Transport device and die bonder

Abstract

The utility model is suitable for semiconductor production technical field provides a kind of conveying device and fixed crystal machine.Conveying device includes support tray, negative pressure adsorption structure and positioning structure, support tray is used to lift support crystal ring, positioning structure is set on the top surface of support tray, positioning structure is used to position crystal ring, negative pressure adsorption structure is set on support tray, for when crystal ring is placed in support tray with crystal ring adsorption.Compared with the material taking mechanism in prior art, after crystal ring is placed on support tray and positioning is completed, crystal ring is adsorbed by negative pressure adsorption structure, crystal ring can be avoided from positioning structure in the process of transportation, so that crystal ring is more firmly fixed on support tray.

Description

Technical Field

[0001] This utility model belongs to the field of semiconductor manufacturing technology, and in particular relates to a material handling mechanism, a conveying device, and a die bonding machine. Background Technology

[0002] A die bonder is a key piece of equipment used in semiconductor packaging and LED manufacturing. Its main function is to precisely separate the die from the die ring and fix it onto a substrate (such as a PCB or support), achieving a stable bond through adhesives (such as silver paste) or eutectic bonding. Die bonders typically include a transport mechanism, which can consist of an adjustment mechanism and a pick-up mechanism. During die ring transport, the pick-up mechanism interacts with the die ring to keep them relatively fixed, and then the adjustment mechanism drives the pick-up mechanism to move, thus achieving the purpose of transporting the die ring. However, most existing pick-up mechanisms suffer from insecure die ring fixation, severely affecting the stability of die ring transport. Utility Model Content

[0003] The purpose of this invention is to provide a material handling mechanism, a conveying device, and a die bonding machine, which aims to solve the technical problem of unstable crystal ring fixation in the material handling mechanism of the prior art.

[0004] This utility model is implemented as follows: Firstly, a material handling mechanism is provided, which includes a support tray, a negative pressure adsorption structure, and a positioning structure. The support tray is used to support the crystal ring, the positioning structure is disposed on the top surface of the support tray, and the positioning structure is used to position the crystal ring. The negative pressure adsorption structure is disposed on the support tray and is used to adsorb the crystal ring when it is placed on the support tray.

[0005] In an optional embodiment, the negative pressure adsorption structure includes a plurality of suction nozzle assemblies, all of which are disposed on the support tray and are arranged at intervals along a first circle. The suction nozzle assemblies are used to generate negative pressure to adsorb the crystal ring.

[0006] In one alternative embodiment, the support tray has a ventilation channel for communication with an external pipeline, and the nozzle assembly is connected to the ventilation channel.

[0007] In an optional embodiment, the nozzle assembly includes a mounting portion and an elastic portion. A first end of the mounting portion is connected to the support tray, and the elastic portion is disposed at a second end of the mounting portion. The mounting portion has a first channel for communicating with the ventilation channel, and the elastic portion has a second channel for communicating with the first channel.

[0008] In an optional embodiment, the positioning structure includes a plurality of positioning pins disposed on the support tray. The plurality of positioning pins are arranged sequentially at intervals along a second circle, the size of which matches the size of the crystal ring.

[0009] In an alternative embodiment, the locating pin has a mounting through hole for fasteners to pass through, and the support tray has a fixing hole for mounting fasteners.

[0010] In a second aspect, a conveying device is provided, including an adjusting mechanism and a material-taking mechanism as described in any of the preceding claims, wherein the adjusting mechanism is used to adjust the position of the material-taking mechanism.

[0011] In an optional embodiment, the adjustment mechanism includes a fixed base, a drive structure, and a mounting base. The drive structure is disposed between the fixed base and the mounting base and is used to drive the mounting base to move. The support tray is rotatably connected to the mounting base, and the mounting base is provided with a rotating unit, which is used to drive the support tray to swing.

[0012] In an optional embodiment, the driving structure includes an intermediate slider, a first driving group, and a second driving group. The intermediate slider is slidably disposed on the fixed base. The first driving group is located between the intermediate slider and the fixed base and is used to drive the intermediate slider to move. The mounting base is slidably disposed on the intermediate slider. The second driving group is located between the mounting base and the intermediate slider and is used to drive the mounting base to move in the same direction when the intermediate slider moves.

