Quartz boat ultrasonic cleaning and drying all-in-one machine

Abstract

A quartz boat ultrasonic cleaning and drying integrated machine, including a rack, an input conveying belt, a cleaning conveying belt and an output conveying belt are sequentially installed from one side of the rack to the other side of the rack, a cleaning tank for cleaning the quartz boat is arranged directly below the cleaning conveying belt, an ultrasonic vibrator is installed in the cleaning tank, the ultrasonic vibrator is installed in the cleaning tank through a transverse driving device, a lifting power device for driving the cleaning conveying belt to move up and down to drive the quartz boat to enter and exit the cleaning tank is installed on the rack; a drying box is installed on the rack and sleeved on the output conveying belt, a plurality of hot air generating devices for drying the quartz boat are installed on the top of the drying box. The application can safely and efficiently clean and dry the quartz boat by combining physical cleaning with multi-stage drying, which helps to solve the problems of low efficiency, easy damage, high pollution risk and other problems of traditional methods.

Description

Technical Field

[0001] This utility model relates to the field of quartz boat production technology, and in particular to an integrated ultrasonic cleaning and drying machine for quartz boats. Background Technology

[0002] With the rapid development of high-tech industries such as semiconductors, photovoltaics, and LEDs, the cleanliness requirements for key process equipment (such as quartz boats, wafer carriers, and optical devices) are becoming increasingly stringent. As a core tool for carrying high-value materials such as silicon wafers and sapphire wafers, the residual particles, metal ions, organic matter, and other impurities on the surface of quartz boats directly affect product yield. However, traditional cleaning methods, such as manual wiping, chemical immersion, or spray cleaning, have gradually revealed drawbacks such as low efficiency, numerous blind spots, and easy damage to devices. Mechanical friction may scratch the quartz surface, strong acid and alkali residues may corrode the material, and internal impurities in complex structures (such as honeycomb or porous designs) are even more difficult to reach. At the same time, the drying process after cleaning quartz boats presents equally severe challenges: natural air drying is time-consuming and easily attracts dust, while hot air drying requires moving the quartz boat around, which is time-consuming, labor-intensive, and prone to damage. Utility Model Content

[0003] The technical problem to be solved by this utility model is to address the shortcomings of the existing technology by providing an ultrasonic cleaning and drying machine for quartz boats that combines physical cleaning with multi-stage drying, enabling safe and efficient cleaning and drying of quartz boats. This helps to solve the problems of low efficiency, easy damage, and high risk of contamination associated with traditional methods.

[0004] The technical problem to be solved by this utility model is achieved through the following technical solution. This utility model is an integrated ultrasonic cleaning and drying machine for quartz boats, including a frame. An input conveyor belt, a cleaning conveyor belt, and an output conveyor belt are sequentially installed from one side of the frame to the other. A cleaning tank for cleaning the quartz boat is provided directly below the cleaning conveyor belt. An ultrasonic transducer is installed in the cleaning tank and is mounted in the cleaning tank by a transverse drive device. A lifting power device for driving the cleaning conveyor belt to move up and down to move the quartz boat in and out of the cleaning tank is installed on the frame. A drying box is mounted on the output conveyor belt on the frame. Openings are provided on both sides of the drying box to facilitate the output conveyor belt to move the quartz boat in and out of the drying box. Several hot air generating devices for drying the quartz boat are installed on the top of the drying box.

[0005] The technical problem to be solved by this utility model can also be further achieved through the following technical solutions. For the quartz boat ultrasonic cleaning and drying integrated machine described above, the transverse drive device includes a ball screw that is transversely connected through the cleaning tank. The screw of the ball screw is rotatably mounted on the cleaning tank through a rotary dynamic seal. The ultrasonic transducer is mounted on the nut of the ball screw. A servo motor that is connected to the screw drive of the ball screw is also installed on the cleaning tank.

[0006] The technical problem to be solved by this utility model can also be further achieved through the following technical solution: For the quartz boat ultrasonic cleaning and drying integrated machine described above, a slider is also installed on the nut of the ball screw, and a transverse slide rail that slides and cooperates with the slider is provided on the inner wall of the cleaning tank.

[0007] The technical problem to be solved by this utility model can also be further achieved through the following technical solution: For the quartz boat ultrasonic cleaning and drying integrated machine described above, the lifting power device is an inverted cylinder, and the cleaning conveyor belt is horizontally mounted on the piston rod of the cylinder through a bracket.

