Material feeding and discharging mechanism and wafer beveling machine

Abstract

The utility model provides a kind of feeding and discharging mechanism and wafer chamfering machine, feeding and discharging mechanism includes the double-station manipulator being set on support base surface, double-station manipulator includes: longitudinal movement module, at least part of longitudinal movement module is movably arranged along the first direction perpendicular to support base surface;Intermediate rotary module, the moving part of longitudinal movement module is connected with the fixed part of intermediate rotary module, the rotating part of intermediate rotary module is movably arranged around predetermined axis, predetermined axis is parallel to the first direction;Transverse movement module, the rotating part of intermediate rotary module is connected with the fixed part of transverse movement module, the moving part of transverse movement module is movably arranged along the second direction parallel to support base surface;Two operating arms, two operating arms are spaced apart along the first direction, to solve the problem of lower processing efficiency of wafer chamfering machine in prior art.

Description

Technical Field

[0001] This utility model relates to the field of wafer processing technology, and more specifically, to a loading and unloading mechanism and a wafer chamfering machine. Background Technology

[0002] In the semiconductor manufacturing industry, wafer chamfering and grinding is one of the key steps to ensure chip quality and performance. Existing wafer chamfering machines typically employ single-station or low-station processing methods. In these processes, wafer handling, inspection, grinding, cleaning, and drying often need to be performed sequentially at different stations, and material transfer between these processes is usually handled by a single-station robotic arm equipped with the wafer chamfering machine.

[0003] However, a single-station robotic arm needs to complete a series of processes, including wafer loading, grinding, and unloading, in each processing operation. While loading or unloading wafers, another operation cannot be performed simultaneously, resulting in longer equipment waiting times and reduced processing efficiency. Utility Model Content

[0004] The main purpose of this invention is to provide a loading and unloading mechanism and a wafer chamfering machine to solve the problem of low processing efficiency of existing wafer chamfering machines.

[0005] To achieve the above objectives, according to one aspect of the present invention, a loading and unloading mechanism is provided, comprising a dual-station manipulator disposed on a supporting base. The dual-station manipulator includes: a longitudinal moving module, at least a portion of which is movably disposed along a first direction perpendicular to the supporting base; an intermediate rotating module, the moving part of which is connected to a fixed part of which is rotatably disposed about a predetermined axis parallel to the first direction; a transverse moving module, the rotating part of which is connected to a fixed part of which is movably disposed along a second direction parallel to the supporting base; and two operating arms, which are spaced apart along the first direction. The moving parts of the transverse moving module are respectively connected to one end of each of the two operating arms, and the other end of each operating arm is used for picking up and placing materials.

[0006] Furthermore, the longitudinal movement module includes: a first connecting plate disposed on a support base; a longitudinal drive unit disposed on the first connecting plate; a longitudinal guide assembly with a guide rail disposed on the first connecting plate and the guide rail extending along a first direction; a longitudinal transmission assembly with a lead screw extending along the first direction, the longitudinal drive unit being drivenly connected to the lead screw of the longitudinal transmission assembly to drive the lead screw of the longitudinal transmission assembly to rotate, and the slider of the longitudinal guide assembly being connected to the nut of the longitudinal transmission assembly to move synchronously with the nut of the longitudinal transmission assembly along the lead screw of the longitudinal transmission assembly.

[0007] Furthermore, the longitudinal moving module includes: a second connecting plate, at least one of the slider of the longitudinal guide assembly and the nut of the longitudinal transmission assembly connected to the second connecting plate, and the second connecting plate connected to the fixed part of the intermediate rotating module to drive the intermediate rotating module to move along the first direction.

[0008] Furthermore, the intermediate rotation module includes: an intermediate drive unit disposed on the second connecting plate; and a rotating member, wherein the intermediate drive unit is driven to connect with the rotating member to drive the rotating member to rotate around a predetermined axis, and the rotating member is connected to the fixed part of the transverse moving module.

[0009] Furthermore, the lateral movement module includes: a first lateral drive unit; a third connecting plate, wherein the first lateral drive unit is driven to the third connecting plate to drive the third connecting plate to move along the second direction, and the third connecting plate is connected to both operating arms.

[0010] Furthermore, the lateral movement module includes: an intermediate connecting plate, the rotating part of the intermediate rotating module being connected to the intermediate connecting plate; a second lateral driving part being disposed on the intermediate connecting plate; and a fourth connecting plate, the second lateral driving part being connected to the fourth connecting plate to drive the fourth connecting plate to move along a second direction, and the first lateral driving part being disposed on the fourth connecting plate.

[0011] Furthermore, the lateral movement module includes: a fifth connecting plate, which is disposed on the fourth connecting plate to move with the fourth connecting plate; a first lateral transmission assembly, which is disposed on the fifth connecting plate, wherein the transmission belt of the first lateral transmission assembly extends along a second direction, a first lateral drive unit is driven connected to the drive pulley of the first lateral transmission assembly to drive the drive pulley of the first lateral transmission assembly to rotate, and the transmission belt of the first lateral transmission assembly is connected to a third connecting plate to drive the third connecting plate to move; and a first lateral guide assembly, wherein the guide rail of the first lateral guide assembly extends along a second direction and is disposed on the fifth connecting plate, and the slider of the first lateral guide assembly is connected to the third connecting plate.

[0012] Furthermore, the lateral movement module includes: a second lateral transmission assembly, the rack of which extends along a second direction and is disposed on an intermediate connecting plate; a second lateral drive unit is driven to be connected to the gear of the second lateral transmission assembly to drive the gear of the second lateral transmission assembly to rotate and move along the rack of the second lateral transmission assembly with the gear of the second lateral transmission assembly; and a second lateral guide assembly, the guide rail of which is disposed on the intermediate connecting plate and extends along a second direction; and a slider of the second lateral guide assembly is connected to a fourth connecting plate.

[0013] Furthermore, each operating arm includes a strip arm and two carrying arms, with the two carrying arms spaced apart. The first end of the strip arm is connected to the moving part of the lateral movement module, and the first ends of the two carrying arms are respectively connected to the second end of the strip arm. The second ends of the two carrying arms extend away from the strip arm for picking up and placing materials.

[0014] Furthermore, the loading and unloading mechanism also includes a first hopper assembly, a second hopper assembly, and a transfer device. The transfer device is mounted on the support base and located on one side of the dual-station robot arm. The first hopper assembly is mounted above the transfer device, and the second hopper assembly is mounted on the side of the transfer device closer to the dual-station robot arm.

