Cleaning equipment and ultrasonic cleaning system

Abstract

This application discloses a cleaning apparatus and an ultrasonic cleaning system. The cleaning apparatus includes a loading component, a transducer, and a vibrating component. The loading component has a cleaning tank for holding cleaning fluid and the workpiece to be cleaned. The transducer is disposed within the cleaning tank and configured to convert electrical signals into vibration signals. The vibrating component is disposed within the cleaning tank and includes a body portion and a protrusion portion. The body portion includes a first surface and a second surface facing away from each other. The first surface faces the inner wall of the loading component, and the transducer is connected to the first surface. The protrusion portion is connected to the second surface and protrudes from the second surface towards the center of the cleaning tank. The vibrating component is configured to receive the vibration signal transmitted by the transducer and radiate an ultrasonic signal. The ultrasonic signal is transmitted through the cleaning fluid to clean the workpiece to be cleaned. The protrusion portion increases the contact area between the vibrating component and the cleaning fluid, allowing the cleaning fluid to form more cavitation bubbles, increasing the density and bursting strength of the cavitation bubbles, and improving the cleaning effect.

Description

Technical Field

[0001] This application relates to the field of ultrasonic technology, specifically to a cleaning device and an ultrasonic cleaning system. Background Technology

[0002] In the mobile phone manufacturing industry, the cleanliness of metal components plays a crucial role in the overall performance and quality of the phone. During processing, metal components accumulate impurities such as oil, cutting fluid, and metal shavings. Therefore, ultrasonic cleaning systems are typically used to clean these components. However, traditional ultrasonic cleaning systems suffer from limitations when cleaning complex metal structures, such as hard-to-reach areas, leading to ineffective cleaning. Utility Model Content

[0003] To address the aforementioned problems, this application provides a cleaning apparatus and an ultrasonic cleaning system.

[0004] The cleaning apparatus provided in this application includes a loading component, a transducer, and a vibrating component. The loading component has a cleaning tank for holding a cleaning fluid and a workpiece to be cleaned. The transducer is disposed within the cleaning tank and configured to convert an electrical signal into a vibration signal. The vibrating component is disposed within the cleaning tank and includes a body portion and a protrusion portion. The body portion includes a first surface and a second surface facing away from each other. The first surface faces the inner wall of the loading component, and the transducer is connected to the first surface. The protrusion portion is connected to the second surface and protrudes from the second surface towards the center of the cleaning tank. The vibrating component is configured to receive the vibration signal transmitted by the transducer and radiate an ultrasonic signal, which is transmitted through the cleaning fluid to clean the workpiece to be cleaned.

[0005] In some embodiments, the protrusions include multiple protrusions. The multiple protrusions are stacked to form multiple layers, with the upper protrusions partially overlapping the lower protrusions, such that the upper protrusion includes a fixed end and a free end. The fixed end is connected to the lower protrusion, and the free end is spaced apart from the second surface.

[0006] In some embodiments, the angle between the extension direction of the fixed end to the free end and the second surface is greater than or equal to 30° and less than or equal to 60°.

[0007] In some implementations, the edge of the free end is arc-shaped.

[0008] In some embodiments, the distance between the free end and the second surface is greater than or equal to 2 mm and less than or equal to 5 mm.

[0009] In some embodiments, the ratio of the overlapping area between two overlapping protrusions to the area of ​​any one of the two overlapping protrusions is greater than or equal to 1 / 5 and less than or equal to 2 / 3.

[0010] In some embodiments, the loading member further includes an inlet and an outlet. In the direction from the first surface to the second surface, the inlet is further away from the vibrating element than the outlet. The inlet is configured to allow cleaning fluid to flow into the cleaning tank. The outlet is configured to allow cleaning fluid to flow out of the cleaning tank, and the inlet and outlet are located on the side of the loading member.

[0011] In some embodiments, the cleaning device further includes a flow guiding assembly. The flow guiding assembly is disposed in the cleaning tank and located on the side of the vibrating member facing away from the inner wall of the loading member. The flow guiding assembly is connected to the loading member and spaced apart from the protrusion. The flow guiding assembly has a flow channel configured to guide the cleaning fluid from the inlet into the cleaning tank and then out of the cleaning tank from the outlet.

[0012] In some embodiments, the flow guiding assembly includes a plurality of flow guiding elements and a mounting element. The flow guiding element includes a curved flow guiding surface. The flow guiding surface includes at least one contiguous crest and a trough. The mounting element is connected to the sides of the loading element at opposite ends, and the mounting element passes through the flow guiding element to connect the plurality of flow guiding elements and form a flow passage between adjacent two flow guiding elements, the flow guiding element being configured to guide cleaning fluid through the flow passage.

[0013] In some embodiments, the vibrating element includes a first vibrating element and a second vibrating element. The first vibrating element is disposed at the bottom of the loading member, and its body portion divides the cleaning tank into a first chamber and a second chamber that are not interconnected. The body portion of the first vibrating element is connected to the transducer. A protrusion of the first vibrating element is located in the second chamber, and the second vibrating element is disposed on the side of the loading member, also located in the second chamber.

[0014] In some embodiments, the cleaning apparatus further includes a sensor. The sensor is disposed on the loading member and configured to acquire liquid level information of the cleaning fluid within the cleaning tank. In the direction from the first surface to the second surface, the inlet is further away from the vibrating member than the sensor.

[0015] This application also provides an ultrasonic cleaning system. The ultrasonic cleaning system includes a cleaning device as described in any of the above embodiments and an ultrasonic generator. The ultrasonic generator is electrically connected to the transducer of the cleaning device, and the ultrasonic generator is configured to periodically send at least two different frequencies of electrical signals to the transducer.

[0016] The cleaning apparatus and ultrasonic cleaning system of this application utilize protrusions that increase the contact area between the vibrating component and the cleaning fluid, thereby improving the conversion efficiency of ultrasonic signal transmission to the cleaning fluid through cavitation. This allows the cleaning fluid to form more cavitation bubbles, increasing their density and bursting strength. The protrusions also cause multi-angle reflection and scattering of the ultrasonic signal during propagation, enabling the cleaning fluid to generate a cavitation effect over a larger area of ​​the cleaning tank. This reduces cleaning dead zones and improves the cleaning effect. Furthermore, the protrusions can absorb some of the ultrasonic signal's vibration energy and disperse it across multiple contact points and areas. This reduces the stress intensity of vibration energy at a single point, minimizing the risk of material fatigue and cracking in the main body due to stress concentration, and improving the durability of the main body.

