A low-energy consumption ultra-pure water circulating purification device for the semiconductor industry

Abstract

The utility model belongs to the ultra -pure water purification technical field, concretely for a kind of low energy consumption ultra -pure water circulation purification device for semiconductor industry, including mounting bracket and purification filter cartridge, the mounting bracket surface is equipped with the plug-in hole, the purification filter cartridge is fixed on mounting bracket by plug-in hole, and the purification filter cartridge is symmetrically arranged, the top and bottom of the purification filter cartridge are both open-type structure, the outer wall surface of the top and bottom of the purification filter cartridge is equipped with connecting thread, the top of the purification filter cartridge is all threadedly connected with upper cover, the upper cover is respectively connected with water inlet pipe and drain pipe, water inlet booster pump is installed in water inlet pipe end, filter core is movably inserted in the inner chamber of the purification filter cartridge;The diameter of the filter cartridge connecting pipe is increased in the utility model, so that the diameter of the filter cartridge connecting pipe is the same as that of the purification filter cartridge, the flow resistance of the ultra -pure water in the purification device can be reduced, the flow speed of the ultra -pure water is improved, the working pressure of the water inlet booster pump can be reduced, and the energy consumption is reduced.

Description

Technical Field

[0001] This utility model relates to the field of ultrapure water purification technology, specifically a low-energy ultrapure water circulation purification device for the semiconductor industry. Background Technology

[0002] Ultrapure water is water of extremely high purity, virtually free of impurities, ions, organic matter, and microorganisms. Its resistivity typically reaches 18.2 MΩ·cm, TOC (Total Organic Carbon) <10 ppb, bacterial count <10 CFU / ml, and it contains no detectable endotoxins. It is primarily used in fields with extremely high water quality requirements, such as laboratory analysis, semiconductor manufacturing, and pharmaceutical production. Ultrapure water circulation purification uses a series of technologies to remove impurities, ions, organic matter, and microorganisms from the water to extremely low levels, meeting the high-purity water demands of laboratories and the semiconductor industry. Reverse osmosis (RO) technology utilizes the selective permeability of a semi-permeable membrane. Under pressure, water molecules pass through the membrane to the freshwater side, while ions and organic matter are retained, achieving a desalination rate of over 99%.

[0003] In existing ultrapure water purification devices, filter cartridges are connected by connecting pipes with small diameters. Furthermore, ultrapure water needs to pass through the filter cartridges during filtration, resulting in high flow resistance within the purification device. To ensure the circulation of ultrapure water, the power of the inlet booster pump must be increased, leading to high energy consumption during operation. To address these issues, this application proposes a low-energy-consumption ultrapure water circulation purification device for the semiconductor industry. Utility Model Content

[0004] (a) Purpose of the utility model To address the technical problems existing in the background art, this utility model proposes a low-energy ultrapure water circulation purification device for the semiconductor industry. By increasing the diameter of the filter cartridge connecting pipe to make it the same as the diameter of the purification filter cartridge, the flow resistance of ultrapure water in the purification device can be reduced, the flow velocity of ultrapure water can be increased, the working pressure of the inlet booster pump can be reduced, and energy consumption can be reduced, thereby solving the problems mentioned in the background art.

[0005] (II) Technical Solution To solve the above technical problems, this utility model provides a low-energy ultrapure water circulation purification device for the semiconductor industry, including a mounting frame and a purification filter cartridge. The mounting frame has insertion holes on its surface, and the purification filter cartridge is fixed on the mounting frame through the insertion holes. The purification filter cartridge is symmetrically arranged, and the top and bottom of the purification filter cartridge are both open structures. The outer wall surfaces of the top and bottom of the purification filter cartridge are provided with connecting threads. Each of the purification filter cartridges is threaded with a top cover, and the top cover is connected to an inlet pipe and a drain pipe respectively. An inlet booster pump is installed at the end of the inlet pipe. Each of the purification filter cartridges has a filter element that can be movably inserted into its inner cavity; Both sets of the purification filter cartridges are provided with filter cartridge connecting pipes at the bottom, and the two ends of the filter cartridge connecting pipes are connected to the bottom threads of the purification filter cartridges through threaded connectors; The filter cartridge connecting pipe is equipped with drive motors at both ends of the bottom, and the power output ends of the drive motors are connected to axial flow blades.

[0006] Preferably, a limiting ring is welded to the bottom of the inner cavity of each purification filter cartridge, and the inner ring of the limiting ring has a cross-shaped structure.

