End effector with compensating tilt structure

Abstract

The utility model provides a kind of end effector with compensation inclination structure, including at least two configuration sections, and connecting area is formed between adjacent configuration sections. At least one connecting area is equipped with first compensation inclination structure, and first compensation inclination structure includes at least two adjusting pieces, and at least two adjusting pieces are connected adjacent configuration sections and form interval distribution adjusting point, and the relative angle between adjacent configuration sections is adjusted by adjusting each adjusting piece to change the spacing of adjacent configuration sections at corresponding adjusting point;And / or, at least one connecting area is equipped with second compensation inclination structure, and at least one configuration section in at least two configuration sections has vertically spaced installation part and calibration part, and second compensation inclination structure is detachably mounted on installation part and calibration part, and the calibration part is elastically deflected towards the direction of approaching or moving away from installation part by adjusting second compensation inclination structure. The utility model adjusts the inclination between adjacent configuration sections by setting first compensation inclination structure and / or second compensation inclination structure.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor manufacturing equipment technology, and in particular to an end effector with a tilt compensation structure. Background Technology

[0002] In the semiconductor wafer manufacturing process, the end effector of the wafer transfer robot is the core component for achieving high-precision wafer transfer, and its structural design directly affects the safety, stability and efficiency of wafer transfer.

[0003] As the core carrier, the wafer (silicon wafer, silicon carbide, sapphire substrate, etc.) needs to undergo dozens of high-precision processes such as photolithography, thin film deposition, ion implantation, and dicing.

[0004] The root and bearing of existing end effectors are usually rigidly fixed or simply clearance-fitted, and their core defect is the lack of tilt compensation capability.

[0005] In view of this, it is necessary to propose an end effector with a tilt compensation structure to solve the above problems. Utility Model Content

[0006] The purpose of this invention is to provide an end effector with a tilt compensation structure to solve the problem of the lack of tilt compensation adjustment in existing end effectors.

[0007] This invention provides an end effector with a tilt compensation structure, comprising at least two structural segments, with a connection area formed between adjacent structural segments.

[0008] At least one of the connecting areas is provided with a first compensation tilt structure, the first compensation tilt structure including at least two adjusting members, the at least two adjusting members being respectively connected to adjacent structural segments and forming spaced adjustment points, the relative angle between adjacent structural segments being adjusted by adjusting each of the adjusting members to change the spacing between adjacent structural segments at the corresponding adjustment points; and / or, At least one of the connecting areas is provided with a second tilt compensation structure, and at least one of the at least two structural sections has a mounting portion and a calibration portion arranged vertically at intervals. The second tilt compensation structure is detachably mounted on the mounting portion and the calibration portion, and the calibration portion is elastically deflected toward or away from the mounting portion by adjusting the second tilt compensation structure.

[0009] In one possible embodiment, the at least two structural segments include a main body segment, a connecting segment, and a finger segment. For the case where the first compensation tilt structure is provided, the first compensation tilt structure is provided in the connection area between the main body segment and the connecting segment and / or the connection area between the connecting segment and the finger segment.

[0010] In one possible embodiment, the at least two structural segments include a main body segment, a connecting segment, and a finger segment. For the case where the second compensation tilt structure is provided, the second compensation tilt structure is provided in the connection area between the main body segment and the connecting segment and / or the connection area between the connecting segment and the finger segment.

[0011] In one possible embodiment, for the case where the first compensation tilt structure is provided, one of the adjacent structural segments of the first compensation tilt structure is provided with a groove corresponding to each of the adjusting members, and the adjusting member is located at the corresponding groove. The first compensation tilt structure also includes an elastic element installed in the groove and elastically supporting the connection of the two structural segments of the adjusting member. In one possible embodiment, the bottom wall of the groove protrudes towards the groove opening to form a protrusion, the protrusion and the side wall of the groove enclose a receiving cavity to accommodate the elastic member, and the adjusting member is installed at the protrusion. In one possible embodiment, for the case where the second compensation tilt structure is provided, the second compensation tilt structure includes a tightening member detachably mounted on the mounting portion and the calibration portion, and the calibration portion is elastically deflected toward the mounting portion by the tightening force of the tightening member.

