Vacuum suction device of edge lifting carrier

Abstract

The utility model relates to semiconductor product detection equipment technical field especially relates to a kind of vacuum adsorption devices of edge lifting carrier, including vacuum chuck main part, the upper surface of the vacuum chuck main part is horizontally arranged, the upper surface middle part of the vacuum chuck main part is equipped with vacuum adsorption work surface, the edge of the vacuum adsorption work surface is equipped with vacuum seal ring, the upper surface of the vacuum adsorption work surface is projected by the vacuum seal ring, several adsorption holes on the vacuum adsorption work surface, the periphery of the vacuum chuck main part is equipped with multiple jacking avoidance grooves that pass through the upper and lower surfaces of the vacuum chuck main part, lifting pin for moving up and down in vertical direction under the drive of lifting mechanism is equipped in the jacking avoidance groove.The utility model has the beneficial effects that: product is closely, flatly adsorbed;By setting jacking avoidance groove, necessary lifting space is provided for lifting pin, effectively alleviate the negative influence of groove structure to vacuum adsorption uniformity, improve overall fixing effect.

Description

Technical Field

[0001] This utility model relates to the field of semiconductor product testing equipment technology, and in particular to a vacuum adsorption device for an edge lifting carrier. Background Technology

[0002] In highly integrated advanced semiconductor manufacturing, backside contamination has become a key obstacle to yield improvement. As process nodes continue to shrink (e.g., below 7 nanometers), the cleanliness requirements for both the front and back sides of the product become increasingly stringent. Microscopic contaminants adhering to the backside mainly include: submicron particles (from equipment transport or the environment), and metal ion contaminants (such as sodium). + ,K + Cu 2+ These defects originate from chemical residues or cavity peeling, organic residues (photoresist or cleaning solvent volatiles), and unintended thin films (such as oxide layers or polymers). The failure mechanisms caused by these contaminants are complex: particulate matter can cause focal plane shift in the lithography machine, resulting in pattern distortion; metal ions may diffuse to the front-side device area during subsequent high-temperature processes, causing gate oxide breakdown or junction leakage; and organic volatiles may contaminate the lithography machine lens or photomask, leading to repetitive defects. Traditional front-side-centric inspection systems are almost ineffective against these back-side problems, creating a significant blind spot in the process monitoring chain, urgently requiring targeted solutions. Utility Model Content

[0003] The technical problem this invention aims to solve is to provide a vacuum adsorption device for an edge lifting carrier, preventing the lifting mechanism from contacting the non-exempt area of ​​the product on the back, thus greatly reducing the amount of contaminants on the back of the product and meeting the requirements for high cleanliness of the product's back side. Simultaneously, it also takes into account the need for high-precision detection, ensuring to the greatest extent possible that the flatness of the product surface is not affected by the lifting mechanism area during detection.

[0004] The technical solution of this utility model to solve the above-mentioned technical problems is as follows: A vacuum adsorption device for an edge lifting carrier includes a vacuum suction cup body. The upper surface of the vacuum suction cup body is horizontally arranged. A vacuum adsorption working surface is provided in the middle of the upper surface of the vacuum suction cup body. A vacuum sealing ring for placing products is provided at the edge of the vacuum adsorption working surface. The vacuum sealing ring protrudes from the upper surface of the vacuum adsorption working surface. A plurality of adsorption holes are provided on the vacuum adsorption working surface. The adsorption holes are connected to an external vacuum source. A plurality of lifting clearance grooves penetrating the upper and lower surfaces of the vacuum suction cup body are provided around the periphery of the vacuum suction cup body. Lifting pins for moving up and down in the vertical direction under the drive of a lifting mechanism are provided in the lifting clearance grooves.

[0005] The beneficial effects of this utility model are as follows: when the product is placed on the vacuum sealing ring, the external vacuum source creates a uniform atmospheric pressure difference between the product and the vacuum adsorption working surface through the adsorption holes, thereby generating a strong and evenly distributed adsorption force to adsorb the product tightly and flatly; by setting up the lifting clearance groove, the necessary lifting space is provided for the lifting pin, so that it can accurately lift the product before vacuum adsorption starts, or safely remove the product after the test is completed, effectively mitigating the negative impact of the groove structure on the uniformity of vacuum adsorption and improving the overall fixing effect.

[0006] Based on the above technical solution, the present invention can be further improved as follows.

[0007] Furthermore, the lifting clearance groove extends to the inner edge of the vacuum adsorption working surface, and the portion of the vacuum sealing ring located at the lifting clearance groove is recessed inward and disposed along the groove wall of the lifting clearance groove.

