Semiconductor device precision component processing jig

Abstract

The utility model discloses a kind of semiconductor equipment precision spare part processing jigs, it is related to semiconductor jig technical field, including base, fixed mounting has jig base on base, fixed mounting has protective cover on jig base, positioning mechanism is installed on jig base, positioning mechanism includes fixed mounting on the pivot seat of jig base, right shaft body is rotatably installed in one side of jig base, left shaft body is movably installed in the other side of jig base, clamping block is fixedly installed in right shaft body and left shaft body end, driving assembly is installed in one side of jig base, resistance rubber ring is sleeved on right shaft body, front stop ring is fixedly installed in left shaft body front end, rear stop ring is fixedly installed in left shaft body rear end;The semiconductor equipment precision spare part processing jig, by the cooperation of positioning mechanism and driving assembly, workpiece can be positioned on jig base, and workpiece positioned on jig base can be turned over, and workpiece two sides can be conveniently machined.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor fixture technology, specifically a precision component processing fixture for semiconductor equipment. Background Technology

[0002] Semiconductors are unique materials whose conductivity lies between that of conductors and insulators. Their core characteristic is that their conductivity can be precisely "controlled." By introducing specific impurities (doping) or applying external voltage, light, temperature changes, etc., their conductivity state can be flexibly changed. During the extension process of semiconductor devices, fixtures are required to position the workpiece.

[0003] In the prior art, patent announcement number CN218397003U discloses a semiconductor precision component processing fixture, including a device body, a placement stage, a support plate, a stabilizing mechanism, and a movable mechanism. The placement stage is located on the device body, the support plate is disposed above the placement stage, the stabilizing mechanism is disposed above the placement stage, and the movable mechanism is disposed on the support plate. A screw hole is opened in the center of the slider, and the slider is connected to the threaded rod through the central screw hole.

[0004] Specialized fixtures can securely fix semiconductor workpieces in predetermined processing positions, ensuring processing accuracy and stability. However, in actual production, situations often arise where both sides of a semiconductor workpiece need to be processed. In such cases, operators must first process one side of the workpiece, then remove it from the fixture, reinstall and fix the other side, and then perform the second processing operation. This repeated disassembly and reassembly process not only increases workload and reduces production efficiency but may also cause damage to the workpiece or positioning errors during the disassembly and reassembly process, causing numerous inconveniences to production. Utility Model Content

[0005] The purpose of this invention is to provide a precision component processing fixture for semiconductor equipment to solve the problems in the prior art.

[0006] To achieve the above objectives, this utility model provides the following technical solution: a precision component processing fixture for semiconductor equipment, comprising a base, a fixture base fixedly mounted on the base, a protective cover fixedly mounted on the fixture base, a semiconductor workpiece placed on the fixture base, a positioning mechanism mounted on the fixture base, the positioning mechanism comprising a rotating shaft fixedly mounted on the fixture base, a right shaft rotatably mounted on one side of the fixture base, a left shaft movably mounted on the other side of the fixture base, clamping blocks fixedly mounted at the ends of both the right and left shafts, and a drive assembly mounted on one side of the fixture base.

[0007] Preferably, a resistance rubber ring is fitted on the right shaft, a front stop ring is fixedly installed at the front end of the left shaft, and a rear stop ring is fixedly installed at the rear end of the left shaft.

[0008] Preferably, the right shaft body has a mounting groove, and the resistance rubber ring is mounted on the right shaft body through the mounting groove.

[0009] Preferably, both the right and left shafts are movably mounted on the fixture base via a rotating shaft seat, and the left shaft is restricted on the rotating shaft seat by a front stop ring and a rear stop ring.

[0010] Preferably, the drive assembly includes a cylinder fixedly mounted on the fixture base and a drive rod fixedly mounted on the end of the left shaft. The drive rod has a guide groove. A sleeve is fixedly mounted on the output end of the cylinder. A limiting spring is provided inside the sleeve. A spring seat is slidably mounted inside the sleeve. A sliding support foot is fixedly mounted on the front end of the sleeve and is slidably mounted in the guide groove.

[0011] Preferably, the front half of the guide groove is spiral in shape with a spiral angle of 180°, and the rear half is straight in shape.

[0012] Preferably, bolts are connected to the fixture base, and the cylinder is fixedly installed on the fixture base by bolts.

[0013] Preferably, one end of the drive rod is fixedly mounted on the left shaft, the other end of the drive rod abuts against the spring seat, one end of the limiting spring is connected to the bottom of the sleeve, and the other end of the limiting spring is connected to the spring seat.

