Semiconductor wafer handling robot hand

Abstract

The utility model discloses a kind of semiconductor wafer handling robot handle, comprising: the semiconductor wafer storage box of installation in the one side of handling robot, to be used to store semiconductor wafer;Handling robot driving part, it is set in the one side of semiconductor wafer storage box, and its top is equipped with the handling mechanical arm for driving robot handle, the one side of the handling mechanical arm is equipped with handle mechanism for semiconductor wafer handling;The utility model is by installing protective pad in handle main part top, can when robot carries out semiconductor wafer handling, prevent robot handle and semiconductor wafer from the suction disc print and scratch problem generated by contact, wherein, the material of protective pad is high polymer silica gel component, it is soft, can play buffering effect in semiconductor wafer handling process, avoid semiconductor wafer and handle main part direct contact, to protect the appearance quality of semiconductor wafer, reduce the potential influence to semiconductor wafer performance, simultaneously, the edge of protective pad is bevel design, can prevent scratching semiconductor wafer in handling process.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing and testing equipment technology, specifically to a handle for a semiconductor wafer handling robot. Background Technology

[0002] Semiconductor technology is based on semiconductor materials (such as silicon and gallium arsenide) and uses processes such as wafer growth, photolithography, and etching to manufacture electronic components and integrated circuits. Its core is the integration of hundreds of millions of transistors onto silicon-based semiconductor wafers to form miniature circuits with control functions, which are widely used in computers, communication equipment, and other fields.

[0003] In the semiconductor manufacturing process, the detection of defects in the appearance of semiconductor wafers is a key step to ensure product quality. However, when using robots to handle semiconductor wafers, especially for semiconductor wafers with multilayer gold or tin materials on the back, suction cup marks and scratches often occur due to the contact between the robot handle and the semiconductor wafer. This not only affects the appearance quality of the product, but also has the potential to affect the performance of the semiconductor wafer. Utility Model Content

[0004] The purpose of this invention is to provide a handle for a semiconductor wafer handling robot to solve the problems mentioned in the background art.

[0005] To achieve the above objectives, this utility model provides the following technical solution: a handle for a semiconductor wafer handling robot, comprising:

[0006] A semiconductor wafer storage box is installed on one side of the handling robot for storing semiconductor wafers;

[0007] A handling robot drive unit is located on one side of a semiconductor wafer storage box, and a handling robotic arm for driving the robot handle is mounted on its top. A handle mechanism for handling semiconductor wafers is mounted on one side of the handling robotic arm.

[0008] The handle mechanism includes a handle body mounted on one side of the handling robotic arm, and a protective pad for preventing scratches on the semiconductor wafer is mounted on the top of the handle body. Settling holes are provided on both sides of the top of the protective pad, and bolts are installed through the interior of the settling holes. The protective pad is fixed to the top of the handle body by bolts.

[0009] A fastener for easy replacement is installed between the handle body and the protective pad.

[0010] Preferably, the fastener includes a mounting hole formed on the surface of the handle body, and a mounting block is fixedly mounted on the bottom of the protective pad, the bottom of the mounting block passing through the mounting hole and extending into the interior of the mounting hole;

[0011] A limiting hole is provided on one side of the mounting block. A piston chamber is provided inside the handle body and on one side of the mounting hole. A piston plate is slidably installed inside the piston chamber. A first return spring is fixedly installed on one side of the piston plate. A limiting rod is fixedly installed on the other side of the piston plate. One end of the limiting rod passes through the handle body and extends into the interior of the mounting hole. The limiting rod and the limiting hole are engaged.

[0012] Preferably, a sliding cavity is provided inside the handle body and on one side of the piston chamber, a slide rod is fixedly installed on one side of the piston plate, and one end of the slide rod passes through the handle body and extends into the interior of the sliding cavity. An abutment block is fixedly installed at the end of the slide rod inside the sliding cavity.

[0013] An abutting groove is provided at the bottom of one side of the abutting block. A push block is slidably installed inside the sliding cavity. The push block is slidably connected to the push block through the abutting groove. A push rod is fixedly installed on one side of the push block. One end of the push rod passes through the handle body and extends to the outside of the handle body. A push plate is fixedly installed at the end of the push rod located outside the handle body.

