A CVD reaction tail gas harmless treatment device

Abstract

The utility model provides a kind of CVD reaction tail gas harmless treatment device, belong to tail gas treatment device technical field, including tower body and sleeve being arranged in tower body, the bottom end inboard wall of tower body is equipped with inlet pipe and drain pipe, electromagnetic valve is installed on drain pipe, the upper end inboard of tower body is equipped with exhaust pipe.The utility model, because the existence of outer spiral guide vane thus guides tail gas to flow along the angle of spiral upwards, greatly improve the residence time of tail gas in tower body, prolong the contact time of spray liquid and tail gas, to improve the effect of tail gas purification, and the first contact hole on outer spiral guide vane increases the contact area of tail gas and spray liquid, further improve the tail gas purification efficiency, improve the effect of purification in the process of CVD tail gas treatment, and the inner spiral guide vane of sleeve inboard wall also plays the role of guiding tail gas flow, the second contact hole further enhances the mixing effect of tail gas and spray liquid on it.

Description

Technical Field

[0001] This utility model relates to the technical field of exhaust gas treatment devices, and more specifically, to a device for harmless treatment of CVD reaction exhaust gas. Background Technology

[0002] In the field of modern industrial manufacturing, chemical vapor deposition (CVD) technology is widely used in many key industries such as semiconductor manufacturing, optical coating, and aerospace material production due to its unique advantage of being able to accurately deposit high-quality thin films on the surface of various materials. However, while this technology has driven industrial progress, it has also brought a serious problem - the emission of CVD reaction exhaust gas.

[0003] In existing technologies, spray towers are an important step in CVD exhaust gas treatment, neutralizing and removing harmful substances from the exhaust gas through spraying, thus facilitating subsequent exhaust gas treatment. However, common spray towers have a vertically upward structure design, where exhaust gas enters the tower, contacts the spray liquid, and flows straight upwards before being discharged. This results in a short residence time of the exhaust gas within the tower, leading to a higher retention of harmful substances and impacting the overall purification effect. Therefore, inventing a harmless treatment device for CVD reaction exhaust gas to solve these problems has become a pressing issue for those skilled in the art. Utility Model Content

[0004] To overcome the above shortcomings, this utility model provides a CVD reaction tail gas harmless treatment device, which aims to solve the problem that the common spray tower has a straight upward structure design. After the tail gas enters the tower and comes into contact with the spray liquid, it flows straight upward and is discharged. During this process, the tail gas stays in the tower for a short time, resulting in more harmful substances remaining in the tail gas, thus affecting the overall purification effect.

[0005] This utility model is implemented as follows: This utility model provides a CVD reaction tail gas harmless treatment device, including a tower body and a sleeve installed in the tower body. An air inlet pipe and a liquid outlet pipe are installed on the inner side wall of the bottom end of the tower body. A solenoid valve is installed on the liquid outlet pipe. An exhaust pipe is installed inside the upper end of the tower body. Multiple spray components are installed inside the tower body. A liquid storage tank is installed on the outer side wall of the tower body. The sleeve is installed inside the tower body, and the outer wall of the sleeve is equipped with an outer spiral guide vane.

[0006] Preferably, the liquid storage tank is filled with spray liquid, and an inlet pipe is installed inside the liquid storage tank, with a pump body installed at one end of the inlet pipe.

[0007] Preferably, multiple spray components are equidistantly installed on the outside of the sleeve, with the uppermost spray component installed above the sleeve. Each spray component includes a water storage box, a ring pipe, a connecting pipe, a conduit, and an atomizing nozzle. The water storage box and the ring pipe are connected and fixed together by the connecting pipe, the ring pipes are connected and fixed together by the connecting pipe, and the outermost ring pipe and the liquid inlet pipe are connected and fixed together by the conduit.

[0008] Preferably, the spray assembly sleeved on the outside of the sleeve does not include a water storage box, and the plurality of atomizing nozzles are connected and installed at the lower end of the water storage box and the ring pipe.

[0009] Preferably, the lower end of the sleeve is fixedly connected to the bottom of the tower body, the lower end side wall of the sleeve is provided with multiple notches, the side wall of the sleeve is provided with several air holes, the outer spiral guide vane is fixed to the outer wall of the sleeve, the position of the outer spiral guide vane near the spray assembly is disconnected, and the surface of the outer spiral guide vane is provided with several first contact holes.

[0010] Preferably, an inner spiral guide vane is fixedly connected to the inner side wall of the sleeve, and a plurality of second contact holes are formed on the surface of the inner spiral guide vane.