[0013] Thirdly, a die bonder is provided, including the conveying device described in any of the above claims.

[0014] The technical advantages of this invention compared to existing technologies are as follows: By providing a support tray with a certain area, the support tray can be moved below the crystal ring when it needs to be picked up, thus vertically supporting the crystal ring. Simultaneously, a positioning structure is provided on the support tray to accurately position the crystal ring. Furthermore, a negative pressure adsorption structure is provided on the support tray. Compared to existing material handling mechanisms, after the crystal ring is placed on the support tray and positioned, the negative pressure adsorption structure adsorbs the crystal ring, preventing it from detaching from the positioning structure during transportation and ensuring a more secure fixation.

[0015] It is understood that the beneficial effects of the second and third aspects mentioned above can be found in the relevant descriptions in the first aspect above, and will not be repeated here. Attached Figure Description

[0016] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the description of the embodiments of this utility model or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1 This is a schematic diagram of the material handling mechanism provided in an embodiment of the present invention;

[0018] Figure 2 yes Figure 1 Enlarged structural diagram at point A;

[0019] Figure 3 This is a cross-sectional view of the material handling mechanism provided in this embodiment of the utility model;

[0020] Figure 4 This is a cross-sectional view of the suction nozzle assembly used in this embodiment of the utility model;

[0021] Figure 5 This is a schematic diagram of the structure of the conveying device provided in an embodiment of the present utility model.

[0022] Explanation of reference numerals in the attached figures:

[0023] 100. Conveying equipment;

[0024] 10. Material handling mechanism; 20. Adjustment mechanism; 30. Crystal ring;

[0025] 11. Support tray; 12. Negative pressure adsorption structure; 121. Nozzle assembly; 1211. Mounting part; 1212. Elastic part; 1213. First channel; 1214. Second channel; 1215. Connecting part; 1216. Locking part; 13. Positioning structure; 131. Positioning pin; 132. Mounting through hole; 14. Ventilation channel;

[0026] 21. Fixed base; 22. Mounting base; 23. Drive structure; 231. Intermediate slider; 232. First drive group; 233. Second drive group; 24. Rotation unit. Detailed Implementation

[0027] The embodiments of this utility model are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain this utility model, and should not be construed as limiting this utility model.

[0028] In the description of this utility model, it should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0029] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, "a plurality of" means two or more, unless otherwise explicitly specified.

[0030] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0031] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments.

[0032] Please refer to Figures 1 to 4 As shown in the present invention, in a first aspect, a material handling mechanism is provided for taking crystal rings from a hopper. The material handling mechanism includes a support tray 11, a negative pressure adsorption structure 12, and a positioning structure 13. The support tray 11 is used to support the crystal rings. The positioning structure 13 is disposed on the top surface of the support tray 11 and is used to position the crystal rings. The negative pressure adsorption structure 12 is disposed on the support tray 11 and is used to adsorb the crystal rings when they are placed on the support tray 11.

[0033] Specifically, the support tray 11 refers to a component with a certain area. The support tray 11 can be a plate-like structure and can abut against the bottom of the crystal ring to provide vertical support for the crystal ring. The negative pressure adsorption structure 12 refers to a component or assembly that can adsorb objects through negative pressure. The negative pressure adsorption structure 12 can be connected to an external negative pressure pipeline or a negative pressure generating unit pipeline. The positioning structure 13 refers to a structure or component that can position the crystal ring. The positioning structure 13 can be a positioning pin 131 or a positioning groove, etc.

[0034] The material handling mechanism provided in this embodiment of the invention features a support tray 11 with a certain area. When a crystal ring needs to be picked up, the support tray 11 can be moved below the crystal ring, providing vertical support and lifting for the crystal ring. A positioning structure 13 is also provided on the support tray 11 to accurately position the crystal ring. Furthermore, a negative pressure adsorption structure 12 is provided on the support tray 11. Compared to existing material handling mechanisms, after the crystal ring is placed on the support tray 11 and positioned, the negative pressure adsorption structure 12 adsorbs the crystal ring, preventing it from detaching from the positioning structure 13 during transportation and ensuring a more secure fixation of the crystal ring on the support tray 11.

