Anti-blocking overflow detection assembly and wafer processing device

Abstract

The application discloses a kind of anti-blocking overflow detection assembly and wafer processing device, anti-blocking overflow detection assembly includes main valve, overflow pipe and at least one liquid discharge valve, main valve is opened with medium inlet and medium outlet, medium flow passage is opened inside main valve, the first end of medium flow passage is communicated with medium inlet, the second end of medium channel is communicated with at least one medium outlet, liquid discharge valve is arranged on medium outlet, one kind of medium is passed into medium flow passage every time and is discharged through one of medium outlet;The top of main valve is opened with overflow port being communicated with medium channel, one end of overflow pipe is arranged on overflow port, the other end of overflow pipe is connected with external liquid storage component, overflow detection sensor is arranged on overflow pipe, and overflow detection sensor is used to detect whether overflow pipe has liquid existence.The above-mentioned anti-blocking overflow detection assembly is set by overflow port and overflow pipe, avoids pressure overload or medium leakage due to blockage, and guarantees system safe operation.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing technology, and in particular to an anti-overflow detection component and a wafer processing device. Background Technology

[0002] In semiconductor manufacturing, wet processing is an important technology used to clean, etch, and remove impurities from the wafer surface. Compared to dry processes, wet processing offers advantages such as lower cost and easier operation.

[0003] Wet processing refers to the treatment of wafers using liquid chemical reagents. These processes typically involve steps such as cleaning, etching, and stripping to remove contaminants, form specific structures, or remove unwanted materials. During etching, various solvents are controlled by valves to enter the reaction chamber, spraying or immersing the wafer surface to remove impurities. When the channels within the valves become blocked, it can lead to leakage, damaging the equipment, and even altering the processing sequence of the wafer surface, further damaging the wafer. Therefore, the detection of blockages in the solvent channels within the valves is a problem that urgently needs to be solved. Utility Model Content

[0004] To address the related technical problems, the present invention aims to provide an anti-clogging overflow detection component to solve the aforementioned issues; in addition, the present invention also provides a wafer processing apparatus including the aforementioned anti-clogging overflow detection component.

[0005] To achieve the above objectives, the embodiments of this utility model adopt the following technical solutions:

[0006] An anti-clogging overflow detection assembly includes a main valve, an overflow pipe, and at least one drain valve, wherein:

[0007] The main valve has a medium inlet and at least one medium outlet. The medium inlet is connected to an external liquid supply component. The main valve has a medium flow channel inside. The first end of the medium flow channel is connected to the medium inlet. The external liquid supply component is configured to supply liquid medium into the medium flow channel. The second end of the medium channel is connected to at least one medium outlet. A drain valve is installed on the medium outlet. Each time a medium is introduced into the medium flow channel, it is discharged through one of the medium outlets.

[0008] The top of the main valve has an overflow port that is connected to the medium channel. One end of the overflow pipe is set on the overflow port, and the other end of the overflow pipe is connected to an external liquid storage component. An overflow detection sensor is set on the overflow pipe to detect whether there is liquid in the overflow pipe.

[0009] Optionally, the overflow pipe includes a first horizontal section, a U-shaped section, and a second horizontal section. Both the first horizontal section and the second horizontal section extend along a first horizontal direction. The first end of the first horizontal section is connected to the overflow port. The two ends of the U-shaped section are respectively connected to the second end of the first horizontal section and the first end of the second horizontal section. The second end of the second horizontal section is connected to an external liquid storage component. The U-shaped section is higher than the first horizontal section and the second horizontal section.

[0010] Optionally, the medium inlet is also connected to an external gas supply component, which is configured to deliver high-pressure gas into the medium flow channel to blow the agent in the medium flow channel, the drain valve, and the connecting pipeline out of the medium outlet.

[0011] Optionally, a control valve is also provided on the overflow pipe. The control valve is located upstream of the overflow detection sensor and is configured to control the overflow pipe to disconnect or connect.

[0012] When the external gas supply component supplies high-pressure gas to the medium inlet, the control valve disconnects the overflow pipe; when the external liquid supply component supplies liquid medium to the medium inlet, the control valve connects the overflow pipe.

[0013] Optionally, the control valve is located at the U-shaped section, and the overflow detection sensor is located at the second horizontal section.

[0014] Optionally, the main valve includes a first valve body and at least one second valve body, wherein:

[0015] Both the first valve body and the second valve body are provided with a medium flow channel. The medium flow channel of the first valve body is connected to the medium flow channel of the adjacent second valve body through a connecting component. The medium flow channel of the second valve body is connected to the medium flow channel of the adjacent second valve body.

