Silicon wafer cleaning and drying all-in-one machine

Abstract

The application provides a silicon wafer cleaning and drying all-in-one machine, which comprises a cleaning system and a drying system, the cleaning system and the drying system are connected, the cleaning system is arranged at the front end of the drying system from the moving direction of the silicon wafer cleaning, a lifting mechanism is arranged between the cleaning system and the drying system, the front end of the cleaning system is provided with a flower basket conveying mechanism and a first carrying mechanism, the upper part of the cleaning system and the drying system is provided with a second carrying mechanism, the second carrying mechanism is parallel to the cleaning system and the drying system, the side of the cleaning system and the drying system is provided with an empty basket backflow mechanism in parallel, and the empty basket backflow mechanism extends along the arrangement direction of the cleaning system and the drying system. The cleaning and drying equipment is integrated, the space utilization can be improved, the labor cost can be reduced, and the production capacity can be improved.

Description

Technical Field

[0001] This utility model relates to the field of cleaning equipment technology, specifically to a silicon wafer cleaning and drying integrated machine. Background Technology

[0002] After silicon ingot slicing, the silicon wafers undergo debinding and insertion, requiring cleaning and drying processes. In existing technologies, cleaning and drying are handled by two separate pieces of equipment. The connection between these different process stages necessitates manual intervention and wafer transfer. Furthermore, due to the dispersed equipment locations and low space utilization, the equipment occupies a large workshop area for the same production capacity, resulting in high energy consumption and high labor and material costs. Moreover, the manual transfer process easily increases the wafer breakage rate, leading to low wafer processing efficiency and hindering the construction of automated production lines. Utility Model Content

[0003] To overcome the shortcomings of the prior art, this utility model provides a silicon wafer cleaning and drying integrated machine, which integrates cleaning and drying equipment into one unit, thereby improving space utilization, reducing labor costs, and increasing production capacity.

[0004] To achieve the above objectives, the technical solution adopted by this utility model is as follows:

[0005] The first aspect of this utility model discloses a silicon wafer cleaning and drying integrated machine, comprising: a cleaning system and a drying system, the cleaning system and the drying system being connected. From the perspective of the silicon wafer cleaning movement direction, the cleaning system is located at the front end of the drying system. A lifting mechanism is provided between the cleaning system and the drying system. The front end of the cleaning system is provided with a basket conveying mechanism and a first transport mechanism. A second transport mechanism is provided above the cleaning system and the drying system. The second transport mechanism is parallel to the cleaning system and the drying system. An empty basket return mechanism is provided parallel to one side of the cleaning system and the drying system. The empty basket return mechanism extends along the direction in which the cleaning system and the drying system are arranged.

[0006] The above technical solution improves space utilization by integrating the cleaning system and the drying system into one unit. During cleaning and drying, the equipment can be transported by the first and second transport mechanisms along the arrangement direction of the integrated machine without the need for transfer. It has low energy consumption and high automation, requires no manual intervention, and has a simple cleaning and transport method, which can improve production capacity.

[0007] Furthermore, the flower basket conveying mechanism is positioned below the first transporting mechanism, and the flower basket conveying mechanism and the first transporting mechanism are perpendicular to each other. The flower basket conveying mechanism is used to transport the flower basket to a designated location, thereby enabling the first transporting mechanism to move it.

[0008] Furthermore, the first conveying mechanism is equipped with a first clamping device, and a fixing groove is provided below the first clamping device. The first clamping device moves along a preset direction to transport the flower basket from the flower basket conveying mechanism to the fixing groove. Even further, the second conveying mechanism is positioned above the first conveying mechanism, and the fixing groove is positioned below the moving path of the first clamping device, facilitating the clamping of the flower basket from the flower basket conveying mechanism into the fixing groove. The second conveying mechanism is positioned above the first conveying mechanism, thereby transporting the flower basket from the fixing groove to the washing tank. The positioning of the first and second conveying mechanisms eliminates the need for spatial transfer of the flower basket, improving washing efficiency.

[0009] Furthermore, the cleaning system includes multiple sets of cleaning tanks, each set containing multiple cleaning tanks. Using multiple sets of cleaning tanks improves cleaning efficiency; while one set of cleaning tanks is working, another set can be used simultaneously. Each set of cleaning tanks contains at least one water washing tank and / or an alkaline washing tank and / or a chemical washing tank.

[0010] Furthermore, the cleaning system is connected to a tossing mechanism, with at least one tossing mechanism connected to each group of cleaning tanks. The flower baskets are continuously tossed by the tossing mechanism, improving the cleaning effect.

