A bonder clamp fixture apparatus

Abstract

The utility model relates to the technical field of semiconductor processing, especially bond machine clamp fixing device, including slide rail and displacement mechanism, slide rail sets up on the organism, and the organism supports on the ground, and displacement mechanism includes driving part, screw rod, sliding part, connecting assembly, air cylinder, transverse board and fixing piece, and the organism has the chute, and sliding part and chute sliding connection, and driving part installs on the organism, and driving part's output and screw rod fixed connection, and screw rod and sliding part screw -thread cooperation, and connecting assembly is used for installing air cylinder on sliding part, and air cylinder is located sliding part's top, and air cylinder's output and transverse board fixed connection, and fixing piece and transverse board fixed connection, and fixing piece is located transverse board far from air cylinder one end, and in this way, the technical problem of the prior art in the fixed position of fixing device is fixed, leads to the inconvenient adjustment fixed position according to actual situation, and the practicality is poor.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing technology, and in particular to a bonding machine fixture fixing device. Background Technology

[0002] In the field of semiconductor manufacturing and packaging, bonding is a core process for achieving electrical interconnections between chips and substrates, and between wafers. The precision of this process directly determines the reliability of the devices, signal transmission efficiency, and packaging density. Currently, when using a bonding machine, a fixing device is typically required to hold the semiconductor material in place, preventing slight vibrations caused by contact between the bonding head and the semiconductor material during processing.

[0003] As disclosed in prior art patent application number CN201921048211.7, a bonding machine clamping device can be used to assist in clamping semiconductor materials. When it is necessary to clamp semiconductor materials, the output shaft of the drive unit moves downward, causing the mounting base, adjusting base and clamping plate to move downward synchronously. This allows the lower surface of the clamping plate to abut against the semiconductor material, thus keeping the semiconductor material stable between the guide rail and the clamping plate. This makes it less prone to vibration during the semiconductor material processing, thereby improving the stability of the semiconductor material processing and thus improving the processing accuracy of the bonding machine.

[0004] However, in the above methods, the fixed position of the fixing device makes it inconvenient to adjust the fixing position according to the actual situation, resulting in poor practicality. Utility Model Content

[0005] The purpose of this utility model is to provide a bonding machine fixture fixing device, which solves the technical problem that the fixing device in the prior art has a fixed position, making it inconvenient to adjust the fixing position according to the actual situation and resulting in poor practicality.

[0006] To achieve the above objectives, this utility model provides a bonding machine fixture fixing device, including a slide rail and a displacement mechanism. The slide rail is mounted on the machine body, which is supported by the ground.

[0007] The displacement mechanism includes a driving component, a screw, a sliding component, a connecting assembly, a cylinder, a horizontal plate, and a fixing component. The machine body has a sliding groove, and the sliding component is slidably connected to the sliding groove. The driving component is mounted on the machine body, and the output end of the driving component is fixedly connected to the screw. The screw is threadedly engaged with the sliding component. The connecting assembly is used to mount the cylinder on the sliding component, and the cylinder is located above the sliding component. The output end of the cylinder is fixedly connected to the horizontal plate, and the fixing component is fixedly connected to the horizontal plate, with the fixing component positioned at the end of the horizontal plate away from the cylinder.

[0008] The connecting assembly includes a support member, a force-applying member, a connector, a locking member, and a spring. The support member and the connector are fixedly connected to the sliding member and the cylinder, respectively. The support member has a slot, a through hole, and a guide groove. The connector is placed in the slot. The force-applying member is slidably connected to the guide groove. Both ends of the spring are fixedly connected to the force-applying member and the support member, respectively. The force-applying member has a groove. The connector has a locking groove. The locking member is slidably connected to the through hole and placed in the locking groove.

[0009] The force-applying component includes a force-applying ring and a slip ring. The slip ring is slidably connected to the guide groove, and the force-applying ring is fixedly connected to the slip ring.

[0010] The force-applying component also includes multiple anti-slip grooves, which are all disposed on the force-applying ring and are evenly distributed along the axial center line of the force-applying ring.

[0011] The connector includes a connecting plate and a connecting rod. The connecting plate is disposed between the cylinder and the connecting rod, and the connecting rod is placed in the slot.

