Reduction apparatus for polysilicon

Abstract

The application discloses a reducing device for polycrystalline silicon, which comprises a furnace body, a microwave generating device and a scope device. The furnace body is defined by a peripheral wall and a top wall into a reducing cavity for accommodating the polycrystalline silicon to be reduced. The peripheral wall is provided with a heating hole penetrating through the reducing cavity. The microwave generating device is communicated with the heating hole and used for heating the reducing cavity through the heating hole. The scope device is arranged in the heating hole and seals the heating hole. The microwave generating device is used for heating the reducing cavity through the heating hole of the peripheral wall of the furnace body. The selective heating can be directly performed on the silicon core, the invalid loss of the self-heating of the lamp tube and the indirect heat transfer is avoided, the microwave energy can be directly applied to the silicon core, the indirect heat transfer through the medium such as air is not needed, the silicon core can be quickly heated to the required resistance value for the breakdown starting, the heating time is shortened, the heat utilization efficiency in the unit time is improved, and the optimization of the energy consumption and the efficiency is realized.

Description

Technical Field

[0001] This application relates to the field of polysilicon reduction, and in particular to an apparatus for polysilicon reduction. Background Technology

[0002] In related technologies, the production of electronic-grade polycrystalline silicon deposition has high requirements for the environment and carrier, and a clean environment must be guaranteed. Before starting the furnace, the silicon core of electronic-grade polycrystalline silicon needs to be preheated. The existing technology uses a quartz lamp placed inside the furnace cylinder to provide auxiliary heating to heat the internal environment, thereby changing the silicon core resistance and breaking it down to start the furnace. However, this method of preheating has the problem of high power consumption. Therefore, how to reduce heating energy consumption and improve thermal efficiency has become the technical problem to be solved in this application. Utility Model Content

[0003] This application aims to at least address one of the technical problems existing in the prior art. To this end, one objective of this application is to provide a reduction apparatus for polycrystalline silicon that can reduce heating energy consumption and improve thermal efficiency.

[0004] According to an embodiment of this application, a reduction apparatus for polycrystalline silicon includes: a furnace body, wherein a reduction chamber is defined by a peripheral wall and a top wall, the reduction chamber being used to accommodate a substance to be reduced, and the peripheral wall being provided with a heating hole communicating with the reduction chamber; a microwave generator, the microwave generator being communicated with the heating hole, the microwave generator being used to heat the reduction chamber through the heating hole; and a viewing device, the viewing device being disposed within the heating hole, and the viewing device sealing the heating hole.

[0005] According to the embodiments of this application, the reduction apparatus for polycrystalline silicon heats the reduction chamber through heating holes in the furnace wall via a microwave generator. This allows for direct selective heating of the silicon core, eliminating the need for preheating the core before conducting heat to the environment, as is the case with quartz lamps. This avoids the ineffective losses caused by the lamp's own heating and indirect heat transfer. Furthermore, the endoscope device seals the heating holes, reducing heat loss and further minimizing energy loss. Since microwave energy can directly act on the silicon core without indirect heat transfer through media such as air, it quickly brings the silicon core to the resistance value required for breakdown and startup, shortening the heating time and improving the heat utilization efficiency per unit time, ultimately optimizing both energy consumption and efficiency.

[0006] According to some embodiments of the present application, a reduction apparatus for polycrystalline silicon is provided on the inner wall surface of the furnace body to reflect microwaves to the material to be reduced.

[0007] According to some embodiments of this application, a reduction apparatus for polycrystalline silicon is provided, wherein the material to be reduced is configured as a plurality of materials, which are spaced apart at the bottom of the reduction chamber and extend toward the top of the reduction chamber.

[0008] According to some embodiments of this application, the endoscope device for reducing polycrystalline silicon is constructed of transparent glass.

