Suction head assembly, impurity collection system, and solar cell production apparatus

Abstract

Embodiments of the present application provide a suction head assembly, a foreign matter collecting system and a solar cell production device, and relate to the technical field of solar cell preparation. The suction head assembly can be used in the foreign matter collecting system, and the foreign matter collecting system can be used to collect foreign matters in a containing cavity surrounded by a machine. The suction head assembly comprises a suction head body and a foreign matter crushing piece. The suction head body comprises a suction port and an exhaust port, and the foreign matter crushing piece is connected with the suction head body. The distance between the foreign matter crushing piece and the suction port is smaller than the distance between the foreign matter crushing piece and the exhaust port. The foreign matter crushing piece is used to crush foreign matters. In embodiments of the present application, an operator can insert the suction head body into the containing cavity to adsorb foreign matters, thereby improving the operation convenience. Moreover, the foreign matter crushing piece can be used to crush large foreign matters, so that the large foreign matters can be crushed into a plurality of small foreign matters that can be adsorbed by the suction head body. Therefore, it is not necessary to manually pick up the large foreign matters, and the cleaning efficiency of the foreign matters in the containing cavity is improved.

Description

Technical Field

[0001] The embodiments of this application relate to the technical field of solar cell fabrication, and more particularly to a suction head assembly, an impurity collection system, and solar cell production equipment. Background Technology

[0002] Solar cell manufacturing equipment includes a machine platform, and the enclosure within the machine platform is used to hold silicon wafers. During the solar cell manufacturing process, impurities such as debris and dust can easily remain inside the enclosure.

[0003] Normally, operators need to use a vacuum cleaner to clean the impurities in the containment cavity. For larger fragments, they still have to be picked up manually, which affects the cleaning efficiency of the containment cavity. Utility Model Content

[0004] Embodiments of this application provide a suction head assembly, an impurity collection system, and a solar cell production apparatus that can improve the cleaning efficiency of impurities within the containment cavity.

[0005] On one hand, embodiments of this application provide a suction head assembly, which includes a suction head body and an impurity crusher. The suction head body includes an intake port and an exhaust port. The impurity crusher is connected to the suction head body. The distance between the impurity crusher and the intake port is smaller than the distance between the impurity crusher and the exhaust port. The impurity crusher is used to crush impurities.

[0006] In some possible implementations, there are multiple impurity crushing components, which are arranged at circumferential intervals on the suction head body.

[0007] In some possible implementations, the suction head assembly also includes a connecting tube that connects to the exhaust port. At least a portion of the connecting tube is a flexible tube.

[0008] On the other hand, embodiments of this application provide an impurity collection system. The impurity collection system is used to collect impurities within a containment cavity enclosed by a machine tool. The impurity collection system includes a vacuum pump, a vacuum mesh tube, a suction head assembly as described above, and a collection box. The vacuum mesh tube is laid above the machine tool. The vacuum mesh tube is connected to the vacuum pump. The end of the suction head assembly's connecting pipe away from the exhaust port is connected to the vacuum mesh tube. The suction head body of the suction head assembly is movable relative to the vacuum mesh tube. The collection box is disposed on the vacuum mesh tube and connected between the suction head body and the vacuum pump. The suction head body is used to adsorb impurities from the containment cavity into the collection box. The vacuum pump and the machine tool are isolated from each other.

[0009] In some possible implementations, the machine includes a cover plate, with a connecting tube passing through the cover plate and connecting the suction head body and the vacuum network tube.

[0010] In some possible implementations, the impurity collection system also includes a snap-fit ​​element disposed within the receiving cavity and connected to the cover plate. The snap-fit ​​element is used to engage with the suction head body.

[0011] In some possible implementations, the collection box includes a collection box body and a first door panel. The collection box body has a first opening and a second opening. The first opening is connected to a vacuum pump, and the second opening is connected to a vacuum mesh tube. The first door panel is used to open or close the first opening.

[0012] In some possible implementations, the impurity collection system further includes a first drive unit and a control switch. The first drive unit is connected to a first door panel. The control switch is disposed on the suction head body. The control switch is connected to the first drive unit and is used to control the first door panel to open or close the first opening via the first drive unit.

[0013] In some possible implementations, the collection box further includes a second door panel for opening or closing the second opening. A third opening is provided on the collection box body, and this third opening is connected to a gas source. When the first door panel closes the first opening and the second door panel closes the second opening, the gas source supplies inert gas to the collection box body.

[0014] In some possible implementations, the impurity collection system also includes a gas storage tank connected between the vacuum pump and the collection box.

[0015] In some possible implementations, there are multiple machines, spaced apart. There are also multiple vacuum network pipes, laid one-to-one above each machine. Finally, there are multiple collection boxes, with each vacuum network pipe and collection box connected in a corresponding manner.