[0012] The fixing component includes a fixing plate and a protective block. The fixing plate is fixedly connected to the end of the horizontal plate away from the cylinder. The protective block is connected to the fixing plate and is located below the fixing plate.

[0013] The sliding component includes a slider and a mounting plate. The slider is slidably connected to the groove and threadedly engaged with the screw. The mounting plate is fixedly connected to the slider and is used to support the support component.

[0014] The sliding component further includes a support block, and the body also has a rectangular groove. The support block is fixedly connected to the mounting plate, and the support block is slidably connected to the rectangular groove.

[0015] The mounting plate has two rounded corner structures, which are symmetrically arranged on the mounting plate.

[0016] The driving component is a speed-regulating motor.

[0017] This utility model discloses a bonding machine fixture fixing device. In practical use, the cylinder is mounted on the sliding member through the connecting assembly. By activating the cylinder, the cylinder drives the horizontal plate to move downward. The horizontal plate then causes the lower surface of the fixing member to abut against the semiconductor material, thus stabilizing the semiconductor material between the guide rail and the fixing member. Simultaneously, by activating the driving member, the driving member drives the screw to rotate. The screw causes the sliding member to slide within the slide groove, thereby indirectly moving the fixing member. This allows the fixing position to be adjusted according to the actual situation, improving practicality. This method solves the technical problem in the prior art where the fixing device has a fixed position, making it inconvenient to adjust the fixing position according to the actual situation and resulting in poor practicality. Attached Figure Description

[0018] To more clearly illustrate the technical solutions in the embodiments of this application or the prior art, the accompanying drawings used in the description of the embodiments or the prior art will be briefly introduced below.

[0019] Figure 1 This is a schematic diagram of the bonding machine fixture fixing device of this utility model.

[0020] Figure 2 This is a partial structural schematic diagram of the bonding machine fixture fixing device of this utility model.

[0021] Figure 3 This is the utility model Figure 1 Enlarged view of the local structure at point A.

[0022] Figure 4 This is the utility model Figure 1 Enlarged view of the local structure at point B.

[0023] Figure 5 This is the utility model Figure 2 CC-line structural cross-sectional view.

[0024] In the diagram: 1-body, 2-slide rail, 3-drive component, 4-screw, 5-cylinder, 6-horizontal plate, 7-support component, 8-locking component, 9-spring, 10-force ring, 11-slip ring, 12-anti-slip groove, 13-connecting plate, 14-connecting rod, 15-fixing plate, 16-protective block, 17-slider, 18-mounting plate, 19-support block, 20-slide groove, 21-slot, 22-through hole, 23-guide groove, 24-groove, 25-locking groove, 26-rectangular groove, 27-rounded corner structure. Detailed Implementation

[0025] The embodiments of the present invention are described in detail below. Examples of the embodiments are shown in the accompanying drawings. The embodiments described below with reference to the accompanying drawings are exemplary and intended to explain the present invention, but should not be construed as limiting the present invention.

[0026] Please see Figures 1-5 , Figure 1 This is a schematic diagram of the bonding machine fixture fixing device of this utility model. Figure 2 This is a partial structural schematic diagram of the bonding machine fixture fixing device of this utility model. Figure 3 This is the utility model Figure 1 Enlarged view of the local structure at point A. Figure 4 This is the utility model Figure 1 Enlarged view of the local structure at point B. Figure 5 This is the utility model Figure 2 CC-line structural cross-sectional view.

[0027] This utility model provides a bonding machine fixture fixing device, including a slide rail 2 and a displacement mechanism. The displacement mechanism includes a driving component 3, a screw 4, a sliding component, a connecting assembly, a cylinder 5, a horizontal plate 6, and a fixing component. The connecting assembly includes a support component 7, a force-applying component, a connecting component, a locking component 8, and a spring 9. The force-applying component includes a force-applying ring 10 and a slip ring 11, and also includes multiple anti-slip grooves 12. The connecting component includes a connecting plate 13 and a connecting rod 14. The fixing component includes a fixing plate 15 and a protective block 16. The sliding component includes a slider 17 and a mounting plate 18, and also includes a support block 19. The aforementioned solution solves the technical problem in the prior art where the fixing device has a fixed position, making it inconvenient to adjust the fixing position according to the actual situation and resulting in poor practicality.