[0008] The beneficial effect of adopting the above-mentioned further solution is that the above structure makes the vacuum sealing ring with complete stroke effectively "shield" the influence of the adsorption force attenuation area caused by the lifting clearance groove on the effective adsorption area of ​​the product.

[0009] Furthermore, the depth of the recess in the portion of the vacuum sealing ring located at the lifting clearance groove is less than or equal to 3 mm.

[0010] The beneficial effects of adopting the above-mentioned further solutions are: effectively reducing contact with the back of the product and contaminants on the back; and improving the adsorption effect and detection accuracy compared to conventional lifting devices.

[0011] Furthermore, the number of the lifting clearance slots is three or more.

[0012] The beneficial effects of adopting the above-mentioned further solution are: the setting of more than three lifting clearance slots can enable more than three lifting jacks to lift the product, ensuring the uniformity and stability of the lifting.

[0013] Furthermore, the vacuum suction cup body has a vacuum adsorption chamber inside, the adsorption hole is connected to the vacuum adsorption chamber, and the vacuum adsorption chamber is connected to an external vacuum source.

[0014] The advantage of adopting the above-mentioned further solution is that it facilitates the connection between the adsorption pore and the external vacuum source.

[0015] Furthermore, the bottom of the vacuum suction cup body is provided with multiple vacuum adsorption tubes, each of which is connected to an adsorption hole and is connected to an external vacuum source.

[0016] The advantage of adopting the above-mentioned further solution is that it facilitates the connection between the adsorption pore and the external vacuum source.

[0017] Furthermore, a plurality of support protrusions are fixedly provided on the upper surface of the vacuum adsorption working surface, and the plurality of support protrusions are evenly arranged.

[0018] The beneficial effect of adopting the above-mentioned further solution is that the setting of the support protrusions can support the lower surface of the product and prevent the product from deforming due to negative pressure without affecting the negative pressure adsorption.

[0019] Furthermore, a limiting block for limiting the outer side of the product is fixedly provided on the upper surface of the lifting pin.

[0020] The beneficial effect of adopting the above-mentioned further solution is that when the lifting pin lifts the product, the limiting block is set outside the outer periphery of the product to limit the product.

[0021] Furthermore, the vacuum adsorption working surface is provided with mounting holes for mounting the vacuum suction cup body on an external structure, and bolts are sealed in the mounting holes.

[0022] The beneficial effects of adopting the above-mentioned further solution are: ensuring the sealing performance of the vacuum sealing ring during the vacuum adsorption process, and ensuring the effectiveness of vacuum adsorption.

[0023] Furthermore, a mounting sealing ring protrudes from the periphery of the mounting hole, and the upper surface of the mounting sealing ring is on the same plane as the upper surface of the vacuum sealing ring.

[0024] The advantage of adopting the above-mentioned further solution is that it further avoids the influence of the mounting hole setting on vacuum adsorption. Attached Figure Description

[0025] Figure 1 This is a three-dimensional structural diagram of the present invention; Figure 2 This is a top view of the present invention; The attached diagram lists the components represented by each number as follows: 1. Vacuum suction cup body; 2. Vacuum adsorption working surface; 3. Vacuum sealing ring; 4. Adsorption hole; 5. Lifting clearance groove; 6. Lifting pin; 7. Support protrusion; 8. Limiting block; 9. Mounting hole; 10. Bolt; 11. Mounting sealing ring. Detailed Implementation

[0026] The principles and features of this utility model are described below with reference to the accompanying drawings. The examples given are only for explaining this utility model and are not intended to limit the scope of this utility model.

[0027] like Figure 1 , Figure 2As shown, an embodiment of this utility model includes a vacuum suction cup body 1. The upper surface of the vacuum suction cup body 1 is horizontally arranged. A vacuum adsorption working surface 2 is provided in the middle of the upper surface of the vacuum suction cup body 1. A vacuum sealing ring 3 for placing products is provided at the edge of the vacuum adsorption working surface 2. The vacuum sealing ring 3 protrudes from the upper surface of the vacuum adsorption working surface 2. In this embodiment, the vacuum suction cup body 1 is preferably circular, and the vacuum adsorption working surface is also circular.

[0028] The vacuum adsorption working surface 2 has several adsorption holes 4, which are located in the middle of the vacuum adsorption working surface 2 and are connected to an external vacuum source (vacuum pump). The vacuum suction cup body 1 has multiple lifting clearance grooves 5 that penetrate the upper and lower surfaces of the vacuum suction cup body 1. The number of lifting clearance grooves 5 is three or more. The setting of three or more lifting clearance grooves 5 can enable three or more lifting pins 6 to lift the product, ensuring the uniformity and stability of the lifting. The lifting clearance grooves 5 are equipped with lifting pins 6 that move up and down in the vertical direction under the drive of the lifting mechanism.