[0016] In another aspect, embodiments of this application provide a solar cell manufacturing apparatus. The solar cell manufacturing apparatus includes a machine base and an impurity collection system as described above. The machine base encloses a receiving cavity for accommodating silicon wafers. The impurity collection system is used to collect impurities within the receiving cavity.

[0017] In summary, the embodiments of this application have at least the following beneficial effects:

[0018] In the embodiments of this application, the operator can insert the suction head body into the receiving cavity to adsorb impurities, which improves the convenience of operation. Furthermore, the impurity crusher can be used to crush larger impurities (such as larger fragments), so that larger impurities can be broken into multiple smaller impurities that can be adsorbed by the suction head body. This eliminates the need to manually pick up larger impurities and improves the cleaning efficiency of impurities in the receiving cavity.

[0019] Furthermore, a vacuum mesh tube connects the suction head body and the vacuum pump, allowing the suction head body to adsorb impurities under the action of the vacuum pump. The suction head body is movable relative to the vacuum mesh tube, allowing it to extend into and move within the receiving cavity. This enables the operator to hold the suction head body and adsorb impurities in different locations within the receiving cavity, improving the convenience and reliability of cleaning impurities in the receiving cavity. It eliminates the need to move the vacuum cleaner back and forth, increasing the efficiency of cleaning impurities in the receiving cavity and saving time and effort.

[0020] Understandably, impurities adsorbed by the suction head can enter the collection box under the action of the vacuum pump, achieving convenient collection of impurities. The isolation between the vacuum pump and the machine prevents the vacuum pump from blowing air into the workshop during operation, reducing the impact of the vacuum pump on the cleanliness of the workshop. Attached Figure Description

[0021] To more clearly illustrate the technical solutions in the embodiments of this application, the drawings used in the embodiments will be briefly introduced below. Obviously, the drawings described below are only some embodiments of this application. For those skilled in the art, other drawings can be obtained based on these drawings without creative effort.

[0022] Figure 1 This is a schematic diagram of the structure of a solar cell production equipment provided in some embodiments of this application;

[0023] Figure 2 Schematic diagrams of the structure of solar cell production equipment provided in other embodiments of this application;

[0024] Figure 3 This is a schematic diagram showing the positional relationship between the suction head assembly and the machine base provided in some embodiments of this application;

[0025] Figure 4 This is a schematic diagram of the suction head assembly provided in some embodiments of this application.

[0026] Explanation of reference numerals in the attached figures:

[0027] 100-Impurity collection system, 101-Connecting bracket, 110-Vacuum pump, 120-Vacuum network tube, 121-Main pipe, 122-Branch pipe, 130-Head assembly, 1301-Inlet, 1302-Outlet, 131-Head body, 132-Impurity crushing component, 133-Connecting pipe, 1331-First connecting pipe, 1332-Second connecting pipe, 140-Collection box, 150-Control switch, 170-Snap-fit ​​component, 180-Gas storage tank, 200-Solar cell production equipment, 210-Machine platform, 211-Sub-machine platform, 212-Cover plate, 213-Base plate, Q-Receiving cavity. Detailed Implementation

[0028] The technical solutions of the embodiments of this application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this application, and not all embodiments. Based on the embodiments of this application, all other embodiments obtained by those skilled in the art without creative effort are within the scope of protection of this application.

[0029] In this application, the terms "upper," "left," "right," "front," "top," "bottom," "inner," and "outer," etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. These terms are primarily for the purpose of better describing this application and its embodiments, and are not intended to limit the indicated device, element, or component to having a specific orientation, or to be constructed and operated in a specific orientation.

[0030] Furthermore, in addition to indicating location or positional relationship, some of the aforementioned terms may also have other meanings. For example, the term "above" may also be used in some cases to indicate a certain dependency or connection relationship. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0031] Furthermore, the terms "installation," "setup," "equipped with," and "connection" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral structure; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium, or an internal connection between two devices, components, or parts. Those skilled in the art can understand the specific meaning of these terms in this application based on the specific circumstances.

[0032] Furthermore, the terms "first," "second," etc., are primarily used to distinguish different devices, elements, or components (which may be the same or different in specific type and construction), and are not intended to indicate or imply the relative importance or quantity of the indicated devices, elements, or components. Unless otherwise stated, "a plurality of" means two or more.

[0033] Figure 1 This is a schematic diagram of the structure of a solar cell production equipment provided in some embodiments of this application. For example... Figure 1 As shown, an embodiment of this application provides a solar cell production apparatus 200. The solar cell production apparatus 200 may include a machine base 210, which is capable of enclosing a receiving cavity Q ( Figure 1 Not shown in the image, see [link / reference]. Figure 3 The cavity Q is used to house the silicon wafer.

[0034] Understandably, the machine 210 is capable of processing the silicon wafers within the cavity Q to fabricate solar cells.

[0035] Continue to refer to Figure 1 In some examples, there can be multiple machines 210, spaced apart. For instance, multiple machines 210 can be spaced apart within the workshop along a first direction X. Understandably, different machines 210 can perform different process treatments on the silicon wafers.