[0011] Furthermore, the second conveying mechanism includes a guide rail and a second clamping device. The guide rail extends along the direction in which the cleaning system and the drying system are arranged, and the second clamping device is slidably connected to the guide rail. Even further, a fixing groove is located at the front end of the cleaning tank, below the guide rail. The second clamping device slides along the guide rail to clamp the flower basket from the fixing groove and, according to the cleaning process, sequentially places it into each process tank, thereby improving cleaning efficiency and space utilization.

[0012] Furthermore, the second conveying mechanism is provided with at least three second gripping devices, which slide along the extension direction of the guide rail. Providing multiple second gripping devices can improve cleaning efficiency; while one second gripping device is working, another second gripping device can be used simultaneously to grip the flower basket.

[0013] Furthermore, the drying system includes multiple drying tanks, and a material unloading platform is provided at the rear end of the drying system.

[0014] Furthermore, the empty basket return mechanism includes a conveyor chain and a conveyor motor. The conveyor motor is located below the conveyor chain. The conveyor chain includes a first conveyor chain, a second conveyor chain, and a third conveyor chain. One end of the first conveyor chain is connected to the conveyor motor, and the other end is connected to the second conveyor chain. The second conveyor chain is connected to the third conveyor chain, driving the third conveyor chain to rotate. The empty basket is automatically conveyed by the empty basket return mechanism without manual intervention.

[0015] Furthermore, the empty basket return mechanism is equipped with at least one conveyor motor. When two or more conveyor motors are provided, they are spaced apart below the empty basket return mechanism. Using multiple motors improves the efficiency and safety of the empty basket return mechanism and ensures its stability.

[0016] Due to the application of the above technical solution, this utility model has the following advantages compared with the prior art:

[0017] 1. This application integrates the cleaning system and the drying system into one unit, which can improve the space utilization of the equipment and reduce the number of intermediate automated equipment, thereby increasing production capacity without increasing costs.

[0018] 2. The fixed groove in this application is set below the first and second transport mechanisms, so that the first and second transport mechanisms overlap in space, automatically transporting the flower basket without transfer or manual intervention, increasing the degree of automation, reducing labor costs, reducing the breakage rate, and increasing production capacity.

[0019] To make the above and other objects, features and advantages of this utility model more apparent and understandable, preferred embodiments are described below in detail with reference to the accompanying drawings. Attached Figure Description

[0020] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0021] Figure 1 This is a front view of a silicon wafer cleaning and drying integrated machine provided in an embodiment of this utility model;

[0022] Figure 2 This is a top view of a silicon wafer cleaning and drying integrated machine provided in an embodiment of this utility model;

[0023] Figure 3 This is a partially enlarged view of an empty basket return mechanism provided in an embodiment of this utility model.

[0024] The reference numerals in the above figures are as follows: 1. Flower basket conveying mechanism; 2. First conveying mechanism; 3. First clamping device; 4. Fixing groove; 5. Washing groove; 6. Throwing mechanism; 7. Guide rail; 8. Second clamping device; 9. Drying groove; 10. Empty basket return mechanism; 11. Conveyor motor; 12. First conveyor chain; 13. Second conveyor chain; 14. Third conveyor chain; 15. Lifting mechanism. Detailed Implementation

[0025] The technical solutions of the present invention will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present invention, and not all embodiments. In addition, the accompanying drawings of the present invention are only simple schematic illustrations and are not depictions based on actual dimensions, as stated in advance.

[0026] In this utility model, it should be noted that the terms "upper," "lower," "inner," "outer," "forward," "backward," "between," "nearer," and "farthest" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are used only for the convenience of describing this utility model and for simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model. It should also be noted that, unless otherwise explicitly specified and limited, the terms "installation" and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral connection; they can refer to a direct connection or an indirect connection. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0027] It should be understood that while terms such as "first," "second," and "third" may be used in this document to describe various components or signals, these components or signals should not be limited by these terms. These terms are primarily used to distinguish one component from another, or one signal from another. Furthermore, the term "or" as used herein should, as appropriate, include any combination of one or more of the related listed items.

[0028] Reference Figures 1-2 This utility model provides a silicon wafer cleaning and drying integrated machine, including a cleaning system and a drying system, wherein the cleaning system and the drying system are connected, and in one possible embodiment, the cleaning system and the drying system are connected by screws.

[0029] From the perspective of the silicon wafer cleaning movement direction, the cleaning system is located at the front end of the drying system, and a lifting mechanism 15 is provided between the cleaning system and the drying system. The front end of the cleaning system is provided with a basket conveying mechanism 1 and a first transport mechanism 2.