[0012] In one possible embodiment, the second compensation tilt structure further includes a support member that is vertically movable and adjustable on the mounting portion. After the tightening restriction of the tightening member is released, the support member moves downward and abuts against the calibration portion to form rigid contact. The pushing force of the support member forces the calibration portion to elastically deflect away from the mounting portion.

[0013] In one possible embodiment, for the case where the second compensation tilt structure is provided, one of the adjacent structural segments of the second compensation tilt structure has a channel extending through it along its width direction. The channel extends to one side of the structural segment in the vertical direction. At least a portion of the channel is located outside the calibration part. The calibration part and the end side part located on the same side of the channel are separated by the channel. The end side part is connected to the calibration part.

[0014] In one possible embodiment, the channel includes a first passage and a second passage located on both sides, and a third passage connecting the first passage and the second passage, the third passage extending in a curved direction away from the end side and located outside the calibration section.

[0015] In one possible embodiment, the structural segment of the channel has an opening on the side away from the end portion corresponding to the third passage, and the opening cuts through the third passage of the structural segment to form the mounting portion and the calibration portion located on opposite vertical sides of the opening.

[0016] In one possible embodiment, a load portion is provided horizontally on the side of the end portion away from the channel.

[0017] The advantages of the end effector with a tilt-compensation structure provided by this utility model are as follows: 1. By adjusting each adjustment component, the distance between adjacent structural segments at each adjustment point can be adjusted individually to adjust the relative angle between adjacent structural segments.

[0018] 2. The elastic element is elastically supported between the adjacent structural sections, so that there is a relative floating space between the two structural sections, which enables coarse adjustment of the pitch angle of the two structural sections.

[0019] 3. By adjusting the second compensation tilt structure, the calibration part is elastically deflected towards or away from the mounting part, thereby achieving the pitch tilt angle adjustment between adjacent structural sections.

[0020] 4. By adjusting the tightening component, the tightening force of the tightening component causes the calibration part to elastically deflect towards the mounting part, reducing the opening degree of the opening and channel, thereby achieving downward tilt angle compensation adjustment.

[0021] 5. The support member abuts against the calibration part to form a rigid contact. The pushing force of the support member forces the calibration part to elastically deflect away from the installation part, expanding the opening and the degree of opening of the channel, and realizing upward tilt angle compensation adjustment.

[0022] 6. The tightening and spreading components work together mechanically to achieve stepless tilt compensation. After tilt adjustment is completed, the tightening component provides preload force, and the spreading component provides support force, thus forming a two-way force balance and locking the calibration unit at the target deflection position. Attached Figure Description

[0023] Figure 1 This is a schematic diagram of the end effector with a compensating tilt angle structure according to the present invention.

[0024] Figure 2 This is an exploded view of the end effector with a compensating tilt angle structure according to this utility model.

[0025] Figure 3 This is a schematic diagram of a structural segment of the end effector with a compensated tilt angle structure of this utility model from one perspective.

[0026] Figure 4This is a cross-sectional view of a structural section of the end effector with a compensating tilt angle structure of this utility model.

[0027] Figure 5 This is a schematic diagram of one of the structural segments of the end effector with a compensated tilt angle structure of this utility model from another perspective.

[0028] Explanation of reference numerals in the attached drawings: 100, structural section; 101, main body section; 102, connecting section; 1021, fastener; 1022, support member; 103, finger section; 110, mounting part; 111, mounting hole; 112, assembly hole; 120, calibration part; 121, calibration hole; 122, abutment surface; 130, end side; 140, load part; 141, fixing hole; 151, first vertical surface; 152, horizontal surface; 153, second vertical surface; 161, mounting groove; 162, first adjustment hole; 163, cover plate; 170, groove; 171, protrusion; 1711, second adjustment hole; 172, elastic member; 180, channel; 181, first through section; 182, second through section; 183, third through section; 190, opening. Detailed Implementation

[0029] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0030] To address the problems existing in the prior art, embodiments of this utility model provide an end effector with a tilt-compensation structure, see [link to relevant documentation]. Figure 1 and Figure 2 The end effector includes at least two construction segments 100, with a connection area formed between adjacent construction segments 100.

