photolithography equipment technical field, including objective lens main part, the outside of objective lens main part is provided with outer sheath, the outside fixed mounting of objective lens main part has fixed ring, the top of fixed ring is connected with outer sheath. The utility model discloses through the outer sheath and inner sheath cover and set in the outside of objective lens main part, and fixed ring is favorable to provide top limiting effect, and simultaneously promotes buckle piece and carding ring to be carded, is favorable to provide supplementary limiting effect to outer sheath, finally uses the thread limiting ring screw connection in the outside of objective lens main part, is favorable to provide bottom limiting effect, is favorable to promote the stability and reliability of outer sheath installation, convenient to the dismounting of outer sheath and inner sheath simultaneously, then convenient to cool down the pipe and take down and maintain overhauling, improve maintenance efficiency, and when dismounting, will not cause damage to cooling pipe, guarantees the normal use of cooling pipe.

Description

Technical Field

[0001] This utility model relates to the field of lithography equipment technology, and in particular to a temperature control device for a lithography objective lens. Background Technology

[0002] The lithography machine is a core piece of equipment in integrated circuit manufacturing. It includes an exposure system, a stage, a microenvironment system, and a workpiece transport system. Among these, the exposure system and the microenvironment system are crucial for ensuring the quality of the lithography lines. Temperature control of the projection lens in the lithography machine is of paramount importance. The lithography machine has extremely high requirements for the internal environment of the projection lens. Due to prolonged laser exposure, the internal temperature of the projection lens changes with the exposure time. These temperature variations can cause focal plane drift, leading to distortion and astigmatism in the exposed lines, severely reducing their quality. Therefore, controlling the internal temperature of the lens is a key technology for ensuring the quality of the lithography lines.

[0003] In the prior art, such as the "Lithography Machine Objective Lens Cooling Device" with patent application number CN208969428U, an objective lens is included. The objective lens is fitted with a housing, which includes a cooling sleeve and an outer shell. The cooling sleeve is fitted onto the objective lens, and the outer wall of the cooling sleeve has a spiral-shaped main cooling groove. The outer shell is fitted onto the cooling sleeve, forming a spiral cooling channel between the cooling sleeve and the outer shell. Connectors communicating with the cooling channel are provided at both ends of the housing. With this configuration, a spiral-shaped main cooling groove is formed on the cooling sleeve, and then an outer shell is fitted over the cooling sleeve. The inner wall of the outer shell and the main cooling groove form a spiral cooling channel. Coolant flows through the cooling channel, allowing the objective lens to directly contact the cooling sleeve for heat transfer. The spiral cooling channel provides more uniform heat transfer than a straight cooling pipe, and the cooling channel can be cleaned periodically by disassembling and assembling the outer shell, reducing the impact of scale on heat transfer efficiency. The connectors at both ends are connected to a coolant circulation device, keeping the coolant in the cooling channel at a constant temperature.

[0004] Existing temperature control devices typically use circulating coolant in cooling tubes to maintain the temperature of the objective lens. However, existing cooling tube structures are usually directly fixed to the objective lens, making it inconvenient to install or remove them. This increases maintenance difficulty and operation time, and the cooling tubes themselves are prone to secondary damage during disassembly and assembly. Summary of the Invention

[0005] The purpose of this invention is to solve the problem that in the prior art, the cooling tube structure is usually directly fixed on the objective lens, which is inconvenient to install and remove, increases the maintenance difficulty and operation time, and is easy to cause secondary damage to the cooling tube itself during the disassembly and assembly process. Therefore, a temperature control device for lithography machine objective lens is proposed.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: a photolithography machine objective lens constant temperature device, comprising an objective lens body, an outer sheath provided on the outer side of the objective lens body, a fixing ring fixedly installed on the outer side of the objective lens body, the fixing ring being connected to the top of the outer sheath, and a threaded limiting ring threadedly connected to the outer side of the objective lens body, the threaded limiting ring being connected to the bottom of the outer sheath.

[0007] Preferably, an inner sheath is provided on the inner side of the outer sheath, and a cooling pipe is wound between the outer sheath and the inner sheath, with flanges provided at both ends of the cooling pipe.

[0008] Preferably, a plurality of fasteners are distributed on the outer side of the fixing ring, and a locking ring is fixedly installed on the outer side of the outer sheath, wherein the fasteners are engaged with the locking ring.

[0009] Preferably, one end of the cooling pipe has a water inlet and the other end has a water outlet.

[0010] Preferably, the outer side of each of the fasteners is fitted with a limiting plate, and the outer side of each fastener is threadedly connected with a threaded sleeve.