[0028] In this specific embodiment, the slide rail 2 is mounted on the body 1, which is supported on the ground, and the slide rail 2 is used to support semiconductor materials.

[0029] The machine body 1 has a slide groove 20, the sliding member is slidably connected to the slide groove 20, the driving member 3 is mounted on the machine body 1, the output end of the driving member 3 is fixedly connected to the screw 4, the screw 4 is threadedly engaged with the sliding member, the connecting assembly is used to mount the cylinder 5 on the sliding member, and the cylinder 5 is located above the sliding member, the output end of the cylinder 5 is fixedly connected to the horizontal plate 6, the fixing member is fixedly connected to the horizontal plate 6, and the fixing member is located at the end of the horizontal plate 6 away from the cylinder 5;

[0030] The driving component 3 is a speed-regulating motor;

[0031] In practical use, the cylinder 5 is mounted on the sliding member via the connecting assembly. Activating the cylinder 5 causes the horizontal plate 6 to move downwards, which in turn causes the lower surface of the fixing member to abut against the semiconductor material. This ensures the semiconductor material remains stable between the guide rail 2 and the fixing member. Simultaneously, activating the driving member 3 causes the screw 4 to rotate, which in turn causes the sliding member to slide within the groove 20, indirectly moving the fixing member. This allows for adjustment of the fixing position according to actual conditions, improving practicality. This method solves the technical problem in the prior art where the fixing device has a fixed position, making it inconvenient to adjust the fixing position according to actual conditions and resulting in poor practicality.

[0032] Meanwhile, the support member 7 and the connector are fixedly connected to the sliding member and the cylinder 5, respectively. The support member 7 has a slot 21, a through hole 22, and a guide groove 23. The connector is placed in the slot 21, and the force-applying member is slidably connected to the guide groove 23. Both ends of the spring 9 are fixedly connected to the force-applying member and the support member 7, respectively. The force-applying member has a groove 24, and the connector has a locking groove 25. The locking member 8 is slidably connected to the through hole 22 and placed in the locking groove 25. By sliding the force-applying component, the force-applying component causes the spring 9 to compress, aligning the groove 24 with the through hole 22. Then, the connector is aligned with the slot 21 and pushed. The connector holds the locking component 8 in the groove 24 and waits. After pushing to the designated position, the force-applying component is released, the spring 9 returns to its original position, and the force-applying component moves. The force-applying component holds the locking component 8 in the locking groove 25 and locks it in place, thus installing the cylinder 5. Conversely, it is easy to disassemble.

[0033] Secondly, the slip ring 11 is slidably connected to the guide groove 23, and the force-applying ring 10 is fixedly connected to the slip ring 11; a plurality of anti-slip grooves 12 are provided on the force-applying ring 10, and the plurality of anti-slip grooves 12 are evenly distributed along the axial center line of the force-applying ring 10. By providing the force-applying ring 10, it is convenient to apply force to the slip ring 11, and the anti-slip grooves 12 can improve the anti-slip effect.

[0034] Furthermore, the connecting plate 13 is disposed between the cylinder 5 and the connecting rod 14, and the connecting rod 14 is placed in the slot 21. The connecting plate 13 is used to connect the cylinder 5 and the connecting rod 14.

[0035] Furthermore, the fixing plate 15 is fixedly connected to the end of the horizontal plate 6 away from the cylinder 5, the protective block 16 is connected to the fixing plate 15, and the protective block 16 is located below the fixing plate 15. The movement of the horizontal plate 6 drives the fixing plate 15 to move, thereby driving the protective block 16 to move and fix the semiconductor material.

[0036] Furthermore, the slider 17 is slidably connected to the slide groove 20, and the slider 17 is threadedly engaged with the screw 4. The mounting plate 18 is fixedly connected to the slider 17, and the mounting plate 18 is used to support the support member 7.

[0037] The body 1 also has a rectangular groove 26. The support block 19 is fixedly connected to the mounting plate 18, and the support block 19 is slidably connected to the rectangular groove 26. When the screw 4 rotates, it drives the slider 17 to slide in the slide groove 20. The slider 17 drives the mounting plate 18 to move. The mounting plate 18 indirectly drives the cylinder 5 to move, and the mounting plate 18 drives the support block 19 to slide in the rectangular groove 26.

