A semiconductor turret test handler

Abstract

A semiconductor turret test sorting machine relates to the technical field of semiconductor production equipment. It comprises a detection cabinet, a turret suction nozzle mechanism is arranged in the center of the detection cabinet, a plurality of suction nozzle mechanisms are arranged equidistantly on the turret suction nozzle mechanism, an upper feeding mechanism, a direction detection mechanism, a direction rotating mechanism, a detection mechanism group, a marking mechanism, a position calibration mechanism, an appearance detection mechanism, an NG product sorting mechanism, a coding mechanism and a material returning mechanism are sequentially arranged circumferentially below the turret suction nozzle mechanism. The turret suction nozzle is combined with multiple detection stations to realize rapid detection and sorting of multiple products, and eight sorting mechanisms for NG products are provided, which effectively realizes automatic rapid detection of semiconductors and classification and disposal of different NG products, and improves the production detection efficiency.

Description

Technical Field

[0001] This utility model relates to a semiconductor turret testing and sorting machine, and belongs to the field of semiconductor manufacturing equipment technology. Background Technology

[0002] In the production process of electronic products, such as semiconductors, the finished products need to be tested after production is completed, and qualified products are then subjected to subsequent sealing and lamination processes.

[0003] Existing semiconductor testing equipment is typically a linear production line or uses dedicated integrated testing equipment for zoned testing. It usually tests appearance and surface defects, with a limited number of testing items. Moreover, the testing is carried out by moving back and forth and left and right within the testing equipment. Although it is more efficient than traditional manual testing, the number of testing items is limited and the number of products tested is also limited. Therefore, a semiconductor turret test and sorting machine is proposed to solve the problems existing in the current technology. Utility Model Content

[0004] The purpose of this invention is to address the deficiencies or shortcomings in the existing technology by providing a semiconductor turret test and sorting machine. By using a turret-type suction nozzle in conjunction with multiple testing stations, it can achieve rapid testing and sorting of multiple products. It also provides a sorting mechanism for eight types of NG products, effectively realizing automated and rapid testing of semiconductors and the classification and disposal of different NG products, thereby improving production testing efficiency.

[0005] To achieve the above objectives, the present invention adopts the following technical solution: it includes a testing cabinet 1, a turret suction nozzle mechanism 6 is arranged at the center of the testing cabinet 1, a plurality of suction nozzle mechanisms 603 are arranged circumferentially at equal intervals on the turret suction nozzle mechanism 6, and a feeding mechanism 2, a direction detection mechanism 3, a direction rotation mechanism 4, a testing mechanism group 5, a marking mechanism 7, a position calibration mechanism 8, an appearance inspection mechanism 9, an NG product sorting mechanism 10, a tape and reel mechanism 11, and a return material mechanism 16 are arranged circumferentially below the turret suction nozzle mechanism 6.

[0006] Furthermore, the feeding mechanism 2 includes a material rack base, a vibrating feeding plate 201 is provided at the upper end of the material rack base, a linear conveyor mechanism 202 driven by a motor is provided at the discharge port of the vibrating feeding plate 201, a belt conveyor groove is provided on the linear conveyor mechanism 202 to convey semiconductor materials, a pressing arm 203 is provided at the front feeding port of the linear conveyor mechanism 202, a feeding calibration table 204 is provided below the feeding port of the linear conveyor mechanism 202, a pneumatic clamping table 205 is provided on the feeding calibration table 204, and a first photoelectric detection mechanism 206 is provided above the pneumatic clamping table 205, which is flush with the feeding port of the linear conveyor mechanism 202.

[0007] Furthermore, the orientation detection mechanism 3 includes a power supply base 301, a detection bracket 304 at the front end of the power supply base 301, a ring-shaped detection supplementary light 303 at the top of the detection bracket 304, and an orientation recognition camera 302 in the middle of the detection supplementary light 303, aligned with the upper suction nozzle mechanism. The orientation detection mechanism 3 has the same structure as the appearance inspection mechanism 9. The orientation rotation mechanism 4 includes a rotation bracket 401, a rotation motor base 403 on the rotation bracket 401, and a rotation motor 402 on the upper outer side of the rotation motor base 403. The output axis of the rotation motor 402 passes downward through the rotation motor. A rotating fixed seat 404 is rotatably mounted on the inner side of the rotating motor seat 403. A product positioning seat 405 is mounted on the rotating fixed seat 404. A magnetic fixing head 407 is mounted on the top of the product positioning seat 405. A second photoelectric detection mechanism 406 is mounted on both sides of the rotating fixed seat 404. The light path of the second photoelectric detection mechanism 406 is on the same plane as the magnetic fixing head 407. A rotating driven wheel 409 is mounted on the bottom of the rotating fixed seat 404. A drive wheel is mounted on the output shaft of the rotating motor 402. A rotating transmission belt 408 is mounted on the drive wheel and is connected to the rotating driven wheel 409.

