Window dismounting jig

Abstract

The utility model provides a kind of window dismounting jig, the jig includes seat body, rotating rod, screw rod, pressure head and the bearing table being set in seat body;Seat body includes top plate and bottom plate;Screw rod is inserted into seat body with top plate being penetrated, screw rod is connected with top plate threadedly, and screw rod can reciprocate along the axial direction of seat body;The bottom end of pressure head is connected with screw rod, and the top end of rotating rod is connected with screw rod;Bearing table is set on bottom plate and is oppositely arranged with pressure head;The accommodation space for fixing the window to be dismounted is formed between pressure head and bearing table, bearing table is used to carry the quartz piece of the window to be dismounted, pressure head is used to contact with the base of the window to be dismounted, and pressure head does not contact with the pressing ring of the window to be dismounted.The utility model not only can more conveniently realize the dismounting of window, effectively save time, and in the dismounting process, the parts of window can not be damaged, so that the parts in window can be reused, effectively reduce production cost.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor processing and manufacturing technology, and in particular to a window disassembly fixture. Background Technology

[0002] Modern semiconductor equipment typically includes a viewport for observing the chamber, which needs to be replaced periodically as a consumable. Previously, the entire viewport was removed and replaced. However, for cost reduction, efficiency improvement, and component optimization, the current replacement method involves replacing only the quartz plate facing the chamber within the viewport.

[0003] Please refer to Figure 1 and Figure 2 ,in, Figure 1 This is a schematic diagram of the overall structure of the window; Figure 2 This is a cross-sectional view of the window. For example... Figure 1 and Figure 2 As shown, the viewing window generally includes a base 110, a pressure ring 120, a metal mesh 130, a plastic gasket 140, an acrylic sheet 150, and a quartz sheet 160. The base 110 and the pressure ring 120 are interference-fitted and connected by a pressure ring fixing screw 170. In the prior art, the disassembly steps of the viewing window include: ① removing the chamber fixing screws on the viewing window to remove the entire viewing window from the chamber; ② removing the pressure ring fixing screw 170 on the viewing window; ③ prying up the pressure ring 120; ④ sequentially removing the metal mesh 130, plastic gasket 140, acrylic sheet 150, and quartz sheet 160.

[0004] However, the interference fit between the base 110 and the pressure ring 120 makes the pressure ring 120 difficult to remove. Forceful disassembly can easily damage the pressure ring 120 and the base 110, and the current efficiency of manually disassembling the window is low.

[0005] It should be noted that the information disclosed in the background section of this utility model is intended only to enhance the understanding of the general background of this utility model, and should not be regarded as an admission or in any way implying that the information constitutes prior art known to those skilled in the art. Utility Model Content

[0006] The purpose of this utility model is to provide a window disassembly fixture, which can not only make the disassembly of the window more convenient and save time, but also prevent damage to the various parts of the window during the disassembly process, so that the parts in the window can be reused and effectively reduce production costs.

[0007] To achieve the above objectives, this utility model provides a window disassembly fixture, which includes a base, a rotating rod, a screw, a pressure head, and a support platform disposed within the base. The base is a hollow structure, comprising a top plate and a bottom plate disposed opposite to each other. The screw penetrates the top plate and extends into the base, is threadedly connected to the top plate, and is capable of reciprocating along the axial direction of the base. The pressure head is connected to the bottom end of the screw, and the rotating rod is connected to the top end of the screw. The support platform is disposed on the bottom plate and is disposed opposite to the pressure head. A receiving space for fixing the window to be disassembled is formed between the pressure head and the support platform. The support platform is used to support the quartz plate of the window to be disassembled, and the pressure head is used to contact the base of the window to be disassembled, but does not contact the pressure ring of the window to be disassembled.

[0008] Optionally, the front and / or back of the seat may be provided with windows.

[0009] Optionally, the seat body further includes a first side plate and a second side plate disposed opposite to each other, one side of the top plate being connected to the top of the first side plate, the other side of the top plate being connected to the top of the second side plate, one side of the bottom plate being connected to the bottom of the first side plate, and the other side of the bottom plate being connected to the bottom of the second side plate.

[0010] Optionally, the top plate has a plurality of first mounting holes on one side and a plurality of second mounting holes on the other side. The top of the first side plate has a plurality of third mounting holes and the top of the second side plate has a plurality of fourth mounting holes. The third mounting holes are configured to correspond one-to-one with the first mounting holes and the fourth mounting holes are configured one-to-one with the second mounting holes.

