Cleaning tool for a machine table carrier

Abstract

The application provides a cleaning tool for a machine table carrier, which is used for cleaning the upper surface of the machine table carrier. The cleaning tool comprises a clamping part above the machine table carrier for clamping a cleaning sheet; a height adjusting device for driving the clamping part to ascend and descend in the vertical direction; at least two pressure sensing devices arranged below the machine table carrier respectively; and at least two balance adjusting devices arranged at the bottom of the workbench surface and connected with the pressure sensing devices. The technical scheme drives the cleaning sheet to descend and contact the upper surface of the machine table carrier and adsorb impurities through the height adjusting device, then moves to the next point and completes the cleaning work of all the points to be cleaned. During the cleaning process, the pressure sensing devices perform pressure feedback to automatically adjust the workbench in real time, so as to ensure the consistency of the pressure of the cleaning sheet contacting the machine table carrier. The scheme improves the cleanliness of the adhesive tape, reduces the surface failure rate of the product, and greatly reduces the dependence on manual cleaning.

Description

Technical Field

[0001] This application relates to the field of semiconductor manufacturing technology, and in particular to a cleaning fixture for a machine tool carrier. Background Technology

[0002] In the semiconductor wafer manufacturing and inspection process, wafers need to be transferred quickly and accurately between various process modules and inspection equipment. The fork, as the medium for transporting products, has its forked end directly supporting the back of the product. During operation, dust, particles, and other contaminants may accumulate on the surface of the fork. When these contaminants come into contact with the back of the wafer, they will leave marks on the wafer, resulting in wafer surface defects and reducing product yield.

[0003] Currently, the industry commonly uses manual methods for cleaning and maintaining forks. Operators use test pieces with the same surface condition as the product to perform adhesive cleaning. This method has the following limitations:

[0004] 1) Manual operation cannot accurately ensure that the adhesive surface and the contact surface are parallel, which can easily lead to uneven force on the two contact points, resulting in a high risk of contaminant residue and poor and unstable cleaning effect.

[0005] 2) The entire process relies entirely on manual labor, resulting in low operational efficiency and a long processing time.

[0006] 3) Manual operation results in a very low utilization rate of experimental pieces, with a large number of experimental pieces being discarded without being fully utilized, leading to high production costs.

[0007] The various problems that have arisen in the actual operation of semiconductor equipment have become technical challenges that urgently need to be solved in this field. Utility Model Content

[0008] In view of the defects and shortcomings in the operation of the above semiconductor equipment, this application provides a cleaning fixture for the equipment carrier to achieve precise and efficient cleaning of the equipment carrier, significantly improve the cleanliness of the contact position after tape application and improve the utilization rate of the test piece.

[0009] To achieve the above and other related objectives, this application provides a cleaning fixture for a machine tool carrier, used to clean the upper surface of the machine tool carrier, which is disposed on the worktable of a machine tool and includes a main handle and two forked portions extending outward from the main handle, the forked portions being used to carry products; the cleaning fixture includes:

[0010] A clamping part, located above the machine carrier, is used to detachably clamp the cleaning sheet;

[0011] A height adjustment device is used to drive the clamping part to rise and fall vertically so that the cleaning plate contacts the upper surface of the forked part and adsorbs impurities on its upper surface;

[0012] At least two pressure sensing devices are respectively disposed below each of the bifurcations to detect the force data at the contact points of the bifurcations;

[0013] At least two balance adjustment devices are located at the bottom of the worktable and are connected to the pressure sensing device for signal transmission, and adjust the levelness of the worktable according to the detection data of each pressure sensing device.

[0014] In some embodiments, the height adjustment device includes:

[0015] A top plate that can reciprocate vertically, and a clamping part disposed below the top plate and moving synchronously with the top plate;

[0016] Guide sections are located on both sides of the clamping section and are disposed between the machine base and the top plate. They are used to support and drive the top plate to move vertically so that the cleaning sheet clamped on the clamping section can contact the upper surface of the machine base carrier.

