SDS polishing solution filtering device

Abstract

The utility model discloses a kind of SDS polishing liquid filtering devices, including rack, the top of the rack is fixedly connected with motor, the drive end of the motor is fixedly connected with long spline, and long spline is set through rack, and is rotationally connected with rack;The outer surface one side of the rack is fixedly connected with multiple lifting cover plates, multiple the lifting cover plate is all installed with transmission assembly, and transmission assembly is connected with long spline;The bottom of three the lifting cover plates is sealedly abutted with barrel body.In the utility model, long spline is driven by single motor, multiple transmission assemblies and filter cartridge are rotated synchronously, the efficient parallel operation of multiple filtering units is realized, the processing efficiency of polishing liquid is greatly improved;While using multistage series filter design, different particle size impurities can be removed step by step, the filtering effect and filtrate quality are significantly improved, and the overall structure is compact, the operating cost is low, suitable for large-scale continuous production.

Description

Technical Field

[0001] This utility model relates to the field of filtration technology, and in particular to an SDS polishing fluid filtration device. Background Technology

[0002] In high-precision manufacturing fields such as semiconductors and optical glass, chemical mechanical polishing (CMP) is a key process for obtaining ultra-smooth, damage-free surfaces. SDS polishing slurry, as a core consumable in the CMP process, directly determines the final polishing quality through its purity and particle size distribution. Any micron- or even nanon-sized impurities can cause scratches on the workpiece surface, leading to a decrease in product yield. Therefore, efficient and high-precision filtration of the SDS polishing slurry before use is an essential and critical step.

[0003] Currently, the industry commonly uses multi-stage series filtration to gradually remove impurities of different particle sizes to ensure the high purity of the final filtrate. Traditional multi-stage filtration systems typically consist of multiple independent filtration units connected in series via pipelines, with each unit often equipped with an independent drive motor. This configuration has significant drawbacks: First, the system structure is complex, occupies a large area, and has high initial investment and maintenance costs; second, the asynchronous operation of multiple motors makes it difficult to guarantee absolute synchronization and consumes a lot of energy; third, the pipeline connections between each stage are complex, with numerous sealing points, increasing the risk of leakage and liquid residue, which is detrimental to both process stability and the ability to change to different types of polishing fluids.

[0004] To address this, we propose an SDS polishing fluid filtration device. Utility Model Content

[0005] The purpose of this invention is to address the shortcomings of existing technologies by proposing an SDS polishing fluid filtration device.

[0006] To achieve the above objectives, the present invention adopts the following technical solution: an SDS polishing fluid filtration device, comprising a frame, a motor fixedly connected to the top of the frame, a long spline fixedly connected to the drive end of the motor, and the long spline passing through the frame and rotatably connected to the frame;

[0007] Multiple lifting cover plates are fixedly connected to one side of the outer surface of the frame. Each of the multiple lifting cover plates is equipped with a transmission component, and the transmission component is connected to a long spline.

[0008] The bottom of each of the three lifting covers is sealed against a barrel body, and a first bearing seat is fixedly connected to one side inner wall of each of the three barrel bodies. The inner ring of the bearing built into the first bearing seat is fixedly connected to a lower spline, and a filter cartridge is inserted into the top of each of the three lower splines.

[0009] The tops of the three lifting covers are all connected by sleeves;

[0010] The bottoms of the three barrels are all fixedly connected with bent pipes, the bottoms of the three bent pipes are all fixedly connected with rotary joints, the fixed ends of the three rotary joints are all fixedly connected with connecting pipes, and the two connecting pipes located at the top are sealed and slidably inserted into the adjacent sleeves.

[0011] Furthermore, all three lifting covers include a second bearing seat, which is fixedly connected to the frame. The inner ring of the bearing in the second bearing seat is fixedly connected to a screw, and a handwheel is fixedly connected to the bottom of the screw. The outer surface of the screw is threaded with the cover body, and the cover body slides against the outer wall of the frame. This structure achieves smooth lifting and lowering of the cover body through threaded transmission, making operation labor-saving.

[0012] Furthermore, the cover plate body is sealed and pressed onto the top of the barrel and is fixedly connected to the sleeve. This design ensures a reliable seal of the filter chamber during operation, preventing liquid leakage.

[0013] Furthermore, all three transmission components include a first synchronous pulley, and the mounting shaft of the first synchronous pulley passes through the cover plate body and is rotatably connected to the cover plate body. The first synchronous pulley is slidably sleeved on the outer surface of the long spline, and a synchronous belt is meshed on the outer surface of the first synchronous pulley. A second synchronous pulley is meshed on the inner surface of the synchronous belt, and the mounting shaft of the second synchronous pulley passes through the cover plate body and is rotatably connected to the cover plate body. The synchronous belt drive ensures accurate and stable power transmission and effectively buffers impact and vibration.