[0017] Additional aspects and advantages of this application will be set forth in part in the description which follows, and in part will be obvious from the description, or may be learned by practice of this application. Attached Figure Description

[0018] The above and / or additional aspects and advantages of this application will become apparent and readily understood from the description of the embodiments taken in conjunction with the following drawings, wherein:

[0019] Figure 1 This is a three-dimensional assembly schematic diagram of an ultrasonic cleaning system according to some embodiments of this application;

[0020] Figure 2 yes Figure 1 An exploded three-dimensional diagram of the cleaning device in the ultrasonic cleaning system shown.

[0021] Figure 3 yes Figure 2 An exploded three-dimensional view of the vibrating component of the cleaning device shown.

[0022] Figure 4 yes Figure 2 An exploded perspective view of the flow guiding component of the cleaning device shown;

[0023] Figure 5 This is a cross-sectional schematic diagram of the cleaning apparatus according to an embodiment of this application;

[0024] Figure 6 yes Figure 5 An enlarged schematic diagram of the cleaning device shown at point VI;

[0025] Figure 7 This is a plan view of the protrusion of the vibrating element according to an embodiment of this application;

[0026] Figure 8 This is a schematic diagram illustrating the principle of the cleaning device according to the embodiments of this application, which uses a cleaning solution for cleaning.

[0027] Figure 9 This is a schematic diagram illustrating the principle of the ultrasonic generator of the ultrasonic cleaning system according to the embodiments of this application, which generates mixed-frequency ultrasonic waves.

[0028] The reference numerals in the detailed embodiments are as follows:

[0029] Ultrasonic cleaning system 1000; cleaning device 100; ultrasonic generator 300;

[0030] Loading component 10; cleaning tank 11; first chamber 111; second chamber 113; inlet 13; outlet 15; side 17; bottom 19;

[0031] Transducer 20;

[0032] Vibrating element 30; First vibrating element 30a; Second vibrating element 30b; Body part 31; First surface 311; Second surface 313; Protrusion 33; First layer 33a; Second layer 33b; Third layer 33c; Fourth layer 33d; Fifth layer 33e; Sixth layer 33f; Seventh layer 33g; Fixed end 331; Free end 333;

[0033] Flow guiding assembly 50; Flow guiding component 51; Mounting component 53; Flow passage 55;

[0034] Sensor 70. Detailed Implementation

[0035] To make the above-mentioned objectives, features, and advantages of this application more apparent and understandable, the specific embodiments of this application are described in detail below with reference to the accompanying drawings. Many specific details are set forth in the following description to provide a thorough understanding of this application. However, this application can be implemented in many other ways different from those described herein, and those skilled in the art can make similar modifications without departing from the spirit of this application. Therefore, this application is not limited to the specific embodiments disclosed below.

[0036] In the description of this application, it should be understood that the terms "center", "length", "upper", "lower", "front", "rear", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this application.

[0037] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of that feature. In the description of this application, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0038] In this application, unless otherwise expressly specified and limited, the terms "installation," "connection," "joining," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise expressly limited. Those skilled in the art can understand the specific meaning of the above terms in this application according to the specific circumstances.

[0039] In this application, unless otherwise expressly specified and limited, "above" or "below" the second feature can mean that the first feature is in direct contact with the second feature, or that the first feature is in indirect contact with the second feature through an intermediate medium. Furthermore, "above," "on top of," and "over" the second feature can mean that the first feature is directly above or diagonally above the second feature, or simply that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature can mean that the first feature is directly below or diagonally below the second feature, or simply that the first feature is at a lower horizontal level than the second feature.

[0040] In the mobile phone manufacturing industry, the cleanliness of metal components plays a crucial role in the overall performance and quality of mobile phones. During processing, impurities such as oil, cutting fluid, and metal shavings adhere to the surface of metal components. Therefore, ultrasonic cleaning systems are typically used to clean these components. However, traditional ultrasonic cleaning systems suffer from blind spots when cleaning complex metal components, resulting in poor cleaning effectiveness. To address these issues, this application provides a cleaning device 100 (… Figure 2 or Figure 5 (as shown) and ultrasonic cleaning system 1000 ( Figure 1 (As shown).

[0041] Please refer to Figures 1 to 3 The cleaning apparatus 100 provided in this application includes a loading member 10, a transducer 20, and a vibrating member 30. The loading member 10 is provided with a cleaning tank 11, which is used to hold cleaning fluid and the workpiece to be cleaned. The transducer 20 is disposed within the cleaning tank 11 and is configured to convert electrical signals into vibration signals. The vibrating member 30 is disposed within the cleaning tank 11 and includes a body portion 31 and a protrusion 33. The body portion 31 includes a first surface 311 and a second surface 313 facing away from each other, with the first surface 311 facing the inner wall of the loading member 10. The transducer 20 is connected to the first surface 311, and the protrusion 33 is connected to the second surface 313, protruding from the second surface 313 towards the center of the cleaning tank 11. The vibrating member 30 is configured to receive the vibration signal transmitted by the transducer 20 and radiate an ultrasonic signal, which is transmitted through the cleaning fluid to clean the workpiece to be cleaned.

[0042] Specifically, in the above embodiment, the loading component 10 is provided with a cleaning tank 11, which is used to hold cleaning fluid and place the parts to be cleaned. Exemplarily, the loading component 10 is made of a corrosion-resistant material to maintain stability when holding cleaning fluid. Corrosion-resistant materials include, but are not limited to, stainless steel (SS), ceramic material (Cer), or polytetrafluoroethylene (PTFE), etc. The cross-section of the loading component 10 (subject to...) Figure 1 The shape of the plane intercepted by the XY plane (the term "cross-section" is explained in the same way below) can be, but is not limited to, a circle, an ellipse, a rectangle, or other polygons. The cross-sectional shape of the loading component 10 in this application is rectangular. The cleaning fluid can be water or a solution with added cleaning reagents. The part to be cleaned can be raw material, a semi-finished product that has been processed but not yet completed, or a finished product that has been processed; there are no restrictions here.

[0043] The transducer 20 is an ultrasonic transducer. The transducer 20 receives electrical signals and converts them into vibration signals. In some embodiments, the transducer 20 is a piezoelectric ceramic transducer. In other embodiments, the transducer 20 is a magnetostrictive transducer. The number of transducers 20 can be one or more, and is not limited in this application. Exemplarily, the transducer 20 of this application includes multiple transducers 20 arranged in a square array and connected to the first surface 311. This allows for more uniform transmission of vibration signals to the vibrating element 30, resulting in more uniform ultrasonic signals radiated from the vibrating element 30, reducing cleaning dead zones on the object to be cleaned, and improving the cleaning effect. Of course, in other embodiments, the arrangement of the multiple transducers 20 can be other forms, such as a circular array or a non-array arrangement; this application does not impose any limitations.