[0038] Finally, the mounting plate 18 has two rounded corner structures 27, which are symmetrically arranged on the mounting plate 18.

[0039] In the specific use of the bonding machine fixture fixing device of this embodiment, the cylinder 5 is installed on the sliding member through the connecting assembly. By activating the cylinder 5, the cylinder 5 drives the horizontal plate 6 to move downwards. The horizontal plate 6 then causes the lower surface of the fixing member to abut against the semiconductor material, thus stabilizing the semiconductor material between the guide rail 2 and the fixing member. Simultaneously, by activating the driving member 3, the driving member 3 drives the screw 4 to rotate. The screw 4 causes the sliding member to slide within the slide groove 20, thereby indirectly moving the fixing member. This allows the fixing position to be adjusted according to actual conditions, improving practicality. This method solves the technical problem in the prior art where the fixing device has a fixed position, making it inconvenient to adjust the fixing position according to actual conditions and resulting in poor practicality.

[0040] The above-disclosed embodiments are merely one or more preferred embodiments of this application and should not be construed as limiting the scope of this application. Those skilled in the art can understand that all or part of the processes for implementing the above embodiments and equivalent variations made in accordance with the claims of this application still fall within the scope of this application.

Claims

1. A bonding machine fixture fixing device, comprising a slide rail, the slide rail being mounted on the machine body, the machine body being placed on the ground for support, characterized in that... It also includes displacement mechanisms; The displacement mechanism includes a driving component, a screw, a sliding component, a connecting assembly, a cylinder, a horizontal plate, and a fixing component. The machine body has a sliding groove, and the sliding component is slidably connected to the sliding groove. The driving component is mounted on the machine body, and the output end of the driving component is fixedly connected to the screw. The screw is threadedly engaged with the sliding component. The connecting assembly is used to mount the cylinder on the sliding component, and the cylinder is located above the sliding component. The output end of the cylinder is fixedly connected to the horizontal plate, and the fixing component is fixedly connected to the horizontal plate, with the fixing component positioned at the end of the horizontal plate away from the cylinder.

2. The bonding machine fixture fixing device as described in claim 1, characterized in that, The connecting assembly includes a support member, a force-applying member, a connector, a locking member, and a spring. The support member and the connector are fixedly connected to the sliding member and the cylinder, respectively. The support member has a slot, a through hole, and a guide groove. The connector is placed in the slot. The force-applying member is slidably connected to the guide groove. Both ends of the spring are fixedly connected to the force-applying member and the support member, respectively. The force-applying member has a groove. The connector has a locking groove. The locking member is slidably connected to the through hole and placed in the locking groove.

3. The bonding machine fixture fixing device as described in claim 2, characterized in that, The force-applying component includes a force-applying ring and a slip ring. The slip ring is slidably connected to the guide groove, and the force-applying ring is fixedly connected to the slip ring.

4. The bonding machine fixture fixing device as described in claim 3, characterized in that, The force-applying component also includes multiple anti-slip grooves, all of which are disposed on the force-applying ring and are evenly distributed along the axial center line of the force-applying ring.

5. The bonding machine fixture fixing device as described in claim 4, characterized in that, The connector includes a connecting plate and a connecting rod, the connecting plate being disposed between the cylinder and the connecting rod, and the connecting rod being placed within the slot.

6. The bonding machine fixture fixing device as described in claim 5, characterized in that, The fixing component includes a fixing plate and a protective block. The fixing plate is fixedly connected to the end of the horizontal plate away from the cylinder. The protective block is connected to the fixing plate and is located below the fixing plate.

7. The bonding machine fixture fixing device as described in claim 6, characterized in that, The sliding component includes a slider and a mounting plate. The slider is slidably connected to the groove and threadedly engaged with the screw. The mounting plate is fixedly connected to the slider and is used to support the support component.

8. The bonding machine fixture fixing device as described in claim 7, characterized in that, The sliding component also includes a support block, and the body also has a rectangular groove. The support block is fixedly connected to the mounting plate, and the support block is slidably connected to the rectangular groove.

9. The bonding machine fixture fixing device as described in claim 8, characterized in that, The mounting plate has two chamfered structures symmetrically arranged on the mounting plate.

10. The bonder clamp fixture apparatus of claim 9, wherein, The driving member is a speed-regulating motor.

Images