[0011] Optionally, one side of the base plate is provided with a plurality of fifth mounting holes, the other side of the base plate is provided with a plurality of sixth mounting holes, the bottom end of the first side plate is provided with a plurality of seventh mounting holes, and the bottom end of the second side plate is provided with a plurality of eighth mounting holes. The seventh mounting holes are provided in a one-to-one correspondence with the fifth mounting holes, and the eighth mounting holes are provided in a one-to-one correspondence with the sixth mounting holes.

[0012] Optionally, the pressure head has a groove, the opening of which is oriented toward the bearing platform, and the inner diameter of the groove is larger than the outer diameter of the pressure ring and smaller than the outer diameter of the base.

[0013] Optionally, the depth of the groove is greater than the height of the pressure ring.

[0014] Optionally, the inner diameter of the groove is larger than the outer diameter of the support platform.

[0015] Optionally, both the top plate and the screw are made of steel, and there is no lubrication at the connection between the top plate and the screw.

[0016] Optionally, the top end of the screw is connected to the central portion of the rotating rod.

[0017] Compared with the prior art, the window disassembly fixture provided by this utility model has the following unexpected technical effects:

[0018] The present invention provides a window disassembly fixture comprising a base, a rotating rod, a screw, a pressure head, and a support platform disposed within the base. The base is a hollow structure, comprising a top plate and a bottom plate disposed opposite to each other. The screw penetrates the top plate and extends into the base, the screw being threadedly connected to the top plate and capable of reciprocating along the axial direction of the base. The pressure head is connected to the bottom end of the screw, and the rotating rod is connected to the top end of the screw. The support platform is disposed on the bottom plate and is disposed opposite to the pressure head. A receiving space for fixing the window to be disassembled is formed between the pressure head and the support platform. The support platform is used to support the quartz plate of the window to be disassembled, and the pressure head is used to contact the base of the window to be disassembled, but the pressure head does not contact the pressure ring of the window to be disassembled. Therefore, during use, the entire window to be disassembled can be removed from the chamber of the semiconductor device. Then, all the retaining screws on the window to be disassembled are removed. After that, the window to be disassembled is placed on the support platform. Then, the rotating rod is rotated to drive the screw to move the pressure head toward the support platform. Under the downward pressure of the pressure head, the base of the window to be disassembled can move downward relative to the retaining ring of the window to be disassembled, thereby separating the base from the retaining ring and completing the disassembly of the window to be disassembled. Since only the base and the quartz plate are in contact with the window disassembly fixture during the disassembly process, and the metal base has sufficient strength while the quartz plate is a part that needs to be replaced, it can be seen that by using the window disassembly fixture provided by this utility model, not only can the disassembly of the window be achieved more conveniently, effectively saving time, but also no damage is caused to the various parts of the window during the disassembly process, so that the parts in the window can be reused, effectively reducing production costs. Furthermore, the window disassembly fixture provided by this utility model allows the operator to apply a small force to the end of the rotating rod to generate a large torque on the screw. This enables the operator to easily overcome the interference fit friction between the window's pressure ring and the window's base, thereby effectively amplifying human effort and making it possible for the operator to operate with one hand. This greatly reduces the operator's labor intensity and makes it easier for the operator to separate the base from the pressure ring to complete the window disassembly. Attached Figure Description

[0019] Figure 1 This is a schematic diagram of the overall structure of the window.

[0020] Figure 2 This is a cross-sectional view of the window.

[0021] Figure 3 This is a schematic diagram of the overall structure of the window disassembly fixture provided in one embodiment of the present invention.

[0022] Figure 4 A schematic diagram of the overall structure of the window disassembly fixture provided in one embodiment of this utility model in use.

[0023] Figure 5 This is a partial structural diagram of the window disassembly fixture provided in one embodiment of the present invention, in its use state.

[0024] Figure 6 This is an exploded view of the window obtained by disassembling it using the window disassembly fixture provided by this utility model.

[0025] Figure 7 A three-dimensional structural diagram of the first side plate in the window disassembly fixture provided in one embodiment of the present invention, viewed from a certain angle.

[0026] Figure 8 A three-dimensional structural diagram of the second side plate in the window disassembly fixture provided in one embodiment of the present invention, viewed from a certain angle.

[0027] Figure 9 A three-dimensional structural diagram of the base plate in a window disassembly fixture provided according to an embodiment of this utility model.

[0028] Figure 10 This is a three-dimensional structural diagram of the first side plate in the window disassembly fixture provided in one embodiment of the present invention, viewed from another perspective.