[0008] Furthermore, the testing mechanism group 5 includes four identical testing mechanisms. Each testing mechanism includes a testing mechanism base 501, a testing mechanism support 502 on the testing mechanism base 501, a testing plate 503 on the top of the testing mechanism support 502, a product fixing platform 504 on the testing plate 503, and several conductive sheets 505 on both sides of the product fixing platform 504.

[0009] Furthermore, the turret suction nozzle mechanism 6 includes a DD motor 601, on which a suction nozzle turntable 602 is rotatably mounted. A suction nozzle mechanism 603 is installed on the circumferential edge of the suction nozzle turntable 602. A pneumatic slip ring 606 is provided at the center of the suction nozzle turntable 602. An air supply channel is provided in the middle of the pneumatic slip ring 606, which is connected to the air source in the testing cabinet 1. Air supply nozzles corresponding to the suction nozzle mechanism 603 are provided circumferentially on the pneumatic slip ring 606. A turret top plate 604 is provided above the pneumatic slip ring 606. The turret top plate 604 is not directly above the top of the pneumatic slip ring 606. The rotating surfaces are connected. A turret support 605 is provided on the top of the turret top plate 604. A stabilizing plate 611 is provided on the top of the turret support 605. A turret mounting bracket 13 is provided on the testing cabinet 1 and connected to the stabilizing plate 611. Several nozzle pressing mechanisms are provided on the turret top plate 604. The nozzle pressing mechanism includes a nozzle pressing cylinder 607. A nozzle pressing rod seat 609 is provided below the nozzle pressing cylinder 607. A nozzle pressing rod 610 is provided inside the nozzle pressing rod seat 609. A rod spring 608 is sleeved on the nozzle pressing rod 610 and is located inside the nozzle pressing rod seat 609.

[0010] Furthermore, the suction mechanism 603 includes a suction arm 6033, a suction seat 6034 at the bottom of the suction arm 6033, a suction nozzle 6035 at the front end of the suction seat 6034, an air guide tube inside the suction arm 6033 that passes through the suction seat 6034 and connects to the suction nozzle 6035, a buffer spring 6032 at the top of the suction arm 6033 corresponding to the vertical position of the suction nozzle 6035, a guide rod inside the buffer spring 6032, and a suction pressure plate 6031 sleeved on the top of the guide rod that abuts against the buffer spring 6032.

[0011] Furthermore, the marking mechanism 7 includes a marking mechanism base 701, which is inclined. A marking machine 702 is mounted on the marking mechanism base 701. A marking machine detection camera bracket 703 is adjusted to one side of the marking machine 702. A marking detection camera 704 is mounted on the marking machine detection camera bracket 703. A marking product base 705 is mounted below the marking machine 702. A marking product rotary motor 706 is mounted on the marking product rotary motor 705. A marking product mating seat 708 is rotatably mounted on the marking product rotary motor 706. A marking product rotating seat 707 is connected to the marking product rotary motor 706 via a bearing on the marking product mating seat 708.

[0012] Furthermore, the position calibration mechanism 8 includes a calibration detection base 801, a calibration detection bracket 802 is provided on the calibration detection base 801, a calibration detection seat 803 is provided on the top of the calibration detection bracket 802, a magnetic suction mechanism is provided at the top center of the calibration detection seat 803, and a third photoelectric detection mechanism 804 is provided on both sides of the calibration detection seat 803. The light detection path of the third photoelectric detection mechanism 804 is on the same plane as the product fixing position of the calibration detection seat 803.

[0013] Furthermore, the NG product sorting mechanism 10 includes a sorting mechanism base 1001, a sorting motor 1002 disposed within the sorting mechanism base 1001, a sorting guide seat 1003 rotatably disposed on the front side above the sorting mechanism base 1001, a sorting driven wheel 1006 disposed at the front end of the sorting guide seat 1003, a sorting drive wheel disposed at the output end of the sorting motor 1002, a sorting transmission belt 1007 disposed on the sorting drive wheel and drivingly connected to the sorting driven wheel 1006, an NG product connecting pipe 1004 disposed on the sorting driven wheel 1006, the NG product connecting pipe 1004 passing through the sorting guide seat 1003 and exiting from the end of the sorting guide seat 1003, and eight NG product guide pipes 1005 disposed on the rear side above the sorting mechanism base 1001, the eight NG product guide pipes 1005 being circumferentially arranged and positioned within the NG product connecting pipes 1004. On the circular rotation path; an NG product feeding bracket 1008 is provided at the front end of the sorting mechanism base 1001, an NG product feeding seat 1013 is provided above the NG product feeding bracket 1008, an NG product feeding pipe 1012 is provided at the front end of the NG product feeding seat 1013, a feeding trough 1011 is provided at the front end of the NG product feeding pipe 1012, an NG product outlet pipe 1014 is provided at the rear end of the NG product feeding seat 1013, and the NG product outlet pipe 1014 is connected to the NG product feeding pipe 1012, an NG product nozzle 1010 is provided at the front end of the axis of the NG product feeding pipe 1012, the NG product nozzle 1010 is installed on the NG product feeding bracket 1008, and a fourth photoelectric detection cabinet 1009 is also provided on the NG product feeding bracket 1008, the light path of the fourth photoelectric detection cabinet 1009 is on the same plane as the axis of the NG product feeding pipe 1012.