[0008] The technical problem to be solved by this utility model can also be further achieved through the following technical solution: For the quartz boat ultrasonic cleaning and drying integrated machine described above, there are 3-5 hot air generating devices, and the 3-5 hot air generating devices are evenly distributed from one side of the drying box to the other side of the drying box.

[0009] The technical problem to be solved by this utility model can also be further achieved through the following technical solution: For the quartz boat ultrasonic cleaning and drying integrated machine described above, the hot air generating device is installed at an angle on the drying box, and the air outlet of the hot air generating device is set towards the side of the cleaning conveyor belt.

[0010] The technical problem to be solved by this utility model can also be further achieved through the following technical solution: for the quartz boat ultrasonic cleaning and drying integrated machine described above, the hot air generating device is a hot air blower.

[0011] The technical problem to be solved by this utility model can also be further achieved through the following technical solution: for the quartz boat ultrasonic cleaning and drying integrated machine described above, the input conveyor belt, cleaning conveyor belt and output conveyor belt are all Teflon conveyor belts.

[0012] The technical problem to be solved by this utility model can also be further achieved through the following technical solution: For the quartz boat ultrasonic cleaning and drying integrated machine described above, the cleaning tank and the drying box are both rectangular parallelepipeds.

[0013] Compared with the prior art, the beneficial effects of this utility model are as follows: 1. This utility model utilizes the cavitation, acceleration, and direct flow effects of ultrasound in liquids to violently impact and peel off dirt from the surface and crevices of a quartz boat. It can quickly and thoroughly remove various stubborn stains with high cleaning efficiency. Furthermore, ultrasonic cleaning is a physical cleaning method that can safely clean the quartz boat without causing damage. 2. The drying box of this utility model is mounted on the output conveyor belt. Through reasonable structural design, the quartz boat can continuously receive hot air drying treatment during the conveying process, forming a multi-stage drying effect, ensuring that the quartz boat is completely dry, and avoiding subsequent quality problems caused by residual moisture. 3. This utility model integrates the cleaning and drying functions into one device. The input conveyor belt on one side of the frame is connected to the output conveyor belt on the other side, realizing continuous automated operation of the quartz boat cleaning and drying process. This reduces manual intervention and material handling in intermediate links, improves the continuity and automation of production, and reduces labor intensity and labor costs. Attached Figure Description

[0014] Figure 1 This is a schematic diagram of one structure of the present utility model. Detailed Implementation

[0015] To make the objectives, technical solutions, and advantages of the embodiments of this utility model clearer, the technical solutions of the embodiments of this utility model will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are only some embodiments of this utility model, not all embodiments. Based on the embodiments of this utility model, all other embodiments obtained by those skilled in the art without creative effort are within the protection scope of this utility model.

[0016] Reference Figure 1 An integrated ultrasonic cleaning and drying machine for quartz boats includes a frame 1, which serves as the supporting structure for the entire equipment, ensuring sufficient stability and reliability during operation. An input conveyor belt 2, a cleaning conveyor belt 3, and an output conveyor belt 4 are sequentially installed from one side of the frame 1 to the other. The input conveyor belt 2 smoothly transports the quartz boats to be cleaned onto the cleaning conveyor belt 3, and its operating speed can be adjusted according to actual production needs to ensure that the quartz boats can accurately and orderly enter the subsequent cleaning process. The cleaning conveyor belt 3 is the load-bearing component of the quartz boats during the cleaning process, requiring not only stable conveying capabilities but also the ability to complete the cleaning operation. The output conveyor belt 4 not only transports the cleaned quartz boats but also assists in the drying process. Preferably, the input conveyor belt 2, the cleaning conveyor belt 3, and the output conveyor belt 4 are all Teflon conveyor belts, which have the advantages of high temperature resistance, corrosion resistance, and low coefficient of friction, effectively reducing the wear of the quartz boat during the conveying process, while ensuring the smooth operation of the conveyor belt.

