Aluminum nitride high temperature heating chamber

CN224775055UActive Publication Date: 2026-09-18QINGDAO JINGCHENG HUAQI MICROELECTRONICS EQUIP CO LTD
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Patent Information

Application Number
CN202521591880.4
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2025-07-29
Publication Date
2026-09-18
Estimated Expiration
2035-07-29

AI Technical Summary

Technical Problem

现有技术中,大多的氮化铝加热腔在使用时难以进行模块化安装,因此难以根据不同原料的加热需求对氮化铝加热腔的容积进行调节,且一些氮化铝加热腔在安装之后如果发生松动,也难以及时监测及反馈,影响使用时的安全性,为此,我们提出一种氮化铝高温加热腔

Benefits of technology

1、通过设置拼装组件,在需要组装多个加热腔进行使用时,将副加热腔下端的插块插入插槽中,然后转动旋钮,带动阻尼转轴和伞齿轮一转动,从而带动伞齿轮二和丝杆转动,进而带动滑块上下运动,从而带动连杆展开,让连杆带动限位块向外运动插入限位槽中,多组限位块和限位槽可以让副加热腔与主加热腔牢固连接在一起,并且副加热腔上还可以叠加安装多个副加热腔,便于灵活地对加热腔的容积进行扩展;

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Abstract

This utility model discloses a high-temperature heating chamber for aluminum nitride, belonging to the field of aluminum nitride heating chambers. It includes a main heating chamber and a secondary heating chamber. The lower end of the secondary heating chamber is connected to an assembly component. The main heating chamber and the secondary heating chamber are externally connected to an alarm component. The key technical point is that by setting the assembly component, when multiple heating chambers need to be assembled for use, the insert block at the lower end of the secondary heating chamber is inserted into the slot. Then, the knob is turned, which drives the damping shaft and bevel gear one to rotate, thereby driving bevel gear two and the lead screw to rotate, which in turn drives the slider to move up and down, thereby driving the connecting rod to unfold. The connecting rod drives the limiting block to move outward and insert into the limiting groove. Multiple sets of limiting blocks and limiting grooves can firmly connect the secondary heating chamber and the main heating chamber together. Furthermore, multiple secondary heating chambers can be stacked on the secondary heating chamber, which facilitates flexible expansion of the heating chamber volume.
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Description

Technical Field

[0001] This utility model relates to the field of aluminum nitride heating chambers, and particularly to a high-temperature aluminum nitride heating chamber. Background Technology

[0002] Aluminum nitride heating chambers are high-performance heating devices made of aluminum nitride ceramic materials, mainly used in industrial and scientific research scenarios with high temperature, high thermal conductivity, or high insulation requirements. In the existing technology, most aluminum nitride heating chambers are difficult to install in a modular manner during use. Therefore, it is difficult to adjust the volume of the aluminum nitride heating chamber according to the heating requirements of different raw materials. Furthermore, if some aluminum nitride heating chambers become loose after installation, it is difficult to monitor and provide feedback in a timely manner, which affects the safety during use. To address this, we propose an aluminum nitride high-temperature heating chamber. Utility Model Content

[0003] To overcome the shortcomings of the existing technology, the purpose of this utility model is to provide an aluminum nitride high-temperature heating cavity. By setting up an assembly component, when multiple heating cavities need to be assembled for use, the insert block at the lower end of the auxiliary heating cavity is inserted into the slot. Then, the knob is turned to drive the damping shaft and bevel gear one to rotate, thereby driving bevel gear two and the lead screw to rotate, which in turn drives the slider to move up and down, thereby driving the connecting rod to unfold. The connecting rod drives the limiting block to move outward and insert into the limiting groove. Multiple sets of limiting blocks and limiting grooves can firmly connect the auxiliary heating cavity with the main heating cavity. Furthermore, multiple auxiliary heating cavities can be stacked on the auxiliary heating cavity, which facilitates flexible expansion of the heating cavity volume.