[0029] The lifting clearance groove 5 extends to the inner edge of the vacuum adsorption working surface 2. The portion of the vacuum sealing ring 3 located in the lifting clearance groove 5 is recessed inward along the groove wall of the lifting clearance groove 5. Specifically, the depth of the recess of the portion of the vacuum sealing ring 3 located in the lifting clearance groove 5 is less than or equal to 3mm. This structure ensures that the fully-connected vacuum sealing ring 3 effectively "shields" the effect of the adsorption force attenuation area caused by the lifting clearance groove 5 on the effective adsorption area of ​​the product, effectively reducing back-side contact and back-side contaminants. Compared to conventional lifting devices, this improves the adsorption effect and increases detection accuracy.

[0030] In one embodiment of this utility model, the vacuum suction cup body 1 is provided with a vacuum adsorption cavity inside, the adsorption hole 4 is connected to the vacuum adsorption cavity, and the vacuum adsorption cavity is connected to an external vacuum source, which facilitates the connection between the adsorption hole 4 and the external vacuum source.

[0031] In another embodiment of the present invention, the bottom of the vacuum suction cup body 1 is provided with a plurality of vacuum adsorption tubes, the vacuum adsorption tubes are connected to the adsorption holes 4 one by one, and the vacuum adsorption tubes are connected to an external vacuum source.

[0032] Multiple support protrusions 7 are fixedly provided on the upper surface of the vacuum adsorption working surface 2. The multiple support protrusions 7 are evenly arranged. The arrangement of the support protrusions 7 can support the lower surface of the product and prevent the product from deforming due to negative pressure without affecting the negative pressure adsorption.

[0033] In a preferred embodiment of this invention, a limiting block 8 for limiting the outer side of the product is fixedly provided on the upper surface of the lifting pin 6. When the lifting pin 6 lifts the product, the limiting block 8 is located outside the outer periphery of the product to limit its movement.

[0034] The vacuum adsorption working surface 2 is provided with mounting holes 9 for mounting the vacuum suction cup body 1 on an external structure. Bolts 10 are sealed inside the mounting holes 9 to ensure the sealing of the vacuum sealing ring 3 during the vacuum adsorption process and to ensure the effect of vacuum adsorption.

[0035] Preferably, a mounting sealing ring 11 protrudes from the periphery of the mounting hole 9, and the upper surface of the mounting sealing ring 11 is on the same plane as the upper surface of the vacuum sealing ring 3, further avoiding the influence of the mounting hole 9 on vacuum adsorption.

[0036] This invention proposes a vacuum adsorption device for high-precision applications, capable of edge-lifting products. This prevents the lifting mechanism from contacting the back of the product, significantly reducing the amount of contaminants on the back and meeting the high cleanliness requirements of the product's back side. Simultaneously, it also addresses the needs of high-precision testing, ensuring that the flatness of the product surface is not affected by the lifting mechanism area during testing. Conventional lifting devices are located inside the product near the center, where there is no vacuum adsorption, significantly impacting flatness. When the lifting mechanism lowers, it completely avoids the vacuum suction cup, meaning the suction cup's movement is not affected by the lifting mechanism. This greatly reduces the load on the vacuum suction cup's movement axis, significantly improving movement accuracy.

[0037] To achieve high-precision testing results, ensuring the absolute flatness of the product under test on the testing platform is paramount. Any slight warping or deformation can lead to focal plane shift or measurement errors, directly affecting the accuracy of defect identification and dimensional measurement. Therefore, this invention utilizes a vacuum pump to create a negative pressure environment beneath the suction cup, forming a uniform atmospheric pressure difference between the product's bottom surface and the suction cup surface. This generates a strong and evenly distributed adsorption force, tightly and flatly adhering the product to the suction cup's reference surface. Compared to traditional mechanical clamping, this comprehensive adsorption and fixation method significantly improves the uniformity and stability of the product's fixation, minimizing deformation introduced by fixing stress.

[0038] Meanwhile, to meet the needs of automated product loading and unloading, the suction cup structure design typically requires slots of a specific shape in the edge area. This provides the necessary movement space for the lifting pin 6 (or the robotic arm end effector), enabling it to accurately lift the product before vacuum adsorption begins or safely remove the product after inspection. This is done to effectively mitigate the negative impact of the slot structure on the uniformity of vacuum adsorption and improve the overall fixation effect.

[0039] In the description of this utility model, it should be understood that the terms "center", "length", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "inner", "outer", "circumferential", "circumferential", etc., indicate the orientation or positional relationship based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing this utility model and simplifying the description, and do not indicate or imply that the system or element referred to must have a specific orientation, or be constructed and operated in a specific orientation. Therefore, they should not be construed as limitations on this utility model.