[0017] In some embodiments, the height adjustment device includes:

[0018] A top plate is fixedly mounted on the machine base, and the clamping part is located below the top plate;

[0019] A guide portion is disposed between the top plate and the clamping portion to drive the clamping portion to move vertically so that the cleaning sheet clamped on the clamping portion can contact the upper surface of the machine carrier.

[0020] In some embodiments, the balance adjustment device includes at least two electric push rods or adjusting screws, the top of each of the electric push rods or adjusting screws being connected to different positions on the bottom of the worktable.

[0021] In some embodiments, the cleaning fixture includes four pressure sensors, with two pressure sensors disposed below each of the bifurcations, and the four pressure sensors are arranged in a rectangular array.

[0022] In some embodiments, the cleaning fixture further includes a planar displacement assembly, which includes an x-axis displacement device for adjusting the position of the cleaning plate in the x-direction of the horizontal plane.

[0023] In some embodiments, the planar displacement assembly includes a y-axis displacement device for adjusting the position of the cleaning sheet in the y-direction of a horizontal plane, wherein the y-direction is perpendicular to the x-direction.

[0024] In some embodiments, the clamping part includes two jaws, which are pneumatic clamps or mechanical jaws.

[0025] In some embodiments, when the clamping part clamps the cleaning plate, the cleaning plate is perpendicular to the central axis of the two bifurcated parts and spans the two bifurcated parts in the top view of the machine carrier, and the cleaning plate simultaneously contacts the upper surface of the two bifurcated parts for dust removal.

[0026] In some embodiments, a cleaning sheet transfer device is also included, which is provided at the entrance of the cleaning equipment and has a transport platform for conveying the cleaning sheet to the clamping part.

[0027] Compared with the prior art, the technical solution provided in this application has at least the following beneficial effects:

[0028] This application provides a cleaning fixture for a machine tool carrier, used to clean the upper surface of the machine tool carrier. The clamping part of the cleaning fixture holds a cleaning sheet, and is driven to descend and contact the upper surface of the machine tool carrier through a height adjustment device to adsorb impurities. Then it is lifted and moved to the next cleaning point to complete the cleaning work of all points to be cleaned. During the cleaning process, the pressure sensing device provides pressure feedback to automatically level the worktable in real time, ensuring the consistency of pressure between the cleaning sheet and the machine tool carrier. This overcomes the limitation of uneven force on the two contact points due to manual operation, ensures the cleanliness of the contact points after the adhesive tape is applied, greatly reduces the product surface defect rate, and also significantly reduces the dependence on manpower. Attached Figure Description

[0029] Figure 1 This is a structural schematic diagram of the machine tool carrier;

[0030] Figure 2 This is a schematic diagram of the cleaning fixture provided in Embodiment 1 of this application;

[0031] Figure 3 This is a top view of the internal structure of the cleaning fixture provided in Embodiment 1 of this application;

[0032] Figure 4 This is a schematic diagram of the internal side view of the cleaning fixture provided in Embodiment 1 of this application;

[0033] Figure 5 This is a schematic diagram of the cleaning fixture provided in Embodiment 2 of this application;

[0034] Figure 6 This is a schematic diagram of the cleaning fixture provided in Embodiment 3 of this application.

[0035] List of reference numerals in the attached diagram:

[0036] 10. Machine base; 110. Base; 120. Main frame; 130. Worktable;

[0037] 20. Machine platform carrier; 210. Main body handle; 220. Forked section;

[0038] 30. Clamping part;

[0039] 40. Height adjustment device; 410. Top plate; 420. Guide section;

[0040] 50. Planar displacement assembly; 510. X-axis displacement device; 520. Y-axis displacement device;

[0041] 60. Balance adjustment device;

[0042] 70. Pressure sensing device;

[0043] 80. Transmission device;

[0044] 90. Cleaning tablets. Detailed Implementation

[0045] The following specific embodiments illustrate the implementation of this application. Those skilled in the art can easily understand other advantages and effects of this application from the content disclosed in this specification. This application can also be implemented or applied through other different specific embodiments, and various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of this application. It should be noted that, unless otherwise specified, the following embodiments and features in the embodiments can be combined with each other.