[0044] The vibrating element 30 receives the vibration signal transmitted from the transducer 20 and radiates ultrasonic signals. Specifically, the vibration signal from the transducer 20 is transmitted to the body 31 and the protrusion 33, and the body 31 and the protrusion 33 radiate ultrasonic signals into the cleaning fluid. The ultrasonic signals are transmitted through the cleaning fluid and generate cavitation, direct flow, and acceleration in the cleaning fluid, thereby achieving the function of cleaning the parts to be cleaned.

[0045] Please combine Figure 8 Cavitation refers to the process by which tiny bubbles in a cleaning fluid violently generate, expand, and collapse under the influence of ultrasound, creating extreme physical conditions (high pressure, high temperature, microjets) to remove contaminants. Specifically, ultrasound continuously generates pressure changes in the cleaning fluid. In low-pressure areas, cavitation bubbles form, while in high-pressure areas, these bubbles collapse and burst. The shock waves and microjets generated by the bursting cavitation bubbles impact and scour the surface of the parts immersed in the cleaning fluid, thereby removing dirt, oil, and tiny particles. The main energy forms of cavitation are shock waves and microjets, which are effective at cleaning stubborn stains and fine particles from the parts.

[0046] Direct flow refers to the unidirectional fluid movement caused by energy attenuation when ultrasonic signals propagate in a cleaning fluid. Under direct flow, the cleaning fluid can more quickly flush away detached impurities from the surface of the workpiece, reducing the residence time of impurities on the surface and preventing them from re-adhering, thus improving cleaning efficiency. The main energy form of direct flow is fluid kinetic energy, which is suitable for cleaning large-sized and deep-pore structures.

[0047] The acceleration effect refers to the phenomenon where ultrasonic signals, transmitted through the cleaning fluid, weaken the bond between contaminants and the workpiece due to high-frequency vibration, thus accelerating separation. Specifically, during the transmission of the ultrasonic signal within the cleaning fluid, particles within the fluid accelerate and impact the surface of the workpiece at high speeds, making it easier for impurities to detach and thus more effectively removing them. The primary energy form of the acceleration effect is vibrational shear force, which can effectively clean adhesive contaminants such as colloids from the workpiece.

[0048] The synergistic effect of cavitation, direct flow, and acceleration enables ultrasonic cleaning to simultaneously achieve macroscopic cleaning (direct flow) and microscopic decontamination (cavitation + acceleration), thus improving the cleaning effect on the parts to be cleaned.

[0049] It should be noted that ultrasonic signals can have one frequency or multiple different frequencies. Low-frequency ultrasonic signals have a stronger cavitation effect and produce larger cavitation bubbles; high-frequency ultrasonic signals have a stronger acceleration and direct flow effect, better directionality, and more concentrated energy. For example, this application uses at least two frequencies of ultrasonic signals, i.e., mixed-frequency ultrasonic signals, which will be described later in the section on the ultrasonic cleaning system 1000. It is understood that the cleaning device 100 of this application is also applicable to single-frequency ultrasonic signals, i.e., using an ultrasonic signal of one frequency. It is also understood that the multiple transducers 20 of this application can have the same frequency or different frequencies.

[0050] Specifically, the protrusion 33 is disposed on the second surface 313 and is used to increase the contact area between the vibrating element 30 and the cleaning fluid, thereby improving the conversion efficiency of the ultrasonic signal transmission to the cleaning fluid through cavitation, enabling the cleaning fluid to form more cavitation bubbles, and increasing the density and bursting strength of the cavitation bubbles. The cross-sectional shape of the protrusion 33 may be, but is not limited to, a circle, an ellipse, a rectangle, or other polygons.

[0051] There can be one or more protrusions 33. In embodiments where there are multiple protrusions 33, the arrangement of the multiple protrusions 33 on the first surface 311 is not limited, including but not limited to: multiple protrusions 33 arranged in an array, multiple protrusions 33 arranged in a maze shape, or multiple protrusions 33 stacked (e.g., ...). Figure 2 (As shown). Preferably, the distribution of the protrusions 33 corresponds to the distribution of the transducer 20. Specifically, the range of the vibration signal generated by the transducer 20 can cover the protrusions 33, so that the protrusions 33 can effectively radiate ultrasonic signals.

[0052] The protrusion 33 also serves to make the stress distribution on the body portion 31 more uniform. The stress is the force exerted on the body portion 31 by the vibration energy carried by the vibration signal when the vibration signal is transmitted to the vibrating member 30. The protrusion 33 can absorb a portion of the vibration energy of the vibration signal and disperse the vibration energy, thereby reducing the stress intensity of the vibration energy on the body portion 31, reducing the risk of material fatigue and cracking of the body portion 31 due to stress concentration, and improving the durability of the body portion 31.

[0053] In this application, the protrusion 33 increases the contact area between the vibrating element 30 and the cleaning fluid, improving the conversion efficiency of the cavitation effect of the ultrasonic signal transmitted to the cleaning fluid. This allows the cleaning fluid to form more cavitation bubbles, increasing the density and bursting strength of the cavitation bubbles. The protrusion 33 causes the ultrasonic signal to be reflected and scattered at multiple angles during propagation, enabling the cleaning fluid to generate a cavitation effect over a larger area of ​​the cleaning tank 11, reducing cleaning dead zones and thus improving the cleaning effect. The protrusion 33 can also absorb some of the vibration energy of the ultrasonic signal and disperse it to multiple contact points and areas, thereby reducing the stress intensity of the vibration energy at a single point. This reduces the risk of material fatigue and cracking of the body part 31 due to stress concentration, improving the durability of the body part 31.

[0054] Please refer to Figure 3 and Figure 5 In some embodiments, the protrusions 33 include a plurality of protrusions 33, which are stacked to form a multilayer. The upper protrusions 33 partially overlap with the lower protrusions 33, so that the upper protrusions 33 include a fixed end 331 and a free end 333. The fixed end 331 is connected to the lower protrusions 33, and the free end 333 is spaced from the second surface 313.