[0035] In one embodiment, see Figure 1 and Figure 2 The negative pressure adsorption structure 12 includes multiple suction nozzle assemblies 121, all of which are disposed on the support tray 11. The multiple suction nozzle assemblies 121 are arranged at intervals along a first circle. The suction nozzle assemblies 121 are used to generate negative pressure to adsorb the crystal ring. Specifically, the suction nozzle assembly 121 refers to a component with a certain height. The suction nozzle assembly 121 may have a channel for gas passage, which is connected to a negative pressure pipeline. Negative pressure can be generated at the opening of the channel to suck up other objects. In this embodiment, by providing multiple suction nozzle assemblies 121 on the support tray 11 and arranging them at intervals along the first circle, the multiple suction nozzles can work together to adsorb multiple positions on the crystal ring, thereby making the adsorption of the crystal ring more secure and thus making the transportation of the crystal ring more stable and safe.

[0036] In one embodiment, see Figure 3The support tray 11 has a ventilation channel 14 for communication with external pipelines, and the nozzle assembly 121 is connected to the ventilation channel 14. Specifically, the ventilation channel 14 refers to a channel structure with a certain length, which can extend in a straight line for ease of processing. In this embodiment, by providing a ventilation channel 14 inside the support tray 11, the nozzle assembly 121 can be connected to the ventilation channel 14 when it is installed on the support tray 11, avoiding the complexity of the pipeline caused by connecting the nozzle assembly 121 to the external negative pressure unit using connecting pipelines, and making the overall structure of the adsorption mechanism simpler.

[0037] In one embodiment, see Figure 3 The nozzle assembly 121 includes a mounting portion 1211 and an elastic portion 1212. The first end of the mounting portion 1211 is connected to the support tray 11, and the elastic portion 1212 is disposed at the second end of the mounting portion 1211. The mounting portion 1211 has a first channel 1213 for communicating with the ventilation channel 14, and the elastic portion 1212 has a second channel 1214 for communicating with the first channel 1213. Specifically, both the mounting portion 1211 and the elastic portion 1212 refer to components with a certain volume. The mounting portion 1211 can be made of a rigid material, such as metal, while the elastic portion 1212 can be made of a material with a certain degree of elasticity, such as rubber, silicone, or polyurethane. The mounting portion 1211 can be connected to the support tray 11 by means of plug-in or threaded connection. Both the first channel 1213 and the second channel 1214 refer to channel structures with a certain length. In this embodiment, the first end of the mounting part 1211 is connected to the support tray 11. The mounting part 1211 serves as a connection and support. Then, the elastic part 1212 is set at the second end of the mounting part 1211. The elastic part 1212 acts as a buffer when adsorbing the crystal ring, preventing the suction nozzle assembly 121 from damaging the crystal ring, and also making the adsorption more secure.

[0038] In an optional embodiment, please refer to Figure 3 The first end of the mounting part 1211 is also provided with a connecting part 1215, and the support tray 11 is also provided with a plug hole. When the mounting part 1211 is connected to the support tray 11, the connecting part 1215 can be inserted into the plug hole and threaded, so that the connection between the mounting part 1211 and the support tray 11 is more secure.

[0039] In another alternative embodiment, please refer to Figure 3The second end of the mounting part 1211 is provided with a snap-fit ​​part 1216, and the elastic part 1212 is also provided with a snap-fit ​​hole for cooperating with the snap-fit ​​part 1216. The cooperating of the snap-fit ​​part 1216 and the snap-fit ​​hole can make the connection between the mounting part 1211 and the elastic part 1212 more secure and the sealing performance better.