[0009] According to some embodiments of this application, a reduction apparatus for polycrystalline silicon includes a microwave generating unit and a waveguide transmission device. The waveguide transmission device has a microwave channel formed inside, and one end of the microwave channel is connected to the microwave generating unit, while the other end of the microwave channel is selectively connected to the endoscope device. The waveguide transmission device is used to guide the microwaves emitted by the microwave generating unit into the reduction cavity through the heating hole.

[0010] According to some embodiments of the present application, the apparatus for reducing polycrystalline silicon includes a microwave generating unit comprising: a microwave generating control device adapted to generate microwaves; and a coupler disposed between the microwave generating control device and the waveguide transmission device, the coupler coupling the microwaves emitted by the microwave generating control device.

[0011] According to some embodiments of this application, the microwave generating device further includes: a housing having a receiving cavity formed therein, the microwave generating unit being housed within the receiving cavity; and a cooling pipe housed within the receiving cavity, at least a portion of which surrounds the microwave generating unit to cool the microwave generating unit; wherein the housing has a liquid inlet and a liquid outlet, the liquid inlet and the liquid outlet being respectively located at both ends of the cooling pipe.

[0012] According to some embodiments of this application, the device for reducing polycrystalline silicon includes a waveguide comprising: a waveguide having a microwave channel formed therein, one end of the waveguide being connected to a microwave generating unit; and a connecting flange disposed at the other end of the waveguide, the connecting flange being detachably connected to the endoscope device.

[0013] According to some embodiments of this application, a polycrystalline silicon reduction apparatus has a plurality of wheels spaced apart at the bottom of the housing.

[0014] According to some embodiments of the present application, in the polycrystalline silicon reduction apparatus, the heating holes and the microwave generator are configured as a plurality of one-to-one correspondences, and the plurality of heating holes are spaced apart on the peripheral wall of the furnace body.

[0015] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0016] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, in which: Figure 1 This is a schematic diagram of a polysilicon reduction apparatus according to an embodiment of this application.

[0017] Figure label: 100. Reduction device; 1. Furnace body; 11. Peripheral wall; 12. Top wall; 13. Reduction chamber; 14. Heating hole; 15. Microwave reflective layer; 2. The object to be reduced; 3. Microwave generator; 31. Microwave Generator Unit; 311. Microwave generator control device; 312. Coupler; 32. Waveguide transmission device; 321. Waveguide; 322. Microwave channel; 323. Connecting flange; 324. Three-pin; 33. Shell; 331. Liquid inlet; 332. Liquid outlet; 333. Wheels; 4. Endoscope device; 5. Power supply. Detailed Implementation

[0018] The embodiments of this application are described in detail below. Examples of these embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain this application, and should not be construed as limiting this application.

[0019] The following is for reference. Figure 1 A reduction apparatus 100 for polycrystalline silicon according to an embodiment of this application is described.

[0020] According to an embodiment of this application, a reduction apparatus 100 for polycrystalline silicon includes a furnace body 1, a microwave generator 3, and a viewing device 4. The furnace body 1 is defined by a peripheral wall 11 and a top wall 12, forming a reduction chamber 13. The reduction chamber 13 is used to accommodate the material to be reduced 2. The peripheral wall 11 is provided with a heating hole 14 that communicates with the reduction chamber 13. The microwave generator 3 is connected to the heating hole 14 and is used to heat the reduction chamber 13 through the heating hole 14. The viewing device 4 is disposed in the heating hole 14 and closes the heating hole 14.

[0021] In related technologies, the production of electronic-grade polycrystalline silicon deposition has high requirements for the environment and carrier, and a clean environment must be guaranteed. Before starting the furnace, the silicon core of electronic-grade polycrystalline silicon needs to be preheated. The existing technology uses quartz lamps placed inside the furnace cylinder to provide auxiliary heating to heat the internal environment, thereby changing the silicon core resistance to break down the silicon core and start the furnace. However, this method of preheating has the problem of high power consumption.