[0011] Preferably, a temperature sensor is provided on the outer side of the objective lens body, and the threaded sleeve is connected to the top of the limiting plate.

[0012] Compared with the prior art, the advantages and positive effects of this utility model are as follows: 1. In this utility model, by fitting the outer and inner sheaths onto the outside of the objective lens body, the fixing ring provides a top limiting function and facilitates the engagement of the snap fastener with the snap ring, which provides an auxiliary limiting function for the outer sheath. Subsequently, a threaded sleeve is threadedly connected to the outside of the snap fastener, which provides a limiting function for the snap fastener and improves the stability of the snap fastener and snap ring engagement. The limiting plate provides a limiting function for the threaded sleeve. Finally, a threaded limiting ring is threadedly connected to the outside of the objective lens body, which provides a bottom limiting function. This improves the stability and reliability of the outer sheath installation, while facilitating the disassembly of the outer and inner sheaths, thereby facilitating the removal of the cooling tube for maintenance and repair, improving maintenance efficiency. At the same time, the cooling tube is not damaged during disassembly and assembly, ensuring the normal use of the cooling tube.

[0013] 2. In this utility model, the cooling pipe is set between the outer and inner sheaths, which facilitates the overall design, makes it easy to disassemble and assemble as a whole, improves the convenience of operation, and provides protection for the cooling pipe, reducing the damage to the cooling pipe and thus extending its service life. The inner sheath is conducive to fitting the outer side of the mirror body, while the outer sheath helps to block the influence of ambient temperature fluctuations and airflow disturbances on the cooling pipe, thus improving temperature control stability. Attached Figure Description

[0014] Figure 1 This utility model provides a three-dimensional structural schematic diagram of a temperature control device for a lithography machine objective lens; Figure 2 This invention provides a schematic diagram of the unfolded structure of a temperature control device for a lithography machine objective lens; Figure 3 This invention provides a partially exploded structural diagram of a temperature control device for a lithography machine objective lens; Figure 4 This invention provides a partial cross-sectional view of a temperature control device for a lithography machine objective lens.

[0015] Legend: 1. Objective lens body; 2. Temperature sensor; 3. Fixing ring; 4. Fastener; 5. Limiting plate; 6. Threaded sleeve; 7. Outer sheath; 8. Water inlet; 9. Water outlet; 10. Threaded limiting ring; 11. Cooling pipe; 12. Inner sheath; 13. Flange; 14. Clamping ring. Detailed Implementation

[0016] To better understand the above-mentioned objectives, features, and advantages of this utility model, the present utility model will be further described below with reference to the accompanying drawings and embodiments. It should be noted that, unless otherwise specified, the embodiments and features described in these embodiments can be combined with each other.

[0017] Many specific details are set forth in the following description in order to provide a full understanding of the present invention. However, the present invention may also be implemented in other ways different from those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0018] Example 1: As Figures 1-4 As shown, this utility model provides a technical solution: a temperature control device for a lithography machine objective lens, including an objective lens body 1, an outer sheath 7 on the outer side of the objective lens body 1, a fixing ring 3 fixedly installed on the outer side of the objective lens body 1, the fixing ring 3 being connected to the top of the outer sheath 7, a threaded limiting ring 10 threadedly connected to the outer side of the objective lens body 1, the threaded limiting ring 10 being connected to the bottom of the outer sheath 7, a plurality of fastening pieces 4 distributed on the outer side of the fixing ring 3, a clamping ring 14 fixedly installed on the outer side of the outer sheath 7, the fastening pieces 4 being clamped to the clamping ring 14, a limiting plate 5 installed on the outer side of each fastening piece 4, and a threaded sleeve 6 threadedly connected to the outer side of each fastening piece 4.

[0019] In this embodiment, the outer sheath 7 and the inner sheath 12 are fitted onto the outside of the objective lens body 1. The fixing ring 3 provides a top limiting function and simultaneously engages the snap fastener 4 with the snap ring 14, which provides an auxiliary limiting function for the outer sheath 7. Subsequently, a threaded sleeve 6 is threaded onto the outside of the snap fastener 4, which provides a limiting function for the snap fastener 4 and improves the stability of the snap fastener 4 and the snap ring 14 engagement. The limiting plate 5 provides a limiting function for the threaded sleeve 6. Finally, a threaded limiting ring 10 is threaded onto the outside of the objective lens body 1, which provides a bottom limiting function. This improves the stability and reliability of the installation of the outer sheath 7, facilitates the disassembly of the outer sheath 7 and the inner sheath 12, and facilitates the removal of the cooling tube 11 for maintenance and repair, improving maintenance efficiency. At the same time, the cooling tube 11 is not damaged during disassembly and assembly, ensuring the normal use of the cooling tube 11.

