A heating assembly and heating system for clean room heating

Abstract

This application discloses a heating component and system for cleanroom heating, comprising: a heating jacket, which wraps around the outside of the equipment to be heated; an electric heating element disposed inside the heating jacket for generating heat when energized; a temperature controller electrically connected to the electric heating element for independent temperature control of the electric heating element; and a thermal insulation layer covering at least the outside of the electric heating element, the thermal insulation layer comprising a PTFE-impregnated fiberglass cloth layer for insulation, flame retardancy, and thermal insulation. By using the heating jacket, efficient, safe, and precise local heating is provided for critical equipment in the cleanroom. During use, the heating jacket directly wraps around the equipment, resulting in a short heat transfer path, high thermal efficiency, and effectively preventing harmful gases and particulate matter from crystallizing and adhering due to low temperatures, significantly extending equipment maintenance cycles. Simultaneously, the independent temperature controller ensures the accuracy and stability of temperature control, avoiding energy waste associated with overall environmental heating.

Description

Technical Field

[0001] This application belongs to the field of cleanroom heating, specifically relating to a heating component and heating system for cleanroom heating. Background Technology

[0002] In cleanroom environments of high-end manufacturing fields such as semiconductors, biopharmaceuticals, and precision electronics, various harmful gases and fine particulate matter are often generated during production. These substances are prone to condensation or crystallization at low temperatures, adhering to the surfaces of critical equipment, such as digital pressure gauges, causing blockages, performance degradation, or even failure. Frequent blockages not only significantly increase the frequency of equipment maintenance and cleaning but also seriously affect production continuity and product yield, resulting in high operating costs and downtime losses.

[0003] Currently, common solutions on the market often employ overall environmental temperature control or localized preheating, but these generally suffer from low temperature control accuracy, slow response speed, high energy consumption, and insufficient safety. For example, some existing heating devices use simple resistance wire heating combined with ordinary insulation material wrapping, which often results in imprecise temperature control, easily leading to localized overheating or uneven heating, which can actually accelerate the deposition of harmful substances. At the same time, ordinary insulation materials have poor insulation and flame retardant properties, posing certain fire safety hazards and failing to meet the stringent requirements of cleanrooms for high equipment reliability and environmental cleanliness.

[0004] In addition, most existing heating components adopt a centralized control method, with one controller managing multiple heating units at the same time. Once a heating point malfunctions, it is difficult to identify and locate it in a timely manner, which increases the complexity and uncertainty of system maintenance.

[0005] Based on the aforementioned technical pain points, this utility model proposes a heating component design specifically for cleanroom environments. Through structural innovation and material optimization, it achieves efficient, safe, and reliable heating of equipment, thereby significantly extending its service life, reducing maintenance frequency, and ensuring the continuous and stable operation of the cleanroom process environment. Utility Model Content

[0006] This application provides a heating component and heating system for cleanroom heating, which solves at least one of the above-mentioned technical problems.

[0007] The technical solution adopted in this application is as follows:

[0008] A heating assembly for cleanroom heating includes:

[0009] A heating jacket, which wraps around the outside of the equipment to be heated;

[0010] An electric heating element is disposed inside the heating jacket and is used to generate heat when energized;

[0011] A thermostat, electrically connected to the heating element, is used for independent temperature control of the heating element;

[0012] A thermal insulation layer is provided, at least covering the outside of the heating element. The thermal insulation layer includes a PTFE-impregnated glass fiber cloth layer, which is used for insulation, flame retardancy and thermal insulation.

[0013] Preferably, the heating jacket has an opening, and a connector is provided at the opening so that the heating jacket can be detachably wrapped and fixed to the equipment to be heated.

[0014] Preferably, the heating jacket includes a plurality of connecting parts connected sequentially along the axial direction, each connecting part is provided with the opening, each opening is provided with the connector, and an avoidance gap is provided between adjacent connecting parts.

[0015] Preferably, the heating element is one of resistance wire, silicone heating sheet, metal foil heating film or carbon fiber heating wire.

[0016] Preferably, the heating element includes resistance wires, which are evenly arranged along the inner wall of the thermal insulation layer.

[0017] Preferably, the thermal insulation layer is a multi-layer composite structure, comprising, from the inside out: an inner lining layer, the heating element, a high-temperature resistant insulation layer, and an outer PTFE-impregnated glass fiber cloth protective layer.

[0018] Preferably, the high-temperature resistant insulation layer is one of glass fiber cotton, ceramic fiber felt or aerogel felt.