[0031] This utility model proposes three different embodiments: only setting a first compensation tilt structure, only setting a second compensation tilt structure, and setting both a first compensation tilt structure and a second compensation tilt structure.

[0032] In the first embodiment, see Figure 2 and Figure 3 At least one connecting area is provided with a first compensation tilt structure. The first compensation tilt structure includes at least two adjusting members. The at least two adjusting members are respectively connected to adjacent structural segments 100 and form adjustment points distributed at intervals. By adjusting each adjusting member, the distance between adjacent structural segments 100 at the corresponding adjustment points is changed, so as to adjust the relative angle between adjacent structural segments 100.

[0033] In the second embodiment, see Figure 2 and Figure 3 At least one connection area is provided with a second compensation tilt structure, and at least one of the at least two construction sections 100 has a mounting part 110 and a calibration part 120 arranged vertically at intervals. The second compensation tilt structure is detachably mounted on the mounting part 110 and the calibration part 120. By adjusting the second compensation tilt structure, the calibration part 120 is elastically deflected toward or away from the mounting part 110.

[0034] In the third embodiment, see Figure 2 and Figure 3 At least one connecting area is provided with a first compensation tilt structure, which includes at least two adjusting members. The at least two adjusting members are respectively connected to adjacent structural segments 100 and form adjustment points distributed at intervals. By adjusting each adjusting member, the distance between adjacent structural segments 100 at the corresponding adjustment points is changed, thereby adjusting the relative angle between adjacent structural segments 100. At least one connecting area is provided with a second compensation tilt structure. At least one of the at least two structural segments 100 has a mounting portion 110 and a calibration portion 120 arranged at intervals in the vertical direction. The second compensation tilt structure is detachably mounted on the mounting portion 110 and the calibration portion 120. By adjusting the second compensation tilt structure, the calibration portion 120 is elastically deflected towards or away from the mounting portion 110.

[0035] It is worth noting that the number, distribution, and type of adjusting components in the first tilt compensation structure can be flexibly set according to actual needs, and are not specifically limited here. Adjusting components include those distributed in the left-right and / or front-back directions. Since adjusting each adjusting component can change the spacing between adjacent structural segments 100 at corresponding adjustment points, for example, adjusting the adjusting components in the left-right direction can achieve left-right tilt adjustment between adjacent structural segments 100, and adjusting the adjusting components in the front-back direction can achieve pitch adjustment between adjacent structural segments 100.

[0036] Mounting section 110 and calibration section 120 are vertically spaced on structural section 100. By adjusting the second compensation tilt structure, calibration section 120 is elastically deflected toward or away from mounting section 110, thereby achieving pitch tilt adjustment between adjacent structural sections 100.

[0037] It should be noted that the number of structural segments 100 can be flexibly set according to actual needs, and no specific limit is made here. The required tilt angle compensation adjustment between any two adjacent structural segments 100 can be achieved through at least one of the three different embodiments described above: setting only the first tilt angle compensation structure, setting only the second tilt angle compensation structure, and setting both the first and second tilt angle compensation structures.

[0038] To facilitate understanding, the distribution of the compensating tilt structure will be explained below using three structural segments 100 as examples.

[0039] In one specific embodiment, see Figure 1 and Figure 2 At least two structural segments 100 include a main body segment 101, a connecting segment 102, and a finger segment 103. For the case of setting a first compensation tilt structure, that is, including two specific cases: setting only a first compensation tilt structure and setting a first compensation tilt structure and a second compensation tilt structure, the first compensation tilt structure is set in the connection area between the main body segment 101 and the connecting segment 102 and / or the connection area between the connecting segment 102 and the finger segment 103.

[0040] In another specific embodiment, see Figure 1 and Figure 2 At least two structural segments 100 include a main body segment 101, a connecting segment 102, and a finger segment 103. For the case of setting a second compensation tilt structure, that is, including two specific cases: setting only a second compensation tilt structure and setting a first compensation tilt structure and a second compensation tilt structure, the second compensation tilt structure is set in the connection area between the main body segment 101 and the connecting segment 102 and / or the connection area between the connecting segment 102 and the finger segment 103.