[0036] For example, the multiple machines 210 may include a texturing machine, a diffusion machine, an alkaline polishing machine, a polycrystalline silicon coating machine, an annealing machine, a cleaning machine, an atomic layer deposition machine, a silicon nitride coating machine, and a screen printing machine. The texturing machine can texturize the surface of the silicon wafer, and the diffusion machine can form a PN junction within the silicon wafer. The alkaline polishing machine can perform alkaline polishing on the silicon wafer to remove unwanted diffusion layers and eliminate parasitic diodes, etc. The polycrystalline silicon coating machine can deposit a polycrystalline silicon (POLY) film layer on the surface of the silicon wafer, and the annealing machine can perform annealing on the silicon wafer. The cleaning machine can clean the silicon wafer; for example, the cleaning machine can be a polycrystalline silicon edge-wrap cleaning machine, or it can be other types of cleaning machines, which are not further limited in the embodiments of this application.

[0037] Atomic layer deposition (ALD) equipment can deposit atomic layers on the surface of silicon wafers, silicon nitride coating equipment can deposit silicon nitride films on the surface of silicon wafers, and screen printing equipment can print electrodes on silicon wafers.

[0038] It is understood that the plurality of machine tools 210 may also include other process machine tools besides those described above, and the embodiments of this application do not further limit this.

[0039] Continue to refer to Figure 1 Each machine station 210 may include multiple sub-machine stations 211 arranged along a second direction Y, where the second direction Y is perpendicular or approximately perpendicular to the first direction X. That is, the angle between the second direction Y and the first direction X can be 90°, 88°, or 89°, etc. It is understood that the number of sub-machine stations 211 included in different machine stations 210 may be equal or unequal, and the embodiments of this application do not further limit this.

[0040] Each sub-station 211 can enclose a receiving cavity Q, enabling the machine 210 to enclose multiple receiving cavities Q arranged along the second direction Y. Understandably, multiple sub-stations 211 can perform processing on the silicon wafers separately, thereby improving the efficiency of the machine 210 in processing the silicon wafers.

[0041] For example, after a silicon wafer is processed at a substation 211 of a machine 210, it can be transported to another substation 211 of a machine 210 by an automated guided vehicle (AGV) to fabricate a solar cell.

[0042] During the fabrication of solar cells, debris and dust can easily accumulate inside the housing cavity Q. Typically, operators need to use a vacuum cleaner to remove these impurities. However, repeatedly moving the vacuum cleaner around reduces the efficiency of cleaning the housing cavity Q, and the vacuum cleaner also blows air into the workshop while removing impurities, affecting the cleanliness of the workshop.

[0043] Furthermore, the receiving cavity Q is usually small and contains many components, making it unable to accommodate the main unit of the vacuum cleaner. If the vacuum cleaner is placed outside the receiving cavity Q, the vacuum cleaner head may not be able to reach all parts of the receiving cavity Q, affecting the reliability and convenience of cleaning the receiving cavity Q.

[0044] Furthermore, larger fragments still can only be picked up manually, which affects the efficiency of cleaning impurities inside the containment cavity.

[0045] Figure 2 A schematic diagram of the structure of a solar cell production equipment provided for other embodiments of this application. Figure 3 This is a schematic diagram showing the positional relationship between the suction head assembly and the machine base provided in some embodiments of this application.

[0046] Based on this, in the embodiments of this application, such as Figure 2 and Figure 3 As shown, the solar cell production equipment 200 also includes an impurity collection system 100. The impurity collection system 100 is used to collect impurities within the receiving cavity Q enclosed by the machine platform 210, so as to improve the cleaning efficiency of impurities within the receiving cavity Q and reduce the impact of the impurity cleaning process on the cleanliness of the workshop. The impurity collection system 100 is illustrated below.

[0047] like Figure 2 and Figure 3 As shown, the impurity collection system 100 includes a vacuum pump 110, a vacuum network tube 120, a suction head assembly 130, and a collection box 140.

[0048] Understandably, the vacuum pump 110 is capable of evacuating air so that a negative pressure can be formed in the components connected to the vacuum pump 110 (e.g., the gas tank 180, the collection box 140, the vacuum network tube 120, and the suction head assembly 130).

[0049] For example, such as Figure 2As shown, the vacuum pump 110 can be installed in an auxiliary room, which can be adjacent to the workshop. The machine 210 is installed in the workshop, and the vacuum pump 110 is installed in the auxiliary room, so that the vacuum pump 110 and the machine 210 can be isolated, preventing the vacuum pump 110 from blowing air into the workshop during operation and reducing the impact of the vacuum pump 110 on the cleanliness of the workshop.

[0050] For example, the vacuum network tube 120 can be a stainless steel tube, or it can be a metal or non-metal tube of other materials. The embodiments of this application do not further limit this.