[0019] Preferably, the temperature controller includes a temperature sensor and a control unit. The temperature sensor is configured to detect the temperature inside the heating jacket, and the control unit is configured to receive the signal from the temperature sensor and compare it with a set temperature value, thereby adjusting the power output to the heating element through a PID algorithm.

[0020] Preferably, it also includes an alarm module, which is connected to the temperature controller. When the detected temperature exceeds a preset safety threshold or the heating element experiences an open circuit or short circuit, the alarm module issues an audible and visual alarm.

[0021] A cleanroom equipment heating system includes at least one heating component as described in any of the above claims, wherein the heating component is installed in conjunction with a digital pressure gauge for heating and heat preservation of the digital pressure gauge.

[0022] Due to the adoption of the above technical solution, the beneficial effects achieved by this application are as follows:

[0023] This solution provides an efficient, safe, and precise localized heating solution for critical cleanroom equipment (such as digital pressure gauges) by incorporating a heating jacket. During use, the heating jacket directly wraps around the equipment, resulting in a short heat transfer path, high thermal efficiency, and effectively preventing the crystallization and adhesion of harmful gases and particulate matter due to low temperatures, significantly extending equipment maintenance cycles. Simultaneously, an independent temperature controller ensures accurate and stable temperature control, avoiding energy waste associated with heating the entire environment. Furthermore, the heating jacket in this application uses PTFE-impregnated fiberglass cloth as an insulation layer, which combines aging resistance, non-flammability (flame retardancy), and electrical insulation. This is beneficial for meeting the stringent safety and reliability requirements of cleanroom environments, eliminating the risk of fire or contamination caused by heating element failure, and ensuring the continuity of cleanroom production and product yield. Attached Figure Description

[0024] The accompanying drawings, which are included to provide a further understanding of this application and form part of this application, illustrate exemplary embodiments and are used to explain this application, but do not constitute an undue limitation of this application. In the drawings:

[0025] Figure 1 This is a schematic diagram of the connection of the heating component in one embodiment of the present invention;

[0026] Figure 2 This is a schematic diagram of the heating jacket in one embodiment of the present invention;

[0027] Figure 3 This is a schematic diagram of the heating wire arrangement structure in one embodiment of the present invention.

[0028] Explanation of reference numerals in the attached figures:

[0029] 1-Digital pressure gauge, 2-Heating jacket, 3-Heating wire, 4-Wiring point, 5-Connector. Detailed Implementation

[0030] To more clearly illustrate the overall concept of this application, a detailed explanation is provided below with reference to the accompanying drawings.

[0031] Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application may also be implemented in other ways different from those described herein. Therefore, the scope of protection of this application is not limited to the specific embodiments disclosed below. It should be noted that, unless otherwise specified, the embodiments of this application and the features thereof can be combined with each other.

[0032] Furthermore, it should be understood in the description of this application that the terms "top", "bottom", "inner", "outer", "axial", "radial", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0033] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "linking," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection, an electrical connection, or a communication connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0034] In this application, unless otherwise expressly specified and limited, the "above" or "below" of the second feature can mean that the first and second features are in direct contact, or that the first and second features are in indirect contact through an intermediate medium. In the description of this specification, references to terms such as "an embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described can be combined in any suitable manner in one or more embodiments or examples.

[0035] This application provides a heating component for cleanroom heating, such as... Figures 1 to 3 As shown, it includes:

[0036] Heating jacket 2, which wraps around the outside of the equipment to be heated;

[0037] An electric heating element is disposed inside the heating jacket 2 and is used to generate heat when energized;

[0038] A thermostat, electrically connected to the heating element, is used for independent temperature control of the heating element;

[0039] A thermal insulation layer is provided, at least covering the outside of the heating element. The thermal insulation layer includes a PTFE-impregnated glass fiber cloth layer, which is used for insulation, flame retardancy and thermal insulation.

[0040] This solution provides an efficient, safe, and precise local heating solution for critical cleanroom equipment (such as the digital pressure gauge 1) by incorporating a heating jacket 2. During use, the heating jacket 2 directly wraps around the equipment, resulting in a short heat transfer path, high thermal efficiency, and effectively preventing the crystallization and adhesion of harmful gases and particulate matter due to low temperatures, significantly extending equipment maintenance cycles. Simultaneously, an independent temperature controller ensures accurate and stable temperature control, avoiding energy waste associated with heating the entire environment. Furthermore, the heating jacket 2 in this application uses PTFE-impregnated fiberglass cloth as an insulation layer, which combines aging resistance, non-flammability (flame retardancy), and electrical insulation. This is beneficial for meeting the stringent safety and reliability requirements of cleanroom environments, eliminating the risk of fire or contamination caused by heating element failure, and ensuring the continuity of cleanroom production and product yield.

