A position limiting locking device for scanning electron microscope sample stage

Abstract

This utility model discloses a limiting and locking device for a scanning electron microscope sample stage, including a base, in which a sample stage is inserted and slidably mounted. The base includes a seat body disposed below the bottom surface of the sample stage, and a slot is formed on the top surface of the seat body. The sample stage includes a stage body disposed on the base, and a rod is provided at the bottom of the stage body. The rod of the sample stage is inserted into the slot of the base, causing the mating block to contact an electromagnet. When the electromagnet is energized, it generates magnetism, creating a magnetic attraction force with the mating block, thus initially fixing the sample stage to the base. When the sample stage needs to be removed, simply de-energize the electromagnet; the magnetic attraction force disappears, and the sample stage can be easily pulled out of the base. This design eliminates the need to rotate the sample stage base rod to engage with the base threads for fixation, avoiding the problems of continuous rotation during thread insertion and the time-consuming process of single installation and disassembly, greatly improving the efficiency of installation and disassembly.

Description

Technical Field

[0001] This utility model relates to the field of scanning electron microscope sample stage technology, specifically a limiting and locking device for scanning electron microscope sample stage. Background Technology

[0002] Scanning electron microscopy (SEM), or scanning electron microscope for short, is an electronic observation device that falls between transmission electron microscopy and optical microscopy. It uses a narrowly focused high-energy electron beam to scan a sample. Through the interaction between the beam and the material, various physical information is excited, collected, magnified, and re-imaged to characterize the microscopic morphology of the material. SEM inspection, or scanning electron microscopy inspection for short, is a testing method that utilizes a scanning electron microscope. It has two basic functions: first, it can magnify the sample surface 25 times to 1 million times; second, it can perform qualitative and quantitative analysis of elements in micro-regions of the sample surface. If a sample is placed in a scanning electron microscope, a fixture conforming to the standard dimensions of the equipment is required. Currently available fixtures are not suitable for observing the cross-section of silicon wafers; therefore, a fixture designed to mount the sample on a more stable surface with a larger area is needed.

[0003] A search revealed a patent with publication number CN219513043U, which discloses a limiting and locking device for a scanning electron microscope (SEM) sample stage, relating to the field of SEM sample stage technology. The device includes a sample stage base, which comprises an SEM sample stage. Sliding rods are provided on the outer walls of both sides of the SEM sample stage. Movable plate fixing blocks are slidably connected to the outer walls of the sliding rods. A movable plate is fixedly installed on the front outer wall of the movable plate fixing blocks. A sample stage bottom rod is fixedly installed on the bottom outer wall of the SEM sample stage, and a bottom rod thread is fixedly installed on the outer wall of the bottom rod. This invention achieves the effect of conveniently disassembling the SEM sample stage by first inserting the sample stage bottom rod into the inner cavity of the sample stage base during installation, and then pinching and rotating the two movable plates. The threaded connection between the bottom rod thread and the inner thread of the base locks the SEM sample stage, achieving the effect of conveniently disassembling the SEM sample stage using the movable plates.

[0004] In the aforementioned prior art, the sample stage base rod needs to be rotated and engaged with the base thread to achieve fixation. The threading process usually requires continuous rotation of multiple turns, and the installation and disassembly of a single unit takes a long time. If multiple silicon wafers need to be inspected per day, the cumulative time will significantly extend the inspection cycle and reduce the quality control efficiency of the production line. Utility Model Content

[0005] The purpose of this section is to outline some aspects of the embodiments of this utility model and to briefly introduce some preferred embodiments. Simplifications or omissions may be made in this section, as well as in the abstract and title of this application, to avoid obscuring the purpose of these documents; however, such simplifications or omissions should not be used to limit the scope of this utility model.

[0006] In view of the problems existing in the above and / or existing limiting and locking devices for scanning electron microscope sample stages, this utility model is proposed.

[0007] To solve the above-mentioned technical problems, according to one aspect of the present invention, the present invention provides the following technical solution: A limiting and locking device for a scanning electron microscope sample stage includes a base in which the sample stage is inserted and slidably mounted.