[0051] The vacuum network tube 120 is laid above the machine base 210, that is, the vacuum network tube 120 is laid on the side of the machine base 210 away from the ground. Understandably, the extension direction of the vacuum network tube 120 can be set according to requirements, and the embodiments of this application do not further limit it in this regard.

[0052] In some examples, such as Figure 2 As shown, the vacuum network tube 120 is connected to the vacuum pump 110, so that the vacuum pump 110 can form a negative pressure in the vacuum network tube 120 when it is working.

[0053] Figure 4 This is a schematic diagram of the structure of a suction head assembly provided in some embodiments of this application. In some examples, such as... Figure 3 and Figure 4 As shown, the suction head assembly 130 includes a suction head body 131, a connecting tube 133, and an impurity crushing component 132.

[0054] The suction head body 131 includes an intake port 1301 and an exhaust port 1302. A connecting pipe 133 is connected to the exhaust port 1302, and the end of the connecting pipe 133 away from the exhaust port 1302 is connected to the vacuum network tube 120. In other words, the suction head body 131 can be connected to the vacuum network tube 120 through the connecting pipe 133, so that when the vacuum pump 110 is working, a negative pressure can be formed in the suction head body 131, thereby allowing the suction head body 131 to adsorb impurities through the intake port 1301.

[0055] The impurity crusher 132 is connected to the suction head body 131. The distance between the impurity crusher 132 and the suction port 1301 is less than the distance between the impurity crusher 132 and the exhaust port 1302. The impurity crusher 132 is used to crush impurities.

[0056] Understandably, the suction head body 131 is capable of picking up impurities (e.g., debris) smaller than or equal to a set area, which is related to the diameter of the suction port 1301. When the diameter of the suction port 1301 is large, the set area can be large. When the diameter of the suction port 1301 is small, the set area can be small. For example, the set area can be 2 square centimeters. Alternatively, the set area can be other values, which are not further limited in the embodiments of this application.

[0057] During the cleaning of impurities, for fragments larger than the set area, the operator can hold the suction head body 131 and use the impurity crusher 132 to knock the fragments, so that the impurity crusher 132 can crush the larger fragments into multiple smaller fragments that can be adsorbed by the suction head body 131. There is no need to manually pick up the larger fragments, which improves the cleaning efficiency of impurities in the receiving cavity Q.

[0058] For example, the impurity crusher 132 can be in the shape of a toothed comb, or it can be in other shapes including protruding portions, such as a cone. The embodiments of this application do not further limit the specific shape of the impurity crusher 132.

[0059] The number of impurity crushing components 132 can be one or more. In some examples, the number of impurity crushing components 132 is multiple, and multiple impurity crushing components 132 are arranged at intervals along the circumference of the suction head body 131.

[0060] Understandably, setting the number of impurity crushing parts 132 to multiple allows operators to use different impurity crushing parts 132 to crush larger fragments, improving operational convenience.

[0061] In some examples, at least a portion of the connecting tube 133 is a flexible tube to reduce the restriction imposed by the connecting tube 133 on the suction head body 131, so that the suction head body 131 is movable relative to the vacuum mesh tube 120, thereby allowing the suction head body 131 to extend into and move within the receiving cavity Q.

[0062] In this way, the operator can hold the suction head 131 to adsorb and clean impurities in different locations within the receiving cavity Q, improving the convenience and reliability of cleaning impurities within the receiving cavity Q. This eliminates the need to move the vacuum cleaner back and forth, increasing the efficiency of cleaning impurities within the receiving cavity Q and saving time and effort.

[0063] Combination Figure 2 and Figure 3 The collection box 140 is mounted on the vacuum network tube 120 and connected between the suction head body 131 and the vacuum pump 110. The suction head body 131 is used to adsorb impurities in the receiving cavity Q into the collection box 140.

[0064] Understandably, the suction head body 131 can adsorb impurities, which can then enter the collection box 140 under the action of the vacuum pump 110, thus achieving convenient collection of impurities.

[0065] For example, the collection box 140 may include multiple (e.g., two) collection boxes, each capable of holding impurities. These collection boxes can be detachably connected to the vacuum pump 110 and the vacuum mesh tube 120, respectively. After one collection box is full of impurities, the vacuum pump 110 and vacuum mesh tube 120 can be switched to the other collection box, and the full collection box can be removed and replaced with an empty one. This reduces the impact of the collection box replacement process on impurity collection and improves the collection efficiency of impurities within the containment cavity Q.

[0066] The impurity collection system 100 may further include a filter box (not shown in the figure), which is connected to the collection box 140 on the side near the vacuum pump 110. The filter box includes a filter element, which, for example, may be a filter screen. Alternatively, the filter element may be filter cotton, etc. The embodiments of this application do not further limit the specific form of the filter element.

[0067] The filter element and the collection box 140 are arranged adjacent to each other. The filter element can filter impurities, allowing them to be stored in the collection box 140 under the action of the filter element, reducing the risk of impurities entering the vacuum pump 110. For example, the filter element is removable relative to the filter box, improving the ease of replacement.

