Flower basket insert mechanism

Abstract

The utility model discloses flower basket inserts piece mechanism, including support board, the front of support board is fixedly connected with the transverse board, the top installation of transverse board has the conveyer belt, the back of support board is fixedly connected with motor no.

Description

Technical Field

[0001] This utility model relates to the field of insert mechanism technology, and more specifically, to a flower basket insert mechanism. Background Technology

[0002] The Wafer Cassette Loading Mechanism is a key automated device in semiconductor manufacturing used to precisely insert silicon wafers layer by layer into a cassette / FOUP.

[0003] Common wafer insertion mechanisms typically employ a robotic arm in conjunction with a clamping mechanism to hold the silicon wafer. However, this method is costly and can easily cause the wafer to crack or be damaged during insertion into the support basket. Utility Model Content

[0004] In view of the problems existing in the prior art, the purpose of this utility model is to provide a flower basket insert mechanism to solve the problems in the background art.

[0005] To achieve the above objectives, the present invention adopts the following technical solution;

[0006] The flower basket insert mechanism includes a support plate. A horizontal plate is fixedly connected to the front of the support plate, and a conveyor belt is installed on the top of the horizontal plate. A rotating cylinder is rotatably connected to the front of the support plate. A motor is fixedly connected to the back of the support plate. The output shaft of the motor passes through the support plate and is fixedly connected to the rotating cylinder. A bracket is fixedly connected to the front of the support plate, and a support rod is fixedly connected to the inner side of the bracket. The outer side of the support rod is rotatably connected to the inner wall of the rotating cylinder. Two rotating plates are fitted onto the rotating cylinder and fixedly connected thereto. Each of the two rotating plates has annularly distributed storage slots on opposite sides. A lifting mechanism is provided on the support plate, located on the right side of the rotating cylinder. Annularly distributed through slots are provided on the rotating cylinder. A groove is provided on the support rod, and an electric push rod is fixedly connected to the inner wall of the groove. A mounting plate is fixedly connected to the telescopic end of the electric push rod, and a push plate is detachably connected to the right side of the mounting plate.

[0007] As a further description of the above technical solution:

[0008] The lifting mechanism includes a slide groove, which is formed on a support plate. A lead screw is rotatably connected to the inner wall of the slide groove. A slider is threadedly connected to the lead screw. A lifting plate is fixedly connected to the front of the slider. A second motor is fixedly connected to the top of the support plate. The output shaft of the second motor passes through the support plate and is fixedly connected to the lead screw.

[0009] As a further description of the above technical solution:

[0010] The front of the bracket is equipped with a controller for controlling the opening and closing of the conveyor belt, motor one, electric push rod one, and motor two. A distance sensor is fixedly connected to the outside of the support rod, and the output end of the distance sensor is connected to the controller signal.

[0011] As a further description of the above technical solution:

[0012] A square rod is fixedly connected to the left side of the push plate. The square rod passes through the mounting plate and is slidably connected to it. A screw rod is slidably connected to the top of the mounting plate. The bottom end of the screw rod passes through the square rod and is threadedly connected to it.

[0013] As a further description of the above technical solution:

[0014] Two positioning plates are fixedly connected to the left side of the lifting plate, and an electric push rod two is fixedly connected to the left side of the lifting plate. The telescopic end of the electric push rod two is fixedly connected to a locking plate.

[0015] Compared with existing technologies, the advantages of this utility model are:

[0016] This solution has a low structural cost and achieves wafer insertion while feeding silicon wafers, effectively improving insertion efficiency. Furthermore, there is no clamping force during insertion, avoiding micro-damage to the silicon wafers (such as clamping marks) caused by mechanical contact, thereby improving the practicality of the device. Attached Figure Description

[0017] Figure 1 One of the perspective views of this utility model;

[0018] Figure 2 This is a second perspective view of the present utility model;

[0019] Figure 3 This is a third perspective view of the present utility model;

[0020] Figure 4 This is the fourth perspective view of the present utility model;

[0021] Figure 5 This is a cross-sectional view of the present invention;

[0022] Figure 6 This utility model Figure 5 Enlarged view of section A in the middle;

[0023] Figure 7 This utility model Figure 5 Enlarged view of section B;

[0024] Figure 8This is a perspective view of the support rod and rotating cylinder in this utility model.