[0020] Example 2: Figures 1-4 As shown, an inner sheath 12 is provided on the inner side of the outer sheath 7, and a cooling pipe 11 is wound between the outer sheath 7 and the inner sheath 12. Both ends of the cooling pipe 11 are provided with flanges 13. One end of the cooling pipe 11 is provided with a water inlet 8, and the other end of the cooling pipe 11 is provided with a water outlet 9. A temperature sensor 2 is provided on the outer side of the objective lens body 1, and a threaded sleeve 6 is connected to the top of the limiting plate 5.

[0021] In this embodiment, the cooling pipe 11 is disposed between the outer sheath 7 and the inner sheath 12, which facilitates the overall design, makes it easy to disassemble and assemble as a whole, improves the convenience of operation, and provides protection for the cooling pipe 11, reducing the risk of damage to the cooling pipe 11 and thus extending the service life of the cooling pipe 11. The inner sheath 12 is conducive to fitting the outer side of the mirror body 1, and the outer sheath 7 is conducive to blocking the influence of ambient temperature fluctuations and airflow disturbances on the cooling pipe 11, thereby improving temperature control stability.

[0022] The working principle of this embodiment is as follows: In use, the outer sheath 7 and the inner sheath 12 are first fitted onto the outside of the objective lens body 1. The retaining ring 3 provides a top limiting function and simultaneously causes the locking member 4 to engage with the locking ring 14, which helps to provide auxiliary limiting function for the outer sheath 7. Then, the threaded sleeve 6 is threadedly connected to the outside of the locking member 4, which helps to limit the locking member 4 and improves the stability of the locking member 4 and the locking ring 14. The limiting plate 5 helps to limit the threaded sleeve 6. Finally, the threaded limiting ring 10 is threadedly connected. The outer side of the objective lens body 1 provides a bottom limiting function, which helps to improve the stability and reliability of the installation of the outer sheath 7. At the same time, it facilitates the disassembly of the outer sheath 7 and the inner sheath 12, and thus facilitates the removal of the cooling pipe 11 for maintenance and repair. The cooling pipe 11 is located between the outer sheath 7 and the inner sheath 12, which helps to achieve an integrated design and facilitates its overall assembly and disassembly. The inner sheath 12 helps to fit the outer side of the objective lens body 1, and the outer sheath 7 helps to block the influence of ambient temperature fluctuations and airflow disturbances on the cooling pipe 11, thereby improving temperature control stability.

[0023] The above description is merely a preferred embodiment of the present utility model and is not intended to limit the present utility model in any other way. Any person skilled in the art may make changes or modifications to the above-disclosed technical content to create equivalent embodiments for application in other fields. However, any simple modifications, equivalent changes, and modifications made to the above embodiments based on the technical essence of the present utility model without departing from the technical solution of the present utility model shall still fall within the protection scope of the technical solution of the present utility model.

Claims

1. A temperature control device for a lithography machine objective lens, comprising an objective lens body (1), characterized in that: An outer sheath (7) is provided on the outside of the objective lens body (1). A fixing ring (3) is fixedly installed on the outside of the objective lens body (1). The fixing ring (3) is connected to the top of the outer sheath (7). A threaded limiting ring (10) is threadedly connected to the outside of the objective lens body (1). The threaded limiting ring (10) is connected to the bottom of the outer sheath (7).

2. The photolithography objective thermostat according to claim 1, characterized in that An inner sleeve (12) is provided on the inner side of the outer sleeve (7), and a cooling pipe (11) is wound between the outer sleeve (7) and the inner sleeve (12). Both ends of the cooling pipe (11) are provided with flanges (13).

3. The photoetching machine objective lens thermostat device according to claim 1, characterized in that: Multiple fasteners (4) are distributed on the outer side of the fixed ring (3), and a snap ring (14) is fixedly installed on the outer side of the outer sheath (7). The fasteners (4) and the snap ring (14) are snapped together.

4. The photoetching machine objective lens thermostat device according to claim 2, characterized in that: The cooling pipe (11) has an inlet (8) at one end and an outlet (9) at the other end.

5. The photolithography objective thermostat according to claim 3, characterized in that Limiting plates (5) are installed on the outer side of each of the fasteners (4), and threaded sleeves (6) are threadedly connected to the outer side of each of the fasteners (4).

6. The lithography objective thermostat according to claim 5, characterized in that A temperature sensor (2) is provided on the outside of the objective lens body (1), and the threaded sleeve (6) is connected to the top of the limiting plate (5).

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