[0016] Optionally, the connection assembly includes a first connector, a second connector, a third connector, a first connecting pipe, and a second connecting pipe. The first connector is disposed on the first valve body, the second connector is disposed on the first end of the second valve body, and the two ends of the first connecting pipe are detachably connected to the first connector and the second connector, respectively.

[0017] The third connector is located on the second end of the second valve body, and the third connector is configured to detachably connect two adjacent second valve bodies via the second connecting pipe.

[0018] Optionally, the anti-clogging overflow detection assembly also includes a first base and a second base with an adjustable spacing along a first horizontal direction, the first valve body being disposed on the first base and the second valve body being disposed on the second base;

[0019] Both the first base and the second base include a support plate and two mounting plates. The two mounting plates are symmetrically arranged at both ends of the support plate. Each end of the support plate has a first oblong hole along the width direction of the support plate. The mounting plates have a second oblong hole. The first oblong hole and the second oblong hole correspond to each other. Bolts pass through the first oblong hole and the second oblong hole for detachable connection.

[0020] Optionally, at least one drain valve is provided on one side or opposite sides of the main valve in the second direction, and the drain valve's outlet pipe is connected to the wafer processing chamber through a pipeline.

[0021] A wafer processing apparatus comprising the aforementioned anti-overflow detection component.

[0022] The beneficial effects of this utility model are as follows: Compared with the prior art, the anti-clogging overflow detection component provided by this utility model has the following beneficial effects:

[0023] 1. When the drain valve or connecting pipeline is blocked, the pressure in the medium flow channel increases, and the medium will be discharged from the overflow port through the overflow pipe. The overflow detection sensor can detect the presence of liquid in real time and trigger an alarm or shutdown in time to avoid pressure overload or medium leakage caused by blockage and ensure the safe operation of the system.

[0024] 2. Only one medium is introduced into the medium flow channel at a time and discharged from one medium outlet to avoid mixing and reaction of different media in the flow channel, thus ensuring the purity of the medium;

[0025] 3. The U-shaped section of the overflow pipe is higher than the horizontal section, which can form a liquid seal structure. During normal liquid supply, a small amount of liquid remains in the U-shaped section to prevent external air or impurities from flowing back into the medium flow channel of the main valve. When overflow occurs, the medium fills the U-shaped section and flows to the second horizontal section to ensure the accuracy of the overflow detection sensor signal. Attached Figure Description

[0026] To more clearly illustrate and understand the technical solutions in the embodiments of this utility model, the accompanying drawings used in the background technology and embodiment description of this utility model will be briefly introduced below. Obviously, the accompanying drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on the content of the embodiments of this utility model and these drawings without creative effort.

[0027] Figure 1 This is a schematic diagram of the structure of an anti-blockage overflow detection component provided in an embodiment of this utility model;

[0028] Figure 2 This is a schematic diagram of the overflow pipe in an anti-clogging overflow detection assembly provided by this utility model embodiment;

[0029] Figure 3This is a schematic diagram of the main valve in an anti-blockage overflow detection component provided in this embodiment of the utility model. Detailed Implementation

[0030] The present invention will be further described in detail below with reference to the accompanying drawings.

[0031] To facilitate understanding of this utility model, a more complete description of it will be given below with reference to the accompanying drawings. Preferred embodiments of this utility model are shown in the drawings. However, this utility model can be implemented in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided to provide a more thorough and complete understanding of the disclosure of this utility model. It should be noted that when a component is referred to as being "fixed to" another component, it can be directly on the other component or there may be an intermediate component. When a component is referred to as being "connected to" another component, it can be directly connected to the other component or there may be an intermediate component. The terms "vertical," "horizontal," "left," "right," and similar expressions used herein are for illustrative purposes only and do not represent the only possible implementations. Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this utility model belongs. The terminology used herein in the description of this utility model is for the purpose of describing particular embodiments only and is not intended to be limiting of the utility model. The term "and / or" as used herein includes any and all combinations of one or more of the associated listed items.