[0017] To enable the cleaning operation of the quartz boat, a cleaning tank 5 is provided directly below the cleaning conveyor belt 3 for cleaning the quartz boat. An ultrasonic transducer 6 is installed in the cleaning tank 5. The ultrasonic transducer 6 is installed in the cleaning tank 5 through a transverse drive device. A lifting power device 8 is installed on the frame 1 to drive the cleaning conveyor belt 3 to move up and down to move the quartz boat in and out of the cleaning tank 5. Preferably, the lifting power device 8 is an inverted cylinder, which provides stable and reliable power for the lifting of the cleaning conveyor belt 3. The cleaning conveyor belt 3 is transversely mounted on the piston rod of the cylinder through a bracket 9. The cleaning tank 5 contains an appropriate amount of cleaning fluid for cleaning the quartz boat. The ultrasonic transducer 6 generates high-frequency ultrasonic vibrations in the cleaning fluid, forming microbubbles that quickly burst, generating a powerful impact force, thereby effectively removing dirt and impurities from the surface of the quartz boat. At the same time, a lateral drive device is used to drive the ultrasonic transducer 6 to move laterally within the cleaning tank 5 to expand the cleaning range and improve the cleaning effect. Preferably, the lateral drive device includes a ball screw 7 that is laterally installed through the cleaning tank 5. The screw of the ball screw 7 is rotatably mounted on the cleaning tank 5 through a rotary dynamic seal. The ultrasonic transducer 6 is mounted on the nut of the ball screw 7. A servo motor 14, which is connected to the screw drive of the ball screw 7, is also installed on the cleaning tank 5. The motor shaft of the servo motor 14 is connected to the ball screw 7 via a coupling, which facilitates the precise control of the lateral movement speed and position of the ultrasonic transducer 6 by driving the ball screw 7 to rotate, thereby meeting different cleaning needs. The ultrasonic transducer 6 should be positioned as close as possible to the bottom of the cleaning tank 5, so that the extreme position of the cleaning conveyor belt 3 entering the cleaning tank 5 is also a certain distance from the ultrasonic transducer 6. At the same time, when the cleaning conveyor belt 3 and the quartz boat enter the cleaning tank 5, it is only necessary to ensure that the quartz boat is submerged below the surface of the cleaning liquid to ensure safety. To ensure the reliability and stability of the movement of the ultrasonic transducer 6, a slider 12 is installed on the nut of the ball screw 7, and a transverse slide rail 13 that slides with the slider 12 is provided on the inner wall of the cleaning tank 5. The cooperation between the slider 12 and the transverse slide rail 13 provides a stable guiding effect for the transverse movement of the ultrasonic transducer 6.

[0018] To achieve the drying process of the quartz boat, a drying chamber 10 is mounted on the frame 1 and fitted onto the output conveyor belt 4. Openings are provided on both sides of the drying chamber 10 to facilitate the output conveyor belt 4 in moving the quartz boat in and out of the drying chamber 10. Several hot air generating devices 11 for drying the quartz boat are installed on the top of the drying chamber 10. When the output conveyor belt 4 moves the quartz boat inside the drying chamber 10, the hot air generating devices 11 generate hot air and evenly blow the hot air onto the surface of the quartz boat, ensuring that all parts of the quartz boat are thoroughly dried. Preferably, 3-5 hot air generating devices 11 are provided, and the 3-5 hot air generating devices 11 are evenly distributed from one side of the drying chamber 10 to the other side of the drying chamber 10, which facilitates multi-stage hot air blowing drying treatment of the quartz boat and ensures the drying effect. The hot air generating devices 11 are installed at an angle on the drying chamber 10, and the air outlet of the hot air generating device 11 is set towards the side of the washing conveyor belt 3, so that the hot air blows towards the quartz boat at a certain angle, increasing the contact area between the hot air and the quartz boat and improving the drying effect. More preferably, the hot air generating device 11 is a hot air blower. The hot air blower has the advantages of fast heating speed, precise temperature control, and adjustable air volume. It can flexibly adjust the temperature and air volume of the hot air according to the drying needs of the quartz boat to ensure that the drying effect reaches the best.

[0019] In actual use, both the cleaning tank 5 and the drying box 10 are rectangular in shape, which facilitates design, installation and use.

[0020] The quartz boat ultrasonic cleaning and drying integrated machine provided in this application has good cleaning effect and high drying efficiency. Through ultrasonic cleaning technology, it can effectively remove tiny dirt and impurities on the surface of the quartz boat, improving the cleanliness and quality of the quartz boat. Secondly, the use of hot air for uniform drying can quickly and thoroughly dry the quartz boat, avoiding the impact of residual moisture on subsequent use. It provides an efficient and reliable solution for cleaning and drying quartz boats, with broad application prospects and market potential.

