Mass spectrometer vacuum chamber viewing window high seal press device

Abstract

The utility model discloses mass spectrometer vacuum cavity observation window high sealing press device, specifically relates to mass spectrometer technical field, including cavity shell, and the connecting frame no.

Description

Technical Field

[0001] This utility model relates to the field of mass spectrometry technology, and more specifically, to a high-sealing pressure sealing device for the observation window of a mass spectrometer vacuum chamber. Background Technology

[0002] Mass spectrometers analyze substances by measuring the mass-to-charge ratio of ions. Their core components (such as ion sources and mass analyzers) require a high-vacuum or ultra-high-vacuum environment (10⁻³ Pa to 10⁻³ Pa). 7 When operating in a vacuum chamber (below Pa), the observation window, as the "visual interface" of the vacuum chamber, must simultaneously meet the following requirements: optical performance, sealing performance, and environmental adaptability. The glass of the observation window needs to have high sealing performance.

[0003] In actual use, when installing the observation window glass of the mass spectrometer vacuum chamber, the connection and sealing between the glass and the mass spectrometer vacuum chamber cannot always maintain an effective seal, and improperly installed glass will reduce the service life of the mass spectrometer vacuum chamber. Utility Model Content

[0004] In order to overcome the above-mentioned defects of the prior art, the present invention provides a high-sealing pressure sealing device for the observation window of the vacuum chamber of a mass spectrometer, so as to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution:

[0006] A high-sealing pressure sealing device for the observation window of a mass spectrometer vacuum chamber includes a chamber shell and two connecting frames, one and two, located on the side of the chamber shell. The observation window glass body is located inside both connecting frames. Two washers are fixedly connected to the top of the chamber shell, and a bottom groove frame is fixedly connected to one side of the chamber shell. Interfaces for threaded connections are provided on the washers and the inner side of the chamber shell. Connecting frames one and two are distributed sequentially from the inside to the outside of the chamber shell. A multiple sealing mechanism is provided on the outer side of connecting frames one and two. The multiple sealing mechanism includes two slots located inside the chamber shell. Positioning frames are fixedly connected to the outer sides of both connecting frames one and two, and the outer sides of the two positioning frames respectively engage with the inner sides of the slots. A bottom groove frame is provided on one side of the chamber shell. Two sealing grooves, one and two sealing grooves; two sealing rings are fixedly connected to one side of each of the connecting frames one and two, and the two sealing rings on one side of each of the connecting frames one and two respectively cooperate with each other to form an effective seal. Each of the sealing rings has a groove on one side, and the concave surface of the grooves cooperates with the inner surface of the two sealing grooves one and two. A sealing ring three is fixedly connected to one side of the connecting frame one, and a protrusion is provided on one side of the sealing ring three. A sealing ring two is fixedly connected to one side of the connecting frame two, and a groove is provided on one side of the sealing ring two that matches the protrusion. The protrusion and the groove cooperate with each other to achieve a seal between the two observation window glass bodies; a pressing mechanism is provided on the outer side of the cavity shell.

[0007] By adopting the above technical solution: the sealing rings and grooves on one side of the connecting frame 1 and the connecting frame 2 are used to fit the two sealing grooves 1 and 2 for double sealing. The double-layer observation window glass body improves the sealing performance of the cavity shell and enhances the safety of the mass spectrometer vacuum cavity.

[0008] As a further description of the above technical solution: the pressing mechanism includes a positioning card seat, and two extrusion plates are fixedly connected to the bottom of the positioning card seat. The outer side of the extrusion plate is slidably connected to the inner side of the two card slots, and the bottom side of the two card slots respectively cooperates with the top side of the connecting frame one and the connecting frame two to press against each other. Screws are inserted into both ends of the positioning card seat. The bottom end of the screw passes through the inner side of the washer and is threadedly connected to the inner interface of the cavity shell. A limit frame is fixedly connected to the bottom of the positioning card seat. Multiple pressure plates are fixedly connected to the inner side of the limit frame. A groove for limiting the bottom end of the limit frame is opened on the inner side of the bottom groove frame.

[0009] By adopting the above technical solution: using two extrusion plates to extrude and position connecting frame one and connecting frame two, and cooperating with the limiting frame and multiple pressure plates to press connecting frame two and connecting frame one toward one side of the cavity shell, so as to maintain a high degree of sealing between the cavity shell, connecting frame one and connecting frame two.