[0068] In some examples, such as Figure 3 As shown, the machine 210 includes a cover plate 212, and a connecting pipe 133 passes through the cover plate 212 and connects the suction head body 131 and the vacuum mesh tube 120.

[0069] For example, the machine 210 may also include a base plate 213, a cover plate 212 and the base plate 213 being disposed opposite to each other, with the cover plate 212 being away from the ground relative to the base plate 213. The vacuum network tube 120 is located on the side of the cover plate 212 away from the base plate 213, that is, the cover plate 212 is closer to the vacuum network tube 120 relative to the base plate 213.

[0070] A through hole can be provided on the cover plate 212, and the connecting pipe 133 is located in the through hole, allowing the connecting pipe 133 to pass through the cover plate 212. The suction head body 131 can be disposed in the receiving cavity Q, allowing the connecting pipe 133 to pass through the cover plate 212 and connect the suction head body 131 and the vacuum mesh tube 120. By disposing of the suction head body 131 in the receiving cavity Q, the machine tool 210 can protect the suction head body 131 and reduce the risk of damage to the suction head body 131.

[0071] For example, such as Figure 3As shown, the connecting pipe 133 may include a first connecting pipe 1331 and a second connecting pipe 1332. The first connecting pipe 1331 is connected to the vacuum mesh pipe 120. The first connecting pipe 1331 passes through the cover plate 212 and is connected to the cover plate 212, which reduces the risk of the first connecting pipe 1331 shifting relative to the cover plate 212.

[0072] The first connecting pipe 1331 can be a rigid pipe. For example, the first connecting pipe 1331 can be a stainless steel pipe, or it can be a metal or non-metal pipe of other materials. The impurity collection system 100 may include a connecting bracket 101, which is connected to the side of the cover plate 212 away from the receiving cavity Q, and the first connecting pipe 1331 is connected to the cover plate 212 through the connecting bracket 101.

[0073] The second connecting tube 1332 is located within the receiving cavity Q, and the first connecting tube 1331 and the suction head body 131 are connected via the second connecting tube 1332. The second connecting tube 1332 can be a flexible tube, for example, it can be a non-metallic material tube, such as a polyvinyl chloride (PVC) tube. When the suction head body 131 moves within the receiving cavity Q, it can drive the second connecting tube 1332 to move, making the suction head body 131 movable relative to the vacuum mesh tube 120.

[0074] For example, the inner wall of the second connecting tube 1332 can be a smooth surface to reduce the obstruction of impurities by the second connecting tube 1332 and reduce the risk of impurities getting stuck in the second connecting tube 1332.

[0075] The diameter of the second connecting tube 1332 can range from 5 cm to 10 cm. For example, the diameter of the second connecting tube 1332 can be 5.5 cm, 7 cm, or 8 cm, etc. Understandably, the diameter of the second connecting tube 1332 can also be other values, and the embodiments of this application do not further limit this. The diameters of the first connecting tube 1331 and the vacuum mesh tube 120 can be the same as or different from the diameter of the second connecting tube 1332, and the embodiments of this application do not further limit this.

[0076] The length of the second connecting tube 1332 can range from 7m to 10m, allowing the suction head body 131 to adsorb impurities at different locations within the receiving cavity Q. For example, the length of the second connecting tube 1332 can be 7.5m, 8m, or 9m, etc. Alternatively, the length of the second connecting tube 1332 can also be other values. Understandably, the length of the second connecting tube 1332 can be determined based on the length of the receiving cavity Q along the first X direction and the width along the second Y direction. The embodiments of this application do not further limit the value of the length of the second connecting tube 1332.

[0077] After the debris is adsorbed by the suction head body 131 and enters the first connecting tube 1331 and the vacuum mesh tube 120, it will collide with the inner wall of the tube, and multiple debris will also collide with each other within the tube. Due to the good rigidity and poor toughness of the silicon wafer, the debris will be crushed into centimeter-sized particles (for example, the diameter of the debris can be about 1 cm) in the tube, reducing the risk of debris getting stuck in the tube and improving the reliability of the impurity collection system 100.

[0078] Continue to refer to Figure 3 In some examples, the impurity collection system 100 also includes a snap-fit ​​connector 170 disposed within the receiving cavity Q and connected to the cover plate 212. The snap-fit ​​connector 170 is used to snap onto the suction head body 131.

[0079] For example, the snap-fit ​​170 can be a snap-fit. The snap-fit ​​170 is disposed in the receiving cavity Q and connected to the cover plate 212. The snap-fit ​​170 is used to snap-fit ​​with the suction head body 131, so that the suction head body 131 can be detachably connected to the cover plate 212 through the snap-fit ​​170, thereby reducing the impact of the suction head body 131 on the silicon wafer in the receiving cavity Q.