[0055] In some embodiments, the plurality of protrusions 33 include multiple sets (two or more sets), such as Figure 3 The diagram shows two groups of transducers spaced apart from each other. In this case, the transducers 20 can also be divided into two groups, and the vibration signals of the two groups of transducers 20 cover the areas where the protrusions 33 are located, respectively. In another embodiment, the protrusions 33 are in only one group. In this case, the transducers 20 can also be divided into one group, and the vibration signals of this group of transducers 20 cover the area where the protrusions 33 are located. In each group, the protrusions 33 are stacked to form multiple layers, and each layer includes one or more protrusions 33. This application only uses the example of multiple protrusions 33 being stacked along the length direction X of the body portion 31 to form 7 layers, with each layer including 6 protrusions 33, and the 6 protrusions 33 in each layer arranged along the width direction Y of the body portion 31 for illustration.

[0056] Of the seven protrusions 33, the first layer 33a is completely fixed to the second surface 313. The second layer 33b (upper layer) is stacked on the first layer 33a (lower layer), and the second layer 33b partially overlaps with the first layer 33a. The portion of the second layer 33b that overlaps with the first layer 33a is the fixed end 331 of the protrusion 33 of the second layer 33b, and the portion of the second layer 33b that does not overlap with the first layer 33a is the free end 333 of the protrusion 33 of the second layer 33b. The third layer 33c (upper layer) is stacked on the second layer 33b (lower layer), and the third layer 33c partially overlaps with the second layer 33b. The portion of the third layer 33c that overlaps with the second layer 33b is the fixed end 331 of the protrusion 33 of the third layer 33c, and the portion of the third layer 33c that does not overlap with the second layer 33b is the free end 333 of the protrusion 33 of the third layer 33c. The fourth layer 33d (upper layer) is stacked on the third layer 33c (lower layer), and the fourth layer 33d partially overlaps with the third layer 33c. The portion of the fourth layer 33d that overlaps with the third layer 33c is the fixed end 331 of the protrusion 33 of the fourth layer 33d, and the portion of the fourth layer 33d that does not overlap with the third layer 33c is the free end 333 of the protrusion 33 of the fourth layer 33d. The fifth layer 33e (upper layer) is stacked on the fourth layer 33d (lower layer), and the fifth layer 33e partially overlaps with the fourth layer 33d. The portion of the fifth layer 33e that overlaps with the fourth layer 33d is the fixed end 331 of the protrusion 33 of the fifth layer 33e, and the portion of the fifth layer 33e that does not overlap with the fourth layer 33d is the free end 333 of the protrusion 33 of the fifth layer 33e. The sixth layer 33f (upper layer) is stacked on top of the fifth layer 33e (lower layer), and the sixth layer 33f partially overlaps with the fifth layer 33e. The portion of the sixth layer 33f that overlaps with the fifth layer 33e forms the fixed end 331 of the protrusion 33 of the sixth layer 33f, and the portion of the sixth layer 33f that does not overlap with the fifth layer 33e forms the free end 333 of the protrusion 33 of the sixth layer 33f. The seventh layer 33g (upper layer) is stacked on top of the sixth layer 33f (lower layer), and the seventh layer 33g partially overlaps with the sixth layer 33f. The portion of the seventh layer 33g that overlaps with the sixth layer 33f forms the fixed end 331 of the protrusion 33 of the seventh layer 33g, and the portion of the seventh layer 33g that does not overlap with the sixth layer 33f forms the free end 333 of the protrusion 33 of the seventh layer 33g. In this way, multiple protrusions 33 form a layered structure similar to fish scales.

[0057] Each of the upper protrusions 33 includes a fixed end 331 and a free end 333. The fixed end 331 is connected to the lower protrusion 33, and the free end 333 is spaced apart from the second surface 313. That is, there is a gap between the free end 333 and the second surface 313. The ultrasonic signal can be reflected and refracted in the gap between the free end 333 and the second surface 313, thereby diffusing the subsequent propagation direction of the ultrasonic signal, guiding the ultrasonic signal diffusion, reducing the dead angle of the sound field, and allowing the cleaning fluid in the second cavity 113 to receive the ultrasonic signal, thus improving the cleaning effect. In addition, the protrusion 33 can be a planar structure or a curved structure. A planar structure means that the two surfaces of the protrusion 33 opposite to each other in the thickness direction Z are planar. A curved structure means that the two surfaces of the protrusion 33 opposite to each other in the thickness direction Z are curved. This application uses a planar structure of the protrusion 33 as an example for explanation. Planar structures are simple to form and easy to process.

[0058] After the vibration signal from the transducer 20 is transmitted to the body 31, the body 31 radiates an ultrasonic signal. The initial propagation direction S of the ultrasonic signal radiated by the body 31 is along the first surface 311 to the second surface 313. The extension direction from the fixed end 331 to the free end 333 intersects with the initial propagation direction of the ultrasonic signal. As a result, the protrusion 33 can change the subsequent propagation direction of the ultrasonic signal, guiding the ultrasonic signal to diffuse in different directions, so that the ultrasonic waves can more evenly cover all areas of the second cavity 113, reduce cleaning dead zones, and improve the cleaning effect on the parts to be cleaned in the cleaning tank 11.

[0059] Please refer to Figure 6 In some embodiments, the angle α between the extension direction of the fixed end 331 to the free end 333 and the second surface 313 is greater than or equal to 30° and less than or equal to 60°.

[0060] Specifically, in the above embodiment, the angle α between the extension direction of the fixed end 331 to the free end 333 and the second surface 313 can be 30°, 34°, 36°, 40°, 45°, 48°, 52°, 55°, 58°, or 60°. If the angle α between the extension direction and the second surface 313 is less than 30°, the extension direction deviates significantly from the initial propagation direction S of the ultrasonic signal, and some ultrasonic signals will be refracted and reflected at large angles, causing mutual interference of ultrasonic signals, resulting in mutual cancellation and attenuation of ultrasonic signals. If the angle α between the extension direction of the fixed end 331 to the free end 333 and the second surface 313 is greater than 60°, the extension direction is too close to the initial propagation direction S of the ultrasonic signal, and the protrusion 33 is difficult to guide the ultrasonic signal to diffuse in different directions, resulting in insufficient ultrasonic signal coverage in the edge area and corners of the second cavity 113, uneven sound field distribution, and poor cleaning effect of the parts to be cleaned in the edge area and corner area of ​​the second cavity 113.

[0061] Therefore, the angle α between the extension direction of the fixed end 331 to the free end 333 and the second surface 313 is greater than or equal to 30° and less than or equal to 60°, so that the free end 333 can guide the diffusion of ultrasonic signals and maintain a certain energy intensity of ultrasonic signals. This allows the ultrasonic signals to maintain a certain cleaning intensity and cover each area of ​​the second cavity 113 more evenly, thereby improving the cleaning effect on the parts to be cleaned in the cleaning tank 11.