[0011] The beneficial effects of this utility model are: The presence of the outer spiral guide vanes guides the exhaust gas upwards along the spiral angle, significantly increasing the residence time of the exhaust gas in the tower and prolonging the contact time between the spray liquid and the exhaust gas, thereby improving the purification effect. Furthermore, the first contact hole on the outer spiral guide vane increases the contact area between the exhaust gas and the spray liquid, further improving the purification efficiency. This enhances the purification effect during CVD exhaust gas treatment. The inner spiral guide vanes on the inner wall of the sleeve also guide the exhaust gas flow, and their second contact hole further enhances the mixing effect between the exhaust gas and the spray liquid. Through multi-stage spraying and guiding, harmful substances in the exhaust gas are fully neutralized and removed, further increasing the residence time of the exhaust gas in the tower and the contact area with the spray liquid, significantly improving the purification effect. Attached Figure Description

[0012] To more clearly illustrate the technical solutions of the embodiments of this utility model, the drawings used in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of this utility model and should not be regarded as a limitation of the scope. For those skilled in the art, other related drawings can be obtained from these drawings without creative effort.

[0013] Figure 1 This is a schematic diagram of the structure of a CVD reaction tail gas harmless treatment device provided by an embodiment of this utility model; Figure 2 This is a half-sectional view of the structure of a CVD reaction tail gas harmless treatment device provided by an embodiment of this utility model; Figure 3 This invention provides a CVD reaction tail gas harmless treatment device. Figure 2 Enlarged view of the structure of region A in the middle; Figure 4 This is a schematic diagram of the internal component structure of a CVD reaction tail gas harmless treatment device provided by an embodiment of this utility model; Figure 5 This is a half-sectional view of the casing structure of a CVD reaction tail gas harmless treatment device provided by an embodiment of this utility model.

[0014] In the diagram: 1. Tower body; 11. Air inlet pipe; 12. Liquid outlet pipe; 13. Exhaust pipe; 14. Solenoid valve; 2. Liquid storage tank; 21. Pump body; 22. Liquid inlet pipe; 23. Spray assembly; 231. Water storage box; 232. Ring pipe; 233. Connecting pipe; 234. Conduit pipe; 235. Atomizing nozzle; 3. Sleeve; 31. Notch; 311. Air hole; 32. Outer spiral guide vane; 321. First contact hole; 33. Inner spiral guide vane; 331. Second contact hole. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this utility model.

[0016] Example, refer to Figures 1-5 A CVD reaction tail gas harmless treatment device includes a tower body 1 and a sleeve 3 installed in the tower body 1. An air inlet pipe 11 and a liquid outlet pipe 12 are installed on the inner side wall of the bottom end of the tower body 1. A solenoid valve 14 is installed on the liquid outlet pipe 12. An exhaust pipe 13 is installed inside the upper end of the tower body 1. Multiple spray components 23 are installed inside the tower body 1. A liquid storage tank 2 is installed on the outer side wall of the tower body 1. The sleeve 3 is installed inside the tower body 1, and the outer wall of the sleeve 3 is equipped with an outer spiral guide vane 32.

[0017] Furthermore, the storage tank 2 is filled with spray liquid, and an inlet pipe 22 is installed inside the storage tank 2. A pump body 21 is installed at one end of the inlet pipe 22. Multiple spray components 23 are equidistantly installed on the outside of the sleeve 3. The uppermost spray component 23 is installed above the sleeve 3. This spray component 23 includes a water storage box 231, a ring pipe 232, a connecting pipe 233, a conduit 234, and an atomizing nozzle 235. The water storage box 231 and the ring pipe 232 are connected and fixed through the connecting pipe 233. The ring pipes 232 are also connected and fixed through the connecting pipe 233. The outermost ring pipe 232 and the inlet pipe 235 are connected and fixed through the connecting pipe 233. The pipes 22 are connected and fixed by the conduit 234. The spray assembly 23, which is sleeved on the outside of the sleeve 3, does not include the water storage box 231. Multiple atomizing nozzles 235 are connected and installed at the lower end of the water storage box 231 and the ring pipe 232. The lower end of the sleeve 3 is fixedly connected to the bottom of the tower body 1. Multiple notches 31 are opened on the lower side wall of the sleeve 3. Several air holes 311 are opened on the side wall of the sleeve 3. The outer spiral guide vane 32 is fixed on the outer wall of the sleeve 3. The position of the outer spiral guide vane 32 near the spray assembly 23 is disconnected. Several first contact holes 321 are opened on the surface of the outer spiral guide vane 32.