[0040] In the description of this utility model, "multiple" means at least two, such as two, three, etc., unless otherwise explicitly specified.

[0041] In this utility model, unless otherwise explicitly specified and limited, the terms "installation," "connection," "joining," and "fixing," etc., should be interpreted broadly. For example, they can refer to a fixed connection, a detachable connection, or an integral part; they can refer to a mechanical connection or an electrical connection; they can refer to a direct connection or an indirect connection through an intermediate medium; they can refer to the internal communication of two components or the interaction between two components, unless otherwise explicitly limited. Those skilled in the art can understand the specific meaning of the above terms in this utility model according to the specific circumstances.

[0042] In the description of this specification, the references to terms such as "one embodiment," "some embodiments," "example," "specific example," or "some examples," etc., indicate that a specific feature, structure, material, or characteristic described in connection with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, the illustrative expressions of the above terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in one or more embodiments or examples. Moreover, without contradiction, those skilled in the art can combine and integrate the different embodiments or examples described in this specification, as well as the features of different embodiments or examples.

[0043] The above description is only a preferred embodiment of the present utility model and is not intended to limit the present utility model. Any modifications, equivalent substitutions, improvements, etc., made within the spirit and principles of the present utility model should be included within the protection scope of the present utility model.

Claims

1. A vacuum adsorption device for an edge lifting vehicle, characterized in that, The device includes a vacuum suction cup body (1), the upper surface of which is horizontally arranged. A vacuum adsorption working surface (2) is provided in the middle of the upper surface of the vacuum suction cup body (1). A vacuum sealing ring (3) for placing products is provided at the edge of the vacuum adsorption working surface (2). The vacuum sealing ring (3) protrudes from the upper surface of the vacuum adsorption working surface (2). Several adsorption holes (4) are provided on the vacuum adsorption working surface (2). The adsorption holes (4) are connected to an external vacuum source. Multiple lifting clearance grooves (5) penetrating the upper and lower surfaces of the vacuum suction cup body (1) are provided around the periphery of the vacuum suction cup body (1). Lifting pins (6) for moving up and down in the vertical direction under the drive of the lifting mechanism are provided in the lifting clearance grooves (5).

2. The vacuum adsorption device for an edge lifting vehicle according to claim 1, characterized in that, The lifting clearance groove (5) extends to the inner edge of the vacuum adsorption working surface (2), and the portion of the vacuum sealing ring (3) located at the lifting clearance groove (5) is recessed inward and set along the groove wall of the lifting clearance groove (5).

3. The vacuum adsorption device for an edge lifting vehicle according to claim 2, characterized in that, The depth of the recess in the portion of the vacuum sealing ring (3) located at the lifting clearance groove (5) is less than or equal to 3 mm.

4. The vacuum adsorption device for an edge lifting vehicle according to claim 1, characterized in that, The number of the lifting clearance slots (5) is three or more.

5. A vacuum adsorption device for an edge lifting vehicle according to any one of claims 1 to 4, characterized in that, The vacuum suction cup body (1) has a vacuum adsorption cavity inside, the adsorption hole (4) is connected to the vacuum adsorption cavity, and the vacuum adsorption cavity is connected to an external vacuum source.

6. A vacuum adsorption device for an edge lifting vehicle according to any one of claims 1 to 4, characterized in that, The bottom of the vacuum suction cup body (1) is provided with multiple vacuum adsorption tubes, which are connected to the adsorption holes (4) one by one, and the vacuum adsorption tubes are connected to an external vacuum source.

7. A vacuum adsorption device for an edge lifting vehicle according to any one of claims 1 to 4, characterized in that, Multiple support protrusions (7) are fixedly provided on the upper surface of the vacuum adsorption working surface (2), and the multiple support protrusions (7) are evenly arranged.

8. A vacuum adsorption device for an edge lifting vehicle according to any one of claims 1 to 4, characterized in that, The upper surface of the lifting pin (6) is fixed with a limiting block (8) for limiting the outer side of the product.

9. A vacuum adsorption device for an edge lifting vehicle according to any one of claims 1 to 4, characterized in that, The vacuum adsorption working surface (2) is provided with mounting holes (9) for mounting the vacuum suction cup body (1) on an external structure, and bolts (10) are sealed inside the mounting holes (9).

10. The vacuum adsorption device for an edge lifting vehicle according to claim 9, characterized in that, The mounting hole (9) is provided with a mounting sealing ring (11) protruding around its periphery. The upper surface of the mounting sealing ring (11) is on the same plane as the upper surface of the vacuum sealing ring (3).

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