[0041] Specifically, finger segment 103 is at least one and is configured to carry a wafer.

[0042] The specific design of the first compensation tilt structure will be explained in detail below.

[0043] In one embodiment, see Figure 2 and Figure 3 In the case of setting a first tilt compensation structure, one of the adjacent structural segments 100 with the first tilt compensation structure is provided with a groove 170 corresponding to each adjusting member, and the adjusting member is located at the corresponding groove 170. The first tilt compensation structure also includes an elastic member 172 installed in the groove 170 and elastically supporting the connection between the two structural segments 100. Specifically, the elastic member 172 is a spring, rubber ring, etc. The elastic element 172 is elastically supported between the adjacent structural segments 100. The elastic preload of the elastic element 172 allows for relative floating space between the adjacent structural segments 100 in the vertical direction, thereby achieving micro-gap compensation and coarse adjustment of the pitch angle between the adjacent structural segments 100.

[0044] Further, see Figure 3 and Figure 4The bottom wall of the groove 170 protrudes towards the groove opening to form a protrusion 171. The protrusion 171 and the side wall of the groove 170 enclose a receiving cavity to accommodate the elastic element 172. The protrusion 171 is cylindrical, and the elastic element 172 is annular and fits into the annular receiving cavity. An adjusting element is installed at the protrusion 171.

[0045] Furthermore, see Figure 3 and Figure 4 The protrusion 171 has a second adjustment hole 1711 at its center for installing an adjustment component, specifically, the adjustment component is a bolt, screw, etc.

[0046] On one hand, the adjusting member can adjust the distance between adjacent structural segments 100 at the adjustment point, thereby finely adjusting the left and right tilt angles and / or pitch angles between adjacent structural segments 100. On the other hand, the elastic member 172 can coarsely adjust the pitch angles between adjacent structural segments 100. The adjusting member is installed at the protrusion 171 within the groove 170, and the groove 170 also accommodates the elastic member 172. The groove 170 integrates both coarse pitch adjustment and fine left and right tilt angle adjustment, improving integration and reducing space occupation.

[0047] In one specific embodiment, see Figure 2 In the adjacent structural segments 100 with the first compensation tilt structure, the end face of one structural segment 100 near the other structural segment 100 is stepped and includes a first vertical surface 151, a second vertical surface 153 and a horizontal surface 152 connecting the first vertical surface 151 and the second vertical surface 153. The second vertical surface 153 is provided with a receiving groove. A part of the connecting area of ​​the other structural segment 100 is located in the receiving groove and the other part abuts against the horizontal surface 152.

[0048] In another specific embodiment, see Figure 2 In the adjacent structural segment 100 with the first compensation tilt structure, the other structural segment 100 is provided with a mounting groove 161 on the side away from the first structural segment 100. The bottom wall of the mounting groove 161 is provided with a first adjustment hole 162 that penetrates the other structural segment 100 and is used to install the adjustment component. A cover plate 163 is installed in the mounting groove 161. The cover plate 163 is flush with the surface of the other structural segment 100 to close the mounting position of the adjustment component.

[0049] The following is a detailed explanation of the specific structure of the construction segment 100 with the second compensation tilt structure.

[0050] In one embodiment, see Figure 3 , Figure 4 and Figure 5In the case of setting a second compensation tilt structure, one of the adjacent structural segments 100 in which the second compensation tilt structure is set has a channel 180 that extends through it along its width direction. The channel 180 extends to one side of the structural segment 100 in the vertical direction. At least a portion of the channel 180 is located outside the calibration section 120. The calibration section 120 and the end side section 130 located on the same side of the channel 180 are separated by the channel 180. The end side section 130 is connected to the calibration section 120.