[0022] First, the reduction device 100 connects the microwave generator 3 to the heating hole 14 on the peripheral wall 11 of the furnace body 1, so that microwave energy can be input into the reduction chamber 13 through the heating hole 14. Microwave heating is achieved by using a high-frequency electromagnetic field to drive the heated material to vibrate at high frequency, generating heat through intermolecular friction. This process does not rely on an intermediate heating medium and directly heats the material to be reduced 2 in the reduction chamber 13. This eliminates the multi-stage indirect heat transfer process in traditional heating methods, where the heating element heats up, the heat is transferred to the air, and the air heats the material to be reduced 2. This avoids the problem of heat loss to non-target areas at each stage of the indirect heat transfer process. The direct microwave heating method fundamentally reduces this kind of unnecessary energy loss and lowers the proportion of ineffective energy consumption.

[0023] Secondly, microwave heating only heats the materials within the reduction cavity 13 that can absorb microwave energy, preventing energy from being consumed by non-target structures. Furthermore, the endoscope device 4 installed within the heating hole 14 does not obstruct microwave energy transmission after sealing the heating hole 14, ensuring that the energy output from the microwave generator 3 can efficiently enter the reduction cavity 13. Simultaneously, the sealed structure effectively prevents heat from escaping from the reduction cavity 13 through the heating hole 14, further reducing energy loss.

[0024] Finally, since microwaves can directly act on the material to be reduced 2, they can quickly raise the temperature of the material to be reduced 2. In the embodiments of this application, the material to be reduced 2 is mainly a silicon core. Heating the silicon core with microwaves can shorten the heating time required for the silicon core to reach the resistance value required for breakdown. Under the premise of achieving the same heating target, the reduction in heating time directly reduces the total energy input of the microwave generator 3, while improving the heat utilization efficiency per unit time. In addition, the endoscope device 4 also has an observation function. When the microwave generator 3 is not connected to the heating hole 14, the internal condition of the reduction cavity 13 can be observed through the endoscope device 4, making it easier to grasp the state inside the reduction cavity 13.

[0025] In short, the microwave generator 3 heats the reduction chamber 13 through the heating holes 14 on the periphery wall 11 of the furnace body 1, which can directly act on the silicon core to achieve selective heating. Unlike quartz lamps, it does not need to heat itself first and then conduct heat to the environment, thus avoiding the ineffective loss of heat from the lamp itself and indirect heat transfer. At the same time, the endoscope device 4 seals the heating holes 14 to reduce the heat loss from the cavity and further reduce energy loss. The microwave energy can act directly on the silicon core without the need for indirect heat transfer through mediums such as air, which can quickly make the silicon core reach the resistance value required for breakdown and start-up, shorten the heating time, improve the heat utilization efficiency per unit time, and ultimately optimize energy consumption and efficiency.

[0026] In some embodiments of this application, the heating hole 14 is located in the lower middle part of the peripheral wall 11, which is more convenient for manual operation and improves work efficiency compared to the top or upper part.

[0027] Specifically, manual operation has a fixed physiological range of activity. The effective working height of the hands and operating tools is usually concentrated in the waist to chest area when the human body is standing. The heating hole 14 is set in the lower part of the peripheral wall 11, which is compatible with the effective working range. Compared with the setting at the top or upper part, the workers can directly access the heating hole 14 and related connecting parts without the need for ladders, platforms or other auxiliary tools. This avoids the extra process of setting up and disassembling auxiliary tools, reduces the preparation time for work, and eliminates the risk of falling that may exist in high-altitude operations, thus reducing operational safety hazards.

[0028] According to some embodiments of the present application, a reduction apparatus 100 for polycrystalline silicon has a microwave reflective layer 15 disposed on the inner wall surface of the furnace body 1 to reflect microwaves to the material to be reduced 2.