[0015] Furthermore, the loading and unloading mechanism also includes a first hopper assembly, a second hopper assembly, and a transfer device. The transfer device is mounted on the support base and located on one side of the dual-station robot. The first hopper assembly is mounted above the transfer device, and the second hopper assembly is mounted on the side of the transfer device closer to the dual-station robot. The transfer device is used to transfer materials between the first hopper assembly and the dual-station robot, and the dual-station robot is used to place unqualified materials into the second hopper assembly.

[0016] Furthermore, the loading and unloading mechanism also includes: a transfer device, which is set on the support base and located on the side of the dual-station robot away from the transfer device, for transferring materials between the dual-station robot and the processing device; and a detection device, which is set between the transfer device, the dual-station robot and the transfer device, for detecting whether the materials are qualified before and after processing.

[0017] Further, the transfer device includes: a transfer frame disposed on a support base; a lateral movement assembly disposed within the transfer frame and at least partially movably disposed along a fifth direction parallel to the support base; and a transfer robot, the movable end of the lateral movement assembly being connected to the fixed end of the transfer robot, at least a portion of the transfer robot being movably disposed along a sixth direction parallel to the support base and a first direction perpendicular to the support base, and rotatably disposed about the first direction for picking up and placing materials.

[0018] Furthermore, the transverse movement assembly includes: a fixed plate, which is installed within the transfer frame; a transverse movement transmission assembly, which is movably disposed within the transfer frame along the fifth direction; a transverse movement drive unit, which is installed on the fixed plate and drivenly connected to the transverse movement transmission assembly to drive the transverse movement transmission assembly to move; a transverse movement guide assembly, whose guide rail is installed on the fixed plate, and whose slider is connected to the transverse movement transmission assembly to guide the movement of the transverse movement transmission assembly; and a transverse movement plate, which is connected to the transverse movement transmission assembly to drive the transverse movement plate to move along the fifth direction, and a transfer robot is installed on the transverse movement plate to move along the fifth direction with the transverse movement plate.

[0019] Furthermore, the transfer robot includes: a first moving module, at least a portion of which is movably disposed along a first direction; a rotating module, the moving part of the first moving module being connected to the fixed part of the rotating module, the rotating part of the rotating module being rotatably disposed about a predetermined axis parallel to the first direction; a second moving module, the rotating part of the rotating module being connected to the fixed part of the second moving module, the moving part of the second moving module being movably disposed along a sixth direction; and a pick-and-place arm, the moving part of the second moving module being connected to one end of the pick-and-place arm, the other end of which is used for picking up and placing materials.

[0020] According to another aspect of the present invention, a wafer chamfering machine is provided, including a processing device and the above-mentioned loading and unloading mechanism, wherein the processing device is disposed on one side of the loading and unloading mechanism.

[0021] Applying the technical solution of this utility model, the loading and unloading mechanism of this utility model includes a dual-station robot arm disposed on a supporting base. The dual-station robot arm includes a longitudinal moving module, at least a portion of which is movably disposed along a first direction perpendicular to the supporting base; a middle rotating module, the moving part of which is connected to the fixed part of which is connected, and the rotating part of which is rotatably disposed around a predetermined axis parallel to the first direction; a transverse moving module, the rotating part of which is connected to the fixed part of which is connected, and the moving part of which is movably disposed along a second direction parallel to the supporting base; and two operating arms, which are spaced apart along the first direction. The moving part of each of the two operating arms is connected to one end of the two operating arms, and the other end of each operating arm is used for picking up and placing materials. Technically, this utility model, through the combination of the longitudinal moving module, the middle rotating module, and the transverse moving module, achieves precise movement and positioning of the dual-station robot arm in three-dimensional space. This design ensures the high efficiency and accuracy of loading and unloading operations. In principle, the drive units and transmission components of each module of this invention work together to achieve precise movement of the operating arm. Simultaneously, the rotating part of the intermediate rotating module rotates around a predetermined axis, ensuring flexible picking and placing of the operating arm in the vertical direction. In terms of effectiveness, this dual-station robotic arm can handle loading and unloading simultaneously, solving the problem of low processing efficiency in existing wafer chamfering machines and reducing waiting time. Attached Figure Description

[0022] The accompanying drawings, which form part of this specification, are used to provide a further understanding of this utility model. The illustrative embodiments and descriptions of this utility model are used to explain this utility model and do not constitute an undue limitation thereof. In the drawings:

[0023] Figure 1 A partial structural schematic diagram of an embodiment of the loading and unloading mechanism according to the present invention is shown;

[0024] Figure 2 It shows Figure 1 A magnified view of part A of the loading and unloading mechanism shown;

[0025] Figure 3 It shows Figure 1 The diagram shows the structure of a dual-station robotic arm in one direction for the loading and unloading mechanism.

[0026] Figure 4 It shows Figure 3 The diagram shows the structure of the dual-station robot in another direction.

[0027] Figure 5 It shows Figure 1A schematic diagram of the transfer device of the loading and unloading mechanism shown;

[0028] Figure 6 It shows Figure 5 The diagram shows the structure of the transfer robot in one direction of the transfer device.

[0029] Figure 7 It shows Figure 6 The diagram shown is a structural schematic of the transfer robot in another direction;

[0030] Figure 8 It shows Figure 6 The diagram shows the structure of the transfer robot in another direction.

[0031] Figure 9 It shows Figure 6 The diagram shows the structure of the transfer robot as it moves along the first direction.

[0032] Figure 10 A schematic diagram of an embodiment of the wafer chamfering machine according to the present invention is shown.