[0029] Figure 11 This is a three-dimensional structural diagram of the second side plate in the window disassembly fixture provided in one embodiment of the present invention, viewed from another perspective.

[0030] Figure 12 This is a three-dimensional structural diagram of the pressure head in the window disassembly fixture provided in one embodiment of the present invention.

[0031] The reference numerals in the attached drawings are explained as follows: Window to be disassembled - 100; Base - 110; Pressure ring - 120; Metal mesh - 130; Plastic gasket - 140; Acrylic sheet - 150; Quartz sheet - 160; Pressure ring fixing screw - 170; Base body - 200; Top plate - 210; First mounting hole - 211; Second mounting hole - 212; Bottom plate - 220; Fifth mounting hole - 221; Sixth mounting hole - 222; Window - 230; First side plate - 240; Third mounting hole - 241; Seventh mounting hole - 242; Second side plate - 250; Fourth mounting hole - 251; Eighth mounting hole - 252; Rotating rod - 300; Screw - 400; Pressure head - 500; Groove - 510; Support platform - 600. Detailed Implementation

[0032] The following detailed description of the window disassembly fixture proposed by this utility model, in conjunction with the accompanying drawings and specific embodiments, will further illustrate its advantages and features. The advantages and features of this utility model will become clearer from the following description. Please refer to the accompanying drawings for clarity regarding the purpose, features, and advantages of this utility model. It should be understood that the structures, proportions, sizes, etc., depicted in the accompanying drawings are merely for illustrative purposes and to enable those skilled in the art to understand and read the material. They are not intended to limit the implementation conditions of this utility model. Any modifications to the structure, changes in proportions, or adjustments to the size, provided they produce the same or similar effects and achieve the same purpose as this utility model, should still fall within the scope of the technical content disclosed in this utility model. Specific design features of this utility model disclosed herein, including, for example, specific dimensions, orientations, positions, and shapes, will be determined in part by the specific application and usage environment. Furthermore, in the embodiments described below, the same reference numerals are sometimes used across different drawings to denote the same parts or parts having the same function, omitting repeated descriptions. In this specification, similar reference numerals and letters are used to denote similar items, so once an item is defined in one figure, it does not need to be discussed further in subsequent figures.

[0033] It should be noted that, in this document, relational terms such as "first" and "second" are used only to distinguish one entity or operation from another, and do not necessarily require or imply any such actual relationship or order between these entities or operations. Furthermore, the terms "comprising," "including," or any other variations thereof are intended to cover non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements includes not only those elements but also other elements not expressly listed, or elements inherent to such a process, method, article, or apparatus. Without further limitations, an element defined by the phrase "comprising one..." does not exclude the presence of other identical elements in the process, method, article, or apparatus that includes said element. The singular forms “a,” “an,” and “the” include plural objects. The term “or” is generally used to mean “and / or,” the term “several” is generally used to mean “at least one,” and the term “at least two” is generally used to mean “two or more.” Furthermore, the terms “first,” “second,” and “third” are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of technical features indicated.

[0034] In the description of this utility model, it should be understood that the terms "center," "longitudinal," "transverse," "length," "width," "thickness," "upper," "lower," "front," "rear," "left," "right," "vertical," "horizontal," "top," "bottom," "inner," "outer," "axial," "radial," and "circumferential," etc., indicating orientation or positional relationships, are based on the orientation or positional relationships shown in the accompanying drawings and are only for the convenience of describing this utility model and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific orientation, or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of this utility model. In the description of this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing" should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components. Those skilled in the art can understand the specific meaning of the above terms in this utility model based on the specific circumstances. Furthermore, in this utility model, unless otherwise explicitly specified and limited, "above" or "below" the second feature can include direct contact between the first and second features, or contact between the first and second features through another feature between them. Moreover, "above," "over," and "on top" of the second feature includes the first feature directly above or diagonally above the second feature, or simply indicates that the first feature is at a higher horizontal level than the second feature. "Below," "below," and "under" the second feature includes the first feature directly below or diagonally below the second feature, or simply indicates that the first feature is at a lower horizontal level than the second feature.

[0035] The core idea of ​​this utility model is to provide a window disassembly fixture, which can not only make the disassembly of the window more convenient and save time, but also prevent damage to the various parts of the window during the disassembly process, so that the parts in the window can be reused and effectively reduce production costs.