[0007] Preferably, each filter element is provided with a limiting socket at its bottom, and the bottom of the filter element is connected to a limiting ring through the limiting socket.

[0008] Preferably, each filter element has a water inlet at the top, and a sealing ring is fitted on the surface of the water inlet.

[0009] Preferably, the inner cavity of the upper cover is provided with a plug-in cylinder. After the upper cover is threadedly connected to the top of the purification filter cylinder, the plug-in cylinder is plugged into the water inlet, and the inner wall of the plug-in cylinder is in contact with the surface of the sealing ring.

[0010] Preferably, both ends of the filter cartridge connecting pipe are provided with motor mounts, and the drive motors are respectively mounted on the motor mounts.

[0011] Preferably, the axial flow blades are respectively inserted into the bottom of the inner cavity of the two sets of purification filter cartridges, and the axial flow blades are located below the limiting ring.

[0012] Preferably, the two sets of drive motors drive the axial flow blades to rotate in opposite directions.

[0013] The above-mentioned technical solution of this utility model has the following beneficial technical effects: 1. This utility model uses an inlet booster pump to pressurize ultrapure water entering the purification filter cartridge. A drive motor, in conjunction with axial flow impellers, generates vertical suction at the bottom of the first filter cartridge, allowing the ultrapure water to pass through the filter element quickly. Meanwhile, a drive motor at the bottom of the second filter cartridge, also in conjunction with axial flow impellers, generates upward thrust on the ultrapure water. Furthermore, by increasing the diameter of the filter cartridge connecting pipe to match the diameter of the purification filter cartridge, the flow resistance of ultrapure water within the purification device is reduced, the flow velocity of the ultrapure water is increased, the operating pressure of the inlet booster pump is reduced, and energy consumption is lowered.

[0014] 2. In this utility model, the filter element is inserted into the purification filter cartridge. The bottom of the filter element is limited by a limiting socket and a limiting ring on the inner wall of the purification filter cartridge. The top cover is threadedly connected to the top of the purification filter cartridge. At this time, the insertion tube is inserted into the water inlet at the top of the filter element, and the connection between the insertion tube and the water inlet is sealed by a sealing ring, which allows for quick disassembly and assembly of the filter element during use. Attached Figure Description

[0015] Figure 1 This is a schematic diagram of the overall structure of a low-energy ultrapure water circulation purification device for the semiconductor industry according to this utility model. Figure 2 This is a cross-sectional structural diagram of a low-energy ultrapure water circulation purification device for the semiconductor industry according to the present invention. Figure 3 This is a schematic diagram of the filter element structure of a low-energy ultrapure water circulation purification device for the semiconductor industry according to this utility model. Figure 4 This is a schematic diagram of the pressurization structure of a low-energy ultrapure water circulation purification device for the semiconductor industry according to this utility model. Figure 5 This is a schematic diagram of the overall exploded structure of a low-energy ultrapure water circulation purification device for the semiconductor industry according to this utility model.

[0016] Figure label: 1. Mounting bracket; 2. Purification filter cartridge; 3. Inlet pipe; 4. Drain pipe; 5. Inlet booster pump; 6. Filter element; 7. Limit socket; 8. Limit ring; 9. Sealing ring; 10. Top cover; 11. Filter cartridge connecting pipe; 12. Motor base; 13. Drive motor; 14. Axial flow blade; 15. Threaded connector; 16. Insertion tube. Detailed Implementation

[0017] To make the objectives, technical solutions, and advantages of this utility model clearer, the present utility model will be further described in detail below with reference to specific embodiments and accompanying drawings. It should be understood that these descriptions are merely exemplary and not intended to limit the scope of this utility model. Furthermore, descriptions of well-known structures and technologies are omitted in the following description to avoid unnecessarily obscuring the concept of this utility model.