[0029] The microwave reflector layer 15 installed on the inner wall of the furnace body 1 serves to reflect the microwave energy input into the reduction cavity 13 by the microwave generator 3 through the heating hole 14. This causes the microwaves originally directed towards the inner wall of the furnace body 1 to be reflected back into the reduction cavity 13 and act on the object to be reduced 2. If the microwaves directly contact the inner wall of the furnace body 1 during transmission, some of the energy may be absorbed by the furnace body 1 and converted into non-target heat, resulting in energy loss to non-heating areas. The microwave reflector layer 15 avoids this energy loss by changing the microwave propagation path, allowing more microwave energy to be concentrated on the object to be reduced 2, increasing the effective energy ratio acting on the object to be reduced 2 per unit input energy. The microwave reflector layer 15 also reduces the possibility of microwave energy escaping outward through the furnace body 1, further reducing ineffective energy consumption and achieving the beneficial effects of improving microwave energy utilization, reducing heating energy consumption, and accelerating heating efficiency.

[0030] According to some embodiments of the present application, a reduction apparatus 100 for polycrystalline silicon is provided, wherein the objects to be reduced 2 are configured as a plurality of objects to be reduced, and the plurality of objects to be reduced 2 are spaced apart at the bottom of the reduction chamber 13 and extend toward the top of the reduction chamber 13.

[0031] The components 2 to be reduced are arranged in multiples and spaced apart at the bottom of the reduction cavity 13 and extending towards the top. This arrangement allows the components 2 to be reduced to form a uniform spatial distribution within the reduction cavity 13, avoiding the problem of shading caused by excessive density between the components 2. When the microwave generator 3 inputs microwave energy into the reduction cavity 13 through the heating hole 14, the uniformly spaced structure allows the microwave energy to penetrate more smoothly to the surface and surrounding area of ​​each component 2 to be reduced, reducing the situation where microwave energy cannot be effectively covered in some areas due to mutual shading between the components 2. This ensures that each component 2 to be reduced can receive microwave energy uniformly, avoiding energy waste caused by uneven local heating.

[0032] Meanwhile, the arrangement of extending towards the top of the reduction cavity 13 allows the object to be reduced 2 to occupy more space in the vertical direction of the reduction cavity 13, forming a better fit with the diffusion path of microwaves in the cavity. After entering the reduction cavity 13, the microwaves will diffuse in all directions. The vertically extending object to be reduced 2 can come into contact with microwave energy at different heights, improving the efficiency of microwave energy capture and reducing the loss of microwave energy that is not utilized in areas such as the top of the cavity and is lost or absorbed by the furnace body 1.

[0033] According to some embodiments of this application, the endoscope device 4 of the polycrystalline silicon reduction apparatus 100 is constructed as a transparent glass.

[0034] First, during microwave heating, the transparent glass will not obstruct the microwave energy input from the microwave generator 3 into the reduction chamber 13 through the heating hole 14. The microwave energy can penetrate the transparent glass and enter the reduction chamber 13, avoiding the absorption or reflection of microwave energy due to improper material selection of the endoscope device 4. This ensures that the microwave energy can act efficiently on the object to be reduced 2, reduces energy loss in the transmission path, and guarantees heating efficiency.

[0035] Secondly, the light transmittance of the transparent glass also meets the observation requirements. When the microwave generator 3 is not connected to the heating hole 14, the internal condition of the reduction chamber 13 can be directly observed through the transparent glass. At the same time, the structural characteristics of the transparent glass allow it to effectively seal the heating hole 14, preventing heat from escaping from the reduction chamber 13 through the heating hole 14, avoiding heat loss due to the open hole, and further reducing ineffective energy consumption during the heating process. In addition, the chemical stability and high-temperature resistance of the transparent glass can adapt to the heating environment inside the reduction chamber 13, avoiding material deformation or damage at high temperatures, ensuring the stability of sealing and light transmittance performance during long-term use, and guaranteeing the continuous heating efficiency of the device.