[0030] like Figure 2As shown, the flower basket conveying mechanism 1 is disposed below the first conveying mechanism 2, and the flower basket conveying mechanism 1 and the first conveying mechanism 2 are arranged perpendicular to each other. In this embodiment, the flower basket conveying mechanism 1 is arranged parallel to the arrangement direction of the washing tank 5, and the first conveying mechanism 2 is arranged perpendicular to the arrangement direction of the washing tank 5.

[0031] The first conveying mechanism 2 is equipped with a first gripping device 3, which moves along a preset direction. A fixing groove 4 is provided below the first gripping device 3, below the moving path of the first gripping device 3, thereby allowing the first gripping device 3 to move the flower basket from the flower basket conveying mechanism 1 into the fixing groove 4. In one possible embodiment, the first gripping device 3 can be a single-arm crane. The preset direction is the extending direction of the first conveying mechanism 2.

[0032] like Figure 1 and Figure 2 As shown, the cleaning system includes multiple sets of cleaning tanks, each set containing multiple cleaning tanks 5. Each cleaning tank 5 includes at least one water washing tank and / or an alkaline washing tank and / or a chemical washing tank, thereby cleaning the silicon wafers. In one possible embodiment, the cleaning system employs ultrasonic cleaning to improve the cleaning effect.

[0033] To further improve the cleaning effect, the cleaning system is also equipped with an agitation mechanism 6, and each group of cleaning tanks is connected to at least one agitation mechanism 6. Figure 1 and Figure 2 As shown, in one possible embodiment, the cleaning system is provided with three sets of cleaning tanks, each set having one set of three cleaning tanks 5 and two sets of four cleaning tanks 5 respectively. The agitating mechanism 6 is connected to the one set of three cleaning tanks 5 and the two sets of four cleaning tanks 5 respectively, thereby controlling the flower basket to be continuously agitated on the agitating mechanism 5 to improve the cleaning effect.

[0034] It should be noted that the number of cleaning tanks and agitation mechanisms 5 in the above embodiments is only for illustrating the setup of the cleaning system and does not limit the specific number of cleaning tanks and agitation mechanisms.

[0035] like Figure 1 As shown, a second conveying mechanism is provided above the cleaning system and the drying system. The front end of the second conveying mechanism is also provided above the first conveying mechanism. The second conveying mechanism includes a guide rail 7 and a second clamping device 8. The guide rail 7 extends along the direction in which the cleaning system and the drying system are arranged. The second clamping device 8 is slidably connected to the guide rail 7.

[0036] In one possible embodiment, the guide rail 7 is configured as a U-shaped structure, and the guide rail 7 has two guide rails, with the second clamping device 8 slidably connected between the two guide rails 7.

[0037] In one possible embodiment, the second conveying mechanism is provided with at least three second gripping devices 8, which slide along the extension direction of the guide rail 7.

[0038] like Figure 1 and Figure 2 As shown, the drying system includes multiple drying tanks 9, and a discharge platform is provided at the rear end of the drying system.

[0039] The integrated silicon wafer cleaning and drying machine also includes an empty basket recirculation mechanism 10. The empty basket recirculation mechanism 10 extends along the direction in which the cleaning system and the drying system are arranged, and is disposed on one side of the cleaning system and the drying system, parallel to the cleaning system and the drying system. The empty basket recirculation mechanism 10 is used for automatic recirculation of empty baskets.

[0040] Specifically, such as Figure 3 As shown, the empty basket return mechanism 10 includes a conveyor chain and a conveyor motor 11. The conveyor motor 11 is disposed below the conveyor chain. The conveyor chain includes a first conveyor chain 12, a second conveyor chain 13, and a third conveyor chain 14. One end of the first conveyor chain 12 is connected to the conveyor motor 11, and the other end is connected to the second conveyor chain 13. The second conveyor chain 13 is connected to the third conveyor chain 14, driving the third conveyor chain 14 to rotate, thereby driving the empty basket disposed on the third conveyor chain 14 to return.

[0041] In one possible embodiment, in order to improve the efficiency and stability of the empty basket return mechanism 10, the empty basket return mechanism 10 is provided with at least one conveyor motor 11. When two or more conveyor motors 11 are provided, the conveyor motors 11 are spaced apart below the conveyor chain.