[0051] By utilizing the elastic deflection mechanism formed by the channel 180 and the calibration unit 120, the calibration unit 120 can be elastically deflected towards the mounting unit 110 by adjusting the second compensation tilt structure, thereby reducing the opening degree of the channel 180; or, the calibration unit 120 can be elastically deflected away from the mounting unit 110, thereby increasing the opening degree of the channel 180, thus realizing the pitch angle adjustment between adjacent structural sections 100, and achieving stepless tilt angle compensation.

[0052] In one specific embodiment, see Figure 3 , Figure 4 and Figure 5 The channel 180 includes a first section 181 and a second section 182 located on both sides, and a third section 183 connecting the first section 181 and the second section 182. The third section 183 extends in a curved direction away from the end side 130 and is located outside the calibration section 120. By extending in a curved direction away from the end side 130 through the third section 183, the area of ​​the calibration section 120 is defined by the third section 183.

[0053] Further, see Figure 4 and Figure 5 The first section 181 and the second section 182 are straight, while the third section 183 is V-shaped, U-shaped, arc-shaped or curved.

[0054] In another specific embodiment, see Figure 3 An opening 190 is provided on the side of the structural segment 100 away from the end side 130, corresponding to the third passage 183. The opening 190 cuts through the third passage 183 of the structural segment 100 to form a mounting portion 110 and a calibration portion 120 located on opposite vertical sides of the opening 190. The opening 190 vertically separates the mounting portion 110 and the calibration portion 120, providing adjustment space for the elastic deflection of the calibration portion 120.

[0055] In a preferred embodiment, see Figure 3 , Figure 4 and Figure 5 A load portion 140 is horizontally provided on the side of the end portion 130 away from the channel 180. The load portion 140 is a cantilever structure and is integrally formed with the end portion 130.

[0056] In the adjacent structural sections 100 with the second compensation tilt structure, the load part 140 of one structural section 100 is connected to the other structural section 100. By adjusting the second compensation tilt structure, the calibration part 120 is elastically deflected towards or away from the mounting part 110, which adjusts the opening degree of the opening 190, and then adjusts the opening degree of the channel 180, thereby realizing the pitch tilt angle adjustment of the load part 140, that is, realizing the pitch tilt angle adjustment between the adjacent structural sections 100.

[0057] Further, see Figure 3 , Figure 4 and Figure 5 The load part 140 is provided with a fixing hole 141 for assembly.

[0058] The specific design of the second compensation tilt structure will be explained in detail below.

[0059] In one embodiment, see Figure 3 The second tilt compensation structure includes a tightening member detachably mounted on the mounting part 110 and the calibration part 120. The tightening force of the tightening member causes the calibration part 120 to elastically deflect towards the mounting part 110, reducing the opening degree of the opening 190 and the channel 180, thereby achieving downward tilt compensation adjustment. Specifically, the tightening member is a bolt, screw, etc.

[0060] Further, see Figure 3 , Figure 4 and Figure 5 The mounting part 110 is provided with a mounting hole 111, and the calibration part 120 is provided with a calibration hole 121. The tightening member is installed through the mounting hole 111 and the calibration hole 121.

[0061] In another embodiment, see Figure 3 The second tilt compensation structure also includes a vertically movable support member located on the mounting portion 110. After the tightening restriction of the tightening member is released, the support member moves downward and abuts against the calibration portion 120 to form rigid contact. The pushing force of the support member forces the calibration portion 120 to elastically deflect away from the mounting portion 110, increasing the opening degree of the opening 190 and the channel 180, thereby achieving upward tilt compensation adjustment. Specifically, the support member is a bolt, screw, etc.

[0062] Further, see Figure 4 and Figure 5 The calibration section 120 is triangular, semi-circular or trapezoidal, etc. The side of the calibration section 120 closest to the mounting section 110 is the contact surface 122, and the contact surface 122 is a horizontal surface 152.

[0063] Furthermore, see Figure 3 and Figure 4The mounting part 110 is provided with an assembly hole 112, and the support member is inserted and threaded into the assembly hole 112. The end of the support member abuts against the abutment surface 122 to form a rigid contact.