[0036] According to some embodiments of the present application, the reduction apparatus 100 for polycrystalline silicon includes a microwave generating device 3 comprising a microwave generating unit 31 and a waveguide transmission device 32. A microwave channel 322 is formed inside the waveguide transmission device 32, and one end of the microwave channel 322 is connected to the microwave generating unit 31, while the other end of the microwave channel 322 is optionally connected to a viewing device 4. The waveguide transmission device 32 is used to guide the microwaves emitted by the microwave generating unit 31 into the reduction cavity 13 through the heating hole 14.

[0037] Understandably, the microwaves generated by the microwave generating unit 31 will enter the microwave channel 322. The microwave channel 322 provides a closed transmission space for the microwaves, preventing the microwaves from spreading and dissipating into the surrounding environment during transmission. Compared with the transmission method without a closed channel, it greatly reduces the ineffective loss of energy in the transmission process and ensures that more microwave energy can be guided to the reduction cavity 13. The other end of the microwave channel 322 of the waveguide transmission device 32 can be selectively connected to the endoscope device 4. When microwave heating is required, the microwave channel 322 is connected to the endoscope device 4. Microwaves can pass through the microwave channel 322, penetrate the endoscope device 4, and enter the reduction cavity 13 through the heating hole 14. At this time, the microwave channel 322 and the endoscope device 4 form a complete microwave transmission path, ensuring efficient energy input. When heating is not required and it is necessary to observe the inside of the reduction cavity 13, the connection between the microwave channel 322 and the endoscope device 4 can be disconnected, and the reduction cavity 13 can be observed through the endoscope device 4. There is no need to disassemble the entire microwave generator 3, which simplifies the operation process and avoids damage to the device's sealing caused by frequent disassembly.

[0038] According to some embodiments of the present application, the microwave generating unit 31 of the polysilicon reduction apparatus 100 includes a microwave generating control device 311 and a coupler 312. The microwave generating control device 311 is adapted to generate microwaves, and the coupler 312 is disposed between the microwave generating control device 311 and the waveguide transmission device 32. The coupler 312 couples the microwaves emitted by the microwave generating control device 311.

[0039] Understandably, the microwave generating control device 311 is responsible for generating microwaves, while the coupler 312 is located between the microwave generating control device 311 and the waveguide transmission device 32. It can couple the generated microwaves, and the coupling process can adjust the impedance matching state of the microwaves so that the microwave signal output by the microwave generating control device 311 matches the input impedance of the waveguide transmission device 32. This avoids the microwaves being reflected at the interface between the two due to impedance mismatch, ensuring that more microwave energy can smoothly enter the microwave channel 322 of the waveguide transmission device 32, thereby improving the energy transfer efficiency from microwave generation to transmission. Meanwhile, the coupling processing of microwaves by coupler 312 can make the transmission of microwave signals more stable, avoid uneven distribution of microwave energy in waveguide transmission device 32 due to microwave signal fluctuations, and thus prevent the microwave energy received by the object to be reduced 2 in the reduction cavity 13 from being too strong or too weak in some places, ensuring the uniformity of heating of the object to be reduced 2.

[0040] According to some embodiments of the present application, the microwave generating device 3 further includes: a housing 33 and a cooling pipe. A receiving cavity is formed inside the housing 33, and the microwave generating unit 31 is housed in the receiving cavity. The cooling pipe is housed in the receiving cavity, and at least a portion of the cooling pipe is arranged around the microwave generating unit 31 to cool the microwave generating unit 31. The housing 33 is provided with a liquid inlet 331 and a liquid outlet 332, which are respectively located at both ends of the cooling pipe.