[0018] like Figure 1-5 As shown, the present invention proposes a low-energy ultrapure water circulation purification device for the semiconductor industry, including a mounting frame 1 and a purification filter cartridge 2. The mounting frame 1 has insertion holes on its surface, and the purification filter cartridge 2 is fixed on the mounting frame 1 through the insertion holes. The purification filter cartridge 2 is symmetrically arranged, and the top and bottom of the purification filter cartridge 2 are both open structures. The outer wall surfaces of the top and bottom of the purification filter cartridge 2 are provided with connecting threads. The top of each purification filter cartridge 2 is threadedly connected to a top cover 10. The top cover 10 is respectively connected to a water inlet pipe 3 and a water outlet pipe 4. A water inlet booster pump 5 is installed at the end of the water inlet pipe 3. Each of the purification filter cartridges 2 has a filter element 6 that is movably inserted into its inner cavity; The bottom of each of the two sets of purification filter cartridges 2 is provided with a filter cartridge connecting pipe 11, and both ends of the filter cartridge connecting pipe 11 are connected to the bottom of the purification filter cartridge 2 by threaded connectors 15. The filter cartridge connecting pipe 11 is equipped with drive motors 13 at both ends of the bottom. The power output ends of the drive motors 13 are connected to axial flow blades 14. The axial flow blades 14 are respectively inserted into the bottom of the inner cavity of the two sets of purification filter cartridges 2, and the axial flow blades 14 are located below the limiting ring 8. The two sets of drive motors 13 drive the axial flow blades 14 to rotate in opposite directions.

[0019] It should be noted that the inlet booster pump 5 can pressurize the ultrapure water entering the purification filter cartridge 2. Drive motors 13 are mounted on both ends of the filter cartridge connecting pipe 11 via motor mounts 12. The drive motors 13 drive the axial flow blades 14, and the two sets of drive motors 13 drive the two sets of axial flow blades 14 to rotate in opposite directions. The purification filter cartridge 2 connected to the inlet pipe 3 is the first filter cartridge, and the other is the second filter cartridge. The combination of the drive motors 13 and the axial flow blades 14 creates an upward and downward suction force on the ultrapure water at the bottom of the first filter cartridge, allowing the ultrapure water to pass quickly through the filter element 6. Meanwhile, the drive motors 13 and axial flow blades 14 at the bottom of the second filter cartridge create an upward thrust on the ultrapure water and increase the diameter of the filter cartridge connecting pipe 11, making it the same as the diameter of the purification filter cartridge 2. This reduces the flow resistance of the ultrapure water within the purification device, increases the flow velocity of the ultrapure water, reduces the working pressure of the inlet booster pump 5, and lowers energy consumption.

[0020] In this embodiment, as Figure 4 As shown, each of the purification filter cartridges 2 has a limit ring 8 welded to the bottom of its inner cavity. The inner ring of the limit ring 8 has a cross-shaped structure. Each of the filter elements 6 has a limit socket 7 at its bottom. The bottom of the filter element 6 is connected to the limit ring 8 through the limit socket 7.

[0021] It should be noted that the bottom of the filter element 6 is connected to the limit ring 8 via the limit socket 7, which can facilitate the limiting of the filter element 6.

[0022] In this embodiment, as Figure 5 As shown, each of the filter elements 6 has a water inlet at the top, and a sealing ring 9 is fitted on the surface of the water inlet. Each of the upper cover 10 has a plug-in tube 16 in its inner cavity. After the upper cover 10 is threadedly connected to the top of the purification filter cartridge 2, the plug-in tube 16 is plugged into the water inlet, and the inner wall of the plug-in tube 16 is in contact with the surface of the sealing ring 9.

[0023] It should be noted that the top cover 10 is threadedly connected to the top of the purification filter cartridge 2. At this time, the insertion tube 16 is inserted into the water inlet at the top of the filter element 6, and the connection between the insertion tube 16 and the water inlet is sealed by the sealing ring 9, which can achieve quick fixation of the filter element 6.

[0024] In this embodiment, as Figure 4 As shown, motor mounts 12 are provided at both ends of the filter cartridge connecting pipe 11, and the drive motors 13 are respectively mounted on the motor mounts 12.

[0025] It should be noted that the drive motor 13 can be installed via the motor mount 12.

[0026] The working principle and usage process of this utility model are as follows: The filter element 6 is inserted into the purification filter cartridge 2. The bottom of the filter element 6 is limited by the limit socket 7 and the limit ring 8 on the inner wall of the purification filter cartridge 2. The top cover 10 is threadedly connected to the top of the purification filter cartridge 2. At this time, the insertion tube 16 is inserted into the water inlet at the top of the filter element 6, and the connection between the insertion tube 16 and the water inlet is sealed by the sealing ring 9. Ultrapure water can be injected into the purification filter cartridge 2 through the water inlet pipe 3. The two sets of purification filter cartridges 2 form a U-shaped structure, which can filter impurities in ultrapure water through the two sets of filter elements 6, thereby improving the filtration effect of ultrapure water. The end of the water inlet pipe 3 is equipped with a water inlet booster pump 5, which can pressurize the ultrapure water entering the purification filter cartridge 2. The two ends of the filter cartridge connecting pipe 11 are respectively connected to the motor base. 12 is equipped with a drive motor 13, which drives the axial flow blades 14 respectively. The two sets of drive motors 13 drive the two sets of axial flow blades 14 to rotate in opposite directions. The purification filter cartridge 2 connected to the water inlet pipe 3 is the first filter cartridge, and the other set is the second filter cartridge. By cooperating with the drive motor 13 and the axial flow blades 14, the ultrapure water can be generated vertically at the bottom of the first filter cartridge, so that the ultrapure water can pass through the filter element 6 quickly. The drive motor 13 at the bottom of the second filter cartridge, in cooperation with the axial flow blades 14, generates an upward thrust on the ultrapure water and increases the diameter of the filter cartridge connecting pipe 11 so that the diameter of the filter cartridge connecting pipe 11 is the same as the diameter of the purification filter cartridge 2. This can reduce the flow resistance of ultrapure water in the purification device, increase the flow speed of ultrapure water, reduce the working pressure of the water inlet booster pump 5, and reduce energy consumption.