[0080] Continue to refer to Figure 3 The second connecting tube 1332 can be bent and folded and then snapped into the snap fastener 170 to reduce the impact of the second connecting tube 1332 on the space inside the receiving cavity Q.

[0081] In some examples, such as Figure 2 As shown, there are multiple vacuum mesh tubes 120, which are laid one-to-one on top of multiple machine bases 210. There are multiple collection boxes 140, and the multiple vacuum mesh tubes 120 and multiple collection boxes 140 are connected one-to-one.

[0082] Understandably, the number of vacuum tubes 120, machine base 210 and collection box 140 is the same, so that multiple vacuum tubes 120 can be laid on top of multiple machine bases 210 in a one-to-one correspondence, and multiple vacuum tubes 120 can be connected to multiple collection boxes 140 in a one-to-one correspondence.

[0083] The machine 210, vacuum network tube 120 and collection box 140 are configured to correspond one-to-one, so that impurities in one machine 210 can be transferred to one collection box 140 through one vacuum network tube 120. This avoids cross-contamination after impurities (such as fragments) collected from different machines 210 are mixed, and realizes automatic classification of fragments.

[0084] If vacuum cleaners are used to collect debris from each machine 210, the debris collected from different machines 210 will mix, causing cross-contamination. Furthermore, the mixed debris needs to be sorted before it can be recycled, increasing labor costs. In addition, using vacuum cleaners to collect debris from each machine 210 makes it impossible to trace the source of the debris generated by each machine 210, hindering the analysis of the causes of debris generation.

[0085] Therefore, by setting up a system where impurities (such as fragments) within a machine 210 can be transferred to a collection box 140 via a vacuum network tube 120, automatic sorting of fragments is achieved, preventing cross-contamination between fragments collected from different machines 210 and improving the value of fragments during recycling. Furthermore, manual sorting of fragments is eliminated, saving labor costs. Additionally, the source of fragments generated by each machine 210 can be traced, facilitating the analysis of the causes of fragmentation.

[0086] For example, a weighing device can be installed inside the collection box 140. The weighing device can weigh the fragments inside the collection box 140, realize automatic weighing, eliminate the need for manual weighing, improve the efficiency of weighing fragments, and improve the authenticity and reliability of obtaining fragment weight.

[0087] The weighing unit can be connected to the manufacturing execution system (MES), enabling it to send the weight of fragments generated by each machine 210 to the MES. This allows the MES to generate statistical charts, facilitating analysis and troubleshooting.

[0088] For example, the fragments in collection bin 140 can be transported to other locations by AGV, realizing automatic loading of fragments and improving the collection efficiency of fragments.

[0089] Continue to refer to Figure 2 For example, the vacuum network tube 120 may include a main tube 121 and branch tubes 122. At least a portion of the main tube 121 extends along a second direction Y and is connected to the vacuum pump 110 via a collection box 140. Multiple branch tubes 122 are spaced apart along the second direction Y and are each connected to the main tube 121. The multiple branch tubes 122 are located above multiple substations 211 in a one-to-one correspondence.

[0090] There are multiple suction head assemblies 130, and each suction head assembly 130 is connected to a corresponding branch tube 122. In this way, the multiple suction head assemblies 130 can adsorb impurities in multiple sub-stations 211 of a machine 210, reducing the mutual interference when cleaning impurities in different sub-stations 211.

[0091] Understandably, impurities in multiple sub-machines 211 can be transferred to the same collection box 140 via the main pipe 121, which facilitates the collection and statistics of fragments generated by each machine 210.

[0092] For example, the number of vacuum pumps 110 may be less than the number of vacuum network tubes 120 and collection boxes 140, or the number of vacuum pumps 110 may be equal to the number of vacuum network tubes 120 and collection boxes 140.

[0093] In the production process of solar cells, impurities in each machine 210 are usually not cleaned simultaneously. For example, impurities in two or three machines 210 can be cleaned at the same time, and the number of vacuum pumps 110 configured is sufficient to meet the usage requirements. The embodiments of this application do not further limit the number of vacuum pumps 110.

[0094] For example, such as Figure 2 As shown, at least two vacuum pumps 110 can be connected in parallel to form a vacuum pump group. The vacuum pump group can be connected to at least two collection boxes 140. Taking nine collection boxes 140 and two vacuum pump groups as an example, one vacuum pump group can be connected to four collection boxes 140 respectively, and through the four collection boxes 140, to four vacuum mesh tubes 120 respectively. Another vacuum pump group can be connected to five collection boxes 140 respectively, and through the five collection boxes 140, to five vacuum mesh tubes 120 respectively.

[0095] By adopting the above configuration, multiple vacuum pumps 110 do not need to be connected to multiple collection boxes 140 one by one, which helps to reduce the number of vacuum pumps 110 and reduce the cost of impurity collection system 100.

[0096] Furthermore, when some of the vacuum pumps 110 in the vacuum pump group (one, two, or more) fail, the other vacuum pumps 110 can continue to operate, thereby creating a negative pressure in the collection box 140, vacuum network tube 120, and suction head body 131 to achieve the adsorption of impurities, thus improving the reliability of the impurity collection system 100.