[0014] Furthermore, the testing cabinet 1 is equipped with a control panel 14 and a display screen 15. The testing cabinet 1 is also equipped with a negative ion fan 12, which is located above the feeding mechanism 2.

[0015] After adopting the above technical solution, the beneficial effects of this utility model are as follows: by using a turret-type suction nozzle in conjunction with multiple detection stations, rapid detection and sorting of multiple products can be achieved, and a sorting mechanism for eight types of NG products is provided, which effectively realizes the automated rapid detection of semiconductors and the classification and disposal of different NG products, thereby improving production detection efficiency. Attached Figure Description

[0016] To more clearly illustrate the technical solutions in the embodiments of this utility model or the prior art, the drawings used in the description of the embodiments or the prior art will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this utility model. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0017] Figure 1This is a schematic diagram of the structure of this utility model;

[0018] Figure 2 yes Figure 1 The second angle view;

[0019] Figure 3 yes Figure 1 The third-angle view;

[0020] Figure 4 yes Figure 1 The fourth angle view;

[0021] Figure 5 This is a schematic diagram of the feeding mechanism 2 in this utility model;

[0022] Figure 6 This is a schematic diagram of the orientation detection mechanism 3 in this utility model;

[0023] Figure 7 This is a schematic diagram of the directional rotation mechanism 4 in this utility model;

[0024] Figure 8 This is a schematic diagram of the detection mechanism in this utility model;

[0025] Figure 9 This is a schematic diagram of the structure of the transfer tower suction nozzle mechanism 6 of this utility model;

[0026] Figure 10 This is a schematic diagram of the marking mechanism 7 in this utility model;

[0027] Figure 11 This is a schematic diagram of the position calibration mechanism 8 in this utility model;

[0028] Figure 12 This is a schematic diagram of the NG product sorting mechanism 10 in this utility model.

[0029] Explanation of reference numerals in the attached diagram: 1. Inspection cabinet; 2. Feeding mechanism; 3. Direction detection mechanism; 4. Direction rotation mechanism; 5. Inspection mechanism group; 6. Turret suction nozzle mechanism; 7. Marking mechanism; 8. Position calibration mechanism; 9. Appearance inspection mechanism; 10. NG product sorting mechanism; 11. Tape and reel mechanism; 12. Negative ion fan; 13. Turret mounting bracket; 14. Control panel; 15. Display screen; 16. Return material mechanism; 201. Vibrating feeding tray; 202. Linear conveyor mechanism; 203. Pressing arm; 204. Feeding calibration table; 205. Pneumatic clamping table; 206. First photoelectric detection mechanism; 3. Power supply base. 01. Direction recognition camera; 302. Detection supplement light; 303. Detection bracket; 304. Rotating bracket; 401. Rotary motor; 402. Rotary motor base; 403. Rotating fixed base; 404. Product positioning base; 405. Two photoelectric detection mechanisms; 406. Magnetic fixing head; 407. Rotary transmission belt; 408. Rotary driven wheel; 409. Detection mechanism base; 501. Detection mechanism bracket; 502. Detection plate; 503. Product fixing platform; 504. Conductive sheet; 505. DD motor; 601. Nozzle turntable; 602. Nozzle mechanism; 603. Turret top plate; 604. 605. Turret bracket; 606. Pneumatic slip ring; 607. Nozzle cylinder; 608. Push rod spring; 609. Nozzle push rod seat; 610. Nozzle push rod; 611. Stabilizing plate; 6031. Suction nozzle pressure plate; 6032. Buffer spring; 6033. Suction nozzle arm; 6034. Suction nozzle seat; 6035. Nozzle; 701. Marking mechanism base; 702. Marking machine; 703. Marking machine detection camera bracket; 704. Marking detection camera; 705. Marking product base; 706. Marking product rotary motor; 707. Marking product rotating seat; 708. Marking product mating seat; Calibration. Detection base 801, calibration detection bracket 802, calibration detection seat 803, third photoelectric detection mechanism 804, sorting mechanism seat 1001, sorting motor 1002, sorting guide seat 1003, NG product connecting pipe 1004, NG product guide pipe 1005, sorting driven wheel 1006, sorting transmission belt 1007, NG product feeding bracket 1008, fourth photoelectric detection cabinet 1009, NG product nozzle 1010, feeding trough 1011, NG product feeding pipe 1012, NG product feeding seat 1013, NG product outlet pipe 1014. Detailed Implementation