[0008] As a preferred embodiment of the limiting and locking device for a scanning electron microscope sample stage according to the present invention, the base includes a seat body disposed under the bottom surface of the sample stage, and a slot is provided on the top surface of the seat body.

[0009] As a preferred embodiment of the limiting and locking device for a scanning electron microscope sample stage according to the present invention, the sample stage includes a stage body disposed on a base, and a rod is provided at the bottom of the stage body, and the rod is inserted into a slot and slidably installed.

[0010] As a preferred embodiment of the limiting and locking device for a scanning electron microscope sample stage described in this utility model, a mating block is provided at the bottom of the insertion rod, and an electromagnet is provided in the slot, and the electromagnet magnetically engages with the mating block after being energized.

[0011] As a preferred embodiment of the limiting and locking device for a scanning electron microscope sample stage described in this utility model, the outer wall of the insertion rod is provided with several friction-enhancing grooves.

[0012] As a preferred embodiment of the limiting and locking device for a scanning electron microscope sample stage described in this utility model, a second friction-increasing sleeve is uniformly distributed in the slot.

[0013] As a preferred embodiment of the limiting and locking device for a scanning electron microscope sample stage described in this utility model, an annular first friction-increasing sleeve is provided on the top surface of the base.

[0014] As a preferred embodiment of the limiting and locking device for a scanning electron microscope sample stage described in this utility model, both the first friction-enhancing sleeve and the second friction-enhancing sleeve are configured as elastic structures.

[0015] As a preferred embodiment of the limiting and locking device for a scanning electron microscope sample stage according to the present invention, a groove is provided on the top surface of the base, and a uniformly distributed clamping plate is provided in the groove. A uniformly distributed insert is provided on the bottom surface of the stage, and the insert abuts against two adjacent clamping plates, and the clamping plates are configured as elastic structures.

[0016] As a preferred embodiment of the limiting and locking device for a scanning electron microscope sample stage described in this utility model, the outer wall of the stage body is provided with evenly distributed contact blocks.

[0017] Compared with the prior art, the beneficial effects of this utility model are: In this application, the sample stage's insertion rod is aligned with the slot on the base and inserted, causing the mating block to contact the electromagnet. When the electromagnet is energized, it generates magnetism, creating a magnetic attraction force with the mating block, thus initially fixing the sample stage to the base. When the sample stage needs to be removed, simply de-energize the electromagnet, and the magnetic attraction force disappears, allowing the sample stage to be easily pulled out of the base. This design eliminates the need to rotate the sample stage's base rod to engage with the base's threads for fixation, avoiding the problems of continuous rotation during the thread insertion process and the time-consuming installation and disassembly, greatly improving the efficiency of installation and disassembly. Attached Figure Description

[0018] To more clearly illustrate the technical solutions of the embodiments of this utility model, the present utility model will be described in detail below with reference to the accompanying drawings and detailed embodiments. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort. Among them: Figure 1 This is a schematic diagram of the overall structure of a limiting and locking device for a scanning electron microscope sample stage according to the present invention. Figure 2 This is a schematic diagram of the base structure of a limiting and locking device for a scanning electron microscope sample stage according to the present invention. Figure 3 This is a schematic diagram of the sample stage structure of a limiting and locking device for a scanning electron microscope sample stage according to the present invention. Figure 4 This is a schematic diagram of the electromagnet and mating block mating structure of a limiting and locking device for a scanning electron microscope sample stage according to the present invention. Figure 5 This is a schematic diagram of the internal structure of the base of a limiting and locking device for a scanning electron microscope sample stage according to the present invention.

[0019] In the diagram: 1. Base; 2. Sample stage; 3. Base body; 4. Groove; 5. Slot; 6. First friction-enhancing sleeve; 7. Second friction-enhancing sleeve; 8. Insert block; 9. Clamping plate; 10. Stage body; 11. Insert rod; 12. Mating block; 13. Contact block; 14. Friction-enhancing texture; 15. Electromagnet. Detailed Implementation

[0020] To make the above-mentioned objectives, features and advantages of this utility model more apparent and understandable, the specific embodiments of this utility model will be described in detail below with reference to the accompanying drawings.