[0027] It should be understood that the above-described specific embodiments of this utility model are merely illustrative or explanatory of the principles of this utility model and do not constitute a limitation thereof. Therefore, any modifications, equivalent substitutions, improvements, etc., made without departing from the spirit and scope of this utility model should be included within the protection scope of this utility model. Furthermore, the appended claims are intended to cover all variations and modifications falling within the scope and boundaries of the appended claims or their equivalents.

Claims

1. A low-energy ultrapure water circulation purification device for the semiconductor industry, comprising a mounting frame (1) and a purification filter cartridge (2), wherein the mounting frame (1) has insertion holes on its surface, the purification filter cartridge (2) is fixed to the mounting frame (1) through the insertion holes, and the purification filter cartridge (2) is arranged symmetrically, characterized in that, The top and bottom of the purification filter cartridge (2) are both open structures, and the outer wall surfaces of the top and bottom of the purification filter cartridge (2) are provided with connecting threads; The top of each purification filter cartridge (2) is threaded with a top cover (10), and the top cover (10) is connected to a water inlet pipe (3) and a drain pipe (4), and a water inlet booster pump (5) is installed at the end of the water inlet pipe (3). The inner cavity of each purification filter cartridge (2) is movably connected to a filter element (6). The bottom of the two sets of purification filter cartridges (2) is provided with filter cartridge connecting pipes (11), and the two ends of the filter cartridge connecting pipes (11) are connected to the bottom threads of the purification filter cartridges (2) through threaded connectors (15); The filter cartridge connecting pipe (11) has a drive motor (13) at both ends of its bottom, and the power output end of the drive motor (13) is connected to an axial flow blade (14).

2. The low-energy ultrapure water circulation and purification device for the semiconductor industry according to claim 1, characterized in that, Each of the purification filter cartridges (2) has a limiting ring (8) welded to the bottom of its inner cavity. The inner ring of the limiting ring (8) has a cross-shaped structure.

3. The low-energy ultrapure water circulation and purification device for the semiconductor industry according to claim 2, characterized in that, Each filter element (6) is provided with a limiting socket (7) at its bottom, and the bottom of the filter element (6) is connected to the limiting ring (8) through the limiting socket (7).

4. The low-energy ultrapure water circulation and purification device for the semiconductor industry according to claim 3, characterized in that, Each filter element (6) has a water inlet at the top, and a sealing ring (9) is fitted on the surface of the water inlet.

5. A low-energy ultrapure water circulation purification device for the semiconductor industry according to claim 4, characterized in that, The inner cavity of the upper cover (10) is provided with a plug tube (16). After the upper cover (10) is threadedly connected to the top of the purification filter tube (2), the plug tube (16) is plugged into the water inlet, and the inner wall of the plug tube (16) is in contact with the surface of the sealing ring (9).

6. A low-energy ultrapure water circulation and purification device for the semiconductor industry according to claim 5, characterized in that, Both ends of the filter cartridge connecting pipe (11) are provided with motor mounts (12), and the drive motors (13) are respectively mounted on the motor mounts (12).

7. A low-energy ultrapure water circulation and purification device for the semiconductor industry according to claim 6, characterized in that, The axial flow blades (14) are respectively inserted into the bottom of the inner cavity of the two sets of purification filter cartridges (2), and the axial flow blades (14) are located below the limiting ring (8).

8. A low-energy ultrapure water circulation and purification device for the semiconductor industry according to claim 7, characterized in that, The two sets of drive motors (13) drive the axial flow blades (14) to rotate in opposite directions respectively.

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