[0062] Please refer to Figure 3 In some implementations, the edge of the free end 333 is arc-shaped.

[0063] Specifically, the edge of the free end 333 is arc-shaped, which can be a continuous connection of arcs with different curvatures or an arc with the same curvature. For example, the edge of the free end 333 and the entire edge of the protrusion 33 in this application are circular, making them easy to shape. The arc-shaped edge forms a local sound pressure concentration point, allowing the ultrasonic signal to scatter at multiple angles, causing the cleaning fluid to generate more microbubbles (cavitation nuclei), increasing the density and rupture strength of the cavitation bubbles, thereby improving the cleaning effect on the workpiece.

[0064] Please refer to Figure 6 In some embodiments, the distance L1 between the free end 333 and the second surface 313 is greater than or equal to 2 mm and less than or equal to 5 mm.

[0065] Specifically, in the above embodiment, the distance L1 between the free end 333 and the second surface 313 can be 2 mm, 2.3 mm, 2.8 mm, 3.3 mm, 3.6 mm, 4.1 mm, 4.3 mm, 4.5 mm, 4.8 mm, or 5 mm. If the distance between the free end 333 and the second surface 313 is less than 2 mm, the gap between the free end 333 and the second surface 313 is too small, resulting in multiple reflections and refractions of the ultrasonic signal, making it difficult for the ultrasonic signal to diffuse and limiting the coverage range of the ultrasonic signal. If the distance between the free end 333 and the second surface 313 is greater than 5 mm, the gap between the free end 333 and the second surface 313 is too large, the path of refraction and reflection of the ultrasonic signal becomes longer, leading to energy attenuation of the ultrasonic wave.

[0066] Therefore, the distance L1 between the free end 333 and the second surface 313 is greater than or equal to 2 mm and less than or equal to 5 mm, which can provide sufficient space for reflection and refraction of ultrasonic signals. This allows ultrasonic signals to be reflected and refracted in the gap between the free end 333 and the second surface 313, thereby spreading the subsequent propagation direction of ultrasonic signals and reducing energy loss of ultrasonic signals during propagation. Ultrasonic signals can sufficiently and uniformly cover all areas of the second cavity 113, reducing dead zones in the sound field and improving the cleaning effect on the parts to be cleaned.

[0067] Please refer to Figure 3 and Figure 7 In some embodiments, the ratio of the overlapping area between two overlapping protrusions 33 to the area of ​​any one of the two overlapping protrusions 33 is greater than or equal to 1 / 5 and less than or equal to 2 / 3.

[0068] Specifically, in the above embodiments, the ratio (e.g., S3 / S1) of the overlapping area (e.g., S3) between the two overlapping protrusions 33 to the area (e.g., S1) of any one of the two overlapping protrusions 33 can be 1 / 5, 1 / 3, 2 / 5, 3 / 7, 1 / 2, 4 / 7, 3 / 5, 7 / 15, 13 / 20, or 2 / 3. If the ratio is less than 1 / 5, the overlapping area between the protrusions 33 is too small, resulting in low reflection efficiency of the ultrasonic signal between the gaps of the protrusions 33, leading to uneven propagation of the ultrasonic signal in the cleaning fluid and affecting the cleaning effect. If the ratio is greater than 2 / 3, the overlapping area between the protrusions 33 is too large, causing the energy of the ultrasonic signal to concentrate in the gaps between the protrusions 33, making it difficult for the ultrasonic signal to diffuse and limiting the coverage range of the ultrasonic wave.

[0069] Therefore, the ratio of the overlapping area between two overlapping protrusions 33 to the area of ​​any one of the two overlapping protrusions 33 is greater than or equal to 1 / 5 and less than or equal to 2 / 3. The overlapping area between the protrusions 33 is moderate, which can ensure the reflection efficiency of the ultrasonic signal in the gap between adjacent protrusions 33, which is conducive to the diffusion of ultrasonic waves, and can also keep the energy of the ultrasonic waves at a certain intensity.

[0070] Please refer to Figure 2 and Figure 5 In some embodiments, the loading member 10 is further provided with an inlet 13 and an outlet 15. In the direction from the first surface 311 to the second surface 313 (the thickness direction Z of the body portion 31), the inlet 13 is further away from the vibrating member 30 than the outlet 15. The inlet 13 is configured to allow cleaning fluid to flow into the second cavity 113 of the cleaning tank 11, and the outlet 15 is configured to allow cleaning fluid to flow out of the second cavity 113 of the cleaning tank 11. The inlet 13 is located on the side 17 of the loading member 10, and the outlet 15 is located on the side 17 of the loading member 10. The inlet 13 and the outlet 15 may be located on the same side 17 or different sides 17 of the cleaning tank 11.

[0071] Specifically, in the above embodiments, the inlet 13 can be one or more, and is not limited in this application. For example, the inlet 13 in this application is one, and is disposed on the side 17 of the loading member 10. The outlet 15 can also be one or more, and is not limited in this application. For example, the inlet 13 in this application is one, and is disposed on the side 17 of the loading member 10.

[0072] For example, valves can be installed at both the inlet 13 and the outlet 15. In one cleaning method, when the cleaning fluid is injected into the second chamber 113, the valve at the outlet 15 can be closed first. After a certain amount of cleaning fluid is injected, the valve at the inlet 13 can be closed, and then the transducer 20 can be started to perform ultrasonic cleaning. In another cleaning device 100, during the process of the transducer 20 being started to perform ultrasonic cleaning, the cleaning fluid continuously enters the second chamber 113 of the cleaning tank 11 from the inlet 13 and continuously exits the second chamber 113 of the cleaning tank 11 from the outlet 15. In this way, the flow of the cleaning fluid in the second chamber 113 of the cleaning tank 11 can be enhanced, impurities can be carried away from the second chamber 113 of the cleaning tank 11, and the cleaning effect on the parts to be cleaned can be improved.

[0073] The inlet 13 is further away from the vibrating component 30 than the outlet 15. This results in less resistance for the cleaning fluid entering the inlet 13, and the cleaning fluid can more easily exit from the outlet 15 under the influence of gravity. The resistance to the cleaning fluid entering the inlet 13 is the weight of the cleaning fluid itself. This helps guide the flow of the cleaning fluid, ensuring that impurities detached from the surface of the part to be cleaned are promptly removed, preventing them from re-adhering to the surface.