[0014] Furthermore, the bottom of the second synchronous pulley is fixedly connected with an upper spline, and the spline structure provides a strong torque transmission capability.

[0015] Furthermore, the three filter cartridges include a connecting shaft, and the connecting shaft is limited and inserted into the upper spline and the lower spline. A skeleton is fixedly sleeved on the outer surface of the connecting shaft, and a filter membrane is fixedly covered on the outer surface of the skeleton. The fixing method of the upper and lower spline insertion makes the filter cartridges installed stably.

[0016] Furthermore, the top of the skeleton is sealed with a sealing ring, and the sealing ring is rotatably connected to the cover plate body. The sealing ring effectively isolates the liquid before and after filtration, preventing unfiltered liquid from short-circuiting into the filtered liquid side.

[0017] Furthermore, the inner surface of the top single sleeve is sealed with an inlet pipe.

[0018] Furthermore, the outer surfaces of the three connecting pipes are all fixedly fitted with support frames, and the barrel body is attached to the top of the support frame and fixedly connected to the frame. The support frame provides stable support for the barrel body and the connecting pipes.

[0019] The beneficial effects of this utility model are:

[0020] 1. In use, this utility model uses a single motor to drive a long spline to synchronously drive multiple transmission components and filter cartridges to rotate, realizing the efficient parallel operation of multiple filtration units and greatly improving the processing efficiency of polishing liquid; at the same time, it adopts a multi-stage series filtration design, which can remove impurities of different particle sizes step by step, significantly improving the filtration effect and filtrate quality, and the overall structure is compact with low operating cost, making it suitable for large-scale continuous production.

[0021] 2. In use, this utility model features a sealed connection structure that allows for quick separation between the lifting cover and the barrel body, along with a splined insertion transmission, making the filter cartridge easier to assemble and disassemble. Attached Figure Description

[0022] To more clearly illustrate the technical solution of this utility model, the drawings used in the description of the specific embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0023] Figure 1 This is a schematic diagram of the overall three-dimensional structure of this utility model;

[0024] Figure 2 For the present utility model Figure 1 Enlarged view of point A in the middle;

[0025] Figure 3 This is a partial cross-sectional view of the present invention.

[0026] The attached figures are labeled as follows:

[0027] 1. Frame; 2. Cover plate body; 3. Support frame; 4. Motor; 5. Inlet pipe; 6. Tank body; 7. Bend; 8. Rotary joint; 9. Sleeve; 10. Connecting pipe; 11. Synchronous belt; 12. First synchronous pulley; 13. Long spline; 14. Screw; 15. Second bearing seat; 16. Handwheel; 17. Upper spline; 18. Second synchronous pulley; 19. Sealing ring; 20. Filter membrane; 21. Connecting shaft; 22. Frame; 23. Lower spline; 24. First bearing seat. Detailed Implementation

[0028] The technical solutions of the present utility model will be clearly and completely described below with reference to the accompanying drawings of the embodiments. Obviously, the described embodiments are only some embodiments of the present utility model, and not all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of the present utility model.

[0029] like Figures 1-3 As shown, an SDS polishing fluid filtration device is disclosed, including a frame 1. A motor 4 is fixedly connected to the top of the frame 1. A long spline 13 is fixedly connected to the drive end of the motor 4. The long spline 13 passes through the frame 1 and is rotatably connected to the frame 1.

[0030] Multiple lifting covers are fixedly connected to one side of the outer surface of the frame 1. Each of the three lifting covers includes a second bearing seat 15, and the second bearing seat 15 is fixedly connected to the frame 1. The inner ring of the bearing inside the second bearing seat 15 is fixedly connected to a screw 14. A handwheel 16 is fixedly connected to the bottom of the screw 14. The outer surface of the screw 14 is threaded with a cover body 2, and the cover body 2 slides against the outer wall of the frame 1. The thread helix angle of the screw 14 is less than the friction angle, which gives the screw 14 a self-locking ability and can prevent it from shifting due to vibration or load. The cover body 2 is sealed and pressed against the top of the barrel 6. An annular sealing gasket is fixedly connected to the bottom of the cover body 2. The annular sealing gasket is sealed and abuts against the top of the barrel 6 to ensure sealing.