[0004] The above-mentioned technical objective of this utility model is achieved through the following technical solution: A high-temperature heating chamber for aluminum nitride includes a main heating chamber and a secondary heating chamber. The lower end of the secondary heating chamber is connected to an assembly assembly, and an alarm assembly is connected to the outside of the main heating chamber and the secondary heating chamber. The assembly includes slots located at the upper ends of the main heating chamber and the secondary heating chamber, and the slots are symmetrically distributed. Multiple inserts are fixedly connected to the lower end of the secondary heating chamber, and these inserts are movably inserted into the slots. Multiple knobs are rotatably connected to the outer end of the secondary heating chamber, and a damping shaft is fixedly connected to the outer end of each knob. The damping shaft extends into the interior of the secondary heating chamber and is rotatably connected to it. A first bevel gear is fixedly connected to the outer end of the damping shaft, and a second bevel gear is meshed with the lower end of the first bevel gear. A lead screw is rotatably connected to the interior of the secondary heating chamber, extending into the interior of each insert and rotatably connected to it. A slider is movably connected to the outside of the lead screw, and the slider is adapted to the lead screw. A connecting rod is rotatably connected to the outside of the slider, and a limit block is rotatably connected to the end of the connecting rod. A limit groove is formed on the inner wall of the slot. By setting up assembly components, when multiple heating chambers need to be assembled for use, the insert block at the lower end of the auxiliary heating chamber is inserted into the slot. Then, the knob is turned, which drives the damping shaft and bevel gear one to rotate, thereby driving bevel gear two and the lead screw to rotate, which in turn drives the slider to move up and down, thereby driving the connecting rod to unfold. The connecting rod drives the limiting block to move outward and insert into the limiting groove. Multiple sets of limiting blocks and limiting grooves can firmly connect the auxiliary heating chamber with the main heating chamber. Furthermore, multiple auxiliary heating chambers can be stacked on the auxiliary heating chamber, which facilitates flexible expansion of the heating chamber volume.

[0005] The alarm assembly includes a pressure sensor, which is fixedly connected to the lower end of the plug and movably disposed inside the slot. The front ends of the main heating chamber and the auxiliary heating chamber are both fixedly connected to a PLC controller, and the front ends of the PLC controller are both fixedly connected to an audible and visual alarm.

[0006] By setting up an alarm component, after the main heating chamber and the auxiliary heating chamber are installed, the pressure sensor and the bottom of the slot are tightly abutted. The pressure values ​​of multiple pressure sensors should be consistent or have minimal error. The pressure signal is transmitted to the PLC controller. When multiple heating chambers are subjected to external force and become loose, the pressure values ​​of multiple pressure sensors will have a large error. When the error reaches the maximum preset value, the PLC controller controls the audible and visual alarm to issue an audible and visual alarm, which can help remind staff to perform maintenance in a timely manner.

[0007] Furthermore, a limiting plate is fixedly connected to the lower end of the lead screw, a guide rod is fixedly connected inside the insert block, a guide block is slidably connected to the outside of the guide rod, and the guide block is fixedly connected to the limiting block.

[0008] Furthermore, the limiting block extends to the outside of the insert block and is slidably connected to the insert block, and the limiting block is movably inserted into the inside of the limiting groove.

[0009] Furthermore, the pressure sensor is electrically connected to the PLC controller, and the PLC controller is electrically connected to the audible and visual alarm.

[0010] Furthermore, both the main heating chamber and the auxiliary heating chamber include an aluminum nitride ceramic inner liner layer, a carbon fiber braided layer is fixedly connected to the outside of the aluminum nitride ceramic inner liner layer, a protective layer is fixedly connected to the outside of the carbon fiber braided layer, and the interior of the protective layer is filled with aerogel.

[0011] Furthermore, an electric heating wire is fixedly connected inside the aluminum nitride ceramic inner liner, and a temperature sensor is fixedly embedded in the inner wall of the aluminum nitride ceramic inner liner.

[0012] Furthermore, the temperature sensor is electrically connected to the PLC controller, and the electric heating wire is electrically connected to the PLC controller.

[0013] In summary, this utility model has the following beneficial effects: 1. By setting up assembly components, when multiple heating chambers need to be assembled for use, insert the plug at the lower end of the auxiliary heating chamber into the slot, then turn the knob to drive the damping shaft and bevel gear one to rotate, thereby driving bevel gear two and the lead screw to rotate, which in turn drives the slider to move up and down, thereby driving the connecting rod to unfold, allowing the connecting rod to drive the limiting block to move outward and insert into the limiting groove. Multiple sets of limiting blocks and limiting grooves can make the auxiliary heating chamber and the main heating chamber firmly connected together, and multiple auxiliary heating chambers can also be stacked on the auxiliary heating chamber, which is convenient for flexibly expanding the volume of the heating chamber; 2. By setting up an alarm component, after the main heating chamber and the auxiliary heating chamber are installed, the pressure sensor and the bottom of the slot are tightly abutted. The pressure values ​​of multiple pressure sensors should be consistent or have minimal error. The pressure signal is transmitted to the PLC controller. When multiple heating chambers are subjected to external force and become loose, the pressure values ​​of multiple pressure sensors will have a large error. When the error reaches the maximum preset value, the PLC controller controls the sound and light alarm to issue a sound and light alarm, which can help remind staff to perform maintenance in a timely manner. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of the overall structure in this embodiment; Figure 2 This is a cross-sectional structural diagram of this embodiment; Figure 3 This is in this embodiment Figure 2 Schematic diagram of the structure at point A; Figure 4 This is a structural schematic diagram of the left-side cross-section of bevel gear one and bevel gear two in this embodiment; Figure 5 This is in this embodiment Figure 2 A schematic diagram of the structure at point B.