[0033] The above figures include the following reference numerals:

[0034] 81. Transfer frame;

[0035] 82. Lateral movement assembly; 821. Fixed plate; 822. Lateral movement transmission assembly; 8221. Driving pulley; 8222. Driven pulley; 8223. Transmission belt; 823. Lateral movement drive unit; 824. Lateral movement guide assembly; 825. Lateral movement plate; 826. Limiting part;

[0036] 83. Transfer robot; 831. First moving module; 8311. First base plate; 8312. First drive unit; 8313. First guide assembly; 8314. Lead screw and nut assembly; 8315. Second base plate; 8316. Second drive unit; 8317. Third base plate; 832. Rotating module; 8321. Rotating drive unit; 8322. Rotating disk; 833. Second moving module; 8331. Third drive unit; 8332. Fourth base plate; 834. Pick-and-place arm; 8341. Connecting arm; 8342. Pick-and-place arm;

[0037] 91. Longitudinal moving module; 911. First connecting plate; 912. Longitudinal drive unit; 913. Longitudinal guide assembly; 914. Longitudinal transmission assembly; 915. Second connecting plate; 92. Intermediate rotating module; 921. Intermediate drive unit; 922. Rotating component; 93. Lateral moving module; 931. First lateral drive unit; 932. Third connecting plate; 933. Intermediate connecting plate; 934. Second lateral guide assembly; 935. First lateral transmission assembly; 936. Second lateral transmission assembly; 937. First lateral guide assembly; 938. Fourth connecting plate; 939. Fifth connecting plate; 94. Operating arm; 941. Strip arm; 942. Loading arm;

[0038] 100. First hopper assembly; 200. Second hopper assembly; 300. Transfer device; 400. Dual-station robot; 500. Detection device; 600. Transfer device; 700. Processing device. Detailed Implementation

[0039] It should be noted that, where there is no conflict, the embodiments and features in the embodiments of this utility model can be combined with each other. The present utility model will now be described in detail with reference to the accompanying drawings and embodiments.

[0040] like Figures 1 to 10 As shown, this utility model provides a loading and unloading mechanism, including a dual-station robot 400 disposed on a supporting base. The dual-station robot 400 includes a longitudinal moving module 91, at least a portion of which is movably disposed along a first direction perpendicular to the supporting base; an intermediate rotating module 92, the moving part of which is connected to the fixed part of which is rotatably disposed around a predetermined axis parallel to the first direction; a transverse moving module 93, the rotating part of which is connected to the fixed part of which is movably disposed along a second direction parallel to the supporting base; and two operating arms 94, which are spaced apart along the first direction. The moving parts of the transverse moving module 93 are connected to one end of each of the two operating arms 94, and the other end of each operating arm 94 is used for picking up and placing materials.

[0041] Technically, this invention achieves precise movement and positioning of a dual-station robotic arm in three-dimensional space through the combination of a longitudinal movement module 91, a central rotation module 92, and a transverse movement module 93. This design ensures high efficiency and accuracy in loading and unloading operations. In principle, the drive units and transmission components of each module work together to achieve precise movement of the operating arm 94. Simultaneously, the rotating part of the central rotation module rotates around a predetermined axis, ensuring flexible loading and unloading of the operating arm 94 in the vertical direction. In terms of effectiveness, this dual-station robotic arm can handle loading and unloading simultaneously, solving the problem of low processing efficiency in existing wafer chamfering machines and reducing waiting time.

[0042] like Figures 2 to 4 As shown, the longitudinal movement module 91 includes a first connecting plate 911 disposed on a support base; a longitudinal drive unit 912 disposed on the first connecting plate 911; a longitudinal guide assembly 913 with its guide rail disposed on the first connecting plate 911 and extending along a first direction; and a longitudinal transmission assembly 914 with its lead screw extending along the first direction. The longitudinal drive unit 912 is driven to the lead screw of the longitudinal transmission assembly 914 to drive the lead screw of the longitudinal transmission assembly 914 to rotate. The slider of the longitudinal guide assembly 913 is connected to the nut of the longitudinal transmission assembly 914 to move synchronously with the nut of the longitudinal transmission assembly 914 along the lead screw of the longitudinal transmission assembly 914.

[0043] Technically, this invention achieves precise movement of the nut along the lead screw through a drive connection between the longitudinal drive unit and the longitudinal transmission assembly. This structure ensures the high efficiency and stability of the longitudinal movement module. In principle, the guide rail and slider of the longitudinal guide assembly provide guidance and limits for the nut, ensuring straightness and smoothness during movement. Functionally, the longitudinal movement module in this invention can precisely control the vertical movement of the operating arm, providing stable and reliable support for wafer loading and unloading.

[0044] like Figures 2 to 4 As shown, the longitudinal moving module 91 includes a second connecting plate 915, at least one of the slider of the longitudinal guide assembly 913 and the nut of the longitudinal transmission assembly 914 is connected to the second connecting plate 915, and the second connecting plate 915 is connected to the fixed part of the intermediate rotating module 92 to drive the intermediate rotating module 92 to move along the first direction.

[0045] Technically, the second connecting plate in this invention makes the connection between the longitudinal moving module and the intermediate rotating module more stable, while ensuring the vertical translation of the intermediate rotating module, thus enhancing the flexibility and adaptability of the equipment. In principle, the second connecting plate acts as a connector, transmitting the movement of the longitudinal moving module to the intermediate rotating module, achieving linkage between them. In terms of effectiveness, this embodiment, through the use of the second connecting plate, ensures the stability and accuracy of the operating arm during wafer pick-and-place operations. Figures 2 to 4 As shown, the intermediate rotation module 92 includes an intermediate drive unit 921, which is disposed on the second connecting plate 915; and a rotating member 922. The intermediate drive unit 921 is driven to rotate the rotating member 922 around a predetermined axis. The rotating member 922 is connected to the fixed part of the transverse movement module 93.

[0046] Technically, the intermediate drive unit of this invention is connected to the drive of the rotating component, enabling the rotating component to rotate around a predetermined axis. This design ensures flexible picking and placing of the operating arm in the vertical direction. In principle, the intermediate drive unit of this invention transmits power to the rotating component, enabling it to rotate precisely. In terms of effect, the intermediate rotation module in this invention enables the operating arm to rotate in the vertical direction, improving the processing efficiency and accuracy of the wafer chamfering machine.

[0047] like Figures 2 to 4 As shown, the lateral movement module 93 includes a first lateral drive unit 931, the rotating part of the intermediate rotation module 92 is connected to the first lateral drive unit 931, and a third connecting plate 932. The first lateral drive unit 931 and the third connecting plate 932 are driven to drive the third connecting plate 932 to move along the second direction, and the third connecting plate 932 is connected to the operating arm 94.

[0048] Technically, the first lateral drive unit of this invention is connected to the third connecting plate, enabling the horizontal movement of the operating arm. This design ensures efficient wafer transfer within the wafer chamfering machine. In principle, the first lateral drive unit transmits power to the third connecting plate, allowing it to move precisely in the horizontal direction. Effectively, the lateral movement module in this invention enables rapid horizontal positioning of the operating arm, improving the processing speed and accuracy of the equipment.