[0031] Multiple lifting covers are equipped with transmission components, which are connected to long splines 13. Each of the three transmission components includes a first synchronous pulley 12, and the mounting shaft of the first synchronous pulley 12 passes through the cover body 2 and is rotatably connected to the cover body 2. The first synchronous pulley 12 is slidably sleeved on the outer surface of the long spline 13. A synchronous belt 11 is meshed on the outer surface of the first synchronous pulley 12. A second synchronous pulley 18 is meshed on the inner surface of the synchronous belt 11. The mounting shaft of the second synchronous pulley 18 passes through the cover body 2 and is rotatably connected to the cover body 2. An upper spline 17 is fixedly connected to the bottom of the second synchronous pulley 18. The second synchronous pulley 18 and the first synchronous pulley 12 are rotatably connected to the cover body 2 through bearing seats. The bearing seat body is fixed to the cover body 2. The inner ring of the bearing inside the bearing seat is fixed to the mounting shaft of the second synchronous pulley 18 and the first synchronous pulley 12 respectively.

[0032] The bottom of each of the three lifting covers is sealed against a barrel 6. A first bearing seat 24 is fixedly connected to the inner wall of each of the three barrels 6. The inner ring of the bearing inside the first bearing seat 24 is fixedly connected to a lower spline 23. The bearing inside the first bearing seat 24 uses an existing packing seal. A filter cartridge is inserted into the top of each of the three lower splines 23. The three filter cartridges include a connecting shaft 21, and the connecting shaft 21 is inserted into the upper spline 17 and the lower spline 23. A skeleton 22 is fixedly sleeved on the outer surface of the connecting shaft 21. A filter membrane 20 is fixedly covered on the outer surface of the skeleton 22. The three filter membranes 20 have different pore sizes, which decrease from top to bottom. A sealing ring 19 is sealed against the top of the skeleton 22, and the sealing ring 19 is rotatably connected to the cover body 2. The sealing ring 19 and the cover body 2 are rotatably connected by a bearing seat. The bearing seat body is fixed to the cover body 2. The inner ring of the bearing inside the bearing seat is fixed to the sealing ring. The bearing inside the bearing seat uses a packing seal.

[0033] The tops of the three cover plate bodies 2 are all connected by sleeves 9, and the top openings of the three sleeves 9 are all fixedly fitted with sealing rings to ensure the sealing performance of the sleeves 9 after installation.

[0034] The bottoms of the three barrels 6 are all fixedly connected with bends 7, the bottoms of the three bends 7 are all fixedly connected with rotary joints 8, the fixed ends of the three rotary joints 8 are all fixedly connected with connecting pipes 10, and the two connecting pipes 10 at the top are sealed and slidably inserted into the adjacent sleeves 9, and the bottom of the connecting pipe 10 at the bottom is fixedly connected with a connecting flange to facilitate the connection of external collection pipelines.

[0035] The inner surface of the top single sleeve 9 is sealed and slidably connected to the liquid inlet pipe 5, which can be connected to the external SDS polishing liquid raw liquid delivery pipeline to be filtered.

[0036] The outer surfaces of the three connecting pipes 10 are all fixedly fitted with support frames 3, and the barrel 6 is attached to the top of the support frame 3 and fixedly connected to the frame 1. The support frame 3 is fixed to the connecting pipes 10 and the frame 1 by welding, and the connection structure is simple and firm.

[0037] Working principle: The process begins with the start of motor 4, which drives the long spline 13 to rotate. Simultaneously, the long spline 13 drives three first synchronous pulleys 12 to rotate, and each first synchronous pulley 12 transmits power to a second synchronous pulley 18 via a synchronous belt 11. The second synchronous pulley 18 drives the upper spline 17 to rotate, thereby driving the filter cartridge (composed of connecting shaft 21, frame 22, and filter membrane 20) to rotate at high speed within the barrel 6. The bottom of the filter cartridge is supported and positioned by the lower spline 23 and the first bearing seat 24, while the top is dynamically sealed to the cover plate body 2 via a sealing ring 19.

[0038] The raw polishing solution to be filtered is injected through the inlet pipe 5, first entering the first-stage sleeve 9 and the tank 6. Inside the tank 6, the liquid is subjected to centrifugal force from the high-speed rotating filter cartridge, trapping impurities on the inner surface of the filter membrane 20, while the filtrate penetrates the filter membrane 20. Subsequently, driven by gravity, the filtrate flows out through the bottom bend 7, passes through the rotary joint 8 into the connecting pipe 10, and is sent to the next, more precise filtration unit. The pore size of the three filter membranes 20 decreases sequentially from top to bottom, thus achieving three-stage cascade filtration. Finally, the obtained high-purity filtrate is discharged from the final rotary joint 8.