[0040] In one embodiment, see Figure 1 and Figure 2 The positioning structure 13 includes multiple positioning pins 131, which are disposed on the support tray 11. The positioning pins 131 are arranged alternately along a second circle, the size of which matches the size of the crystal ring. Specifically, the positioning pin 131 is a columnar component with a certain height, and it can be installed on the support tray 11 by means of insertion, snap-fit, or fastener connection. In this embodiment, by providing multiple positioning pins 131 on the support tray 11, when the support tray 11 supports the crystal ring, the positioning pins 131 can abut against the inner ring of the crystal ring frame to achieve relative fixation between the crystal ring and the support tray 11, making the positioning of the crystal ring on the support tray 11 more convenient and accurate.

[0041] In one embodiment, see Figure 2 The locating pin 131 has a mounting through hole 132 for fasteners to pass through, and the support tray 11 has a fixing hole for mounting fasteners. Specifically, the fixing hole refers to a hole structure with a certain depth, and the inner wall of the fixing hole may have threads that mate with fasteners. The mounting through hole 132 refers to a through hole structure with a certain depth, and the mounting hole can penetrate the locating pin 131. In this embodiment, when installing the locating pin 131, a fastener can be used to pass through the mounting through hole 132 and connect to the fixing hole on the support tray 11. The fastener presses and fixes the locating pin 131 to the support tray 11, making the locating pin 131 more securely fixed. Secondly, please refer to... Figure 5 A conveying device is provided, including an adjusting mechanism 20 and a material-taking mechanism 10 as described in any of the preceding claims, wherein the adjusting mechanism 20 is used to adjust the position of the material-taking mechanism 10. It is understood that the beneficial effects of the second aspect described above can be found in the relevant description in the first aspect described above.

[0042] In one embodiment, see Figure 5The adjusting mechanism 20 includes a fixed base 21, a drive structure 23, and a mounting base 22. The drive structure 23 is disposed between the fixed base 21 and the mounting base 22, and is used to drive the mounting base 22 to move. The support tray 11 is rotatably connected to the mounting base 22. The mounting base 22 is provided with a rotating unit 24, which is used to drive the support tray 11 to swing. Specifically, the fixed base 21 refers to a component with a certain volume. The fixed base 21 can be block-shaped, plate-shaped, or column-shaped, etc., and can also be composed of a combination of various shapes. The mounting base 22 refers to a component with a certain volume. The mounting base 22 can be block-shaped, plate-shaped, or column-shaped, etc., and can also be composed of a combination of various shapes. The mounting base 22 can be directly slidably connected to the fixed base 21 through a sliding structure, or indirectly slidably connected to the fixed base 21. The drive structure 23 refers to a component that can drive an object to move in a straight line. The drive structure 23 can be a cylinder, hydraulic cylinder, or electric push rod, etc., and can also be a component structure composed of multiple drive components. Rotating unit 24 refers to a component that can output torque, such as an electric motor or a hydraulic motor.

[0043] In this embodiment, a mounting base 22 is slidably disposed on a fixed base 21, and a driving structure 23 is disposed between the fixed base 21 and the mounting base 22. The driving structure 23 can drive the mounting base 22 to reciprocate along a first direction, and the material picking mechanism 10 can move together with the mounting base 22. The material picking mechanism 10 is rotatably disposed on the mounting base 22, and a rotating unit 24 is also disposed on the mounting base 22. The rotating unit 24 is used to drive the material picking mechanism 10 to swing, thereby realizing the movement of the material picking mechanism 10 in two directions, making it more convenient to remove the crystal ring from the hopper.

[0044] In one embodiment, see Figure 5 The drive structure 23 includes an intermediate slider 231, a first drive group 232 and a second drive group 233. The intermediate slider 231 is slidably disposed on the fixed base 21. The first drive group 232 is located between the intermediate slider 231 and the fixed base 21 and is used to drive the intermediate slider 231 to move. The mounting base 22 is slidably disposed on the intermediate slider 231. The second drive group 233 is located between the mounting base 22 and the intermediate slider 231 and is used to drive the mounting base 22 to move in the same direction when the intermediate slider 231 moves.