[0049] like Figures 2 to 4As shown, the lateral movement module 93 includes: an intermediate connecting plate 933, the rotating part of the intermediate rotating module 92 is connected to the intermediate connecting plate 933; a second lateral driving part is disposed on the intermediate connecting plate 933; and a fourth connecting plate 938, the second lateral driving part is connected to the fourth connecting plate 938 to drive the fourth connecting plate 938 to move along the second direction, and a first lateral driving part 931 is disposed on the fourth connecting plate 938.

[0050] Technically, this invention achieves indirect driving of the first lateral drive unit and the operating arm through the cooperation of the intermediate connecting plate and the second lateral drive unit. In principle, the second lateral drive unit drives the fourth connecting plate to move, and the first lateral drive unit moves accordingly, thereby driving the operating arm to move horizontally. In terms of effectiveness, the technology in this invention enhances the modular design of the wafer chamfering machine, facilitating its maintenance and upgrades.

[0051] like Figures 2 to 4 As shown, the lateral movement module 93 includes: a fifth connecting plate 939, which is disposed on the fourth connecting plate 938 and moves with the fourth connecting plate 938; a first lateral transmission assembly 935, which is disposed on the fifth connecting plate 939, with a transmission belt extending along a second direction; a first lateral drive unit 931, which is driven connected to the drive pulley of the first lateral transmission assembly 935 to drive the drive pulley of the first lateral transmission assembly 935 to rotate; a transmission belt of the first lateral transmission assembly 935, which is connected to a third connecting plate 932 to drive the third connecting plate 932 to move; and a first lateral guide assembly 937, whose guide rail extends along the second direction and is disposed on the fifth connecting plate 939, with a slider of the first lateral guide assembly 937 connected to the third connecting plate 932.

[0052] Specifically, the transmission belt of the first transverse transmission assembly 935 is sleeved on the outside of the driving pulley and the driven pulley, and the driving pulley and the driven pulley are spaced apart on the fifth connecting plate 939 along the second direction. The guide rail and the slider of the first transverse guide assembly 937 are slidably connected.

[0053] Technically, the combination of the first lateral transmission component and the first lateral guide component of this invention achieves smooth and precise movement of the operating arm. In principle, the first lateral drive unit of this invention drives the drive pulley of the first lateral transmission component 935 to rotate, and the transmission belt of the first lateral transmission component 935 drives the third connecting plate to move along the guide rail. The slider of the first lateral guide component 937 slides on the guide rail of the first lateral guide component 937, ensuring the stability of the movement of the transmission belt of the first lateral transmission component 935. In terms of effect, the technology in this invention improves the positioning accuracy during wafer processing and reduces wafer offset during movement.

[0054] like Figures 2 to 4 As shown, the lateral movement module 93 includes: a second lateral transmission assembly 936, the rack of the second lateral transmission assembly 936 extending along a second direction and disposed on an intermediate connecting plate 933, a second lateral drive unit being connected to the gear of the second lateral transmission assembly 936 to drive the gear of the second lateral transmission assembly 936 to rotate and move along the rack of the second lateral transmission assembly 936 with the gear of the second lateral transmission assembly 936; and a second lateral guide assembly 934, the guide rail of the second lateral guide assembly 934 being disposed on the intermediate connecting plate 933 and extending along a second direction, and the slider of the second lateral guide assembly 934 being connected to a fourth connecting plate 938.

[0055] Specifically, the gears and racks of the second transverse transmission assembly 936 mesh with each other, and the guide rails and sliders of the second transverse guide assembly 934 are slidably connected.

[0056] Technically, the combination of the second lateral transmission component and the second lateral guide component of this invention achieves indirect driving and guiding of the first lateral drive unit and the operating arm. In principle, the second lateral drive unit of this invention drives the gear to move on the rack, and the slider slides on the guide rail, ensuring stable movement of the first lateral drive unit and the operating arm. In terms of effect, the technology in this invention improves the positioning speed and accuracy in wafer processing and optimizes the spatial layout of the equipment. Furthermore, the technical problems of improving drive efficiency and reducing maintenance costs can be solved by using ball screw or belt drives.

[0057] like Figures 2 to 4 As shown, each operating arm 94 includes a strip arm 941 and two carrying arms 942. The two carrying arms 942 are spaced apart. The first end of the strip arm 941 is connected to the moving part of the lateral movement module 93. The first ends of the two carrying arms 942 are respectively connected to the second end of the strip arm 941. The second ends of the two carrying arms 942 extend in a direction away from the strip arm 941 for picking up and placing materials.

[0058] The manipulator arm 94 in this invention achieves stable wafer handling via vacuum adsorption. In terms of effectiveness, this invention enables the dual-station robotic arm 400 to stably handle wafers, reducing wafer handling time and significantly improving the processing cycle of the wafer chamfering machine. Furthermore, by increasing the suction control of the manipulator arm 94, it can adapt to handling wafers of different thicknesses and hardnesses, solving the compatibility issues during wafer handling.

[0059] like Figures 1 to 10 As shown, the loading and unloading mechanism also includes a first hopper assembly 100, a second hopper assembly 200, and a transfer device 300. The transfer device 300 is disposed on the support base and located on one side of the dual-station robot 400. The first hopper assembly 100 is disposed above the transfer device 300, and the second hopper assembly 200 is disposed on the side of the transfer device 300 near the dual-station robot 400. The transfer device 300 is used to transfer materials between the first hopper assembly 100 and the dual-station robot 400, and the dual-station robot 400 is used to place unqualified materials in the second hopper assembly 200.

[0060] Technically, this invention achieves efficient wafer storage and transfer by setting up a first hopper assembly, a second hopper assembly, and a transfer device. This design ensures the continuity and automation of loading and unloading operations. In principle, the transfer device of this invention acts as a connection point, enabling automatic material transfer. In terms of effectiveness, the hopper assembly and transfer device in this invention enable automatic wafer loading and unloading, reducing manual intervention and improving production efficiency and safety.

[0061] like Figure 10 As shown, the loading and unloading mechanism also includes: a transfer device 600, which is disposed on the support base and located on the side of the dual-station robot 400 away from the transfer device 300, for transferring materials between the dual-station robot 400 and the processing device 700; and a detection device 500, which is disposed between the transfer device 300, the dual-station robot 400 and the transfer device 600, for detecting whether the materials before and after processing are qualified.

[0062] Specifically, the inspection device 500 is used to perform contour inspection on the wafer.