[0030] See Figures 1-12As shown, the technical solution adopted in this specific embodiment is as follows: It includes a testing cabinet 1, with a turret suction nozzle mechanism 6 arranged at the center of the testing cabinet 1. Several suction nozzle mechanisms 603 are equidistantly arranged circumferentially below the turret suction nozzle mechanism 6. Below the turret suction nozzle mechanism 6, in sequence, are a feeding mechanism 2, a direction detection mechanism 3, a direction rotation mechanism 4, a testing mechanism group 5, a marking mechanism 7, a position calibration mechanism 8, an appearance inspection mechanism 9, an NG product sorting mechanism 10, a tape and reel mechanism 11, and a return mechanism 16. In this embodiment, a power supply and an air supply are installed inside the testing cabinet to provide power for the equipment operation. They are connected to the relevant mechanisms through wires and air pipes. The turret suction nozzle mechanism is the product suction, rotation, and conveying mechanism, which picks up and rotates the product... After being sucked up, the product is transported to different workstations for relevant testing via rotation. This embodiment illustrates the structure of eighteen suction nozzles, which can simultaneously transport eighteen products for testing. In addition to providing testing-related mechanisms, it also provides a marking mechanism and a tape-making mechanism. The marking mechanism marks qualified products after testing. After marking, qualified products are selected according to production needs as to whether tape-making is required. If so, they enter the tape-making station for tape-making assembly and are then uniformly output outwards through the tape-making mechanism. If tape-making assembly is not required, qualified products are sent to the return material station for return material collection by the return material mechanism. This enriches the functionality of the testing equipment, reduces equipment procurement costs, and improves production efficiency and profitability.

[0031] In this embodiment, a multi-station testing mechanism group is also provided. The testing mechanism group 5 includes four identical testing mechanisms. Each testing mechanism includes a testing mechanism base 501, a testing mechanism support 502 on the testing mechanism base 501, a testing plate 503 on the top of the testing mechanism support 502, a product fixing platform 504 on the testing plate 503, and several conductive plates 505 on both sides of the product fixing platform 504. The testing mechanism is a live-state testing mechanism. Through the conductive plates on the testing mechanism, different pins of the semiconductor product can be contacted to detect whether the connection is good or whether there is poor contact. When the contact is good, the actual performance of the semiconductor is also tested. The four testing mechanisms can test four semiconductor products at the same time, thereby greatly improving the testing speed.

[0032] In this embodiment, a sorting mechanism for up to eight NG items is provided. The NG sorting mechanism 10 includes a sorting mechanism base 1001, a sorting motor 1002 disposed within the sorting mechanism base 1001, a sorting guide seat 1003 rotatably disposed on the front side above the sorting mechanism base 1001, a sorting driven wheel 1006 disposed at the front end of the sorting guide seat 1003, a sorting drive wheel disposed at the output end of the sorting motor 1002, a sorting transmission belt 1007 disposed on the sorting drive wheel and drivingly connected to the sorting driven wheel 1006, and an NG connecting pipe 1004 disposed on the sorting driven wheel 1006. An NG product connecting pipe 1004 passes through the sorting guide seat 1003 and exits from the end of the sorting guide seat 1003. Eight NG product guide pipes 1005 are arranged in a circle on the rear side above the sorting mechanism seat 1001, and are located on the circumferential rotation path of the NG product connecting pipe 1004. An NG product feeding bracket 1008 is provided at the front end of the sorting mechanism seat 1001. An NG product feeding seat 1013 is provided above the NG product feeding bracket 1008. An NG product feeding pipe 1012 is provided at the front end of the NG product feeding seat 1013. The front end of the NG product feeder 1013 is equipped with a feed chute 1011, and the rear end of the NG product feeder 1013 is equipped with an NG product outlet pipe 1014, which is connected to the NG product feed pipe 1012. An NG product nozzle 1010 is located at the front end of the axis of the NG product feed pipe 1012 and is mounted on the NG product feed bracket 1008. A fourth photoelectric detection cabinet 1009 is also installed on the NG product feed bracket 1008. The light path of the fourth photoelectric detection cabinet 1009 is on the same plane as the axis of the NG product feed pipe 1012. When a semiconductor product is detected as NG... Afterwards, the NG items will be marked. When the NG items are put into the feed trough 1011, the sorting guide seat will rotate under the drive of the sorting motor, which will drive the NG item connecting tube to rotate to the corresponding NG item guide tube alignment position. The NG item outlet tube is connected to the NG item connecting tube through a hose. The NG item nozzle blows air to blow the NG item into the NG item feed tube under high pressure and finally blows it out through the NG item guide tube into the external NG item collection equipment, realizing the sorting and collection of up to eight types of NG items. During sorting, the fourth photoelectric detection mechanism will detect whether the NG item has been put down, thereby triggering the NG item nozzle to blow air.

[0033] More specifically, the feeding mechanism 2 includes a material rack base, a vibrating feeding plate 201 is provided at the upper end of the material rack base, a linear conveyor mechanism 202 driven by a motor is provided at the discharge port of the vibrating feeding plate 201, a belt conveyor groove is provided on the linear conveyor mechanism 202 to convey semiconductor materials, a pressing arm 203 is provided at the front feeding port of the linear conveyor mechanism 202, a feeding calibration table 204 is provided below the feeding port of the linear conveyor mechanism 202, a pneumatic clamping table 205 is provided on the feeding calibration table 204, and a first photoelectric detection mechanism 206 is provided above the pneumatic clamping table 205, which is flush with the feeding port of the linear conveyor mechanism 202.