[0015] In the diagram, 1. Main heating chamber; 2. Secondary heating chamber; 201. Aluminum nitride ceramic inner liner; 202. Carbon fiber braided layer; 203. Protective layer; 204. Electric heating wire; 205. Temperature sensor; 3. Assembly component; 301. Slot; 302. Insert block; 303. Knob; 304. Damping shaft; 305. Bevel gear one; 306. Bevel gear two; 307. Lead screw; 308. Slider; 309. Connecting rod; 310. Limiting block; 311. Limiting groove; 312. Limiting plate; 313. Guide rod; 314. Guide block; 4. Alarm component; 401. Pressure sensor; 402. PLC controller; 403. Audible and visual alarm. Detailed Implementation

[0016] The present invention will be further described in detail below with reference to the accompanying drawings.

[0017] Identical parts are indicated by the same reference numerals. It should be noted that the terms "front," "rear," "left," "right," "up," and "down" used in the following description refer to directions in the accompanying drawings, while the terms "bottom surface," "top surface," "inner," and "outer" refer to directions toward or away from the geometric center of a specific part, respectively.

[0018] Reference Figure 1 As shown, a high-temperature heating chamber for aluminum nitride in a preferred embodiment of the present invention includes a main heating chamber 1 and a secondary heating chamber 2. The lower end of the secondary heating chamber 2 is connected to an assembly component 3, and an alarm component 4 is connected to the outside of the main heating chamber 1 and the secondary heating chamber 2. Reference Figures 1-4 As shown, the assembly component 3 includes slots 301, which are located at the upper ends of the main heating chamber 1 and the auxiliary heating chamber 2. The slots 301 are symmetrically distributed. Multiple inserts 302 are fixedly connected to the lower end of the auxiliary heating chamber 2, and these inserts 302 are movably inserted into the slots 301. Multiple knobs 303 are rotatably connected to the outer end of the auxiliary heating chamber 2. A damping shaft 304 is fixedly connected to the outer end of each knob 303. The damping shaft 304 extends into the interior of the auxiliary heating chamber 2 and is rotatably connected to it. A bevel gear 305 is fixedly connected, and a bevel gear 306 is meshed at the lower end of the bevel gear 305. A lead screw 307 is rotatably connected inside the auxiliary heating chamber 2. The lead screw 307 extends into the interior of the insert block 302 and is rotatably connected to the insert block 302. A slider 308 is movably connected to the outside of the lead screw 307. The slider 308 is adapted to the lead screw 307. A connecting rod 309 is rotatably connected to the outside of the slider 308. A limit block 310 is rotatably connected to the end of the connecting rod 309. A limit groove 311 is formed on the inner wall of the slot 301. By setting up the assembly component 3, when multiple heating chambers need to be assembled for use, the insert block 302 at the lower end of the auxiliary heating chamber 2 is inserted into the slot 301. Then, the knob 303 is turned to drive the damping shaft 304 and the first bevel gear 305 to rotate, thereby driving the second bevel gear 306 and the lead screw 307 to rotate, which in turn drives the slider 308 to move up and down, thereby driving the connecting rod 309 to unfold, allowing the connecting rod 309 to drive the limiting block 310 to move outward and insert into the limiting groove 311. Multiple sets of limiting blocks 310 and limiting grooves 311 can firmly connect the auxiliary heating chamber 2 with the main heating chamber 1. Furthermore, multiple auxiliary heating chambers 2 can be stacked on the auxiliary heating chamber 2, which facilitates flexible expansion of the heating chamber volume.

[0019] Reference Figures 1-3As shown, the alarm component 4 includes a pressure sensor 401, which is fixedly connected to the lower end of the plug 302. The pressure sensor 401 is movably disposed inside the slot 301. The front ends of the main heating chamber 1 and the auxiliary heating chamber 2 are both fixedly connected to a PLC controller 402, and the front ends of the PLC controller 402 are both fixedly connected to an audible and visual alarm 403.