[0046] It should be noted that the illustrations provided in the embodiments of this application are merely schematic representations of the basic concept of this application. Although the illustrations only show components relevant to this application and are not drawn according to the actual number, shape, and size of components in implementation, the shape, quantity, and proportion of each component can be arbitrarily changed in actual implementation, and the layout of the components may also be more complex. The structures, proportions, sizes, etc., shown in the accompanying drawings are only used to complement the content disclosed in the specification for those skilled in the art to understand and read, and are not intended to limit the implementation conditions of this application. Therefore, they have no substantial technical significance. Any modifications to the structure, changes in the proportional relationships, or adjustments to the size, without affecting the effects and purposes that this application can produce, should still fall within the scope of the technical content disclosed in this application.

[0047] Example 1:

[0048] See Figures 1 to 4 This embodiment provides a cleaning fixture for a machine tool carrier, used to clean the upper surface of the machine tool carrier. First, see... Figure 1 , Figure 1 The structure of an existing machine carrier 20 is shown, including a main handle 210 and two forked portions 220 extending outward from the main handle 210. The machine carrier 20 is in the shape of a fork. The two forked portions 220 are used to carry products, such as wafers. Each forked portion 220 has two contact points on its upper surface, that is, the machine carrier 20 has a total of four contact points. The lower surface of the wafer contacts the four contact points, which allows it to be stably placed on the upper surface of the two forked portions 220, realizing its multi-point transportation process.

[0049] See Figures 2 to 4 The machine tool 10 includes a base 110 and a frame body 120 disposed above the base 110. The base 110 and the frame body 120 are existing general machine tool structures or similar to existing general machine tool structures, and will not be described in detail here. A worktable 130 is also disposed above the base 110, and the frame body 120 is located in the surrounding area of ​​the worktable 130. The machine tool carrier 20 is disposed above the worktable 130 of the machine tool 10.

[0050] See also Figures 2 to 4 The cleaning fixture provided in this embodiment includes a clamping part 30, a height adjustment device 40, a balance adjustment device 60, and a pressure sensing device 70.

[0051] In an optional embodiment, the clamping part 30 is located above the machine carrier 20 and is used to detachably clamp the cleaning sheet 90. The cleaning sheet 90 can be a test sheet with the same surface condition as the product to be tested, so as to avoid introducing new impurity particles when the cleaning sheet 90 comes into contact with and adsorbs the upper surface of the machine carrier 20.

[0052] Furthermore, the clamping part 30 includes two grippers that stably clamp both ends of the cleaning sheet 90, preventing it from wrinkling or shifting during the cleaning process and ensuring consistent cleaning results. The clamping part 30 can employ pneumatic clamps or mechanical grippers. It should be understood that pneumatic clamps have the advantages of fast operation and uniform and controllable clamping force. Pneumatic control precisely controls the clamping force by adjusting air pressure, avoiding damage to the cleaning sheet due to excessive clamping force or slippage due to insufficient clamping force. Mechanical grippers, on the other hand, offer high reliability and simple maintenance; the appropriate gripper type can be selected according to actual needs. Furthermore, the number of grippers in the clamping part 30 can be increased, such as four grippers. Multi-point clamping increases constraint and further improves clamping stability.

[0053] In an optional embodiment, the height adjustment device 40 drives the clamping part 30 to rise and fall vertically, so that the cleaning sheet 90 contacts the upper surface of the branch part 220 and adsorbs impurities on its upper surface. When the clamping part 30 clamps the cleaning sheet 90, in the top view of the machine carrier, the cleaning sheet 90 is perpendicular to the central axis of the two branch parts 220 and spans the two branch parts 220. The cleaning sheet 90 can simultaneously contact the upper surface of the two branch parts 220 for dust removal. This parallel operation mode can clean the two branch parts at one time, maximizing the cleaning efficiency, which is twice as efficient as cleaning one point at a time. The vertical and horizontal layout ensures that the cleaning force is evenly applied to the upper surface of each branch part 220. The symmetrical layout of the cleaning sheet 90 provided in this embodiment also helps to balance the force during the cleaning process, reduce the impact on the system structure, improve the operational stability, and ensure that the force at multiple contact points is uniform and parallel to the plane of the worktable 130. With the force at multiple contact points being uniform and parallel to the cleaning sheet, the marks can be eliminated after multiple adhesions.