[0036] Please refer to Figures 3 to 5 ,in, Figure 3 A schematic diagram of the overall structure of the window disassembly fixture provided in one embodiment of this utility model; Figure 4 A schematic diagram of the overall structure of the window disassembly fixture provided in use according to an embodiment of the present utility model; Figure 5 This is a partial structural diagram of the window disassembly fixture provided in one embodiment of the present invention, in its use state. Figures 3 to 5As shown, the window disassembly fixture provided by this utility model includes a base 200, a rotating rod 300, a screw 400, a pressure head 500, and a support platform 600 disposed within the base 200. The base 200 has a hollow structure and includes a top plate 210 and a bottom plate 220 disposed opposite to each other. The screw 400 penetrates the top plate 210 to extend into the base 200. The screw 400 is threadedly connected to the top plate 210, and the screw 400 can reciprocate along the axial direction of the base 200. The pressure head 500 and the screw 400... The bottom end of the screw 400 is connected to the top end of the rotating rod 300; the support platform 600 is disposed on the base plate 220 and is disposed opposite to the pressure head 500; a receiving space for fixing the window 100 to be disassembled is formed between the pressure head 500 and the support platform 600; the support platform 600 is used to support the quartz plate 160 of the window 100 to be disassembled; the pressure head 500 is used to contact the base 110 of the window 100 to be disassembled; and the pressure head 500 does not contact the pressure ring 120 of the window 100 to be disassembled.

[0037] Therefore, during use, the entire window 100 to be disassembled can be removed from the chamber of the semiconductor device. Then, all the retaining screws 170 on the window 100 are removed. Next, the window 100 is placed on the support platform 600. Then, the rotating rod 300 is rotated to drive the screw 400, causing the pressure head 500 to move towards the support platform 600. Under the downward pressure of the pressure head 500, the base 110 of the window 100 can move downwards relative to the retaining ring 120 of the window 100, thereby... The base 110 is separated from the pressure ring 120 to complete the disassembly of the window 100 to be disassembled. During the disassembly process, only the base 110 and the quartz plate 160 are in contact with the window disassembly fixture. The metal base 110 has sufficient strength, and the quartz plate 160 is a part that needs to be replaced. It can be seen that by using the window disassembly fixture provided by this utility model, not only can the disassembly of the window be realized more conveniently, effectively saving time, but also no damage will be caused to the various parts of the window during the disassembly process. Thus, the parts in the window can be reused, effectively reducing production costs. Furthermore, the window disassembly fixture provided by this utility model allows the operator to apply a small force to the end of the rotating rod 300 to generate a large torque on the screw 400. This enables the operator to easily overcome the interference fit friction between the pressure ring 120 of the window and the base 110 of the window, thereby effectively amplifying human effort and making it possible for the operator to operate with one hand. This greatly reduces the operator's labor intensity and makes it easier for the operator to separate the base 110 from the pressure ring 120 to complete the disassembly of the window.

[0038] It should be noted that, as those skilled in the art will understand, the top plate 210 is provided with a threaded hole (not shown in the figure) that extends through its entire thickness, and the screw 400 passes through the threaded hole through the top plate 210 and is threadedly connected to the top plate 210. It should also be noted that the outer diameter of the support platform 600 is smaller than the inner diameter of the base 110. Therefore, by setting the outer diameter of the support platform 600 to be smaller than the inner diameter of the base 110, it can be ensured that when the quartz plate 160 of the window to be disassembled 100 is placed on the support platform 600 without tilting or shifting, the base 110 of the window to be disassembled 100 is suspended in the air. This ensures that as the pressure head 500 moves downward with the screw 400, the base 110 of the window to be disassembled 100 can move downward relative to the pressure ring 120 of the window to be disassembled 100 under the downward pressure of the pressure head 500, thereby separating the base 110 from the pressure ring 120 and completing the disassembly of the window to be disassembled 100. Please continue to refer to Figure 6 This is an exploded view of the window obtained by disassembling it using the window disassembly fixture provided by this utility model. Figure 6 As shown, by using the window disassembly fixture provided by this utility model, the quartz plate 160 can be removed without damaging other parts of the window.

[0039] In some exemplary embodiments, both the top plate 210 and the screw 400 are made of steel, and the connection between the top plate 210 and the screw 400 is unlubricated. Since the fixture needs to apply significant pressure to overcome the interference fit between the window's pressure ring 120 and the window's base 110 during window disassembly, using high-strength and wear-resistant steel as the material for the top plate 210 and the screw 400 ensures that they will not deform or be damaged under stress. This guarantees that the top plate 210 and the screw 400 can withstand greater forces, thereby effectively improving the reliability and service life of the window disassembly fixture provided by this invention. By setting the connection between the top plate 210 and the screw 400 to be unlubricated, a high static friction coefficient can be maintained between the top plate 210 and the screw 400, which helps to prevent the screw 400 from accidentally slipping or loosening during the force process, allowing the operator to control the movement of the screw 400 more precisely.