[0032] Please see Figures 1 to 3 As shown, this embodiment provides an anti-clogging overflow detection component, which includes a main valve 10, an overflow pipe 20, and at least one drain valve 30. The main valve 10 has a medium inlet 11 and at least one medium outlet 12. The medium inlet 11 is connected to an external liquid supply component. A medium flow channel is provided inside the main valve 10. The first end of the medium flow channel is connected to the medium inlet 11. The external liquid supply component is configured to supply liquid medium into the medium flow channel. The second end of the medium flow channel is connected to at least one medium outlet 12. The drain valve 30 is provided on the medium outlet 12. A medium is introduced into the medium flow channel at a time and discharged through one of the medium outlets 12. An overflow port 13 connected to the medium flow channel is provided at the top of the main valve 10. One end of the overflow pipe 20 is provided on the overflow port 13. The other end of the overflow pipe 20 is connected to an external liquid storage component. An overflow detection sensor 40 is provided on the overflow pipe 20. The overflow detection sensor 40 is used to detect whether there is liquid in the overflow pipe 20.

[0033] Specifically, the external liquid supply components include a raw liquid storage tank, a liquid supply pipeline, and a liquid supply pump. The two ends of the liquid supply pipeline are connected to the raw liquid storage tank and the medium inlet 11, respectively. The liquid supply pump is installed on the liquid supply pipeline to control the medium in the raw liquid storage tank to enter the medium inlet 11.

[0034] Specifically, the external liquid storage component can be a waste liquid collection tank or a raw liquid storage tank.

[0035] As can be seen, when the drain valve 30 or the connecting pipe is blocked, the pressure in the medium flow channel increases, and the medium will be discharged from the overflow port 13 through the overflow pipe 20. The overflow detection sensor 40 can detect the presence of liquid in real time and trigger an alarm or shutdown in time to avoid pressure overload or medium leakage caused by blockage and ensure the safe operation of the system. At the same time, only one medium is introduced into the medium flow channel at a time and discharged from one medium outlet 12 to avoid different media from mixing and reacting in the flow channel and to ensure the purity of the medium.

[0036] In one embodiment, the overflow pipe 20 includes a first horizontal section 21, a U-shaped section 22, and a second horizontal section 23. Both the first horizontal section 21 and the second horizontal section 23 extend along a first horizontal direction. The first end of the first horizontal section 21 is connected to the overflow port 13. The two ends of the U-shaped section 22 are respectively connected to the second end of the first horizontal section 21 and the first end of the second horizontal section 23. The second end of the second horizontal section 23 is connected to an external liquid storage component. The U-shaped section 22 is higher than the first horizontal section 21 and the second horizontal section 23.

[0037] As can be seen, the U-shaped section of the overflow pipe 20 is higher than the horizontal section, which can form a liquid seal structure. During normal liquid supply, a small amount of liquid remains in the U-shaped section to prevent external air or impurities from flowing back into the medium flow channel of the main valve 10. When overflow occurs, the medium fills the U-shaped section and flows to the second horizontal section 23 to ensure the signal accuracy of the overflow detection sensor 40.

[0038] In one implementation, the medium inlet 11 is also connected to an external gas supply component, which is configured to send high-pressure gas into the medium flow channel to blow out the agent in the medium flow channel, the drain valve 30 and the connecting pipeline from the medium outlet 12.

[0039] Specifically, the external gas supply components include a high-pressure gas source and a gas supply pipeline, with the two ends of the gas supply pipeline connected to the high-pressure gas source and the medium inlet 11, respectively.

[0040] It is evident that the high-pressure gas provided by the external gas supply component can purge the residual medium in the medium flow channel, drain valve 30, and connecting pipeline, preventing the pipeline from clogging after the residual medium dries up, thus reducing the risk of blockage from the source. Before changing to a different medium, high-pressure gas purging can remove the residue of the previous medium in the flow channel, avoiding cross-contamination and ensuring the purity and treatment effect of the subsequent medium.

[0041] In one implementation, a control valve 50 is also provided on the overflow pipe 20. The control valve 50 is located upstream of the overflow detection sensor 40 and is configured to control the overflow pipe 20 to be disconnected or connected. When the external gas supply component supplies high-pressure gas to the medium inlet 11, the control valve 50 disconnects the overflow pipe 20. When the external liquid supply component supplies liquid medium to the medium inlet 11, the control valve 50 connects the overflow pipe 20.

[0042] As can be seen, during high-pressure gas purging, the control valve 50 disconnects the overflow pipe 20 to prevent gas from leaking from the overflow port 13, ensuring that the airflow is concentrated on the medium flow channel and the drain valve 30, thereby enhancing the purging force and improving the cleaning effect; during liquid supply, the control valve 50 is connected, which does not affect the overflow detection function, and realizes efficient switching between the "cleaning-detection" modes.