[0054] Further, see Figures 2 to 4 The height adjustment device 40 includes a top plate 410 and a guide portion 420. The top plate 410 is reciprocating in the vertical direction, and the clamping portion 30 is disposed below the top plate 410 and moves synchronously with the top plate 410.

[0055] The guide section 420 is disposed between the machine base 10 and the top plate 410, located on both sides of the clamping section 30, to support and drive the top plate 410 to move vertically, so that the cleaning sheet 90 clamped on the clamping section 30 can contact the upper surface contact point of the machine base carrier 20. By setting the entire clamping section 30 on the top plate 410, driving the top plate 410 can drive the entire clamping section 30 to move. As the top plate 410 descends, the clamping section 30 drives the cleaning sheet 90 to descend until it contacts the upper surface of the machine base carrier 20. After contact and adhesion, the top plate 410 rises, driving the cleaning sheet 90 away from the machine base carrier 20, completing one cleaning operation.

[0056] In an optional embodiment, the cleaning fixture includes at least two pressure sensing devices 70, each disposed below each bifurcation 220, for detecting the force data at the contact point of the bifurcation 220. It should be understood that the pressure sensing devices 70 are general-purpose sensing devices, sufficient to meet the detection and assembly requirements of this embodiment, and will not be elaborated upon here. Furthermore, more pressure sensing devices can be provided to accurately detect the contact pressure of the cleaning pad 90 on the bifurcation 220; for example, four pressure sensing devices 70 can be provided, each pressure sensing device 70 being disposed directly below the contact point.

[0057] Furthermore, the number of pressure sensing devices 70 is set to four, and the four pressure sensing devices 70 are distributed in a rectangular array. Two pressure sensing devices 70 are set below each bifurcation 220. The four points are distributed in a rectangular array to form a complete monitoring plane. By monitoring the pressure at the four contact points, the force on the upper surface of the bifurcation 220 can be obtained more comprehensively. In particular, torsional loads can be detected, thereby issuing more accurate adjustment commands and avoiding the blind spots that may exist in two-point monitoring, making the levelness adjustment more precise.

[0058] In an optional embodiment, the cleaning fixture includes at least two balance adjustment devices 60. The balance adjustment devices 60 are located at the bottom of the workbench 130 and are signal-connected to the pressure sensing devices 70, adjusting the levelness of the workbench 130 based on the detection data from each pressure sensing device 70. It should be understood that the workbench 130 is movably mounted on the machine tool 10, and there is a gap between the base 110 and the workbench 130, in which the balance adjustment devices 60 are installed. Since manual contact inevitably introduces potential sources of contamination, and improper operation may scratch the delicate machine tool surface, and it is difficult to control the pressure applied for each contact, there is a risk of secondary contamination and damage. Therefore, by analyzing the data returned by the pressure sensing devices 70 and pre-programming the mechanical movement of the balance adjustment devices 60 to adjust the levelness of the workbench 130, the cleanliness of the contact area after tape application can be significantly improved. The balance adjustment devices 60 and the pressure sensing devices 70 together constitute a closed-loop control system. The pressure sensor 70 monitors the pressure distribution during the cleaning process in real time, and the balance adjustment device 60 dynamically adjusts the level of the workbench based on the feedback data, ensuring that the cleaning plate 90 and the bifurcation surface of the carrier are in uniform contact. By compensating for deviations in real time, the optimal cleaning effect is achieved.

[0059] Furthermore, the balance adjustment device 60 uses electric push rods or adjusting screws. The tops of multiple electric push rods or adjusting screws are connected to different positions on the bottom of the worktable 130. Through servo motor control, precise position control can be achieved, realizing high-precision leveling of the worktable 130.