[0014] Compared with the prior art, the beneficial effects of this utility model are: 1. In this application, after the cylinder extends, it drives the sleeve to move forward. The forward movement of the sleeve causes the spring seat to push the drive rod forward. After the drive rod moves forward, it drives the left shaft to move forward. The forward movement of the left shaft then drives one side clamping block to move forward, so that the clamping block clamps the workpiece and quickly positions the workpiece on the fixture base to carry out single-sided machining operations on the workpiece.

[0015] 2. In this application, after one side of the workpiece is machined, the cylinder can be controlled to extend continuously. As the cylinder extends continuously, the sliding support foot will move forward along the guide groove. When the sliding support foot slides to the spiral part of the groove, the drive rod will be forced to twist a certain angle. After the drive rod twists this angle, it will drive the left shaft to twist by the same angle. After the left shaft twists this angle, it will drive the clamping block to twist by the same angle, thereby enabling the workpiece to be quickly flipped over to carry out the machining operation on the other side of the workpiece. Attached Figure Description

[0016] Figure 1 This is a schematic diagram of the overall structure of this utility model; Figure 2 This is a partial structural schematic diagram of the present invention; Figure 3 This is a schematic diagram of the positioning mechanism of this utility model; Figure 4 This is a schematic diagram of the drive mechanism of this utility model; Figure 5 This utility model Figure 4 Enlarged view of point A in the middle.

[0017] The markings in the diagram are: 1. Base; 2. Fixture base; 3. Protective cover; 4. Semiconductor workpiece; 5. Positioning mechanism; 501. Resistance rubber ring; 502. Right shaft; 503. Clamping block; 504. Left shaft; 505. Front stop ring; 506. Rotary shaft seat; 507. Rear stop ring; 6. Drive assembly; 601. Cylinder; 602. Sleeve; 603. Limit spring; 604. Drive rod; 605. Guide groove; 606. Sliding support; 607. Spring seat. Detailed Implementation

[0018] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative effort are within the protection scope of the present utility model.

[0019] like Figure 1 and Figure 2 As shown, this utility model provides a technical solution for a precision component processing fixture for semiconductor equipment, including a base 1, a fixture base 2 fixedly installed on the base 1, a protective cover 3 fixedly installed on the fixture base 2, a semiconductor workpiece 4 placed on the fixture base 2, a positioning mechanism 5 installed on the fixture base 2, and a drive assembly 6 installed on one side of the fixture base 2.

[0020] Specifically, by using the positioning mechanism 5 in conjunction with the drive component 6, the workpiece can be positioned on the fixture base 2, and the workpiece positioned on the fixture base 2 can be flipped, which facilitates processing on both sides of the workpiece.

[0021] like Figure 2 and Figure 3As shown, the positioning mechanism 5 includes a rotating shaft seat 506 fixedly installed on the fixture base 2. A right shaft body 502 is rotatably installed on one side of the fixture base 2, and a left shaft body 504 is movably installed on the other side of the fixture base 2. Clamping blocks 503 are fixedly installed at the ends of both the right shaft body 502 and the left shaft body 504. A resistance rubber ring 501 is sleeved on the right shaft body 502. A front stop ring 505 is fixedly installed at the front end of the left shaft body 504, and a rear stop ring 507 is fixedly installed at the rear end of the left shaft body 504. An installation groove is opened on the right shaft body 502, and the resistance rubber ring 501 is installed on the right shaft body 502 through the installation groove.

[0022] Specifically, after the cylinder 601 extends, it drives the sleeve 602 to move forward. When the sleeve 602 moves forward, the spring seat 607 pushes the drive rod 604 to move forward. After the drive rod 604 moves forward, it drives the left shaft 504 to move forward. After the left shaft 504 moves forward, it drives the clamping block 503 on one side to move forward, so that the clamping block 503 clamps the workpiece and quickly positions the workpiece on the fixture base 2 for machining operations on one side of the workpiece.

[0023] like Figure 2 , Figure 4 and Figure 5 As shown, the drive assembly 6 includes a cylinder 601 fixedly mounted on the fixture base 2 and a drive rod 604 fixedly mounted on the end of the left shaft 504. The drive rod 604 has a guide groove 605. A sleeve 602 is fixedly mounted on the output end of the cylinder 601. A limit spring 603 is provided in the sleeve 602. A spring seat 607 is slidably mounted in the sleeve 602. A sliding support 606 is fixedly mounted on the front end of the sleeve 602 and is slidably mounted in the guide groove 605. The front half of the guide groove 605 is spiral in shape with a spiral angle of 180°, and the rear half is straight. Bolts are connected to the fixture base 2, and the cylinder 601 is fixedly mounted on the fixture base 2 by bolts.