[0097] Continue to refer to Figure 2 In some examples, the impurity collection system 100 also includes a gas storage tank 180 connected between the vacuum pump 110 and the collection box 140.

[0098] In other words, such as Figure 2As shown, the vacuum pump 110 and the suction head body 131 are connected to both ends of the vacuum network tube 120. The gas storage tank 180 and the collection box 140 are respectively disposed on the vacuum network tube 120, with the gas storage tank 180 located between the vacuum pump 110 and the collection box 140. For example, the distance between the collection box 140 and the gas storage tank 180 can be less than the distance between the collection box 140 and the suction head body 131.

[0099] For example, the vacuum pump 110 can be continuously running. The vacuum pump 110 is connected to the gas storage tank 180, which allows negative pressure to be formed inside the gas storage tank 180. The gas storage tank 180 can store negative pressure, enabling it to provide negative pressure to the collection box 140, the vacuum network tube 120, and the suction head body 131.

[0100] When it is necessary to clean impurities in the receiving cavity Q, the gas storage tank 180 and the collection box 140 can be connected. The gas storage tank 180 can provide negative pressure to the collection box 140, the vacuum network tube 120, and the suction head body 131, so that the suction head body 131 can adsorb impurities in the receiving cavity Q. When it is not necessary to clean impurities in the receiving cavity Q, the gas storage tank 180 and the collection box 140 can be disconnected. The gas storage tank 180 stops providing negative pressure to the collection box 140, the vacuum network tube 120, and the suction head body 131, so that the suction head body 131 stops adsorbing impurities.

[0101] In other words, by controlling the connection or disconnection between the gas storage tank 180 and the collection box 140, it is possible to control the suction head body 131 to adsorb or stop adsorbing impurities.

[0102] Understandably, by setting the gas storage tank 180 to store negative pressure, when the gas storage tank 180 and the collection box 140 are connected, the gas storage tank 180 can provide a stable negative pressure for the collection box 140, the vacuum network tube 120 and the suction head body 131, thereby reducing the impact of airflow fluctuations of the vacuum pump 110 on the pressure inside the collection box 140, the vacuum network tube 120 and the suction head body 131, and improving the stability of the impurity collection system 100.

[0103] In some examples, the collection box 140 includes a collection box body and a first door panel (not shown). The collection box body has a first opening and a second opening, the first opening being connected to the vacuum pump 110 and the second opening being connected to the vacuum mesh tube 120. The first door panel is used to open or close the first opening.

[0104] Understandably, when the first door panel opens the first opening, the vacuum pump 110, the gas storage tank 180, and the collection box body are connected. When the first door panel closes the first opening, the vacuum pump 110, the gas storage tank 180, and the collection box body are disconnected.

[0105] When it is necessary to clean the impurities in the receiving cavity Q, the first door plate can be set to open the first opening, so that the vacuum pump 110, the gas storage tank 180 and the collection box 140 are connected. The vacuum pump 110 and the gas storage tank 180 can provide negative pressure to the collection box body, the vacuum network tube 120 and the suction head body 131, so that the suction head body 131 can adsorb the impurities in the receiving cavity Q.

[0106] When there is no need to clean the impurities in the receiving cavity Q, the first door plate can be set to close the first opening, so that the vacuum pump 110, the gas storage tank 180 and the collection box body are disconnected. The vacuum pump 110 and the gas storage tank 180 stop providing negative pressure to the collection box body, the vacuum network tube 120 and the suction head body 131, so that the suction head body 131 can stop adsorbing impurities.

[0107] The first door panel is set to open or close the first opening to realize the connection or disconnection between the vacuum pump 110, the gas storage tank 180 and the collection box body. The structure is simple and helps to reduce the cost of the impurity collection system 100.

[0108] For example, the first door panel and the collection box body can be rotatably connected, allowing the first door panel to open or close the first opening. Alternatively, the first door panel and the collection box body can also be slidably connected, allowing the first door panel to open or close the first opening. The embodiments of this application do not further limit the connection method between the first door panel and the collection box body.

[0109] In some examples, such as Figure 4 As shown, the impurity collection system 100 also includes a first driving member (not shown) and a control switch 150. The first driving member is connected to the first door panel, and the control switch 150 is disposed on the suction head body 131. The control switch 150 is connected to the first driving member and is used to control the first door panel to open or close the first opening via the first driving member.

[0110] For example, the control switch 150 can be connected to the first drive unit via a signal trace, which can be set on the vacuum tube 120 and the connecting tube 133 to reduce the risk of the signal trace getting tangled with other pipes or components.

[0111] When it is necessary to clean the impurities in the receiving cavity Q, the operator can press the control switch 150 so that the first drive unit can drive the first door panel to move and open the first opening. The gas storage tank 180 can provide negative pressure to the collection box body, vacuum network tube 120 and suction head body 131 so that the suction head body 131 can adsorb the impurities in the receiving cavity Q.