[0063] like Figures 5 to 9As shown, the transfer device includes: a transfer frame 81 disposed on a support base; a transverse component 82 disposed within the transfer frame 81 and at least partially movably disposed along a fifth direction parallel to the support base; and a transfer robot 83, the movable end of the transverse component 82 being connected to the fixed end of the transfer robot 83, at least a portion of the transfer robot 83 being movably disposed along a sixth direction parallel to the support base and a first direction perpendicular to the support base, and rotatably disposed about the first direction, for picking up and placing materials.

[0064] Technically, the transfer frame 81 of this invention serves as the supporting structure for the entire device, providing a stable support foundation and ensuring the accurate operation of the transverse component 82 and the transfer robot 83. The transverse component 82, through its movement within the transfer frame 81, achieves efficient material transfer between different workstations, while the multi-degree-of-freedom design of the transfer robot 83 allows for flexible material handling, adapting to different processing requirements. In principle, the motion control of the transverse component 82 and the transfer robot 83 in this invention ensures high precision and stability. In terms of effectiveness, this invention significantly improves the efficiency and accuracy of material transfer, solves the problem of low processing efficiency in existing wafer chamfering machines, reduces processing waiting time, and enhances the overall processing capacity of the equipment.

[0065] like Figure 5 As shown, the transverse movement assembly 82 includes: a fixed plate 821, which is installed inside the transfer frame 81; a transverse movement transmission assembly 822, which is movably disposed inside the transfer frame 81 along the fifth direction; a transverse movement drive unit 823, which is installed on the fixed plate 821 and drivenly connected to the transverse movement transmission assembly 822 to drive the transverse movement transmission assembly 822 to move; a transverse movement guide assembly 824, whose guide rail is installed on the fixed plate 821, and whose slider is connected to the transverse movement transmission assembly 822 to guide the movement of the transverse movement transmission assembly 822; a transverse movement plate 825, which is connected to the transverse movement transmission assembly 822 to drive the transverse movement plate 825 to move along the fifth direction; and a transfer robot 83, which is installed on the transverse movement plate 825 to move along the fifth direction with the transverse movement plate 825.

[0066] Technically, the design of the transverse component 82 in this invention ensures that the transfer robot 83 can move smoothly along the fifth direction, improving the continuity and efficiency of material transfer. In principle, the transverse drive unit 823 in this invention drives the transverse transmission component 822 to move the transverse plate 825, thereby driving the transfer robot 83 to perform horizontal material transfer. In terms of effect, this invention provides stable horizontal movement capability, enhancing the material handling capacity of the wafer chamfering machine, especially when processing large quantities of wafers, maintaining a high transfer rate.

[0067] like Figure 5 As shown, the transverse transmission assembly 822 includes: a driving pulley 8221, a driven pulley 8222, and a transmission belt 8223. The driving pulley 8221 and the driven pulley 8222 are spaced apart on the fixed plate 821 along the fifth direction. The driving pulley 8221 and the driven pulley 8222 are rotatable relative to the fixed plate 821. The transmission belt 8223 is sleeved on the driving pulley 8221 and the driven pulley 8222. The transverse drive unit 823 is connected to the driving pulley 8221 to drive the driving pulley 8221 to rotate, thereby driving the transmission belt 8223 to move along the fifth direction. The transverse plate 825 is mounted on the transmission belt 8223.

[0068] Technically, the use of the transverse transmission assembly 822 in this invention ensures the smooth movement of the transverse plate 825, improving the continuity and stability of material transfer. In principle, the transverse drive unit 823 in this invention drives the drive pulley 8221, which in turn drives the transmission belt 8223 and the transverse plate 825 to move along the fifth direction, realizing the horizontal transfer of the transfer robot 83. In terms of effectiveness, this invention provides reliable horizontal movement capability, especially when handling heavy or long wafers, maintaining stable transfer speed and accuracy.

[0069] like Figure 5 As shown, the transverse assembly 82 further includes a limiting part 826, which is disposed on the fixed plate 821 and located at one end of the transverse plate 825 in the moving direction, so as to limit the movement of the transverse plate 825.

[0070] Technically, the limiting part 826 of this invention ensures boundary control of the transverse plate 825 during movement, preventing overshoot or collision and improving the safety and reliability of the equipment. In principle, the limiting part 826 of this invention detects the position of the transverse plate 825 through sensing or mechanical means. Once a predetermined position is reached, a stop signal is triggered, achieving precise control of the movement range of the transverse plate 825. In terms of effectiveness, this invention enhances the safety performance of the transverse assembly 82, especially in high-speed operation or emergency situations, effectively preventing excessive movement of the transverse plate 825 and protecting the wafer chamfering machine and wafers from damage.

[0071] like Figures 6 to 9 As shown, the transfer robot 83 includes: a first moving module 831, at least a portion of which is movably disposed along a first direction; a rotating module 832, the moving part of the first moving module 831 being connected to the fixed part of the rotating module 832, the rotating part of the rotating module 832 being rotatably disposed about a predetermined axis parallel to the first direction; a second moving module 833, the rotating part of the rotating module 832 being connected to the fixed part of the second moving module 833, the moving part of the second moving module 833 being movably disposed along a sixth direction; and a pick-and-place arm 834, the moving part of the second moving module 833 being connected to one end of the pick-and-place arm 834, the other end of which is used for picking up and placing materials.

[0072] Technically, the first moving module 831, the rotating module 832, and the second moving module 833 of this invention constitute the three-dimensional motion capability of the transfer robot 83, enabling it to accurately position and pick up / place materials in space. In principle, the motion control of each module in this invention ensures high-precision motion control. In terms of effectiveness, the transfer robot 83 of this invention can respond quickly, improving material handling speed while reducing the risk of wafer damage caused by the movement of the transfer robot 83.

[0073] like Figures 6 to 9 As shown, the first moving module 831 includes: a first substrate 8311; a first driving part 8312, the first driving part 8312 being disposed on the first substrate 8311; a first guide component 8313, the guide rail of the first guide component 8313 being disposed on the first substrate 8311, and the guide rail of the first guide component 8313 extending along a first direction; a lead screw and nut assembly 8314, the lead screw of the lead screw and nut assembly 8314 extending along the first direction; the first driving part 8312 being drivenly connected to the lead screw of the lead screw and nut assembly 8314 to drive the lead screw of the lead screw and nut assembly 8314 to rotate; and the slider of the first guide component 8313 being connected to the nut of the lead screw and nut assembly 8314 to move synchronously with the nut of the lead screw and nut assembly 8314 along the lead screw of the lead screw and nut assembly 8314.