[0041] The housing 33 forms a cavity that encloses the microwave generating unit 31, creating a relatively enclosed environment to prevent external environmental factors from interfering with the microwave generating unit 31. The cooling pipes, housed within the cavity and at least partially surrounding the microwave generating unit 31, are designed to cool the microwave generating unit 31, which generates heat during operation. The microwave generating unit 31 generates heat due to the operation of its electronic components. If this heat accumulates and causes the temperature of the microwave generating unit 31 to become too high, it will reduce microwave generation efficiency and may even lead to malfunction. In this case, the cooling pipes remove heat through the internally flowing cooling medium, maintaining the microwave generating unit 31 at a suitable temperature. The microwave generator operates within a specified range to ensure a continuous and stable output of rated power, avoiding additional energy consumption caused by prolonged heating time or increased input power due to efficiency degradation. The cooling medium enters through the inlet 331 and exits through the outlet 332 of the housing 33. The surrounding arrangement of the cooling pipes allows the cooling medium to evenly contact the heating area of ​​the microwave generator unit 31, improving cooling efficiency, quickly suppressing temperature rise, and further ensuring the operational stability of the microwave generator unit 31. At the same time, the cooling medium circulates through the inlet 331 and outlet 332, eliminating the need for frequent replacement of the cooling medium, simplifying operation, and ensuring the continuity of the cooling process.

[0042] According to some embodiments of the present application, the polysilicon reduction apparatus 100 includes a waveguide 32 and a connecting flange 323. A microwave channel 322 is formed in the waveguide 321. One end of the waveguide 321 is connected to the microwave generating unit 31. The connecting flange 323 is disposed at the other end of the waveguide 321 and is detachably connected to the endoscope device 4.

[0043] The microwave channel 322 formed inside the waveguide 321 is connected to the microwave generating unit 31 at one end and can directly receive the microwaves output by the microwave generating unit 31. The microwaves are confined inside the closed microwave channel 322 structure for transmission, which prevents the microwaves from spreading and dissipating into the surrounding environment during transmission and reduces the ineffective energy loss in the transmission process. The connecting flange 323 is located at the other end of the waveguide 321 and is detachably connected to the endoscope device 4. When microwave heating is required, the waveguide 321 and the endoscope device 4 are tightly connected through the connecting flange 323, so that the microwave channel 322 and the endoscope device 4 form a continuous transmission path. The microwave can smoothly penetrate the endoscope device 4 and enter the reduction cavity 13, ensuring the airtightness and integrity of energy transmission and avoiding microwave leakage or heat loss due to connection gaps. When heating is not required and it is necessary to observe the inside of the reduction cavity 13, the connection between the connecting flange 323 and the endoscope device 4 can be removed, and observation can be directly performed through the endoscope device 4 without disassembling the entire waveguide transmission device 32. This simplifies the operation process and avoids structural damage to the waveguide 321 or microwave generating unit 31 caused by frequent disassembly, ensuring the long-term stability of the device.

[0044] In some embodiments of this application, a three-pin 324 is provided between the waveguide 321 and the coupler 312.

[0045] It should be noted that the three-pin 324 is a three-pin tuner, a device used for impedance matching adjustment in a microwave transmission system. It is usually composed of three metal pins, which are evenly distributed at a specific angle at the connection interface between the waveguide 321 and the coupler 312. The pins can be finely adjusted in insertion depth or angle along an axis perpendicular to the microwave transmission direction. Its core function is to adjust the microwave field distribution at the connection interface by changing its position and orientation in the microwave field, thereby achieving impedance matching optimization.

[0046] Specifically, after the microwave is output from the coupler 312, it needs to enter the microwave channel 322 of the waveguide 321. If there is a difference between the output impedance of the coupler 312 and the input impedance of the waveguide 321, some microwaves will be reflected at the connection interface. The reflected microwaves will not only fail to enter the waveguide 321 and be transmitted to the reduction cavity 13, causing energy loss, but may also act in reverse on the microwave generating unit 31, affecting the stability of the unit's operation. The three pins 324 can further compensate for the impedance deviation between the coupler 312 and the waveguide 321 by adjusting the insertion depth and angle of the three metal pins. During the process of the pins being inserted into the microwave field, they will generate electromagnetic interaction with the microwave field, changing the equivalent impedance at the interface, so that the output impedance of the coupler 312 and the input impedance of the waveguide 321 tend to be consistent, greatly reducing the amount of microwave reflection at the connection interface, ensuring that more microwave energy can smoothly enter the waveguide 321, and reducing the ineffective energy consumption in the transmission link.