[0034] More specifically, the orientation detection mechanism 3 includes a power supply base 301, a detection bracket 304 at the front end of the power supply base 301, a ring-shaped detection supplementary light 303 at the top of the detection bracket 304, and an orientation recognition camera 302 in the middle of the detection supplementary light 303, which is aligned with the upper suction nozzle mechanism. The orientation detection mechanism 3 has the same structure as the appearance inspection mechanism 9. In this embodiment, the orientation detection mechanism is used to detect whether the orientation of the product being fed is correct, so as to facilitate subsequent inspection operations. The detection supplementary light illuminates the product to ensure the accuracy of the orientation recognition camera. If the orientation is incorrect, it will enter the orientation rotation mechanism to turn. If the orientation is correct, it will enter the inspection station for multi-item inspection.

[0035] The directional rotation mechanism 4 includes a rotating bracket 401, a rotating motor base 403 mounted on the rotating bracket 401, a rotating motor 402 mounted on the upper outer side of the rotating motor base 403, the output axis of the rotating motor 402 passing downward through the rotating motor base 403, a rotating fixing seat 404 rotatably mounted on the inner side above the rotating motor base 403, a product positioning seat 405 mounted on the rotating fixing seat 404, a magnetic fixing head 407 mounted on the top of the product positioning seat 405, and second photoelectric detection mechanisms 406 mounted on both sides of the rotating fixing seat 404, with the light path of the second photoelectric detection mechanism 406 and the magnetic fixing head 407 on the same plane. The bottom of the rotating fixed base 404 is provided with a rotating driven wheel 409. The output shaft of the rotary motor 402 is provided with a drive wheel, and the drive wheel is provided with a rotary transmission belt 408 that is connected to the rotating driven wheel 409. In this embodiment, when the product is detected as having an incorrect direction in the direction detection mechanism, it is turned in the direction rotation mechanism. The rotary motor drives the rotating fixed base to rotate a maximum of 180 degrees, thereby realizing the product's turning. The second photoelectric detection mechanism detects the turning result and sends back the detection result, thereby triggering the next action signal. During the turning, the product needs to be placed on the magnetic suction fixed head and separated from the suction nozzle mechanism to complete the turning.

[0036] More specifically, the turret suction nozzle mechanism 6 includes a DD motor 601, on which a suction nozzle turntable 602 is rotatably mounted. The suction nozzle mechanism 603 is installed on the circumferential edge of the suction nozzle turntable 602. In this embodiment, the structure of eighteen suction nozzle mechanisms is illustrated, which can perform suction and release actions for eighteen products, thereby improving detection efficiency.

[0037] A pneumatic slip ring 606 is provided at the center of the suction nozzle turntable 602. The pneumatic slip ring acts as a bearing. An air supply channel is provided in the middle of the pneumatic slip ring 606, which is connected to the air source in the testing cabinet 1. The pneumatic slip ring 606 is also provided with air supply nozzles corresponding to the suction nozzle mechanism 603 around its circumference. The pneumatic slip ring can not only rotate with the suction nozzle turntable, but also serves as a concentrator for supplying air to the suction nozzle mechanism, distributing the airflow. A turret top plate 604 is provided above the pneumatic slip ring 606. The turret top plate 604 is connected to the non-rotating surface of the top of the pneumatic slip ring 606. A turret bracket 605 is provided on the top of the turret top plate 604. A stabilizing plate 611 is provided on the top of the turret bracket 605. A turret mounting bracket 13 is provided on the testing cabinet 1, which is connected to the stabilizing plate 611. The cooperation between the turret mounting bracket and the stabilizing plate ensures the rotational stability of the suction nozzle turntable and the rotational stability of the suction nozzle mechanism.

[0038] The turret top plate 604 is equipped with several nozzle pressing mechanisms. In this embodiment, eight nozzle pressing mechanisms are shown, corresponding to the feeding mechanism, direction rotation mechanism, detection mechanism group, marking mechanism, position calibration mechanism, appearance inspection mechanism, and tape feeding mechanism. The detection mechanism corresponds to two nozzle pressing mechanisms. The nozzle pressing mechanisms allow the suction nozzle mechanism to be pressed down during inspection, ensuring it does not move and thus improving inspection accuracy. Each nozzle pressing mechanism includes a nozzle pressing cylinder 607, with a... A nozzle push rod seat 609 is provided, and a nozzle push rod 610 is provided inside the nozzle push rod seat 609. A push rod spring 608 is sleeved on the nozzle push rod 610, and the push rod spring 608 is located inside the nozzle push rod seat 609. The nozzle cylinder drives the nozzle push rod downward. Since a pressure plate structure connected to the nozzle cylinder is provided on the nozzle push rod, the pressure plate structure abuts against the push rod, and thus it will be flexibly pressed down under the action of the push rod spring, improving the stability when pressing down the nozzle push rod and further ensuring the accuracy of the test.