[0074] Technically, the use of the lead screw and nut assembly 8314 in this invention ensures precise positioning and efficient movement of the first moving module 831 in the first direction. In principle, the lead screw and nut assembly 8314 in this invention uses a servo motor to drive the lead screw to rotate, thereby moving the nut along the lead screw to achieve precise linear motion. In terms of effect, this invention provides stable vertical movement, enhancing the overall performance of the transfer robot 83, especially when handling heavy wafers, ensuring sufficient support and stability.

[0075] like Figures 6 to 9 As shown, the first moving module 831 includes: a second substrate 8315, at least one of the slider of the first guide assembly 8313 and the nut of the lead screw nut assembly 8314 connected to the second substrate 8315; a second driving part 8316 disposed on the second substrate 8315; and a third substrate 8317, the second driving part 8316 being drivenly connected to the third substrate 8317 to drive the third substrate 8317 to move along a first direction, and the third substrate 8317 being connected to the fixed part of the rotating module 832 to drive the rotating module 832 to move along the first direction.

[0076] Technically, the introduction of the second substrate 8315 and the third substrate 8317 in this invention increases the movement levels of the first moving module 831, enabling more precise control of vertical movement and increasing the vertical movement distance. It also provides a stable mounting foundation for the subsequent rotating module 832. In principle, the second drive unit 8316 in this invention indirectly controls the vertical movement of the rotating module 832 by driving the third substrate 8317, achieving multi-degree-of-freedom coordinated control. In terms of effect, this invention enhances the vertical flexibility of the transfer robot 83, enabling it to quickly switch positions and improving the adaptability and processing efficiency of the wafer chamfering machine.

[0077] like Figures 6 to 9 As shown, the rotating module 832 includes: a rotating drive unit 8321, which is disposed on the third substrate 8317; and a rotating disk 8322, which is drivenly connected to the rotating drive unit 8321 to drive the rotating disk 8322 to rotate around a predetermined axis. The rotating disk 8322 is connected to the fixed part of the second moving module 833.

[0078] Technically, the combination of the rotation drive unit 8321 and the rotating disk 8322 in this invention endows the transfer robot 83 with rotational capability in a first direction, enabling it to pick up and place wafers at different angles. In principle, the rotation drive unit 8321 in this invention drives the rotating disk 8322 to rotate via a motor, achieving wafer rotational positioning. In terms of effectiveness, this invention allows the transfer robot 83 to adapt to various motion requirements, avoiding positional errors in the wafer processing.

[0079] like Figures 6 to 9 As shown, the second moving module 833 includes: a third driving part 8331, the rotating part of the rotating module 832 is connected to the third driving part 8331; and a fourth substrate 8332, the third driving part 8331 is drivingly connected to the fourth substrate 8332 to drive the fourth substrate 8332 to move along the sixth direction, and the fourth substrate 8332 is connected to the pick-and-place arm 834.

[0080] Technically, the addition of the second moving module 833 in this invention enables the transfer robot 83 to move in a direction parallel to the supporting base, expanding its operating range. In principle, the third drive unit 8331 in this invention drives the fourth substrate 8332 via a servo motor, achieving precise horizontal movement of the pick-and-place arm 834. In terms of effect, this invention improves the horizontal movement speed and accuracy of the transfer robot 83, enabling it to transfer wafers faster, reducing processing waiting time, and increasing the utilization rate of the wafer chamfering machine.

[0081] like Figures 6 to 9 As shown, the pick-and-place arm 834 includes a connecting arm 8341 and two pick-and-place arms 8342, which are spaced apart. The first end of the connecting arm 8341 is connected to the moving part of the second moving module 833, and the first ends of the two pick-and-place arms 8342 are respectively connected to the second end of the connecting arm 8341. The second ends of the two pick-and-place arms 8342 extend in a direction away from the connecting arm 8341 for picking up and placing materials.

[0082] The pick-and-place arm 8342 in this invention achieves stable wafer pick-and-place via vacuum adsorption. In terms of effectiveness, this invention enables the transfer robot 83 to stably pick up and place wafers, reducing wafer pick-and-place time and significantly improving the processing cycle of the wafer chamfering machine. Furthermore, by increasing the suction control of the pick-and-place arm 8342, it can adapt to the pick-and-place of wafers of different thicknesses and hardnesses, solving the compatibility problem during wafer pick-and-place.

[0083] like Figure 10As shown, this utility model provides a wafer chamfering machine, including a processing device 700 and the above-mentioned loading and unloading mechanism, wherein the processing device 700 is disposed on one side of the loading and unloading mechanism.

[0084] Technically, this wafer chamfering machine combines a hopper assembly with a loading / unloading mechanism, achieving automated storage, transfer, and processing of wafers. This design ensures a high level of automation and processing efficiency. In principle, the hopper assembly serves as the wafer storage area, while the loading / unloading mechanism, through a dual-station robotic arm and a transfer device, enables automated transfer of wafers between the hopper assembly and the processing unit 700. In terms of effectiveness, this wafer chamfering machine enables continuous wafer processing, reduces manual intervention, and improves production efficiency and processing accuracy.

[0085] The working process of the loading and unloading mechanism of the wafer chamfering machine of this utility model is as follows:

[0086] (1) No contour inspection process after wafer processing: The wafer to be processed on the pick-and-place arm 834 of the transfer robot 83 is taken away by the upper operating arm 94 of the dual-station robot 400 → The processed wafer on the lower operating arm 94 of the dual-station robot 400 is taken away by the pick-and-place arm 834 of the transfer robot 83 → The pick-and-place arm 834 of the transfer robot 83 places the processed wafer into the material box of the first material box assembly 100.

[0087] (2) After wafer processing, there is a contour inspection process: The processed wafer on the lower operating arm 94 of the dual-station robot 400 is placed on the inspection table of the inspection device 500 by the lower operating arm 94 of the dual-station robot 400 → The wafer inspection component of the inspection device 500 performs contour inspection on the processed wafer → The upper operating arm 94 of the dual-station robot 400 removes the processed wafer from the inspection table of the inspection device 500 → The wafer to be processed on the pick-and-place arm 834 of the transfer robot 83 is placed on the lower operating arm 94 of the dual-station robot 400 by the lower operating arm 94 of the transfer robot 83. The processing wafers that pass inspection on the upper operating arm 94 of the dual-station robot 400 are picked up by the pick-and-place arm 834 of the transfer robot 83. The pick-and-place arm 834 of the transfer robot 83 places the processing wafers that pass inspection into the hopper of the first hopper assembly 100. (In addition, the processing wafers that fail inspection on the upper operating arm 94 of the dual-station robot 400 are placed into the hopper of the second hopper assembly 200 by the upper operating arm 94 of the dual-station robot 400.)