[0064] After the tightening member passes through the calibration hole 121 of the calibration part 120, it is screwed into the mounting hole 111 of the mounting part 110. By continuously tightening the tightening member, the axial force of the threaded pair drives the calibration part 120 to elastically deflect towards the mounting part 110, reducing the opening degree of the opening 190 between the two, thereby reducing the opening degree of the channel 180, causing the end side 130 to tilt into the channel 180. If the end side 130 is provided with a load part 140, it will also drive the load part 140 to tilt downward until the target downward tilt angle is reached.

[0065] The reverse screwing loosens the tightening member, restoring the opening 190 to the preset opening degree. The expansion member is screwed into the mounting hole 112. The end of the expansion member is linearly displaced towards the contact surface 122 under the action of the thread and forms a rigid contact. The expansion member is tightened further, and the calibrating part 120 is forced to elastically deflect away from the mounting part 110 by the pushing force, which expands the opening degree of the opening 190 between the two, thereby increasing the opening degree of the channel 180, so that the end side 130 tilts outward towards the channel 180. If the end side 130 is provided with a load part 140, it will also drive the load part 140 to tilt upward, realizing the upward tilt angle compensation.

[0066] Through the coordinated mechanical adjustment of the tightening and spreading components, the rotational motion of the threaded pair is converted into the linear deflection of the calibration section 120, achieving stepless tilt compensation between adjacent structural sections 100. After the tilt compensation adjustment is completed, the tightening and spreading components form a bidirectional force balance, with the spreading component providing support force and the tightening component providing preload force, locking the calibration section 120 at the target deflection position.

[0067] The following is a detailed explanation of an embodiment scheme that simultaneously sets up a first compensation tilt structure and a second compensation tilt structure.

[0068] See Figure 2 Taking the three structural segments 100—main segment 101, connecting segment 102, and finger segment 103—as an example, the connecting segment 102 includes an integrally formed fixing member 1021 and a supporting member 1022. The fixing member 1021 is connected to the main segment 101, forming a connection area between them. This connection area is provided with a first tilt compensation structure to adjust the left-right tilt angle and / or pitch angle between the main segment 101 and the connecting segment 102. The supporting member 1022 is connected to the finger segment 103, forming another connection area between them. This other connection area is provided with a second tilt compensation structure to adjust the pitch angle between the main segment 101 and the finger segment 103.

[0069] Further, see Figure 2 and Figure 3The groove 170 is provided on the fixing member 1021, and the adjusting member is provided through the main body section 101 and the protrusion 171 of the groove 170 to connect the fixing member 1021 and the main body section 101.

[0070] Furthermore, see Figure 2 and Figure 3 The mounting part 110 and the calibration part 120 are formed on the support member 1022, and the end side part 130 is the end side of the support member 1022 near the finger segment 103. The end side part 130 is connected to the finger segment 103; or, the end side part 130 is connected to the finger segment 103 through the load part 140 provided on the end side part 130.

[0071] In the description of this utility model, it should be understood that the terms "comprising" and "having" as used herein, and any variations thereof, are intended to cover non-exclusive inclusion, for example, a process, method, system, product, or device that includes a series of steps or units is not necessarily limited to those steps or units that are explicitly listed, but may include other steps or units that are not explicitly listed or that are inherent to such process, method, product, or device.

[0072] It should be understood that the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", and "outer" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0073] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of this utility model, unless otherwise stated, "a plurality of" means two or more.

[0074] While the embodiments of this utility model have been described in detail above, it will be apparent to those skilled in the art that various modifications and variations can be made to these embodiments. However, it should be understood that such modifications and variations fall within the scope and spirit of this utility model. Furthermore, the utility model described herein may have other embodiments and can be implemented or realized in various ways. Unless otherwise defined, the technical or scientific terms used herein should have the ordinary meaning understood by one of ordinary skill in the art to which this utility model pertains.