[0039] When the filter cartridge needs to be replaced or cleaned, the machine must be stopped. Rotate the handwheel 16 to lift the cover plate body 2 via the screw 14. Then manually push the barrel 6 to deflect around the rotary joint 8 as the axis. Then remove the filter cartridge and insert the new filter cartridge into the lower spline 23. Then reset all parts to complete the replacement.

[0040] In actual use, a controller can be installed, which is electrically connected to motor 4 to facilitate the control of motor 4's operation.

[0041] The preferred embodiments of this utility model disclosed above are merely illustrative of the present utility model. These preferred embodiments do not exhaustively describe all details, nor do they limit the utility model to any specific implementation. Clearly, many modifications and variations can be made based on the content of this specification. This specification selects and specifically describes these embodiments to better explain the principles and practical applications of this utility model, thereby enabling those skilled in the art to better understand and utilize it. This utility model is limited only by the claims and their full scope and equivalents.

Claims

1. An SDS polishing slurry filtration device, comprising a frame (1), characterized in that: A motor (4) is fixedly connected to the top of the frame (1), and a long spline (13) is fixedly connected to the drive end of the motor (4). The long spline (13) passes through the frame (1) and is rotatably connected to the frame (1). Multiple lifting cover plates are fixedly connected to one side of the outer surface of the frame (1). Each of the multiple lifting cover plates is equipped with a transmission component, and the transmission component is connected to the long spline (13). The bottom of each of the three lifting covers is sealed against a barrel body (6), and a first bearing seat (24) is fixedly connected to one side of the inner wall of each of the three barrel bodies (6). The inner ring of the bearing built into the first bearing seat (24) is fixedly connected to a lower spline (23), and a filter cartridge is inserted into the top of each of the three lower splines (23). The tops of the three lifting covers are all connected by sleeves (9); The bottom of each of the three barrels (6) is fixedly connected to a bend (7), the bottom of each of the three bends (7) is fixedly connected to a rotary joint (8), the fixed ends of each of the three rotary joints (8) are fixedly connected to a connecting pipe (10), and the two connecting pipes (10) located above are sealed and slidably inserted into the adjacent sleeve (9).

2. The SDS polishing fluid filtration device according to claim 1, characterized in that: All three lifting covers include a second bearing seat (15), and the second bearing seat (15) is fixedly connected to the frame (1). The inner ring of the bearing built into the second bearing seat (15) is fixedly connected to a screw (14). A handwheel (16) is fixedly connected to the bottom of the screw (14). The outer surface of the screw (14) is threaded with a cover body (2), and the cover body (2) slides against the outer wall of the frame (1).

3. The SDS polishing fluid filtration device according to claim 2, characterized in that: The cover plate body (2) is sealed and pressed onto the top of the barrel body (6) and is fixedly connected to the sleeve (9).

4. The SDS polishing fluid filtration device according to claim 3, characterized in that: All three transmission components include a first synchronous pulley (12), and the mounting shaft of the first synchronous pulley (12) passes through the cover plate body (2) and is rotatably connected to the cover plate body (2). The first synchronous pulley (12) is slidably sleeved on the outer surface of the long spline (13). A synchronous belt (11) is meshed on the outer surface of the first synchronous pulley (12). A second synchronous pulley (18) is meshed on the inner surface of the synchronous belt (11). The mounting shaft of the second synchronous pulley (18) passes through the cover plate body (2) and is rotatably connected to the cover plate body (2).

5. The SDS polishing fluid filtration device according to claim 4, characterized in that: The bottom of the second synchronous pulley (18) is fixedly connected to an upper spline (17).

6. The SDS polishing fluid filtration device according to claim 5, characterized in that: The three filter cartridges include a connecting shaft (21), and the connecting shaft (21) is limited and inserted into the upper spline (17) and the lower spline (23). The outer surface of the connecting shaft (21) is fixedly sleeved with a skeleton (22), and the outer surface of the skeleton (22) is fixedly covered with a filter membrane (20).

7. The SDS polishing fluid filtration device according to claim 6, characterized in that: The top of the frame (22) is sealed against a sealing ring (19), and the sealing ring (19) is rotatably connected to the cover plate body (2).

8. The SDS polishing slurry filtration device according to claim 1, characterized in that: The inner surface of the top single sleeve (9) is sealed and slidably fitted with an inlet pipe (5).

9. The SDS polishing fluid filtration device according to claim 1, characterized in that: The outer surfaces of the three connecting pipes (10) are all fixedly fitted with support frames (3), and the barrel (6) is attached to the top of the support frame (3) and fixedly connected to the frame (1).

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