[0039] More specifically, the suction mechanism 603 includes a suction arm 6033, a suction seat 6034 at the bottom of the suction arm 6033, and a suction nozzle 6035 at the front end of the suction seat 6034. An air guide tube is provided inside the suction arm 6033, passing through the suction seat 6034 and connecting to the suction nozzle 6035. A buffer spring 6032 is provided at the top of the suction arm 6033 at a position perpendicular to the suction nozzle 6035. A guide rod is provided inside the buffer spring 6032, and a suction pressure plate 6031 is sleeved on the top of the guide rod, which abuts against the buffer spring 6032. In this embodiment, the suction mechanism is provided with a buffer spring, which can ensure continuous pressure on the suction arm, thereby improving the stability during the product suction process. The suction nozzle realizes the suction and release of the product through the air guide tube.

[0040] More specifically, the marking mechanism 7 includes a marking mechanism base 701, which is inclined. A marking machine 702 is mounted on the marking mechanism base 701. A marking machine detection camera bracket 703 is adjusted on one side of the marking machine 702. A marking detection camera 704 is mounted on the marking machine detection camera bracket 703. In this embodiment, the marking detection camera will detect the product placement and the marking status when marking is required on qualified products.

[0041] Below the marking machine 702 is a marking product base 705, on which a marking product rotary motor 706 is mounted. A marking product mating seat 708 is rotatably mounted on the marking product rotary motor 706. A marking product rotating seat 707 is connected to the marking product rotating motor 706 via a bearing on the marking product mating seat 708. In this embodiment, since four products can be inspected simultaneously, four products can be placed on the marking product rotating seat during marking, and the marking operation can be performed by the marking machine, thus improving the marking efficiency.

[0042] More specifically, the position calibration mechanism 8 includes a calibration detection base 801, a calibration detection bracket 802 on the calibration detection base 801, a calibration detection seat 803 on the top of the calibration detection bracket 802, a magnetic suction mechanism at the top center of the calibration detection seat 803, and third photoelectric detection mechanisms 804 on both sides of the calibration detection seat 803. The light detection path of the third photoelectric detection mechanism 804 is on the same plane as the product fixing position of the calibration detection seat 803. In this embodiment, to facilitate the tape and assembly of the required products, a unified position calibration operation is performed after marking to ensure that the product is picked up by the suction nozzle mechanism in the correct direction and angle. The calibration detection seat is also equipped with a magnetic suction mechanism so that the position can be corrected when the product is placed down. The third photoelectric detection mechanism detects the placement and sends a feedback signal after the correction is completed, which is then picked up by the suction nozzle mechanism, thereby improving the operation accuracy of the next station.

[0043] More specifically, the testing cabinet 1 is equipped with a control panel 14 and a display screen 15. The testing cabinet 1 is also equipped with a negative ion fan 12, which is located above the feeding mechanism 2. The testing process is uniformly set through the control panel, the testing status is displayed on the display screen, and the negative ion fan blows air on the material to remove static electricity from the product.

[0044] The working principle of this utility model is as follows: After being vibrated by the vibrating plate 201, the products from the feeding mechanism 2 are arranged in an orderly manner and fed through the linear conveyor mechanism. The position is checked by the first photoelectric detection mechanism 206 on the pneumatic clamping table 205 at its front end to ensure correctness. The position is confirmed again after clamping by the pneumatic clamping table, ensuring neat placement and preventing skewing. Combined with the light detection of the first photoelectric detection mechanism, no alarm will be triggered if the material is accurately placed. If the placement is inaccurate, feedback will be sent back to the control system for an alarm. After feeding, the material is sucked up by the suction nozzle mechanism and fed by DD electric current. The machine 601 is driven to rotate counterclockwise and move to the direction detection mechanism 3 to check if the placement direction is correct. After the detection is completed, it continues to rotate counterclockwise until it is above the direction rotation mechanism 4. If the direction detected at the previous station is incorrect, the suction nozzle mechanism 603 releases the product and rotates it through the rotation mechanism 4. After the rotation is completed, the suction nozzle mechanism 603 picks up the product again and moves it to the detection mechanism group 5. The detection mechanism group 5 can simultaneously detect 4 products, that is, the previous steps are repeated 4 times, rotating the product to the detection mechanism group 5 for detection, thereby improving the detection efficiency. After the detection is completed, the detection result is fed back to the central control system, thereby driving the suction nozzle machine. Mechanism 603 picks up the inspected products and sends them to the marking mechanism station. Marking mechanism 7 can also mark 4 products. After marking, nozzle mechanism 603 picks up the marked products again and sends them to position calibration mechanism 8 to check if the position during pickup is correct and to perform calibration. After calibration, the products are moved to appearance inspection mechanism 9, where the appearance of the products is inspected to determine if there are any surface defects. Combined with multiple tests performed by inspection mechanism group 5, up to eight NG products are sorted out. NG products are then moved to NG product sorting mechanism 10 and sorted according to different categories. Products are fed into different NG (non-product) guide tubes 1005 for collection, while qualified products are moved to the tape-and-reel mechanism 11 for selective tape-and-reel assembly as needed. Products that do not require tape-and-reel assembly are moved to the return material mechanism 16 for collection. Products that have been tape-and-reeled are then transported out by the tape-and-reel mechanism 11, completing the product inspection and tape-and-reel assembly. The entire inspection and production process is controlled by programming on the control panel 14, and the inspection and production status is displayed in real time on the display screen 15. The rotary inspection method, combined with multi-station project inspection, can greatly improve the inspection accuracy and perform more detailed sorting of NG products to ensure the yield rate.