[0010] The technical effects and advantages of this utility model are as follows:

[0011] 1. By setting up multiple sealing mechanisms, compared with the existing technology, a double independent sealing barrier is constructed between the double-layer sealing ring on one side of the connecting frame 1 and the connecting frame 2 and the outer shell of the cavity. Even if one sealing ring fails due to minor damage or installation defects, the other sealing ring can still maintain the vacuum level, reducing the risk of vacuum leakage. In addition, the double-layer glass structure can distribute the total pressure difference to the connecting frame 1, connecting frame 2 and the observation window glass body, improving the overall mechanical strength and deformation resistance, and extending the service life of the mass spectrometer vacuum cavity.

[0012] 2. By setting up a pressing mechanism, compared with the existing technology, two extrusion plates, together with the limiting frame and the pressure plate, perform vertical and horizontal extrusion on the connecting frame 1 and connecting frame 2, which strengthens the sealing between the connecting frame 1 and connecting frame 2 and the outer shell of the cavity, and improves the high sealing effect after the observation window is installed in the vacuum cavity of the mass spectrometer. Attached Figure Description

[0013] Figure 1 This is a schematic diagram of the overall structure of this utility model.

[0014] Figure 2 This is a schematic diagram of the front structure of this utility model.

[0015] Figure 3 This is a partial schematic diagram of the connection between the cavity shell and the bottom groove frame of this utility model.

[0016] Figure 4 This is a partial schematic diagram of the connection between the positioning card holder and the positioning frame of this utility model.

[0017] Figure 5 This is a partial schematic diagram of the connection between the connecting frame and the sealing ring of this utility model.

[0018] Figure 6 This is a partial schematic diagram of the connection between the connecting frame 1 and the sealing ring 3 of this utility model.

[0019] Figure 7 This is a partial schematic diagram of the connection between the second connecting frame and the second sealing ring of this utility model.

[0020] Figure 8 For the present utility model Figure 1 Enlarged diagram of A in the middle.

[0021] Figure 9 For the present utility model Figure 7 Enlarged diagram of B in the middle.

[0022] The attached diagram is labeled as follows: 1. Cavity shell; 2. Connecting frame one; 3. Connecting frame two; 4. Slot; 5. Positioning frame; 6. Sealing ring one; 7. Sealing groove one; 8. Sealing groove two; 9. Groove; 10. Sealing ring two; 11. Sealing ring three; 12. Observation window glass body; 13. Positioning bracket; 14. Extrusion plate; 15. Screw; 16. Washer; 17. Limiting frame; 18. Pressure plate; 19. Bottom groove frame. Detailed Implementation

[0023] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0024] The embodiments disclosed in this application are as follows: Figures 1-9 The mass spectrometer vacuum chamber observation window high-sealing pressure device shown includes a chamber shell 1, and connecting frame 1 2 and connecting frame 2 3 located on the side of the chamber shell 1. Observation window glass bodies 12 are located inside both connecting frame 1 2 and connecting frame 2 3. Two washers 16 are fixedly connected to the top of the chamber shell 1. A bottom groove frame 19 is fixedly connected to one side of the chamber shell 1. Interfaces for threaded connections are provided on the washers 16 and the inside of the chamber shell 1. Connecting frame 1 2 and connecting frame 2 3 are distributed sequentially from the inside to the outside of the chamber shell 1. A multiple sealing mechanism is provided on the outside of connecting frame 1 2 and connecting frame 2 3. The multiple sealing mechanism includes two slots 4 located inside the chamber shell 1. Positioning frames 5 are fixedly connected to the outside of both connecting frame 1 2 and connecting frame 2 3, and the outside of the two positioning frames 5 respectively engage with the inside of the slots 4. Two sealing grooves 1 and 2 are provided on one side; two sealing rings 1 and 6 are fixedly connected to one side of each connecting frame 1 and connecting frame 2 and connecting frame 2 and connecting frame 3 respectively. The two sealing rings 1 and 6 on one side of each connecting frame 1 and connecting frame 2 and connecting frame 2 and connecting frame 3 respectively cooperate with each other to form an effective seal. A groove 9 is opened on one side of each of the multiple sealing rings 1 and connecting frame 2. The concave surface of the multiple grooves 9 cooperates with the inner surface of the two sealing grooves 1 and connecting frame 2. A sealing ring 3 and connecting frame 2 are fixedly connected to one side of each connecting frame 1 and connecting frame 2. A sealing ring 2 and connecting frame 2 are fixedly connected to one side of each connecting frame 2. A groove is provided on one side of each sealing ring 2 and connecting frame 2. The protrusion and the groove cooperate with each other to achieve a seal between the two observation window glass bodies 12; a pressing mechanism is provided on the outside of the cavity shell 1.