[0088] As can be seen from the above description, the embodiments of this utility model achieve the following technical effects:

[0089] The material feeding mechanism of this utility model includes a dual-station robot 400 disposed on a supporting base. The dual-station robot 400 includes a longitudinal moving module 91, at least a portion of which is movably disposed along a first direction perpendicular to the supporting base; an intermediate rotating module 92, the moving part of which is connected to the fixed part of which is rotatably disposed around a predetermined axis parallel to the first direction; a transverse moving module 93, the rotating part of which is connected to the fixed part of which is movably disposed along a sixth direction parallel to the supporting base; and two operating arms 94, which are spaced apart along the first direction. The moving part of the transverse moving module 93 is connected to one end of each of the two operating arms 94, and the other end of each operating arm 94 is used for picking up and placing materials. Technically, this invention achieves precise movement and positioning of a dual-station robotic arm in three-dimensional space through the combination of a longitudinal movement module 91, a central rotation module 92, and a transverse movement module 93. This design ensures high efficiency and accuracy in loading and unloading operations. In principle, the drive units and transmission components of each module work together to achieve precise movement of the operating arm 94. Simultaneously, the rotating part of the central rotation module rotates around a predetermined axis, ensuring flexible loading and unloading of the operating arm 94 in the vertical direction. In terms of effectiveness, this dual-station robotic arm can handle loading and unloading simultaneously, solving the problem of low processing efficiency in existing wafer chamfering machines and reducing waiting time.

[0090] It should be noted that the terminology used herein is for the purpose of describing particular embodiments only and is not intended to limit the exemplary embodiments according to the present invention. As used herein, the singular form is intended to include the plural form as well, unless the context clearly indicates otherwise. Furthermore, it should be understood that when the terms "comprising" and / or "including" are used in this specification, they indicate the presence of features, steps, operations, devices, components, and / or combinations thereof.

[0091] Unless otherwise specifically stated, the relative arrangement, numerical expressions, and values ​​of the components and steps described in these embodiments do not limit the scope of this invention. It should also be understood that, for ease of description, the dimensions of the various parts shown in the drawings are not drawn to actual scale. Techniques, methods, and devices known to those skilled in the art may not be discussed in detail, but where appropriate, such techniques, methods, and devices should be considered part of the specification. In all examples shown and discussed herein, any specific values ​​should be interpreted as merely exemplary and not as limitations. Therefore, other examples of exemplary embodiments may have different values. It should be noted that similar reference numerals and letters in the following drawings denote similar items; therefore, once an item is defined in one drawing, it need not be further discussed in subsequent drawings.

[0092] In the description of this utility model, it should be understood that the directional terms such as "front, back, up, down, left, right", "horizontal, vertical, horizontal" and "top, bottom" indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description. Unless otherwise stated, these directional terms do not indicate or imply that the device or element referred to must have a specific orientation or be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the scope of protection of this utility model. The directional terms "inner" and "outer" refer to the inner and outer contours of each component itself.

[0093] For ease of description, spatial relative terms such as "above," "on top of," "on the upper surface of," "above," etc., are used herein to describe the spatial positional relationship of a device or feature as shown in the figures to other devices or features. It should be understood that spatial relative terms are intended to encompass different orientations in use or operation beyond the orientation of the device as described in the figures. For example, if the device in the figures were inverted, a device described as "above" or "on top of" other devices or structures would subsequently be positioned as "below" or "under" other devices or structures. Thus, the exemplary term "above" can include both "above" and "below." The device may also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used herein will be interpreted accordingly.

[0094] Furthermore, it should be noted that the use of terms such as "first" and "second" to define components is merely for the purpose of distinguishing the corresponding components. Unless otherwise stated, the above terms have no special meaning and therefore cannot be construed as limiting the scope of protection of this utility model.

[0095] The above description is merely a preferred embodiment of this utility model and is not intended to limit the utility model. Various modifications and variations can be made to this utility model by those skilled in the art. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of this utility model should be included within the protection scope of this utility model.

Claims

1. A loading and unloading mechanism, characterized in that, Includes a dual-station robot (400) mounted on a support base, the dual-station robot (400) comprising: A longitudinal moving module (91), at least a portion of which is movably disposed along a first direction perpendicular to the support base surface; The intermediate rotating module (92) has a moving part of the longitudinal moving module (91) connected to a fixed part of the intermediate rotating module (92). The rotating part of the intermediate rotating module (92) is rotatably arranged around a predetermined axis, which is parallel to the first direction. A transverse moving module (93) is provided, wherein the rotating part of the intermediate rotating module (92) is connected to the fixed part of the transverse moving module (93), and the moving part of the transverse moving module (93) is movably arranged along a second direction parallel to the supporting base surface. Two operating arms (94) are spaced apart along the first direction. The moving part of the lateral moving module (93) is connected to one end of each of the two operating arms (94). The other end of each operating arm (94) is used to pick up and put down materials.

2. The loading and unloading mechanism according to claim 1, characterized in that, The longitudinal movement module (91) includes: The first connecting plate (911) is set on the support base surface; A longitudinal drive unit (912) is disposed on the first connecting plate (911); A longitudinal guide assembly (913) has a guide rail disposed on the first connecting plate (911), and the guide rail of the longitudinal guide assembly (913) extends along the first direction. A longitudinal transmission assembly (914) has a lead screw extending along the first direction. A longitudinal drive unit (912) is connected to the lead screw of the longitudinal transmission assembly (914) to drive the lead screw of the longitudinal transmission assembly (914) to rotate. A slider of a longitudinal guide assembly (913) is connected to the nut of the longitudinal transmission assembly (914) to move synchronously with the nut of the longitudinal transmission assembly (914) along the lead screw of the longitudinal transmission assembly (914).

3. The loading and unloading mechanism according to claim 2, characterized in that, The longitudinal movement module (91) includes: The second connecting plate (915) is connected to at least one of the slider of the longitudinal guide assembly (913) and the nut of the longitudinal transmission assembly (914). The second connecting plate (915) is connected to the fixed part of the intermediate rotating module (92) to drive the intermediate rotating module (92) to move along the first direction.