[0021] Secondly, this utility model is described in detail with reference to the schematic diagrams. When describing the embodiments of this utility model, for ease of explanation, the cross-sectional views showing the device structure may be partially enlarged, not according to the usual scale. Furthermore, the schematic diagrams are merely examples and should not limit the scope of protection of this utility model. In addition, in actual manufacturing, the three-dimensional spatial dimensions of length, width, and depth should be included.

[0022] To make the objectives, technical solutions, and advantages of this utility model clearer, the embodiments of this utility model will be described in further detail below with reference to the accompanying drawings.

[0023] Please see Figures 1-5 This utility model provides a technical solution: a limiting and locking device for a scanning electron microscope sample stage, including a base 1, a sample stage 2 inserted and slidably installed in the base 1, the sample stage 2 can slide up and down along the insertion direction to achieve quick assembly and disassembly, the base 1 includes a body 3 located directly below the bottom surface of the sample stage 2, the body 3 is the main support structure of the base 1, a slot 5 is opened on the top surface of the body 3, the slot 5 extends along the height direction of the body 3 to accommodate the insertion rod 11 of the sample stage 2, the sample stage 2 includes a stage body 10 located above the base 1, the stage body 10 is a carrier for placing silicon wafers, the insertion rod 11 is fixedly installed at the center of the bottom of the stage body 10, the insertion rod 11 is coaxially arranged with the stage body 10, and the insertion rod 11 is inserted into the slot 5 and slidably installed, the insertion rod 11 and the inner wall of the slot 5 maintain a clearance fit to ensure smooth sliding.

[0024] A mating block 12 is fixedly installed at the bottom of the insertion rod 11 for magnetic attraction with the electromagnet 15. An electromagnet 15 is fixedly installed at the bottom of the slot 5, corresponding to the mating block 12. When energized, the electromagnet 15 magnetically attracts the mating block 12, fixing the insertion rod 11 to the slot 5 via magnetic force, replacing traditional threaded fixing. Several friction-enhancing grooves 14 are spaced along the length of the outer wall of the insertion rod 11 to increase the contact friction between the insertion rod 11 and the second friction-enhancing sleeve 7. Uniformly spaced grooves are fixedly installed on the inner wall of the slot 5. The second friction-enhancing sleeves 7 are distributed and spaced along the circumference of the slot 5. The inner wall of the second friction-enhancing sleeve 7 is in close contact with the outer wall of the insertion rod 11. An annular first friction-enhancing sleeve 6 is fixedly installed on the top surface of the base 3. The first friction-enhancing sleeve 6 is arranged around the slot 5, and the top surface of the first friction-enhancing sleeve 6 is in close contact with the bottom surface of the stage 10. Both the first friction-enhancing sleeve 6 and the second friction-enhancing sleeve 7 are set as elastic structures. On the one hand, they fill the gap through elastic deformation to enhance the fixing stability. On the other hand, they buffer the impact force when the sample stage 2 is inserted to avoid damage to the components due to collision.

[0025] A groove 4 is formed around the top surface of the base 3, surrounding the first friction-enhancing sleeve 6. The groove 4 is opposite to the bottom surface of the platform 10. Evenly distributed clamping plates 9 are fixedly installed within the groove 4. The clamping plates 9 are spaced apart along the circumference of the groove 4 and are designed to be elastic, allowing them to deform under external force. Evenly distributed insert blocks 8 are fixedly installed on the bottom surface of the platform 10 corresponding to the position of the groove 4. The insert blocks 8 are spaced apart along the circumference of the platform 10, and the number of insert blocks 8 matches the number of clamping plates 9. After being inserted into the groove 4, the insert blocks 8 engage with the two adjacent clamping plates. The plates 9 abut against each other, and the elastic clamping force of the clamping plates 9 restricts the displacement of the insert 8. When the sample stage 2 is rotated, the insert 8 squeezes the clamping plates 9 and deforms. When the insert 8 passes the clamping plates 9, there will be a noticeable jolt, so that the user can perceive the rotation angle of the sample stage 2. The sample stage 2 can be rotated at a specific angle, which is convenient for fine angle adjustment of the sample stage 2. The outer wall of the stage body 10 is fixedly provided with evenly distributed contact blocks 13. The contact blocks 13 are used to assist the operator in holding or positioning, which is convenient for the insertion, removal and rotation adjustment of the sample stage 2.