[0025] The positioning frame 5 on the outside of the connecting frame 1 2 and the connecting frame 2 3 are inserted into the slot 4 for installation, which simplifies the installation steps of the connecting frame 1 2, the connecting frame 2 3 and the cavity shell 1. The sealing ring 1 6 and the groove 9 on one side of the connecting frame 1 2 and the connecting frame 2 3 are used to fit and squeeze the two sealing grooves 1 7 and 2 8 to seal them. The sealing ring 3 11 and sealing ring 2 10 between the connecting frame 1 2 and the connecting frame 2 3 are used to snap and seal them, so that there is a seal between the two observation window glass bodies 12, and the seal between the connecting frame 1 2 and the connecting frame 2 3 and the cavity shell 1 is improved.

[0026] Reference Figure 2 , Figure 3 , Figure 4 and Figure 8 As shown, the pressing mechanism includes a positioning card seat 13. Two extrusion plates 14 are fixedly connected to the bottom of the positioning card seat 13. The outer side of the extrusion plates 14 is slidably connected to the inner side of the two card slots 4, and the bottom side of the two card slots 4 respectively cooperates with the top side of the connecting frame 1 2 and the connecting frame 2 3 to press against each other. Screws 15 are inserted into both ends of the positioning card seat 13. The bottom end of the screws 15 passes through the inner side of the washer 16 and is threadedly connected to the inner interface of the cavity shell 1. A limit frame 17 is fixedly connected to the bottom of the positioning card seat 13. Multiple pressure plates 18 are fixedly connected to the inner side of the limit frame 17. A groove for limiting the bottom end of the limit frame 17 is opened on the inner side of the bottom groove frame 19. The two extrusion plates 14 at the bottom of the positioning card seat 13 are used to press and position the connecting frame 1 2 and the connecting frame 2 3. Combined with the multiple pressure plates 18 on one side of the limit frame 17, the connecting frame 2 3 and the connecting frame 1 2 are pressed towards the side of the cavity shell 1, so that the multiple sealing rings 1 6 can be further pressed and sealed between the sealing groove 1 7 and the sealing groove 2 8.

[0027] The working principle of this utility model is as follows: When installing the observation window glass on the front side of the cavity shell 1 of the mass spectrometer, the connecting frame 1 2 is first inserted into the slot 4 near the inner side of the cavity shell 1 through the outer positioning frame 5, so that the connecting frame 1 2 can be completely inserted and overlapped with the front side of the cavity shell 1. The two sealing rings 1 6 on one side of the connecting frame 1 2 are inserted into the two sealing grooves 1 7 on one side of the cavity shell 1. The grooves 9 on one side of the two sealing rings 1 6 and the surface of the sealing grooves 1 7 are further fitted and sealed, so that the connecting frame 1 2 and the cavity shell 1 form a double seal. Then, the connecting frame 2 3 and the slot 4 are inserted into the other slot 4 on the inner side of the cavity shell 1. Then, the two sealing rings 1 6 on one side of the connecting frame 2 3 are double fitted with the corresponding grooves 9 and the two sealing grooves 2 8 on one side of the cavity shell 1, so that the connecting frame 2 3 and the cavity shell 1 are sealed.

[0028] After connecting frame 1 (2) and connecting frame 2 (3) are both installed inside the cavity shell 1, combined with the attached... Figure 6 and 7The protrusion of the sealing ring 11 on one side of the connecting frame 2 and the groove of the sealing ring 10 on one side of the connecting frame 3 interlock to ensure a seal between the observation window glass body 12 inside the connecting frame 2 and the connecting frame 3.

[0029] Next, the positioning bracket 13 and the two extrusion plates 14 are inserted into the two slots 4 inside the cavity shell 1, so that the bottom of the two extrusion plates 14 presses down on the top of the connecting frame 1 2 and the connecting frame 2 3. At the same time, the bottom of the limiting frame 17 is inserted into the inside of the bottom groove frame 19. Then, the two screws 15 are threaded through the positioning bracket 13 and the two washers 16 and tightened into the inside of the cavity shell 1. The positioning bracket 13 drives the two extrusion plates 14 to tighten and extrude the connecting frame 1 2 and the connecting frame 2 3. Combined with the limiting frame 17, multiple pressure plates 18 push and extrude the connecting frame 2 3 and the connecting frame 1 2 towards one side of the cavity shell 1. This achieves multiple seals between the cavity shell 1, the sealing ring 1 6, the sealing groove 1 7, the sealing groove 2 8 and the groove 9 between the sealing ring 1 6, the sealing groove 1 7, the sealing groove 2 8 and the groove 9, thus ensuring the installation and sealing of the mass spectrometer vacuum chamber.