[0041] In one embodiment, the heating jacket 2 has an opening, and a connector 5 is provided at the opening, so that the heating jacket 2 can be detachably wrapped and fixed to the device to be heated.

[0042] The inclusion of an opening facilitates the installation and removal of the heating component, eliminating the need to move or disassemble the equipment itself and simplifying routine maintenance, replacement, and repair procedures. The connector 5 ensures flexible and reliable fixing, allowing the heating jacket 2 to fit snugly against the equipment surface, reducing heat loss and improving heating uniformity and efficiency.

[0043] In one embodiment, the heating jacket 2 includes a plurality of connecting portions connected sequentially along the axial direction, each connecting portion having an opening, each opening having a connector, and an clearance gap between adjacent connecting portions.

[0044] It should be noted that when the shape of the device to be heated is irregular, the multiple connecting parts in this solution can achieve partitioned wrapping. The multiple connecting parts are interconnected to ensure that the heating jacket 2 is a whole, and can also wrap different parts of the device to be heated separately through the clearance gaps. This makes it easier to achieve a better wrapping effect on the irregularly shaped device to be heated and reduces the wrapping difficulty.

[0045] like Figure 2 The heating jacket 2, after removing the connector 5, can be divided into three connecting parts from top to bottom according to the diagram, with openings and connectors at both ends. Instead of being sleeved, it wraps around the device to be heated through an enclosing and adhesive method. Alternatively, the connector 5 can be retained, and after the various parts are connected, the entire heating jacket 2 can be further adhesively bonded using the connector 5.

[0046] It is understandable that the connector can be set as connector 5 in the figure according to the requirements, or it can be specifically set according to the opening shape of the connector when it is set in each connector.

[0047] Preferably, the connector is one or more of Velcro, drawstring, buckle, or zipper.

[0048] By employing various connector methods (such as Velcro, cable ties, etc.), the most suitable fixing solution can be selected based on the shape, size, and installation space of different equipment. Furthermore, these types of connectors all possess advantages such as simple structure, low cost, and ease of operation, and they themselves are unlikely to generate particulate contaminants, thus meeting the cleanliness requirements of cleanrooms.

[0049] Preferably, the heating element is one of the following: resistance wire 3, silicone heating sheet, metal foil heating film, or carbon fiber heating wire.

[0050] The use of mature and reliable electric heating elements allows for the selection of the most suitable heating solution based on different heating power requirements, cost budgets, and space dimensions. This enhances the flexibility of the heating jacket 2, enabling its wide application in cleanroom equipment of various specifications and heating requirements, thus improving product applicability and facilitating market promotion.

[0051] Preferably, the heating element includes a resistance wire 3, which is uniformly arranged along the inner wall of the thermal insulation layer.

[0052] By setting the resistance wire 3 to be evenly distributed along the inner wall, it can be ensured that heat is evenly transferred to the entire surface of the equipment to be heated, effectively avoiding local overheating or insufficient heating, thus achieving a more stable and uniform heating effect, and further ensuring the reliability of anti-crystallization and anti-clogging.

[0053] In one embodiment, the thermal insulation layer is a multi-layer composite structure, comprising, from the inside out: an inner lining layer, the heating element, a high-temperature resistant insulation layer, and an outer PTFE-impregnated glass fiber cloth protective layer.

[0054] By employing a multi-layered composite structure, the functions of the heating jacket are precisely allocated. The inner lining protects the equipment surface and promotes heat conduction; the independent high-temperature resistant insulation layer significantly reduces heat loss to the outside, resulting in energy savings and increased efficiency; and the outer PTFE fabric provides safety protection. This ensures excellent thermal insulation performance while improving insulation and flame retardant properties, enhancing the reliability and safety of the heating components.

[0055] Preferably, the high-temperature resistant insulation layer is one of glass fiber cotton, ceramic fiber felt or aerogel felt.

[0056] By using materials with extremely low thermal conductivity and extremely high temperature resistance, heat is locked in to the maximum extent, significantly improving energy utilization efficiency and reducing operating costs. At the same time, it also has non-flammable and corrosion-resistant properties, which work synergistically with the PTFE outer layer to form a double safety barrier.