[0040] Please continue to refer to this. Figure 3 and Figure 4 ,like Figure 3 and Figure 4As shown, in some exemplary embodiments, the tip of the screw 400 is connected to the central portion of the rotating rod 300. Therefore, by connecting the tip of the screw 400 to the central portion of the rotating rod 300, it can be ensured that the screw 400 only bears torque and vertically downward force, without generating lateral bending moment. This ensures that the screw 400 can move vertically and smoothly downward along the thread, preventing jamming between the screw 400 and the top plate 210 due to uneven force distribution.

[0041] Specifically, assuming that the external thread of the screw 400 and the internal thread of the threaded hole on the top plate 210 are both single-start ordinary triangular threads M16, the arm length of the screw 400 is r=180mm, the mean diameter of the external thread of the screw 400 is d2=14.701mm, the tooth angle of the external thread of the screw 400 is β=30°, the pitch of the external thread of the screw 400 is P=2mm, the number of threads of the external thread of the screw 400 is n=1, and both the screw 400 and the top plate 210 are made of steel, both adopt a non-lubricated design, and the static friction coefficient μ=0.15.

[0042] Since the average pushing force of an adult's single arm is 20kg to 40kg, taking the lower limit of 20kg as an average, the force F applied by the operator... r =20·g=196N, here the gravitational acceleration g is taken as 9.81m / s². 2 The torque T on the screw 400 is T=r·F r Due to the friction angle between the screw 400 and the top plate 210 The helix angle of the screw 400 The force on the window When r = 180 mm, d² = 14.701 mm, P = 2 mm, β = 30°, n = 1, μ = 0.15, F r When g = 196 N, the force F on the window can be calculated to be 22002 N, which is approximately equal to the human force F applied by the operator. r It is 112 times that of the original. Therefore, by using the window disassembly fixture provided by this utility model, the manpower can be amplified and the direction of force can be reversed, making it easier for the operator to remove the pressure ring 120, thus completing the window disassembly quickly and without damage.

[0043] Please continue to refer to this. Figure 3 and Figure 4 ,like Figure 3 and Figure 4As shown, in some exemplary embodiments, the base 200 has windows 230 on both its front and back sides. Therefore, by providing windows 230 on both the front and back sides of the base 200, the operator can easily confirm through the windows 230 whether the window 100 to be disassembled is correctly placed on the support platform 600 when placing it. This ensures that when the screw 400 and the pressure head 500 are driven downward by rotating the rotating rod 300, the pressure head 500 can contact the base 110 of the window 100 to be disassembled, but not the pressure ring 120 of the window 100, thereby effectively preventing damage to parts due to improper placement of the window 100. Furthermore, by providing windows 230 on both the front and back of the base 200, the overall weight of the base 200 can be reduced, making the window disassembly fixture provided by this utility model lighter and more convenient to transport and handle.

[0044] Please continue to refer to this. Figure 3 and Figure 4 ,like Figure 3 and Figure 4 As shown, in some exemplary embodiments, the seat 200 further includes a first side plate 240 and a second side plate 250 disposed opposite to each other, one side of the top plate 210 is connected to the top end of the first side plate 240, the other side of the top plate 210 is connected to the top end of the second side plate 250, one side of the bottom plate 220 is connected to the bottom end of the first side plate 240, and the other side of the bottom plate 220 is connected to the bottom end of the second side plate 250.

[0045] Therefore, this arrangement forms a frame-like structure pedestal 200 that provides stable support, ensuring that the pedestal 200 has high torsional stiffness to effectively prevent wobbling during use. This further improves the stability of the window disassembly fixture provided by this invention during use, effectively ensuring that the window disassembly fixture will not damage the window components during disassembly. Furthermore, this arrangement allows for the formation of windows 230 on both the front and back of the pedestal 200, effectively reducing the overall weight of the pedestal 200. This makes the window disassembly fixture provided by this invention lighter and easier to transport and handle.