Claims

1. An end effector with a tilt-compensation structure, comprising at least two structural segments (100), wherein a connection region is formed between adjacent structural segments (100), characterized in that, At least one of the connecting areas is provided with a first compensation tilt structure, the first compensation tilt structure including at least two adjusting members, the at least two adjusting members respectively connecting adjacent structural segments (100) and forming spaced adjusting points, by adjusting each of the adjusting members to change the spacing between adjacent structural segments (100) at the corresponding adjusting points, so as to adjust the relative angle between adjacent structural segments (100); and / or, At least one of the connection areas is provided with a second compensation tilt structure, and at least one of the at least two construction sections (100) has a mounting portion (110) and a calibration portion (120) arranged at intervals in the vertical direction. The second compensation tilt structure is detachably mounted on the mounting portion (110) and the calibration portion (120). By adjusting the second compensation tilt structure, the calibration portion (120) is elastically deflected toward or away from the mounting portion (110).

2. The end effector with a compensating tilt angle structure according to claim 1, characterized in that, The at least two structural segments (100) include a main body segment (101), a connecting segment (102), and a finger segment (103). In the case of setting the first compensation tilt structure, the first compensation tilt structure is set in the connection area between the main body segment (101) and the connecting segment (102) and / or the connection area between the connecting segment (102) and the finger segment (103).

3. The end effector with a compensating tilt angle structure according to claim 1, characterized in that, The at least two structural segments (100) include a main body segment (101), a connecting segment (102), and a finger segment (103). In the case of setting the second compensation tilt structure, the second compensation tilt structure is set in the connection area between the main body segment (101) and the connecting segment (102) and / or the connection area between the connecting segment (102) and the finger segment (103).

4. The end effector with a compensating tilt angle structure according to claim 1, characterized in that, In the case of setting the first compensation tilt structure, one of the adjacent structural segments (100) of the first compensation tilt structure is provided with a groove (170) corresponding to each of the adjusting members, and the adjusting member is located at the corresponding groove (170); The first compensation tilt structure also includes an elastic element (172) installed in the groove (170) and elastically supporting the connection of the two structural segments (100) of the adjusting member.

5. The end effector with a compensating tilt angle structure according to claim 4, characterized in that, The bottom wall of the groove (170) protrudes towards the groove opening to form a protrusion (171). The protrusion (171) and the side wall of the groove (170) enclose a receiving cavity to accommodate the elastic member (172). The adjusting member is installed at the protrusion (171).

6. The end effector with a compensating tilt angle structure according to claim 1, characterized in that, In the case of setting the second compensation tilt structure, the second compensation tilt structure includes a tightening member detachably installed on the mounting part (110) and the calibration part (120), and the calibration part (120) is elastically deflected toward the mounting part (110) by the tightening force of the tightening member.

7. The end effector with a tilt-compensation structure according to claim 6, characterized in that, The second compensation tilt structure also includes a support member that is vertically movable and adjustable on the mounting part (110). After the tightening restriction of the tightening member is released, the support member moves downward and abuts against the calibration part (120) to form a rigid contact. The top thrust of the support member forces the calibration part (120) to elastically deflect away from the mounting part (110).

8. The end effector with a tilt compensation structure according to claim 1, characterized in that, In the case of setting the second compensation tilt structure, one of the adjacent structural segments (100) of the second compensation tilt structure has a channel (180) that extends through it along its width direction. The channel (180) extends to one side of the structural segment (100) in the vertical direction. At least part of the channel (180) is located outside the calibration part (120). The calibration part (120) and the end side part (130) located on the same side of the channel (180) are separated by the channel (180). The end side part (130) is connected to the calibration part (120).

9. The end effector with a compensating tilt angle structure according to claim 8, characterized in that, The channel (180) includes a first section (181) and a second section (182) located on both sides, and a third section (183) connecting the first section (181) and the second section (182), the third section (183) extending in a curved direction away from the end side (130) and located outside the calibration section (120).

10. The end effector with a compensating tilt angle structure according to claim 9, characterized in that, The structural segment (100) of the channel (180) has an opening (190) on the side away from the end side (130) corresponding to the third passage (183). The opening (190) cuts through the third passage (183) of the structural segment (100) to form the mounting part (110) and the calibration part (120) located on the vertical sides of the opening (190).

11. The end effector with a compensating tilt angle structure according to claim 8, characterized in that, The end side (130) is provided with a load portion (140) on the side away from the channel (180).

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