[0020] By setting the alarm component 4, after the main heating chamber 1 and the auxiliary heating chamber 2 are installed, the pressure sensor 401 and the bottom of the slot 301 are tightly abutted. The pressure values ​​of multiple pressure sensors 401 should be consistent or have minimal error. The pressure signal is transmitted to the PLC controller 402. When multiple heating chambers are subjected to external force collision and become loose, the pressure values ​​of multiple pressure sensors 401 will have a large error. When the error reaches the maximum preset value, the PLC controller 402 controls the audible and visual alarm 403 to issue an audible and visual alarm, which can help remind staff to perform timely maintenance.

[0021] Reference Figures 1-4 As shown, the lower end of the lead screw 307 is fixedly connected to the limiting plate 312, the inside of the insert block 302 is fixedly connected to the guide rod 313, the outside of the guide rod 313 is slidably connected to the guide block 314, and the guide block 314 is fixedly connected to the limiting block 310.

[0022] By setting guide rod 313 and guide block 314, the limiting block 310 can be guided, so that the limiting block 310 can only move back and forth along guide rod 313.

[0023] Reference Figures 1-4 As shown, the limiting block 310 extends to the outside of the insert block 302 and is slidably connected to the insert block 302. The limiting block 310 is movably inserted into the inside of the limiting groove 311.

[0024] Reference Figures 1-4 As shown, the pressure sensor 401 is electrically connected to the PLC controller 402, and the PLC controller 402 is electrically connected to the audible and visual alarm 403.

[0025] Reference Figure 1 , Figure 2 and Figure 5 As shown, both the main heating chamber 1 and the auxiliary heating chamber 2 include an aluminum nitride ceramic inner liner 201. A carbon fiber braided layer 202 is fixedly connected to the outside of the aluminum nitride ceramic inner liner 201. A protective layer 203 is fixedly connected to the outside of the carbon fiber braided layer 202. The interior of the protective layer 203 is filled with aerogel.

[0026] The aluminum nitride ceramic inner liner 201 has a high thermal conductivity, ensuring rapid and uniform heat diffusion. The negative thermal expansion characteristics of carbon fiber and aluminum nitride matrix form a self-tightening effect, which counteracts the expansion tendency of the inner liner through interfacial compressive stress when heated. Aerogel inhibits gas convection heat transfer and reduces infrared radiation transmittance.

[0027] Reference Figure 1 , Figure 2 and Figure 5 As shown, an electric heating wire 204 is fixedly connected inside the aluminum nitride ceramic inner liner layer 201, and a temperature sensor 205 is fixedly embedded in the inner wall of the aluminum nitride ceramic inner liner layer 201.

[0028] Reference Figure 1 , Figure 2 and Figure 5 As shown, the temperature sensor 205 is electrically connected to the PLC controller 402, and the electric heating wire 204 is electrically connected to the PLC controller 402.

[0029] Temperature sensor 205 monitors the temperature of the inner wall of aluminum nitride ceramic inner liner 201 and transmits the temperature signal to PLC controller 402, which then controls the heating temperature of electric heating wire 204.

[0030] Specific implementation process: When multiple heating chambers need to be assembled for use, insert the plug 302 at the lower end of the auxiliary heating chamber 2 into the slot 301, then turn the knob 303 to drive the damping shaft 304 and bevel gear 1 305 to rotate, thereby driving bevel gear 2 306 and lead screw 307 to rotate, which in turn drives the slider 308 to move up and down, thereby driving the connecting rod 309 to unfold, allowing the connecting rod 309 to drive the limiting block 310 to move outward and insert into the limiting groove 311. Multiple sets of limiting blocks 310 and limiting grooves 311 can make the auxiliary heating chamber 2 firmly connected to the main heating chamber 1, and multiple auxiliary heating chambers 2 can be stacked on the auxiliary heating chamber 2, which is convenient for flexibly expanding the volume of the heating chamber; During disassembly, simply rotate the knob 303 in the opposite direction to bring the connecting rod 309 together, allowing the connecting rod 309 to move the limiting block 310 inward, so that the limiting block 310 disengages from the limiting groove 311 and retracts into the insert block 302. After the main heating chamber 1 and the auxiliary heating chamber 2 are installed, the pressure sensor 401 and the bottom of the slot 301 are tightly abutted. The pressure values ​​of multiple pressure sensors 401 should be consistent or have minimal error. The pressure signal is transmitted to the PLC controller 402. When multiple heating chambers are subjected to external force and become loose, the pressure values ​​of multiple pressure sensors 401 will have a large error. When the error reaches the maximum preset value, the PLC controller 402 controls the audible and visual alarm 403 to issue an audible and visual alarm, which can help remind staff to perform timely maintenance. Temperature sensor 205 monitors the temperature of the inner wall of aluminum nitride ceramic inner liner 201 and transmits the temperature signal to PLC controller 402, which then controls the heating temperature of electric heating wire 204. The aluminum nitride ceramic inner liner 201 has a high thermal conductivity, ensuring rapid and uniform heat diffusion. The negative thermal expansion characteristics of carbon fiber and aluminum nitride matrix form a self-tightening effect, which counteracts the expansion tendency of the inner liner through interfacial compressive stress when heated. Aerogel inhibits gas convection heat transfer and reduces infrared radiation transmittance.