[0046] Please continue to refer to this. Figure 3 , Figure 7 and Figure 8 ,in, Figure 7 A three-dimensional structural diagram of the first side plate 240 in a window disassembly fixture provided according to an embodiment of the present utility model from a certain perspective. Figure 8 This is a three-dimensional structural diagram of the second side plate 250 in a window disassembly fixture provided according to an embodiment of the present invention, viewed from a certain angle. Figure 3 , Figure 7 and Figure 8 As shown, in some exemplary embodiments, the top plate 210 has a plurality of first mounting holes 211 on one side and a plurality of second mounting holes 212 on the other side. The top of the first side plate 240 has a plurality of third mounting holes 241, and the top of the second side plate 250 has a plurality of fourth mounting holes 251. The third mounting holes 241 are configured in a one-to-one correspondence with the first mounting holes 211, and the fourth mounting holes 251 are configured in a one-to-one correspondence with the second mounting holes 212.

[0047] Therefore, by providing a plurality of first mounting holes 211 on one side of the top plate 210 and a plurality of third mounting holes 241 corresponding to the first mounting holes 211 on the top of the first side plate 240, a detachable connection between the first side plate 240 and the top plate 210 can be achieved by installing a first fastener (not shown in the figure) in each set of corresponding first mounting holes 211 and third mounting holes 241; by providing a plurality of second mounting holes 212 on the other side of the top plate 210 and a plurality of fourth mounting holes 251 corresponding to the second mounting holes 212 on the top of the second side plate 250, a detachable connection between the second side plate 250 and the top plate 210 can be achieved by installing a second fastener (not shown in the figure) in each set of corresponding second mounting holes 212 and fourth mounting holes 251.

[0048] It should be noted that, as those skilled in the art will understand, at least one of the first mounting hole 211 and the third mounting hole 241 has internal threads on its inner wall, and the first fastener can be a screw with external threads. At least one of the second mounting hole 212 and the fourth mounting hole 251 has internal threads on its inner wall, and the second fastener can be a screw with external threads.

[0049] Please continue to refer to this. Figure 3 , Figure 7 and Figure 8 ,like Figure 3 , Figure 7 and Figure 8As shown, in some exemplary embodiments, the plurality of first mounting holes 211 are equally spaced from each other, the plurality of second mounting holes 212 are equally spaced from each other, the plurality of third mounting holes 241 are equally spaced from each other, and the plurality of fourth mounting holes 251 are equally spaced from each other. This arrangement further improves the stability of the base 200, thereby further ensuring the stability of the window disassembly fixture provided by this invention during use, and further ensuring that no damage is caused to the various parts of the window during disassembly.

[0050] Please continue to refer to this. Figures 9 to 11 ,in, Figure 9 A three-dimensional structural diagram of the base plate 220 in the window disassembly fixture provided in one embodiment of this utility model; Figure 10 A three-dimensional structural diagram of the first side plate 240 in the window disassembly fixture provided in one embodiment of the present utility model from another perspective. Figure 11 This is a three-dimensional structural diagram of the second side plate 250 in a window disassembly fixture provided according to one embodiment of the present invention, viewed from another perspective. (See diagram below.) Figures 9 to 11 As shown, in some exemplary embodiments, the base plate 220 has a plurality of fifth mounting holes 221 on one side and a plurality of sixth mounting holes 222 on the other side. The bottom end of the first side plate 240 has a plurality of seventh mounting holes 242, and the bottom end of the second side plate 250 has a plurality of eighth mounting holes 252. The seventh mounting holes 242 are configured in a one-to-one correspondence with the fifth mounting holes 221, and the eighth mounting holes 252 are configured in a one-to-one correspondence with the sixth mounting holes 222.

[0051] Therefore, by providing a plurality of fifth mounting holes 221 on one side of the base plate 220 and a plurality of seventh mounting holes 242 corresponding to the fifth mounting holes 221 on the bottom end of the first side plate 240, a detachable connection between the base plate 220 and the first side plate 240 can be achieved by installing a third fastener (not shown in the figure) in each set of corresponding fifth mounting holes 221 and seventh mounting holes 242; by providing a plurality of sixth mounting holes 222 on the other side of the base plate 220 and a plurality of eighth mounting holes 252 corresponding to the sixth mounting holes 222 on the bottom end of the second side plate 250, a detachable connection between the base plate 220 and the second side plate 250 can be achieved by installing a fourth fastener (not shown in the figure) in each set of corresponding seventh mounting holes 242 and eighth mounting holes 252.

[0052] It should be noted that, as those skilled in the art will understand, at least one of the fifth mounting hole 221 and the seventh mounting hole 242 has internal threads on its inner wall, and the third fastener can be a screw with external threads. At least one of the sixth mounting hole 222 and the eighth mounting hole 252 has internal threads on its inner wall, and the fourth fastener can be a screw with external threads.