[0042] The silicon wafer cleaning and drying integrated machine operates as follows: After the pre-cleaning process, the baskets are filled with silicon wafers. The full baskets are transported to the designated position by the basket transport mechanism 1. The first clamping device 3 on the first transport mechanism 2 moves along the first transport mechanism 2, transporting the baskets one by one to the fixed slot 4 until the required number is filled. The second clamping device 8 slides along the guide rail 7 to the top of the fixed slot 4, clamps the baskets from the fixed slot 4, and places them into the respective cleaning slots 5 according to the cleaning process. During cleaning, the baskets are continuously tossed on the throwing mechanism 6. After cleaning, the silicon wafers are dried in the drying slot 9 after passing through the lifting mechanism 15. After drying, the second clamping device 8 places the baskets on the unloading platform, and the six-axis robot transports the baskets to the next process equipment. Empty baskets are transported to the empty basket return mechanism 10.

[0043] This application integrates the cleaning and drying systems into one unit, which improves the space utilization of the equipment and reduces the number of intermediate automated equipment. It increases production capacity without increasing costs. The fixed trough is set below the first and second handling mechanisms, so that the first and second handling mechanisms overlap in space. The flower baskets are automatically handled without transfer or manual intervention, which increases the degree of automation, reduces labor costs, reduces the breakage rate, and increases production capacity.

[0044] This utility model uses specific embodiments to illustrate the principle and implementation of the utility model. The above description of the embodiments is only for the purpose of helping to understand the method and core idea of ​​the utility model. At the same time, for those skilled in the art, there will be changes in the specific implementation and application scope based on the idea of ​​the utility model. Therefore, the content of this specification should not be construed as a limitation of the utility model.

Claims

1. A silicon wafer cleaning and drying integrated machine, characterized in that, include: A cleaning system and a drying system are connected. From the perspective of the silicon wafer cleaning movement direction, the cleaning system is located at the front end of the drying system. A lifting mechanism is provided between the cleaning system and the drying system. The front end of the cleaning system is provided with a basket conveying mechanism and a first transport mechanism. A second transport mechanism is provided above the cleaning system and the drying system. The second transport mechanism is parallel to the cleaning system and the drying system. An empty basket return mechanism is provided parallel to one side of the cleaning system and the drying system. The empty basket return mechanism extends along the direction in which the cleaning system and the drying system are arranged.

2. The silicon wafer cleaning and drying integrated machine according to claim 1, characterized in that, The flower basket conveying mechanism is located below the first transport mechanism, and the flower basket conveying mechanism and the first transport mechanism are arranged perpendicular to each other.

3. The silicon wafer cleaning and drying integrated machine according to claim 1, characterized in that, The first conveying mechanism is provided with a first clamping device, and a fixing groove is provided below the first clamping device. The first clamping device moves along a preset direction to transport the flower basket from the flower basket conveying mechanism to the fixing groove.

4. The silicon wafer cleaning and drying integrated machine according to claim 1, characterized in that, The cleaning system includes multiple sets of cleaning tanks, and each set of cleaning tanks is equipped with multiple cleaning tanks.

5. A silicon wafer cleaning and drying integrated machine according to claim 4, characterized in that, The cleaning system is connected to a throwing mechanism, and each cleaning tank is connected to at least one throwing mechanism.

6. The silicon wafer cleaning and drying integrated machine according to claim 1, characterized in that, The second conveying mechanism includes a guide rail and a second clamping device. The guide rail extends along the direction in which the cleaning system and the drying system are arranged, and the second clamping device is slidably connected to the guide rail.

7. A silicon wafer cleaning and drying integrated machine according to claim 6, characterized in that, The second conveying mechanism is provided with at least three second gripping devices, which slide along the extension direction of the guide rail.

8. The silicon wafer cleaning and drying integrated machine according to claim 1, characterized in that, The drying system includes multiple drying tanks, and a discharge platform is provided at the rear end of the drying system.

9. A silicon wafer cleaning and drying integrated machine according to claim 1, characterized in that, The empty basket return mechanism includes a conveyor chain and a conveyor motor. The conveyor motor is located below the conveyor chain. The conveyor chain includes a first conveyor chain, a second conveyor chain, and a third conveyor chain. One end of the first conveyor chain is connected to the conveyor motor, and the other end is connected to the second conveyor chain. The second conveyor chain is connected to the third conveyor chain, driving the third conveyor chain to rotate.

10. A silicon wafer cleaning and drying integrated machine according to claim 9, characterized in that, The empty basket return mechanism is equipped with at least one conveyor motor. When two or more conveyor motors are provided, the conveyor motors are spaced apart below the conveyor chain.

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