[0031] The foregoing has shown and described the basic principles, main features, and advantages of this utility model. Those skilled in the art should understand that this utility model is not limited to the above embodiments. The embodiments and descriptions in the specification are merely illustrative of the principles of this utility model. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claims. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. An aluminum nitride high temperature heating chamber, characterized by: It includes a main heating chamber (1) and a secondary heating chamber (2). The lower end of the secondary heating chamber (2) is connected to an assembly assembly (3). An alarm assembly (4) is connected to the outside of the main heating chamber (1) and the secondary heating chamber (2). The assembly component (3) includes slots (301), which are located at the upper ends of the main heating chamber (1) and the auxiliary heating chamber (2). The slots (301) are symmetrically distributed. Multiple inserts (302) are fixedly connected to the lower end of the auxiliary heating chamber (2). The multiple inserts (302) are movably inserted into the interior of the slots (301). Multiple knobs (303) are rotatably connected to the outer end of the auxiliary heating chamber (2). A damping shaft (304) is fixedly connected to the outer end of the knobs (303). The damping shaft (304) extends into the interior of the auxiliary heating chamber (2) and is rotatably connected to the auxiliary heating chamber (2). The outer end of the damping shaft (304) is... A bevel gear 1 (305) is fixedly connected, and a bevel gear 2 (306) is meshed with the lower end of the bevel gear 1 (305). A lead screw (307) is rotatably connected inside the auxiliary heating chamber (2). The lead screw (307) extends into the interior of the insert block (302) and is rotatably connected to the insert block (302). A slider (308) is movably connected to the outside of the lead screw (307). The slider (308) is adapted to the lead screw (307). A connecting rod (309) is rotatably connected to the outside of the slider (308). A limit block (310) is rotatably connected to the end of the connecting rod (309). A limit groove (311) is opened on the inner wall of the slot (301). The alarm component (4) includes a pressure sensor (401), which is fixedly connected to the lower end of the plug (302). The pressure sensor (401) is movably disposed inside the slot (301). The front ends of the main heating chamber (1) and the auxiliary heating chamber (2) are both fixedly connected to a PLC controller (402), and the front ends of the PLC controller (402) are both fixedly connected to an audible and visual alarm (403).

2. The aluminum nitride high temperature heating chamber of claim 1, wherein: The lower end of the lead screw (307) is fixedly connected to a limiting plate (312), the inside of the insert block (302) is fixedly connected to a guide rod (313), the outside of the guide rod (313) is slidably connected to a guide block (314), and the guide block (314) is fixedly connected to the limiting block (310).

3. The aluminum nitride high temperature heating chamber of claim 1, wherein: The limiting block (310) extends to the outside of the insert (302) and is slidably connected to the insert (302), and the limiting block (310) is movably inserted into the inside of the limiting groove (311).

4. The aluminum nitride high temperature heating chamber of claim 1, wherein: The pressure sensor (401) is electrically connected to the PLC controller (402), and the PLC controller (402) is electrically connected to the audible and visual alarm (403).

5. The aluminum nitride high temperature heating chamber of claim 1, wherein: The main heating chamber (1) and the auxiliary heating chamber (2) both include an aluminum nitride ceramic inner liner (201). A carbon fiber braided layer (202) is fixedly connected to the outside of the aluminum nitride ceramic inner liner (201). A protective layer (203) is fixedly connected to the outside of the carbon fiber braided layer (202). The interior of the protective layer (203) is filled with aerogel.

6. The aluminum nitride high temperature heating chamber of claim 5, wherein: An electric heating wire (204) is fixedly connected inside the aluminum nitride ceramic inner liner (201), and a temperature sensor (205) is fixedly embedded in the inner wall of the aluminum nitride ceramic inner liner (201).

7. The aluminum nitride high temperature heating chamber of claim 6, wherein: The temperature sensor (205) is electrically connected to the PLC controller (402), and the electric heating wire (204) is electrically connected to the PLC controller (402).