[0074] In some embodiments, the inlet 13 and the outlet 15 are located on the same side 17 of the loading member 10. When the cleaning fluid flows in from the inlet 13 and out from the outlet 15 at the same time, the circulation of the cleaning fluid can be enhanced, the scouring effect of the cleaning fluid on the surface of the part to be cleaned can be strengthened, and the impurities on the surface of the part to be cleaned can be removed.

[0075] Please refer to Figure 4 and Figure 5 In some embodiments, the cleaning device 100 further includes a flow guiding component 50, which is disposed in the second cavity 113 of the cleaning tank 11 and located on the side of the vibrating member 30 away from the inner wall of the loading member 10. The flow guiding component 50 is connected to the loading member 10 and is spaced apart from the protrusion 33. The flow guiding component 50 is further away from the main body 31 than the protrusion 33. The flow guiding component 50 is provided with a flow passage 55, which is configured to guide the cleaning liquid from the inlet 13 into the second cavity 113 and then out of the outlet 15 to the outside of the cleaning tank 11.

[0076] Specifically, in the above embodiment, the flow guiding component 50 is used to guide the flow direction of the cleaning fluid. When the cleaning fluid flows in from the inlet 13 and out from the outlet 15 simultaneously, the flow guiding component 50 enables the cleaning fluid to form a circulation path within the second chamber 113, thereby enhancing the cleaning effect. The circulation path is that the cleaning fluid enters the second chamber 113 from the inlet 13 and then flows out from the outlet 15 to the outside of the second chamber 113. There can be one or more flow guiding components 50. For example, the flow guiding components 50 of this application have three, located at the bottom 19 and two opposite sides 17 of the loading member 10, respectively.

[0077] The flow guiding component 50 is spaced apart from the protrusion 33 to prevent it from obstructing the propagation of ultrasonic signals, thus providing a propagation channel for the ultrasonic signals. The flow channel 55 guides the flow direction of the cleaning fluid, creating a circulation path within the second chamber 113. This prevents the cleaning fluid from experiencing chaotic eddies, stagnation, or excessive accumulation within the second chamber 113, ensuring that the cleaning fluid flows through all areas of the second chamber 113 without leaving any dead zones. Furthermore, guided by the flow channel 55, the cleaning fluid flows out from the outlet 15 to the outside of the cleaning tank 11, allowing impurities adhering to the surface of the parts to be cleaned to be promptly discharged from the second chamber 113 through the outlet 15, preventing them from depositing within the second chamber 113 and thereby improving the cleaning effect on the parts to be cleaned.

[0078] Please refer to Figure 4 and Figure 5 In some embodiments, the flow guiding assembly 50 includes a plurality of flow guiding elements 51 and a mounting element 53. The opposite ends of the mounting element 53 are connected to the side portion 17 of the loading element 10. The mounting element 53 passes through the flow guiding elements 51 to connect the plurality of flow guiding elements 51 and to form a flow passage 55 between two adjacent flow guiding elements 51, the flow guiding elements 51 being configured to guide cleaning fluid through the flow passage 55.

[0079] Specifically, in the above embodiments, the number of mounting members 53 can be one, two, three, or more, and this application does not impose any limitation. In some embodiments, the mounting member 53 is a long strip-shaped connecting rod, and the opposite ends of the mounting member 53 are respectively connected to the side portion 17 of the loading member 10. For example, the opposite ends of the mounting member 53 are respectively connected to the two side portions 17 where the second vibrating member 30b is not provided. Further, the mounting member 53 is used to connect multiple flow guides 51. Exemplarily, a flow guide assembly 50 includes two mounting members 53, and the two mounting members 53 are respectively inserted through the opposite ends of multiple flow guides 51. The flow guides 51 are spaced apart from each other, and multiple flow guides 51 form multiple flow channels 55. It is understood that the flow area of ​​the flow channels 55 between different flow guides 51 may be inconsistent. In this application, the flow area of ​​the flow channels 55 formed between two adjacent flow guides 51 is the same. After the cleaning fluid enters the second chamber 113 through inlet 13, it can be diverted through multiple flow channels 55, thereby accelerating the circulation speed of the cleaning fluid within the second chamber 113. Multiple flow channels 55 reduce the flow pressure of a single flow channel 55, lowering the risk of impurities in the cleaning fluid clogging the flow channels 55.

[0080] The width of the multiple flow channels 55 can be adjusted according to actual cleaning needs. For example, in some areas of the second cavity 113, the flow rate of the cleaning fluid can be moderate by increasing the number of flow channels 55 or adjusting the flow area of ​​the flow channels 55, so as to ensure the cleaning effect without causing unnecessary impact on the cleaning tank 11 or the parts to be cleaned due to excessive flow rate; in other areas of the second cavity 113, the flow rate of the cleaning fluid can be appropriately slowed down by reducing the number of flow channels 55 or reducing the flow area of ​​the flow channels 55, so that the cleaning fluid has enough time to act on impurities and improve the cleaning quality.

[0081] Please refer to Figure 4 In some embodiments, the guide member 51 includes a curved guide surface, which includes at least one contiguous peak and a trough.

[0082] Specifically, in the above embodiment, the guide surface includes at least one contiguous crest and one trough, that is, the curved surface shape of the guide member 51 is S-shaped, thereby forming an S-shaped flow channel 55. The S-shaped flow channel 55 can break the straight flow of the cleaning fluid. When the cleaning fluid flows in the S-shaped flow channel 55, the cleaning fluid will change direction when it encounters the crest and trough, so that the cleaning fluid has sufficient speed and kinetic energy at all positions in the flow channel 55, reducing the possibility of cleaning fluid stagnation, reducing dead fluid areas (areas where the cleaning fluid does not flow, or areas where the kinetic energy of the cleaning fluid is insufficient), and making the cleaning fluid more evenly distributed in the flow channel 55, thereby being more evenly distributed in the second cavity 113 after passing through the flow channel 55.

[0083] Please see Figure 2 In some embodiments, the vibrating element 30 includes a first vibrating element 30a and a second vibrating element 30b. The first vibrating element 30a is disposed at the bottom 19 of the loading member 10. The body portion 31 of the first vibrating element 30a divides the cleaning tank 11 into a first cavity 111 and a second cavity 113 that are not connected. The body portion 31 of the first vibrating element 30a is connected to the transducer 20. The protrusion 22 of the first vibrating element 30a is located in the second cavity 113. The second vibrating element 30b is disposed at the side portion 17 of the loading member 10 and is located in the second cavity 113.