[0014] Preferably, a second return spring is fixedly installed between the push plate and the handle body, and the second return spring is sleeved on the surface of the push rod to drive the push block to automatically reset.

[0015] Preferably, the protective pad has beveled edges and corners, and the protective pad is made of high-molecular silicone.

[0016] Preferably, the top of the handle body is provided with an annular hole, and a push-out spring is installed inside the annular hole, with the top of the push-out spring contacting the bottom of the protective pad.

[0017] Compared with the prior art, the beneficial effects of this utility model are:

[0018] 1. This utility model, by installing a protective pad on the top of the handle body, can prevent suction cup marks and scratches caused by contact between the robot handle and the semiconductor wafer during the robot's handling of semiconductor wafers. The protective pad is made of high-polymer silicone, which is soft and can act as a buffer during the handling of semiconductor wafers, preventing direct contact between the semiconductor wafer and the handle body, thereby protecting the appearance quality of the semiconductor wafer and reducing the potential impact on the performance of the semiconductor wafer. At the same time, the corners of the protective pad are beveled to prevent scratches on the semiconductor wafer during handling.

[0019] 2. By using a fixing component, when the protective pad becomes worn or damaged after a period of use, the limiting rod can be disengaged from the limiting hole by operating the push plate, allowing the protective pad to be easily removed for replacement. Specifically, pushing the push plate causes the push rod to move the push block, which in turn moves the abutment block through the abutment groove. The abutment block then moves the piston plate through the slide rod, compressing the first return spring. The limiting rod then disengages from the limiting hole, allowing the protective pad to be removed from the handle body. This avoids the situation where the protective pad is difficult to replace after a period of use due to wear or damage. Attached Figure Description

[0020] Figure 1 This is a schematic diagram of the overall structure of this utility model;

[0021] Figure 2 This is a schematic diagram of the disassembled structure of the handle mechanism of this utility model;

[0022] Figure 3 This is a partial structural schematic diagram of the handle mechanism of this utility model;

[0023] Figure 4 This utility model Figure 3 Enlarged structural diagram at point A;

[0024] Figure 5 This is a schematic diagram of the abutment groove structure of this utility model.

[0025] In the diagram: 1. Semiconductor wafer storage box; 2. Handling robot drive unit; 3. Handling robotic arm; 4. Handle mechanism; 41. Handle body; 42. Protective pad; 43. Settling hole; 44. Bolt; 45. Fixing component; 451. Mounting hole; 452. Mounting block; 453. Limiting hole; 454. Piston plate; 455. First return spring; 456. Limiting rod; 457. Sliding cavity; 458. Sliding rod; 459. Abutting block; 4501. Abutting groove; 4502. Push block; 4503. Push rod; 4504. Push plate; 4505. Second return spring; 46. Annular hole; 47. Push spring. Detailed Implementation

[0026] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0027] Please see Figures 1-5 This utility model provides a technical solution: a handle for a semiconductor wafer handling robot, comprising:

[0028] A semiconductor wafer storage box 1 is installed on one side of the handling robot for storing semiconductor wafers;

[0029] The handling robot drive unit 2 is located on one side of the semiconductor wafer storage box 1, and a handling mechanical arm 3 for driving the robot handle is installed on its top. A handle mechanism 4 for handling semiconductor wafers is installed on one side of the handling mechanical arm 3.

[0030] The handle mechanism 4 includes a handle body 41 installed on one side of the handling robotic arm 3, and a protective pad 42 for preventing scratches on semiconductor wafers is installed on the top of the handle body 41. Settling holes 43 are provided on both sides of the top of the protective pad 42, and bolts 44 are installed through the interior of the settling holes 43. The protective pad 42 is fixed to the top of the handle body 41 by the bolts 44.

[0031] A fastener 45 for easy replacement is installed between the handle body 41 and the protective pad 42.