[0112] When there is no need to clean the impurities in the receiving cavity Q, the operator can press the control switch 150 again, so that the first drive unit can drive the first door panel to move to close the first opening. The gas storage tank 180 stops providing negative pressure to the collection box body, vacuum network tube 120 and suction head body 131, so that the suction head body 131 can stop adsorbing the impurities in the receiving cavity Q.

[0113] Understandably, by setting the control switch 150 to control the opening or closing of the first opening of the first door panel through the first driving member, and by setting the control switch 150 on the suction head body 131, the ease of use of the impurity collection system 100 can be improved.

[0114] In some examples, the collection box body also includes a second door panel for opening or closing a second opening.

[0115] In some examples, the collection box body has a third opening, which is connected to a gas source. When the first door panel closes the first opening and the second door panel closes the second opening, the gas source supplies inert gas to the collection box body.

[0116] Understandably, when the first door panel closes the first opening and the second door panel closes the second opening, the collection box body is disconnected from the gas storage tank 180 and the suction head body 131. At this time, the gas source can supply inert gas to the collection box body, so that the gas pressure inside the collection box body can be normal atmospheric pressure or slightly positive pressure (e.g., 200 Pa to 400 Pa higher than atmospheric pressure). The inert gas can protect the fragments inside the collection box body, reduce the risk of oxidation of the fragments and the silver paste on the fragments, and help increase the recycling value of the fragments.

[0117] For example, the inert gas supplied by the gas source to the collection box may include nitrogen or other inert gases, and the embodiments of this application do not further limit this.

[0118] Finally, it should be noted that the above embodiments are only used to illustrate the technical solutions of this application, and are not intended to limit them. Although this application has been described in detail with reference to the foregoing embodiments, those skilled in the art should understand that modifications can still be made to the technical solutions described in the foregoing embodiments, or equivalent substitutions can be made to some or all of the technical features therein. Such modifications or substitutions do not cause the essence of the corresponding technical solutions to deviate from the scope of the technical solutions of the embodiments of this application.

Claims

1. A suction head assembly, characterized in that, include: The suction head body includes an air intake port and an air exhaust port; An impurity crusher is connected to the suction head body; the distance between the impurity crusher and the suction port is less than the distance between the impurity crusher and the exhaust port; the impurity crusher is used to crush impurities.

2. The suction head assembly according to claim 1, characterized in that, The number of impurity crushing components is multiple, and the multiple impurity crushing components are arranged at intervals along the circumference of the suction head body.

3. The suction head assembly according to claim 1 or 2, characterized in that, It also includes a connecting pipe that is connected to the exhaust port; at least a portion of the connecting pipe is a flexible pipe.

4. An impurity collection system, characterized in that, Used to collect impurities within the containment cavity enclosed by the machine; The impurity collection system includes: Vacuum pump; A vacuum network tube is laid above the machine platform; the vacuum network tube is connected to the vacuum pump; The suction head assembly as described in any one of claims 1 to 3, wherein the end of the connecting tube of the suction head assembly away from the exhaust port is connected to the vacuum mesh tube, and the suction head body of the suction head assembly is movable relative to the vacuum mesh tube; and, A collection box is mounted on the vacuum network tube and connected between the suction head body and the vacuum pump; the suction head body is used to adsorb impurities in the receiving cavity into the collection box; The vacuum pump and the machine base are isolated from each other.

5. The impurity collection system according to claim 4, characterized in that, The machine includes a cover plate, and the connecting pipe passes through the cover plate and connects the suction head body and the vacuum mesh tube.

6. The impurity collection system according to claim 5, characterized in that, It also includes a snap-fit ​​component, which is disposed within the receiving cavity and connected to the cover plate; the snap-fit ​​component is used to snap into the suction head body.

7. The impurity collection system according to claim 4, characterized in that, The collection box includes: The collection box body has a first opening and a second opening, the first opening is connected to the vacuum pump, and the second opening is connected to the vacuum network tube. The first door panel is used to open or close the first opening.

8. The impurity collection system according to claim 4, characterized in that, It also includes a gas storage tank, which is connected between the vacuum pump and the collection box.

9. The impurity collection system according to any one of claims 4 to 8, characterized in that, The number of machine stations is multiple, and the multiple machine stations are arranged at intervals; the number of vacuum network tubes is multiple, and the multiple vacuum network tubes are laid on top of the multiple machine stations in a one-to-one correspondence; There are multiple collection boxes, and the multiple vacuum mesh tubes and the multiple collection boxes are connected in a one-to-one correspondence.

10. A solar cell manufacturing equipment, characterized in that, include: The machine is equipped with a receiving cavity, which is used to hold silicon wafers. The impurity collection system according to any one of claims 3 to 9, wherein the impurity collection system is used to collect impurities within the receiving cavity.

Images