[0043] In one implementation, the control valve 50 is located at the U-shaped section 22, and the overflow detection sensor 40 is located at the second horizontal section 23.

[0044] As can be seen, the control valve 50 is located in the U-shaped section, which can accurately control the opening and closing of the overflow pipe 20. Combined with the liquid seal effect of the U-shaped section, it further reduces interference. The overflow detection sensor 40 is located in the second horizontal section 23. At this time, the overflow medium has flowed stably through the U-shaped section, and the sensor detection signal is more reliable.

[0045] In one embodiment, the main valve 10 includes a first valve body 14 and at least one second valve body 15. Both the first valve body 14 and the second valve body 15 are provided with a medium flow channel. The medium flow channel of the first valve body 14 is connected to the medium flow channel of the adjacent second valve body 15 through a connecting assembly 16, and the medium flow channel of the second valve body 15 is connected to the medium flow channel of the adjacent second valve body 15.

[0046] As can be seen, the main valve 10 adopts a combination structure of a first valve body 14 and multiple second valve bodies 15. The number of second valve bodies 15 can be increased or decreased as needed through the connecting component 16, which can flexibly adapt to the needs of different numbers of media outlets 12 without redesigning the overall valve body, thus reducing customization costs.

[0047] In one embodiment, the connecting assembly 16 includes a first connector, a second connector, a third connector, a first connecting pipe, and a second connecting pipe. The first connector is disposed on the first valve body 14, the second connector is disposed on the first end of the second valve body 15, and the two ends of the first connecting pipe are detachably connected to the first connector and the second connector, respectively. The third connector is disposed on the second end of the second valve body 15 and is configured to detachably connect two adjacent second valve bodies 15 through the second connecting pipe.

[0048] As can be seen, the detachable design of the connecting component 16 facilitates the replacement or repair of individual valve bodies, shortening maintenance time.

[0049] In one embodiment, the anti-overflow detection assembly also includes a first base 60 and a second base 70 with adjustable spacing along a first horizontal direction. A first valve body 14 is disposed on the first base 60, and a second valve body 15 is disposed on the second base 70. Both the first base 60 and the second base 70 include a support plate and two mounting plates. The two mounting plates are symmetrically disposed at both ends of the support plate. Both ends of the support plate are provided with a first oblong hole along the width direction of the support plate. The mounting plates are provided with a second oblong hole. The first oblong hole and the second oblong hole correspond to each other. Bolts pass through the first oblong hole and are detachably connected to the second oblong hole.

[0050] As can be seen, the oblong holes of the first base 60 and the second base 70 allow the valve body to adjust the spacing in the horizontal direction, which can accommodate connecting pipes of different lengths or cope with dimensional deviations in the installation space, thus improving installation flexibility.

[0051] In one embodiment, at least one drain valve 30 is disposed on one side or opposite sides of the main valve 10 in the second direction, and the outlet pipe of the drain valve 30 is connected to the wafer processing cavity through a pipeline.

[0052] As can be seen, the drain valve 30 is located on one side or opposite sides of the main valve 10, which can optimize the pipeline routing according to the layout of the wafer processing chamber, reduce pipeline crossing and entanglement, and facilitate pipeline maintenance; each drain valve 30 corresponds to one processing chamber, realizing precise distribution of the medium and avoiding confusion when supplying liquid to multiple chambers.

[0053] A wafer processing apparatus comprising the aforementioned anti-overflow detection component.

[0054] The working principle of the aforementioned anti-overflow detection component is as follows:

[0055] The liquid supply component supplies liquid medium into the medium flow channel, which enters the drain valve 30 through a medium outlet 12. When the drain valve 30 is blocked, the pressure in the medium flow channel increases, and the liquid medium will be discharged from the overflow port 13 through the overflow pipe 20. At this time, the control valve 50 is in the open state, and the overflow detection sensor 40 can detect the presence of liquid in real time and trigger an alarm or shutdown in time. When the high-pressure gas supplied by the external gas supply component purges the residual liquid medium in the medium flow channel, drain valve 30 and connecting pipeline, the control valve 50 disconnects the overflow channel of the overflow pipe 20 to prevent the high-pressure gas from blowing the residual liquid medium to the overflow detection sensor 40 and causing false detection.

[0056] In the embodiments disclosed in this utility model, the terms "installation," "connection," "linking," and "fixing" should be interpreted broadly. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; "linking" can be a direct connection or an indirect connection through an intermediate medium. Those skilled in the art can understand the specific meaning of the above terms in the embodiments disclosed in this utility model according to the specific circumstances.