[0026] In this embodiment, the insertion rod 11 is inserted into the slot 5, and the electromagnet 15 magnetically engages the block 12 instead of the traditional threaded connection. Installation can be completed without rotation, which greatly shortens the assembly and disassembly time. At the same time, through the frictional engagement of the friction-enhancing texture 14 and the second friction-enhancing sleeve 7, the end face friction of the first friction-enhancing sleeve 6, and the elastic clamping of the insertion block 8 and the clamping plate 9, a multiple fixing structure is formed to ensure the stability of the sample stage 2. When adjusting the angle, only the electromagnet 15 needs to be de-energized, the stage body 10 is rotated, the insertion block 8 is squeezed and the clamping plate 9 is deformed to achieve a jerky rotation, and then the electromagnetic attraction is turned on, which meets the fine angle adjustment requirements when observing silicon wafers.

[0027] In practical use, the insertion rod 11 of the sample stage 2 is aligned with the slot 5 of the base 1 and inserted, so that the mating block 12 contacts the electromagnet 15. At this time, the electromagnet 15 is energized, and the electromagnet 15 generates magnetism, creating a magnetic attraction force with the mating block 12, thereby initially fixing the sample stage 2 to the base 1. When it is necessary to remove the sample stage 2, simply de-energize the electromagnet 15, and the magnetic attraction force disappears, allowing the sample stage 2 to be easily pulled out of the base 1. This design eliminates the need to rotate the sample stage base rod to engage with the base thread for fixation, avoiding the problems of continuous rotation during the thread insertion process and the long time required for each installation and disassembly, greatly improving the efficiency of installation and disassembly.

[0028] Although the present invention has been described above with reference to embodiments, various modifications can be made and components can be replaced with equivalents without departing from the scope of the present invention. In particular, as long as there is no structural conflict, the features in the embodiments disclosed in this invention can be combined with each other in any way. The lack of an exhaustive description of these combinations in this specification is merely for the sake of brevity and resource conservation. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but includes all technical solutions falling within the scope of the claims.

Claims

1. A limiting and locking device for a scanning electron microscope sample stage, characterized in that, Includes a base (1), in which a sample stage (2) is inserted and slidably installed, the base (1) includes a body (3) disposed under the bottom surface of the sample stage (2), and a slot (5) is provided on the top surface of the body (3); The sample stage (2) includes a stage body (10) set on a base (1). A rod (11) is provided at the bottom of the stage body (10), and the rod (11) is inserted into a slot (5) and slidably installed. A mating block (12) is provided at the bottom of the rod (11), and an electromagnet (15) is provided in the slot (5). When the electromagnet (15) is energized, it magnetically engages with the mating block (12).

2. The limiting and locking device for a scanning electron microscope sample stage according to claim 1, characterized in that, The outer wall of the insertion rod (11) is provided with several friction-enhancing grooves (14).

3. The limiting and locking device for a scanning electron microscope sample stage according to claim 1, characterized in that, The slot (5) is provided with a uniformly distributed second friction-enhancing sleeve (7).

4. A limiting and locking device for a scanning electron microscope sample stage according to claim 1, characterized in that, A first friction-increasing sleeve (6) in the shape of an annular shape is provided on the top surface of the seat (3).

5. A limiting and locking device for a scanning electron microscope sample stage according to claim 4, characterized in that, Both the first friction-enhancing sleeve (6) and the second friction-enhancing sleeve (7) are configured as elastic structures.

6. A limiting and locking device for a scanning electron microscope sample stage according to claim 1, characterized in that, The top surface of the seat (3) is provided with a groove (4), and the groove (4) is provided with uniformly distributed clamping plates (9). The bottom surface of the platform (10) is provided with uniformly distributed inserts (8). The inserts (8) abut against two adjacent clamping plates (9), and the clamping plates (9) are provided with an elastic structure.

7. A limiting and locking device for a scanning electron microscope sample stage according to claim 6, characterized in that, The outer wall of the platform (10) is provided with evenly distributed contact blocks (13).

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