[0030] All contents not described in detail in the specification are existing technologies known to those skilled in the art, and the model parameters of each electrical appliance are not specifically limited; conventional equipment can be used. Electrical control components not mentioned in this technical solution are not shown in the figures because they are existing technologies, and will not be described here.

[0031] The above are all preferred embodiments of this application, and are not intended to limit the scope of protection of this application. Therefore, all equivalent changes made in accordance with the structure, shape and principle of this application should be covered within the scope of protection of this application.

Claims

1. A high-sealing pressure sealing device for the observation window of a mass spectrometer vacuum chamber, comprising a chamber shell (1), and connecting frame one (2) and connecting frame two (3) disposed on the side of the chamber shell (1), characterized in that: The inner sides of the connecting frame 1 (2) and the connecting frame 2 (3) are provided with observation window glass bodies (12). The top of the cavity shell (1) is fixedly connected with two washers (16). The bottom groove frame (19) is fixedly connected to one side of the cavity shell (1). The washers (16) and the inner sides of the cavity shell (1) are provided with interfaces for threaded connection. The connecting frame 1 (2) and the connecting frame 2 (3) are distributed from the inside to the outside of the cavity shell (1). The outer sides of the connecting frame 1 (2) and the connecting frame 2 (3) are provided with multiple sealing mechanisms. The multi-seal mechanism includes two slots (4) set inside the cavity shell (1), and positioning frames (5) are fixedly connected to the outer sides of the first connecting frame (2) and the second connecting frame (3), and the outer sides of the two positioning frames (5) are respectively engaged with the inner side of the slots (4). The outer shell of the cavity (1) is provided with two sealing grooves (7) and two sealing grooves (8) on one side; Two sealing rings (6) are fixedly connected to one side of each of the connecting frame 1 (2) and the connecting frame 2 (3). The two sealing rings (6) on one side of the connecting frame 1 (2) and the connecting frame 2 (3) respectively cooperate with the inner surfaces of the two sealing grooves 1 (7) and 2 (8) to form an effective seal. A pressing mechanism is provided on the outer side of the cavity shell (1).

2. The high-sealing pressure sealing device for the observation window of the mass spectrometer vacuum chamber according to claim 1, characterized in that: Each of the multiple sealing rings (6) has a groove (9) on one side, and the concave surface of the multiple grooves (9) matches the inner surface of the two sealing grooves (7) and sealing groove (8).

3. The high-sealing pressure sealing device for the observation window of the mass spectrometer vacuum chamber according to claim 1, characterized in that: A sealing ring three (11) is fixedly connected to one side of the connecting frame one (2), and a protrusion is provided on one side of the sealing ring three (11). A sealing ring two (10) is fixedly connected to one side of the connecting frame two (3), and a groove is provided on one side of the sealing ring two (10) that matches the protrusion. The protrusion and the groove cooperate with each other to achieve a seal between the two observation window glass bodies (12).

4. The high-sealing pressure sealing device for the observation window of the mass spectrometer vacuum chamber according to claim 1, characterized in that: The pressing mechanism includes a positioning card seat (13), and two extrusion plates (14) are fixedly connected to the bottom of the positioning card seat (13). The outer side of the extrusion plate (14) is slidably connected to the inner side of the two card slots (4), and the bottom side of the two card slots (4) respectively cooperates with the top side of the connecting frame one (2) and the connecting frame two (3) to press each other.

5. The high-sealing pressure sealing device for the observation window of the mass spectrometer vacuum chamber according to claim 4, characterized in that: Both ends of the positioning bracket (13) are fitted with screws (15), the bottom end of the screws (15) penetrates the inside of the washer (16) and is threadedly connected to the inner interface of the cavity shell (1).

6. The high-sealing pressure sealing device for the observation window of the mass spectrometer vacuum chamber according to claim 4, characterized in that: The bottom of the positioning card seat (13) is fixedly connected to a limiting frame (17), and multiple pressure plates (18) are fixedly connected to the inner side of the limiting frame (17).

7. The high-sealing pressure sealing device for the observation window of the mass spectrometer vacuum chamber according to claim 1, characterized in that: The bottom groove frame (19) has a groove on its inner side for limiting the bottom end of the limiting frame (17).

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