4. The loading and unloading mechanism according to claim 3, characterized in that, The intermediate rotating module (92) includes: An intermediate drive unit (921) is disposed on the second connecting plate (915); Rotating component (922), the intermediate driving part (921) is driven to connect with the rotating component (922) to drive the rotating component (922) to rotate around the predetermined axis, and the rotating component (922) is connected to the fixed part of the transverse moving module (93).

5. The loading and unloading mechanism according to claim 1, characterized in that, The lateral movement module (93) includes: First transverse drive unit (931); The third connecting plate (932) is driven to be connected to the first transverse driving part (931) so as to drive the third connecting plate (932) to move along the second direction, and the third connecting plate (932) is connected to both operating arms (94).

6. The loading and unloading mechanism according to claim 5, characterized in that, The lateral movement module (93) includes: Intermediate connecting plate (933), the rotating part of the intermediate rotating module (92) is connected to the intermediate connecting plate (933); The second lateral drive unit is disposed on the intermediate connecting plate (933); The fourth connecting plate (938) is connected to the second lateral driving part to drive the fourth connecting plate (938) to move along the second direction, and the first lateral driving part (931) is disposed on the fourth connecting plate (938).

7. The loading and unloading mechanism according to claim 6, characterized in that, The lateral movement module (93) includes: A fifth connecting plate (939) is disposed on the fourth connecting plate (938) and moves with the fourth connecting plate (938); A first transverse transmission assembly (935) is disposed on the fifth connecting plate (939). The transmission belt of the first transverse transmission assembly (935) extends along the second direction. The first transverse drive unit (931) is driven connected to the drive pulley of the first transverse transmission assembly (935) to drive the drive pulley of the first transverse transmission assembly (935) to rotate. The transmission belt of the first transverse transmission assembly (935) is connected to the third connecting plate (932) to drive the third connecting plate (932) to move. A first transverse guide assembly (937) has a guide rail extending along the second direction and disposed on the fifth connecting plate (939), and a slider of the first transverse guide assembly (937) is connected to the third connecting plate (932).

8. The loading and unloading mechanism according to claim 6, characterized in that, The lateral movement module (93) includes: The second transverse transmission assembly (936) has a rack extending along the second direction and disposed on the intermediate connecting plate (933). The second transverse drive unit is connected to the gear drive of the second transverse transmission assembly (936) to drive the gear of the second transverse transmission assembly (936) to rotate and move along the rack of the second transverse transmission assembly (936) with the gear of the second transverse transmission assembly (936). The second lateral guide assembly (934) has a guide rail disposed on the intermediate connecting plate (933) and extends along the second direction, and the slider of the second lateral guide assembly (934) is connected to the fourth connecting plate (938).

9. The loading and unloading mechanism according to claim 1, characterized in that, Each of the aforementioned operating arms (94) includes a strip arm (941) and two carrying arms (942), the two carrying arms (942) being spaced apart. The first end of the strip arm (941) is connected to the moving part of the lateral movement module (93), and the first ends of the two carrying arms (942) are respectively connected to the second end of the strip arm (941). The second ends of the two carrying arms (942) extend in a direction away from the strip arm (941) for picking up and placing materials.

10. The loading and unloading mechanism according to claim 1, characterized in that, The loading and unloading mechanism further includes a first hopper assembly (100), a second hopper assembly (200), and a transfer device (300). The transfer device (300) is disposed on a support base and located on one side of the dual-station robot (400). The first hopper assembly (100) is disposed above the transfer device (300), and the second hopper assembly (200) is disposed on the side of the transfer device (300) near the dual-station robot (400). The transfer device (300) is used to transfer materials between the first hopper assembly (100) and the dual-station robot (400), and the dual-station robot (400) is used to place unqualified materials in the second hopper assembly (200).

11. The loading and unloading mechanism according to claim 10, characterized in that, The loading and unloading mechanism also includes: A transfer device (600) is disposed on a support base and located on the side of the dual-station robot (400) away from the transfer device (300) for transferring materials between the dual-station robot (400) and the processing device (700). The detection device (500) is disposed between the transfer device (300), the dual-station robot (400) and the transfer device (600) to detect whether the materials before and after processing are qualified.

12. The loading and unloading mechanism according to claim 10, characterized in that, The transfer device (300) includes: The transfer frame (81) is set on the support base surface; A transverse component (82) is disposed within the transfer frame (81) and is at least partially movably disposed along a fifth direction parallel to the support base surface; The transfer robot (83) has a moving end of the lateral component (82) connected to a fixed end of the transfer robot (83). At least a portion of the transfer robot (83) is movably arranged along a sixth direction parallel to the support base and a first direction perpendicular to the support base, and is rotatably arranged around the first direction for picking up and placing materials.

13. The loading and unloading mechanism according to claim 12, characterized in that, The lateral movement component (82) includes: A fixing plate (821) is installed inside the transfer frame (81); A transverse transmission assembly (822) is movably disposed within the transfer frame (81) along the fifth direction; A transverse drive unit (823) is mounted on the fixed plate (821) and drivenly connected to the transverse transmission assembly (822) to drive the transverse transmission assembly (822) to move; A transverse guide assembly (824) has a guide rail mounted on the fixed plate (821), and a slider of the transverse guide assembly (824) is connected to the transverse transmission assembly (822) to guide the movement of the transverse transmission assembly (822). A transverse plate (825) is connected to the transverse transmission assembly (822) to drive the transverse plate (825) to move along the fifth direction. The transfer manipulator (83) is mounted on the transverse plate (825) to move along the fifth direction with the transverse plate (825).

14. The loading and unloading mechanism according to claim 12, characterized in that, The transfer robot (83) includes: A first moving module (831) is provided, at least a portion of which is movably disposed along the first direction; A rotating module (832) is provided, wherein the moving part of the first moving module (831) is connected to the fixed part of the rotating module (832), and the rotating part of the rotating module (832) is rotatably arranged around a predetermined axis, the predetermined axis being parallel to the first direction; The second moving module (833) has a rotating part of the rotating module (832) connected to a fixed part of the second moving module (833), and the moving part of the second moving module (833) is movably arranged along the sixth direction; The picking and placing arm (834) has a moving part of the second moving module (833) connected to one end of the picking and placing arm (834), and the other end of the picking and placing arm (834) is used to pick up and place materials.

15. A wafer chamfering machine, characterized in that, It includes a processing device (700) and a loading / unloading mechanism according to any one of claims 1 to 14, wherein the processing device (700) is disposed on one side of the loading / unloading mechanism.

Images