[0025] Explanation of the labels in the diagram:

[0026] 1. Support plate; 2. Horizontal plate; 3. Conveyor belt; 4. Rotating drum; 5. Motor 1; 6. Bracket; 7. Support rod; 8. Rotating plate; 9. Storage trough; 10. Lifting mechanism; 101. Slide groove; 102. Lead screw; 103. Slider; 104. Lifting plate; 105. Motor 2; 11. Through groove; 12. Groove; 13. Electric push rod 1; 14. Mounting plate; 15. Push plate; 16. Controller; 17. Distance sensor; 18. Square rod; 19. Screw; 20. Positioning plate; 21. Electric push rod 2; 22. Locking plate. Detailed Implementation

[0027] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present utility model;

[0028] Please see Figures 1-8 In this utility model: the flower basket insert mechanism includes a support plate 1, a horizontal plate 2 fixedly connected to the front of the support plate 1, a conveyor belt 3 installed on the top of the horizontal plate 2, a rotating cylinder 4 rotatably connected to the front of the support plate 1, a motor 5 fixedly connected to the back of the support plate 1, the output shaft of the motor 5 passing through the support plate 1 and fixedly connected to the rotating cylinder 4, a bracket 6 fixedly connected to the front of the support plate 1, and a support rod 7 fixedly connected to the inner side of the bracket 6. The outer side of the support rod 7 is rotatably connected to the inner wall of the rotating cylinder 4. Two rotating plates 8 are fixedly connected to the rotating cylinder 4. Each of the two rotating plates 8 has annularly distributed storage slots 9 on its opposite side. A lifting mechanism 10 is provided on the support plate 1. The lifting mechanism 10 is located on the right side of the rotating cylinder 4. Annularly distributed through slots 11 are provided on the rotating cylinder 4. A groove 12 is provided on the support rod 7. An electric push rod 13 is fixedly connected to the inner wall of the groove 12. The telescopic end of the electric push rod 13 is fixedly connected to a mounting plate 14. A push plate 15 is detachably connected to the right side of the mounting plate 14. The lifting mechanism 10 includes a slide groove 101. A chute 101 is formed on the support plate 1. A lead screw 102 is rotatably connected to the inner wall of the chute 101. A slider 103 is threadedly connected to the lead screw 102. A lifting plate 104 is fixedly connected to the front of the slider 103. A second motor 105 is fixedly connected to the top of the support plate 1. The output shaft of the second motor 105 passes through the support plate 1 and is fixedly connected to the lead screw 102. A controller 16 is installed on the front of the bracket 6 to control the opening and closing of the conveyor belt 3, the first motor 5, the first electric push rod 13, and the second motor 105. A distance sensor 17 is fixedly connected to the outside of the support rod 7. The output end of the distance sensor 17 is signal connected to the controller 16.

[0029] In this invention, when inserting silicon wafers, the carrying basket is first placed centered on the top of the lifting plate 104. At this time, the topmost insertion area of ​​the carrying basket is horizontally aligned with the two rightmost placement slots 9. Next, the silicon wafers are centered on the top of the conveyor belt 3. The controller 16 starts the conveyor belt 3, which drives the silicon wafers to slide inwards towards the two rotating plates 8. The silicon wafers then slide into the two leftmost placement slots 9, where the inner wall of the slots 9 contacts the edge of the silicon wafer. The placement slots 9 serve to position the silicon wafers. During this process, the distance sensor 17 detects the distance to the silicon wafer. When the silicon wafer... When the wafer is fully slid into the storage slot 9, if the value detected by the distance sensor 17 is less than the threshold, the distance sensor 17 will send a signal to the controller 16 indicating that the loading is complete. The controller 16 will then activate motor 5, which will drive the rotating drum 4 to rotate clockwise. The position of the storage slot 9 will change, and the next storage slot 9 will be horizontally aligned with the conveyor belt 3. The conveyor belt 3 will then carry the silicon wafer into the storage slot 9, thus achieving continuous loading. During the loading process, the rightmost storage slot 9 will be horizontally aligned with the wafer insertion area at the top of the basket. The controller 16 will then activate the electric push rod 1. 3. The mounting plate 14 drives the push plate 15 to move to the right. The push plate 15 then passes through the through slot 11 and pushes the silicon wafer carrying basket to move. Since the placement slot 9 is horizontally aligned with the top insertion area of ​​the carrying basket, the push plate 15 pushes the silicon wafer into the insertion area, thus completing the wafer insertion work. After the wafer insertion is completed, the controller 16 will turn on motor 5 and motor 105. Motor 5 will drive the next placement slot 9 to move horizontally with the conveyor belt 3 for loading. Motor 105 will drive the lead screw 102 to rotate. The lead screw 102 is threadedly connected to the slider 103. Motor 105 is activated. This will then cause the slider 103 to rise, which in turn will cause the lifting plate 104 to rise. After the lifting plate 104 rises, it will cause the carrying basket to rise. After the carrying basket rises, it will adjust the next insertion area to be level with the rightmost storage slot 9. Using the same method, the insertion work of the next insertion area of ​​the carrying basket can be realized. By repeating the above operation, the silicon wafer can be inserted at the same time as the silicon wafer is fed, which can effectively improve the insertion efficiency. Moreover, there is no clamping force during insertion, avoiding micro-damage to the silicon wafer (such as clamping marks) caused by mechanical contact, thereby improving the practicality of the device.