[0021] Its actual working process is as follows: 1. The operator places the quartz boats to be cleaned sequentially at the starting end of the input conveyor belt 2; Pay attention to the placement direction and spacing of the quartz boats to ensure that they do not collide or tilt during transportation; 2. Start the input conveyor belt 2. The input conveyor belt 2 will start running and smoothly transport the quartz boat in front to the cleaning conveyor belt 3. During the transport process, the operator should observe the transport status of the quartz boat. If there is any abnormality, stop the machine and check it in time. 3. Start the lifting power equipment 8. The piston rod of the cylinder extends downward, driving the cleaning conveyor belt 3 and the quartz boat to descend together, so that the quartz boat is slowly immersed in the cleaning liquid in the cleaning tank 5. During the descent, the descent speed should be controlled to avoid collision between the quartz boat and the bottom or side wall of the cleaning tank 5. 4. After the quartz boat is fully immersed in the cleaning solution, start the ultrasonic transducer 6 to work at the set frequency and power to generate high-frequency ultrasonic vibration. At the same time, start the transverse drive device. The servo motor 14 drives the ball screw 7 to rotate, so that the ultrasonic transducer 6 moves laterally in the cleaning tank 5 to expand the cleaning range and thoroughly clean the quartz boat. The cleaning time is set according to the degree of dirt on the quartz boat and the cleaning effect requirements. 5. After the cleaning time is up, turn off the ultrasonic transducer 6 and the horizontal drive device, start the lifting power device 8, the piston rod of the cylinder retracts upward, driving the cleaning conveyor belt 3 and the quartz boat to rise, so that the quartz boat leaves the cleaning tank 5, and the cleaning process is completed. 6. The cleaned quartz boat continues to run along the cleaning conveyor belt 3 until it is sent to the output conveyor belt 4, which smoothly sends the quartz boat into the drying box 10. 7. As the quartz boat moves within the drying chamber 10 along with the output conveyor belt 4, the hot air blower at the top of the drying chamber 10 is activated. The hot air blower heats the air to the set temperature and blows the hot air onto the surface of the quartz boat at a certain volume and angle to dry it thoroughly. 8. The output conveyor belt 4 smoothly transports the dried quartz boat out of the drying box 10, completing the entire cleaning and drying process; Operators receive the quartz boat at the output end of the output conveyor belt 4 and conduct quality inspection. If there are any unqualified products, they need to be cleaned and dried again.

Claims

1. A quartz boat ultrasonic cleaning and drying integrated machine, characterized in that: The system includes a frame, from which an input conveyor belt, a cleaning conveyor belt, and an output conveyor belt are sequentially installed. A cleaning tank for cleaning the quartz boat is located directly below the cleaning conveyor belt. An ultrasonic transducer is installed inside the cleaning tank via a transverse drive device. A lifting power device is mounted on the frame to drive the cleaning conveyor belt up and down, thus moving the quartz boat in and out of the cleaning tank. A drying chamber, fitted onto the output conveyor belt, is mounted on the frame. Openings are provided on both sides of the drying chamber to facilitate the output conveyor belt moving the quartz boat in and out of the drying chamber. Several hot air generators for drying the quartz boat are installed on the top of the drying chamber.

2. The quartz boat ultrasonic cleaning and drying integrated machine according to claim 1, characterized in that: The lateral drive device includes a ball screw that runs laterally through the cleaning tank. The ball screw is rotatably mounted on the cleaning tank via a rotary dynamic seal. An ultrasonic transducer is mounted on the nut of the ball screw. A servo motor that is connected to the ball screw drive is also installed on the cleaning tank.

3. The quartz boat ultrasonic cleaning and drying integrated machine according to claim 2, characterized in that: A slider is also installed on the nut of the ball screw, and a transverse slide rail is provided on the inner wall of the cleaning tank to slide with the slider.

4. The quartz boat ultrasonic cleaning and drying integrated machine according to claim 1, characterized in that: The lifting power equipment is an inverted cylinder, and the cleaning conveyor belt is horizontally mounted on the piston rod of the cylinder via a bracket.

5. The quartz boat ultrasonic cleaning and drying integrated machine according to claim 1, characterized in that: The hot air generating device is provided in 3-5 units, which are evenly distributed from one side of the drying box to the other side.

6. The quartz boat ultrasonic cleaning and drying integrated machine according to claim 1 or 5, characterized in that: The hot air generator is installed at an angle on the drying box, with the air outlet of the hot air generator facing the side of the cleaning conveyor belt.

7. The quartz boat ultrasonic cleaning and drying integrated machine according to claim 1, characterized in that: The hot air generating device is a hot air blower.

8. The quartz boat ultrasonic cleaning and drying integrated machine according to claim 1, characterized in that: The input conveyor belt, cleaning conveyor belt, and output conveyor belt are all Teflon conveyor belts.

9. The quartz boat ultrasonic cleaning and drying integrated machine according to claim 1, characterized in that: Both the cleaning tank and the drying box are rectangular in shape.

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