[0032] Reference Figure 3 , Figure 4 as well as Figure 5 As shown, the fixing member 45 includes a mounting hole 451 opened on the surface of the handle body 41, and a mounting block 452 is fixedly installed on the bottom of the protective pad 42. The bottom of the mounting block 452 passes through the mounting hole 451 and extends into the interior of the mounting hole 451. A limiting hole 453 is opened on one side of the mounting block 452. A piston chamber is opened inside the handle body 41 and on one side of the mounting hole 451. A piston plate 454 is slidably installed inside the piston chamber. A first return spring 455 is fixedly installed on one side of the piston plate 454. A limiting rod 456 is fixedly installed on the other side of the piston plate 454. One end of the limiting rod 456 passes through the handle body 41 and extends into the interior of the mounting hole 451. The limiting rod 456 and the limiting hole 453 are engaged.

[0033] In this embodiment, when installing the protective pad 42, the mounting block 452 is inserted into the mounting hole 451. The mounting block 452 presses the limiting rod 456, causing the piston plate 454 to compress the first return spring 455. When the limiting hole 453 is aligned with the limiting rod 456, the first return spring 455 rebounds, causing the limiting rod 456 to engage in the limiting hole 453 and be fixed. When disassembling, the operation is reversed to make the limiting rod 456 exit the limiting hole 453, so that the connection between the protective pad 42 and the handle body 41 is stable, and it is easy to install and disassemble, and convenient to replace and maintain the protective pad 42.

[0034] Reference Figure 5As shown, a sliding cavity 457 is provided inside the handle body 41 and on one side of the piston chamber. A slide rod 458 is fixedly installed on one side of the piston plate 454. One end of the slide rod 458 passes through the handle body 41 and extends into the sliding cavity 457. An abutment block 459 is fixedly installed at the end of the slide rod 458 inside the sliding cavity 457. An abutment groove 4501 is provided at the bottom of one side of the abutment block 459. A push block 4502 is slidably installed inside the sliding cavity 457. The push block 4502 is slidably connected to the push block 4502 through the abutment groove 4501. A push rod 4503 is fixedly installed on one side of the push block 4502. One end of the push rod 4503 passes through the handle body 41 and extends to the outside of the handle body 41. A push plate 4504 is fixedly installed at the end of the push rod 4503 outside the handle body 41.

[0035] In this embodiment, the pusher 4504 is pushed, and the pusher 4503 drives the pusher 4502 to slide in the sliding cavity 457. The pusher 4502 pushes the abutment block 459 through the abutment groove 4501. The abutment block 459 drives the piston plate 454 to move through the slide rod 458, so that the limit rod 456 exits the limit hole 453. This allows the extension and retraction of the limit rod 456 to be controlled by the external operation of the pusher 4504, providing a convenient operation method for replacing the protective pad 42.

[0036] Reference Figure 5 As shown, a second return spring 4505 is fixedly installed between the push plate 4504 and the handle body 41, and the second return spring 4505 is sleeved on the surface of the push rod 4503 to drive the push block 4502 to automatically reset.

[0037] In this embodiment, the second reset spring 4505 ensures that the push block 4502 can automatically return to its initial position after operation, which facilitates the next operation and improves the efficiency and convenience of replacing the protective pad 42.

[0038] Reference Figure 2 as well as Figure 3 As shown, the corners of the protective pad 42 are beveled, and the material of the protective pad 42 is a high-polymer silicone component.

[0039] In this embodiment, the protective pad 42 effectively prevents suction cup marks and scratches from forming on the semiconductor wafer during handling, protects the appearance quality of the semiconductor wafer, reduces the potential impact on the performance of the semiconductor wafer, and the beveled design at its corners can prevent scratches on the semiconductor wafer.

[0040] Reference Figure 2 as well as Figure 3 As shown, an annular hole 46 is provided on the top of the handle body 41, and a push-out spring 47 is installed inside the annular hole 46. The top of the push-out spring 47 contacts the bottom of the protective pad 42.

[0041] In this embodiment, the push-out spring 47 makes it easier to separate the protective pad 42 from the handle body 41 during disassembly, further improving the convenience of replacing the protective pad 42.