[0045] The above description is only used to illustrate the technical solution of this utility model and is not intended to limit it. Any other modifications or equivalent substitutions made by those skilled in the art to the technical solution of this utility model, as long as they do not depart from the spirit and scope of the technical solution of this utility model, should be covered within the scope of the claims of this utility model.

Claims

1. A semiconductor turret test handler comprising a test cabinet (1), characterized in that: The detection cabinet (1) is provided with a turret suction nozzle mechanism (6) in the center, a plurality of suction nozzle mechanisms (603) are arranged equidistantly in the circumference of the turret suction nozzle mechanism (6), and a feeding mechanism (2), a direction detection mechanism (3), a direction rotating mechanism (4), a detection mechanism group (5), a marking mechanism (7), a position calibration mechanism (8), an appearance detection mechanism (9), an NG product sorting mechanism (10), a ribbon coding mechanism (11) and a material returning mechanism (16) are sequentially arranged in the circumference below the turret suction nozzle mechanism (6).

2. A semiconductor tower test handler according to claim 1, wherein: The feeding mechanism (2) comprises a rack base, a vibrating feeding disc (201) is arranged at the tail end of the rack base, a linear conveying mechanism (202) driven by a motor is arranged at the discharging port position of the vibrating feeding disc (201), a belt conveying groove is arranged on the linear conveying mechanism (202) to convey the semiconductor material, a pressing arm (203) is arranged at the feeding port of the front end of the linear conveying mechanism (202), a feeding calibration table (204) is arranged below the feeding port of the linear conveying mechanism (202), a pneumatic clamping table (205) is arranged on the feeding calibration table (204), and a first photoelectric detection mechanism (206) is arranged above the pneumatic clamping table (205) and is flush with the feeding port of the linear conveying mechanism (202).

3. A semiconductor tower test handler according to claim 1, wherein: The direction detection mechanism (3) comprises a power supply seat (301), a detection support (304) is arranged at the front end of the power supply seat (301), a ring-shaped detection light supplement lamp (303) is arranged at the top of the detection support (304), a direction recognition camera (302) is arranged in the middle of the detection light supplement lamp (303) and is aligned with the upper suction nozzle mechanism, the direction detection mechanism (3) is the same as the appearance detection mechanism (9) in structure, and the direction rotating mechanism (4) comprises a rotating support (401), a rotating motor seat (403) is arranged on the rotating support (401), a rotating motor (402) is arranged above the outer side of the rotating motor seat (403), the output shaft of the rotating motor (402) penetrates downward through the rotating motor seat (403), a rotating fixing seat (404) is rotatably arranged above the inner side of the rotating motor seat (403), a product positioning seat (405) is arranged on the rotating fixing seat (404), a magnetic attraction fixing head (407) is arranged at the top of the product positioning seat (405), second photoelectric detection mechanisms (406) are arranged on the two sides of the rotating fixing seat (404), the light irradiation paths of the second photoelectric detection mechanisms (406) are in the same plane path as the magnetic attraction fixing head (407), a rotating driven wheel (409) is arranged at the bottom of the rotating fixing seat (404), a driving wheel is arranged on the output shaft of the rotating motor (402), and a rotating transmission belt (408) is arranged on the driving wheel and is in transmission connection with the rotating driven wheel (409).

4. The semiconductor turret test handler of claim 1, wherein: The detection mechanism group (5) comprises four identical detection mechanisms, and each detection mechanism comprises a detection mechanism base (501), a detection mechanism support (502) arranged on the detection mechanism base (501), a detection plate (503) arranged on the top of the detection mechanism support (502), and a product fixing table (504) arranged on the detection plate (503).