[0057] In one embodiment, the temperature controller includes a temperature sensor and a control unit. The temperature sensor is configured to detect the temperature inside the heating jacket 2, and the control unit is configured to receive the signal from the temperature sensor and compare it with a set temperature value, thereby adjusting the power output to the heating element through a PID algorithm.

[0058] By introducing a closed-loop control system that includes a temperature sensor and a PID algorithm, precise and dynamic adjustment of the heating temperature is achieved. The PID algorithm can quickly respond to temperature changes, eliminate static errors, and control temperature fluctuations within a very small range, ensuring ultra-high precision and stability of the heating process and meeting the temperature control requirements of precision manufacturing processes.

[0059] Preferably, it also includes an alarm module, which is connected to the temperature controller. When the detected temperature exceeds a preset safety threshold or the heating element experiences an open circuit or short circuit, the alarm module issues an audible and visual alarm.

[0060] By setting up an alarm module, proactive safety protection is provided, and the system status is monitored in real time. When abnormal situations such as overheating, short circuit, or open circuit occur, an alarm is immediately issued to remind staff to intervene in a timely manner, thereby effectively preventing possible equipment damage, production interruption, or even safety accidents, and greatly improving the reliability and safety of the entire system.

[0061] A cleanroom equipment heating system, such as Figure 1 As shown, the system includes at least one heating component as described in any of the above claims. This heating component is installed in conjunction with a digital pressure gauge 1 to heat and maintain the temperature of the digital pressure gauge 1. This solution applies the heating component as a subsystem to the cleanroom equipment heating system, addressing the problem of preventing clogging of specific equipment within the cleanroom.

[0062] For any parts not mentioned in this application, existing technologies may be used or referenced.

[0063] The various embodiments in this specification are described in a progressive manner. The same or similar parts between the various embodiments can be referred to each other. Each embodiment focuses on describing the differences from other embodiments.

[0064] The above description is merely an embodiment of this application and is not intended to limit the scope of this application. Various modifications and variations can be made to this application by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this application should be included within the scope of the claims of this application.

Claims

1. A heating assembly for clean room heating, characterized by, include: A heating jacket, which wraps around the outside of the equipment to be heated; An electric heating element is disposed inside the heating jacket and is used to generate heat when energized; A thermostat, electrically connected to the heating element, is used for independent temperature control of the heating element; A thermal insulation layer is provided, at least covering the outside of the heating element. The thermal insulation layer includes a PTFE-impregnated glass fiber cloth layer, which is used for insulation, flame retardancy and thermal insulation.

2. The heating assembly for clean room heating of claim 1, wherein, The heating jacket has an opening, and a connector is provided at the opening so that the heating jacket can be detachably wrapped and fixed to the equipment to be heated.

3. The heating assembly for clean room heating of claim 2, wherein, The heating jacket includes a plurality of connecting parts connected sequentially along the axial direction. Each connecting part is provided with an opening, each opening is provided with a connector, and an avoidance gap is provided between adjacent connecting parts.

4. The heating assembly for clean room heating of claim 1, wherein, The heating element is one of the following: resistance wire, silicone heating sheet, metal foil heating film, or carbon fiber heating wire.

5. The heating assembly for clean room heating of claim 4, wherein, The heating element includes resistance wires, which are evenly arranged along the inner wall of the thermal insulation layer.

6. The heating assembly for clean room heating of claim 1, wherein, The thermal insulation layer is a multi-layer composite structure, which includes, from the inside out: an inner lining layer, the electric heating element, a high-temperature resistant insulation layer, and an outer PTFE-impregnated glass fiber cloth protective layer.

7. The heating assembly for clean room heating of claim 6, wherein, The high-temperature resistant insulation layer is one of glass fiber cotton, ceramic fiber felt or aerogel felt.

8. The heating assembly for clean room heating of claim 1, wherein, The temperature controller includes a temperature sensor and a control unit. The temperature sensor is configured to detect the temperature inside the heating jacket, and the control unit is configured to receive the signal from the temperature sensor and compare it with a set temperature value, thereby adjusting the power output to the heating element through a PID algorithm.

9. The heating assembly for clean room heating of claim 1, wherein, It also includes an alarm module, which is connected to the temperature controller. When the detected temperature exceeds a preset safety threshold or the heating element experiences an open circuit or short circuit, the alarm module issues an audible and visual alarm.

10. A heating system, characterized by It includes at least one heating component as described in any one of claims 1 to 9, the heating component being installed in conjunction with a digital pressure gauge for heating and heat preservation of the digital pressure gauge.

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