[0045] Specifically, the intermediate slider 231 refers to a component with a certain volume. The intermediate slider 231 can be block-shaped, plate-shaped, or composed of a combination of various shapes. The first drive group 232 and the second drive group 233 refer to components that can drive an object to reciprocate along a straight line. They can be components such as cylinders, hydraulic cylinders, or electric push rods.

[0046] In this embodiment, the mounting base 22 and the fixed base 21 can be indirectly slidably connected by the intermediate slider 231. The second drive group 233 is used to drive the mounting base 22 to move in the same direction when the intermediate slider 231 is driven by the first drive group 232. In this embodiment, the drive structure 23 is composed of the intermediate slider 231, the first drive group 232, and the second drive group 233. The movement of the mounting base 22 can be realized by the cooperation of the first drive group 232 and the second drive group 233, so that the mounting base 22 has a larger stroke and can also have a faster speed when moving.

[0047] Thirdly, a die bonder is provided, including the conveying device described in any of the above claims. It is understood that the beneficial effects of the third aspect can be found in the relevant description in the first aspect above, and will not be repeated here.

[0048] The above description is merely a preferred embodiment of the present utility model, and only specifically describes the technical principles of the present utility model. These descriptions are only for explaining the principles of the present utility model and should not be construed as limiting the scope of protection of the present utility model in any way. Based on this explanation, any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present utility model, as well as other specific embodiments of the present utility model that can be conceived by those skilled in the art without creative effort, should be included within the scope of protection of the present utility model.

Claims

1. A conveying device, characterized in that, The device includes a material-grabbing mechanism and an adjustment mechanism for adjusting the position of the material-grabbing mechanism. The material-grabbing mechanism includes a support tray, a negative pressure adsorption structure, and a positioning structure. The support tray is used to support the crystal ring. The positioning structure is disposed on the top surface of the support tray and is used to position the crystal ring. The negative pressure adsorption structure is disposed on the support tray and is used to adsorb the crystal ring when the crystal ring is placed on the support tray.

2. The conveying device as claimed in claim 1, characterized in that, The negative pressure adsorption structure includes multiple suction nozzle assemblies, all of which are disposed on the support tray. The multiple suction nozzle assemblies are arranged at intervals along a first circle. The suction nozzle assemblies are used to generate negative pressure to adsorb the crystal ring.

3. The conveying device as described in claim 2, characterized in that, The support tray has an air passage for communication with external pipelines, and the nozzle assembly is connected to the air passage.

4. The conveying device as described in claim 3, characterized in that, The nozzle assembly includes a mounting portion and an elastic portion. The first end of the mounting portion is connected to the support tray, and the elastic portion is disposed at the second end of the mounting portion. The mounting portion has a first channel for communicating with the ventilation channel, and the elastic portion has a second channel for communicating with the first channel.

5. The conveying device according to any one of claims 1 to 4, characterized in that, The positioning structure includes multiple positioning pins, which are disposed on the support tray. The multiple positioning pins are arranged sequentially at intervals along a second circle, and the size of the second circle matches the size of the crystal ring.

6. The conveying device as claimed in claim 5, characterized in that, The locating pin has an installation through hole for fasteners to pass through, and the support tray has a fixing hole for installing fasteners.

7. The conveying device as claimed in claim 1, characterized in that, The adjustment mechanism includes a fixed base, a drive structure, and a mounting base. The drive structure is disposed between the fixed base and the mounting base and is used to drive the mounting base to move. The support tray is rotatably connected to the mounting base, and the mounting base is provided with a rotating unit, which is used to drive the support tray to swing.

8. The conveying device as claimed in claim 7, characterized in that, The driving structure includes an intermediate slider, a first driving group, and a second driving group. The intermediate slider is slidably disposed on the fixed base. The first driving group is located between the intermediate slider and the fixed base and is used to drive the intermediate slider to move. The mounting base is slidably disposed on the intermediate slider. The second driving group is located between the mounting base and the intermediate slider and is used to drive the mounting base to move in the same direction when the intermediate slider moves.

9. A die bonder, characterized in that, Includes the transport device as described in any one of claims 1 to 8.

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