[0084] Specifically, the first vibrating element 30a and the second vibrating element 30b have the same structure, both including the aforementioned body portion 31 and protrusion 33, which will not be described again. The first vibrating element 30a is disposed at the bottom 19 of the loading member 10. The body portion 31 of the first vibrating element 30a is used to divide the cleaning tank 11. Specifically, the body portion 31 of the first vibrating element 30a divides the cleaning tank 11 into a first cavity 111 and a second cavity 113. The first cavity 111 is used to accommodate the transducer 20, and the second cavity 113 is used to hold the cleaning fluid, the item to be cleaned, and the second vibrating element 30b. The protrusion 33 of the first vibrating element 30a is located in the second cavity 113. The first cavity 111 and the second cavity 113 are isolated from each other, that is, they are not connected to each other. In this way, the body portion 31 of the first vibrating element 30a can prevent the cleaning fluid in the second cavity 113 from entering the first cavity 111, avoiding contact between the transducer 20 and the cleaning fluid, thereby extending the service life of the transducer 20.

[0085] In this application, the transducer 20 is disposed on the bottom 19 of the loading member 10 and connected to the body 31 of the first vibrator 30a. The body 31 of the first vibrator 30a is connected to the sides 17 of the loading member 10. Thus, the vibration signal generated by the transducer 20 can be transmitted to the first vibrator 30a, and can also be transmitted to the second vibrator 30b through the sides 17 and bottom 19 of the loading member 10. The connection between the body 31 of the first vibrator 30a and the loading member 10 can be either detachable or non-detachable, and is not limited in this application. For example, in the non-detachable connection, the edge of the body 31 of the first vibrator 30a can be welded to the sides 17 of the loading member 10 by means of laser welding or ultrasonic welding, thereby improving the connection strength between the body 31 of the first vibrator 30a and the loading member 10. For example, in the detachable connection method, the body part 31 of the first vibrator 30a can be installed on the side part 17 of the loading member 10 by means of snap-fit ​​or the like, and the gap between the edge of the body part 31 of the first vibrator 30a and the side part 17 of the loading member 10 is sealed by a sealant to prevent the cleaning fluid from entering the first cavity 111 from the second cavity 113.

[0086] The second vibrating element 30b is disposed on the side 17 of the loading member 10. Specifically, the body portion 31 of the second vibrating element 30b is connected to the side 17 of the loading member 10, thereby allowing the vibration signal generated by the transducer 20 to be transmitted to the second vibrating element 30b through the side 17 and bottom 19 of the loading member 10. The connection between the body portion 31 of the second vibrating element 30b and the loading member 10 can be either detachable or non-detachable, and is not limited in this application. For example, in a non-detachable connection, the first surface 311 of the second vibrating element 30b can be welded to the side 17 of the loading member 10 by means of laser welding or ultrasonic welding, thereby improving the connection strength between the body portion 31 of the second vibrating element 30b and the loading member 10. For example, in a detachable connection, the body portion 31 of the second vibrating element 30b can be installed on the side 17 of the loading member 10 by means of snap-fit ​​or threaded connection.

[0087] Furthermore, the number of second vibrating elements 30b can be one, two, three, or more, and there is no limitation herein. In some embodiments, the loading member 10 has a rectangular cross-sectional shape and includes four sides 17. Correspondingly, the number of second vibrating elements 30b can be one, two, three, or four. In this application, there are two second vibrating elements 30b, which are respectively distributed on two relatively spaced sides 17 of the loading member 10. The other two relatively spaced sides 17 are not provided with second vibrating elements 30b, which can be used to free up space for installing the flow guiding assembly 50.

[0088] Please refer to Figure 2 and Figure 5 In some embodiments, the cleaning apparatus 100 further includes a sensor 70, which may be a liquid level sensor. The sensor 70 is disposed on the loading member 10 and is configured to acquire liquid level information of the cleaning fluid in the cleaning tank 11. In the direction from the first surface 311 to the second surface 313 (thickness direction Z), the inlet 13 is further away from the vibrating member 30 than the sensor 70.

[0089] Specifically, in the above embodiment, sensor 70 is used to acquire the liquid level information of the cleaning fluid in the cleaning tank 11 to ensure that the total amount of cleaning fluid is maintained within a suitable range during the cleaning process. After acquiring the liquid level information of the cleaning fluid in the cleaning tank 11, sensor 70 can feed the liquid level information back to the control device described below. The control device adjusts the inflow or outflow of cleaning fluid according to the liquid level information, or can directly issue an alarm. There can be one or more sensors 70, and sensor 70 can be set on the side 17 of the loading member 10. For example, in this application, sensor 70 is one and is set on the side 17 adjacent to the side 17 where the inlet 13 is located. For example, the inlet 13 is farther away from the vibrating member 30 than sensor 70, so that the cleaning fluid can avoid impacting sensor 70 when cleaning fluid is injected into the cleaning tank 11 through inlet 13.

[0090] Please refer to Figure 1 , Figure 2 and Figure 9 This application also provides an ultrasonic cleaning system 1000. The ultrasonic cleaning system 1000 includes a cleaning device 100 and an ultrasonic generator 300. The ultrasonic generator 300 is electrically connected to the transducer 20 of the cleaning device 100, and the ultrasonic generator 300 is configured to periodically transmit at least two different frequencies of electrical signals to the transducer 20.

[0091] Specifically, in one embodiment, the ultrasonic generator 300 includes a signal generator, a mixer circuit, and a power amplifier. The signal generator is used to generate an electrical signal of a specific frequency. Exemplarily, this application has at least two signal generators of different frequencies. As mentioned above, low-frequency ultrasonic signals have a strong cavitation effect, while high-frequency ultrasonic signals have a strong acceleration and direct current-inducing effect. By using at least two signal generators of different frequencies, the transducer 20 can generate vibration signals of at least two different frequencies, and thus the vibrating element 30 can radiate ultrasonic signals of two different frequencies, i.e., mixed-frequency ultrasonic signals. The ultrasonic signal mixing method includes at least two types: the first is to simultaneously output two or more ultrasonic signals of different frequencies, causing them to interfere and superimpose with each other in the cleaning fluid; the second is to use frequency conversion technology to make the frequency of the ultrasonic signal continuously change within a certain range. The ultrasonic cleaning system 1000 that cleans by mixing ultrasonic signals can avoid cleaning dead zones that may occur during the cleaning process, and allow cavitation bubbles in the cleaning fluid to be generated and broken in a wider area, thereby improving the uniformity and comprehensiveness of cleaning the parts to be cleaned.