[0053] Please continue to refer to this. Figures 9 to 11 ,like Figures 9 to 11 As shown, in some exemplary embodiments, the plurality of fifth mounting holes 221 are equally spaced from each other, the plurality of sixth mounting holes 222 are equally spaced from each other, the plurality of seventh mounting holes 242 are equally spaced from each other, and the plurality of eighth mounting holes 252 are equally spaced from each other. This arrangement further improves the stability of the base 200, thereby further ensuring the stability of the window disassembly fixture provided by this invention during use, and further ensuring that no damage is caused to the various parts of the window during disassembly.

[0054] Please continue to refer to this. Figure 5 and Figure 12 ,in, Figure 12 This is a three-dimensional structural diagram of the pressure head 500 in a window disassembly fixture provided according to an embodiment of the present invention. Figure 5 and Figure 12 As shown, in some exemplary embodiments, the pressure head 500 has a groove 510, the opening of which is oriented toward the bearing platform 600, and the inner diameter of the groove 510 is larger than the outer diameter of the pressure ring 120 and smaller than the outer diameter of the base 110. Therefore, by providing a groove 510 on the pressure head 500 with an opening facing the direction of the support platform 600 and an inner diameter larger than the outer diameter of the pressure ring 120 and smaller than the outer diameter of the base 110, it can be effectively ensured that when the screw 400 and the pressure head 500 are driven to move downward by rotating the rotating rod 300, the pressure head 500 can contact the base 110 of the window to be disassembled 100, but not the pressure ring 120 of the window to be disassembled 100. This effectively ensures that the base 110 of the window to be disassembled 100 can move downward relative to the pressure ring 120 of the window to be disassembled 100 under the downward pressure of the pressure head 500, thereby separating the base 110 from the pressure ring 120 to complete the disassembly of the window to be disassembled 100.

[0055] Please continue to refer to this. Figure 5 ,like Figure 5As shown, in some exemplary embodiments, the depth of the groove 510 is greater than the height of the pressure ring 120. Since the base 110 of the window to be disassembled 100 needs to move downwards a certain distance to completely disengage from the pressure ring 120 during the disassembly process, by setting the depth of the groove 510 on the pressure head 500 to be greater than the height of the pressure ring 120, it can be effectively ensured that the pressure ring 120 of the window to be disassembled will not touch the top of the groove 510 during the downward movement of the pressure head 500 following the screw 400. This effectively ensures that the window disassembly fixture provided by this utility model will not damage the parts of the window during the disassembly process.

[0056] Please continue to refer to this. Figure 5 ,like Figure 5 As shown, in some exemplary embodiments, the inner diameter of the groove 510 is larger than the outer diameter of the support platform 600. Therefore, by setting the inner diameter of the groove 510 to be larger than the outer diameter of the support platform 600, it can be ensured that the support platform 600 will not obstruct the pressure head 500 as it moves downward following the screw 400. This ensures that, as the pressure head 500 moves downward following the screw 400, the base 110 of the window to be disassembled can move downward relative to the pressure ring 120 of the window to be disassembled under the downward pressure of the pressure head 500, thereby allowing the base 110 to separate from the pressure ring 120, thus completing the disassembly of the window to be disassembled 100.

[0057] In summary, compared with the prior art, the window disassembly fixture provided by this utility model has the following unexpected technical effects:

[0058] The viewing window disassembly fixture provided by this utility model includes a base 200, a rotating rod 300, a screw 400, a pressure head 500, and a support platform 600 disposed within the base 200. The base 200 has a hollow structure and includes a top plate 210 and a bottom plate 220 disposed opposite to each other. The screw 400 penetrates the top plate 210 and extends into the base 200. The screw 400 is threadedly connected to the top plate 210, and the screw 400 can reciprocate along the axial direction of the base 200. The pressure head 500 is connected to the bottom end of the screw 400. The rotating rod 300 is connected to the top end of the screw 400; the support platform 600 is disposed on the base plate 220 and is opposite to the pressure head 500; a receiving space for fixing the window 100 to be disassembled is formed between the pressure head 500 and the support platform 600, the support platform 600 is used to support the quartz plate 160 of the window 100 to be disassembled, the pressure head 500 is used to contact the base 110 of the window 100 to be disassembled, and the pressure head 500 does not contact the pressure ring 120 of the window 100 to be disassembled, so that during use, the window to be disassembled can be fixed first. The entire window 100 is detached from the semiconductor device chamber. Then, all the retaining screws 170 on the window 100 to be detached are removed. The window 100 is then placed on the support platform 600. The rotating rod 300 is rotated to drive the screw 400, which in turn moves the pressure head 500 toward the support platform 600. Under the downward pressure of the pressure head 500, the base 110 of the window 100 to be detached can move downward relative to the retaining ring 120 of the window 100 to be detached, thereby allowing the base 110 to... 0 separates from the pressure ring 120 to complete the disassembly of the window 100 to be disassembled. During the disassembly process, only the base 110 and the quartz plate 160 are in contact with the window disassembly fixture. The metal base 110 has sufficient strength, and the quartz plate 160 is a part that needs to be replaced. It can be seen that by using the window disassembly fixture provided by this utility model, not only can the disassembly of the window be realized more conveniently, effectively saving time, but also the various parts of the window will not be damaged during the disassembly process, so that the parts in the window can be reused, effectively reducing production costs. Furthermore, the window disassembly fixture provided by this utility model allows the operator to apply a small force to the end of the rotating rod 300 to generate a large torque on the screw 400. This enables the operator to easily overcome the interference fit friction between the pressure ring 120 of the window and the base 110 of the window, thereby effectively amplifying human effort and making it possible for the operator to operate with one hand. This greatly reduces the operator's labor intensity and makes it easier for the operator to separate the base 110 from the pressure ring 120 to complete the disassembly of the window.