[0030] Both motor 5 and motor 105 are motors with integrated encoders, which makes it easy for controller 16 to accurately control the rotation angle of rotating cylinder 4 and lead screw 102, thereby accurately controlling the position of storage slot 9 and the height of the flower basket.

[0031] Please see Figure 6 and 8The push plate 15 is fixedly connected to a square rod 18 on its left side. The square rod 18 is inserted into the mounting plate 14 and slidably connected thereto. The top of the mounting plate 14 is inserted into a screw rod 19 that is slidably connected thereto. The bottom end of the screw rod 19 is inserted into the square rod 18 and threadedly connected thereto.

[0032] In this invention, the square rod 18 can limit the movement between the mounting plate 14 and the push plate 15, and the screw 19 can lock the square rod 18 and the mounting plate 14. During long-term use, the push plate 15 is prone to wear, which affects the silicon wafer insertion effect. When this happens, the user can remove and replace the push plate 15 by rotating the screw 19 to maintain the length of the silicon wafer push, ensure the accuracy of the insertion, and improve the quality of the insertion.

[0033] Please see Figure 1 Among them: two positioning plates 20 are fixedly connected to the left side of the lifting plate 104, and an electric push rod 21 fixedly connected to it is inserted through the left side of the lifting plate 104. The telescopic end of the electric push rod 21 is fixedly connected to a locking plate 22.

[0034] In this utility model, the positioning plate 20 can be used to position the front and rear of the flower basket. After the electric push rod 21 is opened, it will drive the locking plate 22 to press the flower basket onto the lifting plate 104, thereby achieving the effect of positioning and locking the flower basket left and right.

[0035] The above are merely preferred embodiments of this utility model; however, the scope of protection of this utility model is not limited thereto. Any equivalent substitutions or modifications made by those skilled in the art within the scope of the technology disclosed in this utility model, based on the technical solution and its improved concept, should be included within the scope of protection of this utility model.

Claims

1. A flower basket plug mechanism comprising a support plate (1), characterized in that: A horizontal plate (2) is fixedly connected to the front of the support plate (1), and a conveyor belt (3) is installed on the top of the horizontal plate (2). A rotating cylinder (4) is rotatably connected to the front of the support plate (1). A motor (5) is fixedly connected to the back of the support plate (1). The output shaft of the motor (5) passes through the support plate (1) and is fixedly connected to the rotating cylinder (4). A bracket (6) is fixedly connected to the front of the support plate (1). A support rod (7) is fixedly connected to the inner side of the bracket (6). The outer side of the support rod (7) is rotatably connected to the inner wall of the rotating cylinder (4). Two rods are fitted on the rotating cylinder (4) and fixedly connected to it. The rotating plates (8) are connected, and the two rotating plates (8) are provided with annularly distributed storage slots (9) on opposite sides. The support plate (1) is provided with a lifting mechanism (10), which is located on the right side of the rotating cylinder (4). The rotating cylinder (4) is provided with annularly distributed through slots (11). The support rod (7) is provided with a groove (12). An electric push rod (13) is inserted through the inner wall of the groove (12) and is fixedly connected to it. The telescopic end of the electric push rod (13) is fixedly connected to an installation plate (14). The right side of the installation plate (14) is detachably connected to a push plate (15).

2. The flower basket insert mechanism of claim 1, wherein: The lifting mechanism (10) includes a slide (101), which is opened on the support plate (1). A lead screw (102) is rotatably connected to the inner wall of the slide (101). A slider (103) is threadedly connected to the lead screw (102). A lifting plate (104) is fixedly connected to the front of the slider (103). A second motor (105) is fixedly connected to the top of the support plate (1). The output shaft of the second motor (105) passes through the support plate (1) and is fixedly connected to the lead screw (102).

3. The flower basket insert mechanism of claim 2, wherein: The front of the bracket (6) is equipped with a controller (16) that controls the opening and closing of the conveyor belt (3), motor one (5), electric push rod one (13) and motor two (105). A distance sensor (17) is fixedly connected to the outside of the support rod (7). The output end of the distance sensor (17) is connected to the controller (16) via signal.

4. The flower basket insert mechanism of claim 1, wherein: A square rod (18) is fixedly connected to the left side of the push plate (15). The square rod (18) is inserted into the mounting plate (14) and slidably connected thereto. A screw (19) is inserted into the top of the mounting plate (14) and slidably connected thereto. The bottom end of the screw (19) is inserted into the square rod (18) and threadedly connected thereto.

5. The flower basket insert mechanism according to claim 2, characterized in that: Two positioning plates (20) are fixedly connected to the left side of the lifting plate (104), and an electric push rod two (21) is fixedly connected to the left side of the lifting plate (104). A locking plate (22) is fixedly connected to the telescopic end of the electric push rod two (21).

Images