[0024] Specifically, after one side of the workpiece is machined, the cylinder 601 can be controlled to continue extending. As the cylinder 601 continues to extend, the sliding support 606 moves forward along the guide groove 605. When the sliding support 606 slides to the spiral part of the groove, the drive rod 604 is forced to twist 180°. After the drive rod 604 twists 180°, it will drive the left shaft 504 to twist 180°. After the left shaft 504 twists 180°, it will drive the clamping block 503 to twist 180°, thereby quickly flipping the workpiece so that the other side of the workpiece can be machined.

[0025] Working principle: When in use, first place the workpiece between the clamping blocks 503, then control the cylinder 601 to extend. After the cylinder 601 extends, it will drive the sleeve 602 to move forward. When the sleeve 602 moves forward, the spring seat 607 will push the drive rod 604 to move forward. After the drive rod 604 moves forward, it will drive the left shaft 504 to move forward. After the left shaft 504 moves forward, it will drive the clamping block 503 on one side to move forward, so that the clamping block 503 clamps the workpiece and quickly positions the workpiece on the fixture base 2 so that one side of the workpiece can be processed. After one side of the workpiece is processed, the cylinder 601 can be controlled to continue extending. After the cylinder 601 continues to extend, the sliding support 606 will move forward along the guide groove 605. When the sliding support 606 slides to the spiral part of the groove, the drive rod 604 will be forced to twist 180°. After the drive rod 604 twists 180°, it will drive the left shaft 504 to twist 180°. After the left shaft 504 twists 180°, it will drive the clamping block 503 to twist 180°, so that the workpiece can be quickly flipped over so that the other side of the workpiece can be processed.

[0026] It will be apparent to those skilled in the art that this invention is not limited to the details of the exemplary embodiments described above, and that it can be implemented in other specific forms without departing from the spirit or essential characteristics of this invention. Therefore, the embodiments should be considered illustrative and non-limiting in all respects, and the scope of this invention is defined by the appended claims rather than the foregoing description. Thus, it is intended that all variations falling within the meaning and scope of equivalents of the claims be included within this invention. No reference numerals in the claims should be construed as limiting the scope of the claims.

Claims

1. A precision component processing fixture for semiconductor equipment, comprising a base (1), a fixture base (2) fixedly mounted on the base (1), a protective cover (3) fixedly mounted on the fixture base (2), and a semiconductor workpiece (4) placed on the fixture base (2), characterized in that: A positioning mechanism (5) is installed on the fixture base (2). The positioning mechanism (5) includes a rotating shaft seat (506) fixedly installed on the fixture base (2). A right shaft (502) is rotatably installed on one side of the fixture base (2), and a left shaft (504) is movably installed on the other side of the fixture base (2). Clamping blocks (503) are fixedly installed at the ends of both the right shaft (502) and the left shaft (504). A drive assembly (6) is installed on one side of the fixture base (2).

2. The semiconductor device precision component processing jig according to claim 1, characterized by: The right shaft (502) is fitted with a resistance rubber ring (501), the front end of the left shaft (504) is fixedly installed with a front stop ring (505), and the rear end of the left shaft (504) is fixedly installed with a rear stop ring (507).

3. The semiconductor device precision component processing jig according to claim 2, characterized by: The right shaft (502) is provided with a mounting groove, and the resistance rubber ring (501) is installed on the right shaft (502) through the mounting groove.

4. The semiconductor device precision component processing jig according to claim 3, characterized by: The right shaft (502) and the left shaft (504) are both movably mounted on the fixture base (2) via a rotating shaft seat (506). The left shaft (504) is restricted on the rotating shaft seat (506) by a front stop ring (505) and a rear stop ring (507).

5. The semiconductor device precision component processing jig according to claim 4, characterized by: The drive assembly (6) includes a cylinder (601) fixedly mounted on the fixture base (2) and a drive rod (604) fixedly mounted on the end of the left shaft (504). The drive rod (604) has a guide groove (605). A sleeve (602) is fixedly mounted on the output end of the cylinder (601). A limit spring (603) is provided in the sleeve (602). A spring seat (607) is slidably mounted in the sleeve (602). A sliding support foot (606) is fixedly mounted on the front end of the sleeve (602), and the sliding support foot (606) is slidably mounted in the guide groove (605).

6. The semiconductor device precision component processing jig according to claim 5, wherein: The front half of the guide groove (605) is spiral in shape with a spiral angle of 180°, and the rear half is straight in shape.

7. The semiconductor device precision component processing jig according to claim 6, characterized by: Bolts are connected to the fixture base (2), and the cylinder (601) is fixedly installed on the fixture base (2) by bolts.

8. The semiconductor device precision component processing jig according to claim 7, characterized by: One end of the drive rod (604) is fixedly installed on the left shaft (504), and the other end of the drive rod (604) abuts against the spring seat (607). One end of the limiting spring (603) is connected to the bottom of the sleeve (602), and the other end of the limiting spring (603) is connected to the spring seat (607).

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