[0060] In an optional embodiment, the cleaning fixture further includes a planar displacement assembly 50, which includes an x-axis displacement device 510 and a y-axis displacement device 520, used to adjust the position of the cleaning plate 90 in the x and y directions of the horizontal plane, respectively, wherein the y-direction is perpendicular to the x-direction. The planar displacement assembly 50 enables precise positioning and full-area coverage of the cleaning plate 90 in the horizontal plane, allowing the cleaning plate 90 to be moved to any target position above the machine carrier 20 without repeated disassembly and manual alignment, greatly improving operational convenience and cleaning efficiency. The x-axis displacement device 510 and the y-axis displacement device 520 can be mechanisms capable of displacement, such as precision slide modules, and are not specifically limited here.

[0061] In an optional embodiment, a transmission device 80 is also included at the entrance of the cleaning equipment. The transmission device 80 is equipped with a transport platform for conveying the cleaning sheet 90 to the clamping part 30. The configuration of the transmission device 80 enables automatic supply and replacement of the cleaning sheet 90, reducing manual intervention, which not only improves efficiency but also avoids the risk of contamination or operational errors introduced by personnel. The structure of the transmission device 80 and its transport platform is a common sheet loading and unloading mechanism or similar mechanism in the art, and will not be described in detail here.

[0062] Example 2:

[0063] See Figure 1 and Figure 5 This embodiment also provides a cleaning fixture for a machine tool carrier. The difference between this embodiment and the cleaning fixture provided in Embodiment 1 is that the structure and position of the height adjustment device 40 are different.

[0064] See details Figure 5 The height adjustment device 40 provided in this embodiment includes a top plate 410 and a guide part 420. The top plate 410 is fixedly installed on the machine base 10 and fixedly connected to the frame body 120 to form an integral frame structure. The clamping part 30 is disposed below the top plate 410, and the guide part 420 is disposed between the top plate 410 and the clamping part 30 to drive the clamping part 30 to move vertically so that the cleaning sheet 90 clamped on the clamping part 30 can contact the upper surface of the machine base carrier 20.

[0065] In an optional embodiment, the cleaning fixture provided in this example further includes a planar displacement component 50, which includes an x-axis displacement device 510 and a y-axis displacement device 520, used to adjust the position of the cleaning sheet 90 in the x and y directions of the horizontal plane, respectively. A guide portion 420 is disposed below the planar displacement component 50. The cleaning fixture provided in this example has a small mass in its vertical moving parts; its lightweight design requires only the drive clamping portion 30 itself to complete the vertical displacement of the cleaning sheet 90, thus improving the system's response speed.

[0066] Example 3:

[0067] See Figure 1 and Figure 6 This embodiment also provides a cleaning fixture for a machine tool carrier. The difference between this embodiment and the cleaning fixtures provided in Embodiment 1 and Embodiment 2 is that the size and working position of the cleaning plate 90 are different.

[0068] When the cleaning sheet 90 is the same as the experimental sheet, i.e., the cleaning method in Embodiment 1: when the clamping part 30 clamps the cleaning sheet 90, along the top view direction of the machine carrier, the cleaning sheet 90 is perpendicular to the central axis of the two bifurcated parts 220 and spans the two bifurcated parts 220. The cleaning sheet 90 can simultaneously contact the upper surface of the two bifurcated parts 220 for dust removal, cleaning two contact points at the same time through parallel operation. However, the cleaning sheet 90 can also be designed to match the size of each contact point, cleaning only one point at a time. In this way, each experimental sheet can be divided into multiple small cleaning sheets, maximizing the utilization of the experimental sheet material.