[0057] The above embodiments merely illustrate the basic principles and characteristics of this utility model. This utility model is not limited to the above examples. Various changes and modifications can be made to this utility model without departing from its spirit and scope, and all such changes and modifications fall within the scope of the claimed utility model. The scope of protection of this utility model is defined by the appended claims and their equivalents.

Claims

1. A choke prevention and overflow detection assembly, characterized by, The anti-clogging overflow detection assembly includes a main valve, an overflow pipe, and at least one drain valve, wherein: The main valve is provided with a medium inlet and at least one medium outlet. The medium inlet is connected to an external liquid supply component. The main valve is provided with a medium flow channel. The first end of the medium flow channel is connected to the medium inlet. The external liquid supply component is configured to supply liquid medium into the medium flow channel. The second end of the medium channel is connected to at least one of the medium outlets. The drain valve is provided on the medium outlet. Each time a medium is introduced into the medium flow channel, it is discharged through one of the medium outlets. The main valve has an overflow port at its top that is connected to the medium channel. One end of the overflow pipe is located on the overflow port, and the other end of the overflow pipe is connected to an external liquid storage component. An overflow detection sensor is installed on the overflow pipe to detect whether there is liquid in the overflow pipe.

2. A choke prevention and spill detection assembly according to claim 1, wherein, The overflow pipe includes a first horizontal section, a U-shaped section, and a second horizontal section. Both the first horizontal section and the second horizontal section extend along a first horizontal direction. The first end of the first horizontal section is connected to the overflow port. The two ends of the U-shaped section are respectively connected to the second end of the first horizontal section and the first end of the second horizontal section. The second end of the second horizontal section is connected to the external liquid storage component. The U-shaped section is higher than the first horizontal section and the second horizontal section.

3. A choke prevention and spill detection assembly according to claim 2, wherein, The medium inlet is also connected to an external gas supply component, which is configured to send high-pressure gas into the medium flow channel to blow the agent in the medium flow channel, the drain valve, and the connecting pipeline out of the medium outlet.

4. A choke prevention and spill detection assembly according to claim 3, wherein, The overflow pipe is also equipped with a control valve, which is located upstream of the overflow detection sensor. The control valve is configured to control the overflow pipe to disconnect or connect. When the external gas supply component supplies high-pressure gas to the medium inlet, the control valve disconnects the overflow pipe; when the external liquid supply component supplies liquid medium to the medium inlet, the control valve connects the overflow pipe.

5. A choke prevention and spill detection assembly according to claim 4, wherein, The control valve is located at the U-shaped section, and the overflow detection sensor is located at the second horizontal section.

6. The anti-jamming flow detection assembly of claim 1, wherein, The main valve includes a first valve body and at least one second valve body, wherein: Both the first valve body and the second valve body are provided with a medium flow channel. The medium flow channel of the first valve body is connected to the medium flow channel of the adjacent second valve body through a connecting component, and the medium flow channel of the second valve body is connected to the medium flow channel of the adjacent second valve body.

7. A choke and spill detection assembly according to claim 6, wherein, The connection assembly includes a first connector, a second connector, a third connector, a first connecting pipe, and a second connecting pipe. The first connector is disposed on the first valve body, the second connector is disposed on the first end of the second valve body, and the two ends of the first connecting pipe are detachably connected to the first connector and the second connector, respectively. The third connector is disposed on the second end of the second valve body, and the third connector is configured to detachably connect two adjacent second valve bodies through the second connecting pipe.

8. A choke prevention and spill detection assembly according to claim 6, wherein, The anti-blockage overflow detection component also includes a first base and a second base with an adjustable spacing along a first horizontal direction, wherein the first valve body is disposed on the first base and the second valve body is disposed on the second base; Both the first base and the second base include a support plate and two mounting plates. The two mounting plates are symmetrically arranged at both ends of the support plate. Each end of the support plate has a first oblong hole along the width direction of the support plate. The mounting plate has a second oblong hole. The first oblong hole and the second oblong hole correspond to each other. Bolts pass through the first oblong hole and are detachably connected to the second oblong hole.

9. The anti-jamming flow detection assembly of claim 1, wherein, The at least one drain valve is disposed on one side or opposite sides of the main valve in the second direction, and the drain valve's outlet pipe is connected to the wafer processing chamber via a pipeline.

10. A wafer processing apparatus characterized by comprising: The wafer processing apparatus includes an anti-clog overflow detection component as described in any one of claims 1-9.

Images