[0059] It should be noted that in the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of this utility model. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0060] It should also be noted that the above description is only a description of the preferred embodiment of this utility model and is not intended to limit the scope of this utility model in any way. Any changes or modifications made by those skilled in the art based on the above disclosure are within the protection scope of this utility model. Obviously, those skilled in the art can make various modifications and variations to this utility model without departing from the spirit and scope of this utility model. Therefore, if these modifications and variations fall within the scope of this utility model and its equivalents, this utility model also intends to include these modifications and variations.

Claims

1. A window disassembly fixture, characterized in that, It includes a base, a rotating rod, a screw, a pressure head, and a support platform disposed within the base; The base is a hollow structure, and the base includes a top plate and a bottom plate arranged opposite to each other; The screw passes through the top plate and extends into the seat body. The screw is threadedly connected to the top plate and can reciprocate along the axial direction of the seat body. The pressure head is connected to the bottom end of the screw, and the rotating rod is connected to the top end of the screw; The support platform is disposed on the base plate and is positioned opposite to the pressure head; The pressure head and the support platform form a receiving space for fixing the window to be disassembled. The support platform is used to support the quartz plate of the window to be disassembled. The pressure head is used to contact the base of the window to be disassembled, and the pressure head does not contact the pressure ring of the window to be disassembled.

2. The window disassembly fixture according to claim 1, characterized in that, The front and / or back of the seat are provided with windows.

3. The window disassembly fixture according to claim 2, characterized in that, The seat also includes a first side plate and a second side plate arranged opposite to each other. One side of the top plate is connected to the top of the first side plate, and the other side of the top plate is connected to the top of the second side plate. One side of the bottom plate is connected to the bottom of the first side plate, and the other side of the bottom plate is connected to the bottom of the second side plate.

4. The window disassembly fixture according to claim 3, characterized in that, The top plate has multiple first mounting holes on one side and multiple second mounting holes on the other side. The top of the first side plate has multiple third mounting holes and the top of the second side plate has multiple fourth mounting holes. The third mounting holes correspond one-to-one with the first mounting holes and the fourth mounting holes correspond one-to-one with the second mounting holes.

5. The window disassembly fixture according to claim 3, characterized in that, The base plate has multiple fifth mounting holes on one side and multiple sixth mounting holes on the other side. The bottom end of the first side plate has multiple seventh mounting holes, and the bottom end of the second side plate has multiple eighth mounting holes. The seventh mounting holes correspond one-to-one with the fifth mounting holes, and the eighth mounting holes correspond one-to-one with the sixth mounting holes.

6. The window disassembly fixture according to claim 1, characterized in that, The pressure head has a groove, the opening of which is oriented toward the bearing platform. The inner diameter of the groove is larger than the outer diameter of the pressure ring and smaller than the outer diameter of the base.

7. The window disassembly fixture according to claim 6, characterized in that, The depth of the groove is greater than the height of the pressure ring.

8. The window disassembly fixture according to claim 6, characterized in that, The inner diameter of the groove is larger than the outer diameter of the support platform.

9. The window disassembly fixture according to claim 1, characterized in that, Both the top plate and the screw are made of steel, and there is no lubrication at the connection between the top plate and the screw.

10. The window disassembly fixture according to claim 1, characterized in that, The top end of the screw is connected to the central part of the rotating rod.

Images