[0069] In summary, this application provides a cleaning fixture for a machine tool carrier, used to clean the upper surface of the machine tool carrier. The clamping part of the cleaning fixture holds a cleaning pad, which is driven to descend and contact the upper surface of the machine tool carrier through a height adjustment device to adsorb impurities. It then rises and moves to the next cleaning point, completing the cleaning work on all points to be cleaned. During the cleaning process, a pressure sensor provides pressure feedback to automatically level the worktable in real time, ensuring consistent pressure between the cleaning pad and the machine tool carrier. This overcomes the limitations of uneven force distribution at the two contact points during manual operation, ensuring the cleanliness of the contact points after adhesive application, greatly reducing the product surface defect rate, and significantly reducing reliance on manual labor. The technical solution of this application has high industrial application value because it effectively overcomes the various shortcomings of the prior art.

[0070] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Any person skilled in the art can modify or alter the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or alterations made by those skilled in the art without departing from the spirit and technical concept disclosed in this application should still be covered by the claims of this application.

Claims

1. A cleaning fixture for a machine tool carrier, used to clean the upper surface of the machine tool carrier, the machine tool carrier being disposed on the worktable of a machine tool, comprising a main handle and two forked portions extending outward from the main handle, the forked portions being used to carry products; characterized in that, The cleaning equipment includes: A clamping part, located above the machine carrier, is used to detachably clamp the cleaning sheet; A height adjustment device is used to drive the clamping part to rise and fall vertically so that the cleaning plate contacts the upper surface of the forked part and adsorbs impurities on its upper surface; At least two pressure sensing devices are respectively disposed below each of the bifurcations to detect the force data at the contact points of the bifurcations; At least two balance adjustment devices are located at the bottom of the worktable and are connected to the pressure sensing device for signal transmission, and adjust the levelness of the worktable according to the detection data of each pressure sensing device.

2. The cleaning fixture for the machine tool carrier according to claim 1, characterized in that, The height adjustment device includes: A top plate that can reciprocate vertically, and a clamping part disposed below the top plate and moving synchronously with the top plate; Guide sections are located on both sides of the clamping section and are disposed between the machine base and the top plate. They are used to support and drive the top plate to move vertically so that the cleaning sheet clamped on the clamping section can contact the upper surface of the machine base carrier.

3. The cleaning fixture for the machine tool carrier according to claim 1, characterized in that, The height adjustment device includes: A top plate is fixedly mounted on the machine base, and the clamping part is located below the top plate; A guide portion is disposed between the top plate and the clamping portion to drive the clamping portion to move vertically so that the cleaning sheet clamped on the clamping portion can contact the upper surface of the machine carrier.

4. The cleaning fixture for the machine tool carrier according to claim 1, characterized in that, The balance adjustment device includes at least two electric push rods or adjusting screws, with the top of each electric push rod or adjusting screw connected to different positions on the bottom of the worktable.

5. The cleaning fixture for the machine tool carrier according to claim 1, characterized in that, The cleaning tool includes four pressure sensing devices, with two pressure sensing devices located below each of the bifurcated portions, and the four pressure sensing devices are arranged in a rectangular array.

6. The cleaning fixture for the machine tool carrier according to claim 1, characterized in that, The cleaning fixture also includes a planar displacement component, which includes an x-axis displacement device for adjusting the position of the cleaning plate in the x-direction of the horizontal plane.

7. The cleaning fixture for the machine tool carrier according to claim 6, characterized in that, The planar displacement component includes a y-axis displacement device for adjusting the position of the cleaning sheet in the y-direction of the horizontal plane, wherein the y-direction is perpendicular to the x-direction.

8. The cleaning fixture for the machine tool carrier according to claim 1, characterized in that, The clamping part includes two jaws, which are pneumatic clamps or mechanical jaws.

9. The cleaning fixture for the machine tool carrier according to claim 1, characterized in that, When the clamping part clamps the cleaning plate, the cleaning plate is perpendicular to the central axis of the two bifurcated parts and spans the two bifurcated parts in the top view direction of the machine carrier, and the cleaning plate simultaneously contacts the upper surface of the two bifurcated parts for dust removal.

10. The cleaning fixture for the machine tool carrier according to claim 1, characterized in that, It also includes a transmission device located at the entrance of the cleaning equipment, the transmission device having a transport platform for conveying the cleaning sheet to the clamping part.

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