[0092] The mixer circuit consists of components such as resistors and capacitors. It is used to superimpose and mix electrical signals output from multiple signal generators, resulting in a mixed signal with stable amplitude and phase. The power amplifier uses a power amplifier chip to amplify the mixed signal, providing sufficient power to drive the transducer 20.

[0093] Furthermore, the ultrasonic cleaning system 1000 may also include a control device connected to the cleaning device 100 and the ultrasonic generator 300. The control device monitors various parameters during the cleaning process in real time, such as liquid level, temperature, pressure, and the frequency of the ultrasonic signal. Based on these parameters, the control device automatically adjusts the operating status of the ultrasonic cleaning system 1000 to ensure stable cleaning. For example, when a high level of residual contaminants is detected on the surface of the workpiece to be cleaned, the control device can automatically extend the cleaning time or adjust the frequency combination of the cleaning device 100 and the ultrasonic generator 300 to achieve the best cleaning effect. For example, the control device can also control parameters such as the frequency of the ultrasonic signal and the power of the ultrasonic generator 300 to minimize damage to the surface of the workpiece while ensuring that the ultrasonic signal can remove impurities. It should be noted that the control device may include a PLC controller. The connections between the components, the connections between the components and the PLC controller, and the control of the relevant components through the PLC controller are common knowledge to those skilled in the art and will not be elaborated here.

[0094] The ultrasonic generator 300 is configured to periodically send at least two different frequency electrical signals to the transducer 20. This allows the transducer 20 to mix the ultrasonic signals of different frequencies. Through the synergistic effects of acceleration, cavitation, and direct flow, the effective frequency range of the ultrasonic signals is broadened, generating a complex ultrasonic signal field. This produces a cavitation effect over a wider frequency range, resulting in a more uniform distribution of cavitation bubbles in the cleaning fluid. This leads to better removal of impurities of different types and sizes. It also avoids cleaning dead zones, allowing cavitation bubbles in the cleaning fluid to generate and break down over a wider area, thereby improving the cleaning effect.

[0095] The technical features of the embodiments described above can be combined arbitrarily. For the sake of brevity, not all possible combinations of the technical features in the above embodiments are described. However, as long as the combination of these technical features does not contradict each other, it should be considered within the scope of this specification. Furthermore, other implementation methods can be derived from the above embodiments, allowing for structural and logical substitutions and changes without departing from the scope of this disclosure.

[0096] The embodiments described above are merely illustrative of several implementation methods of this application, and while the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent. It should be noted that those skilled in the art can make various modifications and improvements without departing from the concept of this application, and these all fall within the protection scope of this application. Therefore, the protection scope of this patent application should be determined by the appended claims.

Claims

1. A cleaning device, characterized in that, include: The loading component is equipped with a cleaning tank, which is used to hold cleaning fluid and the component to be cleaned. A transducer is disposed in the cleaning tank, and the transducer is configured to convert an electrical signal into a vibration signal. and A vibrating element is disposed within the cleaning tank. The vibrating element includes a body portion and a protrusion portion. The body portion includes a first surface and a second surface facing away from each other. The first surface faces the inner wall of the loading component. The transducer is connected to the first surface. The protrusion portion is connected to the second surface and protrudes from the second surface into the center of the cleaning tank. The vibrating element is configured to receive vibration signals transmitted by the transducer and radiate ultrasonic signals. The ultrasonic signals are used to be transmitted through the cleaning fluid to clean the component to be cleaned.

2. The cleaning device according to claim 1, characterized in that, The protrusions include a plurality of protrusions, which are stacked to form multiple layers. The protrusions of the upper layer partially overlap with the protrusions of the lower layer, such that the protrusion of the upper layer includes a fixed end and a free end. The fixed end is connected to the protrusion of the lower layer, and the free end is spaced apart from the second surface.

3. The cleaning device according to claim 2, characterized in that, The angle between the extension direction from the fixed end to the free end and the second surface is greater than or equal to 30° and less than or equal to 60°.

4. The cleaning device according to claim 2, characterized in that, The edge of the free end is arc-shaped; and / or, The distance between the free end and the second surface is greater than or equal to 2 mm and less than or equal to 5 mm; and / or, The ratio of the area of ​​the overlap between two overlapping protrusions to the area of ​​any one of the two overlapping protrusions is greater than or equal to 1 / 5 and less than or equal to 2 / 3.

5. The cleaning device according to claim 1, characterized in that, The loading component also has an inlet and an outlet. In the direction from the first surface to the second surface, the inlet is farther away from the vibrating component than the outlet. The inlet is configured to allow cleaning fluid to flow into the cleaning tank, and the outlet is configured to allow cleaning fluid to flow out of the cleaning tank. The inlet and the outlet are located on the side of the loading component.

6. The cleaning apparatus according to claim 5, characterized in that, The cleaning device further includes a flow guiding component, which is disposed in the cleaning tank and located on the side of the vibrating member away from the inner wall of the loading member. The flow guiding component is connected to the loading member and spaced apart from the protrusion. The flow guiding component is provided with a flow passage, which is configured to guide the cleaning liquid from the inlet into the cleaning tank and then out of the cleaning tank from the outlet.

7. The cleaning apparatus according to claim 6, characterized in that, The flow guiding component includes: Multiple flow guides, each flow guide including a curved flow guide surface, the flow guide surface including at least one contiguous peak and one trough; and The mounting component is connected to the sides of the loading component at opposite ends. The mounting component passes through the guide to connect multiple guides and form the flow channel between two adjacent guides. The guide is configured to guide the cleaning fluid through the flow channel.

8. The cleaning apparatus according to claim 1, characterized in that, The vibrating element includes a first vibrating element and a second vibrating element. The first vibrating element is disposed at the bottom of the loading component. The body portion of the first vibrating element divides the cleaning tank into a first cavity and a second cavity that are not connected. The body portion of the first vibrating element is connected to the transducer. The protrusion of the first vibrating element is located in the second cavity. The second vibrating element is disposed on the side of the loading component and is located in the second cavity.

9. The cleaning apparatus according to claim 5, characterized in that, Also includes: A sensor is disposed on the loading member and is configured to acquire liquid level information of the cleaning fluid in the cleaning tank. In the direction from the first surface to the second surface, the inlet is further away from the vibrating member than the sensor.

10. An ultrasonic cleaning system, characterized in that, include: The cleaning apparatus according to any one of claims 1-9; and An ultrasonic generator is electrically connected to the transducer of the cleaning device, and the ultrasonic generator is configured to periodically send at least two different frequencies of electrical signals to the transducer.

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