[0047] According to some embodiments of the present application, a reduction apparatus 100 for polycrystalline silicon has a housing 33 with a plurality of wheels 333 spaced apart at the bottom.

[0048] The wheels 333 are located at the bottom of the housing 33 and are used to provide mobility for the microwave generator 3. Since the microwave generator 3 needs to be connected to the heating hole 14 of the furnace body 1 through the waveguide transmission device 32, during the installation and commissioning of the device, or when the relative position of the microwave generator 3 and the furnace body 1 needs to be adjusted due to production needs, the wheels 333 can convert the sliding friction between the housing 33 and the ground into rolling friction, reduce the external force required to move the device, avoid the difficulty of moving due to the large weight of the device, reduce the cost of manpower or equipment investment, and at the same time prevent damage to the bottom of the housing 33 or the ground caused by hard dragging and pulling, thus ensuring the structural integrity of the device. The spaced arrangement of multiple wheels 333 provides stable support for the housing 33, avoiding tilting problems that may occur when supported by a single wheel or a small number of wheels. This ensures that the microwave generator 3 remains horizontal during movement and when stationary. When maintenance of the microwave generator 3 is required, the device can be moved to an area that is easy to operate using the wheels 333. There is no need to build a complex maintenance platform in a fixed location, simplifying the maintenance process and reducing maintenance downtime.

[0049] According to some embodiments of this application, the polysilicon reduction apparatus 100 has heating holes 14 and microwave generator 3 configured as a plurality of corresponding heating holes 14, which are spaced apart on the peripheral wall 11 of the furnace body 1.

[0050] Multiple heating holes 14 correspond one-to-one with multiple microwave generators 3, which means that the reduction cavity 13 can receive microwave energy from multiple directions of the furnace body 1 perimeter wall 11. Compared with the unidirectional input of a single heating hole 14, multidirectional input can make microwaves form a more uniform energy distribution field in the reduction cavity 13, avoiding uneven heating of the object to be reduced 2 due to the concentration of microwave energy in a local area. Multidirectional input can ensure that each object to be reduced 2 can receive sufficient energy evenly, shortening the time to reach the target temperature.

[0051] The spaced arrangement of multiple heating holes 14 on the peripheral wall 11 further optimizes the coverage of microwave energy, ensuring that the material to be reduced 2 at different locations within the reduction cavity 13 is effectively covered by microwave energy, reducing energy reception deviation caused by positional differences. Simultaneously, multiple microwave generators 3 can independently adjust their output power according to the heating requirements of different areas within the reduction cavity 13, achieving targeted heating, avoiding energy redundancy caused by excessive overall power, and improving the accuracy of energy utilization. Moreover, the configuration of multiple heating holes 14 and multiple microwave generators 3 can maintain basic heating functions through other devices when a single device fails, reducing production efficiency losses due to downtime.

[0052] In some embodiments of this application, the microwave generating device 3 also includes a power supply 5, which is housed in the housing 33 and electrically connected to the microwave generating control device 311 to provide energy to the microwave generating control device 311.

[0053] In the description of this application, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc., indicating the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings, are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this application.

[0054] In the description of this application, "first feature" and "second feature" may include one or more of the features.

[0055] In the description of this application, "multiple" means two or more.

[0056] In the description of this application, the first feature being "above" or "below" the second feature may include the first and second features being in direct contact, or it may include the first and second features not being in direct contact but being in contact through another feature between them.