[0042] Working principle: In use, the robot drive 2 drives the handling arm 3, which in turn drives the handle mechanism 4 to perform semiconductor wafer handling operations. The handle body 41 of the handle mechanism 4 is equipped with a protective pad 42 on its top. The protective pad 42 is fixed to the handle body 41 by bolts 44 and fasteners 45. When it is necessary to handle semiconductor wafers, the protective pad 42 contacts the semiconductor wafer to avoid direct contact between the semiconductor wafer and the handle body 41, thus preventing suction cup marks and scratches.

[0043] If the protective pad 42 needs to be replaced, push the push plate 4504, push rod 4503 drives push block 4502 to slide in sliding cavity 457, push block 4502 moves abutment block 459 through abutment groove 4501, abutment block 459 drives piston plate 454 to slide in piston cavity through slide rod 458, compressing first reset spring 455, causing limit rod 456 to exit from limit hole 453, at which time protective pad 42 can be removed from handle body 41.

[0044] Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of the present invention, the scope of which is defined by the appended claims and their equivalents.

Claims

1. A semiconductor wafer handling robot hand, characterized by, include: A semiconductor wafer storage box (1) is installed on one side of the handling robot for storing semiconductor wafers; The robot drive unit (2) is located on one side of the semiconductor wafer storage box (1), and a handling mechanical arm (3) for driving the robot handle is installed on its top. A handle mechanism (4) for handling semiconductor wafers is installed on one side of the handling mechanical arm (3). The handle mechanism (4) includes a handle body (41) installed on one side of the handling robot arm (3), and a protective pad (42) for preventing scratches on semiconductor wafers is installed on the top of the handle body (41). Settling holes (43) are provided on both sides of the top of the protective pad (42). Bolts (44) are installed through the interior of the settling holes (43). The protective pad (42) is fixed to the top of the handle body (41) by bolts (44). A fastener (45) for easy replacement is installed between the handle body (41) and the protective pad (42).

2. The robot handle for semiconductor wafer handling according to claim 1, wherein: The fastener (45) includes a mounting hole (451) opened on the surface of the handle body (41), and a mounting block (452) is fixedly installed on the bottom of the protective pad (42), the bottom of the mounting block (452) passing through the mounting hole (451) and extending into the interior of the mounting hole (451); A limiting hole (453) is provided on one side of the mounting block (452). A piston chamber is provided inside the handle body (41) and on one side of the mounting hole (451). A piston plate (454) is slidably installed inside the piston chamber. A first return spring (455) is fixedly installed on one side of the piston plate (454). A limiting rod (456) is fixedly installed on the other side of the piston plate (454). One end of the limiting rod (456) passes through the handle body (41) and extends into the interior of the mounting hole (451). The limiting rod (456) and the limiting hole (453) are engaged.

3. The robot handle of claim 2, wherein: A sliding cavity (457) is provided inside the handle body (41) and on one side of the piston chamber. A slide rod (458) is fixedly installed on one side of the piston plate (454). One end of the slide rod (458) passes through the handle body (41) and extends into the sliding cavity (457). An abutment block (459) is fixedly installed at the end of the slide rod (458) inside the sliding cavity (457). An abutment groove (4501) is provided at the bottom of one side of the abutment block (459). A push block (4502) is slidably installed inside the sliding cavity (457). The push block (4502) is slidably connected to the push block (4502) through the abutment groove (4501). A push rod (4503) is fixedly installed on one side of the push block (4502). One end of the push rod (4503) passes through the handle body (41) and extends to the outside of the handle body (41). A push plate (4504) is fixedly installed at the end of the push rod (4503) located outside the handle body (41).

4. The robot handle of claim 3, wherein: A second reset spring (4505) is fixedly installed between the push plate (4504) and the handle body (41), and the second reset spring (4505) is sleeved on the surface of the push rod (4503) to drive the push block (4502) to automatically reset.

5. The robot handle of claim 1, wherein: The protective pad (42) has a beveled design at the corners, and the protective pad (42) is made of high molecular weight silicone.

6. The handle for a semiconductor wafer handling robot according to claim 1, characterized in that: The top of the handle body (41) is provided with an annular hole (46), and a push-out spring (47) is installed inside the annular hole (46). The top of the push-out spring (47) is in contact with the bottom of the protective pad (42).

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