[0018] It should be noted that in the CVD reaction tail gas treatment process, the cooled and purified tail gas enters the tower body 1 through the inlet pipe 11. At the same time, the pump body 21 is started to introduce the spray liquid in the storage tank 2 into the spray assembly 23 inside the tower body 1 through the liquid inlet pipe 22. The acidity or alkalinity of the spray liquid is adjusted according to the acidity or alkalinity of the tail gas. Alkaline solution is used for acidic tail gas, and acidic solution is used for alkaline tail gas to neutralize the harmful substances in the tail gas. During the rise of the tail gas, the spray assembly 23 sprays the spray liquid evenly onto the tail gas in the form of fine droplets through the atomizing nozzles 235. The droplets come into full contact with the exhaust gas, undergoing a chemical reaction that effectively neutralizes and removes harmful substances from the exhaust gas. Simultaneously, the presence of the outer spiral guide vane 32 guides the exhaust gas to flow upward along the spiral angle, greatly increasing the residence time of the exhaust gas in the tower body 1 and extending the contact time between the spray liquid and the exhaust gas, thereby improving the purification effect of the exhaust gas. Furthermore, the first contact hole 321 on the outer spiral guide vane 32 increases the contact area between the exhaust gas and the spray liquid, further improving the exhaust gas purification efficiency and enhancing the purification effect during the treatment of CVD exhaust gas.

[0019] Furthermore, an inner spiral guide vane 33 is fixedly connected to the inner side wall of the sleeve 3, and a number of second contact holes 331 are opened on the surface of the inner spiral guide vane 33.

[0020] It should be noted that the inner spiral guide vanes 33 on the inner wall of the sleeve 3 also serve to guide the flow of exhaust gas, and the second contact hole 331 on them further enhances the mixing effect of exhaust gas and spray liquid. After multi-stage spraying and guiding, harmful substances in the exhaust gas are fully neutralized and removed, thereby further increasing the residence time of the exhaust gas in the tower body 1 and the contact area with the spray liquid, greatly improving the purification effect of the exhaust gas. Finally, the purified exhaust gas is discharged through the exhaust pipe 13 for subsequent treatment, while the waste liquid generated during the purification process is discharged through the drain pipe 12 and the solenoid valve 14, which facilitates subsequent recycling and utilization, realizing the efficient and harmless treatment of CVD reaction exhaust gas.

[0021] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, or improvements made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A device for harmless treatment of CVD reaction tail gas, comprising a tower body (1) and a sleeve (3) disposed in the tower body (1), characterized in that, An air inlet pipe (11) and a drain pipe (12) are installed on the inner side wall of the bottom end of the tower body (1). A solenoid valve (14) is installed on the drain pipe (12). An exhaust pipe (13) is installed inside the upper end of the tower body (1). Multiple spray components (23) are installed inside the tower body (1). A liquid storage tank (2) is installed on the outer side wall of the tower body (1). The sleeve (3) is installed inside the tower body (1), and the outer wall of the sleeve (3) is equipped with an outer spiral guide vane (32).

2. The CVD reaction tail gas harmless treatment device according to claim 1, characterized in that, The liquid storage tank (2) is filled with spray liquid, and an inlet pipe (22) is installed inside the liquid storage tank (2). A pump body (21) is installed at one end of the inlet pipe (22).

3. The CVD reaction tail gas harmless treatment device according to claim 2, characterized in that, Multiple spray components (23) are equidistantly installed on the outside of the sleeve (3). The uppermost spray component (23) is installed above the sleeve (3). The spray component (23) includes a water storage box (231), a ring pipe (232), a connecting pipe (233), a conduit (234), and an atomizing nozzle (235). The water storage box (231) and the ring pipe (232) are connected and fixed through the connecting pipe (233). The ring pipes (232) are connected and fixed through the connecting pipe (233). The outermost ring pipe (232) and the liquid inlet pipe (22) are connected and fixed through the conduit (234).

4. The CVD reaction tail gas harmless treatment device according to claim 3, characterized in that, The spray assembly (23) sleeved on the outside of the sleeve (3) does not include the water storage box (231), and the plurality of atomizing nozzles (235) are connected and installed at the lower end of the water storage box (231) and the ring pipe (232).

5. The CVD reaction tail gas harmless treatment device according to claim 4, characterized in that, The lower end of the sleeve (3) is fixedly connected to the bottom of the tower body (1). The lower end side wall of the sleeve (3) is provided with multiple notches (31). The side wall of the sleeve (3) is provided with several air holes (311). The outer spiral guide vane (32) is fixed to the outer wall of the sleeve (3). The outer spiral guide vane (32) is disconnected near the spray assembly (23). The surface of the outer spiral guide vane (32) is provided with several first contact holes (321).

6. The CVD reaction tail gas harmless treatment device according to claim 1, characterized in that, The inner wall of the sleeve (3) is fixedly connected with an inner spiral guide vane (33), and the surface of the inner spiral guide vane (33) is provided with a number of second contact holes (331).

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