[0057] In the description of this application, the terms "above," "over," and "on top" for the first feature and the second feature include the first feature being directly above or diagonally above the second feature, or simply indicate that the first feature is at a higher horizontal level than the second feature.

[0058] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "illustrative embodiment," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this application. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples.

[0059] Although embodiments of this application have been shown and described, those skilled in the art will understand that various changes, modifications, substitutions and alterations can be made to these embodiments without departing from the principles and spirit of this application, the scope of which is defined by the claims and their equivalents.

Claims

1. A reduction apparatus for polycrystalline silicon, characterized in that, include: The furnace body (1) is defined by the peripheral wall (11) and the top wall (12) to form a reduction chamber (13). The reduction chamber (13) is used to accommodate the substance to be reduced (2). The peripheral wall (11) is provided with a heating hole (14) that communicates with the reduction chamber (13). A microwave generator (3) is connected to the heating hole (14), and the microwave generator (3) is used to heat the reduction chamber (13) through the heating hole (14); A endoscopic device (4) is disposed in the heating hole (14) and the endoscopic device (4) closes the heating hole (14).

2. The apparatus for reducing polycrystalline silicon according to claim 1, characterized in that, A microwave reflective layer (15) is provided on the inner wall surface of the furnace body (1) to reflect microwaves to the object to be reduced (2).

3. The apparatus for reducing polycrystalline silicon according to claim 2, characterized in that, The object to be reduced (2) is constructed in multiple ways, and the multiple objects to be reduced (2) are spaced apart at the bottom of the reduction chamber (13) and extend toward the top of the reduction chamber (13).

4. The apparatus for reducing polycrystalline silicon according to claim 2, characterized in that, The endoscope device (4) is constructed of transparent glass.

5. The apparatus for reducing polycrystalline silicon according to claim 1, characterized in that, The microwave generator (3) includes: Microwave generating unit (31); A waveguide transmission device (32) is provided, wherein a microwave channel (322) is formed inside the waveguide transmission device (32), and one end of the microwave channel (322) is connected to the microwave generating unit (31), and the other end of the microwave channel (322) is optionally connected to the endoscope device (4). The waveguide transmission device (32) is used to introduce the microwave emitted by the microwave generating unit (31) into the reduction cavity (13) through the heating hole (14).

6. The apparatus for reducing polycrystalline silicon according to claim 5, characterized in that, The microwave generating unit (31) includes: A microwave generating control device (311) is adapted to generate microwaves; Coupler (312) is disposed between the microwave generating control device (311) and the waveguide transmission device (32), and the coupler (312) couples the microwave emitted by the microwave generating control device (311).

7. The apparatus for reducing polycrystalline silicon according to claim 5, characterized in that, The microwave generator (3) also includes: The housing (33) has a cavity inside, and the microwave generating unit (31) is housed in the cavity. A cooling conduit is housed within the receiving cavity, at least a portion of which surrounds the microwave generating unit (31) to cool the microwave generating unit (31); wherein The housing (33) is provided with an inlet (331) and an outlet (332), which are respectively located at both ends of the cooling pipe.

8. The apparatus for reducing polycrystalline silicon according to claim 5, characterized in that, The waveguide transmission device (32) includes: Waveguide (321), a microwave channel (322) is formed inside the waveguide (321), and one end of the waveguide (321) is connected to the microwave generating unit (31). A connecting flange (323) is provided at the other end of the waveguide (321), and the connecting flange (323) is detachably connected to the endoscope device (4).

9. The apparatus for reducing polycrystalline silicon according to claim 7, characterized in that, The bottom of the housing (33) is provided with a plurality of wheels (333) spaced apart.

10. The apparatus for reducing polycrystalline silicon according to any one of claims 1-9, characterized in that, The heating holes (14) and the microwave generator (3) are configured to correspond one-to-one with each other, and the heating holes (14) are spaced apart on the peripheral wall (11) of the furnace body (1).

Images