5. A semiconductor carousel test handler according to claim 1 wherein: The turret suction nozzle mechanism (6) comprises a DD motor (601), a suction nozzle rotating disc (602) arranged on the DD motor (601), a suction nozzle mechanism (603) installed on the circumferential edge of the suction nozzle rotating disc (602), a pneumatic slip ring (606) arranged at the center of the suction nozzle rotating disc (602), a gas supply channel arranged in the middle of the pneumatic slip ring (606) and connected with a gas source in the detection cabinet (1), a gas supply nozzle corresponding to the suction nozzle mechanism (603) arranged on the circumferential surface of the pneumatic slip ring (606), a turret top plate (604) arranged above the pneumatic slip ring (606), the turret top plate (604) being connected with the non-rotating surface at the top of the pneumatic slip ring (606), a turret support (605) arranged at the top of the turret top plate (604), a stabilizing plate (611) arranged at the top of the turret support (605), a turret mounting frame (13) arranged on the detection cabinet (1) and connected with the stabilizing plate (611), a plurality of nozzle pressing mechanisms arranged on the turret top plate (604), wherein each nozzle pressing mechanism comprises a nozzle pressing cylinder (607), a nozzle pressing top rod seat (609) arranged below the nozzle pressing cylinder (607), a nozzle pressing top rod (610) arranged in the nozzle pressing top rod seat (609), and a top rod spring (608) arranged outside the nozzle pressing top rod (610) and located in the nozzle pressing top rod seat (609).

6. A semiconductor tower test handler according to claim 5, wherein: The suction nozzle mechanism (603) comprises a suction nozzle arm (6033), a suction nozzle seat (6034) arranged at the bottom of the suction nozzle arm (6033), a suction nozzle (6035) arranged at the front end of the suction nozzle seat (6034) and downward, a gas guide pipe arranged in the suction nozzle arm (6033) and penetrating through the suction nozzle seat (6034) and connected with the suction nozzle (6035), a buffer spring (6032) arranged at the top of the suction nozzle arm (6033) and corresponding to the vertical position of the suction nozzle (6035), a guide rod arranged in the buffer spring (6032), and a suction nozzle pressing plate (6031) arranged on the top of the guide rod and abutting against the buffer spring (6032).

7. A semiconductor carousel test handler according to claim 1 wherein: The marking mechanism (7) comprises a marking mechanism base (701), which is arranged obliquely, and a marking machine (702) arranged on the marking mechanism base (701); one side of the marking machine (702) is associated with a marking machine detection camera support (703), and a marking detection camera (704) is arranged on the marking machine detection camera support (703); a marking product base (705) is arranged below the marking machine (702), a marking product rotating motor (706) is arranged on the marking product base (705), a marking product matching seat (708) is rotatably arranged on the marking product rotating motor (706), and a marking product rotating seat (707) is connected to the marking product rotating motor (706) through bearings.

8. The semiconductor turret test handler of claim 1, wherein: The position calibration mechanism (8) comprises a calibration detection base (801), a calibration detection support (802) arranged on the calibration detection base (801), and a calibration detection seat (803) arranged on the top of the calibration detection support (802); a magnetic attraction mechanism is arranged at the top center of the calibration detection seat (803); and third photoelectric detection mechanisms (804) are arranged on both sides of the calibration detection seat (803), and the light detection path of the third photoelectric detection mechanisms (804) is in the same plane path as the product fixing position of the calibration detection seat (803).

9. The semiconductor turret test handler of claim 1, wherein: The NG product sorting mechanism (10) comprises a sorting mechanism seat (1001), a sorting motor (1002) is arranged in the sorting mechanism seat (1001), a sorting guide seat (1003) is rotatably arranged on the front side of the sorting mechanism seat (1001), a sorting driven wheel (1006) is arranged at the front end of the sorting guide seat (1003), a sorting driving wheel is arranged at the output end of the sorting motor (1002), a sorting transmission belt (1007) is arranged on the sorting driving wheel and is in transmission connection with the sorting driven wheel (1006), an NG product connecting pipe (1004) is arranged on the sorting driven wheel (1006), the NG product connecting pipe (1004) penetrates through the sorting guide seat (1003) and passes out from the end of the sorting guide seat (1003), eight NG product guide pipes (1005) are arranged on the rear side of the sorting mechanism seat (1001), the eight NG product guide pipes (1005) are circumferentially arranged and are located on the circumferential rotation path of the NG product connecting pipe (1004); an NG product feeding support (1008) is arranged at the front end of the sorting mechanism seat (1001), an NG product feeding seat (1013) is arranged above the NG product feeding support (1008), an NG product feeding pipe (1012) is arranged at the front end of the NG product feeding seat (1013), a feeding groove (1011) is arranged at the front end of the NG product feeding pipe (1012), an NG product leading-out pipe (1014) is arranged at the rear end of the NG product feeding seat (1013) and is in communication with the NG product feeding pipe (1012), an NG product blowing nozzle (1010) is arranged at the front end of the axis of the NG product feeding pipe (1012), the NG product blowing nozzle (1010) is installed on the NG product feeding support (1008), a fourth photoelectric detection mechanism (1009) is further arranged on the NG product feeding support (1008), and the light irradiation path of the fourth photoelectric detection mechanism (1009) is located in the same plane as the axis of the NG product feeding pipe (1012).

10. The semiconductor turret test handler of claim 1, wherein: The detection cabinet (1) is provided with a control panel (14) and a display screen (15), and further provided with a negative ion fan (12) above the feeding mechanism (2).

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